CN1614772A - Radiator and producing method thereof - Google Patents
Radiator and producing method thereof Download PDFInfo
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- CN1614772A CN1614772A CN 200310112102 CN200310112102A CN1614772A CN 1614772 A CN1614772 A CN 1614772A CN 200310112102 CN200310112102 CN 200310112102 CN 200310112102 A CN200310112102 A CN 200310112102A CN 1614772 A CN1614772 A CN 1614772A
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- radiator
- tube
- carbon nano
- matrix
- heat sink
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Abstract
The invention consists of a base body, multi heat radiation fins and multi carbon nanotubes. The heat radiation fins are extended from one surface of base body and the carbon nanotubes are formed on another surface of the base body. The multi carbons nanotubes are parallel each other. The manufacturing method includes following steps: a heat radiator with a base body and multi heat radiation fins is provided; the other side of the heat radiator is polished; the catalyst is deposited on it; the carbon source gas is passed over; the carbon nanotubes are grown on one side of radiator base body.
Description
[technical field]
The present invention relates to a kind of Radiator and its preparation method, relate in particular to a kind of Radiator and its preparation method that utilizes carbon nano-tube heat conduction.
[background technology]
In recent years, along with the fast development of semiconductor device integrated technique, the integrated degree of semiconductor device is more and more higher, yet it is more and more littler that device volume but becomes, and its demand to heat radiation is more and more higher, has become a more and more important problem.For satisfying this needs, the fan heat radiation, various radiating modes such as water-cooled auxiliary heat dissipation and heat pipe heat radiation are extensively used, and obtain certain radiating effect, but because of radiator and thermal source (semiconductor integrated device, as CPU) the contact interface out-of-flatness, generally be in contact with one another area less than 2%, a desirable contact interface is not arranged, fundamentally influence the effect of semiconductor device to the heat sink heat, so, traditional radiator by increase the higher thermal interfacial material of a conductive coefficient between radiator and semiconductor device to increase the exposure level at interface, improve the heat transfer effect between semiconductor device and radiator.
Traditional hot boundary material Dispersion of Particles that conductive coefficient is higher in polymeric matrix to form composite material, as graphite, boron nitride, silica, aluminium oxide, silver or other metal etc.The heat conductivility of this kind material depends on the character of polymeric matrix.Be that the composite material of matrix is a liquid state when using because of it wherein with grease, phase-change material, can with the thermal source surface infiltration, so contact heat resistance is less, and be that the contact heat resistance of composite material of carrier is relatively large with silica gel or rubber.The common defects of such material is that whole material conductive coefficient is less, and representative value is 1W/mK, and this can not adapt to the demand of the raising of semiconductor integrated degree to heat radiation.Increase the heat conduction particle content of polymeric matrix, make and be in contact with one another between particle and the particle as far as possible, can increase the conductive coefficient of whole composite material, therefore can reach 4-8W/mK as some special boundary material, yet, when the heat conduction particle content of polymeric matrix increases to a certain degree, can make polymeric matrix lose performance originally, as grease meeting hardening, thereby effect of impregnation may variation, it is harder that rubber also can become, thereby lose due pliability, and this all will make the thermal interfacial material performance reduce greatly.
For improving the performance of thermal interfacial material, improve conductive coefficient, various materials are by wide model test.1991, found carbon nano-tube (specifically referring to Nature, 1991,354,56).To have draw ratio big because of carbon nano-tube, and length can be several thousand times of diameter; The intensity height be 100 times of steel, but weight has only the sixth of steel; The characteristic that toughness and elasticity are splendid, and carbon nano-tube has high thermal conductivity coefficient along its longitudinal direction, makes one of its thermal interfacial material that becomes tool potentiality.Delivering the article of a piece " the remarkable thermal conductance of carbon nano-tube " by name in the AIP points out for " Z " font (10,10) carbon nano-tube at room temperature its conductive coefficient can reach 6600W/mK, specifically can consult document Phys.Rev.Lett, 2000,84,4613.
United States Patent (USP) the 6th, 407 discloses a kind of thermal interfacial materials that utilize carbon nano-tube heat conduction No. 922, and it is mixed polymeric matrix with carbon nano-tube and strikes up partnership, and makes thermal interfacial material by injection molded.But, the thermal interfacial material that this method is made, carbon nano-tube is lack of alignment in basis material, carbon nano-tube is difficult to guarantee in the uniformity that polymeric matrix distributes, and underuse the advantage of the vertical heat conduction of carbon nano-tube, thereby its heat conduction uniformity of prepared thermal interfacial material is not good, and conductive coefficient is not high.
In view of this, providing a kind of can well contact with thermal source, and the radiator at the good thermo-contact of tool interface is real to be necessary.
[summary of the invention]
For solving technical problem of the prior art, the purpose of this invention is to provide the radiator at the good thermo-contact of a kind of tool interface.
Another object of the present invention provides the preparation method of the radiator at the good thermo-contact of a kind of tool interface.
For realizing first purpose of the present invention, the radiator at the good thermo-contact of tool provided by the present invention interface, it comprises a matrix, a plurality of radiating fins extend away from the matrix direction from edge, matrix one surface, and a plurality of carbon nano-tube are formed at another surface of matrix, wherein, these a plurality of carbon nano-tube are substantially parallel to each other and are basically perpendicular to another surface of heat sink.
For realizing another object of the present invention, the preparation method of the good thermo-contact of tool of the present invention interface radiator may further comprise the steps:
One radiator is provided, and this radiator comprises a matrix and a plurality of radiating fin that extends from matrix one surface;
Another surface of polishing heat sink;
Deposited catalyst is in another surperficial b of this heat sink
Feed carbon source gas, in another superficial growth carbon nano-tube of heat sink.
Compare with radiator of the prior art, radiator based on carbon nano-tube provided by the invention has following advantage: one, carbon nano-tube intensity height, toughness and elasticity are splendid, and at longitudinal direction high thermal conductivity coefficient are arranged, and can realize that carbon nano-tube well contacts with the direct of thermal source, increase contact area, greatly improve the heat-conductive characteristic of radiator, and carbon nano-tube is directly to be formed on the heat sink, so need not to add thermal interfacial materials such as any other heat-conducting glue; They are two years old, the carbon nano-tube height can be controlled by controlling its growth time, thickness as thin as a wafer, according to Fourier heat conduction law, be equivalent to increase from another point of view the conductive coefficient of radiator, do not influence simultaneously the volume and the weight of radiator, be beneficial to entire device the needs that develop to miniaturization are installed; Its three, carbon nano-tube makes that perpendicular to heat sink vertical thermal conduction characteristic of carbon nano-tube is brought into play to greatest extent, in addition, because carbon nano-tube is evenly distributed, makes heat conduction consistent more; Its four, the radiator that utilizes method of the present invention to make, the carbon nano-tube that can grow a various shape by the distribution shape of control catalyst is not subjected to the restriction of radiator shape.
[description of drawings]
Fig. 1 is the flow chart of preparation radiator of the present invention.
Fig. 2 is the schematic diagram that the present invention forms the preceding radiator of carbon nano-tube.
Fig. 3 is the schematic diagram that the present invention is formed with the radiator of carbon nano-tube.
Fig. 4 is an Application Of Radiator schematic diagram of the present invention.
[embodiment]
The present invention is described in detail below in conjunction with the accompanying drawings and the specific embodiments.
Please consult Fig. 2 and Fig. 3 earlier, radiator 11 of the present invention, it comprises a long flat plate shape matrix 12, a plurality of sheet radiating fins 14 extend along the direction away from matrix 12 from matrix 12 1 surfaces, and a plurality of carbon nano-tube 18 are formed at relative another surface of matrix 12, i.e. the contact bottom surface 16 of radiator 11.Wherein, matrix 12 is one-body molded with radiating fin 14, and its material is aluminium or copper.A plurality of radiating fin 14 is parallel to each other and vertical with matrix 12.These radiator 11 central authorities are formed with a groove 15 radiating fin 14 are separated into two symmetrical regions, are used to accommodate a buckling device of radiator (figure does not show).A plurality of carbon nano-tube 18 are parallel to each other substantially, and with radiator 11 to contact bottom surface 16 vertical substantially, the diameter of this carbon nano-tube 18 is 3～40 nanometers, highly is 1～100 micron.
See also Fig. 1, the preparation method of radiator of the present invention may further comprise the steps:
Step 10 is for providing a radiator, and this radiator comprises a matrix and a plurality of radiating fin that extends from matrix one Surface Vertical;
Step 20 is done a cmp polishing, and (Chemical Mechanical Polish CMP), makes the surface roughness of contact bottom surface be reduced to 5～10 dusts, and cleans this contact bottom surface on relative another surface (contact bottom surface) of heat sink;
Step 30 deposits a catalyst layer in the contact bottom surface of the radiator of having handled, and the thickness of catalyst layer is 5～30 nanometers, and the method for catalyst layer deposition can be selected the vacuum thermal evaporation volatility process for use, also optional deposited by electron beam evaporation method.The material of catalyst can be selected iron, cobalt, nickel, rhodium or its alloy for use, and present embodiment selects for use iron as catalyst material, and the thickness of its deposition is 10 nanometers;
The radiator 11 that step 40 will have catalyst layer places air, 300 ℃ of down annealing, so that the catalyst layer oxidation, shrink and become nano level catalyst granules.Treat that annealing finishes, the radiator contact bottom surface that will be distributed with catalyst granules again places (figure does not show) in the reative cell, feeds carbon source gas acetylene, utilize the low temperature thermal chemical vapor deposition method, carbon nano-tube on above-mentioned catalyst granules, carbon source gas also can be selected the gas of other carbon containing for use, as ethene etc.Current, the growing method of carbon nano-tube is comparatively ripe, specifically can consult document Science, and 1999,283,512-414 and document J.Am.Chem.Soc, 2001,123,11502-11503.In addition, United States Patent (USP) the 6th, 350 also discloses a kind of method of growing large-area carbon nano pipe array No. 488.The diameter of present embodiment carbon nanotubes grown 18 is 20 nanometers, highly is 50 microns, and spacing is 100 nanometers.
See also Fig. 4, be Application Of Radiator schematic diagram of the present invention.Radiator 31 of the present invention is placed on the electronic device 31, and the carbon nano-tube (figure does not show) of radiator 31 contact bottom surfaces contacts with electronic device 31, by buckling device of radiator 33 radiator 31 is fixed in electronic device 31.The growth that method of the present invention makes has the radiator 31 of carbon nano-tube, it utilizes the carbon nano-tube that is parallel to each other substantially as Heat Conduction Material, carbon nano-tube is arranged in order perpendicular to the contact bottom surface of radiator substantially, can directly contact with electronic device 31, and need not add any other thermal interfacial material, make full use of the axial thermal conductivity of carbon nano-tube, thereby has a preferable conductive coefficient, can be widely used in comprising central processing unit (CPU), power transistor, Video Graphics Array chip (VGA), radio frequency chip can provide a good thermo-contact between electronic device 31 and the radiator 31 in interior electronic device 31.The a plurality of carbon nano-tube height that make because of the present invention are only at micron order, has better pliability, even under the uneven situation in electronic device surface, radiator of the present invention also can guarantee that carbon nano-tube directly contacts with electronic device, can not influence the heat-conductive characteristic of radiator.
Claims (10)
1. a radiator, in order to dissipation from electronic devices to be provided, it comprises: a matrix and a plurality of radiating fin, this radiating fin extends along the direction away from matrix from matrix one surface, it is characterized in that, this radiator further comprises a plurality of carbon nano-tube, and this carbon nano-tube is formed at relative another surface of matrix, and these a plurality of carbon nano-tube are substantially parallel to each other and are basically perpendicular to another surface of heat sink.
2. radiator as claimed in claim 1 is characterized in that, this heat sink and a plurality of radiating fin are one-body molded.
3. radiator as claimed in claim 2 is characterized in that, this matrix and radiating fin material comprise aluminium or copper.
4. radiator as claimed in claim 1 is characterized in that, the height of this carbon nano-tube is 1～100 micron, and the diameter of this carbon nano-tube is 3～40 nanometers.
5. the preparation method of a radiator, it may further comprise the steps:
One radiator is provided, and this radiator comprises a matrix and a plurality of radiating fin that extends from matrix one surface;
Another surface of polishing heat sink;
Deposited catalyst is in another surface of this heat sink;
Feed carbon source gas, in another superficial growth carbon nano-tube of heat sink.
6. the preparation method of radiator as claimed in claim 5 is characterized in that, this finishing method comprises the cmp polishing.
7. the preparation method of radiator as claimed in claim 5 is characterized in that, the surperficial surface roughness of another of this heat sink is 5～10 dusts.
8. the preparation method of radiator as claimed in claim 5 is characterized in that, this catalyst comprises iron, cobalt, nickel, rhodium or its alloy.
9. the preparation method of radiator as claimed in claim 5 is characterized in that, the method for deposited catalyst comprises vacuum thermal evaporation volatility process, electron-beam vapor deposition method.
10. the preparation method of radiator as claimed in claim 5 is characterized in that, the growing method of this carbon nano-tube comprises the low temperature chemical vapor deposition method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2003101121024A CN100364081C (en) | 2003-11-08 | 2003-11-08 | Radiator and producing method thereof |
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| Application Number | Priority Date | Filing Date | Title |
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| CNB2003101121024A CN100364081C (en) | 2003-11-08 | 2003-11-08 | Radiator and producing method thereof |
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| CN1614772A true CN1614772A (en) | 2005-05-11 |
| CN100364081C CN100364081C (en) | 2008-01-23 |
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| CNB2003101121024A Expired - Fee Related CN100364081C (en) | 2003-11-08 | 2003-11-08 | Radiator and producing method thereof |
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Cited By (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100572593C (en) * | 2005-09-13 | 2009-12-23 | 鸿富锦精密工业（深圳）有限公司 | A kind of preparation method of heat abstractor |
| CN1929118B (en) * | 2005-09-05 | 2010-05-26 | 鸿富锦精密工业（深圳）有限公司 | Heat dispersing device and its manufacturing method |
| CN102840488A (en) * | 2012-09-11 | 2012-12-26 | 广东宏泰照明科技有限公司 | LED lamp provided with heat dissipation function |
| US8354593B2 (en) | 2009-07-10 | 2013-01-15 | Nanocomp Technologies, Inc. | Hybrid conductors and method of making same |
| US8722171B2 (en) | 2011-01-04 | 2014-05-13 | Nanocomp Technologies, Inc. | Nanotube-based insulators |
| CN103794444A (en) * | 2012-11-02 | 2014-05-14 | 上海联影医疗科技有限公司 | X-ray tube and preparation method thereof |
| US8847074B2 (en) | 2008-05-07 | 2014-09-30 | Nanocomp Technologies | Carbon nanotube-based coaxial electrical cables and wiring harness |
| US8999285B2 (en) | 2005-07-28 | 2015-04-07 | Nanocomp Technologies, Inc. | Systems and methods for formation and harvesting of nanofibrous materials |
| US9061913B2 (en) | 2007-06-15 | 2015-06-23 | Nanocomp Technologies, Inc. | Injector apparatus and methods for production of nanostructures |
| US9198232B2 (en) | 2008-05-07 | 2015-11-24 | Nanocomp Technologies, Inc. | Nanostructure-based heating devices and methods of use |
| WO2015180135A1 (en) * | 2014-05-30 | 2015-12-03 | Huawei Technologies Co., Ltd. | Heat dissipation structure and synthesizing method thereof |
| US9236669B2 (en) | 2007-08-07 | 2016-01-12 | Nanocomp Technologies, Inc. | Electrically and thermally non-metallic conductive nanostructure-based adapters |
| US9718691B2 (en) | 2013-06-17 | 2017-08-01 | Nanocomp Technologies, Inc. | Exfoliating-dispersing agents for nanotubes, bundles and fibers |
| US10581082B2 (en) | 2016-11-15 | 2020-03-03 | Nanocomp Technologies, Inc. | Systems and methods for making structures defined by CNT pulp networks |
| US11279836B2 (en) | 2017-01-09 | 2022-03-22 | Nanocomp Technologies, Inc. | Intumescent nanostructured materials and methods of manufacturing same |
| US11434581B2 (en) | 2015-02-03 | 2022-09-06 | Nanocomp Technologies, Inc. | Carbon nanotube structures and methods for production thereof |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2880875B2 (en) * | 1993-04-12 | 1999-04-12 | 日本電気株式会社 | Adhesive for electronic devices |
| US5464054A (en) * | 1993-08-09 | 1995-11-07 | Thermalloy, Inc. | Spring clamp and heat sink assembly |
| US6913075B1 (en) * | 1999-06-14 | 2005-07-05 | Energy Science Laboratories, Inc. | Dendritic fiber material |
| JP4433646B2 (en) * | 2001-08-27 | 2010-03-17 | 株式会社デンソー | Heat transfer member covered with carbon fiber |
| US6965513B2 (en) * | 2001-12-20 | 2005-11-15 | Intel Corporation | Carbon nanotube thermal interface structures |
| KR100873630B1 (en) * | 2002-01-16 | 2008-12-12 | 삼성에스디아이 주식회사 | Heat radiator structure and manufacturing method therof |
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2003
- 2003-11-08 CN CNB2003101121024A patent/CN100364081C/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
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| US8999285B2 (en) | 2005-07-28 | 2015-04-07 | Nanocomp Technologies, Inc. | Systems and methods for formation and harvesting of nanofibrous materials |
| US10029442B2 (en) | 2005-07-28 | 2018-07-24 | Nanocomp Technologies, Inc. | Systems and methods for formation and harvesting of nanofibrous materials |
| CN1929118B (en) * | 2005-09-05 | 2010-05-26 | 鸿富锦精密工业（深圳）有限公司 | Heat dispersing device and its manufacturing method |
| CN100572593C (en) * | 2005-09-13 | 2009-12-23 | 鸿富锦精密工业（深圳）有限公司 | A kind of preparation method of heat abstractor |
| US9061913B2 (en) | 2007-06-15 | 2015-06-23 | Nanocomp Technologies, Inc. | Injector apparatus and methods for production of nanostructures |
| US9236669B2 (en) | 2007-08-07 | 2016-01-12 | Nanocomp Technologies, Inc. | Electrically and thermally non-metallic conductive nanostructure-based adapters |
| US9396829B2 (en) | 2008-05-07 | 2016-07-19 | Nanocomp Technologies, Inc. | Carbon nanotube-based coaxial electrical cables and wiring harness |
| US8847074B2 (en) | 2008-05-07 | 2014-09-30 | Nanocomp Technologies | Carbon nanotube-based coaxial electrical cables and wiring harness |
| US9198232B2 (en) | 2008-05-07 | 2015-11-24 | Nanocomp Technologies, Inc. | Nanostructure-based heating devices and methods of use |
| US8354593B2 (en) | 2009-07-10 | 2013-01-15 | Nanocomp Technologies, Inc. | Hybrid conductors and method of making same |
| US8722171B2 (en) | 2011-01-04 | 2014-05-13 | Nanocomp Technologies, Inc. | Nanotube-based insulators |
| US10145627B2 (en) | 2011-01-04 | 2018-12-04 | Nanocomp Technologies, Inc. | Nanotube-based insulators |
| CN102840488A (en) * | 2012-09-11 | 2012-12-26 | 广东宏泰照明科技有限公司 | LED lamp provided with heat dissipation function |
| CN103794444A (en) * | 2012-11-02 | 2014-05-14 | 上海联影医疗科技有限公司 | X-ray tube and preparation method thereof |
| US9718691B2 (en) | 2013-06-17 | 2017-08-01 | Nanocomp Technologies, Inc. | Exfoliating-dispersing agents for nanotubes, bundles and fibers |
| WO2015180135A1 (en) * | 2014-05-30 | 2015-12-03 | Huawei Technologies Co., Ltd. | Heat dissipation structure and synthesizing method thereof |
| US11434581B2 (en) | 2015-02-03 | 2022-09-06 | Nanocomp Technologies, Inc. | Carbon nanotube structures and methods for production thereof |
| US10581082B2 (en) | 2016-11-15 | 2020-03-03 | Nanocomp Technologies, Inc. | Systems and methods for making structures defined by CNT pulp networks |
| US11279836B2 (en) | 2017-01-09 | 2022-03-22 | Nanocomp Technologies, Inc. | Intumescent nanostructured materials and methods of manufacturing same |
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| CN100364081C (en) | 2008-01-23 |
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