CN1426894A - 显示装置、电子仪器和显示装置的制造方法 - Google Patents
显示装置、电子仪器和显示装置的制造方法 Download PDFInfo
- Publication number
- CN1426894A CN1426894A CN02156092A CN02156092A CN1426894A CN 1426894 A CN1426894 A CN 1426894A CN 02156092 A CN02156092 A CN 02156092A CN 02156092 A CN02156092 A CN 02156092A CN 1426894 A CN1426894 A CN 1426894A
- Authority
- CN
- China
- Prior art keywords
- layer
- bank
- display unit
- bank layer
- electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims description 62
- 239000010410 layer Substances 0.000 claims abstract description 578
- 238000002347 injection Methods 0.000 claims abstract description 151
- 239000007924 injection Substances 0.000 claims abstract description 151
- 239000002346 layers by function Substances 0.000 claims abstract description 57
- 238000012546 transfer Methods 0.000 claims description 156
- 239000000758 substrate Substances 0.000 claims description 154
- 239000000470 constituent Substances 0.000 claims description 109
- 230000015572 biosynthetic process Effects 0.000 claims description 68
- 238000012545 processing Methods 0.000 claims description 53
- 238000004519 manufacturing process Methods 0.000 claims description 46
- 238000001035 drying Methods 0.000 claims description 25
- 239000004925 Acrylic resin Substances 0.000 claims description 13
- 229920000178 Acrylic resin Polymers 0.000 claims description 13
- 229920001721 polyimide Polymers 0.000 claims description 13
- 229910010413 TiO 2 Inorganic materials 0.000 claims description 12
- 239000009719 polyimide resin Substances 0.000 claims description 12
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 11
- 238000005507 spraying Methods 0.000 claims 2
- 230000002093 peripheral effect Effects 0.000 abstract description 4
- 239000003990 capacitor Substances 0.000 description 102
- 239000000463 material Substances 0.000 description 73
- 239000000126 substance Substances 0.000 description 63
- 238000007789 sealing Methods 0.000 description 51
- 239000011347 resin Substances 0.000 description 42
- 229920005989 resin Polymers 0.000 description 42
- 238000009832 plasma treatment Methods 0.000 description 33
- 230000014509 gene expression Effects 0.000 description 28
- 239000010408 film Substances 0.000 description 26
- 238000010438 heat treatment Methods 0.000 description 26
- PQXKHYXIUOZZFA-UHFFFAOYSA-M lithium fluoride Chemical compound [Li+].[F-] PQXKHYXIUOZZFA-UHFFFAOYSA-M 0.000 description 20
- 238000000576 coating method Methods 0.000 description 19
- 239000010409 thin film Substances 0.000 description 18
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 16
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 16
- 239000011248 coating agent Substances 0.000 description 16
- 239000001301 oxygen Substances 0.000 description 16
- 229910052760 oxygen Inorganic materials 0.000 description 16
- 239000007788 liquid Substances 0.000 description 15
- 239000002798 polar solvent Substances 0.000 description 15
- 238000001816 cooling Methods 0.000 description 14
- 239000007789 gas Substances 0.000 description 14
- 239000007921 spray Substances 0.000 description 13
- CMXPERZAMAQXSF-UHFFFAOYSA-M sodium;1,4-bis(2-ethylhexoxy)-1,4-dioxobutane-2-sulfonate;1,8-dihydroxyanthracene-9,10-dione Chemical compound [Na+].O=C1C2=CC=CC(O)=C2C(=O)C2=C1C=CC=C2O.CCCCC(CC)COC(=O)CC(S([O-])(=O)=O)C(=O)OCC(CC)CCCC CMXPERZAMAQXSF-UHFFFAOYSA-M 0.000 description 12
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 12
- 238000009413 insulation Methods 0.000 description 11
- 239000011229 interlayer Substances 0.000 description 11
- 238000002360 preparation method Methods 0.000 description 11
- KFZMGEQAYNKOFK-UHFFFAOYSA-N Isopropanol Chemical compound CC(C)O KFZMGEQAYNKOFK-UHFFFAOYSA-N 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 9
- 238000011282 treatment Methods 0.000 description 9
- 238000001704 evaporation Methods 0.000 description 8
- 230000008020 evaporation Effects 0.000 description 8
- 229910052757 nitrogen Inorganic materials 0.000 description 8
- TXEYQDLBPFQVAA-UHFFFAOYSA-N tetrafluoromethane Chemical compound FC(F)(F)F TXEYQDLBPFQVAA-UHFFFAOYSA-N 0.000 description 8
- 229910052782 aluminium Inorganic materials 0.000 description 7
- 239000000203 mixture Substances 0.000 description 7
- 230000003647 oxidation Effects 0.000 description 7
- 238000007254 oxidation reaction Methods 0.000 description 7
- 239000002904 solvent Substances 0.000 description 7
- 229920001187 thermosetting polymer Polymers 0.000 description 7
- FYGHSUNMUKGBRK-UHFFFAOYSA-N 1,2,3-trimethylbenzene Chemical compound CC1=CC=CC(C)=C1C FYGHSUNMUKGBRK-UHFFFAOYSA-N 0.000 description 6
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 6
- YXFVVABEGXRONW-UHFFFAOYSA-N Toluene Chemical compound CC1=CC=CC=C1 YXFVVABEGXRONW-UHFFFAOYSA-N 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 6
- 229910052791 calcium Inorganic materials 0.000 description 6
- 239000011575 calcium Substances 0.000 description 6
- 239000011737 fluorine Substances 0.000 description 6
- 229910052731 fluorine Inorganic materials 0.000 description 6
- 239000011521 glass Substances 0.000 description 6
- -1 phenylenevinylene Chemical group 0.000 description 6
- 239000000049 pigment Substances 0.000 description 6
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 description 5
- 229920001609 Poly(3,4-ethylenedioxythiophene) Polymers 0.000 description 5
- 230000008859 change Effects 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- CTQNGGLPUBDAKN-UHFFFAOYSA-N O-Xylene Chemical compound CC1=CC=CC=C1C CTQNGGLPUBDAKN-UHFFFAOYSA-N 0.000 description 4
- SMWDFEZZVXVKRB-UHFFFAOYSA-N Quinoline Chemical compound N1=CC=CC2=CC=CC=C21 SMWDFEZZVXVKRB-UHFFFAOYSA-N 0.000 description 4
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 4
- 239000004411 aluminium Substances 0.000 description 4
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- MWPLVEDNUUSJAV-UHFFFAOYSA-N anthracene Chemical compound C1=CC=CC2=CC3=CC=CC=C3C=C21 MWPLVEDNUUSJAV-UHFFFAOYSA-N 0.000 description 4
- 238000000151 deposition Methods 0.000 description 4
- 230000008676 import Effects 0.000 description 4
- 238000012423 maintenance Methods 0.000 description 4
- 125000002080 perylenyl group Chemical group C1(=CC=C2C=CC=C3C4=CC=CC5=CC=CC(C1=C23)=C45)* 0.000 description 4
- CSHWQDPOILHKBI-UHFFFAOYSA-N peryrene Natural products C1=CC(C2=CC=CC=3C2=C2C=CC=3)=C3C2=CC=CC3=C1 CSHWQDPOILHKBI-UHFFFAOYSA-N 0.000 description 4
- 239000011241 protective layer Substances 0.000 description 4
- 229910052710 silicon Inorganic materials 0.000 description 4
- 239000010703 silicon Substances 0.000 description 4
- 238000004381 surface treatment Methods 0.000 description 4
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 3
- SECXISVLQFMRJM-UHFFFAOYSA-N N-Methylpyrrolidone Chemical compound CN1CCCC1=O SECXISVLQFMRJM-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 229940125904 compound 1 Drugs 0.000 description 3
- 229940125898 compound 5 Drugs 0.000 description 3
- 239000012141 concentrate Substances 0.000 description 3
- 238000010276 construction Methods 0.000 description 3
- HHNHBFLGXIUXCM-GFCCVEGCSA-N cyclohexylbenzene Chemical compound [CH]1CCCC[C@@H]1C1=CC=CC=C1 HHNHBFLGXIUXCM-GFCCVEGCSA-N 0.000 description 3
- SQNZJJAZBFDUTD-UHFFFAOYSA-N durene Chemical compound CC1=CC(C)=C(C)C=C1C SQNZJJAZBFDUTD-UHFFFAOYSA-N 0.000 description 3
- 238000003682 fluorination reaction Methods 0.000 description 3
- 238000001802 infusion Methods 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000001681 protective effect Effects 0.000 description 3
- 229910052709 silver Inorganic materials 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- KLCLIOISYBHYDZ-UHFFFAOYSA-N 1,4,4-triphenylbuta-1,3-dienylbenzene Chemical compound C=1C=CC=CC=1C(C=1C=CC=CC=1)=CC=C(C=1C=CC=CC=1)C1=CC=CC=C1 KLCLIOISYBHYDZ-UHFFFAOYSA-N 0.000 description 2
- RTZKZFJDLAIYFH-UHFFFAOYSA-N Diethyl ether Chemical compound CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 description 2
- LRHPLDYGYMQRHN-UHFFFAOYSA-N N-Butanol Chemical compound CCCCO LRHPLDYGYMQRHN-UHFFFAOYSA-N 0.000 description 2
- 229920000265 Polyparaphenylene Polymers 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000003064 anti-oxidating effect Effects 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 229910052788 barium Inorganic materials 0.000 description 2
- ZYGHJZDHTFUPRJ-UHFFFAOYSA-N benzo-alpha-pyrone Natural products C1=CC=C2OC(=O)C=CC2=C1 ZYGHJZDHTFUPRJ-UHFFFAOYSA-N 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 2
- 239000004305 biphenyl Substances 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 229940125782 compound 2 Drugs 0.000 description 2
- 235000001671 coumarin Nutrition 0.000 description 2
- VBVAVBCYMYWNOU-UHFFFAOYSA-N coumarin 6 Chemical compound C1=CC=C2SC(C3=CC4=CC=C(C=C4OC3=O)N(CC)CC)=NC2=C1 VBVAVBCYMYWNOU-UHFFFAOYSA-N 0.000 description 2
- 150000004775 coumarins Chemical class 0.000 description 2
- 230000007812 deficiency Effects 0.000 description 2
- 230000002950 deficient Effects 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 239000008393 encapsulating agent Substances 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 125000003983 fluorenyl group Chemical class C1(=CC=CC=2C3=CC=CC=C3CC12)* 0.000 description 2
- NBVXSUQYWXRMNV-UHFFFAOYSA-N fluoromethane Chemical compound FC NBVXSUQYWXRMNV-UHFFFAOYSA-N 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 239000011261 inert gas Substances 0.000 description 2
- 230000010365 information processing Effects 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 239000011147 inorganic material Substances 0.000 description 2
- 229910052741 iridium Inorganic materials 0.000 description 2
- 150000002576 ketones Chemical class 0.000 description 2
- 239000012528 membrane Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- VOFUROIFQGPCGE-UHFFFAOYSA-N nile red Chemical compound C1=CC=C2C3=NC4=CC=C(N(CC)CC)C=C4OC3=CC(=O)C2=C1 VOFUROIFQGPCGE-UHFFFAOYSA-N 0.000 description 2
- 229910052763 palladium Inorganic materials 0.000 description 2
- 238000001259 photo etching Methods 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 229910052697 platinum Inorganic materials 0.000 description 2
- 229920003227 poly(N-vinyl carbazole) Polymers 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- PYWVYCXTNDRMGF-UHFFFAOYSA-N rhodamine B Chemical class [Cl-].C=12C=CC(=[N+](CC)CC)C=C2OC2=CC(N(CC)CC)=CC=C2C=1C1=CC=CC=C1C(O)=O PYWVYCXTNDRMGF-UHFFFAOYSA-N 0.000 description 2
- YYMBJDOZVAITBP-UHFFFAOYSA-N rubrene Chemical compound C1=CC=CC=C1C(C1=C(C=2C=CC=CC=2)C2=CC=CC=C2C(C=2C=CC=CC=2)=C11)=C(C=CC=C2)C2=C1C1=CC=CC=C1 YYMBJDOZVAITBP-UHFFFAOYSA-N 0.000 description 2
- 238000013519 translation Methods 0.000 description 2
- VXQBJTKSVGFQOL-UHFFFAOYSA-N 2-(2-butoxyethoxy)ethyl acetate Chemical compound CCCCOCCOCCOC(C)=O VXQBJTKSVGFQOL-UHFFFAOYSA-N 0.000 description 1
- FPZWZCWUIYYYBU-UHFFFAOYSA-N 2-(2-ethoxyethoxy)ethyl acetate Chemical compound CCOCCOCCOC(C)=O FPZWZCWUIYYYBU-UHFFFAOYSA-N 0.000 description 1
- YEJRWHAVMIAJKC-UHFFFAOYSA-N 4-Butyrolactone Chemical compound O=C1CCCO1 YEJRWHAVMIAJKC-UHFFFAOYSA-N 0.000 description 1
- KRHYYFGTRYWZRS-UHFFFAOYSA-M Fluoride anion Chemical compound [F-] KRHYYFGTRYWZRS-UHFFFAOYSA-M 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 208000034189 Sclerosis Diseases 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000003321 amplification Effects 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 229940126214 compound 3 Drugs 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000004567 concrete Substances 0.000 description 1
- 235000019628 coolness Nutrition 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 description 1
- 239000002198 insoluble material Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 238000003475 lamination Methods 0.000 description 1
- 229920002521 macromolecule Polymers 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 238000006386 neutralization reaction Methods 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 238000000059 patterning Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000002985 plastic film Substances 0.000 description 1
- 229920006255 plastic film Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 238000002203 pretreatment Methods 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000005855 radiation Effects 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 239000011378 shotcrete Substances 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 239000005361 soda-lime glass Substances 0.000 description 1
- 238000000935 solvent evaporation Methods 0.000 description 1
- 239000011877 solvent mixture Substances 0.000 description 1
- 230000002269 spontaneous effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 238000010301 surface-oxidation reaction Methods 0.000 description 1
- 229910052715 tantalum Inorganic materials 0.000 description 1
- 229920005992 thermoplastic resin Polymers 0.000 description 1
- 230000008719 thickening Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/10—OLED displays
- H10K59/12—Active-matrix OLED [AMOLED] displays
- H10K59/122—Pixel-defining structures or layers, e.g. banks
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B33/00—Electroluminescent light sources
- H05B33/10—Apparatus or processes specially adapted to the manufacture of electroluminescent light sources
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/40—Thermal treatment, e.g. annealing in the presence of a solvent vapour
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/50—Forming devices by joining two substrates together, e.g. lamination techniques
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K59/00—Integrated devices, or assemblies of multiple devices, comprising at least one organic light-emitting element covered by group H10K50/00
- H10K59/30—Devices specially adapted for multicolour light emission
- H10K59/35—Devices specially adapted for multicolour light emission comprising red-green-blue [RGB] subpixels
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/12—Deposition of organic active material using liquid deposition, e.g. spin coating
- H10K71/13—Deposition of organic active material using liquid deposition, e.g. spin coating using printing techniques, e.g. ink-jet printing or screen printing
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
- H10K85/113—Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
- H10K85/113—Heteroaromatic compounds comprising sulfur or selene, e.g. polythiophene
- H10K85/1135—Polyethylene dioxythiophene [PEDOT]; Derivatives thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/111—Organic polymers or oligomers comprising aromatic, heteroaromatic, or aryl chains, e.g. polyaniline, polyphenylene or polyphenylene vinylene
- H10K85/115—Polyfluorene; Derivatives thereof
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/10—Organic polymers or oligomers
- H10K85/151—Copolymers
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K85/00—Organic materials used in the body or electrodes of devices covered by this subclass
- H10K85/60—Organic compounds having low molecular weight
- H10K85/615—Polycyclic condensed aromatic hydrocarbons, e.g. anthracene
- H10K85/621—Aromatic anhydride or imide compounds, e.g. perylene tetra-carboxylic dianhydride or perylene tetracarboxylic di-imide
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Electroluminescent Light Sources (AREA)
Abstract
Description
Claims (16)
Applications Claiming Priority (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2001385170 | 2001-12-18 | ||
JP2001385170 | 2001-12-18 | ||
JP2002341375 | 2002-11-25 | ||
JP2002341375A JP3823916B2 (ja) | 2001-12-18 | 2002-11-25 | 表示装置及び電子機器並びに表示装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1426894A true CN1426894A (zh) | 2003-07-02 |
CN1242883C CN1242883C (zh) | 2006-02-22 |
Family
ID=26625126
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB021560927A Expired - Lifetime CN1242883C (zh) | 2001-12-18 | 2002-12-16 | 显示装置、电子仪器和显示装置的制造方法 |
Country Status (5)
Country | Link |
---|---|
US (1) | US6911773B2 (zh) |
JP (1) | JP3823916B2 (zh) |
KR (1) | KR100506353B1 (zh) |
CN (1) | CN1242883C (zh) |
TW (1) | TW571602B (zh) |
Cited By (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102308405A (zh) * | 2009-02-10 | 2012-01-04 | 松下电器产业株式会社 | 发光元件、显示装置以及发光元件的制造方法 |
CN104282712A (zh) * | 2013-07-01 | 2015-01-14 | 三星显示有限公司 | 有机发光显示装置及其制造方法 |
US8946693B2 (en) | 2010-08-06 | 2015-02-03 | Panasonic Corporation | Organic EL element, display device, and light-emitting device |
US9029843B2 (en) | 2010-08-06 | 2015-05-12 | Joled Inc. | Organic electroluminescence element |
US9029842B2 (en) | 2010-08-06 | 2015-05-12 | Joled Inc. | Organic electroluminescence element and method of manufacturing thereof |
Families Citing this family (78)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7038377B2 (en) * | 2002-01-16 | 2006-05-02 | Seiko Epson Corporation | Display device with a narrow frame |
JP2003228302A (ja) * | 2002-02-04 | 2003-08-15 | Toshiba Electronic Engineering Corp | 表示装置及びその製造方法 |
JP2004047215A (ja) | 2002-07-10 | 2004-02-12 | Toshiba Corp | 有機el素子および有機el表示装置 |
AU2003260959A1 (en) * | 2002-09-11 | 2004-04-30 | Semiconductor Energy Laboratory Co., Ltd. | Light-emitting apparatus and fabrication method of the same |
JP2004146796A (ja) * | 2002-09-30 | 2004-05-20 | Seiko Epson Corp | 膜パターンの形成方法、薄膜製造装置、導電膜配線、電気光学装置、電子機器、並びに非接触型カード媒体 |
US6975067B2 (en) * | 2002-12-19 | 2005-12-13 | 3M Innovative Properties Company | Organic electroluminescent device and encapsulation method |
CN100467141C (zh) * | 2003-04-25 | 2009-03-11 | 株式会社半导体能源研究所 | 图形的制作方法和液滴排出装置 |
US7968461B2 (en) * | 2003-10-28 | 2011-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming wiring, method for manufacturing thin film transistor and droplet discharging method |
KR100993826B1 (ko) * | 2003-11-19 | 2010-11-12 | 삼성전자주식회사 | 표시장치 및 이의 제조 방법 |
US8212474B2 (en) * | 2004-01-08 | 2012-07-03 | Samsung Electronics Co., Ltd. | Display device, and method of manufacturing the display device |
US20050153114A1 (en) * | 2004-01-14 | 2005-07-14 | Rahul Gupta | Printing of organic electronic devices |
US7041608B2 (en) * | 2004-02-06 | 2006-05-09 | Eastman Kodak Company | Providing fluorocarbon layers on conductive electrodes in making electronic devices such as OLED devices |
KR20050083062A (ko) * | 2004-02-19 | 2005-08-25 | 삼성전자주식회사 | 표시장치, 이의 제조 방법 및 유기물 적하 장치 |
JP4161956B2 (ja) | 2004-05-27 | 2008-10-08 | セイコーエプソン株式会社 | カラーフィルタ基板の製造方法、電気光学装置の製造方法、電気光学装置、電子機器 |
CN100499047C (zh) * | 2004-08-20 | 2009-06-10 | 松下电器产业株式会社 | 用于形成有机叠层膜的涂液、场效应晶体管的制造方法、及场效应晶体管 |
KR100698689B1 (ko) * | 2004-08-30 | 2007-03-23 | 삼성에스디아이 주식회사 | 발광 표시장치와 그의 제조방법 |
JP4901088B2 (ja) * | 2004-09-29 | 2012-03-21 | 東芝モバイルディスプレイ株式会社 | 有機el表示装置 |
US8063551B1 (en) * | 2004-12-29 | 2011-11-22 | E.I. Du Pont De Nemours And Company | Pixel intensity homogeneity in organic electronic devices |
KR101160840B1 (ko) * | 2005-05-31 | 2012-06-29 | 삼성전자주식회사 | 디스플레이 장치와 그 제조방법 |
TWI332720B (en) * | 2005-07-29 | 2010-11-01 | Kyocera Corp | Organic electrolum9iniscence element and its fabrication method |
GB0517195D0 (en) * | 2005-08-23 | 2005-09-28 | Cambridge Display Tech Ltd | Molecular electronic device structures and fabrication methods |
JP2007095613A (ja) * | 2005-09-30 | 2007-04-12 | Seiko Epson Corp | 有機エレクトロルミネッセンス装置および電子機器 |
KR20070083003A (ko) * | 2006-02-20 | 2007-08-23 | 삼성전자주식회사 | 유기 발광 표시 장치 |
US7667386B2 (en) * | 2006-06-21 | 2010-02-23 | Chunghwa Picture Tubes, Ltd. | Fabricating method of display panel |
JP4274219B2 (ja) * | 2006-09-27 | 2009-06-03 | セイコーエプソン株式会社 | 電子デバイス、有機エレクトロルミネッセンス装置、有機薄膜半導体装置 |
JP2008300612A (ja) | 2007-05-31 | 2008-12-11 | Panasonic Corp | 表示装置及びその製造方法 |
KR101581475B1 (ko) * | 2007-07-31 | 2015-12-30 | 스미또모 가가꾸 가부시키가이샤 | 유기 전계발광 소자 및 그의 제조 방법 |
KR101296656B1 (ko) * | 2008-06-24 | 2013-08-14 | 엘지디스플레이 주식회사 | 유기 발광 표시장치 및 그의 제조 방법 |
KR101352237B1 (ko) * | 2008-08-13 | 2014-01-16 | 엘지디스플레이 주식회사 | 유기전계발광표시장치의 제조방법 |
WO2010092798A1 (ja) | 2009-02-10 | 2010-08-19 | パナソニック株式会社 | 発光素子の製造方法と発光素子、および発光装置の製造方法と発光装置 |
EP2398084B1 (en) | 2009-02-10 | 2018-06-06 | Joled Inc. | Light-emitting element, light-emitting device comprising light-emitting element, and method for manufacturing light-emitting element |
JP5437736B2 (ja) | 2009-08-19 | 2014-03-12 | パナソニック株式会社 | 有機el素子 |
JP5720006B2 (ja) | 2010-06-24 | 2015-05-20 | 株式会社Joled | 有機el素子、表示装置および発光装置 |
WO2011161727A1 (ja) | 2010-06-24 | 2011-12-29 | パナソニック株式会社 | 有機el素子の製造方法、表示装置、発光装置および紫外光照射装置 |
CN103026523B (zh) | 2010-07-30 | 2015-12-09 | 株式会社日本有机雷特显示器 | 有机el元件 |
JP5612691B2 (ja) | 2010-08-06 | 2014-10-22 | パナソニック株式会社 | 有機el素子およびその製造方法 |
WO2012017488A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 発光素子とその製造方法、および発光装置 |
WO2012017501A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 有機el素子およびその製造方法 |
WO2012017497A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 有機el素子 |
CN103038908B (zh) | 2010-08-06 | 2016-01-06 | 株式会社日本有机雷特显示器 | 发光元件、具备发光元件的发光装置以及发光元件的制造方法 |
JP5677436B2 (ja) | 2010-08-06 | 2015-02-25 | パナソニック株式会社 | 有機el素子 |
WO2012017490A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 有機el素子、表示装置および発光装置 |
WO2012017489A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 有機el素子、表示装置および発光装置 |
WO2012017487A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 発光素子、表示装置、および発光素子の製造方法 |
JP5658256B2 (ja) | 2010-08-06 | 2015-01-21 | パナソニック株式会社 | 発光素子とその製造方法、および発光装置 |
JP5620495B2 (ja) | 2010-08-06 | 2014-11-05 | パナソニック株式会社 | 発光素子、発光素子を備えた発光装置および発光素子の製造方法 |
WO2012017486A1 (ja) | 2010-08-06 | 2012-02-09 | パナソニック株式会社 | 発光素子の製造方法 |
US8901594B2 (en) | 2010-12-20 | 2014-12-02 | Panasonic Corporation | Organic EL display panel and method for manufacturing same |
US8884281B2 (en) | 2011-01-21 | 2014-11-11 | Panasonic Corporation | Organic EL element |
WO2012114648A1 (ja) | 2011-02-23 | 2012-08-30 | パナソニック株式会社 | 有機el表示パネルおよび有機el表示装置 |
US8981361B2 (en) | 2011-02-25 | 2015-03-17 | Panasonic Corporation | Organic electroluminescence display panel with tungsten oxide containing hole injection layer that electrically connects electrode to auxiliary wiring, and organic electroluminescence display device |
JP5678740B2 (ja) | 2011-03-11 | 2015-03-04 | ソニー株式会社 | 有機el表示装置および電子機器 |
WO2012153445A1 (ja) | 2011-05-11 | 2012-11-15 | パナソニック株式会社 | 有機el表示パネルおよび有機el表示装置 |
JP6142191B2 (ja) * | 2011-05-19 | 2017-06-07 | 株式会社Joled | 表示装置および電子機器 |
WO2014030354A1 (ja) * | 2012-08-23 | 2014-02-27 | パナソニック株式会社 | 有機電子デバイスの製造方法および有機elデバイスの製造方法 |
KR102009357B1 (ko) | 2012-11-26 | 2019-08-09 | 엘지디스플레이 주식회사 | 유기전계 발광소자 및 이의 제조 방법 |
KR102099702B1 (ko) * | 2013-05-16 | 2020-04-13 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그의 제조 방법 |
KR20140139820A (ko) * | 2013-05-28 | 2014-12-08 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
WO2015083823A1 (ja) * | 2013-12-06 | 2015-06-11 | シャープ株式会社 | 発光体基板、太陽電池、表示装置、照明装置、電子機器、有機el素子、及び発光体基板の製造方法 |
KR102205700B1 (ko) * | 2014-07-16 | 2021-01-21 | 삼성전자주식회사 | 유기 전계발광 표시장치 및 그 제조 방법 |
KR102365911B1 (ko) * | 2014-10-17 | 2022-02-22 | 삼성디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
CN104362170B (zh) * | 2014-11-28 | 2017-04-12 | 京东方科技集团股份有限公司 | 一种有机电致发光显示器件、其驱动方法及相关装置 |
KR102293507B1 (ko) * | 2014-12-08 | 2021-08-24 | 엘지디스플레이 주식회사 | 유기 발광 표시 장치 및 이를 제조하기 위한 박막 증착용 마스크 |
CN107532013A (zh) | 2015-01-30 | 2018-01-02 | 默克专利有限公司 | 具有低粒子含量的制剂 |
US10326076B2 (en) * | 2015-04-13 | 2019-06-18 | Boe Technology Group Co., Ltd. | Method of manufacturing display substrate, display substrate and display device |
KR20180012176A (ko) | 2016-07-26 | 2018-02-05 | 엘지디스플레이 주식회사 | 디스플레이 장치 |
US20230276685A9 (en) * | 2016-08-26 | 2023-08-31 | Najing Technology Corporation Limited | Manufacturing method for light emitting device, light emitting device, and hybrid light emitting device |
KR101980780B1 (ko) * | 2016-10-31 | 2019-05-21 | 엘지디스플레이 주식회사 | 유기 발광 표시 장치 및 그 제조 방법 |
TWI763772B (zh) | 2017-01-30 | 2022-05-11 | 德商麥克專利有限公司 | 電子裝置之有機元件的形成方法 |
TWI791481B (zh) | 2017-01-30 | 2023-02-11 | 德商麥克專利有限公司 | 形成有機電致發光(el)元件之方法 |
JP6844845B2 (ja) | 2017-05-31 | 2021-03-17 | 三国電子有限会社 | 表示装置 |
KR102525822B1 (ko) | 2017-07-06 | 2023-04-26 | 삼성디스플레이 주식회사 | 표시 소자 및 그 제조 방법 |
KR102402597B1 (ko) * | 2017-10-20 | 2022-05-26 | 삼성디스플레이 주식회사 | 표시 장치 |
JP7190729B2 (ja) * | 2018-08-31 | 2022-12-16 | 三国電子有限会社 | キャリア注入量制御電極を有する有機エレクトロルミネセンス素子 |
JP7246681B2 (ja) | 2018-09-26 | 2023-03-28 | 三国電子有限会社 | トランジスタ及びトランジスタの製造方法、並びにトランジスタを含む表示装置 |
KR20200097379A (ko) * | 2019-02-07 | 2020-08-19 | 삼성디스플레이 주식회사 | 표시패널 및 그 제조방법 |
JP7190740B2 (ja) | 2019-02-22 | 2022-12-16 | 三国電子有限会社 | エレクトロルミネセンス素子を有する表示装置 |
JP7444436B2 (ja) | 2020-02-05 | 2024-03-06 | 三国電子有限会社 | 液晶表示装置 |
Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5276380A (en) * | 1991-12-30 | 1994-01-04 | Eastman Kodak Company | Organic electroluminescent image display device |
JP3401356B2 (ja) * | 1995-02-21 | 2003-04-28 | パイオニア株式会社 | 有機エレクトロルミネッセンスディスプレイパネルとその製造方法 |
US6129365A (en) * | 1997-07-01 | 2000-10-10 | Outrigger, Inc. | Inclined handle for wheeled case |
KR100660384B1 (ko) | 1998-03-17 | 2006-12-21 | 세이코 엡슨 가부시키가이샤 | 표시장치의 제조방법 |
JP2001148291A (ja) * | 1999-11-19 | 2001-05-29 | Sony Corp | 表示装置及びその製造方法 |
JP2003518567A (ja) | 1999-12-29 | 2003-06-10 | キンバリー クラーク ワールドワイド インコーポレイテッド | 流体処理用生分解性不織ウェブ |
KR20010085420A (ko) * | 2000-02-23 | 2001-09-07 | 기타지마 요시토시 | 전계발광소자와 그 제조방법 |
KR100436303B1 (ko) * | 2000-03-31 | 2004-06-19 | 세이코 엡슨 가부시키가이샤 | 유기 이엘소자 및 유기 이엘소자의 제조방법 |
JP4048687B2 (ja) * | 2000-04-07 | 2008-02-20 | セイコーエプソン株式会社 | 有機el素子および有機el素子の製造方法 |
JP4040850B2 (ja) * | 2000-07-24 | 2008-01-30 | Tdk株式会社 | 発光素子 |
ATE475198T1 (de) * | 2000-11-17 | 2010-08-15 | Tpo Displays Corp | Organisches elektrolumineszenzbauelement und verfahren zu seiner herstellung |
-
2002
- 2002-11-25 JP JP2002341375A patent/JP3823916B2/ja not_active Expired - Fee Related
- 2002-12-05 US US10/310,178 patent/US6911773B2/en not_active Expired - Lifetime
- 2002-12-16 KR KR10-2002-0080207A patent/KR100506353B1/ko active IP Right Grant
- 2002-12-16 TW TW091136292A patent/TW571602B/zh not_active IP Right Cessation
- 2002-12-16 CN CNB021560927A patent/CN1242883C/zh not_active Expired - Lifetime
Cited By (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102308405A (zh) * | 2009-02-10 | 2012-01-04 | 松下电器产业株式会社 | 发光元件、显示装置以及发光元件的制造方法 |
CN103646959A (zh) * | 2009-02-10 | 2014-03-19 | 松下电器产业株式会社 | 发光元件及其制造方法 |
US8890174B2 (en) | 2009-02-10 | 2014-11-18 | Panasonic Corporation | Light-emitting element including a charge injection transport layer that includes a dissolvable metal compound, and display device and method for manufacturing thereof |
US8946693B2 (en) | 2010-08-06 | 2015-02-03 | Panasonic Corporation | Organic EL element, display device, and light-emitting device |
US9029843B2 (en) | 2010-08-06 | 2015-05-12 | Joled Inc. | Organic electroluminescence element |
US9029842B2 (en) | 2010-08-06 | 2015-05-12 | Joled Inc. | Organic electroluminescence element and method of manufacturing thereof |
CN104282712A (zh) * | 2013-07-01 | 2015-01-14 | 三星显示有限公司 | 有机发光显示装置及其制造方法 |
Also Published As
Publication number | Publication date |
---|---|
JP2003249375A (ja) | 2003-09-05 |
TW200301666A (en) | 2003-07-01 |
US6911773B2 (en) | 2005-06-28 |
CN1242883C (zh) | 2006-02-22 |
US20030137242A1 (en) | 2003-07-24 |
JP3823916B2 (ja) | 2006-09-20 |
TW571602B (en) | 2004-01-11 |
KR100506353B1 (ko) | 2005-08-05 |
KR20030051344A (ko) | 2003-06-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN1242883C (zh) | 显示装置、电子仪器和显示装置的制造方法 | |
CN1225149C (zh) | 显示装置以及电子仪器 | |
CN1496667A (zh) | 显示装置及其制造方法、电子装置及其制造方法 | |
CN1240540C (zh) | 喷出方法及其装置、电光装置及其制造方法和制造装置 | |
CN1265470C (zh) | 电致发光显示器件及其制造方法 | |
CN1764335A (zh) | 有机电致发光装置的制造方法和有机电致发光装置 | |
CN1170458C (zh) | 有源驱动型有机el显示装置及其制造方法 | |
CN1230039C (zh) | 有机el装置的制法及其装置 | |
CN1278295C (zh) | 有机发光显示器 | |
CN1248547C (zh) | 有机电致发光显示装置及其制造方法 | |
CN1250986C (zh) | 滤色片的制造方法及制造装置、液晶显示装置及电子装置 | |
CN1221010C (zh) | 薄膜形成装置和薄膜形成方法 | |
CN1314128C (zh) | 电光学装置及其制造方法、及电子设备 | |
CN100350634C (zh) | 发光装置以及制造发光装置的方法 | |
CN1197165C (zh) | 电光器件的制造方法 | |
CN1573449A (zh) | 薄膜图案形成法、器件及其制法、液晶显示装置及其制法 | |
CN1631058A (zh) | 有机el显示装置及其制造方法 | |
CN1449229A (zh) | 发光装置和制造这种发光装置的方法 | |
CN1928149A (zh) | 沉积装置 | |
CN1929706A (zh) | 有机电致发光装置及其制造方法、电子设备 | |
CN1825616A (zh) | 显示装置、电子设备及该显示装置的制造方法 | |
CN1435318A (zh) | 液滴喷出头、喷出方法及其装置、光电装置、其制造方法 | |
CN1828931A (zh) | 半导体装置、电子装置及半导体装置的制造方法 | |
CN1700417A (zh) | 半导体器件及其制造方法、液晶电视、和el电视 | |
CN1649454A (zh) | 显示器件及其制造方法以及电视设备 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
C06 | Publication | ||
PB01 | Publication | ||
C10 | Entry into substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
TR01 | Transfer of patent right |
Effective date of registration: 20190202 Address after: Tokyo, Japan Patentee after: El technology integration Co.,Ltd. Address before: Tokyo, Japan Patentee before: Seiko Epson Corp. |
|
TR01 | Transfer of patent right | ||
TR01 | Transfer of patent right |
Effective date of registration: 20220419 Address after: 05-15, bayeliba Plaza, 60 bayeliba Road, Singapore Patentee after: Element capital commercial Co. Address before: Tokyo, Japan Patentee before: El technology integration Co.,Ltd. |
|
TR01 | Transfer of patent right | ||
CX01 | Expiry of patent term |
Granted publication date: 20060222 |
|
CX01 | Expiry of patent term |