CN1396435A - Photoelectric detection method and device based on orthogonal dual polarized light beams for rolled angle - Google Patents
Photoelectric detection method and device based on orthogonal dual polarized light beams for rolled angle Download PDFInfo
- Publication number
- CN1396435A CN1396435A CN 02123642 CN02123642A CN1396435A CN 1396435 A CN1396435 A CN 1396435A CN 02123642 CN02123642 CN 02123642 CN 02123642 A CN02123642 A CN 02123642A CN 1396435 A CN1396435 A CN 1396435A
- Authority
- CN
- China
- Prior art keywords
- light
- splitting prism
- light intensity
- roll angle
- polarization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000009977 dual effect Effects 0.000 title abstract 3
- 238000001514 detection method Methods 0.000 title description 14
- 238000000034 method Methods 0.000 claims abstract description 34
- 239000004065 semiconductor Substances 0.000 claims abstract description 34
- 239000004973 liquid crystal related substance Substances 0.000 claims abstract description 26
- 230000003287 optical effect Effects 0.000 claims abstract description 9
- 230000010287 polarization Effects 0.000 claims description 83
- 239000013307 optical fiber Substances 0.000 claims description 15
- 238000005070 sampling Methods 0.000 claims description 11
- 238000001914 filtration Methods 0.000 claims description 7
- 238000010586 diagram Methods 0.000 description 11
- 238000005259 measurement Methods 0.000 description 11
- 238000005096 rolling process Methods 0.000 description 6
- 239000000463 material Substances 0.000 description 5
- 238000009434 installation Methods 0.000 description 3
- 239000000382 optic material Substances 0.000 description 3
- 230000035945 sensitivity Effects 0.000 description 3
- 230000003321 amplification Effects 0.000 description 2
- 239000002223 garnet Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000000691 measurement method Methods 0.000 description 2
- 238000003199 nucleic acid amplification method Methods 0.000 description 2
- 230000001902 propagating effect Effects 0.000 description 2
- 239000000654 additive Substances 0.000 description 1
- 230000000996 additive effect Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- MTRJKZUDDJZTLA-UHFFFAOYSA-N iron yttrium Chemical compound [Fe].[Y] MTRJKZUDDJZTLA-UHFFFAOYSA-N 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 230000000644 propagated effect Effects 0.000 description 1
- 230000000630 rising effect Effects 0.000 description 1
Images
Landscapes
- Investigating Or Analysing Materials By Optical Means (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
A method and device based on orthogonal dual polarized light beam for detecting and measuring the rotational angle in photoelectric mode is disclosed. Two semiconductor laser devices or orthogonal light valves of liquid crystal in the optical path are respectively modulated by two square wave sequences with 180 deg. of phase difference to generate the time-sharing alternative orthogonal polarized light beams, so outputting alternative dual orthogonal polarized parallel light beams. After they pass through an analyzer, the difference in their intensities is generated. Measuring the difference can obtain the rotational angle. Its advantages are simple structure, high precision, and low cost.
Description
Technical field
The present invention relates to a kind of method and device of roll angle Photoelectric Detection, particularly a kind of method and device that utilizes the roll angle non-contact measurement of orthogonal double polarizing light belongs to photoelectric detection technology field.
Background technology
In systems such as lathe or three coordinate measuring machine, often use the double frequency interferometer to carry out linear measure longimetry.In order to revise the Abbe error in the linear measure longimetry in real time, need simultaneously length, deflection angle, the angle of pitch and roll angle to be measured.Wherein roll angle is one that is difficult to measure most.In addition, in the Installation And Calibration of some workpiece, also need roll angle is measured or located.In many actual detected, for example tunnel intercommunication, fighter plane air refuelling, spacecraft launching site all require roll angle is carried out non-contact measurement.Therefore, be necessary to study a kind of contactless roll angle measurement method with high sensitivity, high stability.
For the detection of guide rail rolling angle error, three kinds of methods are arranged generally: electrolevel method, Faraday magneto-optical modulation method and based on the rolling angle measurement method of transverse zeeman laser.Electrolevel can't be used for real-time measurement.
Based on the rolling angle measurement system of transverse zeeman laser, utilize the quarter-wave plate of 45 ° of placements that the frequency that transverse zeeman laser penetrates is respectively ω
1ω
2Orhtogonal linear polarizaiton light is transformed into orthogonal circular polarizations light, and analyzer is followed measured piece as the roll angle sensor and rotated, and detects the phase change of penetrating light with photodetector again, and the roll angle that obtains analyzer changes.At this moment phase change and corner are linear, have
Δψ＝2α
Δ ψ is the additive phase variation of beat signal in the formula, and α is the analyzer corner.Utilizing this system to use resolution is 0.003 ° phasometer, and the phase-measurement accuracy that obtains is 0.01 °, and corresponding mechanical corner accuracy is 0.005 °.
The Jiang Hong of Tsing-Hua University, Yin Chunyong propose a kind of non-linear rolling angle measurement system based on transverse zeeman laser, " a kind of new method of measuring roll angle " (Chinese laser, the 26th volume, the 12nd phase, in Dec, 1999) utilize quarter-wave plate in slight ellipse inclined to one sideization of the orhtogonal linear polarizaiton light of transverse zeeman laser outgoing, at this moment phase change becomes nonlinear relationship with corner, occurs measuring the sensitivity multiplication region of corner on specific angle.Adopt this method, can realize large-scale rolling angle measurement, and on specific angle, obtain very high sensitivity.Use resolution is 0.01 ° phasometer, and the Measurement Resolution of roll angle reaches 0.00018 °.
This method is to change the size of measuring roll angle by detected phase, though can obtain very high resolution, zeeman laser costs an arm and a leg, and control circuit is extremely complicated.
The Faraday magneto-optical modulation method detects roll angle, is to utilize the magnetic rotation effect of magnetic opticity material to detect roll angle.Behind the linearly polarized light process magnetic opticity material, polarization direction deflection θ angle,
θ＝VHL
Wherein, V is the Verdet constant of magneto-optic material, and L is the length of magneto-optic material, and H is a magnetic field intensity.
Place the polaroid of two polarization direction quadratures on measured object and fixed reference respectively, if roll angle is zero, then light intensity is zero behind the light process pairwise orthogonal polaroid; If roll angle is non-vanishing, then light light intensity behind two polaroids is non-vanishing, and the size of light intensity can record with photodetector.Between the pairwise orthogonal polaroid, place magnetic opticity material (generally being the yttrium iron garnet crystal), to modulating by the linear polarization polarization surface behind the benchmark polaroid, make light by the polaroid on the measured object after light intensity be zero.At this moment, the voltage swing that adds on the magneto-optic material has just reflected the size of roll angle, and phase place has reflected the direction of roll angle.
The resolution of Faraday magneto-optical modulation method is very high, reaches 0.1 ".But this method is owing to existing the optically-active thermal drift, so adopt feedback circuit in many places, the circuit complexity requires harshness to working environment, and the domestic not production of Faraday magneto-optical material yttrium-iron-garnet material, needs to introduce from Japan, costs an arm and a leg.
Summary of the invention
Purpose of the present invention and task are that it is simple to propose a kind of light channel structure under the prerequisite that guarantees measuring accuracy, the roll angle photoelectric detecting method and the device based on orthogonal double polarizing light of no much complex feedback circuit, thus reduce cost, be easy to apply.
Purpose of the present invention and task are achieved by the following technical solution: a kind of roll angle photoelectric detecting method based on orthogonal double polarizing light, and this method is carried out as follows:
(1) utilizes two row square waves of 180 ° of phase differential, modulate the liquid crystal light valve of two polarization direction quadratures in the light path respectively, produce the crossed polarized light that two bundle timesharing replace,, make the Orthogonal Double polarization parallel light of transmitting terminal output alternation through behind the polarization splitting prism;
(2) Orthogonal Double polarization parallel light by the initial polarization direction of placing and incident crossed polarized light analyzer mutual at 45 at receiving end and be placed on thereafter lens with optical convergence on the light intensity detector at this lens focus place;
(3) light intensity detector is converted into electric signal with pairwise orthogonal double polarizing light light intensity, after this electric signal amplifies, through two pulse signal samplings, obtain representing the electric signal of pairwise orthogonal double polarizing light light intensity respectively, two electric signal are sent into subtracter to be subtracted each other, the positive and negative direction that promptly reflects roll angle of the magnitude of voltage that obtains after low-pass filtering is amplified, its absolute value of voltage size has reflected the value of roll angle.
For achieving the above object, second kind of roll angle photoelectric detecting method provided by the invention based on orthogonal double polarizing light, this method comprises the steps:
(1) utilizes two row square waves of 180 ° of phase differential, modulate two semiconductor lasers in the light path respectively, produce the light that two bundle timesharing replace; Make two bundle timesharing replace light respectively through output orthogonal double polarizing light behind the polaroid of two polarization direction quadratures, pass through polarization splitting prism again after, make the Orthogonal Double polarization parallel light of transmitting terminal output alternation;
(2) Orthogonal Double polarization parallel light by the initial polarization direction of placing and incident crossed polarized light analyzer mutual at 45 at receiving end and be placed on thereafter lens with optical convergence on the light intensity detector at this lens focus place;
(3) light intensity detector is converted into electric signal with pairwise orthogonal double polarizing light light intensity, after this electric signal amplifies, through two pulse signal samplings, obtain representing the electric signal of pairwise orthogonal double polarizing light light intensity respectively, two electric signal are sent into subtracter to be subtracted each other, the positive and negative direction that promptly reflects roll angle of the magnitude of voltage that obtains after low-pass filtering is amplified, its absolute value of voltage size has reflected the value of roll angle.
The invention provides a kind of roll angle photoelectric detection system of implementing above-mentioned first kind of measuring method, this device is made up of the receiving end that is placed on the transmitting terminal on the benchmark and be placed on the testee, it is characterized in that, described transmitting terminal mainly comprises semiconductor laser, the power source of semiconductor laser that links to each other with this laser instrument, coupled lens, two liquid crystal light valves that have the timesharing modulator, polarization splitting prism and collimation lens, described two liquid crystal light valves are placed on respectively on two adjacent faces of polarization splitting prism, described coupled lens is connected with two liquid crystal light valves respectively with optical fiber directional coupler by optical fiber, the going out on the focus that luminous point is arranged on collimation lens of described optical fiber; Described receiving end mainly comprises the initial polarization direction that is vertically set in the emitting parallel light road and orthogonal double polarizing light analyzer at 45 mutually, and the light intensity detector on being placed on convergent lens thereafter and being placed on the convergent lens focus reaches the roll angle signal processing circuit that links to each other with this detector.
The present invention also provides the roll angle of implementing above-mentioned second kind of measuring method photoelectric detection system, this device is made up of the receiving end that is placed on the transmitting terminal on the benchmark and be placed on the testee, it is characterized in that, described transmitting terminal mainly comprises the timesharing modulator, be subjected to two power source of semiconductor laser of modulators modulate, two semiconductor lasers that link to each other respectively with two power source of semiconductor laser, polarization splitting prism, be arranged on two collimation lenses between semiconductor laser and the polarization splitting prism, two polarizers, going out on the focus that luminous point is separately positioned on described two collimation lenses of described two semiconductor lasers, described two polarizers are placed on respectively on two adjacent faces of polarization splitting prism; Described receiving end mainly comprises the initial polarization direction that is vertically set in the emitting parallel light road and orthogonal double polarizing light analyzer at 45 mutually, and the light intensity detector on being placed on convergent lens thereafter and being placed on the convergent lens focus reaches the roll angle signal processing circuit that links to each other with this detector.
In described first kind of pick-up unit, described collimation lens is placed in the emitting light path of described polarization splitting prism or with two collimation lenses and is placed on respectively in the input path of described two liquid crystal light valves.
Measure when realizing roll angle and collimation, in above-mentioned two kinds of pick-up units, also comprise polarization splitting prism, four-quadrant light intensity detector and the collimation signal processing circuit that links to each other with this detector at described receiving end, described polarization splitting prism is placed in the preceding parallel light path of analyzer, and described four-quadrant light intensity detector is placed in the polarization splitting prism emitting light path.
Roll angle non-contact detection method and device based on orthogonal double polarizing light that the present invention proposes are the light intensity difference of orthogonal double polarizing light through producing behind the analyzer of using the timesharing modulation, by detecting the value that this difference obtains roll angle.This method and device compared with prior art, light channel structure is simple, therefore no more complex feedback circuit under the prerequisite of assurance measuring accuracy, effectively reduces production cost of products; Realized the measurement control of x-y collimation simultaneously, saved the time of measuring, realized parallel measurement in real time, provide condition for further improving measuring accuracy.Roll angle and collimation in the time of can being widely used in the large-scale workpiece installation are measured and the linearity of motion thing and the automatic tracking system of roll angle.
Description of drawings
Fig. 1: the structural principle synoptic diagram that adopts the roll angle photoelectric detection system embodiment of liquid crystal light valve timesharing modulation for the present invention.
Fig. 2: the structural principle synoptic diagram that adopts the roll angle photoelectric detection system embodiment of the direct timesharing driving of semiconductor laser for the present invention.
Fig. 3: for the present invention adopts the roll angle of liquid crystal light valve timesharing modulation and the structural representation of collimation pick-up unit embodiment.
Fig. 4: detect the roll angle principle schematic for adopting double polarizing light.
Fig. 5: for timesharing is modulated with square wave and sampling pulse figure.
Fig. 6: be timesharing modulator and sampling pulse generation circuit block diagram.
Fig. 7: be roll angle light intensity detector output waveform figure.
Fig. 8: be the rolling angle measurement circuit block diagram.
Fig. 9: for the four-quadrant light intensity detector detects the collimation schematic diagram.
Among the figure: 1,29 is semiconductor laser; 2 is coupled lens; 3,5,6 is optical fiber; 4 is optical fiber directional coupler (50: 50); 7,8 is liquid crystal light valve; 9,13 is polarization splitting prism; 10,24,25 is collimation lens; 11,26 is semiconductor laser drive power; 12 are the timesharing modulator; 14 is analyzer; 15 is convergent lens; 16 is light intensity detector; 17 is the four-quadrant light intensity detector; 18 is the collimation signal processing circuit; 19 is the roll angle signal processing circuit; 20 is transmitting terminal; 21 is receiving end; 22,23 is the polarizer;
Embodiment
Further describe principle of the present invention, concrete structure and embodiment below in conjunction with accompanying drawing:
The method based on orthogonal double polarizing light detection roll angle that the present invention proposes can adopt following two kinds of embodiments to realize, now is described as follows:
Fig. 1 is the structural principle synoptic diagram that the present invention adopts the roll angle photoelectric detection system embodiment of liquid crystal light valve timesharing modulation.
This method is utilized two row square-wave signal a, the b of 180 ° of phase differential that circuit block diagram as shown in Figure 6 produces, modulate the liquid crystal light valve 7,8 of two polarization direction quadratures in the light path respectively, make the Orthogonal Double polarization parallel light of transmitting terminal 20 outputs two bundle timesharing alternations; Initial polarization direction and the incident crossed polarized light mutual at 45 analyzer 14 of this directional light by placing at receiving end 21, the lens 15 through being placed on thereafter are being placed on optical convergence on the light intensity detector 16 at lens focus place; Detector 16 is converted into electric signal with pairwise orthogonal double polarizing light light intensity, utilize roll angle signal processing circuit shown in Figure 8, after this electric signal amplifies, through two pulse signal samplings, obtain representing the electric signal of pairwise orthogonal double polarizing light light intensity respectively, two electric signal are sent into subtracter and are subtracted each other, through low-pass filtering, the positive and negative direction that promptly reflects roll angle of the magnitude of voltage that obtains after the amplification, its absolute value of voltage size has reflected the value of roll angle.
The device of realization said method is formed by being placed on transmitting terminal 20 on the benchmark and the receiving end 21 that is placed on the testee, and transmitting terminal adopts the liquid crystal light valve modulation system.Transmitting terminal mainly comprises semiconductor laser 1, the power source of semiconductor laser 11 that links to each other with this laser instrument, coupled lens 2, two liquid crystal light valves 7 and 8 that have timesharing modulator 12, polarization splitting prism 9 and collimation lens 10, two liquid crystal light valves are placed on respectively on two adjacent faces of polarization splitting prism 9, coupled lens 2 is connected with two liquid crystal light valves respectively with optical fiber directional coupler (50: 50) 4 by optical fiber 3, the going out on the focus that luminous point is arranged on collimation lens 10 of optical fiber 5,6.Receiving end 21 mainly comprises the initial polarization direction that is vertically set in the emitting parallel light road and orthogonal double polarizing light analyzer 14 at 45 mutually, and the light intensity detector 16 on being placed on convergent lens 15 thereafter and being placed on the convergent lens focus reaches the roll angle signal processing circuit 19 (Fig. 8 shows the block diagram of this circuit) that links to each other with this detector.In this device, two kinds of embodiments can be adopted in the installation site of collimation lens 10: a kind of is that a collimation lens is set in the emitting light path of polarization splitting prism 9; Another kind of embodiment is that a collimation lens is set respectively in the input path of two liquid crystal light valves.Its measuring principle is as follows:
The laser that semiconductor laser 1 sends is through coupled lens 2, coupled into optical fibres 3, be 50: 50 optical fiber directional coupler 4 again through splitting ratio, be divided into the two-beam that light intensity equates, enter optical fiber 5 and 6 respectively, output terminal in optical fiber 5 and 6 forms two pointolites that intensity equates, two pointolites are positioned at the focus place of collimation lens 10.Two liquid crystal light valves 7,8 lay respectively at the exit of optical fiber 5,6, and the polarization direction is mutually 90 ° (quadratures), the light that two pointolites send behind polarization splitting prism 9 and the collimation lens 10, is formed on the timesharing modulation orthogonal dual-polarization directional light of propagating on the same straight line respectively through liquid crystal light valve 7,8.The two-way square-wave signal that timesharing modulator phase difference output is 180 ° (Fig. 5 a, b) is added in respectively on the liquid crystal light valve 7,8, two liquid crystal light valve alternate conduction (logical light) with close (shading), thereby make alternately timesharing output orthogonal dual-polarization directional light of collimation lens 10.Fig. 6 has expressed the circuit block diagram of timesharing modulator, and voltage controlled oscillator output signal is through two-way square-wave signal a, the b of 180 ° of twice two divided-frequency phase difference outputs.
Under the smaller situation of roll angle α, the double polarizing light light intensity difference Δ I and the roll angle α that project on the detector are linear, and promptly the height voltage difference of the square-wave signal of being surveyed and roll angle α are also linear.
Electric signal by light intensity detector 16 outputs is sent into roll angle signal processing circuit 19, after amplifying, adopt pulse to sample with two, obtain representing the electric signal of pairwise orthogonal double polarizing light light intensity, two electric signal are sent into subtracter and are subtracted each other, through low-pass filtering, the positive and negative direction that reflects roll angle of the magnitude of voltage that obtains after the amplification, its absolute value of voltage has reflected the value of roll angle.Sampling pulse is produced by circuit as shown in Figure 6.Voltage controlled oscillator output signal is 90 ° road square-wave signal (Fig. 5 c) through twice two divided-frequency output and timesharing modulator output square-wave signal a, b phase differential, its rising edge and negative edge trigger two monostables respectively and produce two row sampling pulse signals (Fig. 5 d, e), are used separately as detector output intensity signal in T1, the sampling of T2 in the time.
Fig. 2 is the structural principle synoptic diagram that the present invention adopts the roll angle photoelectric detection system embodiment of two semiconductor laser timesharing modulation.
Two row square-wave signal a, b that this method is utilized 180 ° of phase differential that circuit block diagram as shown in Figure 6 produces modulate two semiconductor lasers 1,29 in the light path respectively, produce the light that two bundle timesharing replace; Make two bundle timesharing replacing light respectively through the polarizer 22, the 23 back output orthogonal double polarizing lights of two polarization direction quadratures, pass through polarization splitting prism 9 again after, make the alternately Orthogonal Double polarization parallel light of time-sharing work of transmitting terminal 20 outputs; This directional light by the initial polarization direction of placing and incident crossed polarized light analyzer 14 mutual at 45 at receiving end 21 and be placed on thereafter lens 15 with the light intensity detector 16 of optical convergence at this lens focus place on; Detector 16 is converted into electric signal with pairwise orthogonal double polarizing light light intensity, utilize circuit shown in Figure 8, after this electric signal amplifies, through two pulse signal d, e samplings, obtain representing the electric signal of pairwise orthogonal double polarizing light light intensity respectively, two electric signal are sent into subtracter subtract each other, the positive and negative direction that promptly reflects roll angle of the magnitude of voltage that after low-pass filtering is amplified, obtains, its absolute value of voltage size has reflected the value of roll angle.
The device of realization said method is formed by being placed on transmitting terminal 20 on the benchmark and the receiving end 21 that is placed on the testee.Transmitting terminal mainly comprises timesharing modulator 12, be subjected to two power source of semiconductor laser 11,26 of modulators modulate, two semiconductor lasers 1 that link to each other respectively with two power source of semiconductor laser and 29, polarization splitting prism 9, be arranged on two collimation lenses 24 and 25 between semiconductor laser and the polarization splitting prism, two polarizers 22 and 23, going out on the focus that luminous point is separately positioned on described two collimation lenses of two semiconductor lasers, two polarizers are placed on respectively on two adjacent faces of polarization splitting prism 9.Receiving end 21 mainly comprises the initial polarization direction that is vertically set in the emitting parallel light road and orthogonal double polarizing light analyzer 14 at 45 mutually, and the light intensity detector 16 on being placed on convergent lens 15 thereafter and being placed on the convergent lens focus reaches the roll angle signal processing circuit 19 that links to each other with this detector.Its measuring principle is as follows:
In the transmitting terminal, the mode that adopts two semiconductor lasers directly to modulate.Modulate two power source of semiconductor laser 11,26 respectively with the modulated square wave (Fig. 2 a, b) that timesharing modulator 12 produces 180 ° of phase differential, make two semiconductor lasers 1,29 produce the light wave that two bundle timesharing are propagated.Two-beam is mutually 90 ° the polarizer 22,23 respectively more respectively through collimation lens 24,25 collimations by the polarization direction, close light by polarization splitting prism 9, is formed on the timesharing modulation orthogonal dual-polarization directional light of propagating on the same straight line.
The orthogonal double polarizing light of transmitting terminal 20 emissions imports receiving end 21 into.Herein, receiving end is identical with embodiment 1.
On the basis of above-mentioned two kinds of embodiments, the collimation signal processing circuit 18 of setting up polarization splitting prism 13, four-quadrant light intensity detector 17 and linking to each other at receiving end with this detector.Polarization splitting prism 13 is placed in the parallel light path before the analyzer 14, and four-quadrant light intensity detector 17 is placed in the emitting light path of polarization splitting prism 13.On the four-quadrant light intensity detector 17 of the Orthogonal Double polarization parallel light part that transmitting terminal sends before Amici prism reflection trend of purchasing is placed on polarization splitting prism 13, four-quadrant light intensity detector output signal is sent into collimation signal processing circuit 18 and is handled (as shown in Figure 3).
Collimation signal processing circuit principle is as follows: as shown in Figure 9, four road light intensity signals that obtain from 4 quadrant detector are designated as A, B, C, D respectively, and then linearity deviation X, the Y on the x-y direction can be tried to achieve by following formula respectively,
According to such scheme, measure when can realize roll angle and collimation.
Claims (7)
1. roll angle photoelectric detecting method based on orthogonal double polarizing light, this method is carried out as follows:
(1) utilizes two row square waves of 180 ° of phase differential, modulate the liquid crystal light valve of two polarization direction quadratures in the light path respectively, produce the crossed polarized light that two bundle timesharing replace,, make the Orthogonal Double polarization parallel light of transmitting terminal output alternation through behind the polarization splitting prism;
(2) Orthogonal Double polarization parallel light by the initial polarization direction of placing and incident crossed polarized light analyzer mutual at 45 at receiving end and be placed on thereafter lens with optical convergence on the light intensity detector at this lens focus place;
(3) light intensity detector is converted into electric signal with pairwise orthogonal double polarizing light light intensity, after this electric signal amplifies, through two pulse signal samplings, obtain representing the electric signal of pairwise orthogonal double polarizing light light intensity respectively, two electric signal are sent into subtracter to be subtracted each other, the positive and negative direction that promptly reflects roll angle of the magnitude of voltage that obtains after low-pass filtering is amplified, its absolute value of voltage size has reflected the value of roll angle.
2. roll angle photoelectric detecting method based on orthogonal double polarizing light, this method comprises the steps:
(1) utilizes two row square waves of 180 ° of phase differential, modulate two semiconductor lasers in the light path respectively, produce the light that two bundle timesharing replace; Make two bundle timesharing replace light respectively through output orthogonal double polarizing light behind the polaroid of two polarization direction quadratures, pass through polarization splitting prism again after, make the Orthogonal Double polarization parallel light of transmitting terminal output alternation;
(2) Orthogonal Double polarization parallel light by the initial polarization direction of placing and incident crossed polarized light analyzer mutual at 45 at receiving end and be placed on thereafter lens with optical convergence on the light intensity detector at this lens focus place;
(3) light intensity detector is converted into electric signal with pairwise orthogonal double polarizing light light intensity, after this electric signal amplifies, through two pulse signal samplings, obtain representing the electric signal of pairwise orthogonal double polarizing light light intensity respectively, two electric signal are sent into subtracter to be subtracted each other, the positive and negative direction that promptly reflects roll angle of the magnitude of voltage that obtains after low-pass filtering is amplified, its absolute value of voltage size has reflected the value of roll angle.
3. implement the pick-up unit of method according to claim 1, form by the receiving end that is placed on the transmitting terminal on the benchmark and be placed on the testee, it is characterized in that, described transmitting terminal mainly comprises semiconductor laser, the power source of semiconductor laser that links to each other with this laser instrument, coupled lens, two liquid crystal light valves that have the timesharing modulator, polarization splitting prism and collimation lens, described two liquid crystal light valves are placed on respectively on two adjacent faces of polarization splitting prism, described coupled lens is connected with two liquid crystal light valves respectively with optical fiber directional coupler by optical fiber, the going out on the focus that luminous point is arranged on collimation lens of described optical fiber; Described receiving end mainly comprises the initial polarization direction that is vertically set in the emitting parallel light road and orthogonal double polarizing light analyzer at 45 mutually, and the light intensity detector on being placed on convergent lens thereafter and being placed on the convergent lens focus reaches the roll angle signal processing circuit that links to each other with this detector.
4. pick-up unit according to claim 3 is characterized in that: described collimation lens is placed in the emitting light path of described polarization splitting prism or with two collimation lenses and is placed on respectively in the input path of described two liquid crystal light valves.
5. implement pick-up unit as method as described in the claim 2, form by the receiving end that is placed on the transmitting terminal on the benchmark and be placed on the testee, it is characterized in that: described transmitting terminal mainly comprises the timesharing modulator, be subjected to two power source of semiconductor laser of modulators modulate, two semiconductor lasers that link to each other respectively with two power source of semiconductor laser, polarization splitting prism, be arranged on two collimation lenses between semiconductor laser and the polarization splitting prism, two polarizers, going out on the focus that luminous point is separately positioned on described two collimation lenses of described two semiconductor lasers, described two polarizers are placed on respectively on two adjacent faces of polarization splitting prism; Described receiving end mainly comprises the initial polarization direction that is vertically set in the emitting parallel light road and orthogonal double polarizing light analyzer at 45 mutually, and the light intensity detector on being placed on convergent lens thereafter and being placed on the convergent lens focus reaches the roll angle signal processing circuit that links to each other with this detector.
6. according to claim 3 or 4 described pick-up units, it is characterized in that: described receiving end also comprises polarization splitting prism, four-quadrant light intensity detector and the collimation signal processing circuit that links to each other with this detector, described polarization splitting prism is placed in the preceding parallel light path of analyzer, and described four-quadrant light intensity detector is placed in the polarization splitting prism emitting light path.
7. pick-up unit according to claim 5, it is characterized in that: described receiving end also comprises polarization splitting prism, four-quadrant light intensity detector and the collimation signal processing circuit that links to each other with this detector, described polarization splitting prism is placed in the preceding parallel light path of analyzer, and described four-quadrant light intensity detector is placed in the polarization splitting prism emitting light path.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021236429A CN1170119C (en) | 2002-07-05 | 2002-07-05 | Photoelectric detection method and device based on orthogonal dual polarized light beams for rolled angle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021236429A CN1170119C (en) | 2002-07-05 | 2002-07-05 | Photoelectric detection method and device based on orthogonal dual polarized light beams for rolled angle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1396435A true CN1396435A (en) | 2003-02-12 |
| CN1170119C CN1170119C (en) | 2004-10-06 |
Family
ID=4745176
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021236429A Expired - Fee Related CN1170119C (en) | 2002-07-05 | 2002-07-05 | Photoelectric detection method and device based on orthogonal dual polarized light beams for rolled angle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1170119C (en) |
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100365381C (en) * | 2005-12-28 | 2008-01-30 | 北京交通大学 | Method and apparatus for enhancing measuring sensitivity of rotating corner |
| CN102109330A (en) * | 2010-11-26 | 2011-06-29 | 中国科学院上海技术物理研究所 | Light beam position and polarization angle common light path detection device and method |
| CN102230883A (en) * | 2011-04-26 | 2011-11-02 | 上海理工大学 | High-resolution high-speed polarization difference imaging method |
| CN103344199A (en) * | 2013-06-28 | 2013-10-09 | 中国科学院西安光学精密机械研究所 | Method for realizing space angle measurement by square wave modulation |
| CN104792268A (en) * | 2014-01-22 | 2015-07-22 | 中央研究院 | Optical measuring system and method for measuring angle and rotating speed by using same |
| CN105157576A (en) * | 2015-05-27 | 2015-12-16 | 合肥工业大学 | Laser measuring device and method capable of achieving three-dimensional displacement measurement |
| CN108278980A (en) * | 2017-12-27 | 2018-07-13 | 中国科学院长春光学精密机械与物理研究所 | Torsion angle dynamic measurement device based on piezoelectricity beat platform and method |
| CN109458956A (en) * | 2018-12-06 | 2019-03-12 | 中国科学院长春光学精密机械与物理研究所 | A kind of torsion angle measuring device and method using polarization theory |
| CN110595393A (en) * | 2019-09-12 | 2019-12-20 | 上海理工大学 | Roll angle heterodyne interference measurement device and measurement method based on half-wave plate |
| CN110873931A (en) * | 2018-08-29 | 2020-03-10 | 中国科学院上海光学精密机械研究所 | Space light and optical fiber optical coupling device and method with stable optical axis of position-free detector |
| CN111781169A (en) * | 2019-04-03 | 2020-10-16 | 阳程科技股份有限公司 | Polarized light alignment detection device and detection method |
| TWI712824B (en) * | 2018-07-04 | 2020-12-11 | 陽程科技股份有限公司 | Polarized light alignment detection device and detection method |
| WO2022182319A1 (en) * | 2021-02-26 | 2022-09-01 | Roketsan Roket Sanayi̇i̇ Ti̇caret A.Ş. | Uniaxial rolling angle measurement device and method |
| WO2022182318A3 (en) * | 2021-02-26 | 2022-09-29 | Roketsan Roket Sanayi̇i̇ Ti̇caret A.Ş. | Triaxial angle measurement device and method |
-
2002
- 2002-07-05 CN CNB021236429A patent/CN1170119C/en not_active Expired - Fee Related
Cited By (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100365381C (en) * | 2005-12-28 | 2008-01-30 | 北京交通大学 | Method and apparatus for enhancing measuring sensitivity of rotating corner |
| CN102109330A (en) * | 2010-11-26 | 2011-06-29 | 中国科学院上海技术物理研究所 | Light beam position and polarization angle common light path detection device and method |
| CN102109330B (en) * | 2010-11-26 | 2012-11-14 | 中国科学院上海技术物理研究所 | Light beam position and polarization angle common light path detection device and method |
| CN102230883A (en) * | 2011-04-26 | 2011-11-02 | 上海理工大学 | High-resolution high-speed polarization difference imaging method |
| CN102230883B (en) * | 2011-04-26 | 2013-04-17 | 上海理工大学 | High-resolution high-speed polarization difference imaging method |
| CN103344199B (en) * | 2013-06-28 | 2016-06-08 | 中国科学院西安光学精密机械研究所 | Method for realizing space angle measurement by square wave modulation |
| CN103344199A (en) * | 2013-06-28 | 2013-10-09 | 中国科学院西安光学精密机械研究所 | Method for realizing space angle measurement by square wave modulation |
| CN104792268A (en) * | 2014-01-22 | 2015-07-22 | 中央研究院 | Optical measuring system and method for measuring angle and rotating speed by using same |
| CN105157576B (en) * | 2015-05-27 | 2021-03-26 | 合肥工业大学 | Laser measuring device and method capable of simultaneously realizing three-dimensional displacement measurement |
| CN105157576A (en) * | 2015-05-27 | 2015-12-16 | 合肥工业大学 | Laser measuring device and method capable of achieving three-dimensional displacement measurement |
| CN108278980A (en) * | 2017-12-27 | 2018-07-13 | 中国科学院长春光学精密机械与物理研究所 | Torsion angle dynamic measurement device based on piezoelectricity beat platform and method |
| TWI712824B (en) * | 2018-07-04 | 2020-12-11 | 陽程科技股份有限公司 | Polarized light alignment detection device and detection method |
| CN110873931A (en) * | 2018-08-29 | 2020-03-10 | 中国科学院上海光学精密机械研究所 | Space light and optical fiber optical coupling device and method with stable optical axis of position-free detector |
| CN110873931B (en) * | 2018-08-29 | 2022-04-05 | 中国科学院上海光学精密机械研究所 | Space light and optical fiber optical coupling device and method with stable optical axis of position-free detector |
| CN109458956A (en) * | 2018-12-06 | 2019-03-12 | 中国科学院长春光学精密机械与物理研究所 | A kind of torsion angle measuring device and method using polarization theory |
| CN111781169A (en) * | 2019-04-03 | 2020-10-16 | 阳程科技股份有限公司 | Polarized light alignment detection device and detection method |
| CN111781169B (en) * | 2019-04-03 | 2023-08-22 | 阳程科技股份有限公司 | Polarized light alignment detection device and detection method |
| CN110595393A (en) * | 2019-09-12 | 2019-12-20 | 上海理工大学 | Roll angle heterodyne interference measurement device and measurement method based on half-wave plate |
| WO2022182319A1 (en) * | 2021-02-26 | 2022-09-01 | Roketsan Roket Sanayi̇i̇ Ti̇caret A.Ş. | Uniaxial rolling angle measurement device and method |
| WO2022182318A3 (en) * | 2021-02-26 | 2022-09-29 | Roketsan Roket Sanayi̇i̇ Ti̇caret A.Ş. | Triaxial angle measurement device and method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1170119C (en) | 2004-10-06 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN1170119C (en) | Photoelectric detection method and device based on orthogonal dual polarized light beams for rolled angle | |
| WO2021017098A1 (en) | Differential laser interferometric nanometer displacement measurement apparatus and method employing sinusoidal phase modulation | |
| CN1285883C (en) | Method and equipment for measuring rolling angle | |
| CN101354243B (en) | Non-contact laser detection method of guide rail rolling angle | |
| CN104535019B (en) | A kind of rolling angle measurement device and method of double diffraction grating difference interference | |
| CN100468044C (en) | Tester and method for residual stress of seniconductor material | |
| CN102679882B (en) | Phase modulation grating sensor and method for realizing measurement | |
| CN101319958B (en) | Quarter-wave plate fast axis direction real-time measuring device and method | |
| CN101067546A (en) | Method and apparatus for reducing heterodyne interference nonlinear error first harmonic component | |
| CN102878953B (en) | Precision Angle Measuring Method and Device | |
| CN102692725B (en) | System and method for improving laser collimation precision by utilizing optical phase conjugation principle | |
| CN1696632A (en) | Intelligent comprehensive measuring instrument for half-wave voltage and wave plate phase delay of extinction ratio of crystal | |
| CN1844868A (en) | Method and apparatus for measuring laser wavelength by heterodyne interference method | |
| CN109884368B (en) | Subway/coal mine stray current optical fiber sensor closed-loop control device and method based on compensation coil | |
| CN106248195B (en) | The high robust homodyne laser vibration measurer and four steppings of additional phase shift compensation | |
| CN102169012A (en) | Method for improving vibration measurement precision of semiconductor laser sine phase modulation interferometer | |
| CN112033301B (en) | Scrape trigger crookedness optical fiber measurement system | |
| US20240077549A1 (en) | Optical measuring device and method for plasma magnetic field with adjustable sensitivity | |
| CN201273815Y (en) | Non-contact laser measurement apparatus for guidance rail rolling angle | |
| CN106441083A (en) | Laser feedback interferometer | |
| CN100340869C (en) | Electro-optical double-modulation polarized light laser ranging method and device | |
| CN1320812A (en) | Phase difference measurer and heterodyne interference measuring system using it | |
| CN216721333U (en) | System for measuring half-wave voltage of lithium niobate phase modulator | |
| CN110849293A (en) | Four-beam structure laser heterodyne interference roll angle measuring device and method | |
| CN112180390B (en) | Distance measuring device and method |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| C19 | Lapse of patent right due to non-payment of the annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |