CN105157576B - Laser measuring device and method capable of simultaneously realizing three-dimensional displacement measurement - Google Patents
Laser measuring device and method capable of simultaneously realizing three-dimensional displacement measurement Download PDFInfo
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Abstract
The invention discloses a laser measuring device and method capable of simultaneously realizing three-dimensional displacement measurement, which comprises a laser, an optical isolator, an aperture diaphragm, a polarizing film, a Polarization Beam Splitter (PBS), a quarter wave plate, a plano-convex lens, a right-angle prism, a plane mirror, a depolarization beam splitter (NPBS), a half wave plate, a photodiode and a four-quadrant detector. The invention is based on the Michelson interference measurement principle and the laser auto-collimation principle, and utilizes the same laser and the light path to simultaneously realize the three-dimensional measurement of one-dimensional linear displacement and two-dimensional angular displacement measurement. The invention can realize the measurement of three displacement parameters by using the same optical path system under the conditions of high precision and high dynamic, has the characteristics of simple structure and device, lower cost and high measurement speed, and can be applied to the fields of precision measurement, precision instruments and advanced manufacturing.
Description
Technical Field
The invention relates to the field of optical measurement, in particular to a laser measuring device and a laser measuring method capable of simultaneously realizing three-dimensional displacement measurement.
Background
With the rapid development of modern national defense construction, industrial production and scientific technology, the positioning and measurement of precise displacement in a large range are required in the fields of micromachines, ultra-precision machining, micro assembly, nanotechnology and the like. The displacement measurement is very important in the nanometer era of the current machining and metering, especially in the application of ultra-precise working tables and numerical control machine tools. The angle measurement is an important component of geometric measurement, and the measurement of the tiny angle has extremely important significance and effect in many fields such as precision machining, aerospace, military, communication and the like. The method for measuring linear displacement and angular displacement by laser can realize the measurement of a plurality of degrees of freedom under the conditions of high precision and high dynamic, has the advantages of high speed, non-contact measurement, low power consumption, miniaturization and the like, and is one of important methods for the measurement and development of object position parameters.
Most of the current real-time detection systems adopt laser interferometer structures, such as HP5529A dynamic correction devices, Renishaw, Zygo and other laser measurement systems. The optical structure systems adopt mature optical measurement technology, strengthen data acquisition and processing functions and have higher measurement accuracy. However, when the measurement is performed, the measurement still stays at the measurement of a single parameter, and only one parameter component is measured at one time, so the measurement process is troublesome, and the requirement of simultaneously performing real-time dynamic measurement of a plurality of parameters cannot be met. The germany sio three-beam interferometer can simultaneously measure one-dimensional length displacement and two-dimensional angular displacement. However, the method is an indirect measurement method, and the angle is converted by measuring the distance, so that the introduced error is large, the precision is low, and the adopted whole system structure device is complex, inconvenient and time-consuming to adjust and high in cost. Generally, a laser measuring system which has a simple structure, a large measuring range, convenience in adjustment, reliable performance, high precision, a simple algorithm and low cost and can simultaneously realize measurement of a plurality of parameters has not been successfully developed so far.
Disclosure of Invention
The invention aims to provide a laser measuring device and a laser measuring method capable of simultaneously realizing three-dimensional displacement measurement, so as to solve the problems in the prior art.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
can realize three-dimensional displacement measurement's laser surveying device simultaneously, its characterized in that: the frequency-stabilized helium-neon laser comprises a frequency-stabilized helium-neon laser, wherein a second polarization beam splitter is arranged behind an emergent light path of the frequency-stabilized helium-neon laser, the emergent end of the frequency-stabilized helium-neon laser is right opposite to the left side of a rear mirror surface of the second polarization beam splitter, an optical isolator, a first small hole diaphragm and a first polarization beam splitter are further sequentially arranged behind the emergent light path of the frequency-stabilized helium-neon laser between the frequency-stabilized helium-neon laser and the second polarization beam splitter, a polaroid is tightly attached to the rear mirror surface of the first polarization beam splitter, a first quarter wave plate is tightly attached to the front mirror surface of the first polarization beam splitter, a plano-convex lens is tightly attached to the left mirror surface of the first polarization beam splitter, a four-corner detector aligned with the plano-convex lens is arranged outside the left mirror surface of the first polarization beam splitter, a second quarter wave plate is tightly attached to the left mirror surface of the second polarization beam splitter, a third, a fourth quarter wave plate is arranged on the right side of the front mirror surface of the second polarization beam splitter prism in a close fit manner, a first right-angle prism is arranged on the front side of the right mirror surface of the second polarization beam splitter prism in a close fit manner, a second right-angle prism is arranged on the right side of the rear mirror surface of the second polarization beam splitter prism in a close fit manner, the first right-angle prism and the second right-angle prism are respectively close to the corresponding mirror surface of the second polarization beam splitter prism through respective bevel edge surfaces, a first plane reflecting mirror is arranged outside the left mirror surface of the second polarization beam splitter prism, a second plane reflecting mirror is arranged outside the front mirror surface of the second polarization beam splitter prism, the first plane reflecting mirror is over against the second quarter wave plate, the second plane reflecting mirror is over against the third quarter wave plate and the fourth quarter wave plate, the left mirror surface of the depolarization beam splitter prism is over against the rear side of the right mirror surface of the second polarization beam splitter, a fifth quarter wave plate is arranged on the left mirror surface of the depolarization beam splitter prism in a close fit manner, a second small aperture diaphragm is arranged between the left mirror surface of the depolarization beam splitter prism and the second polarization beam splitter prism, a third polarization beam splitter prism is arranged on the rear mirror surface of the depolarization beam splitter prism in a close fit manner through the front mirror surface of the third polarization beam splitter prism, a fourth polarization beam splitter is arranged on the right mirror surface of the depolarization beam splitter prism in a close fit manner through the left mirror surface of the fourth polarization beam splitter prism, a half wave plate is arranged between the front mirror surface of the third polarization beam splitter prism and the rear mirror surface of the depolarization beam splitter prism, a first photodiode is arranged outside the right mirror surface of the third polarization beam splitter prism, a third photodiode is arranged outside the rear mirror surface of the third polarization beam splitter prism, a second photodiode is arranged outside the right mirror surface of the fourth polarization beam splitter prism, a fourth photodiode is arranged outside the front mirror surface of the fourth polarization beam splitter, The third photodiode is respectively opposite to the right mirror surface and the rear mirror surface of the third polarization beam splitter prism, and the second photodiode and the fourth photodiode are respectively opposite to the right mirror surface and the front mirror surface of the fourth polarization beam splitter prism.
The laser measuring device capable of simultaneously realizing three-dimensional displacement measurement is characterized in that: light beams emitted by the frequency-stabilized He-Ne laser firstly pass through an optical isolator and a first pinhole diaphragm, then are changed into linear polarization P light through a polaroid, the polarization P light enters a first polarization beam splitter prism and then exits through a first quarter-wave plate, at the moment, the linear polarization P light is changed into elliptically polarized light, the elliptically polarized light enters a second polarization beam splitter prism and is divided into P light and S light, the light intensity ratio of the P light to the S light is 2:1, the P light is used as a measuring light beam, the S light is used as a reference light beam for measuring linear displacement through polarization interference, the S light is changed into circularly polarized light through a second quarter-wave plate after being transmitted through the second quarter-wave plate, the circularly polarized light is changed into P light, the P light is transmitted to a first right-angle prism through the second polarization beam splitter prism and then is transmitted through the second polarization beam splitter prism and the second quarter-wave plate after being reflected twice through the first right-, the light beam is reflected by the first plane reflector, then passes through the second quarter wave plate, the polarization state of the linearly polarized light is changed by the second quarter wave plate twice, the P light becomes S light, the S light is reflected to the second right-angle prism by the second polarization beam splitter prism, the light beam is reflected by the second right-angle prism twice, then enters the second polarization beam splitter prism again and is reflected, the light beam is changed into circularly polarized light by the second quarter wave plate, the light beam is reflected by the first plane reflector, the light beam passes through the second quarter wave plate again, the polarized light is changed into P light, the P light finally passes through the second polarization beam splitter prism and is emitted to the second pinhole diaphragm, and the P light at the moment is used as a reference light beam for polarization interference measurement;
the elliptically polarized light generated by the first quarter-wave plate 7 is transmitted by the second polarization splitting prism to be used as a measuring light beam, the measuring light beam is incident to the third quarter-wave plate, the elliptically polarized light is reflected by the second plane mirror and passes through the third quarter-wave plate again to be changed into 45-degree linearly polarized light, the measuring light beam is incident to the second polarization splitting prism to be divided into P light and S light, the P light is used for measuring a light beam with two-dimensional angular displacement, the light returns along the original path, passes through the first quarter-wave plate and the first polarization splitting prism, is changed into the S light, is reflected to the plano-convex lens and is focused, the deviation of a detection light spot in two directions is received by a four-quadrant photoelectric detector, the deviation amount is in a linear relation with the angle of the reflected light beam, and; the light beam is reflected by a D point of a second plane emission mirror, the S light reflected by a second polarization beam splitter prism is used as a measuring light beam for measuring linear displacement by polarization interference, the S light enters a first right-angle prism, is reflected twice, enters a second polarization beam splitter prism, is reflected twice, penetrates a fourth quarter wave plate, then is changed into circularly polarized light, is reflected by an E point of the second plane reflection mirror, passes through the third quarter wave plate again, is changed into P light, the P light is transmitted through the second polarization beam splitter prism, is reflected twice by the second right-angle prism, passes through the second polarization beam splitter prism again, penetrates the fourth quarter wave plate, is reflected by an F point of the second plane reflection mirror, passes through the fourth quarter wave plate, is subjected to primary conversion of the polarization state, finally is changed into S light, is reflected by the second polarization beam splitter prism, is emitted to a second aperture diaphragm, and two paths of orthogonal linearly polarized light P light and S light emitted from an interference part are used as measuring light beams for measuring linear displacement by, through a fifth quarter-wave plate, linear polarization is changed into left-handed and right-handed circular polarization, the circular polarization is divided into two paths of light through a depolarization spectroscope, wherein one path of light forms two paths of interference signals with the phase difference of 180 degrees through a fourth polarization beam splitter prism, and the two paths of interference signals are respectively received by a second photodiode and a fourth photodiode; the other path of light changes the rotation direction of circular polarization light through a half wave plate, and then passes through a third polarization beam splitter prism to form two paths of interference signals with the phase difference of 180 degrees, the two paths of interference signals are respectively received by a first photodiode and a third photodiode, and the phase differences of four paths of orthogonal interference signals are respectively 90 degrees and are used for measuring one-dimensional linear displacement.
The laser measuring device capable of simultaneously realizing three-dimensional displacement measurement is characterized in that: a cuboid structure formed by gluing a polarizing plate, a first quarter-wave plate and a plano-convex lens on three mirror surfaces of a first polarization beam splitter prism forms a first optical component, and an included angle between the fast axis direction of the first quarter-wave plate and the horizontal axis of the plane where the first quarter-wave plate is located is 27.36 degrees.
The laser measuring device capable of simultaneously realizing three-dimensional displacement measurement is characterized in that: the second optical component is formed by a structure formed by gluing a second quarter-wave plate, a third quarter-wave plate, a fourth quarter-wave plate, a first right-angle prism and a second right-angle prism on the mirror surface of a second polarization beam splitter prism, wherein the included angle between the fast axis direction of the third quarter-wave plate and the horizontal axis of the plane where the third quarter-wave plate is located is 22.5 degrees, and the included angle between the fast axis direction of the second quarter-wave plate and the fourth quarter-wave plate and the horizontal axis of the plane where the second quarter-wave plate and the fourth quarter-wave plate are located is 45.
The laser measuring device capable of simultaneously realizing three-dimensional displacement measurement is characterized in that: the included angle between the fast axis direction of the fifth-fourth wave plate and the horizontal axis of the plane is 45 degrees, and the included angle between the fast axis direction of the half wave plate and the horizontal axis of the plane is 22.5 degrees.
The laser measuring method capable of simultaneously realizing three-dimensional displacement measurement is characterized by comprising the following steps of: firstly, collimation adjustment is carried out, so that the frequency stabilized helium-neon laser, the first plane reflector, the second plane reflector and the optical system are aligned, all optical elements are fixed, and the second plane reflector is moved slowly, and the method comprises the following steps:
(1) and (3) measuring parameters of a yaw angle and a pitch angle of the two-dimensional angular displacement: measuring the yaw angle theta caused by movement of the mirrorYAnd a pitch angle thetaPThe four-quadrant detector receives and calculates the signal, and the calculation formula is as follows:
θY＝rY/2f,θP＝rP/2f，
where f is the focal length of the plano-convex lens, rYIs the displacement deviation caused by the yaw angle, rPFor the displacement offset caused by the pitch angle,
the signals received by the four quadrants of the four quadrant detector are set to Vi(i ═ 1, 2, 3, 4), as measured by the following equation:
θY＝KY·ΘY,θP＝KP·ΘY，
wherein KYAnd KPIs a calibration constant, ΘYAnd ΘPCan be prepared from the following formulaTo determine and calculate thetaYAnd thetaP，
(2) Measurement of one-dimensional linear displacement parameters: the vibration equations of the measuring beam and the reference beam, i.e., the P light and the S light, emitted from the second aperture stop can be expressed by the following equation:
E1＝acos(kr1-ωt)，
E2＝acos(kr2-ωt)，
where a is the amplitude of the two beams, r1For measuring the optical path traversed by the light beam, r2The optical path traversed by the reference beam, ω the initial phase,
two paths of orthogonal linearly polarized light P light and S light emitted from the second pinhole diaphragm are converted into left-handed and right-handed circularly polarized light through a fifth quarter-wave plate, the left-handed and right-handed circularly polarized light is divided into two paths of light by a depolarization spectroscope, wherein one path of light forms two paths of interference signals with a phase difference of 180 degrees through a fourth polarization beam splitter prism, the two paths of interference signals are respectively received by a second photodiode and a second photodiode, the other path of light changes the rotation direction of the circularly polarized light through a half-wave plate, the two paths of interference signals with a phase difference of 180 degrees are also formed through a third polarization beam splitter prism and are respectively received by a first photodiode and a third photodiode, the phase differences of the four paths of orthogonal interference signals are respectively 90 degrees and are used for measuring one-dimensional linear displacement, and the final interference signals can be expressed as:
D2：E2'＝a2[1+cos(kr1-kr2)]，
D4：E4'＝a2[1+cos(kr1-kr2-π)]，
wherein EnThe' n represents a first photoelectric detector, a second photoelectric detector, a third photoelectric detector and a fourth photoelectric detector, interference optical signals are received by the photoelectric sensors and are converted into orthogonal electric signals, the orthogonal electric signals are processed by a post-stage circuit, and the requirements of high-speed real-time dynamic displacement measurement are met by combining a data subdivision acquisition card.
The invention is based on the premise of relatively mature length measurement technology and micro angle measurement technology, realizes the unification of one-dimensional linear displacement and two-dimensional angular displacement measurement in the same measurement system, can simultaneously measure the one-dimensional length and the two-dimensional angle of an object in real time, and has important theoretical significance and practical significance in a plurality of fields relating to precision test and measurement.
Compared with the prior art, the invention has the beneficial effects that:
the invention provides a measuring method and a structural device capable of simultaneously measuring three parameters of one-dimensional linear displacement and two-dimensional angular displacement, which unify the measurement of the one-dimensional linear displacement and the two-dimensional angular displacement in the same measuring system and can simultaneously measure the one-dimensional linear displacement and the two-dimensional angular displacement of the movement of an object in real time.
The invention solves the problems that the traditional method can only measure a single parameter, only measures one parameter component at one time, has troublesome measuring process and can not simultaneously carry out real-time dynamic measurement of a plurality of parameters.
Compared with the simultaneous measurement system of the angular displacement through the distance conversion angle, the simultaneous measurement system of the angular displacement solves the technical problems of large introduced error, low precision, complex structure, inconvenience in adjustment, high cost and the like.
Drawings
Fig. 1 is a schematic diagram of an optical structure capable of simultaneously measuring three parameters of one-dimensional linear displacement and two-dimensional angular displacement.
FIG. 2 is a schematic structural diagram of a first optical cement assembly.
FIG. 3 is a schematic structural diagram of the second optical cement assembly.
FIG. 4 is a schematic diagram of the fast axis direction of the first quarter-wave plate (the z direction is the beam propagation direction).
Fig. 5 is a schematic diagram of the fast axis direction of the third quarter-wave plate (the z direction is the light beam propagation direction).
FIG. 6 is a schematic diagram of the fast axes of the first, fourth, and fifth quarter-wave plates (the z direction is the light beam propagation direction).
FIG. 7 is a schematic diagram of the fast axis of a half-wave plate (the z direction is the direction of beam propagation).
Detailed Description
As shown in fig. 1-7, a laser measuring device capable of simultaneously realizing three-dimensional displacement measurement includes a frequency stabilized he-ne laser 1, a second polarization beam splitter 9 is disposed behind an exit light path of the frequency stabilized he-ne laser 1, a light exit end of the frequency stabilized he-ne laser 1 is right opposite to a left side of a rear mirror surface of the second polarization beam splitter 9, a frequency stabilized he-ne laser 1 between the frequency stabilized he-ne laser 1 and the second polarization beam splitter 9 is further sequentially disposed behind the exit light path of the frequency stabilized he-ne laser 1, a first small aperture diaphragm 3, and a first polarization beam splitter 5, a polarizer 4 is closely disposed on the rear mirror surface of the first polarization beam splitter 5, a first quarter wave plate 7 is closely disposed on a front mirror surface of the first polarization beam splitter 5, a plano-convex lens 6 is closely disposed on a left mirror surface of the first polarization beam splitter 5, a four-quadrant detector 8 aligned with the plano-convex lens 6 is disposed outside the left mirror surface of the first, a second quarter wave plate 10 is arranged on the left mirror surface of the second polarization beam splitter 9 in a clinging manner, a third quarter wave plate 12 is arranged on the left side of the front mirror surface of the second polarization beam splitter 9 in a clinging manner, a fourth quarter wave plate 13 is arranged on the right side of the front mirror surface of the second polarization beam splitter 9 in a clinging manner, a first right-angle prism 15 is arranged on the front side of the right mirror surface of the second polarization beam splitter 9 in a clinging manner, a second right-angle prism 16 is arranged on the right side of the rear mirror surface of the second polarization beam splitter 9 in a clinging manner, the first and second right- angle prisms 15 and 16 are respectively clinging to the corresponding mirror surface of the second polarization beam splitter 9 through respective oblique side surfaces, a first plane reflector 11 is arranged outside the left mirror surface of the second polarization beam splitter 9, a second plane reflector 14 is arranged outside the front mirror surface of the second polarization beam splitter 9, the first plane reflector 11 is opposite to the second quarter wave plate 10, the second plane, the device also comprises a depolarization beam splitter prism 19, a third polarization beam splitter prism 21 and a fourth polarization beam splitter prism 22, wherein the left mirror surface of the depolarization beam splitter prism 19 is right opposite to the rear side of the right mirror surface of the second polarization beam splitter prism 9, the left mirror surface of the depolarization beam splitter prism 19 is closely provided with a fifth-fourth quarter wave plate 18, a second small hole diaphragm 17 is also arranged between the left mirror surface of the depolarization beam splitter prism 19 and the second polarization beam splitter prism 9, the third polarization beam splitter prism 21 is closely arranged on the rear mirror surface of the depolarization beam splitter prism 19 through the front mirror surface thereof, the fourth polarization beam splitter prism 22 is closely arranged on the right mirror surface of the depolarization beam splitter prism 19 through the left mirror surface thereof, a half wave plate 20 is arranged between the front mirror surface of the third polarization beam splitter prism 21 and the rear mirror surface of the depolarization beam splitter prism 19, a first photodiode D1 is arranged outside the right mirror surface of the third polarization beam splitter prism 21, a third photodiode D3 is arranged outside the rear mirror surface of the third polarization beam splitter prism 21, a second photodiode D2 is disposed outside the right mirror surface of the fourth polarization splitting prism 22, a fourth photodiode D4 is disposed outside the front mirror surface of the fourth polarization splitting prism 22, the first photodiode D1 and the third photodiode D3 respectively face the right mirror surface and the rear mirror surface of the third polarization splitting prism 21, and the second photodiode D2 and the fourth photodiode D4 respectively face the right mirror surface and the front mirror surface of the fourth polarization splitting prism 22.
A light beam emitted by a frequency stabilized He-Ne laser 1 passes through an optical isolator 2 and a first pinhole diaphragm 3, then is changed into linearly polarized light P through a polarizing film 4, the polarized light P enters a first polarization beam splitter prism 5 and then exits through a first quarter wave plate 7, the linearly polarized light P is changed into elliptically polarized light, the elliptically polarized light enters a second polarization beam splitter prism 9 and is divided into light P and light S, the light intensity ratio of the light P to the light S is 2:1, the light P serves as a measuring beam, the light S serves as a reference beam for measuring linear displacement by polarization interference, the light S is changed into circularly polarized light through a second quarter wave plate 10, the light is reflected at a point A of a first plane reflector 11 and passes through a second quarter wave plate 10 again, the circularly polarized light is changed into light P, the light P is transmitted to a first right angle prism 15 through the second polarization beam splitter prism 9, and is transmitted through the second polarization beam splitter prism 9 and the second quarter wave plate 10 after being reflected twice by the first right angle prism 15, the light beam is reflected at a point B of the first plane reflector 11, then passes through the second quarter-wave plate 10, the polarization state of linearly polarized light is changed twice through the second quarter-wave plate 10, the P light becomes S light, the S light is reflected to the second right-angle prism 16 through the second polarization splitting prism 9, the light beam is reflected twice through the second right-angle prism 16, and then enters the second polarization splitting prism 9 again and is reflected, then passes through the second quarter-wave plate 10 to become circularly polarized light, is reflected at a point C of the first plane reflector 11, passes through the second quarter-wave plate 10 again, the polarized light becomes P light, the P light finally passes through the second polarization splitting prism 9 and is emitted to the second pinhole diaphragm 17, and the P light at the moment is used as a reference light beam for polarization interference measurement;
the elliptically polarized light generated by the first quarter-wave plate 7 is transmitted by the second polarization splitting prism 9 to be used as a measuring light beam and enters the third quarter-wave plate 12, the elliptically polarized light is reflected by the second plane reflector 14 at a point D and passes through the third quarter-wave plate 12 again to be changed into 45-degree linearly polarized light, the elliptically polarized light enters the second polarization splitting prism 9 to be divided into P light and S light, the P light is used for measuring a light beam with two-dimensional angular displacement, the light returns along the original path, passes through the first quarter-wave plate 7 and the first polarization splitting prism 5, is changed into S light, is reflected to the plano-convex lens 6 and is focused, the four-quadrant photoelectric detector 8 receives the deviation of a detection light spot in two directions, and the magnitude of the deviation is in linear relation with the angle of the reflected light beam and can be used for measuring the two-dimensional angular displacement; the S light is a measuring beam used for measuring linear displacement by polarization interference, and the S light enters the first right-angle prism 15, is reflected twice, enters the second polarization beam splitter prism 9, is reflected, passes through the fourth quarter-wave plate 13, then becomes circularly polarized light, is reflected at the point E of the second plane mirror 14, passes through the third quarter-wave plate 12 again, becomes P light, is transmitted through the second polarization beam splitter prism 9, is reflected twice to the second right-angle prism 16, passes through the second polarization beam splitter prism 9 again, passes through the fourth quarter-wave plate 13, is reflected at the point F of the second plane mirror 14, passes through the fourth quarter-wave plate 13, undergoes primary conversion of its light polarization state, finally becomes S light, is reflected by the second polarization beam splitter prism 9, and is emitted to the second aperture stop 17. From the interference partThe emitted two paths of orthogonal linearly polarized light P light and S light pass through a fifth quarter-wave plate 18, the linearly polarized light is changed into circularly polarized light which rotates left and right, the circularly polarized light is divided into two paths of light equally through a depolarization beam splitter 19, one path of light forms two paths of interference signals with the phase difference of 180 degrees through a fourth polarization beam splitter 22, and the two paths of interference signals are respectively processed by a second photodiode D2And a fourth photodiode D4Receiving; the other path of light passes through a half-wave plate 20 to change the rotation direction of the circularly polarized light, passes through a third polarization beam splitter prism 21 to form two paths of interference signals with the phase difference of 180 degrees, and the two paths of interference signals are respectively transmitted by a first photodiode D1And a third photodiode D3And receiving four paths of orthogonal interference signals, wherein the phase difference of the four paths of orthogonal interference signals is 90 degrees respectively, and the four paths of orthogonal interference signals are used for measuring one-dimensional linear displacement.
A cuboid structure formed by gluing a polarizing plate 4, a first quarter-wave plate 7 and a plano-convex lens 6 on three mirror surfaces of a first polarization beam splitter prism 5 forms a first optical component, and an included angle between the fast axis direction of the first quarter-wave plate 7 and the horizontal axis of the plane where the fast axis direction is located is 27.36 degrees.
The second optical assembly is formed by a structure formed by gluing a second quarter-wave plate 10, a third quarter-wave plate 12, a fourth quarter-wave plate 13, a first right-angle prism 15 and a second right-angle prism 16 on the mirror surface of the second polarization beam splitter prism 9, wherein the included angle between the fast axis direction of the third quarter-wave plate 12 and the horizontal axis of the plane where the third quarter-wave plate is located is 22.5 degrees, and the included angle between the fast axis direction of the second quarter-wave plate 10 and the fourth quarter-wave plate 13 and the horizontal axis of the plane where the second quarter-wave plate is located is 45 degrees.
The included angle between the fast axis direction of the fifth quarter wave plate 18 and the horizontal axis of the plane is 45 degrees, and the included angle between the fast axis direction of the half wave plate 20 and the horizontal axis of the plane is 22.5 degrees.
The laser measuring method capable of simultaneously realizing three-dimensional displacement measurement includes the following steps of firstly carrying out collimation adjustment to align a frequency stabilized helium-neon laser 1, a first plane reflector 11, a second plane reflector 14 and an optical system, fixing all optical elements and slowly moving the second plane reflector 14:
(1) and (3) measuring parameters of a yaw angle and a pitch angle of the two-dimensional angular displacement: caused by movement of the measuring mirrorYaw angle theta ofYAnd a pitch angle thetaPThe four-quadrant detector receives and calculates the signal, and the calculation formula is as follows:
θY＝rY/2f,θP＝rP/2f，
where f is the focal length of the plano-convex lens, rYIs the displacement deviation caused by the yaw angle, rPFor the displacement offset caused by the pitch angle,
the signals received by the four quadrants of the four quadrant detector are set to Vi(i ═ 1, 2, 3, 4), as measured by the following equation:
θY＝KY·ΘY,θP＝KP·ΘY，
wherein KYAnd KPIs a calibration constant, ΘYAnd ΘPCan be determined by the following equation, and θ is calculatedYAnd thetaP，
(2) Measurement of one-dimensional linear displacement parameters: the vibration equations of the measuring beam and the reference beam, i.e., the P light and the S light, emitted from the second aperture stop 17 can be expressed by the following equation:
E1＝acos(kr1-ωt)，
E2＝acos(kr2-ωt)，
where a is the amplitude of the two beams, r1For measuring the optical path traversed by the light beam, r2The optical path traversed by the reference beam, ω the initial phase,
the two orthogonal linearly polarized light beams P and S emitted from the second pinhole diaphragm 17 are converted into circularly polarized light beams rotating left and right by the fifth quarter-wave plate 18, and are divided equally into two beams of light by the depolarizing beam splitter 19, wherein one beam of light forms two interference signals with a phase difference of 180 ° through the fourth polarizing beam splitter 22, and the two interference signals are respectively reflected by the second photodiode D2And a second photodiode D4Receiving the other path of light through a half-wave plate 20 to change the circular polarizationRotating, passing through the third polarization beam splitter prism 21 to form two interference signals with phase difference of 180 °, and respectively passing through the first photodiode D1And a third photodiode D3And receiving four paths of orthogonal interference signals, wherein the phase difference of the four paths of orthogonal interference signals is 90 degrees respectively, and the four paths of orthogonal interference signals are used for measuring one-dimensional linear displacement. The final interference signal can be expressed as:
D2：E2'＝a2[1+cos(kr1-kr2)]，
D4：E4'＝a2[1+cos(kr1-kr2-π)]，
wherein EnThe' n represents a first photoelectric detector, a second photoelectric detector, a third photoelectric detector and a fourth photoelectric detector, interference optical signals are received by the photoelectric sensors and are converted into orthogonal electric signals, the orthogonal electric signals are processed by a post-stage circuit, and the requirements of high-speed real-time dynamic displacement measurement are met by combining a data subdivision acquisition card.
Claims (6)
1. Can realize three-dimensional displacement measurement's laser surveying device simultaneously, its characterized in that: the frequency-stabilized helium-neon laser comprises a frequency-stabilized helium-neon laser, wherein a second polarization beam splitter is arranged behind an emergent light path of the frequency-stabilized helium-neon laser, the emergent end of the frequency-stabilized helium-neon laser is right opposite to the left side of a rear mirror surface of the second polarization beam splitter, an optical isolator, a first small hole diaphragm and a first polarization beam splitter are further sequentially arranged behind the emergent light path of the frequency-stabilized helium-neon laser between the frequency-stabilized helium-neon laser and the second polarization beam splitter, a polaroid is tightly attached to the rear mirror surface of the first polarization beam splitter, a first quarter wave plate is tightly attached to the front mirror surface of the first polarization beam splitter, a plano-convex lens is tightly attached to the left mirror surface of the first polarization beam splitter, a four-corner detector aligned with the plano-convex lens is arranged outside the left mirror surface of the first polarization beam splitter, a second quarter wave plate is tightly attached to the left mirror surface of the second polarization beam splitter, a third, a fourth quarter wave plate is arranged on the right side of the front mirror surface of the second polarization beam splitter prism in a close fit manner, a first right-angle prism is arranged on the front side of the right mirror surface of the second polarization beam splitter prism in a close fit manner, a second right-angle prism is arranged on the right side of the rear mirror surface of the second polarization beam splitter prism in a close fit manner, the first right-angle prism and the second right-angle prism are respectively close to the corresponding mirror surface of the second polarization beam splitter prism through respective bevel edge surfaces, a first plane reflecting mirror is arranged outside the left mirror surface of the second polarization beam splitter prism, a second plane reflecting mirror is arranged outside the front mirror surface of the second polarization beam splitter prism, the first plane reflecting mirror is over against the second quarter wave plate, the second plane reflecting mirror is over against the third quarter wave plate and the fourth quarter wave plate, the left mirror surface of the depolarization beam splitter prism is over against the rear side of the right mirror surface of the second polarization beam splitter, a fifth quarter wave plate is arranged on the left mirror surface of the depolarization beam splitter prism in a close fit manner, a second small aperture diaphragm is arranged between the left mirror surface of the depolarization beam splitter prism and the second polarization beam splitter prism, a third polarization beam splitter prism is arranged on the rear mirror surface of the depolarization beam splitter prism in a close fit manner through the front mirror surface of the third polarization beam splitter prism, a fourth polarization beam splitter is arranged on the right mirror surface of the depolarization beam splitter prism in a close fit manner through the left mirror surface of the fourth polarization beam splitter prism, a half wave plate is arranged between the front mirror surface of the third polarization beam splitter prism and the rear mirror surface of the depolarization beam splitter prism, a first photodiode is arranged outside the right mirror surface of the third polarization beam splitter prism, a third photodiode is arranged outside the rear mirror surface of the third polarization beam splitter prism, a second photodiode is arranged outside the right mirror surface of the fourth polarization beam splitter prism, a fourth photodiode is arranged outside the front mirror surface of the fourth polarization beam splitter, The third photodiode is respectively opposite to the right mirror surface and the rear mirror surface of the third polarization beam splitter prism, and the second photodiode and the fourth photodiode are respectively opposite to the right mirror surface and the front mirror surface of the fourth polarization beam splitter prism.
2. The laser measuring device capable of simultaneously realizing three-dimensional displacement measurement according to claim 1, characterized in that: light beams emitted by the frequency-stabilized He-Ne laser firstly pass through an optical isolator and a first pinhole diaphragm, then are changed into linear polarization P light through a polaroid, the polarization P light enters a first polarization beam splitter prism and then exits through a first quarter-wave plate, at the moment, the linear polarization P light is changed into elliptically polarized light, the elliptically polarized light enters a second polarization beam splitter prism and is divided into P light and S light, the light intensity ratio of the P light to the S light is 2:1, the P light is used as a measuring light beam, the S light is used as a reference light beam for measuring linear displacement through polarization interference, the S light is changed into circularly polarized light through a second quarter-wave plate after being transmitted through the second quarter-wave plate, the circularly polarized light is changed into P light, the P light is transmitted to a first right-angle prism through the second polarization beam splitter prism and then is transmitted through the second polarization beam splitter prism and the second quarter-wave plate after being reflected twice through the first right-, the light beam is reflected by the first plane reflector, then passes through the second quarter wave plate, the polarization state of the linearly polarized light is changed by the second quarter wave plate twice, the P light becomes S light, the S light is reflected to the second right-angle prism by the second polarization beam splitter prism, the light beam is reflected by the second right-angle prism twice, then enters the second polarization beam splitter prism again and is reflected, the light beam is changed into circularly polarized light by the second quarter wave plate, the light beam is reflected by the first plane reflector, the light beam passes through the second quarter wave plate again, the polarized light is changed into P light, the P light finally passes through the second polarization beam splitter prism and is emitted to the second pinhole diaphragm, and the P light at the moment is used as a reference light beam for polarization interference measurement;
the elliptically polarized light generated by the first quarter-wave plate is transmitted by the second polarization splitting prism to be used as a measuring light beam and enters the third quarter-wave plate, the elliptically polarized light is reflected by the second plane mirror and passes through the third quarter-wave plate again to be changed into 45-degree linearly polarized light, the elliptically polarized light enters the second polarization splitting prism and is divided into P light and S light, the P light is used for measuring a light beam with two-dimensional angular displacement, the light returns along the original path, passes through the first quarter-wave plate and the first polarization splitting prism, is changed into the S light, is reflected to the plano-convex lens and focused, the deviation of a detection light spot in two directions is received by a four-quadrant photoelectric detector, the magnitude of the deviation and the angle of the reflected light beam are in a linear relationship, and the four-quadrant photoelectric detector; the light beam is reflected by a D point of a second plane emission mirror, the S light reflected by a second polarization beam splitter prism is used as a measuring light beam for measuring linear displacement by polarization interference, the S light enters a first right-angle prism, is reflected twice, enters a second polarization beam splitter prism, is reflected twice, penetrates a fourth quarter wave plate, then is changed into circularly polarized light, is reflected by an E point of the second plane reflection mirror, passes through the third quarter wave plate again, is changed into P light, the P light is transmitted through the second polarization beam splitter prism, is reflected twice by the second right-angle prism, passes through the second polarization beam splitter prism again, penetrates the fourth quarter wave plate, is reflected by an F point of the second plane reflection mirror, passes through the fourth quarter wave plate, is subjected to primary conversion of the polarization state, finally is changed into S light, is reflected by the second polarization beam splitter prism, is emitted to a second aperture diaphragm, and two paths of orthogonal linearly polarized light P light and S light emitted from an interference part are used as measuring light beams for measuring linear displacement by, through a fifth quarter-wave plate, linear polarization is changed into left-handed and right-handed circular polarization, the circular polarization is divided into two paths of light through a depolarization spectroscope, wherein one path of light forms two paths of interference signals with the phase difference of 180 degrees through a fourth polarization beam splitter prism, and the two paths of interference signals are respectively received by a second photodiode and a fourth photodiode; the other path of light changes the rotation direction of circular polarization light through a half wave plate, and then passes through a third polarization beam splitter prism to form two paths of interference signals with the phase difference of 180 degrees, the two paths of interference signals are respectively received by a first photodiode and a third photodiode, and the phase differences of four paths of orthogonal interference signals are respectively 90 degrees and are used for measuring one-dimensional linear displacement.
3. The laser measuring device capable of simultaneously realizing three-dimensional displacement measurement according to claim 1, characterized in that: a cuboid structure formed by gluing a polarizing plate, a first quarter-wave plate and a plano-convex lens on three mirror surfaces of a first polarization beam splitter prism forms a first optical component, and an included angle between the fast axis direction of the first quarter-wave plate and the horizontal axis of the plane where the first quarter-wave plate is located is 27.36 degrees.
4. The laser measuring device capable of simultaneously realizing three-dimensional displacement measurement according to claim 1, characterized in that: the second optical component is formed by a structure formed by gluing a second quarter-wave plate, a third quarter-wave plate, a fourth quarter-wave plate, a first right-angle prism and a second right-angle prism on the mirror surface of a second polarization beam splitter prism, wherein the included angle between the fast axis direction of the third quarter-wave plate and the horizontal axis of the plane where the third quarter-wave plate is located is 22.5 degrees, and the included angle between the fast axis direction of the second quarter-wave plate and the fourth quarter-wave plate and the horizontal axis of the plane where the second quarter-wave plate and the fourth quarter-wave plate are located is 45.
5. The laser measuring device capable of simultaneously realizing three-dimensional displacement measurement according to claim 1, characterized in that: the included angle between the fast axis direction of the fifth-fourth wave plate and the horizontal axis of the plane is 45 degrees, and the included angle between the fast axis direction of the half wave plate and the horizontal axis of the plane is 22.5 degrees.
6. The laser measurement method capable of simultaneously realizing three-dimensional displacement measurement based on the device of claim 1, characterized in that: firstly, collimation adjustment is carried out, so that the frequency stabilized helium-neon laser, the first plane reflector, the second plane reflector and the optical system are aligned, all optical elements are fixed, and the second plane reflector is moved slowly, and the method comprises the following steps:
(1) and (3) measuring parameters of a yaw angle and a pitch angle of the two-dimensional angular displacement: measuring the yaw angle theta caused by movement of the mirrorYAnd a pitch angle thetaPThe four-quadrant detector receives and calculates the signal, and the calculation formula is as follows:
θY＝rY/2f,θP＝rP/2f，
where f is the focal length of the plano-convex lens, rYIs the displacement deviation caused by the yaw angle, rPFor the displacement offset caused by the pitch angle,
the signals received by the four quadrants of the four quadrant detector are set to Vi(i ═ 1, 2, 3, 4), as measured by the following equation:
θY＝KY·ΘY,θP＝KP·ΘY，
wherein KYAnd KPIs a calibration constant, ΘYAnd ΘPCan be determined by the following equation, and θ is calculatedYAnd thetaP，
(2) Measurement of one-dimensional linear displacement parameters: the vibration equations of the measuring beam and the reference beam, i.e., the P light and the S light, emitted from the second aperture stop are expressed by the following equations:
E1＝acos(kr1-ωt)，
E2＝acos(kr2-ωt)，
where a is the amplitude of the two beams, r1For measuring the optical path traversed by the light beam, r2The optical path traversed by the reference beam, ω the initial phase,
two paths of orthogonal linearly polarized light P light and S light emitted from the second pinhole diaphragm are converted into left-handed and right-handed circularly polarized light through a fifth quarter-wave plate, the left-handed and right-handed circularly polarized light is divided into two paths of light by a depolarization spectroscope, wherein one path of light forms two paths of interference signals with a phase difference of 180 degrees through a fourth polarization beam splitter prism, the two paths of interference signals are respectively received by a second photodiode and a second photodiode, the other path of light changes the rotation direction of the circularly polarized light through a half-wave plate, the two paths of interference signals with a phase difference of 180 degrees are also formed through a third polarization beam splitter prism and are respectively received by a first photodiode and a third photodiode, the phase differences of the four paths of orthogonal interference signals are respectively 90 degrees and are used for measuring one-dimensional linear displacement, and the final interference signals can be expressed as:
D1：
D2：E2'＝a2[1+cos(kr1-kr2)]，
D3：
D4：E4'＝a2[1+cos(kr1-kr2-π)]，
wherein EnThe' n represents a first photoelectric detector, a second photoelectric detector, a third photoelectric detector and a fourth photoelectric detector, interference optical signals are received by the photoelectric sensors and are converted into orthogonal electric signals, the orthogonal electric signals are processed by a post-stage circuit, and the requirements of high-speed real-time dynamic displacement measurement are met by combining a data subdivision acquisition card.
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