TWI712824B - Polarized light alignment detection device and detection method - Google Patents

Polarized light alignment detection device and detection method Download PDF

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TWI712824B
TWI712824B TW107123166A TW107123166A TWI712824B TW I712824 B TWI712824 B TW I712824B TW 107123166 A TW107123166 A TW 107123166A TW 107123166 A TW107123166 A TW 107123166A TW I712824 B TWI712824 B TW I712824B
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light source
light
detected
polarizer
polarization
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TW202006423A (en
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蔡姓賢
李朱育
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陽程科技股份有限公司
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Abstract

本發明為有關一種偏光對位檢測裝置,係利用檢測裝置之光源系統透過光源發射器投射光源至光束擴展器進行擴展,再將光源投射至待檢測物,以供光源穿透待檢測物後投射至另側之光偵測系統,則光偵測系統之偏振分光稜鏡將光源並予以分光成二道光源、且以二道光源向外投射至穿透偏光片進行偏轉投射,並由光電探測器接收穿透待檢測物的二道光源再予以轉換為電子訊號,以將電子訊號傳輸至檢測單元之處理模組,透過處理模組將接收的電子訊號進行處理以偵測偏振光源角度,達到進行偏光對位檢測之目的。 The present invention relates to a polarized light alignment detection device, which uses the light source system of the detection device to project the light source to the beam expander through the light source transmitter for expansion, and then project the light source to the object to be detected, so that the light source penetrates the object to be detected and then projected To the light detection system on the other side, the polarization splitter of the light detection system splits the light source into two light sources, and projects the two light sources outward to the penetrating polarizer for deflection projection, and photodetection The device receives the two light sources penetrating the object to be inspected and converts them into electronic signals to transmit the electronic signals to the processing module of the detection unit. The received electronic signals are processed through the processing module to detect the angle of the polarized light source. For the purpose of polarization detection.

Description

偏光對位檢測裝置及檢測方法 Polarized light alignment detection device and detection method

本發明係提供一種偏光對位檢測裝置,尤指可對待檢測物與偏光片進行多點量測、即時進行貼合作業之檢測裝置,透過光源系統將雷射光源擴展後投射至待檢測物、並使光源投射入光偵測系統進行分光再投射至偏光片再進行光、電訊號轉換,以供檢測單元接收電訊號進行檢測,達到將待檢測物與偏光片進行偏光對位之目的。 The present invention provides a polarized light alignment detection device, especially a detection device that can perform multi-point measurement of an object to be detected and a polarizer, and perform real-time bonding industry. The laser light source is expanded and projected to the object to be detected through a light source system. The light source is projected into the light detection system to split light and then projected to the polarizer to convert light and electrical signals for the detection unit to receive electrical signals for detection, so as to achieve the purpose of polarizing the object to be detected and the polarizer.

按,隨著科技時代的不斷進步與創新,許多日常生活中的事物也都隨著科技進步、而有顯著的改變,例如人們日常生活中觀看的電視或電影等,透過顯示螢幕呈現的影像,也由早期的二維平面影像(2D平面影像,Two Dimension),轉變成為三維立體影像(3D立體影像,Three Dimension),以滿足人們對於觀看影像時的立體視覺影像的不同感受,更隨著三維影像(3D立體影像)畫面所呈現立體視覺效果,則有許多業者利用3D立體影像,演變出各式不同的真實臨場感、身歷其境般的模擬影像境界,例如虛擬實境(Virtual Reality,VR)技術、擴增實境(Augmented Reality,AR)技術、混合實境(Mixed Reality,MR)技術或影像實境( Cinematic Reality,CR)技術等,成為目前應用在各式遊戲、電視或電影等經常應用的技術,提供人們觀看3D立體影像的視覺觀感。 According to the continuous progress and innovation in the technological age, many things in daily life have also undergone significant changes with the advancement of technology, such as the television or movies that people watch in daily life, and the images presented on the display screen. It has also changed from the early two-dimensional images (2D plane images, Two Dimension) to three-dimensional images (3D three-dimensional images, Three Dimension) to meet people’s different perceptions of stereoscopic visual images when viewing images. The image (3D stereoscopic image) screen presents the stereoscopic visual effects, and many companies use 3D stereoscopic images to evolve a variety of different real presence and immersive simulation image realms, such as Virtual Reality (VR) ) Technology, augmented reality (Augmented Reality, AR) technology, mixed reality (Mixed Reality, MR) technology or image reality ( Cinematic Reality (CR) technology, etc., has become a frequently used technology currently used in various games, TV or movies, and provides people with a visual perception of 3D stereoscopic images.

而關於3ID立體影像的呈現,係利用人們的二眼視差(Binocular Parallax)效應所形成,且二眼視差代表二眼因為所處位置不同、視角不同,即導致所見影像內容也略微不同的效應,最後由大腦將二眼所見不同影像予以融合,進而產生3D立體影像;至於立體影像呈現的技術,大致可以區分成需配戴特殊設計眼鏡觀看的戴眼鏡式(Stereoscopic)或者不需配戴眼鏡的裸視觀看之裸眼式(Auto Stereoscopic);其中,關於戴眼鏡式的3D立體影像顯示技術,包括色差式〔即濾光眼鏡(Color Filter Glasses)〕、偏光式〔即偏光眼鏡(Polarizing Glasses)〕以及主動快門式〔即快門眼鏡(Shutter Glasses)〕等各種型式;至於偏光式3D立體影像技術(Polarization 3D),也稱作偏振式3D立體影像技術,請參閱第六、七、八圖所示,配合應用的即是被動式偏光眼鏡,利用光線有〔振動方向〕(a)的原理來分解原始圖像(b),先將圖像(b)分為垂直向偏振光(b1)和水平向偏振光(b2)二組畫面,然後藉由3D眼鏡(c)左、右鏡片(c1、c2)分別採用不同偏振方向的偏光鏡片,以供使用者的左、右眼透過左、右鏡片(c1、c2)分別接收二組畫面,再經由大腦進行合成,以形成立體影像(d)。 Regarding the presentation of 3ID stereoscopic images, it is formed by people’s Binocular Parallax (Binocular Parallax) effect, and the Binocular Parallax represents the effect that the two eyes are at different positions and viewing angles, which results in slightly different image content. Finally, the brain fuses the different images seen by the two eyes to produce a 3D stereoscopic image; as for the stereoscopic image presentation technology, it can be roughly divided into stereoscopic or non-spectacles. Auto Stereoscopic (Auto Stereoscopic); Among them, the glasses-type 3D stereoscopic image display technology includes chromatic aberration (Color Filter Glasses) and polarized (Polarizing Glasses) And various types of active shutter (Shutter Glasses); As for Polarization 3D, also known as Polarization 3D, please refer to Figures 6, 7, and 8. , And the application is passive polarized glasses, using the principle of [vibration direction] (a) to decompose the original image (b), first divide the image (b) into vertical polarization (b1) and horizontal Polarized light (b2) two sets of pictures, and then through the 3D glasses (c) left and right lenses (c1, c2) respectively adopt polarized lenses with different polarization directions, so that the left and right eyes of the user can pass through the left and right lenses ( c1 and c2) receive two sets of images respectively, and then synthesize them through the brain to form a three-dimensional image (d).

雖然裸眼觀看的立體影像呈現,使用者可以不需要配戴特 殊設計的眼鏡,即可觀看3D立體影像,則裸眼式之立體顯示技術,例如透鏡式(Lenticular len Type)立體顯像技術,為利用透鏡將各顯示資訊之光線曲折而分別導向觀看者的左、右眼,其所顯示之立體影像有位置及角度等限制,因此觀看者的觀看位置、角度也會受到較多的限制,而配戴特殊設計眼鏡觀看的眼鏡式3D立體影像顯示技術,因所透過眼鏡呈現的3D立體影像效果較佳,也不易受到觀看位置或角度等限制,仍被大多數業者所應用;惟,因偏光式眼鏡必須經過檢測、對位,以進行調整左、右鏡片的合適偏光角度、偏振方向等,以達到良好的3D立體影像顯示效果,否則容易導致偏光式眼鏡在使用時,因偏光式眼鏡的穿透軸(穿透直線偏光的軸)產生傾斜現象,以致發生串擾(Cross talk),而使偏光式眼鏡的亮度發生變化、轉暗現象等缺失。 Although the three-dimensional image is displayed with the naked eye, the user does not need to wear special Specially designed glasses can view 3D stereoscopic images. Naked-eye stereoscopic display technologies, such as Lenticular len Type stereoscopic imaging technologies, use lenses to twist the light of each display information to the left of the viewer. , The right eye, the 3D image displayed by it has restrictions on the position and angle, so the viewer’s viewing position and angle will also be more restricted, and the glasses-type 3D stereoscopic image display technology that wears specially designed glasses to watch, because The 3D stereoscopic image presented through the glasses is better, and it is not easy to be restricted by the viewing position or angle. It is still used by most companies. However, because the polarized glasses must be detected and aligned to adjust the left and right lenses In order to achieve a good 3D stereoscopic image display effect, otherwise it will easily lead to the tilting phenomenon of the penetration axis of the polarized glasses (the axis that penetrates the linear polarization) when the polarized glasses are used. Cross talk (Cross talk) occurs, and the brightness of the polarized glasses changes and the darkening phenomenon is missing.

又,面前應用於偏光對位之方式,如第九圖所示,進行偏光對位之方式主要係透過單色光源e穿透偏光板f、四分之一波片g、樣品h後由偏光檢測儀i接收,以供偏光檢測儀i量測樣品h的偏光檢測,可以高速同時進行相位差與光學軸的量測,但其進行偏光板f與樣品h的量測精度雖可達到0.01°;然,進行量測前必須先將偏光板f裁切後,置於基台量測治具上,透過電腦控制旋轉角度及運算後,才可以得知其穿透率等參數,再利用這些穿透率及參數等,供偏光檢測儀i進行量測計算,量測作業較為繁瑣、複雜,且能對偏光板f與樣品h進行單點量測,亦無法於機具設備上即時進行偏光板f與樣品h的貼合作業,則於實際應用、實施時,仍存在諸多缺失有待改善。 In addition, the method of polarized light alignment applied before, as shown in the ninth figure, the method of polarized light alignment is mainly through the monochromatic light source e through the polarizing plate f, the quarter wave plate g, and the sample h. The detector i receives it for the polarization detector i to measure the polarization detection of the sample h. It can measure the phase difference and optical axis simultaneously at high speed, but the measurement accuracy of the polarizer f and sample h can reach 0.01°. ; However, before the measurement, the polarizer f must be cut and placed on the abutment measurement fixture. After the rotation angle and calculation are controlled by the computer, the transmittance and other parameters can be known, and then use these Transmittance and parameters, etc., for the measurement and calculation of the polarization detector i. The measurement operation is more cumbersome and complicated, and it can perform single-point measurement of the polarizer f and sample h, and it cannot be used for real-time polarizers on machines and equipment. In the pasting industry of f and sample h, there are still many shortcomings to be improved in actual application and implementation.

是以,如何解決目前偏光板的檢測事先作業取得參數的作業繁瑣之問題與困擾,且進行量測作業時無法直接將偏光板與樣品貼合等之麻煩與缺失,即為從事此行業之相關廠商所亟欲研究改善之方向所在者。 Therefore, how to solve the cumbersome problems and troubles of the current polarizing plate inspection work to obtain parameters in advance, and the troubles and deficiencies of the inability to directly attach the polarizing plate to the sample during the measurement operation, is related to engaging in this industry Manufacturers urgently want to study the direction of improvement.

故,發明人有鑑於上述之問題與缺失,乃搜集相關資料,經由多方評估及考量,並以從事於此行業累積之多年經驗,經由不斷試作及修改,始設計出此種可藉由光源系統將雷射光源擴展後、投射至待檢測物供光偵測系統接收,並予以進行分光成不同角度光源再投射至偏光片,則供檢測單元接收後進行檢測對位,以供即時將待檢測物與偏光片貼合之偏光對位檢測方法的發明專利誕生者。 Therefore, in view of the above-mentioned problems and deficiencies, the inventor collected relevant information, evaluated and considered by multiple parties, and based on the accumulated years of experience in this industry, through continuous trials and modifications, he began to design such a light source system. After the laser light source is expanded, it is projected to the object to be detected for the light detection system to receive, and the light is split into different angles of light source and then projected to the polarizer, which is then received by the detection unit for detection and alignment for real-time inspection The creator of the invention patent for the polarized light alignment detection method for bonding objects and polarizers.

本發明之主要目的乃在於該檢測裝置,係利用檢測裝置之光源系統透過光源發射器投射雷射光源至光束擴展器進行擴展,再將光源投射至待檢測物,以供光源穿透待檢測物後投射至另側之光偵測系統,則光偵測系統之偏振分光稜鏡將光源並予以分光成二道光源、且以二道光源向外投射至穿透偏光片進行偏轉投射,並由光電探測器接收穿透待檢測物的二道光源再予以轉換為電子訊號後,以將電子訊號傳輸至檢測單元之處理模組,透過處理模組將接收的電子訊號進行處理、以偵測待檢測物與偏光片的偏振光源角度,達到進行偏光對位檢測之目的,並供待檢測物與偏光片進行偏光檢測、即時貼合之功效。 The main purpose of the present invention is the detection device, which uses the light source system of the detection device to project the laser light source to the beam expander through the light source transmitter for expansion, and then project the light source to the object to be detected so that the light source can penetrate the object to be detected After projecting to the light detection system on the other side, the polarization splitter of the light detection system splits the light source into two light sources, and projects the two light sources outward to the penetrating polarizer for deflection projection. The photodetector receives the two light sources that penetrate the object to be detected and converts it into an electronic signal to transmit the electronic signal to the processing module of the detection unit. The received electronic signal is processed through the processing module to detect the object to be detected. The angle of the polarized light source between the test object and the polarizer achieves the purpose of polarized light alignment detection, and provides the effect of polarization detection and instant bonding of the test object and the polarizer.

本發明之次要目的乃在於該光源系統之光源發射器,係可為雷射光源發射器,以供發射波長為532nm之綠光雷射光源,功率為 20mw;而光源系統之光源發射器一側具有光源投射孔可向外投射雷射光源,且光束擴展器一側設有光源接收面對位光源投射孔、另側設有光源擴展面可將雷射光源向外擴充至偏光調整單元以增加待檢測物的檢測面積,且該光束擴展器係為可變光之光束擴展器,且將所接收光源進行2倍~8倍(2x~8x)的倍率放大。 The secondary purpose of the present invention is that the light source emitter of the light source system can be a laser light source emitter for emitting a green laser light source with a wavelength of 532nm and a power of 20mw; and the light source transmitter of the light source system has a light source projection hole on one side to project the laser light source, and the beam expander is provided with a light source receiving surface and a light source projection hole on the other side. The light source is expanded to the polarization adjustment unit to increase the detection area of the object to be detected, and the beam expander is a variable light beam expander, and the received light source is 2 times to 8 times (2x~8x) Magnification magnification.

本發明之另一目的乃在於該光偵測系統之偏振分光稜鏡一側設有受光面可接收自待檢測物的光源、另側設有分光面則將所接收的光源分光成二道正交之偏振光源,且二道正交之偏振光源間之分離角(γ)係介於1°至20°;而光偵測系統之偏振分光稜鏡係可為未鍍膜之石英、氟化鎂、αBBO、YVO4或方解石基底等材質之偏振分光稜鏡,其中該石英或氟化鎂之偏振分光稜鏡具有>100,000:1之高消光比,該αBBO、YVO4或方解石基底之偏振分光稜鏡具有>1,000,000:1之高消光比,且該方解石稜鏡增透膜波長範圍介於350-700nm或650-1050nm;另,該光偵測系統之偏光片(Polarizer),係為含奈米級矽酸鈉之玻璃片(Na-noparticles in Sodium-Silicate Glass)。 Another object of the present invention is that the polarization beam splitter of the photodetection system is provided with a light receiving surface that can receive a light source from the object to be detected on one side, and a beam splitting surface is provided on the other side to split the received light source into two channels. The polarized light source is switched, and the separation angle (γ) between the two orthogonal polarized light sources is between 1° and 20°; and the polarization beam splitter of the light detection system can be uncoated quartz, magnesium fluoride , ΑBBO, YVO 4 or calcite substrate and other materials such as polarization beam splitter, where the polarization beam splitter of quartz or magnesium fluoride has a high extinction ratio >100,000:1, and the polarization of the αBBO, YVO 4 or calcite substrate The spectrophotometer has a high extinction ratio of >1,000,000:1, and the calcite antireflection coating has a wavelength range of 350-700nm or 650-1050nm; in addition, the polarizer of the light detection system (Polarizer) , Is a glass sheet containing nano-grade sodium silicate (Na-noparticles in Sodium-Silicate Glass).

本發明之又一目的乃在於該檢測單元之處理模組係為資料擷取(DAQ)硬體,係包括訊號處理電路、類比數位轉換器及電腦匯流排等。 Another object of the present invention is that the processing module of the detection unit is a data acquisition (DAQ) hardware, which includes a signal processing circuit, an analog-to-digital converter, and a computer bus.

1:光源系統 1: Light source system

11:光源發射器 11: Light source emitter

110:光源投射孔 110: Light source projection hole

12:光束擴展器 12: Beam expander

121:光源接收面 121: light source receiving surface

122:光源擴展面 122: light source extension surface

2:待檢測物 2: Object to be detected

3:光偵測系統 3: Light detection system

31:偏振分光稜鏡 31: Polarization beam splitter

311:受光面 311: light-receiving surface

312:分光面 312: Splitter

32:偏光片 32: Polarizer

4:檢測單元 4: Detection unit

41:光電探測器 41: photodetector

42:處理模組 42: Processing module

a:振動方向 a: vibration direction

b:圖像 b: image

b1:垂直向偏振光 b1: Vertically polarized light

b2:水平向偏振光 b2: horizontally polarized light

c:3D眼鏡 c: 3D glasses

c1:左鏡片 c1: left lens

c2:右鏡片 c2: right lens

d:立體影像 d: Stereoscopic image

e:單色光源 e: Monochromatic light source

f:偏光板 f: Polarizing plate

g:四分之一波片 g: quarter wave plate

h:樣品 h: sample

i:偏光檢測儀 i: Polarization detector

第一圖 係為本發明之立體外觀圖。 The first figure is a perspective view of the present invention.

第二圖 係為本發明之光源投射平面圖。 The second figure is a plan view of the light source projection of the present invention.

第三圖 係為本發明之光強度波形圖。 The third diagram is the light intensity waveform diagram of the present invention.

第四圖 係為本發明檢測方法之流程圖(一)。 The fourth figure is the flow chart (1) of the detection method of the present invention.

第五圖 係為本發明檢測方法之流程圖(二)。 The fifth figure is the flow chart (2) of the detection method of the present invention.

第六圖 係為習知偏振式3D技術之光線振動方向分解示意圖(一)。 The sixth figure is an exploded schematic diagram (1) of the light vibration direction of the conventional polarization-type 3D technology.

第七圖 係為習知偏振式3D技術之光線振動方向分解示意圖(二)。 The seventh figure is a schematic diagram (2) of the direction of light vibration of the conventional polarization-based 3D technology.

第八圖 係為習知偏振式3D技術之光線振動方向接收示意圖。 The eighth figure is a schematic diagram of the reception of light vibration direction of the conventional polarization 3D technology.

第九圖 係為習知偏光對位方式之側視圖。 The ninth figure is a side view of the conventional polarization alignment method.

為達成上述目的與功效,本發明所採用之技術手段及其構造、實施之方法等,茲繪圖就本發明之較佳實施例詳加說明其特徵與功能如下,俾利完全瞭解。 In order to achieve the above-mentioned purposes and effects, the technical means adopted by the present invention, its structure, and the method of implementation, etc., are drawn to illustrate the features and functions of the preferred embodiments of the present invention in detail as follows, for a complete understanding.

請參閱第一、二、三圖所示,係為本發明之立體外觀圖、光源投射平面圖、光強度波形圖,由圖中所示可以清楚看出,本發明偏光對位檢測裝置係包括光源系統1、待檢測物2、光偵測系統3及檢測單元4,其中: 該光源系統1係包括光源發射器11及光束擴展器12,且該光源發射器11一側設有光源投射孔110、可向外投射雷射光至光束擴展器12,則光束擴展器12一側設有光源接收面121以供接收光源發射器11投射之雷射光源,且光束擴展器12再將所接收之雷射光源由另側之光源擴展面122向外擴展投射。 Please refer to the first, second and third figures, which are the three-dimensional appearance view, the light source projection plan view, and the light intensity waveform diagram of the present invention. It can be clearly seen from the figures that the polarized light alignment detection device of the present invention includes a light source The system 1, the object to be detected 2, the light detection system 3 and the detection unit 4, of which: The light source system 1 includes a light source emitter 11 and a beam expander 12, and a light source projection hole 110 is provided on one side of the light source emitter 11, which can project laser light to the beam expander 12, then the beam expander 12 side The light source receiving surface 121 is provided for receiving the laser light source projected by the light source transmitter 11, and the beam expander 12 expands and projects the received laser light source from the light source expansion surface 122 on the other side.

該待檢測物2係可為偏光膜(Polarizing Film),可將一般不具偏極性之自然光產生偏極化,再轉變成偏極光,以針對偏極光加以應用,通常應用於影像之顯示效果。 The test object 2 can be a polarizing film, which can polarize natural light that does not generally have a polarized polarity, and then convert it into a polarized aurora for application to the polarized aurora, which is usually used for image display effects.

該光偵測系統3係包括偏振分光稜鏡31及偏光片32,且偏振分光稜鏡31一側設有受光面311係對位於待檢測物2、光源系統1,另側設有分光面312對位於偏光片32。 The light detection system 3 includes a polarization beam splitter 31 and a polarizer 32. One side of the polarization beam splitter 31 is provided with a light-receiving surface 311 opposite to the object to be detected 2, the light source system 1, and a beam splitter 312 on the other side. It is located on the polarizer 32.

該檢測單元4係包括至少二個以上之光電探測器41、電性連接各光電探測器41之處理模組42,且光電探測器(Photodetector)41係可將所接收之光源訊號轉換成電子訊號,再傳輸至處理模組42,而處理模組42係可為資料擷取(DAQ)硬體,並可為介面卡,係將所取得之類比號數位化,以利電腦進行後續的編譯,可取得電子訊號之(DAQ)介面卡可包括訊號處理電路、類比數位轉換器及電腦匯流排等,則可使用軟體(LabView等)進行電子訊號之處理。 The detection unit 4 includes at least two photodetectors 41, a processing module 42 electrically connected to each photodetector 41, and the photodetector 41 can convert the received light source signal into an electronic signal , And then transmitted to the processing module 42, and the processing module 42 can be a data acquisition (DAQ) hardware, and can be an interface card, which digitizes the obtained analog number to facilitate subsequent compilation by the computer. (DAQ) interface cards that can obtain electronic signals can include signal processing circuits, analog-to-digital converters, and computer buses, etc., and software (LabView, etc.) can be used to process electronic signals.

上述各構件於實際應用時,係於光源系統1的光束擴展器12的光源擴展面122外側設置待檢測物2,並於待檢測物2另側設置光偵測系統3之偏振分光稜鏡31,且於偏光片32另側設置檢測單元4之光電探測器41及處理模組42,達到可對待檢測物2、偏光片32進行偏光檢測、即時對位貼合之目的,可供應用於觀看或顯現3D影像。 In actual application of the above components, the object 2 to be inspected is arranged outside the light source expansion surface 122 of the beam expander 12 of the light source system 1, and the polarization beam splitter 31 of the light detection system 3 is arranged on the other side of the object to be inspected 2 , And the photodetector 41 of the detection unit 4 and the processing module 42 are arranged on the other side of the polarizer 32 to achieve the purpose of polarizing detection of the object to be detected 2, the polarizer 32, and real-time alignment and bonding, which can be used for viewing Or show 3D images.

而上述該光源系統1之光源發射器11,係可為雷射光之光源發射器11或其它光源型式之光源發射器11,以供光源發射器11可發射波長為532nm之綠光雷射光源、且功率可為20mw等,各種 型式之雷射光源或是其它型式之光源;至於光束擴展器12,係為可變光之光束擴展器12,且可將光源接收面121自光源發射器11所接收之光源,進行2倍~8倍(2x~8x)等的倍率放大,再由光源擴展面122將放大的雷射光源向外擴充至待檢測物2,使雷射光源穿透待檢測物2後投射至光偵測系統3之偏振分光稜鏡31的受光面311,則受光面311接收較大檢測面積的光源,再由分光面312將光源分光成二道正交之偏振光源,且二道正交之偏振光源間之分離角(γ)係介於1°至20°,使二道偏振光源供檢測單元4之光電探測器41接收,並供處理模組42可以更準確地將穿透待檢測物2、偏光片32之光源強度、圓偏振光等的進行檢測。 The light source emitter 11 of the light source system 1 mentioned above can be a laser light source emitter 11 or other light source types, so that the light source emitter 11 can emit a green laser light source with a wavelength of 532 nm, And the power can be 20mw, etc., various Types of laser light sources or other types of light sources; as for the beam expander 12, it is a variable light beam expander 12, and the light source receiving surface 121 can be doubled from the light source received by the light source transmitter 11~ 8 times (2x~8x) and other magnifications, and then expand the enlarged laser light source to the inspection object 2 by the light source expansion surface 122, so that the laser light source penetrates the inspection object 2 and then is projected to the light detection system The light-receiving surface 311 of the polarization splitting beam 31 of 3, the light-receiving surface 311 receives a light source with a larger detection area, and the light splitting surface 312 splits the light source into two orthogonal polarized light sources, and the two orthogonal polarized light sources The separation angle (γ) is between 1° and 20°, so that the two polarized light sources are received by the photodetector 41 of the detection unit 4, and the processing module 42 can more accurately penetrate the object to be detected 2. The light source intensity of the sheet 32, circularly polarized light, etc. are detected.

則於檢測單元4之光電探測器41接收來自待檢測物2、偏光片32的二道偏振光源,係可利用差動訊號為〔0〕的方式定出待檢測物2、偏光片32的穿透軸的位置,該定位的精準度即取決於差動訊號的量測不確定量值,當待檢測物2、偏光片32旋轉0°~360°(β)時(請同時參閱第三圖所示),其強度變化會有以下各特徵點: (A01)當待檢測物2、偏光片32旋轉90°、180°、270°、360°時,二道偏振光源(D1、D2)強度差異最大。 Then the photodetector 41 of the detection unit 4 receives the two polarized light sources from the object to be detected 2, the polarizer 32, and the differential signal is [0] to determine the penetration of the object to be detected 2 and the polarizer 32. The position of the transparent axis, the accuracy of the positioning depends on the measurement uncertainty of the differential signal, when the object to be detected 2, the polarizer 32 rotates 0°~360°(β) (see also the third figure) As shown), its intensity changes will have the following characteristics: (A01) When the object to be detected 2, the polarizer 32 rotates 90°, 180°, 270°, 360°, the intensity difference between the two polarized light sources (D1, D2) is the largest.

(A02)當待檢測物2、偏光片32旋轉45°、135°、225°、315°時,二道偏振光源(D1、D2)強度相同(交集於同一點位置)。 (A02) When the object to be detected 2 and the polarizer 32 are rotated by 45°, 135°, 225°, 315°, the two polarized light sources (D1, D2) have the same intensity (intersection at the same point position).

(A03)可藉由二道偏振光源(D1、D2)強度的差動訊號,用以偵測偏光片32的穿透軸,而該差動訊號之定義為Id=I 1-I2。 (A03) The differential signal of the intensity of the two polarized light sources (D1, D2) can be used to detect the transmission axis of the polarizer 32, and the differential signal is defined as Id=I 1-I2.

(A04)當測得二道偏振光源(D1、D2)(交集於同一點位置)的差動訊號為0時,即可判斷偏光片32的穿透軸為45°。 (A04) When the differential signal of the two polarized light sources (D1, D2) (intersecting at the same point) is measured to be 0, it can be determined that the transmission axis of the polarizer 32 is 45°.

而該光偵測系統3之偏光片32,則可為光學鏡片、儀器之儀表盤面、電子產品或3C產品(電子詞典、MP3、MP4、AR、VR、智慧型手機、平板電腦、數位相機、電腦螢幕、液晶顯示器或電視機螢幕等)之面板等,則該偏光片32(Polarizer),係可為含奈米級矽酸鈉之玻璃片(Nanoparticles in Sodium-Silicate Glass)。 The polarizer 32 of the light detection system 3 can be optical lenses, instrument panel surfaces, electronic products or 3C products (electronic dictionaries, MP3, MP4, AR, VR, smart phones, tablets, digital cameras, For the panels of computer screens, liquid crystal displays or TV screens, etc., the polarizer 32 (Polarizer) can be Nanoparticles in Sodium-Silicate Glass (Nanoparticles in Sodium-Silicate Glass).

請參閱第一、二、三、四、五圖所示,係為本發明之立體外觀圖、光源投射平面圖、光強度波形圖、檢測方法之流程圖(一)、檢測方法之流程圖(二),由圖中所示可以清楚看出,本發明之光學對位檢測裝置,為於實際應用實施時,可利用光源系統1、光偵測系統3及檢測單元4等對待檢測物2、偏光片32進行光學檢測,其檢測之步驟流程為: Please refer to the first, second, third, fourth, and fifth diagrams, which are the three-dimensional appearance diagram, the light source projection plan view, the light intensity waveform diagram, the flow chart of the detection method (1), the flow chart of the detection method (2) of the present invention ), as shown in the figure, it can be clearly seen that the optical alignment detection device of the present invention can use the light source system 1, the light detection system 3, the detection unit 4, etc., to be detected 2, polarized light The sheet 32 is optically inspected, and the inspection process is as follows:

(A)透過光源系統1之光源發射器11由光源投射孔110投射雷射光源至光束擴展器12。 (A) The laser light source is projected to the beam expander 12 from the light source projection hole 110 through the light source transmitter 11 of the light source system 1.

(B)則光束擴展器12由一側之光源接收面121接收自光源發射器11投射之雷射光源,且將接收之雷射光源進行擴展後,再由另側之光源擴展面122將雷射光源擴展、投射至待檢測物2,使雷射光源穿透待檢測物2後,再投射至光偵測系統3的偏振分光稜鏡31之受光面311。 (B) The beam expander 12 receives the laser light source projected from the light source transmitter 11 by the light source receiving surface 121 on one side, and expands the received laser light source, and then the light source expansion surface 122 on the other side expands the laser light source. The light source is expanded and projected to the object 2 to be detected, so that the laser light source penetrates the object 2 to be detected, and then is projected to the light receiving surface 311 of the polarization beam splitter 31 of the light detection system 3.

(C)即透過光偵測系統3之偏振分光稜鏡31,將自待檢測物2接收之雷射光源由另側之分光面312予以分光成二道雷射光源,並供偏振分光稜鏡31的分光面312將二道雷射光源向外投射、並穿透偏光片32。 (C) That is, through the polarization beam splitter 31 of the light detection system 3, the laser light source received from the object to be detected 2 is split into two laser light sources by the beam splitting surface 312 on the other side, and the polarization beam splitter is provided The beam splitting surface 312 of 31 projects two laser light sources outwards and penetrates the polarizer 32.

(D)則由檢測單元4藉由光電探測器41接收穿透偏光片32的二道雷射光源,並由光電探測器41將接收的二道雷射光源之光訊號轉換成電子訊號。 (D) The detection unit 4 receives the two laser light sources penetrating the polarizer 32 through the photodetector 41, and the photodetector 41 converts the received optical signals of the two laser light sources into electronic signals.

(E)並透過光電探測器41將電子訊號傳輸至處理模組42,由處理模組42之資料擷取硬體(DAQ)硬體(可為介面卡)取得電子訊號。 (E) The electronic signal is transmitted to the processing module 42 through the photodetector 41, and the electronic signal is obtained from the data acquisition hardware (DAQ) hardware (which may be an interface card) of the processing module 42.

(F)利用檢測單元4之處理模組42之資料擷取硬體(DAQ)硬體利用軟體(Lab View),將接收的電子訊號進行處理,以獲得待檢測物2與偏光片32之偏光旋轉角度對位。 (F) Using the data acquisition hardware (DAQ) of the processing module 42 of the detection unit 4, the hardware uses software (Lab View) to process the received electronic signals to obtain the polarized light of the test object 2 and the polarizer 32 Rotation angle alignment.

(G)將進行偏光對位後之待檢測物2、偏光片32進行貼合,以完成偏光對位之檢測。 (G) The object to be detected 2 and the polarizer 32 after polarized light alignment are bonded together to complete the polarized light alignment detection.

而上述該步驟(A)、(B)之光源系統1,其應用之光源發射器11,係可為投射雷射光之光源發射器11或其它光源型式之光源發射器11,以供發射波長為532nm之綠光雷射光源、且功率為20mw等或是其他型式之光源,且光源發射器11一側具有光源投射孔110可向外投射雷射光源,而光束擴展器12一側設有光源接收面121對位光源投射孔110、另側設有光源擴展面122,以透過光源擴展面122將放大的雷射光源向外擴充至待檢測物2,使雷射光源穿透待檢測 物2後投射至光偵測系統3之偏振分光稜鏡31的受光面311,則受光面311接收較大檢測面積的光源,再由分光面312將光源分光成二道正交之偏振光源,且二道正交之偏振光源間之分離角(γ)係介於1°至20°,使二道偏振光源供檢測單元4之光電探測器41接收,並供處理模組42可以更準確地進行穿透待檢測物2之光源強度、圓偏振光等的檢測。 In the light source system 1 of the above steps (A) and (B), the light source emitter 11 used can be a light source emitter 11 for projecting laser light or a light source emitter 11 of other light source types, so that the emission wavelength is A 532nm green laser light source with a power of 20mw or other types of light sources, and a light source projection hole 110 on one side of the light source transmitter 11 can project the laser light source outward, and a light source on the side of the beam expander 12 The receiving surface 121 is aligned with the light source projection hole 110, and the other side is provided with a light source expansion surface 122 to expand the amplified laser light source to the object to be detected 2 through the light source expansion surface 122, so that the laser light source can penetrate the object to be detected 2 After the object 2 is projected to the light-receiving surface 311 of the polarization beam splitter 31 of the light detection system 3, the light-receiving surface 311 receives a light source with a larger detection area, and the light splitting surface 312 splits the light source into two orthogonal polarization light sources. And the separation angle (γ) between the two orthogonal polarized light sources is between 1° and 20°, so that the two polarized light sources are received by the photodetector 41 of the detection unit 4 and the processing module 42 can be more accurately Perform detection of the intensity of the light source that penetrates the object 2 to be detected, circularly polarized light, etc.

該步驟(B)之光源系統1的光束擴展器12,係為可變光束擴展器,並可將所接收光源進行2倍~8倍(2x~8x)等的倍率放大。 The beam expander 12 of the light source system 1 in this step (B) is a variable beam expander, and can magnify the received light source at a magnification of 2 to 8 times (2x to 8x).

另,該步驟(B)、(C)之待檢測物2係可為偏光膜(Polarizing Film),係可將一般不具偏極性之自然光產生偏極化,再轉變成偏極光,以針對偏極光加以應用,通常應用於影像之顯示效果;至於步驟(C)、(D)之偏光片32(Polarizer),係可為含奈米級矽酸鈉之玻璃片(Nanoparticles in Sodium-Silicate Glass)。 In addition, the test object 2 in steps (B) and (C) can be a polarizing film, which can polarize the natural light that does not generally have a polarized polarity, and then convert it into a polarized light to target the polarized light. It is usually applied to the display effect of images. As for the polarizer 32 (Polarizer) of steps (C) and (D), it can be Nanoparticles in Sodium-Silicate Glass.

而上述步驟(D)、(E)、(F)中,該檢測單元4之光電探測器(Photodetector)41係可將所接收之光源訊號轉換成電子訊號,再傳輸至處理模組42,而處理模組42係可為資料擷取(DAQ)硬體,並可為介面卡,係將所取得之類比號數位化,以利電腦進行後續的編譯,可取得電子訊號之(DAQ)介面卡可包括訊號處理電路、類比數位轉換器及電腦匯流排等,則可使用軟體(LabView等)進行電子訊號之處理,即可計算出待檢測物2及偏光片32之偏光旋轉角度〔β〕,例如:5°、10°、15°、20°或25°等 ,進而可達到對待檢測物2、偏光片32進行光學對位檢測之目的,以供待檢測物2、偏光片32能夠獲得合適的偏光方向、角度等,並即時予以貼合,則貼合後之待檢測物2與偏光片32於實際應用實施進行觀看或顯現3D影像時,能減少發生穿透軸傾斜、串擾等現象,提升應用時穩定性之功效。 In the above steps (D), (E), (F), the photodetector (Photodetector) 41 of the detection unit 4 can convert the received light source signal into an electronic signal, and then transmit it to the processing module 42, and The processing module 42 can be a data acquisition (DAQ) hardware, and can be an interface card, which digitizes the acquired analog number to facilitate subsequent compilation by the computer, and can obtain an electronic signal (DAQ) interface card It can include signal processing circuits, analog-to-digital converters, computer buses, etc., and software (LabView, etc.) can be used to process electronic signals to calculate the polarization rotation angle [β] of the test object 2 and the polarizer 32, For example: 5°, 10°, 15°, 20° or 25°, etc. , Which can further achieve the purpose of optical alignment detection of the object to be detected 2, the polarizer 32, so that the object to be detected 2, the polarizer 32 can obtain a suitable polarization direction, angle, etc., and be bonded immediately, then after bonding When the object to be detected 2 and the polarizer 32 are used for viewing or displaying 3D images in practical applications, they can reduce the occurrence of phenomena such as tilting of the penetration axis and crosstalk, and improve the stability of the application.

是以,以上所述僅為本發明之較佳實施例而已,非因此侷限本發明之專利範圍,本發明之偏光對位檢測裝置及檢測方法,係利用光源系統1之光源發射器11投射光源至光束擴展器12,將光源進行擴展後投射至待檢測物2,則供穿透待檢測物2之光源,被光偵測系統3之偏振分光稜鏡31接收,偏振分光稜鏡31並將光源分光成二道偏振光源再投射至偏光片32,並透過檢測單元4之光電探測器41接收穿透偏光片32的二道光源,再將二道光源的光訊號轉換成電子訊號,並傳輸至處理模組42進行計算待檢測物2、偏光片32之偏光方向、角度,俾可達到對待檢測物2、偏光片32進行光學對位、檢測以及進行貼合之目的,且可減少待檢測物2、偏光片32等發生穿透軸傾斜、串擾現象之功效,提升待檢測物2、偏光片32於應用時之穩定性,故舉凡可達成前述效果之結構、裝置皆應受本發明所涵蓋,此種簡易修飾及等效結構變化,均應同理包含於本發明之專利範圍內,合予陳明。 Therefore, the above descriptions are only preferred embodiments of the present invention and do not limit the patent scope of the present invention. The polarized light alignment detection device and detection method of the present invention use the light source emitter 11 of the light source system 1 to project the light source. To the beam expander 12, the light source is expanded and then projected to the object to be detected 2. The light source that penetrates the object to be detected 2 is received by the polarization beam splitter 31 of the light detection system 3, and the polarization beam splitter 31 combines The light source is split into two polarized light sources and then projected to the polarizer 32, and the photodetector 41 of the detection unit 4 receives the two light sources penetrating the polarizer 32, and then converts the optical signals of the two light sources into electronic signals and transmits them The processing module 42 calculates the polarization direction and angle of the object to be detected 2, the polarizer 32, so as to achieve the purpose of optical alignment, detection, and bonding of the object to be detected 2, the polarizer 32, and reduce the number of objects to be detected. The object 2, the polarizer 32, etc. have the effect of tilting the penetration axis and crosstalk, and improve the stability of the object to be tested 2, the polarizer 32 during application. Therefore, all structures and devices that can achieve the aforementioned effects should be subject to the present invention. Covered, such simple modification and equivalent structural changes should be included in the scope of the patent of the present invention for the same reason, and shall be stated.

故,本發明為主要針對偏光對位檢測裝置及檢測方法進行設計,係利用光源系統之光源發射器投射光源至光束擴展器,以將光源擴展後、投射至待檢測物,光源穿透待檢測物後投射至光偵測系統之偏振分光稜鏡,並予以分光成二道偏振光源並投射穿透偏光片,再由檢測單元之 光電探測器將光源接收,以將光源訊號轉換成電子訊號傳輸至處理模組,處理模組則依據接收光源強度關係計算待檢測物、偏光片等的偏光方向、角度等,而達到對待檢測物、偏光片等進行光學對位檢測,並進行即時貼合為主要保護重點,且減少發生穿透軸傾斜、串擾現象,乃僅使待檢測物、偏光片等獲得合適偏光角度之優勢,而於實際應用時更穩定之功效,惟,以上所述僅為本發明之較佳實施例而已,非因此即侷限本發明之專利範圍,故舉凡運用本發明說明書及圖式內容所為之簡易修飾及等效結構變化,均應同理包含於本發明之專利範圍內,合予陳明。 Therefore, the present invention is mainly designed for polarized light alignment detection device and detection method. It uses the light source transmitter of the light source system to project the light source to the beam expander to expand the light source and project it to the object to be inspected. The light source penetrates to be inspected The object is projected to the polarization beam splitter of the light detection system, and split into two polarization light sources and projected through the polarizer, and then the detection unit The photodetector receives the light source to convert the light source signal into an electronic signal and transmits it to the processing module. The processing module calculates the polarization direction and angle of the object to be detected, polarizer, etc. according to the intensity relationship of the received light source, so as to achieve the object to be detected , Polarizers, etc., perform optical alignment detection, and perform instant bonding as the main protection focus, and reduce the incidence of penetration axis tilt and crosstalk, and only enable the object to be detected, polarizers, etc. to obtain the advantage of a suitable polarization angle. The effect is more stable in practical application. However, the above description is only the preferred embodiment of the present invention, which does not limit the patent scope of the present invention. Therefore, the simple modification and etc. of the description and drawings of the present invention are used All changes in the effective structure should be included in the scope of the patent of the present invention for the same reason, and shall be stated.

綜上所述,本發明上述之偏光對位檢測裝置及檢測方法於實際執行、實施時,為確實能達到其功效及目的,故本發明誠為一實用性優異之研發,為符合發明專利之申請要件,爰依法提出申請,盼 審委早日賜准本案,以保障發明人之辛苦研發、創設,倘若 鈞局暨貴審查委員有任何稽疑,請不吝來函指示,發明人定當竭力配合,實感德便。 In summary, the above-mentioned polarized light alignment detection device and detection method of the present invention can indeed achieve its efficacy and purpose when actually implemented and implemented. Therefore, the present invention is truly a research and development with excellent practicability and is in line with invention patents. For the application requirements, Yan submits an application in accordance with the law. I hope that the review committee will grant the approval of this case as soon as possible to protect the inventor’s hard research, development and creation. If the bureau and the review committee have any doubts, please feel free to write instructions. Debian.

1:光源系統 1: Light source system

11:光源發射器 11: Light source emitter

110:光源投射孔 110: Light source projection hole

12:光束擴展器 12: Beam expander

121:光源接收面 121: light source receiving surface

122:光源擴展面 122: light source extension surface

2:待檢測物 2: Object to be detected

3:光偵測系統 3: Light detection system

31:偏振分光稜鏡 31: Polarization beam splitter

311:受光面 311: light-receiving surface

312:分光面 312: Splitter

32:偏光片 32: Polarizer

4:檢測單元 4: Detection unit

41:光電探測器 41: photodetector

42:處理模組 42: Processing module

Claims (12)

一種偏光對位檢測裝置,係包括光源系統、光偵測系統及檢測單元,其中:該光源系統係包括投射光源之光源發射器、接收光源後進行擴展至待檢測物之光束擴展器,該光源系統之該光源發射器一側具有向外投射雷射光源之光源投射孔,且該光束擴展器一側設有對位光源投射孔之光源接收面、另側設有將雷射光源向外擴充至該待檢測物以增加該待檢測物的檢測面積之光源擴展面;且該光束擴展器係為一可變光之光束擴展器,且將所接收光源進行2倍~8倍的倍率放大,且該待檢測物係為偏光膜所構成;該光偵測系統係位於相對光源系統的待檢測物另側,係包括接收穿透待檢測物的光源並予以分光成二道光源之偏振分光稜鏡、供偏振分光稜鏡的二道光源進行偏轉投射之偏光片,該光偵測系統之該偏振分光稜鏡一側設有接收自該待檢測物的光源之受光面、另側設有將接收的光源分光成二道正交偏振光源之分光面,且二道正交偏振光源間之分離角係介於1°至20°;及該檢測單元係位於相對光源系統、待檢測物及光偵測系統之偏光片的另側,設有接收偏光片偏轉投射的二道光源再予以轉換為電子訊號之光電探測器,電性連接光電探測器以將接收的電子訊號進行處理以偵測偏振光源角度之處理模組。 A polarized light alignment detection device includes a light source system, a light detection system, and a detection unit. The light source system includes a light source transmitter that projects the light source, and a beam expander that expands to the object to be detected after receiving the light source. The light source One side of the light source transmitter of the system has a light source projection hole for projecting the laser light source outward, and the beam expander is provided with a light source receiving surface for the alignment light source projection hole on one side, and the other side is provided to expand the laser light source outward The light source expansion surface to the object to be detected to increase the detection area of the object to be detected; and the beam expander is a variable light beam expander, and the received light source is magnified by 2 times to 8 times, And the object to be detected is composed of a polarizing film; the light detection system is located on the other side of the object to be detected relative to the light source system, and includes a polarization splitting edge that receives the light source that penetrates the object to be detected and splits the light into two light sources A mirror, a polarizer for deflecting and projecting the two light sources of the polarization beam splitter. One side of the polarization beam splitter of the light detection system is provided with a light receiving surface received from the light source of the object to be detected, and the other side is provided with a The received light source is split into the light splitting surface of two orthogonally polarized light sources, and the separation angle between the two orthogonally polarized light sources is between 1° and 20°; and the detection unit is located relative to the light source system, the object to be detected and the light The other side of the polarizer of the detection system is equipped with a photodetector that receives two light sources deflected and projected by the polarizer and then converts it into an electronic signal. The photodetector is electrically connected to process the received electronic signal to detect polarization The processing module of the light source angle. 如申請專利範圍第1項所述之偏光對位檢測裝置,其中該光源系統之光源發射器係為雷射光源發射器,以供發射波長為532nm之綠光 雷射光源,功率為20mw。 The polarized light alignment detection device described in item 1 of the scope of patent application, wherein the light source emitter of the light source system is a laser light source emitter for emitting green light with a wavelength of 532nm Laser light source, power is 20mw. 如申請專利範圍第1項所述之偏光對位檢測裝置,其中該光偵測系統之偏振分光稜鏡係為未鍍膜之石英、氟化鎂、αBBO、YVO4或方解石基底材質之偏振分光稜鏡。 The polarized light alignment detection device described in item 1 of the scope of patent application, wherein the polarization beam splitter of the photodetection system is uncoated quartz, magnesium fluoride, αBBO, YVO 4 or calcite substrate material. mirror. 如申請專利範圍第3項所述之偏光對位檢測裝置,其中該石英或氟化鎂之偏振分光稜鏡具有>100,000:1之高消光比;而αBBO、YVO4或方解石基底之偏振分光稜鏡具有>1,000,000:1之高消光比,該方解石稜鏡增透膜波長範圍介於350-700nm或650-1050nm。 The polarization alignment detection device described in item 3 of the scope of patent application, wherein the polarization splitter of quartz or magnesium fluoride has a high extinction ratio of >100,000:1; and the polarization of αBBO, YVO 4 or calcite substrate The spectroscopic beam has a high extinction ratio of >1,000,000:1, and the wavelength range of the antireflection coating of the calcite beam is between 350-700nm or 650-1050nm. 如申請專利範圍第3項所述之偏光對位檢測裝置,其中該光偵測系統之偏光片(Polarizer),係為含奈米級矽酸鈉之玻璃片(Nanoparticles in Sodium-Silicate Glass)。 The polarizing alignment detection device described in item 3 of the scope of patent application, wherein the polarizer of the light detection system is a glass sheet containing nanoparticles in sodium silicate (Nanoparticles in Sodium-Silicate Glass). 如申請專利範圍第1項所述之偏光對位檢測裝置,其中該檢測單元之處理模組係為資料擷取(DAQ)硬體之介面卡,係包括訊號處理電路、類比數位轉換器及電腦匯流排。 Such as the polarized light alignment detection device described in item 1 of the scope of patent application, wherein the processing module of the detection unit is a data acquisition (DAQ) hardware interface card, which includes a signal processing circuit, an analog-to-digital converter and a computer Busbar. 一種偏光對位檢測方法,係包括光源系統、光偵測系統及檢測單元,其對待檢測物進行檢測之步驟係:(A)光源系統之光源發射器投射光源至光束擴展器;(B)光束擴展器將接收之光源進行擴展後,將光源投射至待檢測物,再投射至光偵測系統;(C)光偵測系統利用偏振分光稜鏡將自待檢測物接收之光源、予以 分光成二道光源,並供偏振分光稜鏡將二道光源向外投射穿透偏光片;(D)檢測單元再藉由光電探測器接收穿透偏光片的二道光源,並將二道光源之光訊號轉換成電子訊號;(E)透過光電探測器將電子訊號傳輸至處理模組;(F)檢測單元利用處理模組將接收之電子訊號進行處理,以獲得待檢測物與偏光片之偏光旋轉角度;(G)將進行偏光對位後之待檢測物、偏光片進行貼合,以完成偏光對位之檢測。 A polarization alignment detection method includes a light source system, a light detection system, and a detection unit. The steps for detecting the object to be detected are: (A) the light source emitter of the light source system projects the light source to the beam expander; (B) light beam The extender expands the received light source, and then projects the light source to the object to be detected, and then to the light detection system; (C) The light detection system uses polarization beam splitting to transfer the light source received from the object to be detected. The light is split into two light sources, and the polarization beam splitter is used to project the two light sources outward and penetrate the polarizer; (D) The detection unit receives the two light sources that penetrate the polarizer through a photodetector, and connects the two light sources The optical signal is converted into an electronic signal; (E) the electronic signal is transmitted to the processing module through the photodetector; (F) the detection unit uses the processing module to process the received electronic signal to obtain the test object and the polarizer Polarized light rotation angle; (G) Laminate the object to be inspected and polarizer after polarized light alignment to complete the polarized light alignment detection. 如申請專利範圍第7項所述之偏光對位檢測方法,其中該步驟(A)之光源系統,其光源發射器係為雷射光源發射器,以供發射波長為532nm之綠光雷射光源,功率為20mw,且光束擴展器一側設有對位光源投射孔之光源接收面、另側設有將雷射光源向外擴充至待檢測物以增加待檢測物的檢測面積之光源擴展面。 The polarized light alignment detection method described in item 7 of the scope of patent application, wherein the light source system of this step (A), the light source emitter is a laser light source emitter for emitting a green laser light source with a wavelength of 532nm , The power is 20mw, and one side of the beam expander is equipped with a light source receiving surface with an alignment light source projection hole, and the other side is equipped with a light source expansion surface that expands the laser light source outwards to the object to be detected to increase the detection area of the object to be detected . 如申請專利範圍第7項所述之偏光對位檢測方法,其中該步驟(B)之光源系統的光束擴展器,係為可變光束擴展器,且將所接收光源進行2倍~8倍(2x~8x)的倍率放大。 The polarized light alignment detection method described in item 7 of the scope of patent application, wherein the beam expander of the light source system in step (B) is a variable beam expander, and the received light source is doubled to 8 times ( 2x~8x) magnification. 如申請專利範圍第7項所述之偏光對位檢測方法,其中該步驟(B)、(C)之光束擴展器接收光源後投射至待檢測物、光偵測系統及偏光片,而於待檢測物、偏振分光稜鏡及偏光片之間形成光源穿透之穿透軸;則該待檢測物係為偏光膜(Polarizing Film),且該偏光片(Polarizer),係為含奈米級 矽酸鈉之玻璃片(Nanoparticles in Sodium-Silicate Glass)。 For example, the polarized light alignment detection method described in item 7 of the scope of patent application, wherein the beam expanders in steps (B) and (C) receive the light source and project them to the object to be detected, the light detection system and the polarizer, and then The penetration axis through which the light source penetrates is formed between the detection object, the polarization beam splitter and the polarizer; the object to be detected is a polarizing film (Polarizing Film), and the polarizer (Polarizer) contains nano-level Nanoparticles in Sodium-Silicate Glass. 如申請專利範圍第7項所述之偏光對位檢測方法,其中該步驟(C)之光偵測系統,透過偏振分光稜鏡一側設有接收自待檢測物的光源之受光面、另側設有將接收的光源分光成二道正交偏振光源之分光面,且二道正交偏振光源間之分離角(γ)係介於1°至20°;而該偏振分光稜鏡係為未鍍膜之石英、氟化鎂、αBBO、YVO4或方解石基底之偏振分光稜鏡,則石英或氟化鎂之偏振分光稜鏡具有>100,000:1之高消光比,且αBBO、YVO4或方解石基底之偏振分光稜鏡具有>1,000,000:1之高消光比;而光偵測系統之偏光片(Polarizer),係為含奈米級矽酸鈉之玻璃片(Na-noparticles in Sodium-Silicate Glass)。 For example, the polarized light alignment detection method described in item 7 of the scope of patent application, wherein the light detection system of this step (C) transmits the polarization beam splitter on one side and is provided with a light-receiving surface receiving the light source from the object to be detected, and the other side It is equipped with a light splitting surface that splits the received light source into two orthogonal polarized light sources, and the separation angle (γ) between the two orthogonal polarized light sources is between 1° and 20°; and the polarization splitting system is not For the polarization beam splitter of coated quartz, magnesium fluoride, αBBO, YVO 4 or calcite substrate, the polarization beam splitter of quartz or magnesium fluoride has a high extinction ratio of >100,000:1, and αBBO, YVO 4 or The polarization beam splitter of the calcite substrate has a high extinction ratio of >1,000,000:1; and the polarizer of the light detection system is a glass plate containing nano-grade sodium silicate (Na-noparticles in Sodium-Silicate Glass). 如申請專利範圍第7項所述之偏光對位檢測方法,其中該檢測單元之處理模組係為資料擷取(DAQ)硬體之介面卡,係包括訊號處理電路、類比數位轉換器及電腦匯流排。 Such as the polarized light alignment detection method described in item 7 of the scope of patent application, wherein the processing module of the detection unit is a data acquisition (DAQ) hardware interface card, which includes a signal processing circuit, an analog-to-digital converter and a computer Busbar.
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Citations (2)

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Publication number Priority date Publication date Assignee Title
CN1396435A (en) * 2002-07-05 2003-02-12 清华大学 Photoelectric detection method and device based on orthogonal dual polarized light beams for rolled angle
CN102878953A (en) * 2012-09-26 2013-01-16 中国科学院西安光学精密机械研究所 Precision angle measuring method and precision angle measuring device

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1396435A (en) * 2002-07-05 2003-02-12 清华大学 Photoelectric detection method and device based on orthogonal dual polarized light beams for rolled angle
CN102878953A (en) * 2012-09-26 2013-01-16 中国科学院西安光学精密机械研究所 Precision angle measuring method and precision angle measuring device

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