CN1348169A - 形成磁头组合件的方法,磁头组合件以及线性磁带机 - Google Patents

形成磁头组合件的方法,磁头组合件以及线性磁带机 Download PDF

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CN1348169A
CN1348169A CN01132700A CN01132700A CN1348169A CN 1348169 A CN1348169 A CN 1348169A CN 01132700 A CN01132700 A CN 01132700A CN 01132700 A CN01132700 A CN 01132700A CN 1348169 A CN1348169 A CN 1348169A
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CN1316450C (zh
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R·H·亨泽
A·H·简斯
P·W·波尔曼
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HP Inc
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    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
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    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
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    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/187—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features
    • G11B5/255—Structure or manufacture of the surface of the head in physical contact with, or immediately adjacent to the recording medium; Pole pieces; Gap features comprising means for protection against wear
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    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
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    • G11B5/295—Manufacture
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    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/48—Disposition or mounting of heads or head supports relative to record carriers ; arrangements of heads, e.g. for scanning the record carrier to increase the relative speed
    • G11B5/488—Disposition of heads
    • G11B5/4893—Disposition of heads relative to moving tape
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/008—Recording on, or reproducing or erasing from, magnetic tapes, sheets, e.g. cards, or wires
    • G11B5/00813—Recording on, or reproducing or erasing from, magnetic tapes, sheets, e.g. cards, or wires magnetic tapes
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G—PHYSICS
    • G11—INFORMATION STORAGE
    • G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
    • G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
    • G11B5/127—Structure or manufacture of heads, e.g. inductive
    • G11B5/31—Structure or manufacture of heads, e.g. inductive using thin films
    • G11B5/3103—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing
    • G11B5/3106—Structure or manufacture of integrated heads or heads mechanically assembled and electrically connected to a support or housing where the integrated or assembled structure comprises means for conditioning against physical detrimental influence, e.g. wear, contamination
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    • Y10T29/00—Metal working
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    • Y10T29/49021—Magnetic recording reproducing transducer [e.g., tape head, core, etc.]
    • Y10T29/49027—Mounting preformed head/core onto other structure
    • Y10T29/49028—Mounting multitrack head
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
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    • Y10T29/49002—Electrical device making
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    • Y10T29/49032—Fabricating head structure or component thereof
    • Y10T29/49036—Fabricating head structure or component thereof including measuring or testing
    • Y10T29/49041—Fabricating head structure or component thereof including measuring or testing with significant slider/housing shaping or treating
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Abstract

提供形成磁头组合件的方法、磁头组合件以及线性磁带机。本发明的一个方面提供形成磁头组合件30的方法,该方法包括:提供基底构件34;在基底构件之上形成多个磁头组件60,后者各自适合于传递关于媒体的信息;设置多个组件区46靠近各自的磁头组件60和媒体传送路径;在相邻的磁头组件60之间设置支持区48并将其放置到适当位置以支持媒体沿着传送路径移动,支持区48包含不同于组件区46的材料。

Description

形成磁头组合件的方法，磁头 组合件以及线性磁带机
发明领域
本发明涉及形成磁头组合件的方法，磁头组合件以及线性磁带机。
发明背景
高容量存储能力正在变得更普遍并被许多应用软件所要求，例如资源汇编，备份以及档案配置。对于各种配置，要求在不中断事务处理情况下提供这种备份的能力。此外，提供数字数据的长期存储还要求提高速度、可存取性和可靠性。
作为提供增强的高容量存储的线性带格式，已经发展了LinearTape-Open(LTO)Ultrium格式。第一代配置可以在单个盒式磁带上传送高达10GB的本机数据容量。将来的配置可升级到在单个盒式磁带中提供1.6TB的本机数据容量。
参考图1，图中表示一个高容量存储设备中用于读写的传统磁头配置10。该配置10包括磁头心片基片12，填充块14以及覆盖条16。磁头元件设置在区域18，包括一个多个淀积层和一个绝缘基体。典型的淀积层包括用于形成写磁极、屏蔽罩以及磁阻读元件的金属磁性材料。这些淀积层通常淀积在心片基片12之上并包含在心片基片12和覆盖条16之间。由于制造方法的缘故，绝缘基体和各层通常包括相对较软的材料(与基片及覆盖条相比)。与包括基片及覆盖条的磁头组合件的其他部分相比，软性材料易于磨损。
因此，许多传统配置受到磁极尖端凹陷的困扰，在使用中，其中的绝缘基体和各层被通过的带磨损。这些传统磁头配置受到由于磁极尖端凹陷而导致磁带记录空间损失的影响。这种空间损失减小了给定的磁带上记录数据能力的密度。
参考图2，区域18中传统磁头配置的磁极尖端凹陷如图所示。图示配置包括对应于相对软性材料的AL(1)，例如淀积在基片12之上的氧化铝。符号P3对应于靠近读元件(未加标号)的屏蔽罩。符号P2对应于靠近读元件的共享的屏蔽罩/磁极。符号P1对应于写磁极而AL(2)对应于形成磁头元件的各淀积层之上的氧化铝材料层。这种相对于磁极尖端凹陷而增加的磁化率减小了传统设备能够达到的最大记录密度。
为了进一步增加线性记录密度，必须在先有技术设备上改进设备和方法。
发明概述
本发明提供形成磁头组合件的方法，磁头组合件以及线性磁带机。
本发明的一个方面提供形成磁头组合件的方法，所述方法包括：提供基底构件；在基底构件之上形成各自适合于传递关于磁带的信息的多个磁头组件；设置多个组件区靠近各个磁头组件和带传送路径；以及在相邻的磁头组件中间设置支持区并将其放置到适当位置以支持所述带沿着传送路径移动，所述支持区包含不同于组件区的材料。
本发明的另一个方面提供构造成传递关于磁带的信息的磁头组合件，它包括：基底构件；以及邻近基底构件的磁头构件，后者包括：靠近带传送路径适合于传递关于磁带的信息的多个磁头组件；靠近带传送路径和磁头组件中相应的磁头组件的多个组件区；以及相邻的磁头组件之间并放置到适当位置以支持所述带沿着传送路径移动的支持区，所述支持区包含不同于组件区的材料。
本发明的再一个方面提供构造成传递关于磁带信息的线性磁带机，它包括：适合于与外部装置耦合的输入端；适合于接纳包含磁带的盒式磁带的盒式磁带接纳部件；设置在带传送路径附近的磁头组合件，磁头组合件包括：基底构件；靠近基底构件的覆盖构件；在基底构件和覆盖构件中间的磁头构件，后者包括：构造成传递关于带的信息、包括从带上读信息和在带上写信息的多个磁头组件；靠近带传送路径和相应的磁头组件的多个组件区；以及所述各磁头组件中相邻的磁头组件之间并放置到适当位置以支持所述带沿着传送路径移动的支持区，支持区包含硬度大于组件区的材料。
对于本专业的普通技术人员，当阅读以下的详细描述、权利要求书和附图时，将明白本发明的其他的特征和优点。
附图说明
图1是传统的磁头构造的平面图。
图2是传统的磁头的磁极尖端凹陷外形的详细的横截面视图。
图3是体现本发明的各个方面的的典型的磁带机的透视图。
图4是根据本发明的磁头组合件的第一实施例的平面图。
图5是体现本发明的各个方面的的双磁头组合件的侧视图。
图6是描绘典型的磁头组件的细节的等角视图。
图7是描绘多个磁头组件的横截面视图。
图8是沿图7中8-8线截取的横截面视图。
图9是传统的磁头组合件磨损的图解表示。
图10是体现本发明的各个方面的的典型的磁头组合件的图解表示。
最佳实施例的详细描述
参考图3，图中示出体现本发明的各个方面的的典型的磁带机20。所描绘的磁带机20根据Ultrium格式实现Linear Tape-Open(LTO)技术以提供大容量存储能力。Ultrium格式在2000年6月的Data Storage，第25-28页，Ralph Simmons的“通往Ultrium磁带关键的HDD技术”一文中有所描述，通过引用包括在本文中。该实施例是典型的，根据本发明也可能利用其他的技术或格式。例如，其他的可能的格式包括数字线性磁带(DLT)或者任何利用多通道薄膜磁头的螺旋扫描磁带格式。
根据Ultrium格式，用于存储和检索的磁带包括四个数据带，每个数据带包含96个数据磁道。在磁带的数据带的相对侧设置伺服带。伺服带根据垂直和纵向的位置信息编码使数据带的磁道能够被访问。
图示的磁带机20包括盒式磁带接纳部件22，它适合于接纳包含用于数据存储和检索的媒体、例如磁带的盒式磁带。磁带机20包括输入输出装置24，用于耦合到外部装置、以便提供关于磁带机20的数据传送。例如，输入输出装置24与提供备份或者档案存储能力的装置如计算机、服务器、存储区网络进行连接。
参考图4，图中描绘磁带机20中典型的磁头组合件30。图示的磁头组合件30称为单凸块磁头组合件(图5中示出双凸块磁头组合件31)。图示的磁头组合件30包括基底构件34、覆盖构件36以及基底构件34和覆盖构件36中间的磁头构件38。
在所述配置中，基底构件34包括磁头芯片40和填充块42。磁头芯片40包括如图所示构造中的磁头心片基片44和磁头构件38。基片44采用诸如Al2O3TiC的晶片，随后在基片44上形成各层以构成磁头构件38。图示实施例中的磁头构件38也可以称为磁头组。图示实施例中，在基片44上形成的层包括氧化铝基体和金属磁性材料的顺序的各层，作为写磁极、屏蔽罩和磁阻读元件。典型的磁极材料包括NiFe，FeTaN或FeAlN。在所述配置中，填充块42和覆盖构件36由Al2O3TiC组成。
所示的磁头构件38包括多个组件区46和支持区48。下面参考图7详细描述包括组件区46和支持区48的磁头构件38。
磁头组合件30通常设置在诸如磁带等媒体的传送路径附近。参考图4，传送路径在X方向伸展。磁带机20的电动机(未显示)用于在Y方向移动磁头组合件30以便访问在X方向通过的媒体的各个数据带。在所述实施例中磁头芯片40的宽度(Y方向)大约为8毫米。
参考图5，图中示出包含双凸块组合件的磁头组合件31，后者靠近媒体50如磁带、并沿着传送路径基本上在X方向上移动。磁头组合件31包括以镜像排列方式彼此相邻地设置的双磁头组合件30。包含屏蔽罩和粘着剂的层53用于磁头组合件30的连接。磁头组合件30配备有各自包括多个磁头组件的多个凸块52和54(如图6和图7)。根据Ultrium格式，在单个凸块52，54中配备有八个磁头组件。在典型的构造中，凸块52，54分别包括用于传递关于媒体50的信息的读元件和写元件。例如，如果媒体50向右移动，凸块52用于在媒体50上写数据，凸块54用于从媒体50中读出刚刚写的磁道以检查数据传送的正确性。其他配置提供的凸块52，54包括一个读元件或一个写元件。
参考图6，图中描绘包括写元件和读元件的磁头组件60的一部分。这部分设置在靠近媒体50的数据磁道62的位置，以便传递关于媒体50的数据。在所述实施例中，磁头组件60构造成根据Ultrium格式、利用Linear tape-open技术传递数据。磁头组件60的其他构造也是可能的。
结构64，71作为写磁极响应写线圈66的控制信号、通过在数据磁道62上施加磁通量来写信息。如图所示，读元件68，例如磁阻元件，安排成在数据磁道上写数据之前读数据。读元件68读出的数据使用导体70传输。结构71，73提供磁屏蔽(结构71作为写元件的写磁极，并且作为读元件的屏蔽罩)。
参考图7，图中示出靠近磁头构件38中多个磁头组件60的组件区46。媒体50沿着靠近各个磁头组件60的磁头构件38的表面72移动。就图7而言，媒体50的运动沿着X方向(进或出图面)。磁头组件60的适当的读元件和写元件(图6)传递关于媒体50的数据磁道的数据。
根据本发明的各个方面，支持区48设置在相邻的组件区46和磁头组件60之间或它们中间。组件区46包括关于用以形成磁头组件60的读元件和写元件的多个层的材料如氧化铝。组件区46和磁头组件60的硬度比基片44、填充块42和覆盖构件36的硬度小。
参考图8，绝缘层75，如氧化铝，在磁头组件60的金属化层77和光阻材料层79的周围形成组件区46。组件区46包括单磁头组件60周围的部分绝缘层75。在磁带机20使用期间，媒体50磨蚀特性磨损了组件区46和包括磁头组件60的各层的相对柔软的绝缘材料。
再一次参考图7，支持区48，也称为接合区，包含的材料不同于组件区46和磁头组件60。支持区48设置在靠近磁头构件38的适当位置以支撑媒体50沿着传送路径移动。根据本发明的各个方面，支持区48单独地含有比组件区46和磁头组件60硬度大的材料。支持区48增加了抵抗媒体50磨损的耐磨力。在一个典型的实施例中，与包括层75材料的组件区46和磁头组件60相比，包括Al2O3TiC的支持区48有更大的硬度和抵抗磨损的耐磨力。随着时间的过去，支持区48展示了改善的抵抗媒体50磨损的耐磨力因而减小了磁极尖端凹陷。支持区48减小了将磁带记录到基底构件38中组件区40的偏差。支持区48限制了提供给媒体50的组件区46的磁极/氧化铝基体的宽度。
在所述配置中，相邻磁头组件60的中间部分的距离大约为330微米。在描写的实施例中，距离Q表示大约30微米的磁道附近区域。要求将各支持区48之间的距离以及磁道附近区域最小化以增强针对媒体50磨损的保护措施。在一个实施例中支持区48有基本上三角形的横断面。
图7中，还以纵剖面图的形式示出在支持区48的下方的附加的支持区74。在一个典型的实施例中，支持区74包含和支持区48同样的材料，用于确保覆盖构件34对基底构件36的平面度。
根据本发明的各个方面，利用各种方法来形成支持区48和74。再次参考图8，磁头组件60形成于基片44之上。以后，绝缘材料作为电绝缘层75覆盖淀积在基片44上的磁头组件60。后续处理包括除掉形成图7所示的支持区48的各区域中相邻磁头组件60之间的绝缘材料。在一种处理方法中使用干蚀刻来除去绝缘材料中希望去除的部分。如果绝缘材料是氧化铝，一种典型的蚀刻工艺是基于氯的反应离子蚀刻(RIE)。
根据一种制作方法，覆盖构件36制作成带柱状延伸部分或牙，这些柱状延伸部分或牙以配合的图案的方式向外延伸到绝缘材料的除掉部分。在一个实施例中，离子铣技术用于在覆盖构件36之上构成适当的支持区48。以后，在磁头组合件30、31的制作期间，覆盖构件36结合或者是设置在磁头构件38附近，并且，在适当的相邻磁头组件60之间接纳包括支持区48的延伸部分。
作为替代，在去除层75的绝缘材料部分之后，在基底构件34上所述去除部分的范围内淀积支持区材料以形成支持区48。这种方法通常在适当地遮掩磁头组件60之后进行。
参考图9和图10，图中示出传统的磁头组合件的磨损和基于本发明的磁头组合件的磨损的图解表示。这些图解表示描述了对磁头组合件的磨损随媒体(例如磁带)施加的压力以及对应于磁头组合件材料的磨损系数而变化。媒体例如磁带，从左到右或从右到左横跨磁头组合件而移动。
图9中描绘水平轴线上大约-0.135毫米处基片12的边缘以及水平轴线上大约0.135毫米处的覆盖条16的边缘。图中还描绘水平轴上、图形的大约-0.025毫米和0.025毫米之间的传统配置的区域18。
图10中描绘水平轴线上大约-0.135毫米处基片40的边缘以及水平轴线上大约0.135毫米处的覆盖条36的边缘。图中还描绘水平轴上、图形的大约-0.025毫米和0.025毫米之间的传统配置的磁头构件38。
参考图9，图中示出对应于区域18的相对柔软的材料，从大约-0.025毫米到0.025毫米之间的整个跨度内(从顶端到底部)出现增加的磨损。
参考图10，在垂直轴线上，在0.30毫米之上和0.03毫米以下的位置设置支持区48，位于其中间的是组件区46。相比于所述实施例中设置在0.30毫米和0.03毫米之间的包含绝缘材料和形成磁头组件60的各层的组件区46，支持区48受到较少的磨损。图中还描绘组件区46范围内、从区域46的下端到垂直方向上大约0.10毫米的位置以及从区域46的上端到垂直方向上大约0.23毫米的位置磨损增加。如图所示，在各个组件区46范围内设置尽可能接近磁头组件60的磁头元件(例如，磁极，屏蔽罩)的支持区48以增强耐磨性。
本发明用于减少因媒体对磁头组合件30的磨损引起的磁极尖端凹陷。本发明的各个方面限制了空间损失并使增加记录密度成为可能。
所要求的保护不限于仅作为例子提供的公开的实施例，而是由所附的权利要求书的范围所限定。

Claims (10)

1.一种形成磁头组合件30的方法，所述方法包括：
提供基底构件34；
在所述基底构件34之上形成多个磁头组件60，后者各自适合于传递关于媒体的信息；
设置多个组件区46靠近所述各个磁头组件60和所述媒体传送路径；以及
在相邻的所述磁头组件60之间设置支持区48并将其放置到适当位置以支持所述媒体沿着所述传送路径移动，所述支持区48包含不同于所述组件区46的材料。
2.权利要求1的方法，其特征在于：设置所述支持区48的步骤包括使所述支持区48包含硬度大于所述组件区46的材料。
3.权利要求1或2的方法，其特征在于：设置所述支持区48的步骤包括使所述支持区48包含耐磨力大于所述组件区46的材料。
4.权利要求1，2或3的方法，其特征在于还包括设置绝缘层并且设置所述组件区46的步骤包括除掉所述绝缘层的一部分以便形成所述组件区46。
5.根据权利要求1，2，3或4的方法，其特征在于：设置所述支持区48的步骤包括在覆盖构件上形成所述支持区48并将所述覆盖构件放置在所述基底构件34附近。
6.一种构造成传递关于媒体信息的磁头组合件30，它包括：
基底构件34；以及
靠近所述基底构件34的磁头构件38，后者包括：
靠近媒体传送路径并且适合于传递关于媒体的信息的多个磁头组件60；
靠近所述媒体的所述传送路径和各个所述磁头组件60的多个组件区46；以及
处在相邻的所述磁头组件60之间并放置到适当位置以支持媒体沿着所述传送路径移动的支持区48，所述支持区48包含不同于所述组件区46的材料。
7.权利要求6的组合件，其特征在于：所述支持区48的材料具有大于所述组件区46的材料的硬度。
8.权利要求6或7的组合件，其特征在于：所述支持区48的材料具有大于所述组件区46的材料的耐磨性。
9.权利要求6，7或8的组合件，其特征在于：所述各磁头组件60各自包括读元件和写元件。
10.权利要求6，7，8或9的组合件，其特征在于：所述支持区48包含覆盖构件的一部分。
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