CN1329784C - Soft positive sensor precision straight feeding device - Google Patents
Soft positive sensor precision straight feeding device Download PDFInfo
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- CN1329784C CN1329784C CNB2004100527618A CN200410052761A CN1329784C CN 1329784 C CN1329784 C CN 1329784C CN B2004100527618 A CNB2004100527618 A CN B2004100527618A CN 200410052761 A CN200410052761 A CN 200410052761A CN 1329784 C CN1329784 C CN 1329784C
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- 230000001360 synchronised effect Effects 0.000 claims abstract description 59
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052782 aluminium Inorganic materials 0.000 claims abstract description 10
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- 238000012545 processing Methods 0.000 claims description 34
- 230000003068 static effect Effects 0.000 claims description 13
- 239000004411 aluminium Substances 0.000 claims description 9
- 239000004973 liquid crystal related substance Substances 0.000 claims description 9
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- 230000004044 response Effects 0.000 abstract description 3
- 230000002349 favourable effect Effects 0.000 abstract 1
- 230000005389 magnetism Effects 0.000 abstract 1
- 230000003287 optical effect Effects 0.000 abstract 1
- 238000000926 separation method Methods 0.000 abstract 1
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- 230000008859 change Effects 0.000 description 3
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- 230000005540 biological transmission Effects 0.000 description 2
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- 229910001172 neodymium magnet Inorganic materials 0.000 description 2
- 230000009471 action Effects 0.000 description 1
- 238000012937 correction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
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- 238000011161 development Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005489 elastic deformation Effects 0.000 description 1
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- 238000009434 installation Methods 0.000 description 1
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- 210000000056 organ Anatomy 0.000 description 1
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Abstract
The present invention discloses a precise linear feed device of a soft position sensor. A stator of a permanent magnet linear synchronous motor is arranged on a stator bottom board by a magnetism separation aluminum plate, and a mover of the permanent magnet linear synchronous motor is arranged under a mover bottom board of the permanent magnet linear synchronous motor at the position corresponding to the stator of the permanent magnet linear synchronous motor. Both sides of the mover bottom board and the stator bottom board are connected with a linear guide rail combined by a sliding block of a straight guide rail pair and a straight guide rail to make the stator and the mover of the permanent magnet linear synchronous motor keep an air gap. One side of the mover bottom board and one side of the stator bottom board are respectively provided with a travel switch block and a travel switch. The present invention uses the permanent magnet linear synchronous motor of the soft position sensor as a driving device of linear motion to make the mechanical mechanism of a feeding system greatly simplified, namely that the mechanical mechanism does not need an optical grating ruler or other position sensors. The present invention improves the motion velocity of the feeding system and the dynamic response characteristic of the system. The present invention is favorable for the feeding and driving device of a linear motor to use on industrial site in harsh environment.
Description
Technical field
The present invention relates to feed arrangement, relate in particular to a kind of Soft Position Transducer Accurate Straight Line Feed Gear.
Background technology
Along with development of advanced manufacturing such as precision manufacturing and Numeric Control Technologies, at a high speed, efficient, the high-precision developing direction that becomes today's numerical control equipment.For a long time, the feed system of numerically-controlled machine mainly is " electric rotating machine+ball-screw ", and the highest speed of feed that this feed system can reach is 90～120m/min, and peak acceleration has only 1.5g.Simultaneously, owing to have a series of intermediate links such as shaft coupling, leading screw, nut, bearing, support between from the motor main shaft to the worktable, when infeed mean will be finished action such as startup, acceleration and deceleration, counter-rotating, parking, the elastic deformation that these mechanical organs produce, friction, backlass etc. can cause the hysteresis and other many nonlinearity errons of feed motion; These intermediate links have also strengthened the inertial mass of system, have influenced the quick response to movement instruction.In addition, leading screw is an elongate rod, under the effect of power and heat, can produce distortion, influences machining precision.
In order to overcome the shortcoming of traditional feed system, simplify machine tool structure, satisfy the requirement of high speed and precision processing, people's novel feed system that begins one's study, linear electric motors are exactly the most promising fast feed system.It has cancelled all the middle transmission links between driving source and the worktable part, makes that the length of machine tool feed driving-chain is zero, and Here it is so-called " directly driving " or " zero transmission ".
In high-precision linear electric motors position control, position probing is one of its gordian technique, directly affects the control accuracy of control system.Extensively use the sensor of grating chi at present, and carry out FEEDBACK CONTROL as the linear electric motors displacement detecting.When linear electric motors move, grating sensor is the displacement of detection of straight lines motor constantly, the quadrature coding pulse signal that produces is input in the digital signal processing chip as position feedback, digital signal processing chip is capable relatively with linear electric motors predetermined displacement and detected present bit shift-in, provide relevant voltage to power amplifier by control algolithm, to drive the linear electric motors motion.
Yet adopt the grating chi to have limitation as the linear electric motors position transducer: the maximum detection speed of (1) grating chi has limited the further raising of straight-line feed speed less than the linear electric motors maximal rate; (2) position transducer has increased the drive system size, has the installation and maintenance problem, has reduced system's operational reliability; (3) grating chi anti-adverse environment ability is relatively poor, has also influenced the application of linear electric motors feed arrangement in abominable industrial environment.4) costing an arm and a leg of high speed, high resolution position transducer significantly increases the cost of linear drive apparatus; Therefore, preferably adopt and a kind ofly avoid using grating or other position transducers and can realize the location detecting technology of the precision positions control of straight-line feed device.
Summary of the invention
In order to realize high-speed accurate linear feeding system and to simplify the feed system structure, the object of the present invention is to provide a kind of Soft Position Transducer Accurate Straight Line Feed Gear.Avoid using grating chi or other position transducers, and electric current, the information of voltage of employing electric current, the online detection of straight lines motor of voltage sensor, and obtain the straight-line feed positional information by software by digital processing chip, feed back to controller and realize position closed loop control.
The technical solution adopted for the present invention to solve the technical problems is that it comprises:
1) machine structural parts: comprise travel switch block, line slideway auxiliary slide block, line slideway, mover base plate, permanent magnet linear synchronous motor mover, permanent magnet linear synchronous motor stator, every magnetic aluminium sheet, stator plate, travel switch.The permanent magnet linear synchronous motor stator is by being installed in centre position above the stator plate every the magnetic aluminium sheet, with permanent magnet linear synchronous motor stator correspondence position the permanent magnet linear synchronous motor mover is housed below the permanent magnet linear synchronous motor mover base plate, mover base plate and stator plate both sides are by being connected by the line slideway auxiliary of line slideway auxiliary slide block with the line slideway combination, make between permanent magnet linear synchronous motor stator and permanent magnet linear synchronous motor mover to keep air gap, travel switch block and travel switch are installed respectively in a side of mover base plate and stator plate;
2) electrical and electronic parts: comprise the permanent magnet linear synchronous motor winding, inverter, system power supply, electrical source of power, three phase power drives, photoelectric isolated chip, voltage sensor, three current sensors, digital signal processing chip, power supply chip, static RAM, power supply fiducial chip, the keyboard chip, the LCD liquid crystal interface, keyboard, LCD liquid crystal.The both positive and negative polarity of electrical source of power links to each other with the inverter both positive and negative polarity respectively, the A end stube cable of inverter, link to each other with the A end of three phase windings of permanent magnet linear synchronous motor mover winding by first current sensor, the B end stube cable of inverter, link to each other with the B end of three phase windings of permanent magnet linear synchronous motor mover winding by second current sensor, the C end stube cable of inverter, link to each other with the C end of three phase windings of permanent magnet linear synchronous motor mover winding by the 3rd current sensor, and stube cable passes current sensor separately respectively, the input end of voltage sensor also with the A of three phase windings of permanent magnet linear synchronous motor, B, the C end links to each other; The output terminal of voltage sensor output terminal and three current sensors links to each other with the A/D interface end of digital signal processing chip respectively; The PWM mouth of digital signal processing chip links to each other with the input port of photoelectric isolated chip, and the delivery outlet of photoelectric isolated chip links to each other with the input port that three phase power drives, and the delivery outlet that three phase power drives links to each other with the corresponding control input of inverter; Power supply chip, static RAM, power supply fiducial chip, keyboard chip, LCD interface chip link to each other with the digital signal processing chip corresponding interface respectively.
Permanent magnet linear synchronous motor is made up of mover (elementary), stator (NdFeB permanent magnet) for short primary planar type.Mover is installed in mover base plate centre position, stator is by being installed in every the magnetic aluminium sheet on the stator plate and the mover opposite position, the mover base plate is connected with the linear guides parafacies of stator plate by the motor both sides, and makes and keep certain air gap between the stator of motor and mover; On stator plate, travel switch and block are installed respectively, are increased the security of system with a side of mover base plate.After feeding three-phase symmetrical sine electric current in three phase windings of mover, with the generation air-gap field that moves along a straight line, the excitation field of this magnetic field and permanent magnet interacts and produces electromagnetic push, because permanent magnet maintains static, electric mover follows the reverse direction moving linearly of ripple Movement in Magnetic Field by the linear guides pair.
The voltage and current of electric mover winding is respectively by voltage, the online detection of current sensor, and change into digital quantity by the A/D interface that digital signal processing chip carries, obtain the straight-line feed positional information by the software computing that embeds digital signal processing chip, relatively also calculate the acquisition controlled quentity controlled variable with setting value, isolate through the three phase power driving circuit to inverter by photoelectricity by pwm signal, and realize position closed loop control by the Control current that inverter produces permanent magnet linear synchronous motor.The straight-line feed position can be by keyboard to set up, and can be by liquid crystal display numerical value.
The useful effect that the present invention has is:
In order to realize high precision, high-speed linear feeding system, the present invention adopts soft position sensor permanent magnet linear synchronous motor as straight-line drive unit, the mechanical mechanism of feed system is greatly simplified, and avoid using grating chi or other position transducers, the movement velocity that helps feed system improves, the dynamic response characteristic of improvement system, and help the linear electric motors feed drive unit and use in the industry spot of rugged surroundings, and stroke can increase or reduce permanent magnet blocks according to design objective, unrestricted, for solving at a high speed, the precision straight-line motion mechanism provides a kind of new equipment.
Description of drawings
Fig. 1 is a structural principle synoptic diagram of the present invention;
Fig. 2 is a permanent magnet linear synchronous motor structure A-A cut-open view;
Fig. 3 is soft position Fundamentals of Sensors figure of the present invention.
Among Fig. 1, Fig. 2: 1-travel switch block, 2-line slideway auxiliary slide block, 3-line slideway, 4-mover base plate, 5-mover (elementary), 6-stator (NdFeB permanent magnet), 7-be every the magnetic aluminium sheet, 8-wedge shape briquetting, 9-stator plate, 10-travel switch.
Among Fig. 3: A1-permanent magnet linear synchronous motor mover winding, A2-inverter, A3-system power supply, the A4-electrical source of power, the A5-three phase power drives, the A6-photoelectric isolated chip, the B1-voltage sensor, B2, B3, the B4-current sensor, B5-digital signal processing chip, B6-power supply chip, the B7-static RAM, B8-power supply fiducial chip, B9-keyboard chip, the B10-LCD interface, B11-keyboard, B12-LCD liquid crystal.
Embodiment
As shown in Figure 1 and Figure 2, machine structural parts of the present invention: comprise travel switch block 1, line slideway auxiliary slide block 2, line slideway 3, mover base plate 4, permanent magnet linear synchronous motor mover 5, permanent magnet linear synchronous motor stator 6, every magnetic aluminium sheet 7, stator plate 9, travel switch 10; Permanent magnet linear synchronous motor stator 6 is by centre position above magnetic aluminium sheet 7 is installed in stator plate 9, with permanent magnet linear synchronous motor stator 6 correspondence positions permanent magnet linear synchronous motor mover 5 is housed below the permanent magnet linear synchronous motor mover base plate 4, mover base plate 4 and stator plate 9 both sides are by being connected by the line slideway auxiliary of line slideway auxiliary slide block 2 with line slideway 3 combinations, make 5 of permanent magnet linear synchronous motor stator 6 and permanent magnet linear synchronous motor movers keep air gap, travel switch block 1 and travel switch 10 are installed respectively in a mover base plate 4 and a side of stator plate 11.After feeding three-phase symmetrical sine electric current in three phase windings of mover, with the generation air-gap field that moves along a straight line, the excitation field of this magnetic field and permanent magnet interacts and produces electromagnetic push, because permanent magnet maintains static, electric mover follows the reverse direction moving linearly of ripple Movement in Magnetic Field by the linear guides pair.
As shown in Figure 3, electrical and electronic parts of the present invention: comprise permanent magnet linear synchronous motor winding A1, inverter A2, system power supply A3, electrical source of power A4, three phase power drives A5, photoelectric isolated chip A6, voltage sensor B1, three current sensor B2, B3, B4, digital signal processing chip B5, power supply chip B6, static RAM B7, power supply fiducial chip B8, keyboard chip B9, LCD liquid crystal interface B10, keyboard B11, LCD liquid crystal B12.The both positive and negative polarity of electrical source of power A4 links to each other with inverter A2 both positive and negative polarity respectively, the A end stube cable of inverter A2, link to each other with the A end of three phase windings of permanent magnet linear synchronous motor mover winding A1 by the first current sensor B2, the B end stube cable of inverter A2, link to each other with the B end of three phase windings of permanent magnet linear synchronous motor mover winding A1 by the second current sensor B3, the C end stube cable of inverter A2, C end by the 3rd current sensor B4 and three phase windings of permanent magnet linear synchronous motor mover winding A1 links to each other, the input end of voltage sensor B1 also with the A of three phase windings of permanent magnet linear synchronous motor A1, B, the C end links to each other; The output terminal of voltage sensor B1 output terminal and three current sensor B2, B3, B4 links to each other with the A/D interface end of digital signal processing chip B5 respectively; The PWM mouth of digital signal processing chip B5 links to each other with the input port of photoelectric isolated chip A6, and the delivery outlet of photoelectric isolated chip A6 links to each other with the input port that three phase power drives A5, and the delivery outlet that three phase power drives A5 links to each other with the corresponding control input of inverter A2; Power supply chip B6, static RAM B7, power supply fiducial chip B8, keyboard chip B9, LCD interface chip B10 link to each other with digital signal processing chip B5 corresponding interface respectively.
More than said three phase power to drive A5 be IR2331, photoelectric isolated chip A6 is 6N137, inverter A2 is IRFR254, voltage sensor B1 is WB3V412, and current sensor B2, B3, B4 are WB11412, and digital signal processing chip B5 is TMS320F2812, power supply chip B6 is TPS767D318, static RAM B7 is IDT71V424, and power supply fiducial chip B8 is REF3033, and keyboard chip B9 is 82C79.
Working method of the present invention is as follows: permanent magnet linear synchronous motor stator 6 is by being installed in every magnetic aluminium sheet 7
Centre position above the stator plate 9, with permanent magnet linear synchronous motor stator 6 correspondence positions permanent magnet linear synchronous motor mover 5 is housed below the permanent magnet linear synchronous motor mover base plate 4, mover base plate 4 and stator plate 9 both sides are by being connected by the line slideway auxiliary of line slideway auxiliary slide block 2 with line slideway 3 combinations, make 5 of permanent magnet linear synchronous motor stator 6 and permanent magnet linear synchronous motor movers keep air gap, line slideway 3 usefulness wedge shape briquettings 8 compress, and in a mover base plate 4 and a side of stator plate 9 travel switch block 1 are installed respectively and are reached
Travel switch 10.The both positive and negative polarity of electrical source of power A4 links to each other with the inverter both positive and negative polarity respectively, the A of inverter A2, B, C end link to each other with three-phase A, B, the C end of permanent magnet linear synchronous motor mover winding A1 respectively, and stube cable passes current sensor B2, B3, B4 respectively, and the input end of voltage sensor B1 also links to each other with A, B, the C end of three phase windings of permanent magnet linear synchronous motor A1.The output terminal of voltage sensor B1 output terminal and current sensor B2, B3, B4 links to each other with the A/D interface end of digital signal processing chip B5.The PWM mouth of digital signal processing chip B5 links to each other with the input port of photoelectric isolated chip A6, and the delivery outlet of photoelectric isolated chip A6 links to each other with the input port that three phase power drives A5, and the delivery outlet that three phase power drives A5 links to each other with the corresponding control input of inverter A2.Power supply chip B6, static RAM B7, power supply fiducial chip B8, keyboard chip B9, LCD interface chip B10 link to each other with the digital signal processing chip corresponding interface respectively.
Power supply chip B6 provides digital signal processing chip B5 power supply, and power supply fiducial chip B8 provides the reference voltage of digital signal processing chip B5.Static RAM B7 deposits data and the program of digital signal processing chip B5.System power supply A3 provides the power supply of digital signal processing chip system, and electrical source of power A4 provides the power supply of inverter A2.Liquid crystal B12 display position numerical value can be set in the straight-line feed position by keyboard B11.
When linear motor rotor 5 is static, isolate A6 and be added on the two-phase of mover winding A1 successively by turns through photoelectricity by digital signal processing chip B5 generation pwm signal through three phase power driving A5 control inverter A2 generation one suitably big or small constant DC voltage, the voltage and current of linear motor rotor winding A1 is respectively by voltage sensor B1, current sensor B2, B3, the online detection of B4, and change into digital quantity by the A/D interface that digital signal processing chip B5 carries, can obtain the series inductance of this three phase winding by analyzing these data at last.The voltage that this moment, winding terminal applied can not be too big, should guarantee electric mover transfixion under this voltage.After measuring three corresponding under a certain rotor position series line inductance value, obtain initial position by digital signal processing chip software.
In linear motor rotor 5 motion processes, the voltage and current of linear motor rotor winding A1 is respectively by voltage sensor B1, current sensor B2, B3, the online detection of B4, and change into digital quantity by the A/D interface that digital signal processing chip B5 carries, obtain the straight-line feed positional information by the software computing that embeds digital signal processing chip B5, relatively also calculate the acquisition controlled quentity controlled variable with setting value, isolate A6 through three phase power driving circuit A5 control inverter A2 by pwm signal by photoelectricity, and produce the Control current realization position closed loop control of permanent magnet linear synchronous motor by inverter A2.
In addition, in order to improve the precision that the soft position sensor detects in real time, can adopt nano level laser interferometer to carry out the pointwise measurement of comparison, the gained error is used for the correction of digital signal processing chip software algorithm, realizes higher soft position sensor accuracy.Simultaneously,, the position limit switch is set on software not only, and on the straight-line feed device, the physics travel switch is installed, guarantee staff and property safety in order to improve the security of feed system.
Claims (2)
1, a kind of Soft Position Transducer Accurate Straight Line Feed Gear is characterized in that comprising:
1) machine structural parts: comprise travel switch block (1), line slideway auxiliary slide block (2), line slideway (3), mover base plate (4), permanent magnet linear synchronous motor mover (5), permanent magnet linear synchronous motor stator (6), every magnetic aluminium sheet (7), stator plate (9), travel switch (10); Permanent magnet linear synchronous motor stator (6) is by centre position above magnetic aluminium sheet (7) is installed in stator plate (9), with permanent magnet linear synchronous motor stator (6) correspondence position permanent magnet linear synchronous motor mover (5) is housed below the permanent magnet linear synchronous motor mover base plate (4), mover base plate (4) and stator plate (9) both sides are by being connected by the line slideway auxiliary of line slideway auxiliary slide block (2) with line slideway (3) combination, make between permanent magnet linear synchronous motor stator (6) and permanent magnet linear synchronous motor mover (5) to keep air gap, travel switch block (1) and travel switch (10) are installed respectively in a mover base plate (4) and a side of stator plate (11);
2) electrical and electronic parts: comprise permanent magnet linear synchronous motor winding (A1), inverter (A2), system power supply (A3), electrical source of power (A4), three phase power drives (A5), photoelectric isolated chip (A6), voltage sensor (B1), three current sensors (B2, B3, B4), digital signal processing chip (B5), power supply chip (B6), static RAM (B7), power supply fiducial chip (B8), keyboard chip (B9), LCD liquid crystal interface (B10), keyboard (B11), LCD liquid crystal (B12); The both positive and negative polarity of electrical source of power (A4) links to each other with inverter (A2) both positive and negative polarity respectively, the A end stube cable of inverter (A2), link to each other with the A end of three phase windings of permanent magnet linear synchronous motor mover winding (A1) by first current sensor (B2), the B end stube cable of inverter (A2), link to each other with the B end of three phase windings of permanent magnet linear synchronous motor mover winding (A1) by second current sensor (B3), the C end stube cable of inverter (A2), C end by the 3rd current sensor (B4) and three phase windings of permanent magnet linear synchronous motor mover winding (A1) links to each other, the input end of voltage sensor (B1) also with the A of three phase windings of permanent magnet linear synchronous motor (A1), B, the C end links to each other; The output terminal of voltage sensor (B1) output terminal and three current sensors (B2, B3, B4) links to each other with the A/D interface end of digital signal processing chip (B5) respectively; The PWM mouth of digital signal processing chip (B5) links to each other with the input port of photoelectric isolated chip (A6), the delivery outlet of photoelectric isolated chip (A6) links to each other with the input port that three phase power drives (A5), and the delivery outlet that three phase power drives (A5) links to each other with the corresponding control input of inverter (A2); Power supply chip (B6), static RAM (B7), power supply fiducial chip (B8), keyboard chip (B9), LCD interface chip (B10) link to each other with digital signal processing chip (B5) corresponding interface respectively.
2. a kind of Soft Position Transducer Accurate Straight Line Feed Gear according to claim 1, it is characterized in that: said three phase power drives (A5) and is IR2331, photoelectric isolated chip (A6) is 6N137, inverter (A2) is IRFR254, voltage sensor (B1) is WB3V412, current sensor (B2, B3, B4) be WB11412, digital signal processing chip (B5) is TMS320F2812, power supply chip (B6) is TPS767D318, static RAM (B7) is IDT71V424, power supply fiducial chip (B8) is REF3033, and keyboard chip (B9) is 82C79.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100527618A CN1329784C (en) | 2004-07-09 | 2004-07-09 | Soft positive sensor precision straight feeding device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB2004100527618A CN1329784C (en) | 2004-07-09 | 2004-07-09 | Soft positive sensor precision straight feeding device |
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| CN1588259A CN1588259A (en) | 2005-03-02 |
| CN1329784C true CN1329784C (en) | 2007-08-01 |
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| CNB2004100527618A Expired - Fee Related CN1329784C (en) | 2004-07-09 | 2004-07-09 | Soft positive sensor precision straight feeding device |
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Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN102510202B (en) * | 2011-11-10 | 2014-11-05 | 苏州大学 | Permanent-magnet linear synchronous motor |
| CN110186365B (en) * | 2019-04-18 | 2021-10-12 | 安徽拓信电气科技有限公司 | Primary permanent magnet type linear position measuring system |
| CN115765326A (en) * | 2022-11-29 | 2023-03-07 | 瑞声科技（南京）有限公司 | Direct-drive transmission system and control method |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5027280A (en) * | 1987-06-11 | 1991-06-25 | Seiko Seiki Kabushiki Kaisha | Machining apparatus having a main spindle supported by magnetic bearings |
| CN2142055Y (en) * | 1992-12-10 | 1993-09-15 | 广东工学院 | Precise feed straight-line driver for machine tool |
| CN1057037C (en) * | 1995-07-14 | 2000-10-04 | 清华大学 | High frequency response, large stroke and high precision microstep feeder |
| CN1415456A (en) * | 2002-08-30 | 2003-05-07 | 中国科学院长春光学精密机械与物理研究所 | Magnetic suspension method for guide rail with ultra precise and micro displacement |
| CN2752831Y (en) * | 2004-07-09 | 2006-01-18 | 浙江大学 | Soft position sensor precision linear feed device |
-
2004
- 2004-07-09 CN CNB2004100527618A patent/CN1329784C/en not_active Expired - Fee Related
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5027280A (en) * | 1987-06-11 | 1991-06-25 | Seiko Seiki Kabushiki Kaisha | Machining apparatus having a main spindle supported by magnetic bearings |
| CN2142055Y (en) * | 1992-12-10 | 1993-09-15 | 广东工学院 | Precise feed straight-line driver for machine tool |
| CN1057037C (en) * | 1995-07-14 | 2000-10-04 | 清华大学 | High frequency response, large stroke and high precision microstep feeder |
| CN1415456A (en) * | 2002-08-30 | 2003-05-07 | 中国科学院长春光学精密机械与物理研究所 | Magnetic suspension method for guide rail with ultra precise and micro displacement |
| CN2752831Y (en) * | 2004-07-09 | 2006-01-18 | 浙江大学 | Soft position sensor precision linear feed device |
Non-Patent Citations (1)
| Title |
|---|
| 机电一体化技术 艾武 程立 杜志强 陈幼平 周祖德，29-32 2004 * |
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