CN2752831Y - Soft position sensor precision linear feed device - Google Patents

Soft position sensor precision linear feed device Download PDF

Info

Publication number
CN2752831Y
CN2752831Y CN 200420037470 CN200420037470U CN2752831Y CN 2752831 Y CN2752831 Y CN 2752831Y CN 200420037470 CN200420037470 CN 200420037470 CN 200420037470 U CN200420037470 U CN 200420037470U CN 2752831 Y CN2752831 Y CN 2752831Y
Authority
CN
China
Prior art keywords
synchronous motor
chip
linear synchronous
permanent magnet
mover
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
CN 200420037470
Other languages
Chinese (zh)
Inventor
傅建中
陈子辰
徐月同
余佩琼
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Zhejiang University ZJU
Original Assignee
Zhejiang University ZJU
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zhejiang University ZJU filed Critical Zhejiang University ZJU
Priority to CN 200420037470 priority Critical patent/CN2752831Y/en
Application granted granted Critical
Publication of CN2752831Y publication Critical patent/CN2752831Y/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Images

Landscapes

  • Linear Motors (AREA)
  • Control Of Linear Motors (AREA)

Abstract

The utility model discloses a soft position sensor precision linear feed device. A stator of a linear synchronous motor with permanent magnetism is installed on a stator base plate via a magnetism-isolated aluminum plate. A mover of the linear synchronous motor with permanent magnetism is installed at the position on a bottom face of the mover base plate of the linear synchronous motor with permanent magnetism corresponding to the stator of the linear synchronous motor with permanent magnetism. The both sides of the mover base plate and the stator base plate are connected by a linear guide rail pair that is combination of a sliding block of the linear guide rail pair and a linear guide rail, to keep an air gap between the stator of the linear synchronous motor with permanent magnetism and the mover of the linear synchronous motor with permanent magnetism. One side of the mover base plate and the stator base plate are respectively provided with a stopper of a travel switch and the travel switch. The device takes a soft position sensor linear synchronous motor with permanent magnetism as the drive device of linear motion, to simplify mechanical mechanism of a feed system greatly. A grating ruler or other position transducers are not needed. A soft position sensor precision linearfeed device is helpful to increase movement velocity of the feed system and improve dynamic response characteristic of the system, and is also helpful to use linear motor feed drive devices on industrial spots of harsh environment.

Description

Soft Position Transducer Accurate Straight Line Feed Gear
Affiliated technical field
The utility model relates to feed arrangement, especially a kind of Soft Position Transducer Accurate Straight Line Feed Gear.
Background technology
Along with development of advanced manufacturing such as precision manufacturing and Numeric Control Technologies, at a high speed, efficient, the high-precision developing direction that becomes today's numerical control equipment.For a long time, the feed system of numerically-controlled machine mainly is " electric rotating machine+ball-screw ", and the highest speed of feed that this feed system can reach is 90~120m/min, and peak acceleration has only 1.5g.Simultaneously, owing to have a series of intermediate links such as shaft coupling, leading screw, nut, bearing, support between from the motor main shaft to the worktable, when infeed mean will be finished action such as startup, acceleration and deceleration, counter-rotating, parking, the elastic deformation that these mechanical organs produce, friction, backlass etc. can cause the hysteresis and other many nonlinearity errons of feed motion; These intermediate links have also strengthened the inertial mass of system, have influenced the quick response to movement instruction.In addition, leading screw is an elongate rod, under the effect of power and heat, can produce distortion, influences machining precision.
In order to overcome the shortcoming of traditional feed system, simplify machine tool structure, satisfy the requirement of high speed and precision processing, people's novel feed system that begins one's study, linear electric motors are exactly the most promising fast feed system.It has cancelled all the middle transmission links between driving source and the worktable part, makes that the length of machine tool feed driving-chain is zero, and Here it is so-called " directly driving " or " zero transmission ".
In high-precision linear electric motors position control, position probing is one of its gordian technique, directly affects the control accuracy of control system.Extensively use the sensor of grating chi at present, and carry out FEEDBACK CONTROL as the linear electric motors displacement detecting.When linear electric motors move, grating sensor is the displacement of detection of straight lines motor constantly, the quadrature coding pulse signal that produces is input in the digital signal processing chip as position feedback, digital signal processing chip is capable relatively with linear electric motors predetermined displacement and detected present bit shift-in, provide relevant voltage to power amplifier by control algolithm, to drive the linear electric motors motion.
Yet adopt the grating chi to have limitation as the linear electric motors position transducer: the maximum detection speed of (1) grating chi has limited the further raising of straight-line feed speed less than the linear electric motors maximal rate; (2) position transducer has increased the drive system size, has the installation and maintenance problem, has reduced system's operational reliability; (3) grating chi anti-adverse environment ability is relatively poor, has also influenced the application of linear electric motors feed arrangement in abominable industrial environment.4) costing an arm and a leg of high speed, high resolution position transducer significantly increases the cost of linear drive apparatus; Therefore, preferably adopt and a kind ofly avoid using grating or other position transducers and can realize the location detecting technology of the precision positions control of straight-line feed device.
Summary of the invention
For realizing high-speed accurate linear feeding system and simplify the feed system structure that the utility model purpose provides a kind of Soft Position Transducer Accurate Straight Line Feed Gear.Avoid using grating chi or other position transducers, and electric current, the information of voltage of employing electric current, the online detection of straight lines motor of voltage sensor, and obtain the straight-line feed positional information by software by digital processing chip, feed back to controller and realize position closed loop control.
The technical scheme that its technical matters that solves the utility model adopts is that it comprises:
1) machine structural parts: comprise travel switch block, line slideway auxiliary slide block, line slideway, mover base plate, permanent magnet linear synchronous motor mover, permanent magnet linear synchronous motor stator, every magnetic aluminium sheet, stator plate, travel switch.The permanent magnet linear synchronous motor stator is by being installed in centre position above the stator plate every the magnetic aluminium sheet, with permanent magnet linear synchronous motor stator correspondence position the permanent magnet linear synchronous motor mover is housed below the permanent magnet linear synchronous motor mover base plate, mover base plate and stator plate both sides are by being connected by the line slideway auxiliary of line slideway auxiliary slide block with the line slideway combination, make between permanent magnet linear synchronous motor stator and permanent magnet linear synchronous motor mover to keep air gap, travel switch block and travel switch are installed respectively in a side of mover base plate and stator plate;
2) electrical and electronic parts: comprise the permanent magnet linear synchronous motor winding, inverter, system power supply, electrical source of power, three phase power drives, photoelectric isolated chip, voltage sensor, three current sensors, digital signal processing chip, power supply chip, static RAM, power supply fiducial chip, the keyboard chip, the LCD liquid crystal interface, keyboard, LCD liquid crystal.The both positive and negative polarity of electrical source of power links to each other with the inverter both positive and negative polarity respectively, the A of inverter, B, C end link to each other with three-phase A, B, the C end of permanent magnet linear synchronous motor mover winding respectively, and stube cable passes current sensor separately respectively, and the input end of voltage sensor also links to each other with A, B, the C end of three phase windings of permanent magnet linear synchronous motor; The output terminal of voltage sensor output terminal and three current sensors links to each other with the A/D interface end of digital signal processing chip respectively; The PWM mouth of digital signal processing chip links to each other with the input port of photoelectric isolated chip, and the delivery outlet of photoelectric isolated chip links to each other with the input port that three phase power drives, and the delivery outlet that three phase power drives links to each other with the corresponding control input of inverter; Power supply chip, static RAM, power supply fiducial chip, keyboard chip, LCD interface chip link to each other with the digital signal processing chip corresponding interface respectively.
Permanent magnet linear synchronous motor is made up of mover (elementary), stator (NdFeB permanent magnet) for short primary planar type.Mover is installed in mover base plate centre position, stator is by being installed in every the magnetic aluminium sheet on the stator plate and the mover opposite position, the mover base plate is connected with the linear guides parafacies of stator plate by the motor both sides, and makes and keep certain air gap between the stator of motor and mover; On stator plate, travel switch and block are installed respectively, are increased the security of system with a side of mover base plate.After feeding three-phase symmetrical sine electric current in three phase windings of mover, with the generation air-gap field that moves along a straight line, the excitation field of this magnetic field and permanent magnet interacts and produces electromagnetic push, because permanent magnet maintains static, electric mover follows the reverse direction moving linearly of ripple Movement in Magnetic Field by the linear guides pair.
The voltage and current of electric mover winding is respectively by voltage, the online detection of current sensor, and change into digital quantity by the A/D interface that digital signal processing chip carries, obtain the straight-line feed positional information by the software computing that embeds digital signal processing chip, relatively also calculate the acquisition controlled quentity controlled variable with setting value, isolate through the three phase power driving circuit to inverter by photoelectricity by pwm signal, and realize position closed loop control by the Control current that inverter produces permanent magnet linear synchronous motor.The straight-line feed position can be by keyboard to set up, and can be by liquid crystal display numerical value.
The useful effect that the utlity model has is:
In order to realize high precision, high-speed linear feeding system, the utility model adopts soft position sensor permanent magnet linear synchronous motor as straight-line drive unit, the mechanical mechanism of feed system is greatly simplified, and avoid using grating chi or other position transducers, the movement velocity that helps feed system improves, the dynamic response characteristic of improvement system, and help the linear electric motors feed drive unit and use in the industry spot of rugged surroundings, and stroke can increase or reduce permanent magnet blocks according to design objective, unrestricted, for solving at a high speed, the precision straight-line motion mechanism provides a kind of new equipment.
Description of drawings
Fig. 1 is a structural principle synoptic diagram of the present utility model;
Fig. 2 is a permanent magnet linear synchronous motor structure A-A cut-open view;
Fig. 3 is soft position Fundamentals of Sensors figure of the present utility model.
Among Fig. 1, Fig. 2: 1-travel switch block, 2-line slideway auxiliary slide block, 3-line slideway, 4-mover base plate, 5-mover (elementary), 6-stator (NdFeB permanent magnet), 7-be every the magnetic aluminium sheet, 8-wedge shape briquetting, 9-stator plate, 10-travel switch.
Among Fig. 3: A1-permanent magnet linear synchronous motor mover winding, A2-inverter, A3-system power supply, the A4-electrical source of power, the A5-three phase power drives, the A6-photoelectric isolated chip, the B1-voltage sensor, B2, B3, the B4-current sensor, B5-digital signal processing chip, B6-power supply chip, the B7-static RAM, B8-power supply fiducial chip, B9-keyboard chip, the B10-LCD interface, B11-keyboard, B12-LCD liquid crystal.
Embodiment
As shown in Figure 1 and Figure 2, machine structural parts of the present utility model: comprise travel switch block 1, line slideway auxiliary slide block 2, line slideway 3, mover base plate 4, permanent magnet linear synchronous motor mover 5, permanent magnet linear synchronous motor stator 6, every magnetic aluminium sheet 7, stator plate 9, travel switch 10; Permanent magnet linear synchronous motor stator 6 is by centre position above magnetic aluminium sheet 7 is installed in stator plate 9, with permanent magnet linear synchronous motor stator 6 correspondence positions permanent magnet linear synchronous motor mover 5 is housed below the permanent magnet linear synchronous motor mover base plate 4, mover base plate 4 and stator plate 9 both sides are by being connected by the line slideway auxiliary of line slideway auxiliary slide block 2 with line slideway 3 combinations, make 5 of permanent magnet linear synchronous motor stator 6 and permanent magnet linear synchronous motor movers keep air gap, travel switch block 1 and travel switch 10 are installed respectively in a mover base plate 4 and a side of stator plate 11.After feeding three-phase symmetrical sine electric current in three phase windings of mover, with the generation air-gap field that moves along a straight line, the excitation field of this magnetic field and permanent magnet interacts and produces electromagnetic push, because permanent magnet maintains static, electric mover follows the reverse direction moving linearly of ripple Movement in Magnetic Field by the linear guides pair.
As shown in Figure 3, electrical and electronic parts of the present utility model: comprise permanent magnet linear synchronous motor winding A1, inverter A2, system power supply A3, electrical source of power A4, three phase power drives A5, photoelectric isolated chip A6, voltage sensor B1, three current sensor B2, B3, B4, digital signal processing chip B5, power supply chip B6, static RAM B7, power supply fiducial chip B8, keyboard chip B9, LCD liquid crystal interface B10, keyboard B11, LCD liquid crystal B12.The both positive and negative polarity of electrical source of power A4 links to each other with inverter A2 both positive and negative polarity respectively, the A of inverter A2, B, C end link to each other with three-phase A, B, the C end of permanent magnet linear synchronous motor mover winding A1 respectively, and stube cable passes separately current sensor B2, B3, B4 respectively, and the input end of voltage sensor B1 also links to each other with A, B, the C end of three phase windings of permanent magnet linear synchronous motor A1; The output terminal of voltage sensor B1 output terminal and three current sensor B2, B3, B4 links to each other with the A/D interface end of digital signal processing chip B5 respectively; The PWM mouth of digital signal processing chip B5 links to each other with the input port of photoelectric isolated chip A6, and the delivery outlet of photoelectric isolated chip A6 links to each other with the input port that three phase power drives A5, and the delivery outlet that three phase power drives A5 links to each other with the corresponding control input of inverter A2; Power supply chip B6, static RAM B7, power supply fiducial chip B8, keyboard chip B9, LCD interface chip B10 link to each other with digital signal processing chip B5 corresponding interface respectively.
More than said three phase power to drive A5 be IR2331, photoelectric isolated chip A6 is 6N137, inverter A2 is IRFR254, voltage sensor B1 is WB3V412, and current sensor B2, B3, B4 are WB11412, and digital signal processing chip B5 is TMS320F2812, power supply chip B6 is TPS767D318, static RAM B7 is IDT71V424, and power supply fiducial chip B8 is REF3033, and keyboard chip B9 is 82C79.
Working method of the present utility model is as follows: permanent magnet linear synchronous motor stator 6 is by centre position above magnetic aluminium sheet 7 is installed in stator plate 9, with permanent magnet linear synchronous motor stator 6 correspondence positions permanent magnet linear synchronous motor mover 5 is housed below the permanent magnet linear synchronous motor mover base plate 4, mover base plate 4 and stator plate 9 both sides are by being connected by the line slideway auxiliary of line slideway auxiliary slide block 2 with line slideway 3 combinations, make 5 of permanent magnet linear synchronous motor stator 6 and permanent magnet linear synchronous motor movers keep air gap, line slideway 3 usefulness wedge shape briquettings 8 compress, and in a mover base plate 4 and a side of stator plate 9 travel switch block 1 and travel switch 10 are installed respectively.The both positive and negative polarity of electrical source of power A4 links to each other with the inverter both positive and negative polarity respectively, the A of inverter A2, B, C end link to each other with three-phase A, B, the C end of permanent magnet linear synchronous motor mover winding A1 respectively, and stube cable passes current sensor B2, B3, B4 respectively, and the input end of voltage sensor B1 also links to each other with A, B, the C end of three phase windings of permanent magnet linear synchronous motor A1.The output terminal of voltage sensor B1 output terminal and current sensor B2, B3, B4 links to each other with the A/D interface end of digital signal processing chip B5.The PWM mouth of digital signal processing chip B5 links to each other with the input port of photoelectric isolated chip A6, and the delivery outlet of photoelectric isolated chip A6 links to each other with the input port that three phase power drives A5, and the delivery outlet that three phase power drives A5 links to each other with the corresponding control input of inverter A2.Power supply chip B6, static RAM B7, power supply fiducial chip B8, keyboard chip B9, LCD interface chip B10 link to each other with the digital signal processing chip corresponding interface respectively.
Power supply chip B6 provides digital signal processing chip B5 power supply, and power supply fiducial chip B8 provides the reference voltage of digital signal processing chip B5.Static RAM B7 deposits data and the program of digital signal processing chip B5.System power supply A3 provides the power supply of digital signal processing chip system, and electrical source of power A4 provides the power supply of inverter A2.Liquid crystal B12 display position numerical value can be set in the straight-line feed position by keyboard B11.
When linear motor rotor 5 is static, isolate A6 and be added on the two-phase of mover winding A1 successively by turns through photoelectricity by digital signal processing chip B5 generation pwm signal through three phase power driving A5 control inverter A2 generation one suitably big or small constant DC voltage, the voltage and current of linear motor rotor winding A1 is respectively by voltage sensor B1, current sensor B2, B3, the online detection of B4, and change into digital quantity by the A/D interface that digital signal processing chip B5 carries, can obtain the series inductance of this three phase winding by analyzing these data at last.The voltage that this moment, winding terminal applied can not be too big, should guarantee electric mover transfixion under this voltage.After measuring three corresponding under a certain rotor position series line inductance value, obtain initial position by digital signal processing chip software.
In linear motor rotor 5 motion processes, the voltage and current of linear motor rotor winding A1 is respectively by voltage sensor B1, current sensor B2, B3, the online detection of B4, and change into digital quantity by the A/D interface that digital signal processing chip B5 carries, obtain the straight-line feed positional information by the software computing that embeds digital signal processing chip B5, relatively also calculate the acquisition controlled quentity controlled variable with setting value, isolate A6 through three phase power driving circuit A5 control inverter A2 by pwm signal by photoelectricity, and produce the Control current realization position closed loop control of permanent magnet linear synchronous motor by inverter A2.
In addition, in order to improve the precision that the soft position sensor detects in real time, can adopt nano level laser interferometer to carry out the pointwise measurement of comparison, the gained error is used for the correction of digital signal processing chip software algorithm, realizes higher soft position sensor accuracy.Simultaneously,, the position limit switch is set on software not only, and on the straight-line feed device, the physics travel switch is installed, guarantee staff and property safety in order to improve the security of feed system.

Claims (2)

1, a kind of Soft Position Transducer Accurate Straight Line Feed Gear is characterized in that comprising:
1) machine structural parts: comprise travel switch block (1), line slideway auxiliary slide block (2), line slideway (3), mover base plate (4), permanent magnet linear synchronous motor mover (5), permanent magnet linear synchronous motor stator (6), every magnetic aluminium sheet (7), stator plate (9), travel switch (10); Permanent magnet linear synchronous motor stator (6) is by centre position above magnetic aluminium sheet (7) is installed in stator plate (9), with permanent magnet linear synchronous motor stator (6) correspondence position permanent magnet linear synchronous motor mover (5) is housed below the permanent magnet linear synchronous motor mover base plate (4), mover base plate (4) and stator plate (9) both sides are by being connected by the line slideway auxiliary of line slideway auxiliary slide block (2) with line slideway (3) combination, make between permanent magnet linear synchronous motor stator (6) and permanent magnet linear synchronous motor mover (5) to keep air gap, travel switch block (1) and travel switch (10) are installed respectively in a mover base plate (4) and a side of stator plate (11);
2) electrical and electronic parts: comprise permanent magnet linear synchronous motor winding (A1), inverter (A2), system power supply (A3), electrical source of power (A4), three phase power drives (A5), photoelectric isolated chip (A6), voltage sensor (B1), three current sensors (B2, B3, B4), digital signal processing chip (B5), power supply chip (B6), static RAM (B7), power supply fiducial chip (B8), keyboard chip (B9), LCD liquid crystal interface (B10), keyboard (B11), LCD liquid crystal (B12); The both positive and negative polarity of electrical source of power (A4) links to each other with inverter (A2) both positive and negative polarity respectively, A, the B of inverter (A2), C end links to each other with three-phase A, B, the C end of permanent magnet linear synchronous motor mover winding (A1) respectively, and stube cable passes current sensor (B2, B3, B4) separately respectively, and the input end of voltage sensor (B1) also links to each other with A, B, the C end of three phase windings of permanent magnet linear synchronous motor (A1); The output terminal of voltage sensor (B1) output terminal and three current sensors (B2, B3, B4) links to each other with the A/D interface end of digital signal processing chip (B5) respectively; The PWM mouth of digital signal processing chip (B5) links to each other with the input port of photoelectric isolated chip (A6), the delivery outlet of photoelectric isolated chip (A6) links to each other with the input port that three phase power drives (A5), and the delivery outlet that three phase power drives (A5) links to each other with the corresponding control input of inverter (A2); Power supply chip (B6), static RAM (B7), power supply fiducial chip (B8), keyboard chip (B9), LCD interface chip (B10) link to each other with digital signal processing chip (B5) corresponding interface respectively.
2. a kind of Soft Position Transducer Accurate Straight Line Feed Gear according to claim 1, it is characterized in that: said three phase power drives (A5) and is IR2331, photoelectric isolated chip (A6) is 6N137, inverter (A2) is IRFR254, voltage sensor (B1) is WB3V412, current sensor (B2, B3, B4) be WB11412, digital signal processing chip (B5) is TMS320F2812, power supply chip (B6) is TPS767D318, static RAM (B7) is IDT71V424, power supply fiducial chip (B8) is REF3033, and keyboard chip (B9) is 82C79.
CN 200420037470 2004-07-09 2004-07-09 Soft position sensor precision linear feed device Expired - Fee Related CN2752831Y (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN 200420037470 CN2752831Y (en) 2004-07-09 2004-07-09 Soft position sensor precision linear feed device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN 200420037470 CN2752831Y (en) 2004-07-09 2004-07-09 Soft position sensor precision linear feed device

Publications (1)

Publication Number Publication Date
CN2752831Y true CN2752831Y (en) 2006-01-18

Family

ID=35914241

Family Applications (1)

Application Number Title Priority Date Filing Date
CN 200420037470 Expired - Fee Related CN2752831Y (en) 2004-07-09 2004-07-09 Soft position sensor precision linear feed device

Country Status (1)

Country Link
CN (1) CN2752831Y (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1329784C (en) * 2004-07-09 2007-08-01 浙江大学 Soft positive sensor precision straight feeding device
CN105449976A (en) * 2014-08-28 2016-03-30 上海微电子装备有限公司 Permanent-magnet linear motor drive device and control method
CN111272055A (en) * 2020-03-16 2020-06-12 天津天安起重电器有限公司 Three-phase motor braking distance detection device and method

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1329784C (en) * 2004-07-09 2007-08-01 浙江大学 Soft positive sensor precision straight feeding device
CN105449976A (en) * 2014-08-28 2016-03-30 上海微电子装备有限公司 Permanent-magnet linear motor drive device and control method
CN105449976B (en) * 2014-08-28 2018-06-01 上海微电子装备(集团)股份有限公司 The driving device and control method of a kind of permanent-magnetism linear motor
CN111272055A (en) * 2020-03-16 2020-06-12 天津天安起重电器有限公司 Three-phase motor braking distance detection device and method

Similar Documents

Publication Publication Date Title
US8872449B2 (en) Distributed-arrangement linear motor and control method of distributed-arrangement linear motor
CN101009455B (en) Long range big-push force permanent-magnet brushless linear DC motor
CN103021473A (en) Direct drive type motion decoupling high-accuracy servo platform
CN101024270A (en) Numerical-control machine tool magnetic suspension linear feeding system
Rohrig et al. Identification and compensation of force ripple in linear permanent magnet motors
CN105202325A (en) Long-stroke single degree of freedom air-bearing magnetic-drive nano-positioning platform
KR101866508B1 (en) Stepping motor control method and device
CN102476310A (en) Novel magnetic suspension linear feeding system for numerical control machine tool
CN2752831Y (en) Soft position sensor precision linear feed device
CN101888206A (en) Permanent-magnetic synchronous linear motor driver
CN1329784C (en) Soft positive sensor precision straight feeding device
CN112548598B (en) Mode switching rigid-flexible coupling motion platform and control method
CN1243627C (en) Feeder of permanent magnetic linear synchronous motor
CN1963374A (en) Large range motion, high speed and precision orientation apparatus of two coordinate axes
CN2785878Y (en) X-Y coordinate drawing teaching apparatus based on AC servo
CN1553556A (en) Plate permanetic linear synchronous machine for machine tool feeding system
CN208316549U (en) Straight driving transmission mechanism
CN1848661A (en) Apparatus and method for realizing switch magnetic resistance motor electronic gear function
CN102110631B (en) Precision workpiece table and pipeline facility drive device thereof
CN201467069U (en) Permanent-magnet synchronous linear motor driver
Dursun et al. PC-based data acquisition system for PLC-controlled linear switched reluctance motor
CN209313687U (en) A kind of primary permanent magnet linear motor single shaft mould group
CN201156440Y (en) Self-propelled three-dimensional working table applicable to large length
CN209313688U (en) A kind of primary permanent magnet linear motor gantry platform
CN1226694C (en) Two-dimension movement imitator adopting cylindrical two-dimension coordinate system

Legal Events

Date Code Title Description
C14 Grant of patent or utility model
GR01 Patent grant
C19 Lapse of patent right due to non-payment of the annual fee
CF01 Termination of patent right due to non-payment of annual fee