CN105202325B - A kind of big stroke single-degree-of-freedom air supporting Magnetic driving nanopositioning stage - Google Patents
A kind of big stroke single-degree-of-freedom air supporting Magnetic driving nanopositioning stage Download PDFInfo
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- CN105202325B CN105202325B CN201510729158.7A CN201510729158A CN105202325B CN 105202325 B CN105202325 B CN 105202325B CN 201510729158 A CN201510729158 A CN 201510729158A CN 105202325 B CN105202325 B CN 105202325B
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Abstract
The invention discloses a kind of big stroke single-degree-of-freedom air supporting Magnetic driving nanopositioning stage, including electromagnetic actuators, air supporting guiding mechanism, position sensor module, eddy current damper module composition.Electromagnetic actuators body is made up of stator, mover two parts, and subpart installation permanent magnet array, three-phase stator winding uses iron-free cored structure.Air supporting guiding mechanism constrains the free degree in five directions of locating platform by three air-bearings of vertical direction and the horizontal direction air-bearing of two sides, it is moved in one direction.Position sensor module is realized by high-precision grating scale.Eddy current damper module includes two eddy current dampers, and it is arranged in electromagnetic actuators rear and front end.Nanopositioning stage of the present invention has the advantages that simple in construction, direct drive, gap of making the return trip empty without friction, without sluggish and nothing, reaches nano level positioning resolution in tens to hundreds of millimetres of movement strokes.
Description
Technical field
The present invention relates to elaborate servo Qu Donglingyu, more particularly to a kind of big stroke single-degree-of-freedom air supporting Magnetic driving nanometer to determine
Bit platform.
Background technology
With the development of nano-fabrication technique, high efficiency nano mechanical processing machine, nanometer laser direct-write lithography machine and
The scope measurement equipment that exposes thoroughly based on AFM proposes in big movement travel to motion locating platform while has Subnano-class
The requirement of resolution ratio, nano grade positioning precision and high bandwidth.
Patent publication No. is that 102998899A and 103883849A patent of invention uses flexible hinge and piezoelectric ceramics phase
Nanometer positioning is implemented in combination with, this direct drive type piezoelectric actuator has the positioning resolution of Subnano-class, but in water
Square to processing and measurement range there was only tens microns, even if using enlarger, stroke can only achieve hundreds of microns.Between
Direct type piezoelectric actuator (such as piezoelectric linear motor using standing-wave ultrasonic principle, looper driving principle) is although can be real
Existing big displacement and nano level positioning resolution, but the low repetitive positioning accuracy of this kind of piezoelectric actuator, make it unsuitable for
Apply in a wide range of continuous nanoprocessing and scanning survey equipment.Patent publication No. is 102629122A patent of invention, is proposed
The double servo motion platforms of grand/micro- combination being made up of linear servo-actuator and micromotion platform are not only complicated, bulky,
And in grand movement, the switching between grand, micromotion limits the bandwidth of whole platform, reduce nanoprocessing and
The efficiency of scanning survey.Therefore, those skilled in the art is directed to developing a kind of large-stroke nanometer locating platform of new configuration.
The content of the invention
In view of the drawbacks described above of prior art, the technical problems to be solved by the invention are how to make existing big stroke
The precision of nanopositioning stage improves, and structure simplifies, volume-diminished.
To achieve the above object, the invention provides a kind of big stroke single-degree-of-freedom air supporting Magnetic driving nanopositioning stage,
Including locating platform basic machine and locating platform controller, the locating platform basic machine include electromagnetic drive actuator,
Air supporting guiding mechanism and eddy current damper module, wherein, the electromagnetic drive actuator is configured as producing electromagnetic force realization
The change of platform displacement；The air supporting guiding mechanism is configured as making platform only move in one direction；The eddy-current damping
Device module is configured as producing damping force, to shorten the positioning time of locating platform.
Further, the electromagnetic drive actuator is made up of stator and mover, the stator by three-phase windings copper cash around
System forms, 120 degree of the electric phase difference per phase winding, using iron-free core structure；The mover is made up of magnetic array, the magnetic array
Arrangement be configured to ensure that strong in the side magnetic field intensity towards winding, the side magnetic field intensity backwards to winding is weak；It is described fixed
The phase and size of sub- three-phase windings electrical current are configured as changing the size of locating platform single-degree-of-freedom direction thrust.
Further, the air supporting guiding mechanism includes marble guide rail, the first air supporting module, the second air supporting module, the
Three air supporting modules, the 4th air supporting module and the 5th air supporting module；The first air supporting module is configured as limitation locating platform and hung down
Nogata to the free degree, the second air supporting module be configured as limit locating platform pitch orientation the free degree, the described 3rd
Air supporting module is configured as limiting the free degree in locating platform beat direction, and the 4th air supporting module is configured as limitation positioning
The free degree in plateau levels direction, the 5th air supporting module are configured as limiting the free degree of locating platform yaw direction.
Further, the eddy-current damping module is made up of copper coin and winding, and the copper coin is fixed on locating platform
On stator, moved with locating platform；Winding is wound on silicon steel sheet, and two windings form the magnetic field of closure；At the same speed,
The size of electric current is configured as controlling the power in magnetic field in controling winding, so as to control the size of damping force.
Further, the locating platform controller is controlled using linear drive circuit, including master controller, A/D
Change-over circuit, D/A change-over circuits, Linear Amplifer module, current sensor and position sensor；The master controller is configured as
Running control algolithm and locating platform driving algorithm；The A/D change-over circuits are configured as to current sensor output
Current signal is sampled, and completes locating platform current loop control；The D/A change-over circuits are configured as the master controller
The digital current signal of output is converted to analog current signal；The Linear Amplifer module is configured as believing the analog current
Number it is amplified, drives stator winding；The current sensor is configured as gathering stator current signal；The position sensor
It is configured as gathering the position of locating platform mover.
Further, the framework of the stator uses aluminum alloy materials.
Further, the magnetic array is adhered on the framework of the stator.
Further, the magnetic array that four magnet blocks are formed is configured to form an electric cycle.
Further, the first air supporting module, the second air supporting module and the 3rd air supporting module are triangular in shape
Arrangement.
Further, the first air supporting module, the second air supporting module, the 3rd air supporting module, the described 4th
Air supporting module and the 5th air supporting module use the air-bearing of porous type vacuum preloading.
Single-degree-of-freedom air supporting Magnetic driving nanopositioning stage described in patent of the present invention include locating platform basic machine and
Locating platform controller.Locating platform body described in patent of the present invention includes electromagnetic drive actuator, air supporting guiding mechanism, position
Put sensor and eddy current damper module.Electromagnetic drive actuator produces the change that electromagnetic force realizes platform displacement；Air supporting is led
It is used for limiting the free degree in other directions of platform to mechanism, platform is only moved in one direction；Position sensor is that positioning is flat
The position feed back signal of platform；Eddy current damper module produces damping force, to shorten the positioning time of locating platform.
Electromagnetic drive actuator described in patent of the present invention is made up of stator and mover, and stator is by three-phase windings copper wire winding
Form, 120 degree of the electric phase difference per phase winding, using iron-free core structure；Mover is made up of magnetic array, and the arrangement of magnetic array ensures
Strong in the side magnetic field intensity towards winding, the side magnetic field intensity backwards to winding is weak.Change three-phase stator winding electrical current
Phase and size, thus it is possible to vary the thrust in locating platform single-degree-of-freedom direction.
Locating platform controller described in patent of the present invention is controlled using linear drive circuit, overcomes data signal to drive
The dynamic noise brought, including master controller, A/D change-over circuits, D/A change-over circuits, Linear Amplifer module, current sensor and position
Put the modules such as sensor collection.Master controller completes control algolithm, locating platform driving algorithm；A/D change-over circuits pass to electric current
The current signal of sensor output is sampled, and completes locating platform current loop control；The number that D/A change-over circuits export controller
Word current signal is converted to analog current signal；Linear Amplifer module is amplified to current signal, drives stator winding；Electric current
Sensor gathers stator current signal；Position sensor gathers the position of locating platform mover.
Eddy-current damping module described in patent of the present invention is made up of copper coin and winding.Copper coin is fixed on determining for locating platform
Son, moved with locating platform；Winding is wound on silicon steel sheet, and two windings form the magnetic field of closure.At the same speed, control
The size of electric current can control the power in magnetic field in winding, so as to control the size of damping force.
Patent of the present invention proposes a kind of big stroke single-degree-of-freedom air supporting Magnetic driving nanopositioning stage, meets nanoprocessing
The requirement to the big stroke motion of locating platform and nano grade positioning precision is equipped with scanning survey.The single-degree-of-freedom air supporting proposed
Magnetic driving nanopositioning stage has the advantages that simple in construction, direct drive, gap of making the return trip empty without friction, without sluggish and nothing, several
Reach nano level positioning resolution in ten to hundreds of millimetres of movement strokes.
Design, concrete structure and the caused technique effect of the present invention are described further below with reference to accompanying drawing, with
It is fully understood from the purpose of the present invention, feature and effect.
Brief description of the drawings
Fig. 1 is the nanopositioning stage general illustration of the preferred embodiment of the present invention；
Fig. 2 is the nanopositioning stage basic machine schematic diagram of the preferred embodiment of the present invention；
Fig. 3 is the electromagnetic actuators schematic diagram of the preferred embodiment of the present invention；
Fig. 4 is the air-float guide rail structural representation of the preferred embodiment of the present invention；
Fig. 5 is the eddy-current damping module diagram of the preferred embodiment of the present invention；
Fig. 6 is the nanopositioning stage controller architecture schematic diagram of the preferred embodiment of the present invention.
Embodiment
With reference to specific implementation case, the present invention is described in detail.
As shown in figure 1, patent of the present invention proposes a kind of big stroke single-degree-of-freedom air supporting Magnetic driving nanopositioning stage, including
Locating platform basic machine 100, locating platform controller 200.Electricity in the collection machinery body 100 of locating platform controller 200
Signal and position signalling are flowed, and control machinery body 100 realizes the motion of large-stroke nanometer class precision on single-degree-of-freedom direction.
As shown in Fig. 2 basic machine 100 includes electromagnetic actuators 110, air supporting guiding mechanism 120, position feedback grating
Chi 130 and eddy-current damping module 140.Electromagnetic actuators 110 include stator and mover, stator three-phase A windings 112, B windings
113 and C windings 114 are wound on rotor frame 111 according to phase difference 120, as shown in Figure 3.In order to be use up in stator and mover gap
There may be preferable sine wave magnetic flux density, reduces influence of the teeth groove to the counter electromotive force of electromagnetic actuators 110, rotor frame
111 use aluminum alloy materials.Permanent magnet array 116 is fixed on mover framework 115 by adhesive glue.Permanent magnet array 116
Permanent magnet puts in order as shown in figure 3, arrow represents magnetic direction in figure, and four permanent magnet blocks form an electric cycle.Permanent magnetism
Volume array 116 has strong magnetic field in stator and mover gap, weak in the top magnetic field intensity of permanent magnet array.
Fig. 4 illustrates air-float guide rail schematic diagram, and marble guide rail 121 and 125 is the contact surface of air supporting module in figure.Wherein
124 arrangement triangular in shape of air supporting module 122, air supporting module 123 and air supporting module, limitation locating platform vertical direction, pitching side
To the free degree with beat direction；Air supporting module 126 and air supporting module 127 limit one horizontal direction of locating platform and driftage side
To the free degree.Locating platform is set to be moved along a straight line in one direction by five air supporting modules and guide rail.Air-bearing is adopted
With the air supporting module of porous type vacuum preloading.
The structure of eddy current damper module as shown in figure 5, the module copper coin 141, lower winding 142, upper winding 143 and around
Framing 144 forms.The winding of lower winding 142 and upper winding 143 is connected in series, make magnetic direction from upper winding 143 under around
Organize 142 or from lower winding 142 to upper winding 143, pass perpendicularly through copper coin 141.The mover of copper coin 141 and locating platform fixes one
Rise, locating platform mover drives copper coin 141 to move in movement, and the eddy current signal formed in such copper coin produces certain damping
Power.Size of current in control lower winding 143 and upper winding 142 can control the size of damping force.
The control system architecture figure of nanopositioning stage is as shown in fig. 6, including master controller 210, A/D conversions 220, electric current
Sensor 230, Linear Amplifer module 240, D/A conversions 250 and grating scale 260.Output signal 1Vpp high-precision grating scale warp
Cross subdivision and reach nano level resolution ratio, for the displacement of sensor nano locating platform mover.Master controller 210 is using industry
Control computer, complete the control of nanopositioning stage electric current loop, speed ring and position ring.The conversion nano of current sensor 230
The current signal of locating platform stator winding is voltage signal.A/D modular converters 220 use 18 and high-resolution turn of the above
Parallel operation part improves the control accuracy of electric current.The digital current signal that D/A modular converters 250 calculate master controller 210 is changed
For analog current signal, using 18 and the high-resolution switching device of the above.Linear Amplifer module 240 enters analog current signal
Nanopositioning stage stator winding is driven after row power amplification, is amplified using Linear Amplifer module PA12 devices.
Preferred embodiment of the invention described in detail above.It should be appreciated that the ordinary skill of this area is without wound
The property made work can makes many modifications and variations according to the design of the present invention.Therefore, all technician in the art
Pass through the available technology of logical analysis, reasoning, or a limited experiment on the basis of existing technology under this invention's idea
Scheme, all should be in the protection domain being defined in the patent claims.
Claims (6)
1. a kind of big stroke single-degree-of-freedom air supporting Magnetic driving nanopositioning stage, including locating platform basic machine and locating platform
Controller, it is characterised in that the locating platform basic machine includes electromagnetic drive actuator, air supporting guiding mechanism and current vortex
Damper module；
Wherein, the electromagnetic drive actuator is configured as producing the change that electromagnetic force realizes platform displacement；The air supporting is oriented to
Mechanism is configured as making platform only move in one direction；The eddy current damper module is configured as producing damping force, with
Shorten the positioning time of locating platform；The eddy-current damping module is made up of copper coin and winding, and the copper coin is fixed on positioning
On the mover of platform, moved with locating platform；Winding is wound on silicon steel sheet, and two windings form the magnetic field of closure；In identical
Under speed, the size of electric current is configured as controlling the power in magnetic field in controling winding, so as to control the size of damping force；
Wherein, the air supporting guiding mechanism includes marble guide rail, the first air supporting module, the second air supporting module, the 3rd air supporting mould
Block, the 4th air supporting module and the 5th air supporting module；The first air supporting module, the second air supporting module, the 3rd air supporting
Module, the 4th air supporting module and the 5th air supporting module use the air-bearing of porous type vacuum preloading；Described first
Air supporting module, the second air supporting module and the 3rd air supporting module arrangement triangular in shape；The first air supporting module by with
The free degree of limitation locating platform vertical direction is set to, the second air supporting module is configured as limiting locating platform pitch orientation
The free degree, the 3rd air supporting module is configured as limiting the free degree in locating platform beat direction, the 4th air supporting mould
Block is configured as limiting the free degree of locating platform horizontal direction, and it is inclined that the 5th air supporting module is configured as limitation locating platform
The free degree in boat direction.
A kind of 2. big stroke single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 1, it is characterised in that
The electromagnetic drive actuator is made up of stator and mover, and the stator is formed by three-phase windings copper wire winding, per phase winding
Electric 120 degree of phase difference, using iron-free cored structure；The mover is made up of magnetic array, and the arrangement of the magnetic array is configured as really
Guarantor is strong in the side magnetic field intensity towards winding, and the side magnetic field intensity backwards to winding is weak；The three-phase stator winding is powered electric
The phase and size of stream are configured as changing the size of locating platform single-degree-of-freedom direction thrust.
A kind of 3. big stroke single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 1, it is characterised in that
The locating platform controller is controlled using linear drive circuit, including master controller, A/D change-over circuits, D/A conversion electricity
Road, Linear Amplifer module, current sensor and position sensor；The master controller is configured as running control algolithm and positioning
Platform drives algorithm；The A/D change-over circuits are configured as sampling the current signal of current sensor output, complete
Into locating platform current loop control；The D/A change-over circuits are configured as the digital current signal for exporting the master controller
Be converted to analog current signal；The Linear Amplifer module is configured as being amplified the analog current signal, and driving is fixed
Sub- winding；The current sensor is configured as gathering stator current signal；The position sensor is configured as collection positioning
The position of platform mover.
A kind of 4. big stroke single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 2, it is characterised in that
The framework of the stator uses aluminum alloy materials.
5. a kind of big stroke single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 2, its feature exist
In the magnetic array is adhered on the framework of the stator.
A kind of 6. big stroke single-degree-of-freedom air supporting Magnetic driving nanopositioning stage according to claim 2, it is characterised in that
The magnetic array that four magnet blocks are formed is configured to form an electric cycle.
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| CN106430088B (en) * | 2016-08-30 | 2018-08-17 | 上海交通大学 | A kind of six-freedom-degree magnetic suspension magnetic drive nanopositioning stage |
| CN107612232B (en) * | 2017-09-27 | 2019-05-17 | 西安工程大学 | A kind of the miniature planar motor apparatus and its driving method of electromagnetic digital array of actuators |
| CN112548598B (en) * | 2020-12-03 | 2022-03-04 | 佛山市华道超精科技有限公司 | Mode switching rigid-flexible coupling motion platform and control method |
| CN112631084A (en) * | 2020-12-30 | 2021-04-09 | 安徽地势坤光电科技有限公司 | Automatic laser direct writing device |
| CN113029235B (en) * | 2021-02-25 | 2021-09-10 | 哈尔滨工业大学 | Small-stroke nanoscale motion platform and heat-related hysteresis data measuring method |
| CN114362471B (en) * | 2021-12-10 | 2023-07-14 | 浙江大学杭州国际科创中心 | Double-stage multi-degree-of-freedom space position precise stabilizing system |
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| EP0767320B1 (en) * | 1995-10-04 | 2004-01-21 | Ebara Corporation | Vibration damping apparatus |
| US7267196B2 (en) * | 2004-02-12 | 2007-09-11 | The Boeing Company | Method and apparatus for reducing acoustic noise |
| CN1252542C (en) * | 2004-06-25 | 2006-04-19 | 清华大学 | Ultra-precise silicon wafer positioning system with balance weight damping apparatus |
| CN100573341C (en) * | 2008-09-17 | 2009-12-23 | 华中科技大学 | A kind of precision damping component reaches by its vibration reduction platform that constitutes |
| CN101900952B (en) * | 2010-08-02 | 2012-05-23 | 中南大学 | Mask aligner mask platform adopting magnetic suspension technology |
| CN103047358B (en) * | 2012-12-19 | 2014-12-24 | 哈尔滨工业大学 | Eddy-current damping vibration isolator with coplanar air floatation orthogonal decoupling function and angular decoupling function by aid of sliding joint bearing |
| CN103062308B (en) * | 2012-12-19 | 2015-07-29 | 哈尔滨工业大学 | The eddy-current damping vibration isolator of double-layer air flotation crossing decoupling and the decoupling zero of rolling joint shaft bearing angle |
| CN103062313B (en) * | 2012-12-19 | 2015-03-25 | 哈尔滨工业大学 | Eddy current damping zero-stiffness vibration isolator for air floatation ball bearing angle decoupling |
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