CN1306559C - 包括具有不同结晶度的半导体薄膜的半导体器件及其基片和制作方法、以及液晶显示器及其制造方法 - Google Patents
包括具有不同结晶度的半导体薄膜的半导体器件及其基片和制作方法、以及液晶显示器及其制造方法 Download PDFInfo
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- CN1306559C CN1306559C CNB038006596A CN03800659A CN1306559C CN 1306559 C CN1306559 C CN 1306559C CN B038006596 A CNB038006596 A CN B038006596A CN 03800659 A CN03800659 A CN 03800659A CN 1306559 C CN1306559 C CN 1306559C
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- 239000004065 semiconductor Substances 0.000 title claims abstract description 102
- 239000000758 substrate Substances 0.000 title claims abstract description 81
- 239000010409 thin film Substances 0.000 title claims abstract description 67
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 24
- 239000004973 liquid crystal related substance Substances 0.000 title description 5
- 238000000137 annealing Methods 0.000 claims abstract description 23
- 239000010408 film Substances 0.000 claims description 60
- 238000000034 method Methods 0.000 claims description 36
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Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02686—Pulsed laser beam
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02518—Deposited layers
- H01L21/02521—Materials
- H01L21/02524—Group 14 semiconducting materials
- H01L21/02532—Silicon, silicon germanium, germanium
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02365—Forming inorganic semiconducting materials on a substrate
- H01L21/02656—Special treatments
- H01L21/02664—Aftertreatments
- H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
- H01L21/02675—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using laser beams
- H01L21/02678—Beam shaping, e.g. using a mask
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66409—Unipolar field-effect transistors
- H01L29/66477—Unipolar field-effect transistors with an insulated gate, i.e. MISFET
- H01L29/66742—Thin film unipolar transistors
- H01L29/6675—Amorphous silicon or polysilicon transistors
- H01L29/66757—Lateral single gate single channel transistors with non-inverted structure, i.e. the channel layer is formed before the gate
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/68—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by only the electric current supplied, or only the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched
- H01L29/76—Unipolar devices, e.g. field effect transistors
- H01L29/772—Field effect transistors
- H01L29/78—Field effect transistors with field effect produced by an insulated gate
- H01L29/786—Thin film transistors, i.e. transistors with a channel being at least partly a thin film
- H01L29/78651—Silicon transistors
- H01L29/7866—Non-monocrystalline silicon transistors
- H01L29/78672—Polycrystalline or microcrystalline silicon transistor
- H01L29/78675—Polycrystalline or microcrystalline silicon transistor with normal-type structure, e.g. with top gate
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- General Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Manufacturing & Machinery (AREA)
- Crystallography & Structural Chemistry (AREA)
- Chemical & Material Sciences (AREA)
- Optics & Photonics (AREA)
- Ceramic Engineering (AREA)
- Recrystallisation Techniques (AREA)
- Thin Film Transistor (AREA)
Abstract
Description
Claims (9)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP112215/2002 | 2002-04-15 | ||
JP2002112215 | 2002-04-15 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2006101280857A Division CN1963998A (zh) | 2002-04-15 | 2003-04-14 | 半导体器件、基片、液晶显示器及其制造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1533591A CN1533591A (zh) | 2004-09-29 |
CN1306559C true CN1306559C (zh) | 2007-03-21 |
Family
ID=29243309
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2006101280857A Pending CN1963998A (zh) | 2002-04-15 | 2003-04-14 | 半导体器件、基片、液晶显示器及其制造方法 |
CNB038006596A Expired - Fee Related CN1306559C (zh) | 2002-04-15 | 2003-04-14 | 包括具有不同结晶度的半导体薄膜的半导体器件及其基片和制作方法、以及液晶显示器及其制造方法 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNA2006101280857A Pending CN1963998A (zh) | 2002-04-15 | 2003-04-14 | 半导体器件、基片、液晶显示器及其制造方法 |
Country Status (6)
Country | Link |
---|---|
US (2) | US7087505B2 (zh) |
JP (1) | JP4616557B2 (zh) |
KR (1) | KR20040097113A (zh) |
CN (2) | CN1963998A (zh) |
TW (1) | TWI276179B (zh) |
WO (1) | WO2003088331A1 (zh) |
Families Citing this family (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI276179B (en) | 2002-04-15 | 2007-03-11 | Adv Lcd Tech Dev Ct Co Ltd | Semiconductor device having semiconductor films of different crystallinity, substrate unit, and liquid crystal display, and their manufacturing method |
JP4347546B2 (ja) * | 2002-06-28 | 2009-10-21 | 株式会社 液晶先端技術開発センター | 結晶化装置、結晶化方法および光学系 |
JP4347545B2 (ja) * | 2002-06-28 | 2009-10-21 | 株式会社 液晶先端技術開発センター | 結晶化装置および結晶化方法 |
TWI301295B (en) * | 2002-07-24 | 2008-09-21 | Adv Lcd Tech Dev Ct Co Ltd | Crystallization apparatus, crystallization method, thim film transistor and display apparatus |
US7002727B2 (en) * | 2003-03-31 | 2006-02-21 | Reflectivity, Inc. | Optical materials in packaging micromirror devices |
US7968461B2 (en) * | 2003-10-28 | 2011-06-28 | Semiconductor Energy Laboratory Co., Ltd. | Method for forming wiring, method for manufacturing thin film transistor and droplet discharging method |
US7309900B2 (en) * | 2004-03-23 | 2007-12-18 | Advanced Lcd Technologies Development Center Co., Ltd. | Thin-film transistor formed on insulating substrate |
CN100485868C (zh) * | 2004-03-31 | 2009-05-06 | 日本电气株式会社 | 半导体薄膜制造方法及装置、光束成形掩模及薄膜晶体管 |
JP4834853B2 (ja) | 2004-06-10 | 2011-12-14 | シャープ株式会社 | 薄膜トランジスタ回路、薄膜トランジスタ回路の設計方法、薄膜トランジスタ回路の設計プログラム、設計プログラム記録媒体、及び表示装置 |
US7055756B2 (en) * | 2004-10-25 | 2006-06-06 | Lexmark International, Inc. | Deposition fabrication using inkjet technology |
JP5034360B2 (ja) * | 2006-08-08 | 2012-09-26 | ソニー株式会社 | 表示装置の製造方法 |
KR20080109409A (ko) * | 2007-06-13 | 2008-12-17 | 삼성전자주식회사 | 투사형 디스플레이장치 및 그에 적용된 디스플레이방법 |
KR20120107772A (ko) * | 2011-03-22 | 2012-10-04 | 삼성디스플레이 주식회사 | 감광성 패턴의 형성 방법, 이를 이용한 표시 기판의 제조 방법 및 표시 기판 |
Citations (8)
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JPS614432A (ja) * | 1984-06-11 | 1986-01-10 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 正面取付け型電動機の取付け装置 |
JPH0346374A (ja) * | 1989-07-14 | 1991-02-27 | Sanyo Electric Co Ltd | 薄膜トランジスタ |
JPH06102530A (ja) * | 1992-09-18 | 1994-04-15 | Sharp Corp | 液晶表示装置 |
EP0650197A2 (en) * | 1993-10-20 | 1995-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Thin film semiconductor integrated circuit and method of fabricating the same |
CN1106932A (zh) * | 1993-08-27 | 1995-08-16 | 夏普公司 | 液晶显示装置及其制造方法 |
JPH09191114A (ja) * | 1997-01-21 | 1997-07-22 | Casio Comput Co Ltd | 薄膜トランジスタおよびその製造方法 |
US5712652A (en) * | 1995-02-16 | 1998-01-27 | Kabushiki Kaisha Toshiba | Liquid crystal display device |
CN2323466Y (zh) * | 1998-05-15 | 1999-06-09 | 中国科学院物理研究所 | 简易激光光束扫描器 |
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JP2507464B2 (ja) * | 1987-08-13 | 1996-06-12 | 株式会社日立製作所 | 半導体装置の製造方法 |
US5553002A (en) * | 1990-04-06 | 1996-09-03 | Lsi Logic Corporation | Method and system for creating and validating low level description of electronic design from higher level, behavior-oriented description, using milestone matrix incorporated into user-interface |
US5555201A (en) * | 1990-04-06 | 1996-09-10 | Lsi Logic Corporation | Method and system for creating and validating low level description of electronic design from higher level, behavior-oriented description, including interactive system for hierarchical display of control and dataflow information |
US5598344A (en) * | 1990-04-06 | 1997-01-28 | Lsi Logic Corporation | Method and system for creating, validating, and scaling structural description of electronic device |
US5870308A (en) * | 1990-04-06 | 1999-02-09 | Lsi Logic Corporation | Method and system for creating and validating low-level description of electronic design |
KR920010885A (ko) * | 1990-11-30 | 1992-06-27 | 카나이 쯔또무 | 박막반도체와 그 제조방법 및 제조장치 및 화상처리장치 |
JP3031789B2 (ja) * | 1992-09-18 | 2000-04-10 | 株式会社半導体エネルギー研究所 | 薄膜状半導体装置およびその作製方法 |
US5452239A (en) * | 1993-01-29 | 1995-09-19 | Quickturn Design Systems, Inc. | Method of removing gated clocks from the clock nets of a netlist for timing sensitive implementation of the netlist in a hardware emulation system |
US5875196A (en) * | 1997-01-03 | 1999-02-23 | Nec Usa, Inc. | Deriving signal constraints to accelerate sequential test generation |
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US6163876A (en) * | 1998-11-06 | 2000-12-19 | Nec Usa, Inc. | Method for verification of RTL generated from scheduled behavior in a high-level synthesis flow |
JP4731655B2 (ja) * | 1999-02-12 | 2011-07-27 | 株式会社半導体エネルギー研究所 | 半導体装置の作製方法 |
JP2000321600A (ja) * | 1999-05-13 | 2000-11-24 | Internatl Business Mach Corp <Ibm> | 液晶表示装置及びこれの製造方法 |
JP4698010B2 (ja) * | 2000-10-20 | 2011-06-08 | 三洋電機株式会社 | エレクトロルミネッセンス表示装置及びその製造方法 |
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TWI276179B (en) | 2002-04-15 | 2007-03-11 | Adv Lcd Tech Dev Ct Co Ltd | Semiconductor device having semiconductor films of different crystallinity, substrate unit, and liquid crystal display, and their manufacturing method |
US7164152B2 (en) * | 2003-09-16 | 2007-01-16 | The Trustees Of Columbia University In The City Of New York | Laser-irradiated thin films having variable thickness |
-
2003
- 2003-04-11 TW TW092108483A patent/TWI276179B/zh not_active IP Right Cessation
- 2003-04-14 CN CNA2006101280857A patent/CN1963998A/zh active Pending
- 2003-04-14 JP JP2003585165A patent/JP4616557B2/ja not_active Expired - Fee Related
- 2003-04-14 WO PCT/JP2003/004717 patent/WO2003088331A1/ja active Application Filing
- 2003-04-14 KR KR10-2004-7000572A patent/KR20040097113A/ko not_active Application Discontinuation
- 2003-04-14 CN CNB038006596A patent/CN1306559C/zh not_active Expired - Fee Related
-
2004
- 2004-01-13 US US10/755,303 patent/US7087505B2/en not_active Expired - Lifetime
-
2006
- 2006-04-14 US US11/403,938 patent/US7352002B2/en not_active Expired - Fee Related
Patent Citations (8)
Publication number | Priority date | Publication date | Assignee | Title |
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JPS614432A (ja) * | 1984-06-11 | 1986-01-10 | インタ−ナショナル ビジネス マシ−ンズ コ−ポレ−ション | 正面取付け型電動機の取付け装置 |
JPH0346374A (ja) * | 1989-07-14 | 1991-02-27 | Sanyo Electric Co Ltd | 薄膜トランジスタ |
JPH06102530A (ja) * | 1992-09-18 | 1994-04-15 | Sharp Corp | 液晶表示装置 |
CN1106932A (zh) * | 1993-08-27 | 1995-08-16 | 夏普公司 | 液晶显示装置及其制造方法 |
EP0650197A2 (en) * | 1993-10-20 | 1995-04-26 | Semiconductor Energy Laboratory Co., Ltd. | Thin film semiconductor integrated circuit and method of fabricating the same |
US5712652A (en) * | 1995-02-16 | 1998-01-27 | Kabushiki Kaisha Toshiba | Liquid crystal display device |
JPH09191114A (ja) * | 1997-01-21 | 1997-07-22 | Casio Comput Co Ltd | 薄膜トランジスタおよびその製造方法 |
CN2323466Y (zh) * | 1998-05-15 | 1999-06-09 | 中国科学院物理研究所 | 简易激光光束扫描器 |
Also Published As
Publication number | Publication date |
---|---|
US20060197093A1 (en) | 2006-09-07 |
JP4616557B2 (ja) | 2011-01-19 |
TWI276179B (en) | 2007-03-11 |
CN1963998A (zh) | 2007-05-16 |
TW200308026A (en) | 2003-12-16 |
WO2003088331A1 (fr) | 2003-10-23 |
CN1533591A (zh) | 2004-09-29 |
KR20040097113A (ko) | 2004-11-17 |
US20040142544A1 (en) | 2004-07-22 |
US7087505B2 (en) | 2006-08-08 |
US7352002B2 (en) | 2008-04-01 |
JPWO2003088331A1 (ja) | 2005-08-25 |
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