CN1291785A - Manufacturing method of semiconductor device - Google Patents

Manufacturing method of semiconductor device Download PDF

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CN1291785A
CN1291785A CN00100943A CN00100943A CN1291785A CN 1291785 A CN1291785 A CN 1291785A CN 00100943 A CN00100943 A CN 00100943A CN 00100943 A CN00100943 A CN 00100943A CN 1291785 A CN1291785 A CN 1291785A
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semiconductor film
catalyst material
crystallization
nickel
film
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CN1150595C (en
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张宏勇
鱼地秀贵
高山彻
山崎舜平
竹村保彦
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Semiconductor Energy Laboratory Co Ltd
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Semiconductor Energy Laboratory Co Ltd
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium
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    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02664—Aftertreatments
    • H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
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    • H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
    • H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
    • H01L27/12—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body
    • H01L27/1214—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being other than a semiconductor body, e.g. an insulating body comprising a plurality of TFTs formed on a non-semiconducting substrate, e.g. driving circuits for AMLCDs
    • H01L27/1259—Multistep manufacturing methods
    • H01L27/127—Multistep manufacturing methods with a particular formation, treatment or patterning of the active layer specially adapted to the circuit arrangement
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    • H01L29/66409—Unipolar field-effect transistors
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    • H01L29/6675—Amorphous silicon or polysilicon transistors
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Abstract

The present invention relates to a method for fabricating a semiconductor device comprising the steps of carrying out the selectivity partial contact between a catalyzing substance and a semiconductor film containing amorphous silicon, wherein the catalysis is able to promote the crystallization of the semiconductor film; annealing the semiconductor film with catalyzing substance so that the semiconductor film is crystallized; and corrupting the catalyzing substance from the top surface of the semiconductor film, wherein the semiconductor film is basically not effected by the corrosion step.

Description

The manufacture method of semiconductor device
The application divides an application.The original bill applying date is to be on February 15th, 1994, and application number is 94103243.40.Denomination of invention is " semiconductor and a manufacture method thereof ".
The present invention relates to thin-film device, such as film-insulated gate field-effect transistor (hereinafter to be referred as be " thin-film transistor " or " TFT ") etc. semiconductor device, and manufacture method.
Being used for such as the film of the crystal silicon semiconductor of thin-film devices such as TFT is with manufactured down known to before this: used its temperature of kind equipment of electric furnace to keep being not less than 600 ℃, through 12 hours or longer, make by plasma CVD (chemical vapor deposition) or hot CVD and form the amorphous silicon membrane crystallization.Film with the crystalline solid Si semiconductor of enough high-quality (for example: excellent field-effect mobility and high reliability) only makes noncrystal membrane stand could obtain after the heat treatment of longer time.
Yet these wait to solve for the method for the prior art that obtains the crystal silicon semiconductor film has many problems.One of problem is a poor efficiency, and production cost is increased.For example, the step of crystallization needs 24 hours, and the processing time of establishing a substrate was preferably in 2 minutes, 720 substrates of so once essential processing.Yet once manageable maximum substrate number is limited to 50 in common tube furnace; Then substrate will be with finishing processing in 30 minutes as can be known only to use an equipment (reaction tube) when actual treatment.In other words, if want every substrate in 2 minutes, to finish reaction, then at least 15 reaction tubes must be arranged.This shows that this method has improved investment cost, has therefore increased production cost, because the investment depreciation cost is too big.
Heat treatment temperature is another problem that will consider.In general, quartz glass substrate or the alkali-free borate glass substrate that comprises pure silica used in the manufacturing of a TFT, as the #7059 glass substrate made by Corning Incorporated company (hereinafter to be referred as be " Corning#7059 substrate ").Preceding a kind of substrate has the heat resistance such as excellence, can handle with the habitual wafer technique the same manner that is used in semiconductor integrated circuit.Yet it is very expensive, and its price forms increase exponentially with the chip area increase.So the application of quartz glass substrate now is limited to the quite little TFT integrated circuit of area.
On the other hand, no alkali borosilicate glass substrate is inexpensive compared with those substrates by the quartz glass manufacturing, and still, they are having shortcoming aspect its heat resistance.Because the alkali-free glass substrate is out of shape under the temperature of from 550 to 650 ℃ of scopes, particularly, because the material bought easily reaches 600 ℃ even lower temperature and just is out of shape low, anyly will on substrate, cause irreversible contraction and curl in the heat treatment below 600 ℃.These distortion appear at its catercorner length especially significantly and surpass on 10 cun the substrate.Therefore, believe the heat treatment that under temperature is 550 ℃ or lower situation, to finish the Si semiconductor film, and the time is in 4 hours, to reduce total production cost.
In view of situation recited above, an object of the present invention is to provide a kind of semiconductor, wherein Shang Mian problem overcomes, and the method for making it is provided.Another object of the present invention provides a kind of method of using this kind semiconductor to make semiconductor device.
The invention provides a kind of method, it is characterized in that it comprises: on the amorphous silicon film or one have on it irregular crystalline state can be considered to amorphous (for example, a kind of state that comprises that crystalline portion and amorphous fraction mix) form on the film skim, particle, bunch, line, and analog, they contain in nickel, iron, cobalt, platinum and the palladium at least a; The structure of this formation is lower than the crystallization temperature of common amorphous silicon in temperature, preferably low 20 to 150 ℃, perhaps under temperature is not higher than usually vitrification point as the glass material of substrate, for example, anneals at 580 ℃ or following.
Each schematic diagram of the structure in the step successively that Fig. 1 (A) illustrates obtaining by one embodiment of the present of invention (example 1) method of seeing from above to 1 (C).
Each section structure (step of selected crystallization) schematic diagram in the step successively that Fig. 2 (A-1), 2 (A-2), 2 (B), 2 (C) and 2 (D) illustrate that the other method by another embodiment of the present invention obtains;
Fig. 3 has represented the crystalline rate of silicon and the relation between the crystallization temperature;
Fig. 4 represents the result by the Raman scattering wave spectrum of the crystal silicon film of an example acquisition;
Fig. 5 represents the X-ray diffraction figure by the crystal silicon film of an example acquisition;
Fig. 6 (A-1), 6 (A-2), 6 (B), 6 (C) and 6 (D) illustrate by another embodiment of the present invention and make each the section structural representation in the step successively that obtains in the semiconductor approach;
Fig. 7 (A) illustrates by another embodiment of the present invention to 7 (D) and makes each structural representation of section in the step successively that obtains in the semiconductor approach; And
Fig. 8 represents the CONCENTRATION DISTRIBUTION of nickel in the crystal silicon film.
Usually the method that is used for the silicon fiml crystallization of suggestion comprises from the solid phase epitaxial of seed crystal living Long, using crystalline solid island film is nuclear, as at JP-A-1-214110 (term " JP-A " Be used for herein the expression " unexamined disclosed Japanese patent application ") in disclosed. So And finding does not have in fact the crystal growth to take place under 600 ℃ or lower temperature. Silica-based General its crystallization is performed such in the situation of material: be in amorphous strand one Dawn is cut off, and the again combination between the molecule that does not cut off in the state of setting up thereafter, These molecules are combined into the part of crystal by molecules. Will be once the strand that cuts off It is sizable maintaining necessary energy, therefore, keeps the molecule of cut-out separated from each other This step be potential barrier in the reaction of crystallization. This energy equivalence is in about 1000 ℃ of temperature Lower heating time a few minutes of degree, perhaps under about 600 ℃ of temperature, heated tens hours. Owing to add Hot time exponentially doubly depends on heating-up temperature, finds in fact not to be higher than 600 in temperature ℃, for example realize in the time of 500 ℃ that particularly crystallization is impracticable. Solid phase epitaxial crystallization The prior art concept this solution of problem way can not be provided.
The inventor etc. bypass the solid-phase crystallization theory of usually having set up and have investigated and use catalytic reaction Reduce the method for the barrier energy of preceding method. The inventor etc. notice nickel (Ni), iron (Fe), cobalt (Co), platinum (Pt) and palladium (Pd) have affinity well with silicon, so they can be easy Ground forms silicide. To the situation of nickel, form easily nickle silicide (NiSix with silicon; Wherein 0.4 ≤ X≤2.5). And the lattice paprmeter that the inventor etc. notice nickle silicide is close to silicon Lattice paprmeter. Therefore, the free energy of ternary crystalline solid silicon-nickel silicide non-crystalline silicon system Be used to prove the non-crystalline silicon react in mutually border with nickle silicide easily and according to the following formula Chemical reaction forms nickle silicide and silicon metal: Non-crystalline silicon (silicon A)+nickle silicide (silicon B)---→
Nickle silicide (silicon A)+silicon metal (silicon B) wherein, silicon A and silicon B represent the position of silicon atom.The potential barrier of this reaction is sufficiently low, and reaction occurs under the low temperature.
The response prompting that top reaction equation is represented nickle atom amorphous silicon is become silicon metal.In fact, be reflected at temperature and be not higher than under 580 ℃ and begin, even can see that reaction betides low temperature to 450 ℃.More typically, crystallization can be implemented under the temperature that is lower than 20 to 150 ℃ of common recrystallized amorphous silicon temperature, certainly, accelerates with crystallization temperature rising crystallization.This can be clear that (will use in this figure example below) on Fig. 3.Similarly the result is using platinum (Pt), and iron (Fe) also can obtain in the situation of cobalt (Co) or palladium (Pd).
By method of the present invention, the growth that it is characterized in that crystal is isotropically to carry out in circular scope.This is because nickle atom and analog thereof isotropically move, and is therefore different with this crystallization of growing along the lattice plane of crystal of common crystal.
In pressing method of the present invention, nickel, iron, cobalt, platinum or palladium, with granulosa, particle, bunch etc. form or simple metal or silicide, be rendered as island, band shape, wire or point-like form, it can become the starting point that expansion and extension crystallization district go to its peripheral part.
As mentioned above, the silicon metal that obtains in last method is different with the usual way that is obtained by solid-phase epitaxial growth, and it also has excellent structural continuity and is similar to the crystal of monocrystalline silicon.So the silicon metal that is obtained by this law is applicable to that manufacturing is as the TFT semiconductor device.Moreover, found when the material that contains nickel, iron, cobalt, platinum or palladium is evenly distributed on the substrate, to be difficult to be improved the film of degree of crystallinity, because countless crystallization illustration is arranged.The material of having used nickeliferous, iron, cobalt, platinum or palladium in the homogeneous film of topped all surfaces situation and used the difference between the situation of the material that is island, band shape, line or point-like style can clearly observe by means of Raman scattering wave spectrum and X-ray diffraction analysis.Confirmed that with these analytical methods good silicon metal can obtain by method of the present invention.
Being used as raw-material amorphous silicon film in method for crystallising of the present invention, preferably to contain hydrogen concentration low as far as possible.Yet,, between the hydrogen concentration of the hydrogen concentration of original amorphous silicon film and the silicon fiml obtained by crystallization, can't see connection relation clearly because hydrogen discharges with crystallization gradually from amorphous silicon film.Hydrogen concentration by the crystal silicon film that obtains by the inventive method typically is in 1 * 10 15Individual atom cm -3To atomicity 5% between.Still there is the silicon fiml of excellent crystallinity to obtain each concentration to 1 * 10 with the concentration that reduces carbon, oxygen, nitrogen 19Cm -3Or it is lower.So the material of nickeliferous, iron, cobalt or platinum must consider that this point selects.
Top catalytic elements, that is, itself does not help silicon nickel, iron, cobalt, platinum and palladium.Therefore, their concentration preferably is suppressed to minimum as far as possible.Observe with SIMS (secondary ion mass spectroscopy view), the inventor etc. find that by further investigation to being used for the concentration as semi-conductive these elements of semiconductor device such as TFT, characteristic that collateral security is good and viewpoint of reliability preferably are controlled at 1 * 10 15Atom cm -3In 1% atoms range, preferably 1 * 10 15To 1 * 10 19Atom cm -3In the scope.If the concentration of catalytic metal element drops on this below scope, will there be enough crystallizations to occur.On the other hand, concentration goes beyond the scope, and just will obtain all poor semiconductor of characteristic and reliability.
Because nickle silicide is at the end of crystallization, as result, in hydrofluoric acid or hydrochloric acid, dissolve easily by the reaction of top formulate, nickel can use these acid to handle and reduce from substrate.
The film of the material of nickeliferous, iron, cobalt, platinum or palladium can constitute with method any physics or chemistry.For example, the method for using vacuum equipment as gas deposition, sputter, and CVD (chemical vapor deposition) be available, the method for perhaps in atmosphere, finishing, as spin coating, dipping (lining), the operation skill in using a kitchen knife in cookery, silk screen printing, to reach spray pyrolysis etc. also be available.
Particularly, spin coating or infusion process can provide the film with uniform thickness, and in addition, the concentration of the film of gained can accurately be controlled.The solution that is used to above method comprises those acetates with nickel, iron, cobalt, platinum or palladium, nitrate or carboxylate dissolving or is distributed to such as the solvent of water, alcohol (lower alcohol or higher alcohol) and can makes in petroleum solvent saturated hydrocarbons or unsaturated hydrocarbons.
But, used such material after, the oxygen and the carbon that probably are contained in the salt may diffuse into silicon fiml, they may damage the characteristic of semiconductor of silicon fiml.Therefore, after studying, use TGAs such as the inventor and difference thermal analysis system (differential thermal analysis) learn, by suitably selecting material, such substance is decomposed under 450 ℃ or following temperature and is produced oxide or element, and do not have this material further to spread, this diffusion may make them move into silicon fiml.Particularly, when decomposing in such as reducing atmospheres such as nitrogen, this class salt of acetate and nitrate is found and produces metal element under 400 ℃ or following temperature.Find these salts at first by in oxygen atmosphere, decompose producing oxide, but at last oxygen taken off when inhaling that these salt produce metal element under high temperature.
Used the crystal silicon film of making by the inventive method in this based semiconductor device of picture TFT, can see that the end of crystalline portion is unfavorable for making semiconductor device.As described above, this is because run into together mutually at the end of crystalline portion from the crystallization front portion that a plurality of starting points begin, thereby occurs the big grain boundary or the crystallization of discontinuity aspect crystallinity.In addition, the nickel concentration of this part is high.So the figure of semiconductor device and the figure of nickeliferous coating are optimized in advance in the method requirement of making semiconductor device by the present invention, promptly give the starting point of optimizing crystallization earlier.
The present invention consults following nonrestrictive example and describes in detail.Should be understood that the present invention can not be interpreted as being limited.Example 1
This example relates to a kind of method, is used to form a plurality of island nickel films on the Corning#7059 glass substrate, is that starting point makes the amorphous silicon film crystallization with these films then.This example also provides a kind of method, is used to use the crystal silicon film by obtaining above to make TFT.Island nickel film can be with any one forms in two kinds of methods; Be about to island nickel film and be formed on the amorphous silicon film, or under the amorphous silicon film.Fig. 2 (A-1) expression provides the method for island nickel film under amorphous silicon film.Fig. 2 (A-2) expression is formed at method on the amorphous silicon film with them.The corrosion that but should be taken into account the nickel film that is forming on the amorphous silicon in one method of back is carried out as a step after formation MULTI-LAYER NICKEL film.What come on is although that with very little amount, undesirable nickle silicide forms by the reaction between nickel and the amorphous silicon.Because if nickle silicide is retained on the silicon fiml, the silicon fiml that enough high-crystallinities are arranged that satisfies the object of the invention just can not obtain, and residual nickle silicide must be removed it fully with hydrochloric acid, hydrofluoric acid and similar thing.Thereby obtain compared with the thinner amorphous silicon film of the film that originally was deposited as.
In any case nickel or nickle silicide can be with any make figure in two kinds of common known methods, promptly, a kind of is etch, after being included in formation nickel film, make the photoetching glue pattern with the photoetching method, the nickel membrane portions that will do not covered by photoresist erodes again; Another kind is to peel off method, be included in the nickel film formed thereon before, make the photoresist figure with the photoetching method, remove following photoresist again so that form the nickel film selectively.
Preceding a kind of method about Fig. 2 (A-1) does not have the problems referred to above.Process according to said method, the nickel film except the island part also preferably eliminates fully.And then substrate is handled with oxidation regional except island areas and is suppressed the influence of remaining nickel with oxygen plasma or ozone and analog thereof.
In any case, two kinds of methods all comprise with plasma CVD deposit the thick silica basement membrane 1B of 2000 on Corning#7059 substrate 1A, and amorphous silicon film 1 is further deposited thereon, and thickness is 200 to 3000 , and preferably thickness is between 500 to 1500 .Amorphous film can come to remove dehydrogenation by this film is annealed in 0.1 to 2 hour under 350 to 450 ℃ temperature from amorphous film makes its easier crystallization.
In process about Fig. 2 (A-1), form before the amorphous silicon film 1, one deck nickel film is deposited to thickness 50 to 1000 with sputtering method, is preferably 100 to 500 .Resulting nickel film is scribed into island nickel district 2.The final structure of seeing from above is shown in Fig. 1 (A).
Each all is made into 2 μ m island nickel part 2Square size and to get each other distance be 5 to 50 μ m particularly, for example, is 20 μ m.Replace nickel also can obtain similar effects with nickle silicide.Also having, is 100 to 500 ℃ with substrate in temperature range, and preferably scope is that 180 to 250 ℃ of following heating can pay off.This is summed up as the tightness degree that increases combination between silicon oxide film bottom and the nickel film, also is summed up as by the reaction between silica and the nickel to form nickle silicide.Replace silica can obtain similar result with silicon nitride, carborundum or silicon.
Resulting structure temperature range in nitrogen atmosphere is 450 to 650 ℃, particularly, for example, is 550 ℃ of annealing 8 hours.Intermediateness during heating is shown in Fig. 2 (B).Be advanced to middle body from the visible nickel of Fig. 2 (B) from the island nickel film that is positioned at Fig. 2 (A) end and form nickle silicide 3A.And, also can see nickel the part 3 of process silicon metal is provided.So crystallization is finished on such point, meets mutually at this point from the forefront of two different island parts, and stays residual nickle silicide 3A in the center, this is shown in Fig. 2 (C).
Fig. 4 and Fig. 5 have respectively provided the Raman scattering wave spectrogram and the X-ray diffractogram of last crystal silicon film.In Fig. 4, be marked with the Raman wave spectrum of the curve of C-Si mark, i.e. the wave spectrum of monocrystalline silicon corresponding to standard specimen.Curve (a) and (b) show the Raman wave spectrum of the silicon fiml that obtains by the inventive method respectively and the Raman wave spectrum of noncrystalline domain.The result can know the silicon crystal that can provide by method of the present invention is provided thus.
Fig. 1 (B) is given to resulting structure vertical view till this step.Nickle silicide 3A is corresponding to grain boundary 4 in Fig. 2 (C).Continue annealing again, nickel moves and concentrates at island zone line 5 partly along grain boundary 4, and this island nickel part is all formed by its original shape distortion.
Silicon metal can be obtained by each step described above.Yet this is inadvisable, because silicon metal has the nickel that diffuses into the semiconductor coating from the nickle silicide 3A that forms thus.So, preferably use this class of hydrofluoric acid or hydrochloric acid, the corrosive agent corrosion is not because these acid influence silicon fiml.Be shown in Fig. 2 (D) by the resulting structure in corrosion back.On the position of original grain boundary, a groove 4A has been arranged.Forming semiconductor regions (active layer and similar layer) by this way, to have groove to be present between each semiconductor regions be worthless.An example of TFT configuration is shown in Fig. 1 (C).On the other hand, grid wiring 7 can stride across grain boundary.
Amorphous silicon film by above method with 2 * 2 μ m 2The nickel district carries out crystallization as the zone of departure.Studied the relation of crystalline rate and annealing temperature.Crystalline rate is calculated like this: mensuration is used for the crystallization forward position and reaches the necessary annealing time of nickelic district 10 to 50 μ m distance.Its result provides as an example in Fig. 3.For the two kinds of amorphous silicon films that have that compare its result, a kind of thickness is 500 , and another kind of thickness is 1500 .Certainly, crystalline rate is also higher when annealing temperature is higher.Crystalline rate is also relevant with thickness, increases the easier generation of thickness crystallization.Because actual semiconductor typically is of a size of 50 μ m or following, if crystalline rate essential 20 μ m/ hours was at least finished in annealing in 5 hours.Thickness there is the silicon of 1500 , reads to such an extent that annealing temperature at least should be at 550 ℃ or higher from Fig. 3.Example 2
This example relates to the method for having used the formation that is described in the example 1 to make crystal silicon film, and just the degree of crystallinity of film is further made film crystallization at the beginning improved by irradiation with laser beam by heating.Except the laser irradiation step, that describes in other steps and condition and the example 1 is the same.Used also corresponding the same in symbol among Fig. 6 and numeral and the example 1.
Consult Fig. 6, make each step of method for semiconductor by this example and be described below.Step (A-1) to (B) is the same with explanation in example 1.After having carried out the step of Fig. 6 (B), crystal can be in cross growth, laser beam irradiation it so that further improve the degree of crystallinity of silicon fiml.Like this, a kind of KrF excites the laser of unit to be operated laser beam irradiation with wavelength 248nm and pulsewidth 20nsec in the crystal silicon film of making before this, with its crystallization of further acceleration.Illuminating laser beam output energy density is 200 to 400mJ/cm 2, be exemplified as 250mJ/cm in this situation 2During laser beam irradiation, the substrate heating remains on 150 to 400 ℃, shines 2 times more specifically as under 200 ℃ of temperature, to strengthen the effect of laser beam irradiation.
Available laser comprises that those excite the laser that is operated in wavelength 308nm of first laser generation and the laser that is operated in wavelength 193nm that excites first laser to take place from ArF from XeCl except above-mentioned KrF excites first laser.In addition, the also alternative laser of high light carries out irradiation.Particularly, use RTA (rapid thermal annealing) and comprise that infrared irridiation also is effectively, because it can heat silicon fiml selectively at short notice.
Thus, there is the silicon fiml of good degree of crystallinity to obtain with above said any method.The crystal region 3 that the previous result as heating anneal obtains finds to become the degree of crystallinity that can further improve silicon fiml.On the other hand, when heating anneal, there is not the regional (not shown) of crystallization to find because the result of laser radiation produces polycrystalline film.The Raman scattering wave spectrogram represents silicon fiml change, but the degree of crystallinity of the polycrystalline film that obtains thus is very poor.And then, showed that with transmission electron microscope observation a large amount of microlites that form do not make its crystallization because of heat treatment in being subjected to the film of laser radiation.In contrast, relatively big oriented crystallization crystal grain is found the film 3 through thermal annealing and laser irradiation that has constituted by the present invention's acquisition.
After having finished laser radiation, to the front end 3A of crystal growth with hydrofluoric acid or hcl corrosion.Structure by the corrosion gained is shown in Fig. 6 (D).
Thereby TFT is made by the silicon fiml that is processed into the island form.On this TFT, observe the device property of obvious raising.Particularly, to obtain field-effect mobility be 50 to 90cm to the N-channel TFT that adopts the crystallisation step described in example 1 to obtain 2/ vs, and threshold voltage is 3 to 8V.These numerical value and be 150 to 200cm by the resulting mobility of N-channel TFT that this example is made 2/ vs and threshold voltage are 0.5 to 1.5V to be tangible contrast.Mobility improves considerably, and the fluctuation of threshold voltage is also significantly reduced.
In the past, foregoing high-caliber TFT characteristic like this must obtain from amorphous silicon film by laser crystallization.But the silicon fiml that is obtained by the prior art laser crystallization makes characteristics fluctuation.And then crystallization process requires the laser energy density 350mJ/cm of irradiation 2Or higher, temperature is at 400 ℃ or higher, so it is not suitable for batch process.Opposite with usual method, by this example make TFT method can the two all be lower than the numerical value of corresponding usual method in substrate temperature and energy density.Therefore, the inventive method is applicable to batch process.And then, also the same even by the device quality that this method obtains with the device quality that the common solid state growth crystallisation of using heating anneal obtains.So, can stably obtain the TFT of homogeneous quality.
In the present invention, find that crystallization takes place insufficiently when nickel concentration is low.Yet, use laser radiation can compensate inadequate crystallization according to this routine method.So, even when nickel concentration is low, also can obtain high-quality TFT satisfactorily.The device that this demonstration contains low concentration nickel can be realized, can obtain the device of excellent electrical stability and reliability.Example 3
This example relates to a kind of method, uses the upper surface of the solution lining amorphous silicon film that contains catalytic elements that catalytic elements is imported amorphous film, and this catalytic elements has been quickened the crystallization of amorphous silicon film.In this example.Nickel is used as catalytic elements.This example except the method that imports nickel and description in example 1 just the same beyond.Crystallisation step and each step subsequently are the same with description in example 1.Corresponding to the structure of above substrate, seeing of Fig. 1 also with example 1 the same.
Fig. 7 illustrates the manufacture process by sequential steps of the present invention.One deck silicon oxide film 1B is deposited on 10 * 10cm as the substrate coating 2On the square Corning#7059 glass substrate 1A, and then make 1000 thickness amorphous silicon films 1 thereon by the plasma CVD method deposition.
Silicon oxide film 13 is deposited over and reaches 1200 thickness on the prepared amorphous silicon film, so that one deck mask to be provided.Silicon oxide film 13 is thinned to that 500 thickness can be employed and without any problem, by adopting fine and close rete, can does film thinner.
The common photoetching of prepared silicon oxide film 13 usefulness is made the method for figure and is made figure on demand.Then, thin silicon oxide film 12 forms with ultraviolet (UV) line irradiation deposition in oxygen atmosphere.Particularly, silicon oxide film 13 usefulness ultraviolet irradiations were made in 5 minutes.Silicon oxide film 12 believes that its thickness is 20 to 50 .
Form above-mentioned silicon oxide film, improve the wettability of figure with the solution of following coated.Therefore, the acetate that contains 100ppm weight nickel molten 11 with a 5ml drops in 10 * 10cm 2On the surface of substrate.Spinner 10 forms moisture rete uniformly on all surfaces that makes substrate 10 seconds that turns round under the 50rpm speed.Spinner 10 reruns in addition under 2000rpm speed after substrate keeps 5 minutes again and carried out centrifuge dripping in 60 seconds.Substrate can bear speed on spinner be 0 to the rotation of 150rpm.This step is shown in Fig. 7 (A).
After removing silicon oxide masking film 13, made structure is subjected to 550 ℃ of temperature under nitrogen atmosphere heat treatment made amorphous silicon film 1 crystallization in 4 hours.By this way, crystallization can be gone along laterally expanding to the zone that nickel is not imported into from the zone 14 that nickel is imported into.
Consult Fig. 7 (B), visible crystallization is from zone 14 beginnings of direct importing nickel, and as seen it laterally carries out towards middle body.Crystal silicon film 3 obtains in this way.Form silicon nitride at regional 3A, the growth front of crystal meets mutually there.
After this, the regional 3A of nickel oxide removes with hydrofluoric acid or hydrochloric acid.The structure that is obtained by corrosion is shown in Fig. 7 (D).
The distribution of the concentration of nickel is shown in Fig. 8 in this zone.Nickel concentration in the crystal silicon film of having finished crystallization is measured with SIMS (ion microprobe), and the nickel concentration that has confirmed the zone 14 that nickel directly imports has than in the taller order of magnitude of concentration shown in Figure 8 or above value.
Can also or be equivalent to its high light with illuminating laser beam,, further improve the degree of crystallinity of the crystal silicon film that obtains above as mode same in the front example 2.In the situation of example 2, the form of film is damaged by laser radiation, because the crystal grain of nickle silicide, approximately from 0.1 to 10 μ m is precipitated out from the nickel film that quite high nickel concentration is arranged.Yet because the nickel concentration of nickel film can be than resulting much lower in example 1 and 2, the precipitation of nickle silicide and consequent rough surface can be avoided taking place.
The nickel concentration that is shown in Fig. 8 can be controlled with the nickel concentration that changes institute's coated solution.In the present invention, the nickel concentration in the solution is not controlled.In the present invention, the nickel concentration in the solution is adjusted to 100ppm.But confirmed even dropped to the 10ppm crystallization and also take place when concentration.With the solution of the nickel that contains 10ppm concentration, crystallization takes place in the same way.In this situation, the nickel concentration that is shown in Fig. 8 can further reduce a number grade., using to contain the low excessively solution of nickel concentration and shortened along the distance of the direction crystal growth of laterally pointing out by arrow, is undesirable therefore.
Acetate solution is used as the solution that contains catalytic elements in this example.But other available solution comprise and are selected from various aqueous solutions, and the solution that contains organic solvent.Catalytic elements must be comprised that it can be dispersed in the solution simply as a compound.
The solvent that is used for catalytic elements can be selected from polar solvent, that is, and and water, alcohol, acid, and ammoniacal liquor.
When nickel was used as catalytic elements, nickel was sneaked in the polar solvent with the compound form of nickel.The compound of nickel is selected from respectively: nickelous bromide, nickel acetate, ethanedioic acid nickel, nickelous carbonate, nickel chloride, nickel iodide, nickel nitrate, nickelous sulfate, nickel formate, acetylacetonate nickel, 4-ring ethyl butyric acid nickel, nickel oxide, and nickel hydroxide.
Solvent can be selected from following non-polar solven: benzene, toluene, dimethylbenzene, carbon tetrachloride, chloroform, and ether.
In this case, nickel is contained in the solution with the compound form of nickel, and this compound is selected from acetylacetonate nickel, and 2-ethyl hexane nickel.
Also can in containing the solution of catalytic elements, add surfactant.Surfactant solution can increase the degree of adhesion of solution to the silicon oxide film surface, and the control adsorptivity.Surfactant can give and being added on earlier on the surface that will be covered.If elemental nickel is used as catalytic elements, then must give being dissolved in earlier in the acid to obtain its solution.
Replace containing the solution that is dissolved in the nickel in the solution fully, available a kind of emulsion, that is, a kind of material that comprises decentralized medium, the compound of wherein even dispersed metal nickel by powder or nickel also can be used.
Also can be with material beyond the nickel as catalytic elements.
The solution that contains non-polar solven, that is, the toluene solution of 2-ethyl hexane nickel can directly be used on the surface of amorphous silicon film.In the case, can be commonly used to constitute protective layer with a kind of material as bonding agent.But excessive application of adhesive is disturbed catalytic elements to shift on the contrary and is entered in the amorphous silicon.
It is relevant with solution type that catalytic elements is mixed the amount of solution, and having approx with nickel is 1 to 200ppm by weight, best for by weight from 1 to 50ppm.The decision of the scope of this additive will be considered the situation of the nickel concentration and the hydrofluoric acid resistant of crystalline film.
As previously mentioned, the present invention can make amorphous silicon in addition lower temperature crystallization within a short period of time aspect found new era.And the inventive method is applicable to batch process, also has, and it can be realized with prevailing instrument, equipment and method.Therefore it is to be used for that electronics industry is hopeful and advantageous method.
Particularly, for example, common solid state growth method requires annealing steps at least 24 hours.Consider preferably 2 minutes each substrate processing time, pratical and feasible for making processing procedure, must want 15 annealing furnaces.The present invention can make process finish in 8 hours, and under optimum condition process even only can shorten to 4 hours or still less.As long as this stove number that has shown that process can be calculated in the above reduces to 6 or still less finish under the condition.This improves productivity ratio, cuts down equipment investment, thereby reduces the substrate producing cost.So, can produce economic TFT, this also permits and is referred to as new demand.As a result, the present invention is very useful to industry.
Very clear when the present invention consults special embodiment and is described in detail, to one skilled in the art to can make various changes and modification and can not depart from its spirit and scope.

Claims (29)

1. method of making semiconductor device, it comprises the steps:
A kind of catalyst material is partly contacted with a kind of selectivity that contains the semiconductor film of amorphous silicon, and described catalyst can promote this semiconductor film crystallization;
The described semiconductor film that has had catalyst material is annealed, so that this semiconductor film crystallization; And,
Top surface by described semiconductor film corrodes described catalyst material, makes this semiconductor film not be subjected to the effect of corrosion step basically.
2. method according to claim 1, wherein, described annealing is undertaken by heat treatment.
3. method according to claim 1 wherein, is removed excessive described catalyst material by described corrosion.
4. method according to claim 1, wherein, with 1 * 10 15Atom/centimetre 3To the concentration range of 1 atom %, described catalyst material is added in this semiconductor film, this concentration is measured with ion microprobe.
5. method according to claim 1, wherein, described catalyst material comprises a kind of metal, and this metal is selected from Pt, Fe, Co and Pd.
6. method according to claim 1 wherein, provides described catalyst material, and it is contacted with the following laminar surface of described semiconductor film.
7. method according to claim 1 wherein, provides described catalyst material, and it is contacted with the top surface of described semiconductor film.
8. method of making semiconductor device, it comprises the steps:
A kind of catalyst material is divided with a kind of selection portion that contains the semiconductor film of amorphous silicon contact, this catalyst can promote the crystallization of this semiconductor film;
The above-mentioned semiconductor film that has had described catalyst material is heated, so that this membrane crystallization; And,
With the described semiconductor film of laser radiation, increasing the degree of crystallinity of this semiconductor film,
Wherein, described method comprises that also top surface from described semiconductor film to the step that described catalyst material corrodes, makes described semiconductor film not be subjected to the effect of this corrosion step basically.
9. method according to claim 8 wherein, by described corrosion, is removed excessive described catalyst material.
10. method according to claim 8, wherein, with 1 * 10 15Atom/centimetre 3To the concentration range of 1 atom %, described catalyst material is added in the described semiconductor film, this concentration is measured with ion microprobe.
11. method according to claim 8, wherein, described catalyst material comprises a kind of metal, and this metal is selected from Pt, Fe, Co and Pd.
12. method according to claim 8 wherein, provides described catalyst material, and it is contacted with the following laminar surface of described semiconductor film.
13. method according to claim 8 wherein, provides described catalyst material, and it is contacted with the top surface of described semiconductor film.
14. a method of making semiconductor device, it comprises the steps:
A kind of catalyst material is divided with a kind of selection portion that contains the semiconductor film of amorphous silicon contact, this catalyst can promote the crystallization of this semiconductor film;
The semiconductor film that has described catalyst material is heated, so that this membrane crystallization; And
Described semiconductor film is carried out thermal annealing fast, so that further increase the degree of crystallinity of this semiconductor film;
Wherein, described method comprises that also top surface by semiconductor film to the step that catalyst material corrodes, makes described semiconductor film not be subjected to the effect of this corrosion step basically.
15. method according to claim 14 wherein, is removed excessive catalyst material by described corrosion.
16. method according to claim 14, wherein, with 1 * 10 15Atom/centimetre 3To the concentration range of 1 atom %, described semiconductor substance is added in the semiconductor film, this concentration is measured with ion microprobe.
17. method according to claim 14, wherein, described catalyst material comprises a kind of metal, and this metal is selected from Pt, Fe, Co and Pd.
18. method according to claim 14 wherein, provides described catalyst material, and it is contacted with the following laminar surface of semiconductor film.
19. method according to claim 14 wherein, provides described catalyst material, and it is contacted with the top surface of semiconductor film.
20. according to any one described method in the claim 1,8 or 14, wherein, described silicon fiml is an amorphous state.
21. want 1 or 7 method according to right, wherein, described silicon fiml comprises the channel region at least in the insulated-gate field-effect transistor, and, described material is formed at least on this channel region.
22. method according to claim 15, wherein, described silicon fiml comprises the channel region at least in the insulated-gate field-effect transistor, and, with described solvent coating on this channel region at least.
23. according to claim 1,8 or 14 described methods, wherein, the selection portion branch in the described semiconductor silicon fiml comprises the channel region at least of insulated-gate field-effect transistor, and, described catalyst is configured in the described at least selection district.
24. a method of making semiconductor device, it comprises the steps:
Dispose a kind of metallic catalyst, it is contacted with the surface of siliceous semiconductor film, this catalyst can promote the crystallization of semiconductor film;
The semiconductor film that has described catalyst material is heated, so that this membrane crystallization; And,
Then, after above-mentioned heating,, make this semiconductor film further carry out crystallization whereby with the described semiconductor film of laser radiation.
25. method according to claim 24 wherein, is disposed at a kind of selection district in the described semiconductor film with described catalyst, and, make crystalline growth by described heating, this crystallization with along with the surperficial parallel direction of this semiconductor film, by selecting the adjacent part growth in district with this.
26. method according to claim 24, wherein, described metal is selected from Ni, Fe, Co, Pt and Pd.
27. a method of making semiconductor device, it comprises the steps:
Dispose a kind of metallic catalyst, it is contacted with the surface of siliceous semiconductor film, described catalyst can promote the crystallization of this semiconductor film;
The semiconductor film that has above-mentioned catalyst material is heated, so that this membrane crystallization; And,
Then, after above-mentioned heating, carry out rapid thermal annealing, make the further crystallization of this semiconductor film whereby.
28. method according to claim 27, wherein, described catalyst is disposed at a kind of selection part in the described semiconductor film, and, make crystal growth by described heating, this crystal is by the described surface that is parallel to this semiconductor film, and grow by the position adjacent with this selection part.
29. method according to claim 27, wherein, described metal is selected from Ni, Fe, Co, Pt and Pd.
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