CN1253381A - Efficient solar battery and its making method - Google Patents
Efficient solar battery and its making method Download PDFInfo
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- CN1253381A CN1253381A CN98123579A CN98123579A CN1253381A CN 1253381 A CN1253381 A CN 1253381A CN 98123579 A CN98123579 A CN 98123579A CN 98123579 A CN98123579 A CN 98123579A CN 1253381 A CN1253381 A CN 1253381A
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- contact zone
- solar battery
- efficient solar
- manufacture method
- relief area
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P70/00—Climate change mitigation technologies in the production process for final industrial or consumer products
- Y02P70/50—Manufacturing or production processes characterised by the final manufactured product
Abstract
An efficient solar battery is composed of emitting area and base area. Said emitting area is divided into contact and non-contact zones. Said contact zone has metal electrode in it. It features that the doping concentration is 8-30 ohms/ for contact zone and 80-500 ohms/ for non-contact zone. The selective doping method for the emitting area can make both zones reach optimal values.
Description
The present invention relates to a kind of efficient solar battery and preparation method thereof.
In the making of solar cell, the making of P-N knot is crucial, and diffusion concentration is high more within the specific limits, and the open circuit voltage of battery is also high more.But when doping content is too high, all ionization of impurity, impurity defect increases, thereby causes photo-generated carrier seriously compound, even can form " dead layer ".In solar cell, photo-generated carrier must could have contribution to output current not by compound before they cross the P-N knot by diffusion and drift.Doping content is too high to be very disadvantageous to battery open circuit voltage and short circuit current, so the doping content of battery emitter region must be controlled at a suitable scope.On the other hand, the contact zone in the emitter region, by metal with contacting of silicon and projected current.The contact zone doping content improves, and can reduce the contact resistance of metal and silicon, and this resistance is the part of battery series resistance, so the highly doped fill factor, curve factor to the raising battery of contact zone is very favourable.
In conventional solar cell, the doping content of emitter region is uniformly, and is then low excessively in the contact zone doping content if satisfied the requirement of relief area light dope concentration, causes the contact resistance of metal and silicon to strengthen, and reduced fill factor, curve factor.And if satisfied the requirement of contact zone to doping content, for relief area in the emitter region, doping content is too high, lattice defect density increases, photo-generated carrier is compound serious, the open circuit voltage of battery and short circuit current all are subjected to very big influence.In fact, conventional batteries emitter region doping content is controlled at the scope of 50-70 Ω/ (square resistance) at present, be to have taken into account that contact zone and relief area are to the requirement of doping content in the emitter region, the two does not all reach the level of optimization, and therefore the adverse effect to battery efficiency is conspicuous.
At the problems referred to above, the purpose of this invention is to provide a kind of needs that both can satisfy the contact zone doping content, can satisfy the efficient solar battery and preparation method thereof of the needs of relief area doping content again.
For achieving the above object, the present invention takes following design: a kind of efficient solar battery, it comprises emitter region and base, described emitter region is divided into contact zone and relief area, described contact zone is provided with metal electrode, it is characterized in that: the doping content of the alloy of described contact zone is controlled at 8-30 Ω/, and the doping content of the alloy of described relief area is controlled at 80-500 Ω/.
The doping content of the alloy of described contact zone is controlled at 10-20 Ω/, and it is better that the doping content of the alloy of described relief area is controlled at 100-300 Ω/.
One of manufacture method of above-mentioned efficient solar battery is characterized in that: it may further comprise the steps:
(1) generating thickness on the Si sheet is the SiO of 1000-4000A
2Layer,
(2) at SiO
2The surface forms the contact zone window by photoetching corrosion,
(3) the contact zone window is heavily spread the back and remove SiO
2,
(4) whole emitter region is gently spread,
(5) in the contact zone metal electrode is set.
On described Si sheet, generate SiO
2It is better when the thickness of layer is 1500-3000 .
Two of the manufacture method of above-mentioned efficient solar battery is characterized in that: it may further comprise the steps:
(1) on the Si sheet, gently spread,
(2) carrying out described light diffusion silicon chip surface generation SiO
2Mask,
(3) the position cutting of electrode is set at needs, groove depth is 5-100 μ m, and well width is 5-50 μ m,
(4) described groove is heavily diffuseed to form the contact zone,
(5) in described contact zone metal electrode is set.
Cutting can be adopted laser means, electrode is set can adopts chemical plating method.
Three of the manufacture method of above-mentioned efficient solar battery is characterized in that: it may further comprise the steps:
(1) the Si sheet is heavily spread,
(2) metal electrode in the making,
(3) by a kind of mode in chemical corrosion, ion sputtering or the reactive ion sputter, the emitter region beyond the described electrode of attenuate forms relief area.
Four of the manufacture method of above-mentioned efficient solar battery is characterized in that: it may further comprise the steps:
(1) silk-screen phosphorus doping slurry on the Si sheet is put into diffusion furnace and is spread, and diffusion temperature 800-900 ℃, time 0.5-2 hour, heavily spread in the place of silk-screen, forms the contact zone, and the local light diffusion around the silk-screen forms relief area,
(2) silk-screen metal electrode on the contact zone.
When described diffusion temperature is 820-860 ℃, the time is better when being 1-1.5 hour.
The present invention is owing to take above design, it has the following advantages: 1, the present invention is owing to adopt the mode of selective doping to the emitter region of battery, make contact zone heavy doping, the relief area light dope, make contact zone and relief area reach optimum doping concentration respectively, the efficient of entire cell is significantly improved.2, the present invention has reduced the contact resistance of metal and silicon owing to the raising in the contact zone doping content, and is very favourable to the fill factor, curve factor that improves battery.The present invention simultaneously is owing to reduce in the relief area doping content, and lattice defect density reduces, can guarantee effectively photo-generated carrier before crossing the P-N knot by diffusion and drift not by compound, very favourable to the open circuit voltage and the short circuit current of battery.3, the present invention adopts the photo etched mask technology, uses for reference the technology of ripe integrated circuit industry, and can accurately control the scope of contact zone (heavy doping) and relief area (light dope).4, the present invention adopts mask and cutting technology can control the scope of contact zone and relief area more exactly, is the simplification to the photo etched mask technology, can reduce the pyroprocess in the battery making, therefore can be used for industrialization production.5, the present invention adopts heavily diffusion back mask etch and two technology of silk-screen phosphorus slurry, makes the manufacturing process of battery more simple, is more suitable for the industrialization production in battery.The present invention conceives simply ingenious, and implementation result is remarkable, and it can be widely used in the production of various solar cells.
Below in conjunction with accompanying drawing the present invention is made a more detailed description.
Fig. 1 is a conventional batteries emitter region schematic diagram
Fig. 2 is an emitter region of the present invention schematic diagram
Fig. 3 generates SiO in the photo etched mask
2Layer schematic diagram
Fig. 4 is that photoetching technique formation contact zone heavily spreads the window schematic diagram in the photo etched mask
Fig. 5 heavily spreads in the photo etched mask to remove SiO
2Schematic diagram
Fig. 6 is a light diffusion schematic diagram in the photo etched mask
Fig. 7 is a light diffusion schematic diagram in mask and the cutting
Fig. 8 generates SiO in mask and the cutting
2Schematic diagram
Fig. 9 is a cutting schematic diagram in mask and the cutting
Figure 10 heavily spreads schematic diagram in mask and the cutting
Figure 11 heavily spreads schematic diagram in the heavily diffusion mask corrosion
Figure 12 is a metallization system electrode schematic diagram in the heavily diffusion mask corrosion
Figure 13 is an attenuate relief area schematic diagram in the heavily diffusion mask corrosion
Figure 14 is a silk-screen phosphorus slurry schematic diagram in the silk-screen doping slurry
Figure 15 realizes weight doping schematic diagram in the silk-screen doping slurry
As shown in Figure 1, in conventional batteries, general base 1 adopts P type Si material, emitter region 2 Doping Phosphorus, and it is provided with metal electrode 3.The doping content of emitter region alloy is uniformly, and the doping of the emitter region, back of mixing is controlled at 50-70 Ω/.
As shown in Figure 2, in the present invention, selective doping is adopted in the emitter region, promptly the contact zone in emitter region 24 (is the zone that electrode contacts with semi-conducting material, the grid line shadow region) heavily spread, the concentration after the doping is controlled to be 8-30 Ω/, preferred 10-20 Ω/.And gently spread at relief area 5 (sensitive surface), the concentration after the doping is controlled to be 80-500 Ω/, preferred 100-300 Ω/.In practical operation, concrete doping content can be determined as required, but in above-mentioned concentration range, can reach implementation result preferably.
For realizing that the present invention has the emitter region of different levels of doping, can adopt the mode of following several making:
Embodiment one adopts the photo etched mask technology
As shown in Figure 3, at first generating thickness on the Si sheet is the SiO of 1000-4000A
2Layer forms 7 (as shown in Figure 4) of contact zone window by photoetching technique, after contact zone window 7 is heavily spread, removes SiO
2(as shown in Figure 5), form the higher contact zone 4 of diffusion concentration, again (as shown in Figure 6) gently spread in the whole emitter region that comprises contact zone 4 and relief area 5, the doping content of contact zone 4 is controlled to be 10-20 Ω/, the doping content of relief area 5 is controlled to be 100-300 Ω/, and metal electrode is set according to a conventional method in the contact zone at last.
Adopting the photo etched mask technology to realize in the emitter region weight doping process SiO
2Thickness be very crucial.If the SiO that generates
2Too thin, when heavily expanding, can not play a protective role.And SiO
2Layer is too thick, can cause dislocation, the therefore general SiO that generates
2Mask thicknesses is grasped at 1000-4000A, is preferably 1500-3000 , and SiO
2Temperature when the thickness of layer can be by oxidation, controls such as time, this can grasp those skilled in the art.
Embodiment two adopts mask and cutting technology
As shown in Figure 7, at first on the Si sheet, gently spread, make its diffusion concentration reach the required 100-300 Ω/ of relief area 1, generate SiO at silicon chip surface
2Mask (as shown in Figure 8), use laser means cutting 8 (as shown in Figure 9) then, the desirable 5-100 μ of the degree of depth of groove 8 m, the desirable 5-50 μ of the width of groove 8 m, then groove 8 is heavily spread (as shown in figure 10), form contact zone 4, doping content is 10-20 Ω/, makes electrode cover with groove 8 with chemical plating method at last.
Adopting mask and cutting technology to realize that the physical dimension of groove is very crucial in the process of emitter region weight doping.If the groove that forms is too shallow, contacting of metal and silicon is not good, and if groove depth is excessive, metallization is difficult for finishing, metal is difficult for filling up in the groove, the inner cavity that forms not only influences the long-time stability of battery, and the series resistance of battery increases.Therefore, the degree of depth of general groove 8 is got 5-50 μ m, more preferably 20-50 μ m.The too wide grid line that certainly will cause of the width of groove 8 is thicker, has increased the shaded area of electrode, and narrower groove makes metallized realization very difficult, and the width of therefore general groove is got 5-50 μ m, more preferably gets 20-30 μ m.
In the foregoing description, cutting can be adopted laser or other method, electrode is set also can takes to electroplate or other method.
Embodiment three adopts the masked etching technique after heavily expanding
As shown in figure 11, at first the Si sheet is heavily spread, diffusion concentration is controlled to be 10-20 Ω/, do metal electrode 3 (as shown in figure 12) then, attenuate is carried out by the method for mask etch in zone beyond the electrode 3, make the doping content in the zone behind the attenuate be controlled at 100-300 Ω/, form relief area 5 (as shown in figure 13).
Adopt the attenuate amount of relief area in the masked etching technique to control by square resistance.The method of mask etch comprises chemical corrosion, ion sputtering and reactive ion sputter etc.
Embodiment four adopts silk-screen doping slurry technology
As Figure 14, shown in Figure 15, at first silk-screen phosphorus doping slurry 9 on the Si sheet is put in people's diffusion furnace and is spread, and the place of silk-screen forms the heavily contact zone 4 of diffusion, and the zone beyond the silk-screen forms the relief area 5 of light diffusion, stamps electrode 3 at last in the contact zone.
Adopt the mode of silk-screen phosphorus doping slurry can be used for large-scale production; in this technology; the condition of sintering is crucial to contact zone and relief area doping content and inhomogeneity influence thereof; general sintering diffusion temperature is controlled at 800-900 ℃; preferred 820-860 ℃; time is 30 minutes to 2 hours, preferred 1-1.5 hour.
Among the embodiment of above-mentioned each manufacture method, the weight doping content of emitter region generally is controlled at 100-300 Ω/, 10-20 Ω/ respectively, and in actual use, when the expanded range of doping content during, also increase than battery efficiency of the prior art to 80-500 Ω/ and 8-30 Ω/.
Claims (10)
1, a kind of efficient solar battery, it comprises emitter region and base, described emitter region is divided into contact zone and relief area, described contact zone is provided with metal electrode, it is characterized in that: the doping content of the alloy of described contact zone is controlled at 8-30 Ω/, and the doping content of the alloy of described relief area is controlled at 80-500 Ω/.
2, a kind of efficient solar battery as claimed in claim 1, it is characterized in that: the doping content of the alloy of described contact zone is controlled at 10-20 Ω/, and the doping content of the alloy of described relief area is controlled at 100-300 Ω/.
3, a kind of manufacture method of efficient solar battery, it is characterized in that: it may further comprise the steps:
(1) generating thickness on the Si sheet is the SiO of 1000-4000
2Layer,
(2) at SiO
2The surface forms the contact zone and heavily spreads window by photoetching technique,
(3) the contact zone window is heavily spread the back and remove SiO
2,
(4) whole emitter region is gently spread,
(5) in the contact zone metal electrode is set.
4, the manufacture method of a kind of efficient solar battery as claimed in claim 3 is characterized in that: generate SiO on the described Si sheet
2The thickness of layer is 1500-3000A.
5, a kind of manufacture method of efficient solar battery, it is characterized in that: it may further comprise the steps:
(1) on the Si sheet, gently spread,
(2) carrying out described light diffuse si surface generation SiO
2Mask,
(3) the position cutting of electrode is set at needs, groove depth is 5-100 μ m, and well width is 5-50 μ m,
(4) described groove is heavily diffuseed to form the contact zone,
(5) in described contact zone metal electrode is set.
6, the manufacture method of a kind of efficient solar battery as claimed in claim 5 is characterized in that: the degree of depth of described groove is 20-50 μ m, and well width is 20-30 μ m.
7, the manufacture method of a kind of efficient solar battery as claimed in claim 5 is characterized in that: the method for laser is adopted in described cutting, the described method that metal electrode employing chemical plating is set.
8, a kind of manufacture method of efficient solar battery, it is characterized in that: it may further comprise the steps:
(1) the Si sheet is heavily spread,
(2) metal electrode in the making,
(3) by a kind of mode in chemical corrosion, ion sputtering or the reactive ion sputter, the emitter region beyond the described electrode of attenuate forms relief area.
9, a kind of manufacture method of efficient solar battery: it is characterized in that: it may further comprise the steps:
(1) silk-screen phosphorus doping slurry on the Si sheet is put into diffusion furnace and is spread, and diffusion temperature 800-900 ℃, time 0.5-2 hour, heavily spread in the place of silk-screen, forms the contact zone, and the local light diffusion around the silk-screen forms relief area,
(2) silk-screen metal electrode on the contact zone.
10, as the manufacture method of claim 9 described a kind of efficient solar batteries, it is characterized in that: described diffusion temperature is 820-860 ℃, and the time is 1-1.5 hour.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB981235794A CN1134071C (en) | 1998-11-04 | 1998-11-04 | Efficient solar battery and its making method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB981235794A CN1134071C (en) | 1998-11-04 | 1998-11-04 | Efficient solar battery and its making method |
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| Publication Number | Publication Date |
|---|---|
| CN1253381A true CN1253381A (en) | 2000-05-17 |
| CN1134071C CN1134071C (en) | 2004-01-07 |
Family
ID=5228257
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB981235794A Expired - Fee Related CN1134071C (en) | 1998-11-04 | 1998-11-04 | Efficient solar battery and its making method |
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| Country | Link |
|---|---|
| CN (1) | CN1134071C (en) |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102315316A (en) * | 2010-06-30 | 2012-01-11 | 台湾积体电路制造股份有限公司 | Manufacture method for photovoltaic cell and semiconductor element |
| CN102844840A (en) * | 2010-02-18 | 2012-12-26 | 瓦里安半导体设备公司 | Self-aligned ion implantation for ibc solar cells |
| CN103367124A (en) * | 2011-12-31 | 2013-10-23 | 英利能源（中国）有限公司 | Manufacturing method of selective emitter cell |
| CN105449014A (en) * | 2010-09-10 | 2016-03-30 | 光城公司 | Solar cell with electroplated metal grid |
| US9842956B2 (en) | 2015-12-21 | 2017-12-12 | Tesla, Inc. | System and method for mass-production of high-efficiency photovoltaic structures |
| US9865754B2 (en) | 2012-10-10 | 2018-01-09 | Tesla, Inc. | Hole collectors for silicon photovoltaic cells |
| US9887306B2 (en) | 2011-06-02 | 2018-02-06 | Tesla, Inc. | Tunneling-junction solar cell with copper grid for concentrated photovoltaic application |
| US9899546B2 (en) | 2014-12-05 | 2018-02-20 | Tesla, Inc. | Photovoltaic cells with electrodes adapted to house conductive paste |
| US9947822B2 (en) | 2015-02-02 | 2018-04-17 | Tesla, Inc. | Bifacial photovoltaic module using heterojunction solar cells |
| US10084107B2 (en) | 2010-06-09 | 2018-09-25 | Tesla, Inc. | Transparent conducting oxide for photovoltaic devices |
| US10084099B2 (en) | 2009-11-12 | 2018-09-25 | Tesla, Inc. | Aluminum grid as backside conductor on epitaxial silicon thin film solar cells |
| US10115838B2 (en) | 2016-04-19 | 2018-10-30 | Tesla, Inc. | Photovoltaic structures with interlocking busbars |
| US10115839B2 (en) | 2013-01-11 | 2018-10-30 | Tesla, Inc. | Module fabrication of solar cells with low resistivity electrodes |
| US10164127B2 (en) | 2013-01-11 | 2018-12-25 | Tesla, Inc. | Module fabrication of solar cells with low resistivity electrodes |
| US10181536B2 (en) | 2015-10-22 | 2019-01-15 | Tesla, Inc. | System and method for manufacturing photovoltaic structures with a metal seed layer |
| US10309012B2 (en) | 2014-07-03 | 2019-06-04 | Tesla, Inc. | Wafer carrier for reducing contamination from carbon particles and outgassing |
| US10672919B2 (en) | 2017-09-19 | 2020-06-02 | Tesla, Inc. | Moisture-resistant solar cells for solar roof tiles |
| US11190128B2 (en) | 2018-02-27 | 2021-11-30 | Tesla, Inc. | Parallel-connected solar roof tile modules |
-
1998
- 1998-11-04 CN CNB981235794A patent/CN1134071C/en not_active Expired - Fee Related
Cited By (23)
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| US10084099B2 (en) | 2009-11-12 | 2018-09-25 | Tesla, Inc. | Aluminum grid as backside conductor on epitaxial silicon thin film solar cells |
| CN102844840A (en) * | 2010-02-18 | 2012-12-26 | 瓦里安半导体设备公司 | Self-aligned ion implantation for ibc solar cells |
| CN102844840B (en) * | 2010-02-18 | 2015-08-05 | 瓦里安半导体设备公司 | The self-aligned implanted ions of fourchette type back contact solar cells |
| US10084107B2 (en) | 2010-06-09 | 2018-09-25 | Tesla, Inc. | Transparent conducting oxide for photovoltaic devices |
| CN102315316A (en) * | 2010-06-30 | 2012-01-11 | 台湾积体电路制造股份有限公司 | Manufacture method for photovoltaic cell and semiconductor element |
| US8981557B2 (en) | 2010-06-30 | 2015-03-17 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method for forming photovoltaic cell, and resulting photovoltaic cell |
| CN102315316B (en) * | 2010-06-30 | 2016-02-03 | 台湾积体电路制造股份有限公司 | The manufacture method of photovoltaic cell and semiconductor element |
| CN105449014A (en) * | 2010-09-10 | 2016-03-30 | 光城公司 | Solar cell with electroplated metal grid |
| CN105449014B (en) * | 2010-09-10 | 2018-06-19 | 光城公司 | The solar cell of metallic grid with plating |
| US9887306B2 (en) | 2011-06-02 | 2018-02-06 | Tesla, Inc. | Tunneling-junction solar cell with copper grid for concentrated photovoltaic application |
| CN103367124B (en) * | 2011-12-31 | 2016-01-13 | 英利能源（中国）有限公司 | A kind of manufacture method of selective emitter battery |
| CN103367124A (en) * | 2011-12-31 | 2013-10-23 | 英利能源（中国）有限公司 | Manufacturing method of selective emitter cell |
| US9865754B2 (en) | 2012-10-10 | 2018-01-09 | Tesla, Inc. | Hole collectors for silicon photovoltaic cells |
| US10115839B2 (en) | 2013-01-11 | 2018-10-30 | Tesla, Inc. | Module fabrication of solar cells with low resistivity electrodes |
| US10164127B2 (en) | 2013-01-11 | 2018-12-25 | Tesla, Inc. | Module fabrication of solar cells with low resistivity electrodes |
| US10309012B2 (en) | 2014-07-03 | 2019-06-04 | Tesla, Inc. | Wafer carrier for reducing contamination from carbon particles and outgassing |
| US9899546B2 (en) | 2014-12-05 | 2018-02-20 | Tesla, Inc. | Photovoltaic cells with electrodes adapted to house conductive paste |
| US9947822B2 (en) | 2015-02-02 | 2018-04-17 | Tesla, Inc. | Bifacial photovoltaic module using heterojunction solar cells |
| US10181536B2 (en) | 2015-10-22 | 2019-01-15 | Tesla, Inc. | System and method for manufacturing photovoltaic structures with a metal seed layer |
| US9842956B2 (en) | 2015-12-21 | 2017-12-12 | Tesla, Inc. | System and method for mass-production of high-efficiency photovoltaic structures |
| US10115838B2 (en) | 2016-04-19 | 2018-10-30 | Tesla, Inc. | Photovoltaic structures with interlocking busbars |
| US10672919B2 (en) | 2017-09-19 | 2020-06-02 | Tesla, Inc. | Moisture-resistant solar cells for solar roof tiles |
| US11190128B2 (en) | 2018-02-27 | 2021-11-30 | Tesla, Inc. | Parallel-connected solar roof tile modules |
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