CN1228627C - Plastic light addressing biochemical sensor chip - Google Patents

Plastic light addressing biochemical sensor chip Download PDF

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Publication number
CN1228627C
CN1228627C CN 03138431 CN03138431A CN1228627C CN 1228627 C CN1228627 C CN 1228627C CN 03138431 CN03138431 CN 03138431 CN 03138431 A CN03138431 A CN 03138431A CN 1228627 C CN1228627 C CN 1228627C
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China
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produced
photoconductive layer
full
film
plastic light
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CN 03138431
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CN1553176A (en
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韩泾鸿
张虹
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Institute of Electronics of CAS
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Institute of Electronics of CAS
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Abstract

The present invention relates to an all plastic optical address biochemical sensor chip. The present invention is characterized in that the present invention comprises a substrate, a transparent conductive film, a photoconductive layer component, an insulation layer, a conductive polymer thin film, a biologic sensitive film regional grid and sealing gum, wherein when the substrate is shaped in a polymerization mode, an electrode lead is embedded in the substrate; the transparent conductive film is manufactured on the other surface of the substrate, and is conducted with the electrode lead; the photoconductive layer component is manufactured on the other surface of the transparent conductive film; the insulation layer is manufactured on the other surface of the photoconductive layer; the conductive polymer thin film is manufactured on the other surface of the insulation layer; the biologic sensitive film regional grid is manufactured on the other surface of the insulation layer; the sealing gum is encapsulated on the periphery of the side surface of the structure, and finally the basic chip of the device is completed.

Description

Full-plastic light Addressable Biochemical Sensors chip
Technical field
The invention belongs to sensing technology, be meant biology, the chemical sensor array of the light addressing that the employing organic material is made especially.
Background technology
Be that (Light AddressablePotentiometric Sensor, basic structure LAPS) as shown in Figure 1 for the Light Addressable Potentiometric Sensor of material with the single crystal silicon semiconductor.Be insulated layer between semiconductor and the electrolyte solution and separate formation electrolyte/electrolyte/semiconductor (EIS) structure.Regulate bias voltage make semiconductor be in different bias states (3V~+ 3V), shine from the back side to this EIS structure through the light source (as LED or laser) of intensity modulated, in semiconductor, produce electron hole pair.When the surface that semiconductor contacts with insulation course was in the electric charge accumulated state, the electric field of semiconductor surface was zero, and electron hole pair can not separate at this, so photogenerated current is zero substantially; When semiconductor surface was in spent condition, these electron hole pairs may enter depletion layer by diffusion.Electric field in the depletion layer with the light induced electron hole to separately, thereby in the loop, produce photogenerated current.Photocurrent changes and changes along with bias state, forms the LAPS curve, has also embodied the C-V characteristic of device.
The responsive principle of LAPS is based on the field effect of EIS, and it is responsive that its C-V curve is changed the phase boundary potential between insulation course and electrolyte solution.When signals collecting, LAPS adopts the modulated beam of light irradiation, and adopts phase-locked detection technique that response signal is detected, and C-V curve characteristic at this moment will embody in the skew of LAPS curve (photocurrent one bias voltage relation curve).The typical response curve of LAPS is measured the corresponding different LAPS curve of buffer solution of different pH values as shown in Figure 2.Because the existence of sensitive membrane, sensitive membrane surface adsorption one deck ion forms film potential, thereby causes the voltage at insulator and semiconductor two ends to produce certain skew.Therefore photocurrent one bias voltage curve also produces corresponding skew.Treat that the concentration of measured ion is relevant in the side-play amount of curve and the solution.Therefore can detect the concentration for the treatment of measured ion by the side-play amount of measuring curve.If antibody, single stranded DNA or RNA etc. that the dielectric film surface fixedly has the specific molecular recognition function, with the antigen of solution to be measured, corresponding single stranded DNA or the combination of RNA specificity, the film potential of dielectric film changes, by detecting the translational movement of LAPS curve, detect the antigen of solution to be measured, the single stranded DNA of correspondence or the concentration of RNA.Tens unit are arranged on the LAPS chip, can fix different sensitive materials, form the biosensor array of light addressing.
The present invention proposes a kind of biology, chemical sensor array that adopts the light addressing that organic material makes.Since the end of the seventies, conducting polymer occurred, because its special structure and excellent physical chemistry receive each field scientific worker's concern, and extensive, tempting application prospect is arranged on the energy, photoelectric device, information, sensor, molecular wire and molecular device.The end of the eighties, conducting polymer materials is applied to the research of sensor, with metal-free phthalocyanine compound, polypyrrole, polyaniline is typical organic conductor material, have cost low, preferably electric conductivity, photo, can be deposited on the first-class advantage of various substrates easily, can be made into biology sensor, ion sensitive sensor, gas sensor.
Summary of the invention
The objective of the invention is to, a kind of full-plastic biology that adopts organic material to make, the design of chemical sensor array are proposed, sensor keeps the corresponding function of Light Addressable Potentiometric Sensor, have simultaneously can be produced on the plastic foil, cost is low, technology is simple, easy and present advantages such as nylon membrane biochip compatibility.
A kind of full-plastic light of the present invention Addressable Biochemical Sensors chip is characterized in that, comprising:
One substrate when the substrate polymerization is shaped, embeds a contact conductor;
One nesa coating, this nesa coating is produced on the another side of substrate, with the contact conductor conducting;
One photoconductive layer assembly, this photoconductive layer is produced on the another side of nesa coating;
One insulation course is produced on the another side of photoconductive layer;
One conducting polymer thin film is produced on the another side of insulation course;
One biological sensitive membrane area grid is produced on the one side of insulation course;
Sealant sealing is contained in around the side of said structure, finally finishes the basic chips of device.
The transparent sheet formed by macromolecular material of this substrate wherein.
Wherein the photoconductive layer assembly comprises: a photoconductive layer is that insulating material is formed, and the grid of making by photoetching process is produced on the another side of nesa coating, and thickness is 1 μ m; One photo-conductive film is made by metal-free phthalocyanine compound or bacteria rhodopsin photoconductive material, is subjected to illumination to produce charge carrier, and photo-conductive film adopts the LB sedimentation to be produced on above the photoconductive layer.
Wherein the bio-sensitive film area grid comprises: an insulated part is made up of polyimide foam insulation, and the grid of making by photoetching process is produced on the another side of conducting polymer thin film; It is bio-sensitive film that conducting polymer thin film is not insulated the part of partly blocking.
Wherein this nesa coating is the film 100nm that is made by tin indium oxide ITO material.
Wherein insulation course adopts pvc material, and thickness is 50-80nm.
Wherein conducting polymer thin film adopts polypyrrole material, thickness 50-80nm.
Description of drawings
Fig. 1 is the LAPS structural drawing of prior art;
Fig. 2 is the measurement curve map that utilizes prior art LAPS device;
Fig. 3 is a full-plastic light Addressable Biochemical Sensors basic chips a structural drawing of the present invention;
Fig. 4 is a photoconductive layer assembly a4 structural drawing of the present invention;
Fig. 5 is a bio-sensitive film area grid a7 structural drawing of the present invention;
Fig. 6 is a bio-sensing film immobilization mould b structural drawing of the present invention;
Fig. 7 full-plastic light Addressable Biochemical Sensors has been fixed biomembranous chip C-structure figure.
Embodiment
See also Fig. 3 and Fig. 4, a kind of full-plastic light of the present invention Addressable Biochemical Sensors basic chips a as shown in Figure 3, comprising:
One substrate a1, the transparent sheet that this substrate a1 is made up of macromolecular material, substrate a1 embed a metal lead wire a2 when polymerization is shaped, guide another side into from the one side of substrate a1, become the working electrode of chip;
One nesa coating a3, this nesa coating a3 is produced on the another side of substrate a1, with contact conductor a2 conducting;
One photoconductive layer assembly a4, this photoconductive layer a4 is produced on the another side of nesa coating a3, and the addressing light beam sees through substrate a1 and bright conducting film a3 from substrate a1 back side illuminaton, be radiated at a certain unit of photoconductive layer of photoconductive layer assembly a4, will produce charge carrier becomes optical conductor;
See also Fig. 4, photoconductive layer assembly a4 structure as shown in Figure 4, wherein:
One light is isolated grid a41 and is made up of the light insulating material of black, and the grid of making by photoetching process is produced on the another side of nesa coating a3, makes each photic zone area equal;
One photo-conductive film a42 is made by photoconductive material, be subjected to illumination will produce charge carrier, photo-conductive film a42 is produced on above the photoconductive layer a41, because light is isolated the grating effect of grid a41, make photo-conductive film a42 be divided into photoconduction electric unit regularly arranged one by one, that light-receiving area equates;
One insulation course a5 is produced on the another side of photoconductive layer a4, plays a part capacitor dielectric, produces the electric charge accumulation at photoconductive layer a4 and insulation course interface;
One conducting polymer thin film a6 is produced on the another side of insulation course a5, to the solion sensitivity, in solution to be measured, the generation film potential will be responded in the surface as sensitive media, and conducting polymer thin film a6 combines with bio-sensitive film easily, realizes the immobilization of bio-sensitive film.
See also Fig. 5, bio-sensitive film area grid a7 as shown in Figure 5, wherein:
One insulated part a71 is made up of polyimide foam insulation, and the grid of making by photoetching process is produced on the another side of conducting polymer thin film a6, and conducting polymer thin film a6 surface is divided into equal zone;
It is exposed part that conducting polymer thin film a6 is not insulated the part that part a71 blocks, and exposed part is as ion-sensitive unit a72, and the area of each unit equates, its surface can the fixed biologically sensitive membrane;
See also Fig. 3, fluid sealant a8 is encapsulated in around the side of said structure, finally finishes the basic chips a of device.
See also Fig. 6, bio-sensing film immobilization mould b of the present invention, comprising:
One biological sensitive membrane immobilization mould b adopts common screen printing technique to make the silk screen half tone, and the grid of silk screen is b1 by the photoresist cover part all;
In the middle of one mould b has only the silk screen of a grid b2 being arranged is to expose, and the size dimension of grid is consistent with ion-sensitive unit a72 area;
See also Fig. 7, constitute full-plastic light Addressable Biochemical Sensors chip C:
One surface at full-plastic light Addressable Biochemical Sensors chip basic chips a, after surface clean and chemical modification, put bio-sensing film immobilization mould b above, the grid b2 that silk screen is being exposed and the exposed part a72 of bio-sensitive film area grid wherein a grid aim at, materials such as fixing various immune antiboidy that needs are fixing or single stranded DNA, require to be mixed with cross-linking reagent according to immobilization technology, use method for printing screen, respectively reagent is fixed to accordingly the surface that does not have the bio-sensing of insulated part a71 diaphragm area conducting polymer thin film a6, form corresponding bio-sensitive film, constitute full-plastic light Addressable Biochemical Sensors chip C.
When large-scale production, full-plastic light Addressable Biochemical Sensors chip basic chips a can repeatedly be produced on the plastic foil by substep; As bio-sensing film immobilization mould b silk screen, also will be accordingly branch repeatedly to be produced on a pull spring step online, realize the immobilized batch process of bio-sensitive film by screen printing technique.
Full-plastic light Addressable Biochemical Sensors chip C can be used for existing Light Addressable Potentiometric Sensor detection technique, forms the light Addressable Biochemical Sensors.

Claims (7)

1, a kind of full-plastic light Addressable Biochemical Sensors chip is characterized in that, comprising:
One substrate when the substrate polymerization is shaped, embeds a contact conductor;
One nesa coating, this nesa coating is produced on the another side of substrate, with the contact conductor conducting;
One photoconductive layer assembly, this photoconductive layer is produced on the another side of nesa coating;
One insulation course is produced on the another side of photoconductive layer;
One conducting polymer thin film is produced on the another side of insulation course;
One biological sensitive membrane area grid is produced on the one side of insulation course;
Sealant sealing is contained in around the side of said structure, finally finishes the basic chips of device.
2, full-plastic light Addressable Biochemical Sensors chip according to claim 1 is characterized in that, wherein the transparent sheet be made up of macromolecular material of this substrate.
3, full-plastic light Addressable Biochemical Sensors chip according to claim 1, it is characterized in that, wherein the photoconductive layer assembly comprises: a photoconductive layer is that insulating material is formed, and the grid of making by photoetching process is produced on the another side of nesa coating, and thickness is 1 μ m; One photo-conductive film is made by metal-free phthalocyanine compound or bacteria rhodopsin photoconductive material, is subjected to illumination to produce charge carrier, and photo-conductive film adopts the LB sedimentation to be produced on above the photoconductive layer.
4, full-plastic light Addressable Biochemical Sensors chip according to claim 1, it is characterized in that, wherein the bio-sensitive film area grid comprises: an insulated part is made up of polyimide foam insulation, and the grid of making by photoetching process is produced on the another side of conducting polymer thin film; It is bio-sensitive film that conducting polymer thin film is not insulated the part of partly blocking.
5, full-plastic light Addressable Biochemical Sensors chip according to claim 1 is characterized in that, wherein this nesa coating is the film 100nm that is made by tin indium oxide ITO material.
6, full-plastic light Addressable Biochemical Sensors chip according to claim 1 is characterized in that, wherein insulation course adopts pvc material, and thickness is 50-80nm.
7, full-plastic light Addressable Biochemical Sensors chip according to claim 1 is characterized in that, wherein conducting polymer thin film adopts polypyrrole material, thickness 50-80nm.
CN 03138431 2003-06-02 2003-06-02 Plastic light addressing biochemical sensor chip Expired - Fee Related CN1228627C (en)

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Application Number Priority Date Filing Date Title
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CN1228627C true CN1228627C (en) 2005-11-23

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Publication number Priority date Publication date Assignee Title
CN101430303B (en) * 2007-11-07 2012-05-23 中国科学院电子学研究所 Single-layer functional film urease biologic sensor chip and production method thereof
CN101666771B (en) * 2009-09-27 2012-07-25 南开大学 Light addressable potential sensor slide holder of sandwich structure
CN102103112B (en) * 2009-12-16 2013-05-01 中国科学院电子学研究所 Light addressing molecular imprinting array sensor for distinguishing residual pesticides
CN111735867B (en) * 2020-08-25 2020-11-27 天津海星辉科技有限公司 Carbohydrate lactobacillus metabolism analysis and detection device and method

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