CN1201899C - Nano sized intellectual driving unit with large feeding force for super precisively machining - Google Patents
Nano sized intellectual driving unit with large feeding force for super precisively machining Download PDFInfo
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- CN1201899C CN1201899C CN 03117036 CN03117036A CN1201899C CN 1201899 C CN1201899 C CN 1201899C CN 03117036 CN03117036 CN 03117036 CN 03117036 A CN03117036 A CN 03117036A CN 1201899 C CN1201899 C CN 1201899C
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Abstract
The present invention discloses a nano-class intelligent driver with big feeding force for ultraprecision processing, which is composed of a plurality of deformable bodies and heat-insulated bodies which are interphase in series, wherein each deformable body adopts a network structure. The present invention has the advantages that a symmetrical intellectual structure is adopts, so that the nano-class intelligent driver can realize the functions of self detection, self adaption and self learning; the intelligent structure can ensure the flatness of the feeding surface of the nano-class intelligent driver, so a stress concentration phenomenon in the process of feeding can be effectively avoided, each deformable body and each layer of each deformable body of the nano-class intelligent driver totally adopt the same materials and the same process, and after the present invention is made in integration mode, the present invention can eliminate stress concentration caused by the mismatch of thermal expansion coefficients; the intelligent driver is composed of a plurality of deformable bodies, adopts a series mode that the deformable bodies and the heat-insulated bodies are interphase, and thereby, on the premise that the precision is ensured, a feeding range is enlarged; the intelligent driver is required to realize the function of big feeding force, dynamic response time is lowered for design, and thereby, the driver is not suitable for high-frequency feeding occasions.
Description
Technical field
The present invention relates to a kind of nano-grade displacement intelligent drives parts that are used for ultraprecise processing with roughing feed power.
Background technology
Research to micrometer/nanometer level driver part mainly concentrates on following two aspects: be the nanoscale driver part research to little centripetal force on the one hand.Be accompanied by the nanoscale technology rapid development eighties in 20th century, research enters a climax to the nanoscale driver of little centripetal force.At micrometric displacement feeding field piezoelectric ceramic actuator with the most use,, obtained bigger development at present because of it is successfully applied in the various Scanning Probe Microscopy (SPM) of PSTM and appearance thereupon.It is ripe that this quasi-driver technology is tending towards, but because of driving force too little, the maximum pressure that can bear as homemade piezoelectric ceramic actuator is 20Kg, and the born maximum pressure of import is 75Kg, so be difficult to the ultraprecise processing machine philtrum of large-scale promotion to the varying load with the requirement of roughing feed power.Be micrometer/nanometer level driver part research on the other hand to roughing feed power.This respect is studied the influence that precision is not high and be heated, mainly be divided into two classes: a class is the driver part research to novelty, as the rareearth super magnetostrictive driver, marmen, superconduction formula driver etc., with the rareearth super magnetostrictive driver of using morely is example, its bearing capacity more than or equal to 5 times of the piezoelectric ceramics upper limit (〉=375Kg), because of driving force causes caloric value also big greatly, the giant magnetostrictive material heat distortion amount and the controlled displacement output of super-magnetostrictive drive that are caused by the drive coil heating are in the same order of magnitude, therefore must carry out strict thermal distortion compensation; Another kind of is to traditional driver part research, as sliding screw, ball screw, fluid pressure screw mandrel, gas-static screw mandrel, friction driver etc.Except studying the power of how reducing friction, reducing the problems such as permanent or short time set, go back of the influence of the hot rigidity of primary study to feed accuracy.
Statistics shows: at the ultraprecise manufacture field, the micrometer/nanometer level that especially has roughing feed power drives the field, and the error that is caused by thermal deformation accounts for 40%～70% of total error.Solving because of thermal walking causes the conventional method of error at present is passive elimination or passive compensation, and the passive compensation after producing with its thermal walking is not so good as thermal walking as the active feeding.
Summary of the invention
The purpose of this invention is to provide a kind of nano-grade displacement intelligent drives parts that are used for ultraprecise processing with roughing feed power.
It is made up of multi-disc deformable body, the alternate series system of heat guard, and each sheet deformable body adopts network structure.
Advantage of the present invention:
1) adopts symmetrical intelligence structure, make the nano-grade displacement driver part can realize the function of self check, self adaptation, self study;
2) intelligence structure can guarantee the flatness of nano-grade displacement driver part feeding face, thereby effectively prevents stress concentration phenomenon in the feeding process; Each sheet deformable body of nano-grade displacement driver part and each layer in each sheet all adopt identical materials and identical technology again, can eliminate the stress that causes because of coefficient of thermal expansion mismatch and concentrate after integrated making.Therefore this structure can realize the requirement of roughing feed power;
3) the intelligent drives parts are made up of the multi-disc deformable body, adopt the alternate series system with heat guard of deformable body on the structure, thereby increased feed range under the prerequisite that guarantees precision;
4) require the intelligent drives parts to realize the function of roughing feed power, in design, reduced dynamic response time, so these parts are not suitable for high frequency feeding occasion.
Description of drawings
Fig. 1 is the nano-grade displacement intelligent drives component controls block diagram with roughing feed power;
Fig. 2 is the nano-grade displacement intelligent drives block diagram with roughing feed power of connecting on the structure, among the figure: 1, the first deformable body 2 of ground floor heat guard, 3, the second deformable bodys of second layer heat guard, 4, the n sheet deformable bodys, 5, the n+1 layer heat guard 6;
Fig. 3 is each the sheet deformable body structural representation of intelligent drives parts with roughing feed power, among the figure: y parallel direction secondary series heating resistor 7,8,9,10, and temperature sensor 7 ', 8 ', 9 ', 10 ', y parallel direction the 5th row heating resistor 11,12,13,14, and temperature sensor 11 ', 12 ', 13 ', 14 ', y parallel direction the 8th row heating resistor 15,16,17,18, and temperature sensor 15 ', 16 ', 17 ', 18 ', y parallel direction the 11 row heating resistor 19,20,21,22, and temperature sensor 19 ', 20 ', 21 ', 22 ', x parallel direction secondary series heating resistor 23,24, and temperature sensor 23 ', 24 ', x parallel direction the 5th row heating resistor 25,26, and temperature sensor 25 ', 26 ', x parallel direction the 8th row heating resistor 27,28, and temperature sensor 27 ', 28 ', x parallel direction the 11 row heating resistor 29,30, and temperature sensor 29 ', 30 ', adiabatic face 31,32,33,34,35;
Fig. 4 is a ultraprecise surface grinding machine z direction secondary feeding structure schematic diagram, among the figure: emery wheel 36, grinding head body 37, nanoscale intelligent drives parts 38, guide rail 39, column 40, ball screw 41, nut 42, lathe bed 43, work stage 44, workpiece 45.
The specific embodiment
The crucial part of the present invention be each sheet deformable body with intelligence structure as executing agency, according to principle of expanding with heat and contracting with cold, have cancellated internal heat resource by controlling in each sheet deformable body, the temperature field is changed, and then reaches the purpose of control displacement field.Because the thermal walking of nano-grade displacement driver part feeding face is conduct active feeding directly, thereby Thermal Deformation is turned to active applications from passive compensation.Among Fig. 2, the nano-grade displacement intelligent drives parts with roughing feed power structurally adopt series system to form by each sheet deformable body, and purpose is not change under the condition of feeding resolution ratio, enlarges feed range as far as possible.Be convenient control, and prevent between each sheet deformable body and deformable body and coupling components between heat conduction mutually, between each sheet deformable body and all to adopt heat-insulating material between deformable body and the coupling components heat insulation, heat-insulating material can be selected asbestos, mineral wool, rock wool, Ovens, cork sheet or fiberboard for use.Each sheet deformable body adopts network structure, and purpose is to make things convenient for driver part to realize the function of self check, self adaptation, self study, and guarantees the flatness of nano-grade displacement intelligent drives parts feeding face, thereby effectively prevents the phenomenon that stress is concentrated in the feeding process.
It is the symmetrical structure of main material that each sheet deformable body all adopts with Si, as shown in Figure 3.Every deformable body is formed by eight layers, every layer all with Si as substrate, adopt integrated circuit manufacture method to make heating resistor and integrated temperature sensor in the relevant position.The making of integrated heating resistor is heat growth layer of silicon dioxide on silicon substrate at first, and the exposure etching forms window on oxide layer, injects (or diffusion) with ion then and mixes into impurity with the silicon substrate conductivity type opposite; Integrated temperature sensor can be a temp .-sensitive diodes, also can be thermo-sensitive resistor, and the manufacturing process of thermo-sensitive resistor is similar with conventional, electric-resistance, just some concrete technology differences.In each sheet deformable body each layer all with silicon as material, therefore utilize silicon--silicon bonding techniques, two silicon direct bondings that generate heating resistor and temperature sensitive device can be in the same place, realize the integrated making of deformable body, the advantage of this structure is except that silicon chip, heating resistor, the integrated making of temperature sensor, because of the stress that each layer of deformable body all adopts identical materials to eliminate to cause because of coefficient of thermal expansion mismatch is concentrated.
Each sheet deformable body ground floor and the 8th layer are made integrated heating resistor 7,11,15,19,10,14,18,22 along y direction second, five, eight, 11 row among Fig. 3, and integrated temperature sensor 7 ', 11 ', 15 ', 19 ', 10 ', 14 ', 18 ', 22 ' is uniformly-spaced made in the relevant position near the heating resistor; The deformable body second layer and layer 7 are along y direction second, five, eight, 11 row are made integrated heating resistor 7,11,15,19,10,14,18,22, integrated temperature sensor 7 ' is uniformly-spaced made in the relevant position near the heating resistor, 11 ', 15 ', 19 ', 10 ', 14 ', 18 ', 22 ', and at the another side of the second layer and layer 7 along directions X second, five, eight, 11 row are made heating resistor 23,25,27,29,24,26,28,30, integrated temperature sensor 23 ' is uniformly-spaced made in the relevant position near the heating resistor, 25 ', 27 ', 29 ', 24 ', 26 ', 28 ', 30 '; The 3rd layer of deformable body and layer 6 are along directions X second, five, eight, 11 row are made integrated heating resistor 23,25,27,29,24,26,28,30, integrated temperature sensor 23 ' is uniformly-spaced made in the relevant position near the heating resistor, 25 ', 27 ', 29 ', 24 ', 26 ', 28 ', 30 ', and at the another side of the 3rd layer and layer 6 along Y direction second, five, eight, 11 row are made heating resistor 8,12,16,20,9,13,17,21, integrated temperature sensor 8 ' is uniformly-spaced made in the relevant position near the heating resistor, 12 ', 16 ', 20 ', 9 ', 13 ', 17 ', 21 '; The 4th layer of deformable body and layer 5 are made integrated heating resistor 8,12,16,20,9,13,17,21 along y direction second, five, eight, 11 row, and integrated temperature sensor 8 ', 12 ', 16 ', 20 ', 9 ', 13 ', 17 ', 21 ' is uniformly-spaced made in the relevant position near the heating resistor.Must take all factors into consideration the layout of x direction and the integrated heating resistor of y direction, prevent that the heating resistor distance from causing that too closely stress is concentrated.Because every deformable body all has heat insulation layer up and down, and thermal source and sensor symmetric arrangement, therefore in a slice deformable body, be equivalent to have 5 adiabatic faces 31,32,33,34,35, such symmetrical structure helps the control of temperature field and displacement field.
Nanoscale intelligent drives component controls block diagram with roughing feed power as shown in Figure 1.Control system is core with the single-chip microcomputer, and links to each other with computer by the RS232C interface, thereby can enjoy all soft, hardware resources of computer.The input of displacement of targets amount can be passed through keyboard to set up, and also machine is handled the back download as calculated.In order better to guarantee the flatness of nanoscale intelligent drives parts feeding face, the deformable body temperature field must evenly especially require the temperature-averaging value of z direction each point to equate.Incorporate integrated temperature sensor is adopted in the detection in deformable body temperature field, because the deformable body change of temperature field is quasi-static, selects the control circuit of variable connector switching mode for use, and this mode had both been simplified circuit to quasistatic, reduced cost again.Control to integrated heating resistor is undertaken by row, total m group.The data/address bus timesharing of single-chip microcomputer enters corresponding D/A behind m latch, carry out power drive behind the signal condition, is controlled then.Adopt network structure that deformable body is heated, as long as the power of each row heating resistor is made corresponding adjustment with the variation of environment, state, just can guarantee that the feeding mask has flatness preferably in the feeding process, wherein, the detection of environment temperature can be adopted integrated temperature sensor DS1624.The feedback in existing each sheet deformable body temperature field in the control system has the feedback of ultraprecise displacement feeding amount again.The temperature field feedback is mainly used in the control of deformable body feeding facial plane degree, and the feedback of ultraprecise displacement is mainly used in the control of feed accuracy.
Fig. 4 is a ultraprecise surface grinding machine z direction secondary feeding schematic diagram, and the nanoscale intelligent drives parts with roughing feed power are used in the second level, are one embodiment of the present of invention.This secondary feed system has the advantages that feed range is wide, centripetal force is big, precision is high, the first order is a coarse feed, drive the nut rotation by AC servo motor, thereby cause ball screw z direction to move up and down, because ball screw, nanoscale intelligent drives parts, grinding head body fuse, therefore the upper and lower motion of ball screw drives the upper and lower motion of grinding head body, and the purpose of first order feeding is to enlarge feed range, improves feeding efficient; The second level is the nanoscale feeding, and after first order feeding was finished, promptly ball screw no longer rotated, and by the small feeding of nanoscale driver part, makes grinding head body make minor variations up and down, thereby reaches the purpose of Z direction feeding with high precision.
Claims (3)
1. one kind is used for the nano-grade displacement intelligent drives parts with roughing feed power that ultraprecise is processed, it is characterized in that, it is made up of multi-disc deformable body, the alternate series system of heat guard, each sheet deformable body adopts network structure, it is the symmetrical structure of main material that described deformable body adopts with Si, every deformable body is formed by eight layers, every layer all with Si as substrate, adopt integrated circuit manufacture method to make heating resistor and integrated temperature sensor in the relevant position.
2. a kind of nano-grade displacement intelligent drives parts that are used for ultraprecise processing according to claim 1 with roughing feed power, it is characterized in that described every deformable body ground floor and the 8th layer make integrated heating resistor (7), (11), (15), (19), (10), (14), (18), (22) along y direction second, five, eight, 11 row, integrated temperature sensor (7 '), (11 '), (15 '), (19 '), (10 '), (14 '), (18 '), (22 ') are uniformly-spaced made in the relevant position near the heating resistor; The deformable body second layer and layer 7 are along y direction second, five, eight, 11 row are made integrated heating resistor (7), (11), (15), (19), (10), (14), (18), (22), integrated temperature sensor (7 ') is uniformly-spaced made in the relevant position near the heating resistor, (11 '), (15 '), (19 '), (10 '), (14 '), (18 '), (22 '), and at the another side of the second layer and layer 7 along directions X second, five, eight, 11 row are made heating resistor (23), (25), (27), (29), (24), (26), (28), (30), integrated temperature sensor (23 ') is uniformly-spaced made in the relevant position near the heating resistor, (25 '), (27 '), (29 '), (24 '), (26 '), (28 '), (30 '); The 3rd layer of deformable body and layer 6 are along directions X second, five, eight, 11 row are made integrated heating resistor (23), (25), (27), (29), (24), (26), (28), (30), integrated temperature sensor (23 ') is uniformly-spaced made in the relevant position near the heating resistor, (25 '), (27 '), (29 '), (24 '), (26 '), (28 '), (30 '), and at the another side of the 3rd layer and layer 6 along Y direction second, five, eight, 11 row are made heating resistor (8), (12), (16), (20), (9), (13), (17), (21), integrated temperature sensor (8 ') is uniformly-spaced made in the relevant position near the heating resistor, (12 '), (16 '), (20 '), (9 '), (13 '), (17 '), (21 '); The 4th layer of deformable body and layer 5 are made integrated heating resistor (8), (12), (16), (20), (9), (13), (17), (21) along y direction second, five, eight, 11 row, and integrated temperature sensor (8 '), (12 '), (16 '), (20 '), (9 '), (13 '), (17 '), (21 ') are uniformly-spaced made in the relevant position near the heating resistor.
3. a kind of nano-grade displacement intelligent drives parts with roughing feed power that are used for ultraprecise processing according to claim 1 is characterized in that described heat guard material adopts asbestos, mineral wool, rock wool, Ovens, cork sheet or fiberboard.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03117036 CN1201899C (en) | 2003-05-16 | 2003-05-16 | Nano sized intellectual driving unit with large feeding force for super precisively machining |
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| CN 03117036 CN1201899C (en) | 2003-05-16 | 2003-05-16 | Nano sized intellectual driving unit with large feeding force for super precisively machining |
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| CN1472038A CN1472038A (en) | 2004-02-04 |
| CN1201899C true CN1201899C (en) | 2005-05-18 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN100408939C (en) * | 2004-10-29 | 2008-08-06 | 浙江大学 | Nanometer class displacement drive element with bilateral symmetric structure based on semiconductor refrigerator |
| CN1321314C (en) * | 2004-11-04 | 2007-06-13 | 浙江大学 | Semiactive control based adiabatic module for coupling between components |
| RU2605399C2 (en) * | 2011-03-24 | 2016-12-20 | Эрвин Юнкер Машиненфабрик Гмбх | Grinding machine with grinding spindle unit rotary support and method of grinding spindle rotation in grinding machine |
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