CN1472038A - Nano sized intellectual driving unit with large feeding force for super precisively machining - Google Patents
Nano sized intellectual driving unit with large feeding force for super precisively machining Download PDFInfo
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- CN1472038A CN1472038A CNA031170366A CN03117036A CN1472038A CN 1472038 A CN1472038 A CN 1472038A CN A031170366 A CNA031170366 A CN A031170366A CN 03117036 A CN03117036 A CN 03117036A CN 1472038 A CN1472038 A CN 1472038A
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- 238000003754 machining Methods 0.000 title abstract description 3
- 239000002105 nanoparticle Substances 0.000 title 1
- 238000000034 method Methods 0.000 claims abstract description 9
- 238000010438 heat treatment Methods 0.000 claims description 43
- 239000000463 material Substances 0.000 claims description 9
- 238000012545 processing Methods 0.000 claims description 8
- 239000012212 insulator Substances 0.000 claims description 7
- 239000000758 substrate Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- -1 Ovens Substances 0.000 claims description 2
- 239000010425 asbestos Substances 0.000 claims description 2
- 239000007799 cork Substances 0.000 claims description 2
- 239000011491 glass wool Substances 0.000 claims description 2
- 239000011490 mineral wool Substances 0.000 claims description 2
- 229910052895 riebeckite Inorganic materials 0.000 claims description 2
- 230000008901 benefit Effects 0.000 abstract description 4
- 230000003044 adaptive effect Effects 0.000 abstract 1
- 239000000843 powder Substances 0.000 abstract 1
- 238000006073 displacement reaction Methods 0.000 description 7
- 238000011160 research Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 4
- 230000008569 process Effects 0.000 description 4
- 230000036760 body temperature Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 239000000919 ceramic Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000012141 concentrate Substances 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 238000011161 development Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 238000004621 scanning probe microscopy Methods 0.000 description 2
- 238000012935 Averaging Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 229910001651 emery Inorganic materials 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000001815 facial effect Effects 0.000 description 1
- 230000002706 hydrostatic effect Effects 0.000 description 1
- 230000008676 import Effects 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 210000000088 lip Anatomy 0.000 description 1
- 238000004647 photon scanning tunneling microscopy Methods 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 235000012239 silicon dioxide Nutrition 0.000 description 1
- 239000000377 silicon dioxide Substances 0.000 description 1
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Abstract
A nano-class intelligent driver with high feeding powder for ultraprecision machining is composed of multiple deformable bodies and multiple insulating bodies, all of which are alternatively arranged. Its advantages are symmetrical structure for self-test, adaptive and self-leaning functions, no stress concentration in feeding procedure, high precision and wide feeding range.
Description
Technical field
The present invention relates to a kind of nanometer intelligent drives parts that are used for ultraprecise processing with roughing feed power.
Background technique
Research to micrometer/nanometer level driver part mainly concentrates on following two aspects: be the nanometer driver part research to little feed force on the one hand.Be accompanied by the nanometer technology rapid development eighties in 20th century, research enters a climax to the nanometer driver of little feed force.At micrometric displacement feeding field piezoelectric ceramic actuator with the most use,, obtained bigger development at present because of it is successfully applied in the various Scanning Probe Microscopy (SPM) of PSTM and appearance thereupon.It is ripe that this quasi-driver technology is tending towards, but because of driving force too little, the pressure maximum that can bear as homemade piezoelectric ceramic actuator is 20Kg, and the born pressure maximum of import is 75Kg, so be difficult to the ultraprecise processing machine philtrum of large-scale promotion to the varying load with the requirement of roughing feed power.Be micrometer/nanometer level driver part research on the other hand to roughing feed power.This respect is studied the influence that precision is not high and be heated, mainly be divided into two classes: a class is the driver part research to novelty, as the rareearth super magnetostrictive driver, marmen, superconduction formula driver etc., with the rareearth super magnetostrictive driver of using morely is example, its bearing capacity more than or equal to 5 times of the piezoelectric constant upper limit (〉=375Kg), because of driving force causes heating value also big greatly, the super magnetostriction material heat distortion amount and the controlled displacement output of super-magnetostrictive drive that are caused by the drive coil heating are in the same order of magnitude, therefore must carry out strict thermal distortion compensation; Another kind of is to traditional driver part research, as sliding screw, ball screw, hydrostatic pressure screw mandrel, gas-static screw mandrel, friction driver etc.Except studying the power of how reducing friction, reducing the problems such as permanent or short time set, go back of the influence of the hot rigidity of primary study to feed accuracy.
Statistics shows: at the ultraprecise manufacture field, the micrometer/nanometer level that especially has roughing feed power drives the field, and the error that is caused by thermal distortion accounts for 40% ~ 70% of total error.Solving because of thermal walking causes the conventional method of error at present is passive elimination or passive compensation, with the passive compensation after its thermal walking generation, be not so good as thermal walking as the active feeding, the proposition of this patent, just be based on this original thought, wishing Thermal Deformation to be turned to active applications from passive compensation in ultraprecise machining robot field.
Summary of the invention
The purpose of this invention is to provide a kind of nanometer intelligent drives parts that are used for ultraprecise processing with roughing feed power.
It is made up of multi-disc deformable body, the alternate serial fashion of heat insulator, and each sheet deformable body adopts reticular structure.
Advantage of the present invention:
1) adopts symmetrical intelligence structure, make the nanometer driver part can realize the function of self check, self adaption, self study;
2) intelligence structure can guarantee the planeness of nanometer driver part feeding face, thereby effectively prevents stress concentration phenomenon in the feeding process; Each sheet deformable body of nanometer driver part and each layer in each sheet all adopt identical materials and identical technology again, can eliminate the stress that causes because of coefficient of thermal expansion mismatch and concentrate after integrated making.Therefore this structure can realize the requirement of roughing feed power;
3) the intelligent drives parts are made up of the multi-disc deformable body, adopt the alternate serial fashion with heat insulator of deformable body on the structure, thereby increased feed range under the prerequisite that guarantees precision;
4) require the intelligent drives parts to realize the function of roughing feed power, in design, reduced dynamic response time, so these parts are not suitable for high frequency feeding occasion.
Description of drawings
Fig. 1 is the nanometer intelligent drives component controls block diagram with roughing feed power;
Fig. 2 is the nanometer intelligent drives block diagram with roughing feed power of connecting on the structure, among the figure: 1, the first deformable body 2 of first layer heat insulator, 3, the second deformable bodys of second layer heat insulator, 4, the n sheet deformable bodys, 5, the n+1 layer heat insulator 6;
Fig. 3 is each the sheet deformable body structural representation of intelligent drives parts with roughing feed power, among the figure: y parallel direction secondary series heating resistor and temperature transducer 7,8,9,10, y parallel direction the 5th row heating resistor and temperature transducer 11,12,13,14, y parallel direction the 8th row heating resistor and temperature transducer 15,16,17,18, y parallel direction the 11 row heating resistor and temperature transducer 19,20,21,22, x parallel direction secondary series heating resistor and temperature transducer 23,24, x parallel direction the 5th row heating resistor and temperature transducer 25,26, x parallel direction the 8th row heating resistor and temperature transducer 27,28, x parallel direction the 11 row heating resistor and temperature transducer 29,30, adiabatic face 31,32,33,34,35;
Fig. 4 is a ultraprecise surface grinding machine z direction secondary feeding structure schematic representation, among the figure: emery wheel 36, grinding head body 37, nanometer intelligent drives parts 38, guide rail 39, column 40, ball screw 41, nut 42, lathe bed 43, work stage 44, workpiece 45.
Embodiment
The crucial part of the present invention be each sheet deformable body with intelligence structure as actuator, according to the swollen shrinkage principle of heat, have cancellated internal heat resource by controlling in each sheet deformable body, the temperature field is changed, and then reaches the purpose of control displacement field.Because the thermal walking of nanometer driver part feeding face is conduct active feeding directly, thereby Thermal Deformation is turned to active applications from passive compensation.Among Fig. 2, the nanometer intelligent drives parts with roughing feed power structurally adopt serial fashion to form by each sheet deformable body, and purpose is not change under the condition of feeding resolution, enlarges feed range as far as possible.Be convenient control, and prevent between each sheet deformable body and deformable body and coupling member between heat conduction mutually, between each sheet deformable body and all to adopt thermoinsulation material between deformable body and the coupling member heat insulation, thermoinsulation material can be selected asbestos, glass wool, rock wool, Ovens, cork board, wad etc. for use.Each sheet deformable body adopts reticular structure, and purpose is to make things convenient for driver part to realize the function of self check, self adaption, self study, and guarantees the planeness of nanometer intelligent drives parts feeding face, thereby effectively prevents the phenomenon that stress is concentrated in the feeding process.
It is the symplex structure of main material that each sheet deformable body all adopts with Si, as shown in Figure 3.Every deformable body is formed by eight layers, every layer all with Si as substrate, adopt integrated circuit manufacture method to make heating resistor and integrated temperature sensor in the relevant position.The making of integrated heating resistor is heat growth layer of silicon dioxide on silicon substrate at first, and the exposure etching forms window on oxide layer, injects (or diffusion) with ion then and mixes into impurity with the silicon substrate conductivity type opposite; Integrated temperature sensor can be a temp .-sensitive diodes, also can be thermo-sensitive resistor, and the working process of thermo-sensitive resistor is similar with conventional, electric-resistance, just some concrete technology differences.In each sheet deformable body each layer all with silicon as material, therefore utilize silicon-silicon bonding techniques, two silicon direct bondings that generate heating resistor and temperature sensitive device can be in the same place, realize the integrated making of deformable body, the advantage of this structure is except that silicon chip, heating resistor, the integrated making of temperature transducer, because of the stress that each layer of deformable body all adopts identical materials to eliminate to cause because of coefficient of thermal expansion mismatch is concentrated.
Each sheet deformable body first layer and the 8th layer are made integrated heating resistor 7,11,15,19,10,14,18,22 along y direction second, five, eight, 11 row among Fig. 3, and integrated temperature sensor 7,11,15,19,10,14,18,22 is uniformly-spaced made in the relevant position near the heating resistor; The deformable body second layer and layer 7 are made integrated heating resistor 7,11,15,19,10,14,18,22 along y direction second, five, eight, 11 row, integrated temperature sensor 7,11,15,19,10,14,18,22 is uniformly-spaced made in the relevant position near the heating resistor, and the another side at the second layer and layer 7 is made heating resistor 23,25,27,29,24,26,28,30 along directions X second, five, eight, 11 row, and integrated temperature sensor 23,25,27,29,24,26,28,30 is uniformly-spaced made in the relevant position near the heating resistor; The 3rd layer of deformable body and layer 6 are made integrated heating resistor 23,25,27,29,24,26,28,30 along directions X second, five, eight, 11 row, integrated temperature sensor 23,25,27,29,24,26,28,30 is uniformly-spaced made in the relevant position near the heating resistor, and make heating resistor 8,12,16,20,9,13,17,21 at the 3rd layer of another side with layer 6 along Y direction second, five, eight, 11 row, integrated temperature sensor 8,12,16,20,9,13,17,21 is uniformly-spaced made in the relevant position near the heating resistor; The 4th layer of deformable body and layer 5 are made integrated heating resistor 8,12,16,20,9,13,17,21 along y direction second, five, eight, 11 row, and integrated temperature sensor 8,12,16,20,9,13,17,21 is uniformly-spaced made in the relevant position near the heating resistor.Must take all factors into consideration the layout of x direction and the integrated heating resistor of y direction, prevent that the heating resistor distance from causing that too closely stress is concentrated.Because every deformable body all has heat insulation layer up and down, and thermal source and sensor symmetric arrangement, therefore in a slice deformable body, be equivalent to have 5 adiabatic faces 31,32,33,34,35, such symplex structure helps the control of temperature field and displacement field.
Nanometer intelligent drives component controls block diagram with roughing feed power as shown in Figure 1.Control system is core with the single-chip microcomputer, and links to each other with computer by the RS232C interface, thereby can enjoy all soft, hardware resources of computer.The input of displacement of targets amount can be passed through keyboard to set up, and also machine is handled the back download as calculated.In order better to guarantee the planeness of nanometer intelligent drives parts feeding face, the deformable body temperature field must evenly especially require the temperature-averaging value of z direction each point to equate.Incorporate integrated temperature sensor is adopted in the detection in deformable body temperature field, because the deformable body change of temperature field is quasi-static, selects the control circuit of variable connector switching mode for use, and this mode had both been simplified circuit to quasistatic, reduced cost again.Control to integrated heating resistor is undertaken by row, total m group.The data/address bus timesharing of single-chip microcomputer enters corresponding D/A behind m latch, carry out power drive behind the signal condition, is controlled then.Adopt reticular structure that deformable body is heated, as long as the power of each row heating resistor is made corresponding adjustment with the variation of environment, state, just can guarantee that the feeding mask has planeness preferably in the feeding process, wherein, the detection of ambient temperature can be adopted integrated temperature sensor DS1624.The feedback in existing each sheet deformable body temperature field in the control system has the feedback of ultraprecise displacement feeding amount again.The temperature field feedback is mainly used in the control of deformable body feeding facial plane degree, and the feedback of ultraprecise displacement amount is mainly used in the control of feed accuracy.
Fig. 4 is a ultraprecise surface grinding machine z direction secondary feeding schematic representation, and the nanometer intelligent drives parts with roughing feed power are used in the second level, are one embodiment of the present of invention.This secondary feeding system has the advantages that feed range is wide, feed force is big, precision is high, the first order is a coarse feed, drive the nut rotation by AC servo motor, thereby cause ball screw z direction to move up and down, because ball screw, nanometer intelligent drives parts, grinding head body fuse, therefore the upper and lower motion of ball screw drives the upper and lower motion of grinding head body, and the purpose of first order feeding is to enlarge feed range, improves feeding efficient; The second level is the nanometer feeding, and after first order feeding was finished, promptly ball screw no longer rotated, and by the small feeding of nanometer driver part, makes grinding head body make minor variations up and down, thereby reaches the purpose of Z direction feeding with high precision.
Claims (4)
1. the nanometer intelligent drives parts with roughing feed power that are used for ultraprecise processing is characterized in that it is made up of multi-disc deformable body, the alternate serial fashion of heat insulator, and each sheet deformable body adopts reticular structure.
2. a kind of nanometer intelligent drives parts that are used for ultraprecise processing according to claim 1 with roughing feed power, it is characterized in that it is the symplex structure of main material that said deformable body adopts with Si, every deformable body is formed by eight layers, every layer all with Si as substrate, adopt integrated circuit manufacture method to make heating resistor and integrated temperature sensor in the relevant position.
3. a kind of nanometer intelligent drives parts that are used for ultraprecise processing according to claim 1 with roughing feed power, it is characterized in that said every deformable body first layer and the 8th layer make integrated heating resistor (7), (11), (15), (19), (10), (14), (18), (22) along y direction second, five, eight, 11 row, integrated temperature sensor (7), (11), (15), (19), (10), (14), (18), (22) are uniformly-spaced made in the relevant position near the heating resistor; The deformable body second layer and layer 7 are along y direction second, five, eight, 11 row are made integrated heating resistor (7), (11), (1 5), (19), (10), (14), (18), (22), integrated temperature sensor (7) is uniformly-spaced made in the relevant position near the heating resistor, (11), (15), (19), (10), (14), (18), (22), and at the another side of the second layer and layer 7 along directions X second, five, eight, 11 row are made heating resistor (23), (25), (27), (29), (24), (26), (28), (30), integrated temperature sensor (23) is uniformly-spaced made in the relevant position near the heating resistor, (25), (27), (29), (24), (26), (28), (30); The 3rd layer of deformable body and layer 6 are along directions X second, five, eight, 11 row are made integrated heating resistor (23), (25), (27), (29), (24), (26), (28), (30), integrated temperature sensor (23) is uniformly-spaced made in the relevant position near the heating resistor, (25), (27), (29), (24), (26), (28), (30), and at the another side of the 3rd layer and layer 6 along Y direction second, five, eight, 11 row are made heating resistor (8), (12), (16), (20), (9), (13), (17), (21), integrated temperature sensor (8) is uniformly-spaced made in the relevant position near the heating resistor, (12), (16), (20), (9), (13), (17), (21); The 4th layer of deformable body and layer 5 are made integrated heating resistor (8), (12), (16), (20), (9), (13), (17), (21) along y direction second, five, eight, 11 row, and integrated temperature sensor (8), (12), (16), (20), (9), (13), (17), (21) are uniformly-spaced made in the relevant position near the heating resistor.
4. a kind of nanometer intelligent drives parts with roughing feed power that are used for ultraprecise processing according to claim 1 is characterized in that said heat insulator material adopts asbestos, glass wool, rock wool, Ovens, cork board, wad.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 03117036 CN1201899C (en) | 2003-05-16 | 2003-05-16 | Nano sized intellectual driving unit with large feeding force for super precisively machining |
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| CN 03117036 CN1201899C (en) | 2003-05-16 | 2003-05-16 | Nano sized intellectual driving unit with large feeding force for super precisively machining |
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| CN1472038A true CN1472038A (en) | 2004-02-04 |
| CN1201899C CN1201899C (en) | 2005-05-18 |
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1321314C (en) * | 2004-11-04 | 2007-06-13 | 浙江大学 | Semiactive control based adiabatic module for coupling between components |
| CN100408939C (en) * | 2004-10-29 | 2008-08-06 | 浙江大学 | Nanometer class displacement drive element with bilateral symmetric structure based on semiconductor refrigerator |
| RU2605399C2 (en) * | 2011-03-24 | 2016-12-20 | Эрвин Юнкер Машиненфабрик Гмбх | Grinding machine with grinding spindle unit rotary support and method of grinding spindle rotation in grinding machine |
-
2003
- 2003-05-16 CN CN 03117036 patent/CN1201899C/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100408939C (en) * | 2004-10-29 | 2008-08-06 | 浙江大学 | Nanometer class displacement drive element with bilateral symmetric structure based on semiconductor refrigerator |
| CN1321314C (en) * | 2004-11-04 | 2007-06-13 | 浙江大学 | Semiactive control based adiabatic module for coupling between components |
| RU2605399C2 (en) * | 2011-03-24 | 2016-12-20 | Эрвин Юнкер Машиненфабрик Гмбх | Grinding machine with grinding spindle unit rotary support and method of grinding spindle rotation in grinding machine |
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| Publication number | Publication date |
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| CN1201899C (en) | 2005-05-18 |
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