CN110310695B - Variable-friction series-parallel two-degree-of-freedom stick-slip driving precision positioning platform - Google Patents
Variable-friction series-parallel two-degree-of-freedom stick-slip driving precision positioning platform Download PDFInfo
- Publication number
- CN110310695B CN110310695B CN201910500124.9A CN201910500124A CN110310695B CN 110310695 B CN110310695 B CN 110310695B CN 201910500124 A CN201910500124 A CN 201910500124A CN 110310695 B CN110310695 B CN 110310695B
- Authority
- CN
- China
- Prior art keywords
- guide rail
- platform
- piezoelectric ceramic
- parallel
- ceramic driver
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Images
Classifications
-
- G—PHYSICS
- G12—INSTRUMENT DETAILS
- G12B—CONSTRUCTIONAL DETAILS OF INSTRUMENTS, OR COMPARABLE DETAILS OF OTHER APPARATUS, NOT OTHERWISE PROVIDED FOR
- G12B5/00—Adjusting position or attitude, e.g. level, of instruments or other apparatus, or of parts thereof; Compensating for the effects of tilting or acceleration, e.g. for optical apparatus
Landscapes
- General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
Abstract
The invention discloses a variable friction force series-parallel two-degree-of-freedom stick-slip driving precision positioning platform.A base is provided with two Y-direction guide rail supporting bosses, and the outer side of each Y-direction guide rail supporting boss is provided with a Y-direction crossed roller guide rail; the middle of the base is provided with a displacement input mechanism which adopts a double parallel plate type flexible hinge and a parallel symmetrical structure, the center of the base is provided with a square platform, the center of the square platform is provided with a Z-axis piezoelectric ceramic driver, and the Z-axis piezoelectric ceramic driver is provided with a ball cap; the outer side of the displacement input mechanism is provided with an X-axis piezoelectric ceramic driver and a Y-axis piezoelectric ceramic driver which are mutually vertical; the center of the middle connecting layer is a rectangular through hole, a pair of X-direction guide rail supporting bosses are arranged, and X-direction crossed roller guide rails are arranged on the outer side of each X-direction guide rail supporting boss; the square platform is provided with a friction block, the center of the friction block is provided with a square displacement table, and the top end of the square displacement table is provided with a friction gasket. The invention is suitable for the fields of microelectronic manufacturing, biomedical engineering, micro-nano operation, ultra-precision machining and the like.
Description
Technical Field
The invention relates to a precision positioning platform, in particular to a friction-variable series-parallel two-degree-of-freedom stick-slip driving precision positioning platform.
Background
With the continuous development of the fields of microelectronic manufacturing, biomedical engineering, micro-nano operation, ultra-precision machining and the like, the fields also put forward higher requirements on large-stroke precision positioning platforms. The existing micro positioning platform technology has been greatly developed, but still has a larger lifting space in the aspects of multi-degree-of-freedom large-stroke precision positioning, and has higher and higher requirements on the aspects of resolution, load capacity and the like.
The traditional large-stroke precision positioning platform usually adopts a structural form of motor driving and guide rail guiding, can realize large-stroke positioning and larger load capacity, and cannot meet the high-precision positioning requirement in the fields of micro-nano operation and the like due to the limitation of the precision and the resolution of a motor. Compared with a transmission motor, the piezoelectric ceramic driver has the advantages of high rigidity, small volume and high resolution, can realize nanoscale precision positioning after being matched with a flexible hinge, but is limited by the stroke of the driver and the stress of the hinge, and the maximum stroke of the flexible micro-positioning platform is usually limited to the micrometer level.
In order to realize micro-nano precise positioning in millimeter-scale stroke, a piezoelectric driving positioning platform adopting a stick-slip mechanism has been widely applied. The displacement of the driven object is controlled by utilizing the difference between the maximum static friction force and the sliding friction force, the stick-slip driving positioning platform can simultaneously realize large-range movement and nanometer positioning resolution, and the stick-slip driving positioning platform is simple in structure and easy to miniaturize. However, in the two-degree-of-freedom stick-slip positioning platform, a structural form of stacking two single-degree-of-freedom stick-slip positioning platforms in series is usually adopted, the bottom platform needs to bear the upper platform and drive the upper platform to realize movement, and the dynamic characteristics and the load capacity of the bottom platform are limited. And because the stick-slip driving platform has a return slip condition, the step pitch is reduced when bearing the load, and the speed is obviously reduced.
Disclosure of Invention
The invention aims to overcome the defects in the prior art and provides a variable-friction parallel-series two-degree-of-freedom stick-slip driving precision positioning platform, namely a two-degree-of-freedom large-stroke and high-precision positioning platform based on parallel-series layout and variable-friction piezoelectric stick-slip driving. The positioning platform is characterized in that a stick-slip driving mechanism is adopted, and large stroke and high precision can be realized at the same time; the two groups of crossed roller guide rails are arranged in a serial and crossed manner, so that two-degree-of-freedom output decoupling can be realized; the two-degree-of-freedom input part adopts a flexible structure arranged in parallel, so that high-frequency precise motion and input decoupling can be realized; the friction force between the friction block and the sliding platform can be dynamically adjusted through the piezoelectric ceramics. The positioning platform has the characteristics of large stroke, high precision, high speed, strong load capacity and input and output double decoupling.
The purpose of the invention is realized by the following technical scheme.
The invention discloses a variable friction force series-parallel two-degree-of-freedom stick-slip driving precision positioning platform which comprises a base, an intermediate connecting layer and a sliding platform which are sequentially arranged from bottom to top, wherein Y-direction crossed roller guide rails are arranged between the base and the intermediate connecting layer, and X-direction crossed roller guide rails are arranged between the intermediate connecting layer and the sliding platform;
the base is of a rectangular structure, two Y-direction guide rail supporting bosses which are parallel to each other are symmetrically arranged on the upper surface of the base, and a group of Y-direction crossed roller guide rails are arranged on the outer side of each Y-direction guide rail supporting boss; a displacement input mechanism is arranged in the middle of the base, motion guide and two-degree-of-freedom decoupling are realized by adopting a double-parallel-plate flexible hinge and a parallel symmetrical structure, a square platform is arranged in the center of the displacement input mechanism, a circular groove and a bolt hole are machined in the center of the square platform, a Z-axis piezoelectric ceramic driver is arranged in the circular groove, and a ball cap is arranged at the top end of the Z-axis piezoelectric ceramic driver; two mutually perpendicular empty grooves are formed in the outer side of the displacement input mechanism, and an X-axis piezoelectric ceramic driver and a Y-axis piezoelectric ceramic driver are respectively arranged in the two empty grooves;
the middle connecting layer is of a rectangular structure, a rectangular through hole is formed in the center of the middle connecting layer, a pair of X-direction guide rail supporting bosses which are parallel to each other are symmetrically arranged on the upper surface of the middle connecting layer, the rectangular through hole is formed between the two X-direction guide rail supporting bosses, and a group of X-direction crossed roller guide rails are arranged on the outer side of each X-direction guide rail supporting boss;
a friction block is fixed at the top of the square platform of the displacement input mechanism and penetrates through the rectangular through hole of the middle connecting layer; the friction block is of a hollow structure, a square displacement table is machined in the center of the friction block, a double-layer parallel plate type hinge structure is arranged on the upper half portion of the friction block, and a friction gasket is arranged at the top end of the square displacement table.
The X-axis piezoelectric ceramic driver, the Y-axis piezoelectric ceramic driver and the Z-axis piezoelectric ceramic driver are all pre-tightened through pre-tightening bolts and fixed through the pre-tightening bolts.
The middle connecting layer is connected with the outer side of the Y-direction crossed roller guide rail and fixed through fastening bolts, bolt holes are machined in the outer side of the middle connecting layer, and pre-tightening bolts are installed.
The sliding platform is connected with the outer side of the X-direction crossed roller guide rail and fixed through fastening bolts, bolt holes are machined in the outer side of the sliding platform, and pre-tightening bolts are installed.
The Z-axis piezoelectric ceramic driver is in contact with the friction block through the ball cap.
The friction pad is contacted with the bottom surface of the sliding platform after the Z-shaped position is adjusted.
Compared with the prior art, the technical scheme of the invention has the following beneficial effects:
the invention adopts a piezoelectric stick-slip driving mechanism, and can simultaneously realize large-stroke displacement output and high-precision resolution; the displacement input mechanism adopts a parallel flexible structure, can realize two-degree-of-freedom decoupling displacement output, and has the characteristics of high speed, high precision, high stability and the like, and the dynamic performance is good; the X-direction and Y-direction crossed roller guide rails are arranged in a series superposition manner, so that the displacement decoupling effect is good, and the installation is convenient; the bottom surface of the friction block is provided with a piezoelectric ceramic driver which can adjust the friction force between the friction plate and the output platform; the Z-axis piezoelectric ceramic driver is provided with a ball cap to protect the driver from being damaged by shearing force; the parallel connection and series connection structure is adopted, so that the rigidity and the bearing capacity of the motion platform can be improved.
Drawings
FIG. 1 is a schematic plan view of the present invention;
FIG. 2 is a schematic view of a base structure according to the present invention;
FIG. 3 is a schematic view of an intermediate bonding layer structure according to the present invention;
FIG. 4 is a schematic view of the friction block structure of the present invention.
FIG. 5 is a schematic diagram of the driving voltages of the X-axis and Y-axis piezoelectric ceramic drivers according to the present invention;
FIG. 6 is a schematic diagram of the driving voltage of the Z-axis piezoelectric ceramic driver according to the present invention.
Reference numerals: the flexible hinge comprises a base 1, a guide rail supporting boss 2Y, a flexible hinge with double parallel plates 3, a square platform 4, a piezoelectric ceramic driver with an axis 5X, a piezoelectric ceramic driver with an axis 6Y, a piezoelectric ceramic driver with an axis 7Z, a roller guide rail with a cross direction 8Y, a connecting layer 9 in the middle, a guide rail supporting boss with an axis 10X, a roller guide rail with a cross direction 11X, a sliding platform 12, a friction block 13, a friction gasket 14, a fastening bolt 15, a pretightening bolt 16 and a ball cap 17.
Detailed Description
In order to further understand the contents, features and effects of the present invention, the following embodiments are illustrated and described in detail with reference to the accompanying drawings.
As shown in fig. 1 to 4, the variable friction force series-parallel two-degree-of-freedom stick-slip driving precision positioning platform comprises a base 1, an intermediate connecting layer 9 and a sliding platform 12 which are sequentially arranged from bottom to top, wherein a Y-direction crossed roller guide rail 8 is arranged between the base 1 and the intermediate connecting layer 9, and an X-direction crossed roller guide rail 11 is arranged between the intermediate connecting layer 9 and the sliding platform 12.
The base 1 is set to be a rectangular structure and comprises a guide rail supporting part and a displacement input mechanism. Base 1 upper surface symmetry is provided with two Y to guide rail support boss 2 that are parallel to each other, and it has the bolt hole to be used for fixed guide to support 2 surface processing at Y to guide rail simultaneously, and every Y all is provided with a set of Y to alternately roller guide 8 to the guide rail support boss 2 outside. A displacement input mechanism is arranged in the middle of the base 1, and motion guiding and two-degree-of-freedom decoupling are achieved by adopting double parallel plate type flexible hinges 3 and a parallel symmetrical structure. The displacement input mechanism is arranged between the two groups of Y-direction crossed roller guide rails 8, the center of the displacement input mechanism is provided with a square platform 4 for transmitting output displacement, bolt through holes are processed on the periphery of the square platform 4, a circular groove and bolt holes are processed in the center of the square platform, a Z-axis piezoelectric ceramic driver 7 is arranged in the circular groove, and a ball cap 17 is arranged at the top end of the Z-axis piezoelectric ceramic driver 7. Two mutually perpendicular dead slots are arranged on the outer side of the displacement input mechanism, and an X-axis piezoelectric ceramic driver 5 and a Y-axis piezoelectric ceramic driver 6 are respectively arranged in the two dead slots. The X-axis piezoelectric ceramic driver 5, the Y-axis piezoelectric ceramic driver 6 and the Z-axis piezoelectric ceramic driver 7 are all pre-tightened through pre-tightening bolts 16 and fixed through fastening bolts 15.
And a friction block 13 is fixed on the top of the square platform 4 of the displacement input mechanism, and the friction block 13 penetrates through the rectangular through hole of the middle connecting layer 9. The Z-axis piezoceramic driver 7 is in contact with the friction block 13 via a ball cap 17. The friction block 13 is of a hollow structure, a square displacement table is machined in the center of the friction block, a double-layer parallel plate type hinge structure is arranged on the upper half portion of the friction block, and Z-direction displacement output of the square displacement table is guaranteed. Bolt positioning holes are processed on the periphery of the bottom layer of the friction block 13, the friction block 13 is connected with the square platform 4 of the displacement output mechanism of the base 1 through four-corner bolts, and the Z-direction position of the square displacement platform of the friction block can be adjusted through the pre-tightening bolts 16. The top end of the square displacement table is pasted with a friction pad 14, and the friction pad 14 is in contact with the bottom surface of the sliding platform 12 after the Z-shaped position is adjusted.
The working principle of the invention is as follows:
the precise positioning platform can realize X, Y precise movement in two directions. Firstly, the pretightening force of the piezoelectric ceramics is adjusted, so that the X-axis piezoelectric ceramic driver 5, the Y-axis piezoelectric ceramic driver 6 and the Z-axis piezoelectric ceramic driver 7 are in a proper pretightening state, and the friction gasket 14 is in contact with the bottom surface of the sliding platform 12.
When the sliding platform 12 needs to be driven to move along the X direction, the voltage signal shown in fig. 5 is input to the X-axis piezoelectric ceramic driver 5, and the voltage signal shown in fig. 6 is input to the Z-axis piezoelectric ceramic driver 7.
When at t0-t1At that time, the Z-axis piezoelectric ceramic actuator 7 is subjected to a high voltage and is elongated, and the friction padThe friction between the sheet 14 and the sliding platform 12 increases. The X-axis piezoelectric ceramic driver 5 extends at a slow speed to push the square platform 4 to move along the X direction, and the double parallel plate type flexible hinge 3 plays a role in guiding. The square platform 4 drives the friction block 13 to move along the X direction, and drives the sliding platform 12 to move along the X direction under the action of friction force.
When at t1-t2At that time, the Z-axis piezoelectric ceramic actuator 7 is subjected to a low voltage, and the friction force between the friction pad 14 and the sliding platform 12 is reduced. The X-axis piezoceramic driver 5 retracts at a faster rate and the square platform 4 returns to the initial position under the elastic force of the double parallel plate hinge 3. Due to the inertia of the sliding platform 12 and the low friction, the sliding platform 12 will maintain t1The time position is unchanged.
By repeating the above process, the sliding platform 12 can move in the X direction in a large range with high precision.
Similar to the movement in the X direction, when the voltage signal shown in fig. 5 is input to the Y-axis piezoelectric ceramic driver 6 and the voltage signal shown in fig. 6 is input to the Z-axis piezoelectric ceramic driver 7, the slide table 12 and the intermediate connection layer 9 can realize a large-range high-precision movement in the Y direction.
In summary, the precision positioning platform of the present invention can realize large-scale precision motion along the X direction and the Y direction. Due to the parallel structure of the displacement input part and the series arrangement of the guide rails, the input and output double decoupling can be realized. Because the piezoelectric ceramic is arranged in the Z direction to adjust the friction force, the sliding back phenomenon can be reduced, and the load capacity is increased.
While the present invention has been described in terms of its functions and operations with reference to the accompanying drawings, it is to be understood that the invention is not limited to the precise functions and operations described above, and that the above-described embodiments are illustrative rather than restrictive, and that various changes and modifications may be effected therein by one skilled in the art without departing from the scope or spirit of the invention as defined by the appended claims.
Claims (6)
1. A variable friction force series-parallel two-degree-of-freedom stick-slip driving precision positioning platform is characterized by comprising a base (1), an intermediate connecting layer (9) and a sliding platform (12) which are sequentially arranged from bottom to top, wherein a Y-direction crossed roller guide rail (8) is arranged between the base (1) and the intermediate connecting layer (9), and an X-direction crossed roller guide rail (11) is arranged between the intermediate connecting layer (9) and the sliding platform (12);
the base (1) is of a rectangular structure, two Y-direction guide rail supporting bosses (2) which are parallel to each other are symmetrically arranged on the upper surface of the base (1), and a group of Y-direction crossed roller guide rails (8) are arranged on the outer side of each Y-direction guide rail supporting boss (2); a displacement input mechanism is arranged in the middle of the base (1), motion guide and two-degree-of-freedom decoupling are realized by adopting double parallel plate type flexible hinges (3) and a parallel symmetrical structure, a square platform (4) is arranged in the center of the displacement input mechanism, a circular groove and a bolt hole are machined in the center of the square platform (4), a Z-axis piezoelectric ceramic driver (7) is arranged in the circular groove, and a ball head cap (17) is arranged at the top end of the Z-axis piezoelectric ceramic driver (7); two mutually perpendicular empty grooves are formed in the outer side of the displacement input mechanism, and an X-axis piezoelectric ceramic driver (5) and a Y-axis piezoelectric ceramic driver (6) are respectively arranged in the two empty grooves;
the middle connecting layer (9) is of a rectangular structure, a rectangular through hole is formed in the center of the middle connecting layer, a pair of X-direction guide rail supporting bosses (10) which are parallel to each other are symmetrically arranged on the upper surface of the middle connecting layer (9), the rectangular through hole is formed between the two X-direction guide rail supporting bosses (10), and a group of X-direction crossed roller guide rails (11) are arranged on the outer side of each X-direction guide rail supporting boss (10);
a friction block (13) is fixed on the top of the square platform (4) of the displacement input mechanism, and the friction block (13) penetrates through the rectangular through hole of the middle connecting layer (9); the friction block (13) is of a hollow structure, a square displacement table is machined in the center of the friction block, a double-layer parallel plate type hinge structure is arranged on the upper half portion of the square displacement table, and a friction gasket (14) is arranged at the top end of the square displacement table.
2. The variable-friction parallel-series two-degree-of-freedom stick-slip driving precision positioning platform as claimed in claim 1, wherein the X-axis piezoelectric ceramic driver (5), the Y-axis piezoelectric ceramic driver (6) and the Z-axis piezoelectric ceramic driver (7) are all pre-tightened through pre-tightening bolts (16) and fixed through fastening bolts (15).
3. The variable friction force series-parallel two-degree-of-freedom stick-slip driving precision positioning platform as claimed in claim 1, wherein the intermediate connection layer (9) is connected with the outer side of the Y-direction crossed roller guide rail (8) and fixed through a fastening bolt (15), a bolt hole is machined in the outer side of the intermediate connection layer (9), and a pre-tightening bolt (16) is installed.
4. The variable friction force series-parallel two-degree-of-freedom stick-slip driving precision positioning platform as claimed in claim 1, wherein the sliding platform (12) is connected with the outer side of the X-direction crossed roller guide rail (11) and fixed through a fastening bolt (15), a bolt hole is processed on the outer side of the sliding platform (12), and a pre-tightening bolt (16) is installed.
5. The variable friction force series-parallel two-degree-of-freedom stick-slip driving precision positioning platform as claimed in claim 1, wherein the Z-axis piezoelectric ceramic driver (7) is in contact with the friction block (13) through a ball cap (17).
6. The variable friction force series-parallel two-degree-of-freedom stick-slip driving precision positioning platform is characterized in that the friction gasket (14) is in contact with the bottom surface of the sliding platform (12) after the Z-position is adjusted.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910500124.9A CN110310695B (en) | 2019-06-11 | 2019-06-11 | Variable-friction series-parallel two-degree-of-freedom stick-slip driving precision positioning platform |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CN201910500124.9A CN110310695B (en) | 2019-06-11 | 2019-06-11 | Variable-friction series-parallel two-degree-of-freedom stick-slip driving precision positioning platform |
Publications (2)
Publication Number | Publication Date |
---|---|
CN110310695A CN110310695A (en) | 2019-10-08 |
CN110310695B true CN110310695B (en) | 2021-07-06 |
Family
ID=68077131
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN201910500124.9A Expired - Fee Related CN110310695B (en) | 2019-06-11 | 2019-06-11 | Variable-friction series-parallel two-degree-of-freedom stick-slip driving precision positioning platform |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN110310695B (en) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN112838786B (en) * | 2019-11-22 | 2024-06-18 | 北京大学 | Linear motor with precise driving and positioning functions |
CN110890850B (en) * | 2019-12-05 | 2024-04-19 | 松山湖材料实验室 | Nanometer precision piezoelectric driving linear displacement table |
CN111451791B (en) * | 2020-03-24 | 2021-09-24 | 天津大学 | Two-degree-of-freedom swing platform based on stick-slip principle |
CN112217416A (en) * | 2020-09-30 | 2021-01-12 | 天津大学 | Two-degree-of-freedom piezoelectric ultrasonic motor driven high-precision micro-assembly robot |
CN112558263A (en) * | 2020-12-10 | 2021-03-26 | 上海精测半导体技术有限公司 | Micro-displacement device and method, light path adjusting equipment and application of micro-displacement device |
CN112994512B (en) * | 2021-02-03 | 2022-03-22 | 哈尔滨工业大学 | Two-degree-of-freedom motion platform based on bending composite piezoelectric actuator |
CN114253004A (en) * | 2021-12-26 | 2022-03-29 | 中国人民解放军国防科技大学 | Linear two-dimensional translation normal stress type electromagnetic micro-motion platform |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1353110A2 (en) * | 2002-04-10 | 2003-10-15 | Physik Instrumente (PI) GmbH & Co. KG | Positioning table |
CN2596512Y (en) * | 2002-12-20 | 2003-12-31 | 北京有色金属研究总院 | Computer control precise X-Y mobile station |
CN103295651A (en) * | 2013-05-10 | 2013-09-11 | 上海大学 | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle |
CN107464586A (en) * | 2017-08-17 | 2017-12-12 | 天津大学 | A kind of big stroke mini positioning platform of Three Degree Of Freedom of driving force decoupling |
CN108561700A (en) * | 2018-06-08 | 2018-09-21 | 天津大学 | A kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform |
CN108877871A (en) * | 2018-04-12 | 2018-11-23 | 天津大学 | A kind of built-in two-freedom precisely locating platform of driver |
CN108962336A (en) * | 2018-05-22 | 2018-12-07 | 郑州轻工业学院 | A kind of two-dimensional parallel flexible micro platform based on Piezoelectric Driving |
CN109493913A (en) * | 2018-12-26 | 2019-03-19 | 杭州电子科技大学 | A kind of two degrees of freedom micro-nano locating platform |
CN109584947A (en) * | 2018-09-28 | 2019-04-05 | 天津大学 | Three Degree Of Freedom large stroke and high precision mini positioning platform based on bridge-type enlarger |
-
2019
- 2019-06-11 CN CN201910500124.9A patent/CN110310695B/en not_active Expired - Fee Related
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1353110A2 (en) * | 2002-04-10 | 2003-10-15 | Physik Instrumente (PI) GmbH & Co. KG | Positioning table |
CN2596512Y (en) * | 2002-12-20 | 2003-12-31 | 北京有色金属研究总院 | Computer control precise X-Y mobile station |
CN103295651A (en) * | 2013-05-10 | 2013-09-11 | 上海大学 | Piezoelectrically-driven inchworm-type positioning workbench based on flexible amplification principle |
CN107464586A (en) * | 2017-08-17 | 2017-12-12 | 天津大学 | A kind of big stroke mini positioning platform of Three Degree Of Freedom of driving force decoupling |
CN108877871A (en) * | 2018-04-12 | 2018-11-23 | 天津大学 | A kind of built-in two-freedom precisely locating platform of driver |
CN108962336A (en) * | 2018-05-22 | 2018-12-07 | 郑州轻工业学院 | A kind of two-dimensional parallel flexible micro platform based on Piezoelectric Driving |
CN108561700A (en) * | 2018-06-08 | 2018-09-21 | 天津大学 | A kind of Three Degree Of Freedom ultrasonic vibration secondary process precisely locating platform |
CN109584947A (en) * | 2018-09-28 | 2019-04-05 | 天津大学 | Three Degree Of Freedom large stroke and high precision mini positioning platform based on bridge-type enlarger |
CN109493913A (en) * | 2018-12-26 | 2019-03-19 | 杭州电子科技大学 | A kind of two degrees of freedom micro-nano locating platform |
Also Published As
Publication number | Publication date |
---|---|
CN110310695A (en) | 2019-10-08 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
CN110310695B (en) | Variable-friction series-parallel two-degree-of-freedom stick-slip driving precision positioning platform | |
CN109176420B (en) | Middle-mounted movable joint type flexible decoupling precision positioning structure | |
CN108962336B (en) | Two-dimensional parallel flexible micro-motion platform based on piezoelectric drive | |
CN108199613B (en) | Double-stator fixed type precise piezoelectric stick-slip linear motor and driving method thereof | |
CN102623070A (en) | Precise two-degree of freedom micro-displacement positioning device | |
CN209774584U (en) | Planar three-degree-of-freedom fully-flexible parallel positioning platform | |
CN109842321B (en) | Ultra-precise three-degree-of-freedom linear piezoelectric positioning platform and excitation method thereof | |
CN104362890B (en) | Inertia stick-slip trans-scale precision movement platform capable of achieving bidirectional movement | |
CN104269191B (en) | The parallel institution that Hydrauservo System and piezoelectric ceramic actuator drive jointly | |
CN107786120B (en) | Piezoelectric rotary positioning platform with macro-micro hybrid motion characteristics and control method | |
CN105643592B (en) | A kind of symmetrical decoupling single-freedom and flexible operating mechanism | |
CN1956106A (en) | Large stroke pricision working platform device and drive method | |
CN106373617A (en) | Piezoelectric driving large-stroke no-coupling two-dimensional precise micro locating platform | |
CN107834896A (en) | Pre- frictional force regulates and controls the apparatus and method of parasitic principle piezoelectric actuator output performance | |
CN106992712B (en) | Piezoelectricity-hydraulic hybrid linear type stepper motor and its working method | |
CN210757607U (en) | Two-dimensional precision micro-motion workbench with double displacements | |
CN111761552A (en) | Motion platform suitable for optical communication device encapsulation | |
CN109995268A (en) | The shared piezoelectricity stick-slip Drive And Its Driving Method for driving sufficient formula of dual drive | |
CN110086374A (en) | A kind of Inchworm type precision rotation microdrive based on compliant mechanism | |
CN211957127U (en) | Two-dimensional precise micro-motion platform | |
CN211333063U (en) | Novel macro-micro combined platform based on rigid parallel mechanism and compliant parallel mechanism | |
CN112447262B (en) | Three-translation decoupling micro positioner based on rotary lever half-bridge amplifier | |
CN112217416A (en) | Two-degree-of-freedom piezoelectric ultrasonic motor driven high-precision micro-assembly robot | |
CN116155136B (en) | Two-degree-of-freedom decoupling large-stroke flexible structure micro-motion platform | |
CN112994512B (en) | Two-degree-of-freedom motion platform based on bending composite piezoelectric actuator |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
PB01 | Publication | ||
PB01 | Publication | ||
SE01 | Entry into force of request for substantive examination | ||
SE01 | Entry into force of request for substantive examination | ||
GR01 | Patent grant | ||
GR01 | Patent grant | ||
CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20210706 |
|
CF01 | Termination of patent right due to non-payment of annual fee |