CN1195198C - Multi-function laser diffraction measuring apparatus and its measuring method - Google Patents
Multi-function laser diffraction measuring apparatus and its measuring method Download PDFInfo
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- CN1195198C CN1195198C CNB021449929A CN02144992A CN1195198C CN 1195198 C CN1195198 C CN 1195198C CN B021449929 A CNB021449929 A CN B021449929A CN 02144992 A CN02144992 A CN 02144992A CN 1195198 C CN1195198 C CN 1195198C
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Abstract
The present invention discloses a multi-function laser diffraction measuring instrument and a measuring method thereof, which is applied to the technical field of machine manufacturing. A laser power supply part, a backup part, a supporting part and a negative lens part are arranged on a measuring instrument base 1. A rotary disk 5-6 and a cassette 5-12 are arranged on a screen upright column 5-3 of a capacity-grid type digital display ruler 5-5, and the capacity-grid type digital display ruler 5-5 and a receiving optical screen 5-22 are both fixed together with the rotary disk 5-6. A linear array CCD TV camera lens is arranged on a CCD upright column 6-3. The multi-function laser diffraction measuring instrument has two optical path systems, and the capacity-grid type digital display ruler 5-5 and the linear array CCD are used. A measuring result and a figure are displayed through program processing and calculation by using a computer to achieve the non-contact type measurement of the surface roughness and outer cone abgles of various dimensions and a plurality of errors of shapes and positions. The present invention has the advantages of advanced and scientific measuring method, rapidness and high precision.
Description
Affiliated technical field
The present invention relates to a kind of laser measuring apparatus and measuring method thereof of mechanical manufacturing field, particularly a kind of contactless multifunction laser diffraction measuring instrument and measuring method thereof that multiple size, multinomial morpheme error, surfaceness and outside cone angle are measured.
Background technology
Chinese patent CN01211689.0Y discloses a kind of laser diffraction measuring instrument, this measuring instrument is mainly by base, laser generator, the knuckle column, negative lens and column, the optical screen measurement bay, the capacitive grid numeral display slide calliper rule, differential amplifier, receive optical screen, supporting member, measuring table, knuckle, the laser beam location-plate, plane mirror receives main parts size compositions such as optical screen, its measuring method is that the capacitive grid numeral display slide calliper rule are fixed on square optical screen framework behind by slide block and slider frame, when measuring the diffraction fringe of horizontal direction or vertical direction, the optical screen framework is unloaded from instrument base, be fixed on the base with screw after changeing 90 ° again and measure, it is little that this equipment exists measurement range, operation is convenient inadequately, shortcomings such as data processing method is quick inadequately.
Summary of the invention
The objective of the invention is to overcome above technical deficiency, a kind of contactless multifunction laser diffraction measuring instrument and measuring method thereof of using several measurement annexes can be accurately, quickly multiple size, multinomial morpheme error, surfaceness and outside cone angle are measured is provided.
The technical solution adopted for the present invention to solve the technical problems is: be equipped with parts and CCD measurement components such as Laser Power Devices parts, knuckle parts, support unit, negative lens parts, contour V-arrangement on base, the capacitive grid type digital display ruler parts of the data-out port of band magazine assembly particularly are housed.Multifunction laser diffraction measuring instrument and measuring method thereof are according to fraunhofer single slit diffraction principle, aperture diffraction principle and optical grating diffraction principle, have utilized the good characteristics such as go with coherence of laser brightness height, good directionality, monochromaticity.A kind of geometric measurement instrument that integrates " machine, light, ".Its measuring method has two kinds: first kind is with the magazine assembly, the capacitive grid type digital display ruler of band data-out port, link to each other with computing machine, the capacitive grid type digital display ruler is recorded data, flow to computing machine by special purpose interface, pass through data processor, calculate and demonstrate measurement result and figure, the screen column of capacitive grid type digital display ruler parts is equipped with rotary disk, the magazine assembly, the capacitive grid type digital display ruler of band data-out port and reception optical screen all are fixed together with rotary disk, be processed with two kidney slots on the rotary disk, the center is equipped with a bearing pin and is connected with slide block on the screen column and moves up and down on column with slide block; Rotary disk is contained in the front of screen column, can turn round between 90 ° arbitrarily angledly around central pin shaft, therefore, except the diffraction fringe of energy measurement horizontal direction and vertical direction, also can measure between 0-90 ° diffraction fringe at any angle; Second kind of measuring method is: measure with line array CCD, the line array CCD device passes through the CCD frame fixation on the slide block on the column, the CCD device is except that can moving up and down with slide block, also can in framework, rotate, realization is to level, vertically reach the measurement of any direction diffraction fringe, add that driver, data collecting card are connected with computing machine, realize the collection of video signal of CCD device output is handled and computing, demonstrate measurement result and figure by program.
The multifunction laser diffraction measuring instrument has two kinds of light path systems, and a kind of is the laser beam slotted hole by the knuckle column flatly, and directive reception optical screen is passed through at the slit that forms from knuckle and measured workpiece and the center of negative lens; Another kind of light path system is the laser beam vertical incidence, is reflected into horizontal light beam to 45 ° of plane mirrors after passing measured object aperture or slit, and light beam is by behind the center of negative lens, and directive receives screen again.In the light path of no negative lens, according to fraunhofer single slit diffraction principle, when derivative (or width is the slit of b) was L with the reception screen distance, the diffraction fringe spacing was D
1=λ L
1/ b, λ is the He-Ne Lasers wavelength in the formula, when putting enlargement factor in the light path and be the negative lens of K, the diffraction fringe spacing is D
2=K λ L
2/ b.Promptly obtaining identical diffraction fringe spacing, i.e. D
1=D
2Condition under, the optical path length L of negative lens is arranged
2The 1/K of optical path length is not doubly when just having negative lens.Therefore, negative lens can obviously reduce the length dimension of instrument, and in the calculating formula of slit width measuring limit error: Δ limb
1=λ L
1/ D
1 2Δ D
1And Δ limb
2=K λ L
2/ D
2 2Δ D
2, if make b
1=b
2, L
1=L
2, Δ D
1=Δ D
2, because D
2=KD
1So, the 1/K of the measuring limit error when having the measuring limit error of the light path of negative lens just not have negative lens doubly, as K=1.70, D
1=2mm, D
2=KD
1=3.4mm, i.e. Δ limb
2=Δ limb
1Therefore K can obviously improve the measuring accuracy of instrument with negative lens.
Multifunction laser diffraction measuring instrument and method thereof have following characteristics:
1, this view device is with measuring annex on a small quantity, adopt non-cpntact measurement, relative measurement and measurement indirectly, can realize measurement to external diameter, part length size and the diameter of axle in filament diameter, micro-aperture, sheet thickness, the elastic component, also can be to multinomial morpheme error project, as linearity, circularity, cylindricity, the depth of parallelism, verticality, degree of tilt, right alignment, the measurement of beating etc., but also measure surface roughness and outside cone angle.
2, adopt capacitive grid type digital display ruler, line array CCD and the computing machine non-cpntact measurement of band data-out port, relative, measurement indirectly, method advanced person, science, measuring accuracy height.
3, this view device integrates " machine, light, ", has that function is many, volume is little, a novelty in light weight, simple in structure, easy to operate, characteristics such as cost is low.
Description of drawings
Specify with embodiment below in conjunction with accompanying drawing.
Fig. 1 shows multifunction laser diffraction measuring instrument and measuring method capacitive grid numeral display ruler measuring system general assembly (GA) structural drawing thereof.
The capacitive grid type digital display ruler modular construction front view that Fig. 2 diagrammatic sketch 1 shows.
The vertical view of Fig. 3 diagrammatic sketch 2.
The A-A cut-open view of Fig. 4 diagrammatic sketch 2.
The magazine modular construction front view of Fig. 5 diagrammatic sketch 2.
The sectional view of Fig. 6 diagrammatic sketch 5.
The C-C sectional view of Fig. 7 diagrammatic sketch 6.
The A of Fig. 8 diagrammatic sketch 5 is to partial view.
The B of Fig. 9 diagrammatic sketch 6 is to view.
Figure 10 shows multifunction laser diffraction measuring instrument vertical optical path assembly structure figure.
Figure 11 shows multifunction laser diffraction measuring instrument CCD measurement component structural drawing.
The A of Figure 12 diagrammatic sketch 11 is to partial view.
The A of Figure 13 diagrammatic sketch 12 is to partial view.
The B of Figure 14 diagrammatic sketch 1 is to partial view.
The C of Figure 15 diagrammatic sketch 1 is to partial view.
Figure 16 shows multifunction laser diffraction measuring instrument disjunctor vee-block parts front view.
The left view of Figure 17 diagrammatic sketch 16.
Among Fig. 1-17, the 1-bottom; 1-1-laser instrument column base translot; 1-2-arris reason support base translot; 1-3-support unit base translot; 1-4-negative lens column base translot; 1-5-capacitive grid type digital display ruler base translot and CCD base translot; 1-6-line main scale translot; The 2-1-lock screw; The 2-2-latch segment; 2-3,2-11,2-12,2-13,2-15,2-16-adjusting screw; The 2-4-shell; The 2-5-backing plate; The 2-6-laser tube; 2-7-laser socket; 2-8-laser instrument column; Screw mandrel of 2-9-; 2-10-one trumpeter wheel; The 2-17-slide block; The 2-18-web joint; 3-1,3-7-lock screw; The 3-2 latch segment; The 3-3-arris reason support; 3-4,3-5-adjusting screw; The 3-6-spring; The 3-8-take-up housing; No. two screw mandrels of 3-9-; 3-10-two-trumpeter wheel; 3-11-fork-shaped slide block; The 3-12-bearing pin; The 3-13-set screw; The horizontal piece of 3-14-; The 3-15-knuckle; 3-16-knuckle fixture block; 3-17-holds out against screw; The 3-18-end cap; The 4-1-lock screw; The 4-2-latch segment; 4-3-negative lens column; 4-4-negative lens seat; The 4-5-end cap; The 4-6-negative lens; 4-7-aims at piece; The 4-8-slide block; No. three screw mandrels of 4-9-; 4-10-three trumpeters wheel; 5-1,5-19-lock-screw; The 5-2-latch segment; 5-3-screen column; No. four screw mandrels of 5-4-; 5-5-capacitive grid type digital display ruler; The 5-6-rotary disk; The 5-7-lower cover; The 5-8-loam cake; 5-9-four trumpeters wheel; The 5-10-handle; The 5-11-lateral pin; The 5-12-magazine; 5-13-anti-rotation holding screw; 5-14-five trumpeters wheel; The 5-15-handle; The 5-16-adjusting screw; No. five screw mandrels of 5-17-; The 5-18-slide block; The 5-20-packing ring; The 5-21-screw; 5-22-receives optical screen; The tired nail of 5-23-locking; The 5-24-bearing pin; The 5-25-fixed head; The 5-26-adjustable plate; The 5-27-pressing plate; The 5-28-luminophor; The 5-29-insulcrete; The 6-1-lock screw; The 6-2-latch segment; The 6-3-CCD column; The 6-4-CCD camera; The 6-5-slide block; The 6-6-CCD seat; 6-7-spreading tube; No. six screw mandrels of 6-8-; 6-9-six trumpeters wheel; The 6-10-lock screw; The 6-11-end cap; The 6-12-optical filter; The 7-1-lock screw; The 7-2-latch segment; The 7-3-bearing support; The 7-4-measured object; 8-1-disjunctor vee-block; The 8-2-lock screw; The 8-3-latch segment; 8-4-is top; The 8-5-arm-tie; The 8-6-forcing screw; The 9-1-article carrying platform; 9-2-45 ° of catoptron; The 9-3-measured object
Embodiment
With reference to accompanying drawing 1-17, on the measuring instrument base 1 of multifunction laser diffraction measuring instrument and measuring method thereof, the translot that to be provided with five one sides be the inclined-plane is used for fixing various measurement components, also is provided with a translot that is stained with linear scale.
The LASER Light Source parts are taken turns 2-10, slide block 2-17 and web joint 2-18 etc. and are formed by lock screw 2-1, latch segment 2-2, adjusting screw 2-3,2-11,2-12,2-13,2-15,2-16, shell 2-4, backing plate 2-5, laser tube 2-6, laser socket 2-7, laser column 2-8, screw mandrel 2-9, a trumpeter.Laser instrument column 2-8 is fixed among the laser instrument column base translot 1-1 on the base 1 by lock screw 2-1, latch segment 2-2, can laterally move; Laser instrument column 2-8 adorns screw mandrel 2-9 No. one in the middle part, a screw mandrel 2-9 top is taken turns 2-10 with a trumpeter and can positive and negatively be rotated, driving laser tube shell 2-4 moves up and down, laser socket 2-7 is housed among the shell 2-4, among the laser socket 2-7 laser tube 2-6 is housed, laser socket 2-7 is placed on the backing plate 2-5, can adjust the direction that laser tube 2-6 ends at surface level and vertical plane by adjusting screw 2-3,2-13,2-11,2-12,2-15,2-16.
The knuckle parts of this measuring instrument are taken turns 3-10, fork-shaped slide block 3-11, bearing pin 3-12, horizontal piece 3-14, knuckle 3-15, knuckle fixture block 3-16 and are clenched screw 3-17 and formed by lock screw 3-1,3-6, latch segment 3-2, arris reason support 3-3, adjusting screw 3-4,3-5,3-13, spring 3-6, lock screw 3-7, take-up housing 3-8, No. two screw mandrel 3-9, two trumpeters.Arris reason support 3-3 is fixed among the arris reason support base translot 1-2 on the base 1 with lock screw 3-1 and latch segment 3-2, but transverse shift, take-up housing 3-8 inserts in the cylindrical hole of arris reason support 3-3 upper end, horizontal level with spring 3-6 adjusting screw 3-4,3-5 adjusting slider seat 3-8, after mixing up, 3-7 fixes with lock screw; No. two screw mandrel 3-9 that take turns 3-10 with two trumpeters are housed in the middle of the take-up housing 3-8, No. two screw mandrel 3-9 is connected with fork-shaped slide block 3-11 by screw thread, fork-shaped slide block 3-11 connects by bearing pin 3-12 and knuckle fixture block 3-16 are movable, and regulate with horizontal piece 3-14, it is vertical with base that screw 3-12 regulates knuckle, knuckle 3-15 passes the slotted eye of knuckle fixture block 3-16, and with end cap 3-18 with hold out against screw 3-17 and be fixed; The upper-lower position of knuckle 3-15 is adjusted with No. two screw mandrel 3-9 that take turns 3-10 with two trumpeters.
The negative lens parts of measuring instrument are taken turns 4-10 by lock screw 4-1, latch segment 4-2, negative lens column 4-3, negative lens seat 4-4, slide block 4-8, negative lens 4-6, aiming piece 4-7, end cap 4-5, No. three screw mandrel 4-9 and three trumpeters and are formed.Negative lens column 4-3 is fixed among the negative lens column base translot 1-4 on the base 1 with lock screw 4-1 and latch segment 4-2, but transverse shift, negative lens 4-6 is contained among negative lens seat 4-4, the end cap 4-8, negative lens seat 4-4 is with fixing in the hole of connecting link insertion slide block 4-8 and with jackscrew, and removable aiming piece 4-7 is equipped with on the left side; The upper-lower position of negative lens 4-6 is adjusted with No. three screw mandrel 4-9 that take turns 4-10 with three trumpeters.
The capacitive grid type digital display ruler parts of measuring instrument, by latch segment 5-2 lock screw 5-1, screen column 5-3, No. four screw mandrel 5-4, capacitive grid type digital display ruler 5-5, rotary disk 5-6, lower cover 5-7, loam cake 5-8, four trumpeters take turns 5-9 handle 5-10, lateral pin 5-11, magazine 5-12, anti-rotation screw 5-13, five trumpeters take turns 5-14, handle 5-15, adjusting screw 5-16, No. five screw mandrel 5-17, slide block 5-18, screw 5-19, packing ring 5-20, screw 5-21,5-23, receive optical screen 5-22, bearing pin 5-24, fixed head 5-25, adjustable plate 5-26, pressing plate 5-27, luminophor 5-28 and insulcrete 5-29 screen are formed, screen column 5-3 is fixed among the screen column base translot 1-5 on the base 1 with lock-screw 5-1 and latch segment 5-2, but transversal displacement; Screen column 5-3 middle part is by loam cake 5-8, lower cover 5-7 is equipped with and is with four trumpeters to take turns 5-9, No. five vertical screw mandrel 5-17 of handle 5-10, four trumpeters take turns 5-9 and connect with No. five screw mandrel 5-17 with lateral pin 5-11, No. five screw mandrel 5-17 is equipped with slide block 5-18, slide block 5-18 bearing pin 5-24, screw 5-23 and rotary disk 5-6 are movably connected, capacitive grid type digital display ruler 5-5 is housed on the rotary disk 5-6 and receives optical screen 5-22, magazine 5-12 and insulcrete 5-29 one side are bonded together, the insulcrete 5-29 opposite side and the capacitive grid type digital display ruler 5-5 chi frame back side are bonded together, insulcrete 5-29 prevents luminophor 5-28 electric leakage, No. four screw mandrel 5-4 pass magazine 5-12 and rotate No. four screw mandrel 5-4 and drive magazine 5-12 and capacitive grid type digital display ruler 5-5 chi frame and move together and measure, magazine 5-12 bottom is bonded together with fixed head 5-25 pressing plate 5-27, adjustable plate 5-26 takes turns 5-14 with five trumpeters and is connected, take turns 5-14 by five trumpeters and regulate slit width, with the upright position that vertical No. five screw mandrel 5-17 recall to rotating disk 5-6, mix up the back and fix with two anti-rotation lock screw 5-13 and 5-19; Be processed with 0-90 ° of kidney slot of two symmetries on the rotary disk 5-6, be contained in the front of screen column 6-3, can make rotary disk 5-6 and receive optical screen 5-22 arbitrarily angled between central shaft 5-24 turns round 0-90 °.
The CCD measurement component of measuring instrument, see accompanying drawing 11,12, by lock screw 6-1, latch segment 6-2, CCD column 6-3, CCD camera 6-4, slide block 6-5, CCD seat 6-6, spreading tube 6-7, optical filter 6-12, end cap 6-11, No. six screw mandrel 6-8, six trumpeters take turns 6-9 and lock screw 6-10 forms, CCD column 6-3 is fixed among the CCD column base translot 1-5 on the base 1 with lock screw 6-1 and latch segment 6-2, but transverse shift, No. six screw mandrel 6-8 that take turns 6-9 with six trumpeters are housed in the middle of the CCD column 6-3, spreading tube 6-7 uses thread connection in CCD seat 6-6 threaded hole, CCD camera 6-4 is fixed with lock-screw 6-10, CCD seat 6-6, optical filter 6-12 be adhesive in be threaded and the end cap 6-11 of slot on, end cap 6-11 and spreading tube 6-7 are with being threaded, CCD seat 6-6 and slide block 6-5 link together with screw, and slide block 6-5 passes No. six screw mandrel 6-8 and adjusts slide block 6-5 horizontal level up and down with No. six screw mandrel 6-8 that take turns 6-9 with six trumpeters.
The support unit of measuring instrument, form by V-block 7-1, lock screw 7-2 and latch segment 7-3, V-block 7-1 is fixed among the support unit base translot 1-3 on the base 1 with lock screw 7-2 and latch segment 7-3, but transverse shift, and V-block 7-1 is used for supporting measured object.
The disjunctor vee-block annex of measuring instrument is seen accompanying drawing 10,11, is made up of disjunctor vee-block 8-1, lock screw 8-2, latch segment 8-3, top 8-4, arm-tie 8-5, forcing screw 8-6.V-block 8-1 is fixed among the support unit base translot 1-3 on the base 1 with lock screw 8-2 and latch segment 8-3, but transverse shift, two top 8-4 are put in the V-type groove of V-block 8-1, and plate 8-5 fixes with forcing screw 8-6 by the position.
The vertical optical path measuring system of measuring instrument, see accompanying drawing 10, this system takes away knuckle parts and support unit in the multifunction laser diffraction measuring instrument capacitive grid type digital display ruler measuring system, the laser tube 2-6 on the laser instrument column 2-8, laser tube shell 2-4 vertically places, and move among the translot 1-3 of base 1, make article carrying platform 9-1 longitudinal register, 45 ° of catoptron 9-2 right lower quadrant planes and article carrying platform 9-1 plane are by tight, measured object 9-3 is put on the article carrying platform 9-1, the normal beam that laser tube 2-6 sends produces the diffraction light wave by measured object 9-3 aperture or slit, 45 ° of plane mirror 9-2 of directive, reflecting light is by negative lens sheet 4-6 center, and directive receives screen 5-22.
Embodiment 1: the measurement of axle bus straightness error
With reference to accompanying drawing 1, at first V-block 7-1 is put into the bearing support base translot 1-3 on the base 1, again measured axis 7-4 is placed in the V-type groove of V-block 7-1, rotate a trumpeter and take turns the height that 2-10 adjusts laser beam, make laser beam and the highest bus of measured axis tangent, adjust the position among the arris reason support base translot 1-2 of knuckle fixture block 3-16 on base 1, after knuckle 3-15 placed laser beam and measured axis bus points of tangency, unscrew and hold out against screw 3-17, coarse adjustment knuckle 3-15 makes its highest bus near axle, rotate and regulate No. two 3-9 fine settings of screw mandrel knuckle 3-15, make on reception optical screen 5-22 and diffraction fringe clearly occurs, aiming piece 4-7 is packed in the hole of negative lens seat 4-4, adjust negative lens column 4-3 and negative lens 4-6, make the center of diffraction light wave center, when on receiving optical screen 5-22, occurring, can stop to adjust with the centrosymmetric hot spot of diffraction by aiming piece 4-7 and negative lens 4-6.Moving V-block 7-1 during measurement makes knuckle 3-15 be positioned at the end of measured axis 7-4, and an end that makes vee-block 7-1 be fixed on base 1 on base translot 1-6 in a linear scale centimetre groove can carry out the 0th measurement of locating after aliging, again by predetermined pitch, mobile V-block 7-1 carries out point-to-point measurement, for ease of comparing, the present embodiment introduction is carried out measuring method for measuring to identical point on the same bus, data processing method and measurement result with capacitive grid type digital display ruler, line array CCD and three kinds of measuring methods of clock gauge.
1, measures with capacitive grid type digital display ruler 5-5, screen column 5-3 is placed among the screen column base translot 1-5 of base 1, rotate rotary disk 5-6 and make and receive optical screen 5-22 and after diffraction fringe was parallel, 5-3 fixed with the screen column.Press computer screen before measuring and show, selected measurement project, input measuring point number, pitch and measuring point, can be measured after laser wavelength lambda and diffraction fringe spacing are counted n to the distance L negative lens enlargement factor K that receives optical screen 5-22.During measurement, rotating four trumpeters takes turns after light that 5-14 and No. four screw mandrel 5-4 will transmit from magazine 5-12 places a certain dark fringe center, press the zero setting key on the chi frame, promptly show 000.00 in the chi frame, to aim at that light moves on to the next one or down behind several dark fringes center, can send into computing machine to the numerical value that shows in the chi frame by capacitive grid type digital display ruler 5-5 special purpose interface, after the machine computing, demonstrate the diffraction fringe distance values of this measurement point as calculated; Point-to-point measurement as stated above again, and after evaluating with minimum containment region method, on computer screen, can demonstrate measurement result and circle picture.
During data processing, calculate the average headway D of each point diffraction fringe earlier, calculate the wide b of seam of each point again with formula b=K λ L/D
iAnd the wide poor Δ b of seam
i=b
o-b
i(i=0～N-1), and use Δ b
iFasten mapping at rectangular coordinate, determine the straightness error of this bus at last with minimum containment region.
2, measure with line array CCD, before the measurement, earlier the CCD column 6-3 of CCD measurement component is placed among the CCD column base translot 1-5 on the base 1, mobile column 6-3 makes diffraction fringe overlap with the CCD pixel and gets final product point-to-point measurement.During measurement, press earlier the computing machine display requirement, selected measurement project after importing above-mentioned measure dot number pitch and L, K and λ numerical value, can be carried out image acquisition, and trough number in the collection back is imported between acquisition zone can demonstrate measurement result and image.When measuring with line array CCD, because when measuring with capacitive grid type digital display ruler 5-5, laser beam, negative lens 4-6 adjustment are finished,, make the diffraction light wave align and to measure with the CCD pixel so only need to adjust the position of CCD column in translot 1-5 and the height of CCD device.
3, measure with clock gauge, the purpose of measuring with clock gauge is that above-mentioned two kinds of measuring methods and routine measurement method are compared.When measuring with clock gauge, clock gauge is clamped on the dial holder of Magnetic gauge stand, gauge stand is adsorbed on the instrument base surface, the clock gauge gauge head is beaten rotated the clock gauge index dial behind 0 of measurement point, make the zero-bit on the pointer aligning index dial, move vee-block and workpiece by above-mentioned same pitch again, measure one by one at 1 to the N-1 point, obtain the numerical value of each measuring point after, fasten described point at rectangular coordinate, obtain the error broken line graph, then, evaluate the straightness error of this bus with minimum containment region method.
By above-mentioned measuring method the same bus of axle is measured, relevant data is as follows: pitch 10mm, and L=500mm, K=1.6968, He-Ne Lasers wavelength X=0.0006328mm, diffraction fringe spacing number is 4, the trough number is 5.The measured value and the measurement result of three kinds of methods are as shown in table 1
Table 1
| Measuring method | Hold grid chi and computing machine | Line array CCD and computing machine | Clock gauge | ||||||
| Sequence number | Hold grid chi measured values (mm) | The diffraction fringe spacing | Computing machine shows diffraction fringe average headway (mm) | Each measuring point stitches wide b i(mm) | Each point stitches wide poor Δ b i(um) | Diffraction fringe average headway (mm) | Each point stitches wide b i(mm) | Each point stitches wide poor Δ b i(um) | Each point measured value (mm) |
| 0 1 2 3 4 5 6 7 8 9 | 13.51 13.76 14.11 14.24 14.73 15.22 14.81 14.44 14.90 15.06 | 4 | 3.3775 3.44 3.5275 3.56 3.6825 3.80465 3.705 3.61 3.725 3.765 | 0.158954 0.156066 0.151949 0.150805 0.145789 0.1411 0.14490 0.1487168 0.144126 0.142594 | 0 2.888 7.005 80149 13.165 17.854 14.054 10.24 14.83 16.36 | 3.3825 3.425 3.5575 3.5375 3.6575 3.815 3.72 3.63 3.735 3.78 | 0.1587 0.15675 0.1509 0.15176 0.14678 0.14072 0.1443 0.14789 0.14374 0.14203 | 0 -2.45 -7.8 -6.39 -11.91 -17.97 -14.381 -10.803 -14.96 -16.672 | 0 -2 -5 -6 -9 -14 -8 -7 -8 -12 |
| Straightness error | 0.011 | 0.01013 | 0.01 | ||||||
The disjunctor vee-block 8-1 that will have top 8-4 and arm-tie 8-5 is fixed in the translot 1-3 of base 1, with two top 8-4 tested part jack-up.Adjustment content and the method for other adjustment that should do during with measuring straightness error is all identical.Equally, present embodiment has also adopted capacitive grid type digital display ruler, line array CCD to measure, and has carried out measurement of comparison with clock gauge on optical dividing head.During measurement, should make the measurement cross section identical as far as possible, the measurement point position is identical.
When measuring with capacitive grid type digital display ruler and line array CCD, should and import relevant data by the selected deviation from circular from of computer screen prompting equally, during measurement, utilize index plate and pointer calibration, and 8 points are respectively surveyed for 45 ° in the interval on same circumference, on optical dividing head, use the optical dividing head calibration, measure with clock gauge.
When 1, measuring, adjust the slit between knuckle 3-15 and measured object surface, make on the reception optical screen and can see diffraction fringe clearly with capacitive grid type digital display ruler 5-5, special purpose interface and computing machine, wide to stitch in principle for the smaller the better.Diffraction fringe average headway when measuring 0 ° is earlier measured all the other each point diffraction fringe average headways more successively, and its collecting method is identical with collecting method in the measuring straightness error.After machine data is handled as calculated, use Δ b
i=b
i-b
0(i=0～7) are mapped on polar coordinates, and are evaluated with minimum two-multiply law, finally demonstrate measurement result and figure on computers.
When 2, measuring with line array CCD, after with the program of finishing in advance the vision signal of delivering to computing machine through CCD, driver and data collecting card being carried out filtering, curve fitting each measuring point is carried out data acquisition (acquisition method with measuring straightness error time identical), the wide poor Δ b of the diffraction fringe average headway through obtain each measuring point place with routine processes and the seam at each point place
i(i=0～7) use Δ b equally
iMap, and evaluate with minimum two-multiply law.
When 3, on optical dividing head, measuring with clock gauge, carry out calibration with optical dividing head, during measurement, when the zero degree position, the clock gauge pointer is aimed on the dial plate 0, then 45 ° of measurements of revolution once, the semidiameter when obtaining each measuring point to 0 °, and, evaluate its deviation from circular from minimum containment region method at last with this semidiameter mapping.
As shown in table 2 with measured value and measurement result that above-mentioned three kinds of methods are measured circular error
Table 2
| Measuring method | Hold grid chi and computing machine | Line array CCD and computing machine | Clock gauge | ||||||
| Sequence number | Hold grid chi measured values (mm) | The diffraction fringe spacing | Computing machine shows diffraction fringe average headway (mm) | Each measuring point stitches wide b i(mm) | Each point stitches wide poor Δ b i(um) | Diffraction fringe average headway (mm) | Each point stitches wide b i(mm) | Each point stitches wide poor Δ b i(um) | Each point measured value (mm) |
| 0 60 120 180 240 306 | 8.64 8.90 9.21 8.66 8.99 9.50 | 4 | 2.16 2.2225 2.3025 2.165 2.2475 2.375 | 0.24855 0.24156 0.23317 0.24798 0.23887 0.22605 | 0 -7 -15.38 *-0.57 -2.69 -22.5 | 2.18 2.235 2.335 2.1625 2.2375 2.365 | 0.24627 0.24021 0.22992 0.24826 0.23894 0.22700 | 0 -6.06 -16.35 +1.992 -6.33 -19.265 | 0 -4 -12.8 -2.5 -3.5 -19.5 |
| Deviation from circular from (mm) | 0.0202 | 0.018908 | 0.016 | ||||||
Embodiment 3, the measurement of the diameter of axle
Get 90 ° one of vee-block and diameter d
oFor one of known standard axle, require d
oShould be slightly less than the minimum limit of size of measured axis, and approaching more good more.Earlier standard axle is placed on the vee-block, it is tangent with the Up Highway UHW of axle to adjust laser beam, adjusts knuckle again and makes itself and axle Up Highway UHW form slit, measures its diffraction fringe space D with capacitive grid type digital display ruler and CCD respectively
oAfter, take off this axle, put measured axis, measure its diffraction fringe space D more respectively, then by the diameter of axle be: d=d
o-K λ L/Ks (1/D-1/D
o), in the formula: Ks is the reflection coefficient, for 90 ° vee-block Ks=1.2071, and in the present embodiment, the standard axle diameter d
o=ψ 29.983, with capacitive grid type digital display ruler and computer measurement: D
o=1.9975mm, D=2.2425mm, measurement result d=ψ 30.0072mm is with CCD and computer measurement: D
o=1.9672mm, D=2.2082mm, measurement result d=ψ 30.0077mm.
Claims (6)
1, a kind of multifunction laser diffraction measuring instrument, go up dress Laser Power Devices parts, knuckle parts, support unit, negative lens parts and vee-block parts at the base (1) of measuring instrument, it is characterized in that: on the screen column (5-3) of capacitive grid type digital display ruler (5-5) parts rotary disk (5-6) is housed, the capacitive grid type digital display ruler (5-5) and the reception optical screen (5-22) of magazine (5-12) assembly, band data-out port all are fixed together with rotary disk (5-6); No. six screw mandrels (6-8) with six trumpeters wheels (6-9) are housed in the middle of CCD column (6-3), spreading tube (6-7) uses thread connection in the screw thread of CCD seat (6-6), CCD camera (6-4) is fixing with lock screw (6-10), optical filter (6-12) be adhesive in be threaded and the end cap (6-11) of slot on, end cap (11) and spreading tube (6-7) are with being threaded, CCD seat (6-6) links together with screw with slide block (6-5), and slide block (6-5) passes No. six screw mandrels (6-8).
2, multifunction laser diffraction measuring instrument according to claim 1 is characterized in that upward 0-90 ° of kidney slot of two symmetries of processing of rotary disk (5-6).
3, multifunction laser diffraction measuring instrument according to claim 1, it is characterized in that a magazine (5-12) and insulcrete (5-29) side are bonded together, insulcrete (5-29) opposite side and capacitive grid type digital display ruler (5-5) the frame back side are bonded together, No. four screw mandrels (5-4) pass magazine (5-12), magazine (5-12) bottom is bonded together with fixed head (5-25), pressing plate (5-27), and adjustable plate (5-26) is connected with five trumpeters wheels (5-14).
4, a kind of measuring method that adopts the described multifunction laser diffraction measuring instrument of claim 1, the measuring method that it is characterized in that this measuring instrument: be capacitive grid type digital display ruler (5-5) with magazine (5-12) assembly, band data-out port, link to each other with computing machine, the data that capacitive grid type digital display ruler (5-5) records are given computing machine by the special purpose interface input, by data processor, calculate and demonstrate measurement result and figure.
5, a kind of measuring method that adopts the described multifunction laser diffraction measuring instrument of claim 1, it is characterized in that measuring with line array CCD, the line array CCD device is fixed on the slide block (6-5) on the CCD column (6-3) by the CCD seat, the CCD device also can rotate in framework except can moving up and down with slide block (6-5), realization is to level, the vertical measurement that reaches any direction diffraction fringe, add driver, data collecting card is connected with computing machine, pass through program, realization is handled and computing the collection of video signal of CCD device output, demonstrates measurement result and figure.
6, the measuring method of multifunction laser diffraction measuring instrument according to claim 4, it is characterized in that having two kinds of light path systems, a kind of slotted hole that is laser level ground by knuckle column (3-3), pass through from knuckle (3-15) and the slit of measured workpiece formation and the center of negative lens (4-6), directive receives optical screen (5-22); Another kind of light path system is the laser beam vertical incidence, passes behind measured object aperture or the slit that 45 ° of plane mirrors (9-2) are counter to become horizontal light beam, and light beam is by behind the center of negative lens (4-6), and directive receives optical screen (5-22) again.
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021449929A CN1195198C (en) | 2002-12-18 | 2002-12-18 | Multi-function laser diffraction measuring apparatus and its measuring method |
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|---|---|---|---|
| CNB021449929A CN1195198C (en) | 2002-12-18 | 2002-12-18 | Multi-function laser diffraction measuring apparatus and its measuring method |
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| CN1195198C true CN1195198C (en) | 2005-03-30 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100392348C (en) * | 2005-11-23 | 2008-06-04 | 佛山市吉茂工业自动化技术有限公司 | Electric image measurer |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102679927B (en) * | 2012-05-31 | 2015-07-15 | 中国航空动力机械研究所 | Measuring device and use method thereof |
| CN109342509A (en) * | 2018-11-23 | 2019-02-15 | 海宁红狮宝盛科技有限公司 | Contact resistance test machine and its method |
| CN112881997B (en) * | 2020-12-29 | 2024-05-24 | 中国航空工业集团公司西安飞机设计研究所 | High-precision combined leveling method based on radar laser target |
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2002
- 2002-12-18 CN CNB021449929A patent/CN1195198C/en not_active Expired - Fee Related
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN100392348C (en) * | 2005-11-23 | 2008-06-04 | 佛山市吉茂工业自动化技术有限公司 | Electric image measurer |
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| CN1431460A (en) | 2003-07-23 |
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