CN118295063A - Light spot size converter - Google Patents
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- CN118295063A CN118295063A CN202410539059.1A CN202410539059A CN118295063A CN 118295063 A CN118295063 A CN 118295063A CN 202410539059 A CN202410539059 A CN 202410539059A CN 118295063 A CN118295063 A CN 118295063A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 25
- 238000005253 cladding Methods 0.000 claims abstract description 15
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 6
- 238000009413 insulation Methods 0.000 claims description 6
- 229910004298 SiO 2 Inorganic materials 0.000 claims description 3
- 229910052681 coesite Inorganic materials 0.000 claims description 3
- 229910052906 cristobalite Inorganic materials 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 239000000377 silicon dioxide Substances 0.000 claims description 3
- 235000012239 silicon dioxide Nutrition 0.000 claims description 3
- 229910052682 stishovite Inorganic materials 0.000 claims description 3
- 229910052905 tridymite Inorganic materials 0.000 claims description 3
- 238000013461 design Methods 0.000 abstract description 9
- 230000010354 integration Effects 0.000 abstract description 2
- 230000005540 biological transmission Effects 0.000 description 8
- 238000006243 chemical reaction Methods 0.000 description 4
- 230000008878 coupling Effects 0.000 description 3
- 238000010168 coupling process Methods 0.000 description 3
- 238000005859 coupling reaction Methods 0.000 description 3
- 239000012212 insulator Substances 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
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Abstract
The invention belongs to the technical field of integrated optics, and particularly relates to a light spot size converter. The invention comprises a cladding and a silicon core; cladding layers are arranged around the silicon core; along the light beam propagation direction, the silicon core comprises an input end, a first adiabatic taper waveguide, a second adiabatic taper waveguide, a third adiabatic taper waveguide, a fourth adiabatic taper waveguide, a fifth adiabatic taper waveguide, a sixth adiabatic taper waveguide, a seventh adiabatic taper waveguide, an eighth adiabatic taper waveguide, a ninth adiabatic taper waveguide, a tenth adiabatic taper waveguide, an eleventh adiabatic taper waveguide, a twelfth adiabatic taper waveguide, a thirteenth adiabatic taper waveguide, a fourteenth adiabatic taper waveguide, a fifteenth adiabatic taper waveguide, a sixteenth adiabatic taper waveguide and an output end which are sequentially connected. The light spot size converter realizes the design of an ultra-compact device, can be used for cascading different functional units in a photon integrated chip, and realizes the design target of higher integration level in the photon integrated chip.
Description
Technical Field
The invention belongs to the technical field of integrated optics, and particularly relates to a light spot size converter.
Background
Silicon-on-insulator (SOI) has become an important material for research into passive photonic elements due to its excellent optical confinement and well-established Silicon processing techniques. In complex photonic integrated chips, it is often necessary to use waveguides of different widths simultaneously (e.g., photonic lines for single mode very important scenarios, while wider waveguides are used for connections or fiber coupling requiring very low loss), as embodied in paper B.Luyssaert,P.Vandersteegen,D.Taillaert,P.Dumon,W.Bogaerts,P.Bienstman,D.VanThourhout,V.Wiaux,S.Beckx,andR.Baets,"Acompactphotonic horizontal spot-size converter realized in silicon-on-insulator,"IEEE Photon.Technol.Lett.,vol.17,no.1,pp.73-75,2005..
For coupling optical waveguides with different cross-sections and different mode sizes, a smooth linear or parabolic tapered waveguide may be used, as embodied in paper C.K.Burns,A.F.Milton,and A.B.Lee,"Optical-waveguide parabolic coupling horns,"Appl.Phys.Lett.,vol.30,no.1,pp.28-30,1977.. However, to achieve adiabatic or lossless transmission, a sufficiently long device length is required. In complex photonic integrated chips, each component should occupy as little space as possible to reduce material, processing, and packaging costs. Thus, a shorter innovative device design is needed.
Disclosure of Invention
The invention aims to provide a spot size converter, which aims to be small in design size, low in loss, high in transmission efficiency and simple in structure.
In order to achieve the aim of the invention, the technical scheme adopted by the invention is as follows:
a spot-size converter comprises a cladding layer and a silicon core; cladding layers are arranged around the silicon core; along the propagation direction of the light beam, the silicon core comprises an input end, a first adiabatic taper waveguide, a second adiabatic taper waveguide, a third adiabatic taper waveguide, a fourth adiabatic taper waveguide, a fifth adiabatic taper waveguide, a sixth adiabatic taper waveguide, a seventh adiabatic taper waveguide, an eighth adiabatic taper waveguide, a ninth adiabatic taper waveguide, a tenth adiabatic taper waveguide, an eleventh adiabatic taper waveguide, a twelfth adiabatic taper waveguide, a thirteenth adiabatic taper waveguide, a fourteenth adiabatic taper waveguide, a fifteenth adiabatic taper waveguide, a sixteenth adiabatic taper waveguide and an output end which are sequentially connected.
Further as a preferable technical scheme of the invention, the cladding is made of SiO 2, has a refractive index of n SiO2 =1.445, a width of W 0 and a thickness of h 0; the refractive index of the silicon core is n Si = 3.455, and the thickness is h=220 nm; the width of the silicon core input end is W I =2 μm, and the width of the output end is W O =10 μm; the length of the silicon core input end is L I =5 μm, and the length of the output end is L O =5 μm; the wavelength of the incident beam is 1.55 mu m; the width and height of the cladding satisfy: w 0 > W and h 0 > h.
Further as a preferred technical solution of the present invention, the first heat-insulating tapered waveguide is an isosceles trapezoid layout: the initial end waveguide width and the end waveguide width of the first heat insulation conical waveguide are W 1 =2 μm and W 2 =2.3 μm respectively, and the length L 1 =6578 nm; The second adiabatic taper waveguide is in isosceles trapezoid layout: the initial end waveguide width and the end waveguide width of the second adiabatic taper waveguide are W 2 =2.3 μm and W 3 =2.54 μm, respectively, and the length L 2 =7530 nm; The third adiabatic taper waveguide is in isosceles trapezoid layout: the first end waveguide width and the second end waveguide width of the third adiabatic taper waveguide are W 3 =2.54 μm and W 4 =2.80 μm, respectively, and the length L 3 =9132 nm; The fourth adiabatic taper waveguide is in isosceles trapezoid layout: the width of the first end waveguide and the width of the final end waveguide of the fourth adiabatic taper waveguide are W 4 =2.80 μm and W 5 =3.10 μm respectively, and the length L 4 =11378 nm; The fifth adiabatic taper waveguide is in isosceles trapezoid layout: the initial end waveguide width and the end waveguide width of the fifth adiabatic taper waveguide are W 5 =3.10 μm and W 6 =3.40 μm, respectively, with a length L 5 =13308 nm; The sixth adiabatic tapered waveguide is in an isosceles trapezoid layout: the initial end waveguide width and the end waveguide width of the sixth adiabatic taper waveguide are W 6 =3.4 μm and W 7 =3.76 μm, respectively, with a length L 6 = 16740nm; The seventh adiabatic tapered waveguide is in isosceles trapezoid layout: the initial end waveguide width and the end waveguide width of the seventh adiabatic taper waveguide are W 7 =3.76 μm and W 8 =4.18 μm, respectively, with a length L 7 =20976 nm; The eighth adiabatic tapered waveguide is in an isosceles trapezoid layout: the initial end waveguide width and the final end waveguide width of the eighth adiabatic taper waveguide are W 8 =4.18 μm and W 9 =4.60 μm, respectively, and the length L 8 = 24700nm; the ninth adiabatic tapered waveguide is in an isosceles trapezoid layout: the ninth adiabatic taper waveguide has a first end waveguide width W 9 =4.60 μm and a second end waveguide width W 10 =5.10 μm, respectively, and a length L 9 = 30980nm; The tenth adiabatic taper waveguide is in isosceles trapezoid layout: the tenth adiabatic taper waveguide has an initial end waveguide width and a terminal end waveguide width of W 10 =5.10 μm and W 11 =5.66 μm, respectively, and a length L 10 = 38420nm; The eleventh adiabatic tapered waveguide is in an isosceles trapezoid layout: the eleventh adiabatic taper waveguide has a first end waveguide width and a second end waveguide width of W 11 =5.66 μm and W 12 =6.28 μm, respectively, and a length L 11 = 47160nm; The twelfth adiabatic tapered waveguide is in an isosceles trapezoid layout: the twelfth adiabatic taper waveguide has a first end waveguide width of W 12 =6.28 μm and a second end waveguide width of W 13 =6.96 μm, respectively, and a length L 12 = 57740nm; The thirteenth adiabatic tapered waveguide is in an isosceles trapezoid layout: the thirteenth adiabatic taper waveguide has an initial end waveguide width and a terminal end waveguide width of W 13 =6.96 μm and W 14 =7.62 μm, respectively, and a length L 13 = 66770nm; The fourteenth adiabatic tapered waveguide is in an isosceles trapezoid layout: the fourteenth adiabatic tapered waveguide has an initial end waveguide width and a terminal end waveguide width of W 14 =7.62 μm and W 15 =8.40 μm, respectively, and a length L 14 =83020 nm; The fifteenth adiabatic tapered waveguide is in an isosceles trapezoid layout: the fifteenth adiabatic tapered waveguide has an initial end waveguide width and a terminal end waveguide width of W 15 =8.40 μm and W 16 =9.20 μm, respectively, and a length L 15 = 97600nm; the sixteenth adiabatic tapered waveguide is in an isosceles trapezoid layout: the sixteenth adiabatic taper waveguide has an initial end waveguide width and a terminal end waveguide width of W 16 =9.20 μm and W 17 =10.0 μm, respectively, and a length L 16 =111530 nm.
Further preferred embodiments of the present invention are W 0 =12 μm and h 0 =1.22 μm.
Compared with the prior art, the spot size converter has the following technical effects:
(1) The spot-size converter of the invention can realize the connection between two waveguides with large width difference (for example, the width of the waveguide input by the invention is only 2 μm, and the width of the waveguide at the output end reaches 10 μm), realize the lossless transmission of the mode, and when the beam mode is emitted at the input end, although the width of the waveguide is greatly changed in the transmission process, all the energy stays in the excited mode, namely, the mode does not generate mode interference or mode conversion when the mode propagates in the spot-size converter of the invention.
(2) The design of the invention is far better than the traditional linear connection scheme in terms of efficiency. When 98% of power transmission efficiency is to be achieved, the scheme of the invention only needs 57 μm in length, while the traditional linear connection scheme needs 126 μm in length, which is 2.2 times that of the scheme of the invention, and the scheme of the invention greatly reduces the device size of the spot size converter, so that the miniaturization design in the photonic integrated chip can be realized.
Drawings
FIG. 1 is a schematic cross-sectional view of a spot-size converter according to the present invention;
FIG. 2 is a schematic diagram of a conventional linear link for spot-size conversion according to the present invention;
FIG. 3 illustrates a connection of silicon cores in a spot-size converter according to the present invention;
FIG. 4 is a graph comparing the power transfer efficiency curves of the present invention and a conventional straight line connection design;
wherein, the reference numerals are as follows: 1. a cladding layer; 2. a silicon core; 3. a first thermally insulated tapered waveguide; 4. a second adiabatic tapered waveguide; 5. a third adiabatic tapered waveguide; 6. a fourth adiabatic tapered waveguide; 7. a fifth adiabatic tapered waveguide; 8. a sixth adiabatic tapered waveguide; 9. a seventh adiabatic tapered waveguide; 10. an eighth adiabatic tapered waveguide; 11. a ninth adiabatic tapered waveguide; 12. a tenth adiabatic taper waveguide; 13. an eleventh adiabatic taper waveguide; 14. a twelfth adiabatic tapered waveguide; 15. a thirteenth adiabatic tapered waveguide; 16. a fourteenth adiabatic tapered waveguide; 17. a fifteenth adiabatic tapered waveguide; 18. sixteenth adiabatic tapered waveguide.
Detailed Description
The invention is further explained in the following detailed description with reference to the drawings so that those skilled in the art can more fully understand the invention and can practice it, but the invention is explained below by way of example only and not by way of limitation.
As shown in fig. 1-2, a spot-size converter comprises a cladding layer 1 and a silicon core 2; cladding 1 is arranged around the silicon core 2; along the propagation direction of the light beam, the silicon core 2 includes an input end, a first adiabatic taper waveguide 3, a second adiabatic taper waveguide 4, a third adiabatic taper waveguide 5, a fourth adiabatic taper waveguide 6, a fifth adiabatic taper waveguide 7, a sixth adiabatic taper waveguide 8, a seventh adiabatic taper waveguide 9, an eighth adiabatic taper waveguide 10, a ninth adiabatic taper waveguide 11, a tenth adiabatic taper waveguide 12, an eleventh adiabatic taper waveguide 13, a twelfth adiabatic taper waveguide 14, a thirteenth adiabatic taper waveguide 15, a fourteenth adiabatic taper waveguide 16, a fifteenth adiabatic taper waveguide 17, a sixteenth adiabatic taper waveguide 18, and an output end, which are sequentially connected.
The cladding 1 is made of SiO 2, has a refractive index n SiO2 =1.445, a width W 0 and a thickness h 0; the refractive index n Si = 3.455 of the silicon core 2, and the thickness is h=220 nm; the width of the input end of the silicon core 2 is W I =2 μm, and the width of the output end is W O =10 μm; the length of the input end of the silicon core 2 is L I =5 μm, and the length of the output end is L O =5 μm; the wavelength of the incident beam is 1.55 mu m; the width and height of the cladding 1 satisfy: w 0 > W and h 0 > h. In the embodiment of the present invention, W 0 =12 μm and h 0 =1.220 μm are set, respectively.
As shown in fig. 3, the first adiabatic taper waveguide 3 has an isosceles trapezoid layout: the initial end waveguide width and the end waveguide width of the first heat insulation tapered waveguide 3 are W 1 =2 μm and W 2 =2.3 μm respectively, and the length L 1 =6578 nm; The second adiabatic taper waveguide 4 is in an isosceles trapezoid layout: the initial end waveguide width and the end waveguide width of the second adiabatic taper waveguide 4 are W 2 =2.3 μm and W 3 =2.54 μm, respectively, and the length L 2 =7530 nm; The third adiabatic taper waveguide 5 is in isosceles trapezoid layout: the initial end waveguide width and the end waveguide width of the third adiabatic taper waveguide 5 are W 3 =2.54 μm and W 4 =2.80 μm, respectively, and the length L 3 =9132 nm; The fourth adiabatic taper waveguide 6 is in isosceles trapezoid layout: the initial end waveguide width and the end waveguide width of the fourth adiabatic taper waveguide 6 are W 4 =2.80 μm and W 5 =3.10 μm, respectively, and the length L 4 =11378 nm; The fifth adiabatic taper waveguide 7 is of isosceles trapezoid layout: the initial end waveguide width and the end waveguide width of the fifth adiabatic taper waveguide 7 are W 5 =3.10 μm and W 6 =3.40 μm, respectively, and the length L 5 =13308 nm; The sixth adiabatic taper waveguide 8 is of isosceles trapezoid layout: the initial end waveguide width and the end waveguide width of the sixth adiabatic taper waveguide 8 are W 6 =3.4 μm and W 7 =3.76 μm, respectively, with a length L 6 = 16740nm; the seventh adiabatic taper waveguide 9 is in isosceles trapezoid layout: the initial end waveguide width and the end waveguide width of the seventh adiabatic taper waveguide 9 are W 7 =3.76 μm and W 8 =4.18 μm, respectively, and the length L 7 =20976 nm; The eighth adiabatic taper waveguide 10 is an isosceles trapezoid layout: the eighth adiabatic taper waveguide 10 has an initial end waveguide width and a terminal end waveguide width of W 8 =4.18 μm and W 9 =4.60 μm, respectively, and a length L 8 = 24700nm; The ninth adiabatic taper waveguide 11 is of isosceles trapezoid layout: the ninth adiabatic taper waveguide 11 has an initial end waveguide width and a terminal end waveguide width of W 9 =4.60 μm and W 10 =5.10 μm, respectively, and a length L 9 = 30980nm; The tenth adiabatic taper waveguide 12 is of isosceles trapezoid layout: the tenth adiabatic taper waveguide 12 has an initial end waveguide width and a terminal end waveguide width of W 10 =5.10 μm and W 11 =5.66 μm, respectively, and a length L 10 = 38420nm; The eleventh adiabatic taper waveguide 13 is of isosceles trapezoid layout: the eleventh adiabatic taper waveguide 13 has an initial end waveguide width and a terminal end waveguide width of W 11 =5.66 μm and W 12 =6.28 μm, respectively, and a length L 11 = 47160nm; The twelfth adiabatic tapered waveguide 14 is an isosceles trapezoid layout: the twelfth adiabatic tapered waveguide 14 has an initial end waveguide width and a terminal end waveguide width of W 12 =6.28 μm and W 13 =6.96 μm, respectively, and a length L 12 = 57740nm; the thirteenth adiabatic tapered waveguide 15 is an isosceles trapezoid layout: the thirteenth adiabatic taper waveguide 15 has an initial end waveguide width and a terminal end waveguide width of W 13 =6.96 μm and W 14 =7.62 μm, respectively, and a length L 13 = 66770nm; The fourteenth adiabatic tapered waveguide 16 is in an isosceles trapezoid layout: the fourteenth adiabatic tapered waveguide 16 has an initial end waveguide width and a terminal end waveguide width of W 14 =7.62 μm and W 15 =8.40 μm, respectively, and a length L 14 =83020 nm; The fifteenth adiabatic tapered waveguide 17 is of isosceles trapezoid layout: the fifteenth adiabatic tapered waveguide 17 has an initial end waveguide width and a terminal end waveguide width of W 15 =8.40 μm and W 16 =9.20 μm, respectively, and a length L 15 = 97600nm; The sixteenth adiabatic tapered waveguide 18 is in an isosceles trapezoid layout: the sixteenth adiabatic taper waveguide 18 has an initial end waveguide width and a terminal end waveguide width of W 16 =9.20 μm and W 17 =10.0 μm, respectively, and a length L 16 =111530 nm.
With the above arrangement, in the spot-size converter of the invention, when the beam mode is emitted at the input, all the energy stays in the excited mode, i.e. neither mode disturbance nor mode conversion occurs when the mode propagates in the spot-size converter of the invention, although the width of the waveguide varies greatly during transmission.
The transmission efficiency of the spot size conversion designed by the present invention is shown in fig. 4. As can be seen from the figure, the inventive scheme only requires a length of 57 μm when 98% transmission efficiency is to be achieved, whereas the conventional linear connection scheme requires a length of 126 μm, which is 2.2 times the inventive scheme. Therefore, the light spot size converter provided by the invention realizes the design of an ultra-compact device, can be used for cascading different functional units in the photonic integrated chip, and realizes the design target of higher integration level in the photonic integrated chip.
While the foregoing is directed to embodiments of the present invention, other and further details of the invention may be devised without departing from the basic scope thereof, and the scope thereof is determined by the claims that follow.
Claims (4)
1. The spot-size converter is characterized by comprising a cladding layer (1) and a silicon core (2); cladding layers (1) are arranged around the silicon core (2); along the light beam propagation direction, the silicon core (2) comprises an input end, a first adiabatic taper waveguide (3), a second adiabatic taper waveguide (4), a third adiabatic taper waveguide (5), a fourth adiabatic taper waveguide (6), a fifth adiabatic taper waveguide (7), a sixth adiabatic taper waveguide (8), a seventh adiabatic taper waveguide (9), an eighth adiabatic taper waveguide (10), a ninth adiabatic taper waveguide (11), a tenth adiabatic taper waveguide (12), an eleventh adiabatic taper waveguide (13), a twelfth adiabatic taper waveguide (14), a thirteenth adiabatic taper waveguide (15), a fourteenth adiabatic taper waveguide (16), a fifteenth adiabatic taper waveguide (17), a sixteenth adiabatic taper waveguide (18) and an output end which are sequentially connected.
2. A spot-size converter according to claim 1, characterized in that the material of the cladding (1) is SiO 2, the refractive index n SiO2 =1.445, the width W 0 and the thickness h 0; the refractive index n Si = 3.455 of the silicon core (2) and the thickness of the silicon core is h=220 nm; the width of the input end of the silicon core (2) is W I =2 μm, and the width of the output end is W O =10 μm; the length of the input end of the silicon core (2) is L I =5 μm, and the length of the output end is L O =5 μm; the wavelength of the incident beam is 1.55 mu m; the width and height of the cladding (1) satisfy: w 0 > W and h 0 > h.
3. A spot-size converter according to claim 2, wherein,
The first heat insulation conical waveguide (3) is in isosceles trapezoid layout: the initial end waveguide width and the tail end waveguide width of the first heat insulation conical waveguide (3) are respectively W 1 =2 μm and W 2 =2.3 μm, and the length L 1 =6578 nm;
The second adiabatic taper waveguide (4) is in isosceles trapezoid layout: the initial end waveguide width and the tail end waveguide width of the second adiabatic taper waveguide (4) are W 2 =2.3 μm and W 3 =2.54 μm respectively, and the length L 2 =7530 nm;
The third adiabatic taper waveguide (5) is in isosceles trapezoid layout: the initial end waveguide width and the tail end waveguide width of the third adiabatic taper waveguide (5) are W 3 =2.54 μm and W 4 =2.80 μm respectively, and the length L 3 =9132 nm;
The fourth adiabatic taper waveguide (6) is in isosceles trapezoid layout: the initial end waveguide width and the tail end waveguide width of the fourth adiabatic taper waveguide (6) are W 4 =2.80 μm and W 5 =3.10 μm respectively, and the length L 4 =11378 nm;
The fifth adiabatic taper waveguide (7) is in isosceles trapezoid layout: the initial end waveguide width and the tail end waveguide width of the fifth adiabatic taper waveguide (7) are respectively W 5 = 3.10 μm and W 6 = 3.40 μm, and the length L 5 = 13308nm;
The sixth adiabatic tapered waveguide (8) is in an isosceles trapezoid layout: the initial end waveguide width and the tail end waveguide width of the sixth adiabatic taper waveguide (8) are W 6 =3.4 μm and W 7 =3.76 μm respectively, and the length L 6 = 16740nm;
The seventh heat insulation conical waveguide (9) is in isosceles trapezoid layout: the initial end waveguide width and the tail end waveguide width of the seventh heat insulation conical waveguide (9) are W 7 =3.76 μm and W 8 =4.18 μm respectively, and the length L 7 =20976 nm;
The eighth adiabatic tapered waveguide (10) is in an isosceles trapezoid layout: the initial end waveguide width and the tail end waveguide width of the eighth adiabatic taper waveguide (10) are W 8 =4.18 μm and W 9 =4.60 μm respectively, and the length L 8 = 24700nm;
The ninth adiabatic tapered waveguide (11) is in an isosceles trapezoid layout: the initial end waveguide width and the tail end waveguide width of the ninth adiabatic taper waveguide (11) are W 9 =4.60 μm and W 10 =5.10 μm respectively, and the length L 9 = 30980nm;
The tenth adiabatic taper waveguide (12) is in an isosceles trapezoid layout: the tenth adiabatic taper waveguide (12) has an initial end waveguide width and a terminal end waveguide width of W 10 =5.10 μm and W 11 =5.66 μm, respectively, and a length L 10 = 38420nm;
the eleventh adiabatic tapered waveguide (13) is in an isosceles trapezoid layout: the eleventh adiabatic taper waveguide (13) has an initial end waveguide width and a terminal end waveguide width of W 11 =5.66 μm and W 12 =6.28 μm, respectively, and a length L 11 = 47160nm;
The twelfth adiabatic tapered waveguide (14) is in an isosceles trapezoid layout: the twelfth adiabatic tapered waveguide (14) has an initial end waveguide width and a terminal end waveguide width of W 12 =6.28 μm and W 13 =6.96 μm, respectively, and a length L 12 = 57740nm;
The thirteenth adiabatic taper waveguide (15) is in an isosceles trapezoid layout: the thirteenth adiabatic taper waveguide (15) has an initial end waveguide width and a terminal end waveguide width of W 13 =6.96 μm and W 14 =7.62 μm, respectively, and a length L 13 = 66770nm;
The fourteenth adiabatic tapered waveguide (16) is in an isosceles trapezoid layout: the fourteenth adiabatic tapered waveguide (16) has an initial end waveguide width and a terminal end waveguide width of W 14 =7.62 μm and W 15 =8.40 μm, respectively, and a length L 14 =83020 nm;
The fifteenth adiabatic tapered waveguide (17) is in an isosceles trapezoid layout: the fifteenth adiabatic tapered waveguide (17) has an initial end waveguide width and a terminal end waveguide width of W 15 =8.40 μm and W 16 =9.20 μm, respectively, and a length L 15 = 97600nm;
The sixteenth adiabatic tapered waveguide (18) is in an isosceles trapezoid layout: the sixteenth adiabatic tapered waveguide (18) has an initial end waveguide width and a terminal end waveguide width of W 16 =9.20 μm and W 17 =10.0 μm, respectively, and a length L 16 =111530 nm.
4. A spot-size converter according to claim 2, characterized in that W 0 = 12 μm and h 0 = 1.22 μm.
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