CN118220791A - Positioning and orienting device for substrate - Google Patents
Positioning and orienting device for substrate Download PDFInfo
- Publication number
- CN118220791A CN118220791A CN202410623430.2A CN202410623430A CN118220791A CN 118220791 A CN118220791 A CN 118220791A CN 202410623430 A CN202410623430 A CN 202410623430A CN 118220791 A CN118220791 A CN 118220791A
- Authority
- CN
- China
- Prior art keywords
- substrate
- alignment
- shaft
- plate
- positioning
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 title claims abstract description 151
- 230000001360 synchronised effect Effects 0.000 claims abstract description 51
- 230000001681 protective effect Effects 0.000 claims description 12
- 239000011159 matrix material Substances 0.000 claims description 3
- 230000002457 bidirectional effect Effects 0.000 description 14
- 238000000034 method Methods 0.000 description 9
- 230000000712 assembly Effects 0.000 description 2
- 238000000429 assembly Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000000903 blocking effect Effects 0.000 description 1
- 230000008094 contradictory effect Effects 0.000 description 1
- ZZUFCTLCJUWOSV-UHFFFAOYSA-N furosemide Chemical compound C1=C(Cl)C(S(=O)(=O)N)=CC(C(O)=O)=C1NCC1=CC=CO1 ZZUFCTLCJUWOSV-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The application relates to the field of substrate processing, in particular to a positioning and orientation device for a substrate. In the positioning and orienting device for the substrate, the substrate supporting plate drives the substrate to rotate until the notch sensor senses the notch on the substrate, the substrate supporting plate stops rotating to orient the substrate, the substrate supporting plate falls on the first arranging shaft and the second arranging shaft, the first arranging shaft moves along the X axis under the drive of the first arranging synchronous belt, and the second arranging shaft moves along the Y axis under the drive of the second arranging synchronous belt, so that the substrate is conveniently transported to a preset position, and the problem that the positioning and orienting of the substrate in the prior art are finished by different devices is solved.
Description
Technical Field
The application relates to the field of substrate processing, in particular to a positioning and orienting device for a substrate.
Background
In the manufacturing industry, which is an essential process step for the processing and manufacture of substrates, in order to facilitate the processing of the substrates by the apparatus, it is often necessary to position and orient the substrates prior to processing the substrates so that the substrates enter the processing apparatus or conveyor in a fixed and uniform direction and position.
In the prior art, the positioning and the orientation of the substrate are usually completed by different devices, and the positioning or the orientation of the substrate is affected to a certain extent during the transportation process between the different devices.
Disclosure of Invention
The application provides a positioning and orienting device for a substrate, which aims to solve the technical problem that the positioning and orienting of the substrate in the prior art are completed by different devices, and the substrate can influence the positioning or orienting to a certain extent in the transportation process of the different devices.
In order to solve the technical problems, the application adopts a technical scheme that: there is provided a positioning and orienting device for a substrate, the positioning and orienting device for a substrate including:
The array assembly comprises a substrate supporting plate, a rotating motor, a first array synchronous belt, a second array synchronous belt, a first array shaft and a second array shaft, wherein the substrate supporting plate is connected with the rotating motor, the first array shaft and the second array shaft are provided with a plurality of shafts, the first array shaft is connected with the first array synchronous belt, the second array shaft is connected with the second array synchronous belt, and the first array synchronous belt is perpendicular to the second array synchronous belt;
The orientation assembly comprises a notch inductor, wherein the position of the notch inductor is fixed, and the notch inductor is used for detecting a notch on the substrate;
The substrate supporting plate bears the substrate, the substrate supporting plate drives the substrate to rotate under the driving of the rotating motor until the notch inductor senses a notch on the substrate, the substrate supporting plate stops rotating so as to orient the substrate, the substrate supporting plate falls on the first alignment shaft and the second alignment shaft, the first alignment shaft moves along the X axis under the driving of the first alignment synchronous belt, and the second alignment shaft moves along the Y axis under the driving of the second alignment synchronous belt so as to transport the substrate to a preset position.
Optionally, the alignment assembly further includes a lift motor connected to the substrate support plate so as to drive the substrate support plate to move vertically.
Optionally, the first alignment axes are symmetrical with respect to the substrate support plate, and the second alignment axes are symmetrical with respect to the substrate support plate.
Optionally, the positioning and orientation device for a substrate further includes a storage component, where the storage component is used to store the substrate, the storage component includes a first bearing plate and a second bearing plate, the first bearing plate and the second bearing plate are arranged at intervals, and the substrate support plate is disposed between the first bearing plate and the second bearing plate.
Optionally, the first loading plate and the second loading plate are provided with loading posts, the loading posts are distributed in a matrix, and one end of each loading post, which is far away from the first loading plate and the second loading plate, is provided with a roller, so that the substrate is placed conveniently.
Optionally, the first alignment shaft and the second alignment shaft are close to the one end of the storage component and are all provided with a rotary drum, and the rotary drum is assembled with the first alignment shaft and the second alignment shaft in a rotating way so as to reduce friction between the substrate and the first alignment shaft and the second alignment shaft.
Optionally, the whole row of components still includes the protective housing, be equipped with first logical groove and second logical groove on the protective housing, first whole row of axle run through in first logical groove, second whole row of axle run through in the second logical groove.
Optionally, a third through slot is further formed in the protective shell, and the substrate support plate penetrates through the third through slot.
Optionally, the alignment assembly further includes an alignment sensor group, where the alignment sensor group is configured to detect a movement position of the first alignment shaft and the second alignment shaft.
Optionally, the first alignment axis is perpendicular to the movement direction of the second alignment axis.
The beneficial effects of the application are as follows: in the positioning and orienting device for the substrate, the substrate supporting plate drives the substrate to rotate until the notch sensor senses the notch on the substrate, the substrate supporting plate stops rotating to orient the substrate, the substrate supporting plate falls on the first arranging shaft and the second arranging shaft, the first arranging shaft moves along the X axis under the drive of the first arranging synchronous belt, and the second arranging shaft moves along the Y axis under the drive of the second arranging synchronous belt, so that the substrate is conveniently transported to a preset position, and the problem that the positioning and orienting of the substrate in the prior art are finished by different devices is solved.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for the description of the embodiments will be briefly described below, and it is apparent that the drawings in the following description are only some embodiments of the present application, and other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art. Wherein:
fig. 1 is a schematic perspective view of a positioning and orienting device for a substrate according to an embodiment of the present application;
FIG. 2 is a schematic perspective view of a portion of a storage assembly in a positioning and orienting device for a substrate;
FIG. 3 is a schematic perspective view of an alignment assembly portion of a positioning and orientation device for a substrate;
FIG. 4 is a schematic perspective view of another view of the alignment assembly portion of the positioning and orientation device for a substrate;
fig. 5 is a schematic perspective view of a portion of an orientation assembly in a positioning and orientation apparatus for a substrate.
Reference numerals illustrate: 100. an alignment assembly; 110. a substrate support plate; 111. a lifting motor; 120. a rotating electric machine; 130. a first whole-row synchronous belt; 140. a second whole row synchronous belt; 150. a first alignment shaft; 151. a rotating drum; 160. a second alignment shaft; 170. a first bi-directional stepper motor; 171. a first fixing seat; 180. a second bidirectional stepper motor; 181. the second fixing seat; 190. a sensor group; 191. a photoelectric sensor; 192. a baffle; 200. an orientation assembly; 210. a notch sensor; 220. combining the fixing plates; 230. a fourth fixing plate; 240. a second support column; 300. a storage component; 310. a first bearing plate; 320. a second bearing plate; 330. a first fixing plate; 340. a load-bearing column; 350. a roller; 400. a storage plate; 410. a second fixing plate; 420. a first support column; 500. and a protective shell.
Detailed Description
The following description of the embodiments of the present application will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present application, but not all embodiments. All other embodiments, which can be made by those skilled in the art without making any inventive effort, are intended to be within the scope of the present application.
It should be noted that, if directional indications (such as up, down, left, right, front, and rear … …) are included in the embodiments of the present application, the directional indications are merely used to explain the relative positional relationship, movement, etc. between the components in a specific gesture (as shown in the drawings), and if the specific gesture is changed, the directional indications are correspondingly changed.
In addition, if there is a description of "first", "second", etc. in the embodiments of the present application, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying a relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defining "a first" or "a second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions of the embodiments may be combined with each other, but it is necessary to base that the technical solutions can be realized by those skilled in the art, and when the technical solutions are contradictory or cannot be realized, the combination of the technical solutions should be considered to be absent and not within the scope of protection claimed in the present application.
As shown in fig. 1 to 5, the present application provides a positioning and orienting device for a substrate, which includes an alignment assembly 100 and an orienting assembly 200.
The alignment assembly 100 includes a substrate support plate 110, a rotating motor 120, a first alignment synchronous belt 130, a second alignment synchronous belt 140, a first alignment shaft 150 and a second alignment shaft 160, wherein the substrate support plate 110 is connected to the rotating motor 120, the first alignment shaft 150 and the second alignment shaft 160 are provided with a plurality of, the first alignment shaft 150 is connected to the first alignment synchronous belt 130, the second alignment shaft 160 is connected to the second alignment synchronous belt 140, and the first alignment synchronous belt 130 is perpendicular to the second alignment synchronous belt 140.
The orientation assembly 200 includes a notch sensor 210, where the notch sensor 210 is fixed in position, and the notch sensor 210 is used to detect a notch on a substrate.
In the positioning and orienting device for a substrate, the substrate support plate 110 carries the substrate, the substrate support plate 110 drives the substrate to rotate under the driving of the rotating motor 120 until the notch sensor 210 senses the notch on the substrate, the substrate support plate 110 stops rotating to orient the substrate, the substrate support plate 110 drops the substrate on the first alignment shaft 150 and the second alignment shaft 160, the first alignment shaft 150 moves along the X-axis under the driving of the first alignment synchronous belt 130, and the second alignment shaft 160 moves along the Y-axis under the driving of the second alignment synchronous belt 140, so as to facilitate the transportation of the substrate to a preset position.
The positioning and orienting device for a substrate further comprises a storage assembly 300, wherein the storage assembly 300 comprises a first bearing plate 310, a second bearing plate 320, a first fixing plate 330, bearing columns 340 and rollers 350.
The first bearing plate 310 and the second bearing plate 320 are vertically arranged, the first bearing plate 310 and the second bearing plate 320 are arranged at intervals in parallel, the first fixing plate 330 is rectangular, the first fixing plate 330 is horizontally arranged, the first fixing plate 330 is located on one side, far away from the whole column assembly 100, of the first bearing plate 310, the first fixing plate 310 and the second bearing plate 320 are perpendicular to the first fixing plate 330, the first fixing plate 330 is used for fixing the positions of the first bearing plate 310 and the second bearing plate 320, a plurality of bearing columns 340 are arranged on one side, close to each other, of the first bearing plate 310 and the second bearing plate 320, the bearing columns 340 are cylindrical, the bearing columns 340 are horizontally arranged, the bearing columns 340 are perpendicular to the first bearing plate 310 and the second bearing plate 320, the bearing columns 340 are fixedly assembled with the first bearing plate 310 and the second bearing plate 320, the bearing columns 340 are distributed on the first bearing plate 310 and the second bearing plate 320 in a matrix mode, the bearing columns 340 on the first bearing plate 310 are symmetrical to the bearing columns 340 on the second bearing plate 320, and the distance between the bearing columns 340 and the bearing columns 340 on the first bearing plate 310 and the second bearing plate 320 is smaller than the distance between the bearing columns 340 and the distance between the bearing columns on the base plate 320 is larger than the base plate.
At the end of the bearing column 340 far away from the first bearing plate 310 and the second bearing plate 320, two rollers 350 are provided, the bearing column 340 penetrates through the rollers 350, the rollers 350 are rotationally assembled with the bearing column 340, a certain distance is reserved between the two rollers 350 on each bearing column 340, in the actual working process, the substrates are manually placed on the bearing columns 340 on the first bearing plate 310 and the second bearing plate 320 layer by layer, and the rollers 350 are arranged so as to be convenient for the substrates to be manually placed on the bearing columns 340.
The positioning and orienting device for the substrate further comprises a placement plate 400, the placement plate 400 is horizontally arranged, the placement plate 400 is rectangular, the placement plate 400 and the first fixing plate 330 are arranged at intervals in parallel, the placement plate 400 is located on one side, far away from the first fixing plate 330, of the first bearing plate 310, a second fixing plate 410 is arranged at the center of the placement plate 400, the second fixing plate 410 is rectangular, the second fixing plate 410 is arranged on one side, close to the first fixing plate 330, of the placement plate 400, and the second fixing plate 410 and the placement plate 400 are arranged at intervals in parallel.
Four first support columns 420 are arranged between the second fixing plate 410 and the first fixing plate 330, the first support columns 420 are cylindrical, the first support columns 420 are vertically arranged, the first support columns 420 are perpendicular to the second fixing plate 410 and the storage plate 400, the four first support columns 420 are respectively located at four corners of the second fixing plate 410, the upper ends of the first support columns 420 are fixedly assembled with the second fixing plate 410, the lower ends of the first support columns 420 penetrate through the storage plate 400, the first support columns 420 are used for fixing the positions of the second fixing plate 410, a yielding hole is formed in the center position of the second fixing plate 410, and the yielding hole penetrates through the second fixing plate 410.
The alignment assembly 100 is disposed below the first carrier 310 and the second carrier 320, and the alignment assembly 100 includes a substrate support plate 110, a rotating motor 120, a first bi-directional stepper motor 170, a first fixing seat 171, a second fixing seat 181, a second bi-directional stepper motor 180, a lifting motor 111, a sensor group 190, a first alignment timing belt 130, a second alignment timing belt 140, a first alignment shaft 150, and a second alignment shaft 160.
The base plate backup pad 110 is discoid, base plate backup pad 110 level sets up, base plate backup pad 110 is located the centre of first loading board 310 and second loading board 320 and base plate backup pad 110 is located the below of loading post 340, be equipped with rotating electrical machines 120 in the one side that second fixed plate 410 is close to putting thing board 400, rotating electrical machines 120 and second fixed plate 410 fixed assembly, the output of rotating electrical machines 120 runs through the hole of stepping down on second fixed plate 410, base plate backup pad 110 links to each other with the output of rotating electrical machines 120, rotating electrical machines 120 can drive base plate backup pad 110 rotation.
The lifting motor 111 is arranged on one side of the object placing plate 400 far away from the second fixing plate 410, the lifting motor 111 is fixedly assembled at the central position of the object placing plate 400, the output end of the lifting motor 111 is vertically downward, the output end of the lifting motor 111 can vertically reciprocate, a third fixing plate is further arranged on one side of the lifting motor 111 far away from the object placing plate 400, the third fixing plate is rectangular, the third fixing plate is arranged at intervals parallel to the object placing plate 400, four corners of the third fixing plate are fixedly assembled with one end of the four first supporting columns 420 far away from the second fixing plate 410, and the lifting motor 111 is fixedly connected with the central position of the third fixing plate, so that the lifting motor 111 can drive the first supporting columns 420 to vertically move, and then the substrate supporting plates 110 are driven to vertically move.
The first bidirectional stepper motor 170 is transversely arranged, the first bidirectional stepper motor 170 is fixedly assembled with the object placing plate 400, the output end of the first bidirectional stepper motor 170 is connected with the first whole row synchronous belt 130, the first whole row synchronous belt 130 is horizontally arranged, the direction of the first whole row synchronous belt 130 is perpendicular to the arrangement direction of the first bidirectional stepper motor 170, the direction along the first whole row synchronous belt 130 is the X-axis direction, and the first bidirectional stepper motor 170 can drive the first whole row synchronous belt 130 to reciprocate along the X-axis direction.
The second bidirectional stepper motor 180 is transversely arranged, the arrangement direction of the second bidirectional stepper motor 180 is perpendicular to the arrangement direction of the first bidirectional stepper motor 170, the output end of the second bidirectional stepper motor 180 is connected with the second whole-row synchronous belt 140, the second whole-row synchronous belt 140 is horizontally arranged, the direction of the second whole-row synchronous belt 140 is perpendicular to the arrangement direction of the second bidirectional stepper motor 180, the second whole-row synchronous belt 140 is perpendicular to the first whole-row synchronous belt 130, the direction along the second whole-row synchronous belt 140 is in the Y-axis direction, the intersection point of the second whole-row synchronous belt 140 and the first whole-row synchronous belt 130 is located at the center position of the second fixing plate 410, and the second bidirectional stepper motor 180 can drive the second whole-row synchronous belt 140 to reciprocate along the Y-axis direction.
The first fixing bases 171 are U-shaped, the first fixing bases 171 are vertically arranged, the two first fixing bases 171 are fixedly connected with the first alignment synchronous belt 130, so that the first bidirectional stepping motor 170 can drive the two first fixing bases 171 to reciprocate along the X axis, two first alignment shafts 150 are arranged at one end, far away from the storage plate 400, of each first fixing base 171, each first alignment shaft 150 is cylindrical, the two first alignment shafts 150 are arranged at intervals in parallel, and the two first alignment shafts 150 are symmetrical with respect to the first alignment synchronous belt 130.
The second fixing bases 181 are also U-shaped, the second fixing bases 181 are vertically arranged, the second fixing bases 181 are provided with two second fixing bases 181 and are fixedly connected with the second alignment synchronous belt 140, so that the second bidirectional stepping motor 180 can drive the two second fixing bases 181 to reciprocate along the Y axis, two second alignment shafts 160 are arranged at one end, away from the storage plate 400, of each second fixing base 181, the second alignment shafts 160 are cylindrical, the two second alignment shafts 160 are arranged at intervals in parallel, and the two second alignment shafts 160 are symmetrical with respect to the second alignment synchronous belt 140.
The first alignment shaft 150 and the second alignment shaft 160 are respectively provided with a rotary drum 151 on one side far away from the first fixing seat 171, the rotary drum 151 is cylindrical, the diameter of the rotary drum 151 is the same as that of the first alignment shaft 150 and the second alignment shaft 160, the rotary drum 151 is vertically arranged, the rotary drum 151, the first alignment shaft 150 and the second alignment shaft 160 are rotationally assembled, the rotary drum 151 can rotate around the axis of the first alignment shaft 150, in the actual working process, a substrate bearing plate can fall on the rotary drum 151, the first alignment shaft 150 and the second alignment shaft 160 respectively move along the X axis and the Y axis to transport the substrate to a preset position, and positioning of the substrate is achieved, but because the first alignment shaft 150 and the second alignment shaft 160 are not synchronous in place, sliding friction is generated between the first alignment shaft 150 and the second alignment shaft 160 and the substrate if the rotary drum 151 is not arranged, and the sliding friction can be converted into rotational friction so that abrasion of the substrate is reduced.
The sensor group 190 comprises a plurality of photoelectric sensors 191 and a plurality of baffle plates 192, wherein the baffle plates 192 are respectively arranged on two sides of the first fixing seat 171 and the second fixing seat 181, the baffle plates 192 are fixedly assembled with the first fixing seat 171 and the second fixing seat 181, the plurality of photoelectric sensors 191 are arranged on two sides of the first whole-row synchronous belt 130, the plurality of photoelectric sensors 191 are arranged on two sides of the second whole-row synchronous belt 140, and the photoelectric sensors 191 are fixedly assembled with the storage plate 400. In the process that the first fixing seat 171 and the second fixing seat 181 respectively drive the first alignment shaft 150 and the second alignment shaft 160 to move, the blocking pieces 192 on the first fixing seat 171 and the second fixing seat 181 sequentially pass through the photoelectric sensor 191, so that the positions of the first fixing seat 171 and the second fixing seat 181 are obtained, and the movement of the first fixing seat 171 and the second fixing seat 181 is controlled conveniently.
The orientation assembly 200 includes a notch sensor 210, a combination fixture plate 220, a fourth fixture plate 230, and a second support post 240.
The fourth fixed plate 230 is horizontally arranged, the fourth fixed plate 230 is arranged on one side of the object placing plate 400, which is close to the second fixed plate 410, and the fourth fixed plate 230 and the object placing plate 400 are arranged at intervals in parallel, a plurality of second supporting columns 240 are arranged between the fourth fixed plate 230 and the object placing plate 400, the second supporting columns 240 are vertically arranged, the upper ends of the second supporting columns 240 are fixedly connected with the fourth fixed plate 230, the lower ends of the second supporting columns 240 are fixedly connected with the object placing plate 400, the second supporting columns 240 are used for fixing the position of the fourth fixed plate 230, two combined fixed plates 220 are arranged on one side of the fourth fixed plate 230, which is far away from the object placing plate 400, the combined fixed plates 220 are vertically arranged, the combined fixed plates 220 and the fourth fixed plate 230 are fixedly assembled, the heights of the combined fixed plates 220 are adjustable, one end of each combined fixed plate 220, which is far away from the fourth fixed plate 230, is provided with a notch inductor 210, and in the process that the substrate rotates along with the substrate supporting plate 110, when the notch on the substrate is located right above the notch inductor 210, the notch inductor 210 senses the position of the substrate 110, the substrate 110 stops rotating, and the substrate supporting plate is rotated, and the orientation of the substrate is finished.
The protective housing 500 is a cuboid container, and the protective housing 500 is used for holding the whole assembly 100 and the directional assembly 200, so as to protect the whole assembly 100 and the directional assembly 200, the position of the protective housing 500 corresponding to the first whole shaft 150 is provided with a first through groove, the position of the protective housing 500 corresponding to the second whole shaft 160 is provided with a second through groove, the first through groove and the second through groove are both in a strip shape, the first whole shaft 150 penetrates through the first through groove, the second whole shaft 160 penetrates through the second through groove, the position of the protective housing 500 corresponding to the substrate support plate 110 is provided with a third through groove, the shape of the third through groove is matched with that of the substrate support plate 110, and the substrate support plate 110 penetrates through the third through groove.
In summary, in the actual working process, the substrate is manually placed on the carrying columns 340 layer by layer, the lifting motor 111 drives the substrate supporting plate 110 to lift up until the substrate is separated from the carrying columns 340 and falls on the substrate supporting plate 110, the rotating motor 120 drives the substrate supporting plate 110 to rotate 90 degrees and the lifting motor 111 drives the substrate supporting plate 110 to descend again, so that the substrate can fall down along with the substrate supporting plate 110 from the carrying columns 340 on both sides, in the process of falling down, the substrate rotates along with the substrate supporting plate 110 until the notch sensor 210 senses the position of the notch on the substrate, the substrate stops rotating, at this time, the orientation of the substrate is completed, then, the substrate supporting plate 110 continues to fall down to fall on the first alignment shaft 150 and the second alignment shaft 160, and the first alignment shaft 150 and the second alignment shaft 160 respectively move along the X-axis and Y-axis directions to transport the substrate to the preset position, so as to complete the positioning of the substrate.
The positioning and orienting device for the substrate further comprises a frame assembly, wherein the frame assembly is arranged on one side of the whole row of assemblies 100 away from the storage assembly 300, and the frame assembly is used for bearing the whole row of assemblies 100 and the storage assembly 300.
The above embodiments are not intended to limit the scope of the present application, so: all equivalent changes in structure, shape and principle of the application should be covered in the scope of protection of the application.
Claims (10)
1. A positioning and orienting device for a substrate, wherein the substrate is provided with a notch for orientation, the positioning and orienting device for a substrate comprising:
The array assembly (100) comprises a substrate supporting plate (110), a rotating motor (120), a first array synchronous belt (130), a second array synchronous belt (140), a first array shaft (150) and a second array shaft (160), wherein the substrate supporting plate (110) is connected with the rotating motor (120), the first array shaft (150) and the second array shaft (160) are provided with a plurality of shafts, the first array shaft (150) is connected with the first array synchronous belt (130), the second array shaft (160) is connected with the second array synchronous belt (140), and the first array synchronous belt (130) is perpendicular to the second array synchronous belt (140);
An orientation assembly (200) comprising a notch sensor (210), the notch sensor (210) being fixed in position, the notch sensor (210) being configured to detect a notch on the substrate;
The substrate supporting plate (110) is used for bearing the substrate, the substrate supporting plate (110) drives the substrate to rotate under the driving of the rotating motor (120) until the notch inductor (210) induces a notch on the substrate, the substrate supporting plate (110) stops rotating so as to orient the substrate, the substrate supporting plate (110) is further used for enabling the substrate to fall on the first alignment shaft (150) and the second alignment shaft (160), the first alignment shaft (150) can move along the X axis under the driving of the first alignment synchronous belt (130), and the second alignment shaft (160) can move along the Y axis under the driving of the second alignment synchronous belt (140) so as to convey the substrate to a preset position.
2. The positioning and orienting device for substrates according to claim 1, wherein the array assembly (100) further comprises a lift motor (111), the lift motor (111) being connected to the substrate support plate (110) so as to drive the substrate support plate (110) in a vertical motion.
3. The positioning and orientation device for a substrate according to claim 1, characterized in that a number of the first alignment axes (150) are symmetrical with respect to the substrate support plate (110) and a number of the second alignment axes (160) are symmetrical with respect to the substrate support plate (110).
4. The positioning and orientation device for a substrate according to claim 1, further comprising a storage assembly (300), the storage assembly (300) being configured to store the substrate, the storage assembly (300) comprising a first carrier plate (310) and a second carrier plate (320), the first carrier plate (310) and the second carrier plate (320) being arranged at a distance, the substrate support plate (110) being arranged between the first carrier plate (310) and the second carrier plate (320).
5. The positioning and orientation device for a substrate according to claim 4, wherein the first carrier plate (310) and the second carrier plate (320) are provided with carrier columns (340), the carrier columns (340) are distributed in a matrix, and a roller (350) is disposed at one end of the carrier columns (340) away from the first carrier plate (310) and the second carrier plate (320) so as to facilitate placement of the substrate.
6. The positioning and orientation device for substrates according to claim 5, characterized in that the first alignment shaft (150) and the second alignment shaft (160) are each provided with a drum (151) at an end near the storage assembly (300), the drums (151) being rotatably assembled with the first alignment shaft (150) and the second alignment shaft (160) so as to reduce friction between the substrates and the first alignment shaft (150) and the second alignment shaft (160).
7. The positioning and orientation device for a substrate according to claim 1, wherein the alignment assembly (100) further comprises a protective housing (500), a first through slot and a second through slot are provided on the protective housing (500), the first alignment shaft (150) penetrates through the first through slot, and the second alignment shaft (160) penetrates through the second through slot.
8. The positioning and orientation device for a substrate according to claim 7, wherein a third through slot is further provided on the protective case (500), and the substrate support plate (110) penetrates through the third through slot.
9. The positioning and orientation device for a substrate according to claim 1, wherein the alignment assembly (100) further comprises an alignment sensor group (190), the alignment sensor group (190) being configured to detect a movement position of the first alignment shaft (150) and the second alignment shaft (160).
10. The positioning and orientation device for substrates according to claim 1, characterized in that the first alignment axis (150) is perpendicular to the direction of movement of the second alignment axis (160).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410623430.2A CN118220791B (en) | 2024-05-20 | 2024-05-20 | Positioning and orienting device for substrate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202410623430.2A CN118220791B (en) | 2024-05-20 | 2024-05-20 | Positioning and orienting device for substrate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN118220791A true CN118220791A (en) | 2024-06-21 |
| CN118220791B CN118220791B (en) | 2024-07-19 |
Family
ID=91504208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202410623430.2A Active CN118220791B (en) | 2024-05-20 | 2024-05-20 | Positioning and orienting device for substrate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN118220791B (en) |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN212668436U (en) * | 2020-07-15 | 2021-03-09 | 平田精工(大连)有限公司 | Directional arraying device |
| CN216271952U (en) * | 2021-10-29 | 2022-04-12 | 河南省华锐光电产业有限公司 | Glass substrate turntable device |
| CN117023074A (en) * | 2023-09-01 | 2023-11-10 | 深圳市诚亿智能装备集团股份有限公司 | Inclined blanking mechanism for changing glass stacking state |
| CN220290780U (en) * | 2023-06-07 | 2024-01-02 | 环诚智能装备(成都)有限公司 | Alignment device capable of accurately aligning upper wafer and lower wafer |
| CN117415044A (en) * | 2023-12-02 | 2024-01-19 | 深圳市瑞福自动化设备有限公司 | Detection equipment capable of classified transmission |
-
2024
- 2024-05-20 CN CN202410623430.2A patent/CN118220791B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN212668436U (en) * | 2020-07-15 | 2021-03-09 | 平田精工(大连)有限公司 | Directional arraying device |
| CN216271952U (en) * | 2021-10-29 | 2022-04-12 | 河南省华锐光电产业有限公司 | Glass substrate turntable device |
| CN220290780U (en) * | 2023-06-07 | 2024-01-02 | 环诚智能装备(成都)有限公司 | Alignment device capable of accurately aligning upper wafer and lower wafer |
| CN117023074A (en) * | 2023-09-01 | 2023-11-10 | 深圳市诚亿智能装备集团股份有限公司 | Inclined blanking mechanism for changing glass stacking state |
| CN117415044A (en) * | 2023-12-02 | 2024-01-19 | 深圳市瑞福自动化设备有限公司 | Detection equipment capable of classified transmission |
Also Published As
| Publication number | Publication date |
|---|---|
| CN118220791B (en) | 2024-07-19 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US20070020067A1 (en) | Storage cassette for large panel glass substrates | |
| US7108476B2 (en) | Method and device for changing a semiconductor wafer position | |
| JPH0736417B2 (en) | Wafer positioning device | |
| CN107010367A (en) | Multistation feed bin and application method applied to circular or polygon product | |
| CN1289353C (en) | Wrapping machine and top foil wrapping machine | |
| CN206691861U (en) | Applied to circular or polygon product multistation feed bin | |
| JP3439607B2 (en) | Notch alignment device | |
| CN118220791B (en) | Positioning and orienting device for substrate | |
| KR101215591B1 (en) | substrate transfer system | |
| CN202838363U (en) | Test tube bar code reader of blood cell analyzer | |
| CN211576992U (en) | Multi-station AOI detection equipment | |
| CN109178453B (en) | Flywheel material arranging robot | |
| CN217229431U (en) | Test string machine and test system | |
| CN216035300U (en) | Winding machine | |
| JPH0455335B2 (en) | ||
| CN215401210U (en) | Indexing feeding mechanism | |
| CN216763084U (en) | Roller type weighing conveying line | |
| JPH03270253A (en) | Wafer treatment device | |
| CN220077822U (en) | Wafer feeding mechanism of wafer detection equipment | |
| CN218166823U (en) | Electromagnetic stirrer and experimental equipment | |
| JPH0630373B2 (en) | Wafer transfer device | |
| CN218520546U (en) | Steel ring feeding equipment | |
| CN215923728U (en) | Transmission device | |
| CN218769452U (en) | A get piece machine for wafer access | |
| CN213623120U (en) | Lifting carrying assembly |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |