CN218769452U

CN218769452U - A get piece machine for wafer access

Info

Publication number: CN218769452U
Application number: CN202222745166.9U
Authority: CN
Inventors: 冯庆雄; 王志峰; 杨大鹏; 薛联金
Original assignee: Xiamen Pecton Technology Co ltd
Current assignee: Xiamen Pucheng Semiconductor Technology Co ltd
Priority date: 2022-10-18
Filing date: 2022-10-18
Publication date: 2023-03-28
Anticipated expiration: 2032-10-18

Abstract

The utility model discloses a get piece machine for wafer access, including the second frame that is used for the installation, be provided with in the second frame and detect carousel mechanism, a detection position department that detects carousel mechanism sets up first reading sign indicating number detection mechanism, the input position that detects carousel mechanism sets up transport mechanism and first piece mechanism of getting, the output position that detects carousel mechanism is provided with the second and gets piece mechanism, the second is got piece mechanism one side and is set up the rack. The utility model has the advantages that: the fifth card plug which is conveyed and is provided with the wafer is conveyed to the fourth jig through the conveying mechanism, then the wafer in the fifth card plug is taken out through the first wafer taking mechanism and is placed on the placing groove, the second turntable drives the wafer to rotate, in the process, the first code reading detection mechanism and the first code reading detection camera are used for reading and detecting the wafer, and when the wafer is conveyed to the second wafer taking mechanism, the wafer is conveyed to the card plug on the placing frame through the second wafer taking mechanism.

Description

A get piece machine for wafer access

Technical Field

The utility model relates to a semiconductor wafer access technical field, especially a get piece machine for wafer access.

Background

In the semiconductor industry, wafers are an important component of silicon wafers used in the fabrication of silicon semiconductor circuits, and high purity polysilicon is dissolved and doped into silicon crystal seeds and then slowly pulled out to form cylindrical single crystal silicon. After the silicon crystal bar is ground, polished and sliced, a silicon wafer, namely a wafer, is formed.

In a storage warehouse of semiconductor wafers (or wafer boxes or clamping plugs), a plurality of storage grids are arranged, a stacker is used in the storage warehouse to pick and place the wafer boxes in the storage grids, in the actual storage process of the wafer boxes, after some wafer boxes are taken out of the storage warehouse, the wafers are required to be manually taken out of the boxes, and due to uncontrollable factors existing in manual taking of the wafer boxes, for example, the wafers or specific models are easy to take by mistake or collide when the wafers are taken, the manual taking efficiency is low, errors are easy to occur, and therefore the wafer taking machine for wafer storage and taking is provided to solve the problems.

SUMMERY OF THE UTILITY MODEL

An object of the utility model is to overcome prior art's shortcoming, provide a get piece machine for wafer access.

The purpose of the utility model is realized through the following technical scheme:

the utility model provides a get piece machine for wafer access, is including the second frame that is used for the installation, be provided with in the second frame and detect carousel mechanism, it sets up first code detection mechanism to detect a position department of detecting carousel mechanism, the input position that detects carousel mechanism sets up transport mechanism and first piece mechanism of getting, the output position that detects carousel mechanism is provided with the second and gets piece mechanism, the second is got piece mechanism one side and is set up the rack, still be provided with out-of-warehouse buffer memory mechanism in the second frame, and go out-of-warehouse buffer memory mechanism and be located the pan feeding department that first gets piece mechanism.

Preferably, detect carousel mechanism including installing the first mounting panel in the second frame, a first mounting panel side fixed mounting sixth servo motor, the second carousel is installed to sixth servo motor power take off, set up the standing groove that a plurality of set up about the even interval in second carousel center on the second carousel, the fixed third cylinder that sets up in first mounting panel another side, the first code detection camera that reads is installed to the mounting bracket on the third cylinder.

Preferably, the carrying mechanism comprises a supporting frame, a triaxial linear movement module is arranged on the supporting frame, a second servo motor is fixedly mounted on a mounting frame of a power end of the triaxial linear movement module, a rotary plate is mounted at a power output end of the second servo motor, two sliding blocks and every sliding block are arranged below the rotary plate in a sliding mode, a sliding plate is fixedly connected to the bottom surface of each sliding block, a rotary cylinder is mounted on the outer side surface of each sliding plate, a power output end of each rotary cylinder extends to the inner side surface of each sliding plate, a clamping plate is mounted at a power output end of each rotary cylinder, a driving motor is fixedly mounted on one side of the upper surface of the rotary plate, a screw rod is connected between the sliding plates in a transmission mode, and a power input end of the screw rod is connected with a power output end of the driving motor in a transmission mode.

Preferably, the first code reading detection mechanism comprises a second mounting plate, a second air cylinder is mounted on the second mounting plate, and a second code reading detection camera is arranged on a mounting frame of a power output end of the second air cylinder; still be provided with the light source on the second mounting panel, the light source is located the second and reads the sign indicating number detection camera shooting direction, fixed mounting has travel switch on the second mounting panel, travel switch one end is provided with the touch piece, and just touches the piece and follows the second and read the sign indicating number detection camera removal.

Preferably, the second film taking mechanism comprises a third fixing frame installed on the second rack, a fourth servo motor is installed on the bottom surface of the third fixing frame, the power output end of the fourth servo motor extends to the top of the third fixing frame, a sixth linear module is installed at the power output end of the fourth servo motor, and a second sucker is arranged at the power output end of the sixth linear module.

Preferably, the first piece mechanism of getting includes the fourth sharp module, fifth sharp module is installed to fourth sharp module power take off end, install fifth servo motor on the output mounting bracket of fifth sharp module, fifth servo motor power take off end sets up the first sucking disc that is used for absorbing the wafer.

Preferably, the warehouse-out caching mechanism comprises a second fixing frame installed on a second rack, a third servo motor is installed on the bottom surface of the second fixing frame, at least one fourth jig is installed on a support plate of a power output end of the third servo motor, and a fifth clamping plug is arranged on the fourth jig.

Preferably, a fourth clamping plug is further arranged on the second rack, and the fourth clamping plug is located on one side of the second film taking mechanism.

Preferably, one side of second frame is provided with the access storehouse that is used for depositing the wafer, one side of access storehouse is provided with the machine of shifting of access wafer, be provided with the transfer chain that is used for transporting between second frame and the second frame, it deposits or gets the card stopper that is equipped with the wafer that is arranged in the access storehouse to shift the machine.

Preferably, the transfer machine comprises a base located on one side of the access warehouse, a guide rail is arranged on the base, a sliding frame is arranged on the guide rail in a sliding mode, a second linear module which can move up and down is arranged on the sliding frame, a rack is further arranged on the base, a first servo motor is fixedly arranged on the sliding frame, a gear matched with the rack is arranged at the power output end of the first servo motor, and the gear is in meshing transmission with the rack; the power output end of the second straight line module is provided with at least one mounting rack, a second DD motor is mounted on each mounting rack, a third straight line module is mounted at the output end of the second DD motor, a first cylinder is arranged on the third straight line module, and a clamping jaw is arranged at the power output end of the first cylinder.

The utility model has the advantages of it is following:

1. the utility model discloses a fifth card stopper that is equipped with the wafer that transport mechanism will carry and come is transported to the fourth tool on, then take out and place on the standing groove through the first wafer of getting the mechanism with the wafer of fifth card stopper dress, it reads the sign indicating number and detects the wafer through first reading sign indicating number detection mechanism and first reading sign indicating number detection camera to drive the rotatory in-process of wafer at the second carousel, the wafer is transported when getting piece mechanism department to the second, get the card stopper that piece mechanism transported the wafer to the rack through the second, if not in the wafer of wanting then transport to the fourth card stopper, be transported and take out whole in-process and do not need artificial participation at the wafer, degree of automation is higher, make efficiency improve greatly, the artifical risk such as taking the mistake or colliding with of taking place has also been reduced.

2. The utility model discloses a set up two stations on the fourth tool, can make two fifth card fills in and place on the fourth tool, after the wafer in a fifth card fills in is transported and finishes, then only need make the wafer in another fifth card fills in through the rotation of third servo motor by first getting piece mechanism and carry, can in time feed for first getting piece mechanism, improve the transfer efficiency.

3. The utility model discloses a set up and move the machine of carrying, the mode that can not transport with the manual work carries out the card stopper that is equipped with the wafer in the access storehouse, has improved efficiency.

Drawings

Fig. 1 is the whole schematic diagram of the sheet taking machine, the storing and taking warehouse, the transfer machine and the conveying line of the utility model.

Fig. 2 is the overall structure schematic diagram of the sheet taking machine of the present invention.

Fig. 3 is a schematic structural view of the carrying mechanism of the present invention.

Fig. 4 is a schematic view of the splint structure of the present invention.

Fig. 5 is a schematic diagram of the structure of the warehouse-out buffer mechanism of the present invention.

Fig. 6 is a schematic structural view of the detecting turntable mechanism of the present invention.

Fig. 7 is a schematic view of the structure of the placing groove of the present invention.

Fig. 8 is a schematic structural view of the first code reading detection mechanism of the present invention.

Fig. 9 is a schematic structural view of the first sheet taking mechanism of the present invention.

Fig. 10 is a schematic view of the jig of the present invention.

Fig. 11 is a schematic view of the structure of the stopper of the present invention.

Fig. 12 is a schematic structural view of the transfer machine of the present invention.

In the figure, 1, access library; 2. taking a sheet machine; 21. a second frame; 22. placing a rack; 23. a detection turntable mechanism; 231. a first mounting plate; 232. a sixth servo motor; 233. a second turntable; 234. a placement groove; 235. a third cylinder; 236. a first code reading detection camera; 24. a second film taking mechanism; 241. a third fixing frame; 242. a fourth servo motor; 243. a sixth linear module; 244. a second suction cup; 25. a warehouse-out caching mechanism; 251. a second fixing frame; 252. a third servo motor; 253. a fourth jig; 254. a fifth jam; 26. a carrying mechanism; 261. a support frame; 262. a three-axis linear movement module; 263. a second servo motor; 264. a rotating plate; 265. a rotating cylinder; 266. a splint; 267. a drive motor; 268. a slider; 269. a sliding plate; 27. a first film taking mechanism; 271. a fourth linear module; 272. a fifth linear module; 273. a fifth servo motor; 274. a first suction cup; 28. a first code reading detection mechanism; 281. a second mounting plate; 282. a second cylinder; 283. a second code reading detection camera; 284. a light source; 285. a travel switch; 286. a touch block; 29. a fourth jam; 3. a transfer machine; 30. a base; 31. a guide rail; 32. a rack; 33. a second linear module; 34. a carriage; 35. a first servo motor; 36. a second DD motor; 37. a third linear module; 38. a first cylinder; 39. a clamping jaw; 4. and (5) conveying the line.

Detailed Description

To make the objects, technical solutions and advantages of the embodiments of the present invention clearer, the drawings of the embodiments of the present invention are combined to clearly and completely describe the technical solutions of the embodiments of the present invention, and obviously, the described embodiments are some embodiments of the present invention, not all embodiments. The components of embodiments of the present invention, as generally described and illustrated in the figures herein, may be arranged and designed in a wide variety of different configurations.

Thus, the following detailed description of the embodiments of the present invention, as presented in the figures, is not intended to limit the scope of the invention, as claimed, but is merely representative of selected embodiments of the invention. Based on the embodiments of the present invention, all other embodiments obtained by a person skilled in the art without creative efforts belong to the protection scope of the present invention.

As in the embodiment shown in figures 1-12,

the utility model provides a get piece machine for wafer access, is including the second frame 21 that is used for the installation, be provided with on the second frame 21 and detect carousel mechanism 23, a detection position department that detects carousel mechanism 23 sets up first reading detection mechanism 28, the input position that detects carousel mechanism 23 sets up handling mechanism 26 and first piece mechanism 27 of getting, the output position that detects carousel mechanism 23 is provided with the second and gets piece mechanism 24, the second is got piece mechanism 24 one side and is set up rack 22, still be provided with warehouse-out buffer memory mechanism 25 on the second frame 21, and warehouse-out buffer memory mechanism 25 is located the pan feeding department that first piece mechanism 27 of getting.

The fifth card plug 254 with the wafer conveyed is conveyed to the fourth fixture 253 through the conveying mechanism 26, then the wafer loaded in the fifth card plug 254 is taken out through the first wafer taking mechanism 27 and placed on the placing groove 234, the wafer is read and detected through the first code reading detecting mechanism 28 and the first code reading detecting camera 236 in the process that the second rotary disc 233 drives the wafer to rotate, when the wafer is conveyed to the second wafer taking mechanism 24, the wafer is conveyed to the card plug on the placing frame 22 through the second wafer taking mechanism 24, if the wafer is not wanted, the wafer is conveyed to the fourth card plug 29, manual participation is not needed in the whole process that the wafer is conveyed and taken out, the automation degree is high, the efficiency is greatly improved, and risks of taking mistakes or colliding and the like caused by manual taking are reduced.

The detection turntable mechanism 23 comprises a first mounting plate 231 mounted on the second frame 21, a sixth servo motor 232 fixedly mounted on one side of the first mounting plate 231, a second turntable 233 is mounted at the power output end of the sixth servo motor 232, a plurality of placing grooves 234 formed in the center of the second turntable 233 and arranged at uniform intervals are formed in the second turntable 233, a third cylinder 235 is fixedly arranged on the other side of the first mounting plate 231, and a first code reading detection camera 236 is mounted on a mounting frame on the third cylinder 235.

The sixth servo motor 232 is started to drive the second rotary disc 233 to rotate, the taken out wafer in the placing groove 234 also rotates, and when the wafer rotates to the position above the first code reading detection camera 236, the first code reading detection camera 236 scans and detects the code of the wafer;

in the present embodiment, the number of the placement grooves 234 is four, and the placement grooves 234 are uniformly distributed with respect to the central axis of the second rotating disk 233 at intervals, and the number of the placement grooves 234 may be other according to the requirement, and the placement grooves may be set according to the actual requirement, including the four mentioned above, but not limited to.

The carrying mechanism 26 comprises a supporting frame 261, a triaxial linear moving module 262 is arranged on the supporting frame 261, a second servo motor 263 is fixedly mounted on a mounting frame of a power end of the triaxial linear moving module 262, a rotating plate 264 is mounted at a power output end of the second servo motor 263, two sliding blocks 268 are slidably arranged below the rotating plate 264, a sliding plate 269 is fixedly connected to the bottom surface of each sliding block 268, a rotating cylinder 265 is mounted on the outer side surface of each sliding plate 269, the power output end of each rotating cylinder 265 extends to the inner side surface of each sliding plate 269, a clamping plate 266 is mounted at the power output end of each rotating cylinder 265, a driving motor 267 is fixedly mounted on one side of the upper surface of each rotating plate 264, a screw rod is connected between the two sliding plates 269 in a transmission manner, and the power input end of the screw rod is in transmission connection with the power output end of the driving motor 267.

One side of second frame 21 is provided with the access storehouse 1 that is used for depositing the wafer, one side of access storehouse 1 is provided with the machine 3 that moves of moving of access wafer, be provided with the transfer chain 4 that is used for transporting between second frame 21 and the second frame 21, move and move machine 3 and deposit or get the jam that is located the card that is equipped with the wafer in the access storehouse 1, transfer chain 4 can adopt linear electric motor as the motion power supply, drives the jam with crossing linear electric motor and moves, and this structure can easily be thought for the technical staff in the field according to prior art.

The transport mechanism 26 transports the card plug loaded with the wafer transferred from the transport line 4, when the card plug needs to be transported, the three-axis linear motion module 262 is used for three-axis motion, the three-axis motion mode is that the card plug moves in three directions of X, Y and Z in a space, the motion mode is the prior art, and a person skilled in the art can easily think of the motion mode, then the second servo motor 263 is started to drive the rotation plate 264 to rotate for a certain angle, finally the rotation air cylinders 265 at two sides of the rotation plate 264 are started to drive the clamping plates 266 to rotate, after the card plug is positioned between the two clamping plates 266, the driving motor 267 is started to drive the screw rod in transmission connection with the sliding plate 269 through the synchronous belt to rotate, under the guiding sliding of the sliding block 268, the two sliding plates 269 are driven to move oppositely, so as to clamp the card plug to be transported, finally the rotation air cylinders 265 are started to rotate the clamped card plug, and finally the card plug is transported to the warehouse-out buffer mechanism 25 under the linkage of the three-axis linear motion module 262, the driving motor 267, the rotation air cylinders 265 and the like.

The first code reading detection mechanism 28 comprises a second mounting plate 281, a second air cylinder 282 is mounted on the second mounting plate 281, and a second code reading detection camera 283 is arranged on the mounting frame of the power output end of the second air cylinder 282; the second mounting plate 281 is further provided with a light source 284, the light source 284 is located in the shooting direction of the second code reading detection camera 283, a travel switch 285 is fixedly mounted on the second mounting plate 281, one end of the travel switch 285 is provided with a touch block 286, and the touch block 286 moves along with the second code reading detection camera 283.

The second cylinder 282 is started to drive the second code reading detection camera 283 to move towards the direction close to the wafer, when the wafer is moved for a certain distance and then code reading is carried out, the light source 284 can enable the detection area to be brighter during detection, when the code reading detection is finished, the second cylinder 282 drives the second code reading detection camera 283 to return again, when the touch block 286 moves along with the second code reading detection camera 283, the touch block 286 can touch the travel switch 285, and therefore the second cylinder 282 stops moving.

The second film taking mechanism 24 includes a third fixing frame 241 installed on the second frame 21, a fourth servo motor 242 is installed on the bottom surface of the third fixing frame 241, the power output end of the fourth servo motor 242 extends to the top of the third fixing frame 241, a sixth linear module 243 is installed at the power output end of the fourth servo motor 242, and the power output end of the sixth linear module 243 is provided with a second suction cup 244.

The fourth servo motor 242 is started to drive the sixth linear module 243 to rotate, after the sixth linear module 243 rotates to a proper angle, the sixth linear module 243 is started to move the second sucker 244 to the wafer direction, the second sucker 244 is moved to a preset position and then is used for sucking and transferring the wafer, after the wafer is sucked, the sixth linear module 243 is started again to drive the second sucker 244 with the wafer to recover to the initial position, or the fourth servo motor 242 is started to rotate the second sucker 244 with the wafer to the preset position while driving the second sucker 244 to recover to the initial position, and then the wafer is moved to a preset chuck through the sixth linear module 243;

the second pick-up mechanism 24 can also cooperate with the lifting mechanism to move in coordination, so as to convey wafers to the stoppers with different heights.

The first film taking mechanism 27 comprises a fourth linear module 271, a fifth linear module 272 is installed at the power output end of the fourth linear module 271, a fifth servo motor 273 is installed on the output end mounting rack of the fifth linear module 272, and a first suction disc 274 used for sucking the wafer is arranged at the power output end of the fifth servo motor 273.

When taking the wafer, firstly, the fourth linear module 271, the fifth linear module 272 and the fifth servo motor 273 are started, the first suction cup 274 is moved to the wafer under the linkage of the fourth linear module 271, the fifth linear module 272 and the fifth servo motor 273, the wafer is sucked, in the mechanism, the fourth linear module 271 and the fifth linear module 272 realize two-axis motion, namely, the motion in the upper direction, the lower direction, the left direction and the right direction, the fifth servo motor 273 is started to drive the first suction cup 274 to rotate, and the sucked wafer is convenient to transfer.

The warehouse-out buffer mechanism 25 comprises a second fixing frame 251 installed on the second rack 21, a third servo motor 252 is installed on the bottom surface of the second fixing frame 251, at least one fourth jig 253 is installed on the support plate at the power output end of the third servo motor 252, and a fifth plug 254 is arranged on the fourth jig 253.

A fourth blocking plug 29 is further disposed on the second frame 21, and the fourth blocking plug 29 is located on one side of the second film taking mechanism 24.

In this embodiment, the fourth jig 253 is provided with two stations, which may be further provided with a plurality of stations as required, which may be provided according to different requirements, and the two stations are provided on the fourth jig 253, so that two fifth card plugs 254 may be placed on the fourth jig 253, and after a wafer in one fifth card plug 254 is transferred, the wafer in another fifth card plug 254 may be carried by the first sheet taking mechanism 27 only by rotating the third servo motor 252, so that the wafer may be fed to the first sheet taking mechanism 27 in time, and the transfer efficiency may be improved.

The transfer machine 3 comprises a base 30 positioned on one side of the access warehouse 1, a guide rail 31 is arranged on the base 30, a sliding frame 34 is arranged on the guide rail 31 in a sliding mode, a second linear module 33 which can move up and down is arranged on the sliding frame 34, a rack 32 is further arranged on the base 30, a first servo motor 35 is fixedly arranged on the sliding frame 34, a gear matched with the rack 32 is arranged at the power output end of the first servo motor 35, and the gear is in meshing transmission with the rack 32; the power output end of the second straight line module 33 is provided with at least one mounting rack, a second DD motor 36 is mounted on each mounting rack, a third straight line module 37 is mounted at the output end of the second DD motor 36, a first air cylinder 38 is arranged on the third straight line module 37, and a clamping jaw 39 is arranged at the power output end of the first air cylinder 38.

When the card plug needs to be transferred from the access warehouse 1 to the conveying line 4, the first servo motor 35 is started to enable the sliding frame 34 to slide on the guide rail 31 through the gear and the rack 32, so that the clamping jaw 39 is moved to the conveying line 4, the card plug is clamped and conveyed under the linkage of the second linear module 33, the second DD motor 36, the third linear module 37 and the first air cylinder 38, then the first servo motor 35 is started to transfer the clamped card plug to the preset access warehouse 1, the clamped card plug is placed on the access warehouse 1 under the linkage of the second linear module 33, the second DD motor 36, the third linear module 37 and the first air cylinder 38, and after the placement is finished, all the components are restored to the initial positions.

The working process of the utility model is as follows: the carrying mechanism 26 carries the fifth card plug 254 with the wafer conveyed by the conveying line 4 to the fourth fixture 253, then the wafer in the fifth card plug 254 is taken out by the first pick-up mechanism 27 and placed on the placing groove 234, the wafer is read and detected by the first code reading detection mechanism 28 and the first code reading detection camera 236 in the process that the second rotary disc 233 drives the wafer to rotate, and when the wafer is carried to the second pick-up mechanism 24, the wafer is transferred to the card plug on the placing frame 22 by the second pick-up mechanism 24.

The wafer-loaded card stopper is taken out from the storage/retrieval warehouse 1 by the transfer unit 3 and conveyed to the conveyance line 4, and the wafer-loaded card stopper is conveyed to the conveyance mechanism 26 by the conveyance line 4

Although the present invention has been described in detail with reference to the foregoing embodiments, it will be apparent to those skilled in the art that modifications may be made to the embodiments or portions thereof without departing from the spirit and scope of the invention.

Claims

1. A get piece machine for wafer access which characterized in that: including second frame (21) that is used for the installation, be provided with on second frame (21) and detect carousel mechanism (23), it sets up first code detection mechanism (28) of reading to detect a position department of carousel mechanism (23), the input position that detects carousel mechanism (23) sets up transport mechanism (26) and first piece mechanism (27) of getting, the output position that detects carousel mechanism (23) is provided with the second and gets piece mechanism (24), piece mechanism (24) one side of getting of second sets up rack (22), still be provided with out storehouse buffer memory mechanism (25) on second frame (21), and go out storehouse buffer memory mechanism (25) and be located the pan feeding department of first piece mechanism (27) of getting.

2. The wafer picker according to claim 1, wherein: detect carousel mechanism (23) including installing first mounting panel (231) on second frame (21), a first mounting panel (231) side fixed mounting sixth servo motor (232), second carousel (233) are installed to sixth servo motor (232) power take off, set up standing groove (234) that a plurality of set up about the even interval in second carousel (233) center on second carousel (233), first mounting panel (231) another side is fixed to be set up third cylinder (235), first reading code detection camera (236) are installed to the mounting bracket on third cylinder (235).

3. The wafer handler of claim 1, wherein: transport mechanism (26) includes support frame (261), be provided with triaxial rectilinear movement module (262) on support frame (261), fixed mounting has second servo motor (263) on the mounting bracket of triaxial rectilinear movement module (262) power end, rotor plate (264) is installed to second servo motor (263) power take off end, the below slip of rotor plate (264) is provided with two slider (268), every the equal fixedly connected with sliding plate (269) in bottom surface of slider (268), and every revolving cylinder (265) are all installed to the lateral surface of sliding plate (269), and revolving cylinder (265) power take off end extends to sliding plate (269) medial surface, splint (266) are installed to revolving cylinder (265) power take off end, rotor plate (264) upper surface one side fixed mounting has driving motor (267), two the transmission is connected with the lead screw between sliding plate (269), and lead screw power take off end and driving motor (267) power take off end transmission are connected.

4. The wafer handler of claim 1, wherein: the first code reading detection mechanism (28) comprises a second mounting plate (281), a second air cylinder (282) is mounted on the second mounting plate (281), and a second code reading detection camera (283) is arranged on a mounting rack of a power output end of the second air cylinder (282); the second mounting plate (281) is further provided with a light source (284), the light source (284) is located in the shooting direction of the second code reading detection camera (283), a travel switch (285) is fixedly mounted on the second mounting plate (281), one end of the travel switch (285) is provided with a touch block (286), and the touch block (286) moves along with the second code reading detection camera (283).

5. The wafer handler of claim 1, wherein: the second film taking mechanism (24) comprises a third fixing frame (241) installed on a second rack (21), a fourth servo motor (242) is installed on the bottom surface of the third fixing frame (241), the power output end of the fourth servo motor (242) extends to the top of the third fixing frame (241), a sixth linear module (243) is installed on the power output end of the fourth servo motor (242), and a second sucking disc (244) is arranged on the power output end of the sixth linear module (243).

6. The wafer handler of claim 1, wherein: the first wafer taking mechanism (27) comprises a fourth linear module (271), a fifth linear module (272) is installed at the power output end of the fourth linear module (271), a fifth servo motor (273) is installed on an output end mounting frame of the fifth linear module (272), and a first suction disc (274) used for sucking wafers is arranged at the power output end of the fifth servo motor (273).

7. The wafer handler of claim 1, wherein: the ex-warehouse buffer mechanism (25) comprises a second fixing frame (251) installed on a second rack (21), a third servo motor (252) is installed on the bottom surface of the second fixing frame (251), at least one fourth jig (253) is installed on a support plate at the power output end of the third servo motor (252), and a fifth blocking plug (254) is arranged on the fourth jig (253).

8. The wafer handler of claim 1, wherein: and a fourth clamping plug (29) is further arranged on the second rack (21), and the fourth clamping plug (29) is positioned on one side of the second film taking mechanism (24).

9. The wafer handler of claim 1, wherein: one side of second frame (21) is provided with access storehouse (1) that is used for depositing the wafer, one side of access storehouse (1) is provided with the transfer machine (3) that moves of access wafer, be provided with between second frame (21) and be used for transporting transfer chain (4), move transfer machine (3) and deposit or get and take the card stopper that is equipped with the wafer that is arranged in access storehouse (1).

10. The wafer handler of claim 9, wherein: the transfer machine (3) comprises a base (30) located on one side of the access warehouse (1), a guide rail (31) is arranged on the base (30), a sliding frame (34) is arranged on the guide rail (31) in a sliding mode, a second linear module (33) which can move up and down is arranged on the sliding frame (34), a rack (32) is further installed on the base (30), a first servo motor (35) is fixedly installed on the sliding frame (34), a gear matched with the rack (32) is installed at the power output end of the first servo motor (35), and the gear is in meshing transmission with the rack (32); the power output end of the second straight line module (33) is provided with at least one mounting frame, a second DD motor (36) is mounted on each mounting frame, a third straight line module (37) is mounted at the output end of the second DD motor (36), a first air cylinder (38) is arranged on the third straight line module (37), and a clamping jaw (39) is arranged at the power output end of the first air cylinder (38).