CN118160050A - 电子束监视装置及电子束照射*** - Google Patents
电子束监视装置及电子束照射*** Download PDFInfo
- Publication number
- CN118160050A CN118160050A CN202280069145.XA CN202280069145A CN118160050A CN 118160050 A CN118160050 A CN 118160050A CN 202280069145 A CN202280069145 A CN 202280069145A CN 118160050 A CN118160050 A CN 118160050A
- Authority
- CN
- China
- Prior art keywords
- electron beam
- ray
- detection unit
- rays
- ray detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010894 electron beam technology Methods 0.000 title claims abstract description 281
- 238000012806 monitoring device Methods 0.000 title claims abstract description 40
- 238000001514 detection method Methods 0.000 claims abstract description 173
- 230000001678 irradiating effect Effects 0.000 claims abstract description 5
- 238000012544 monitoring process Methods 0.000 claims description 65
- 238000012937 correction Methods 0.000 claims description 29
- 230000007246 mechanism Effects 0.000 claims description 25
- 230000008859 change Effects 0.000 claims description 11
- 230000000903 blocking effect Effects 0.000 claims description 7
- 230000007723 transport mechanism Effects 0.000 claims description 4
- OAICVXFJPJFONN-UHFFFAOYSA-N Phosphorus Chemical compound [P] OAICVXFJPJFONN-UHFFFAOYSA-N 0.000 description 16
- 230000004048 modification Effects 0.000 description 13
- 238000012986 modification Methods 0.000 description 13
- 239000004065 semiconductor Substances 0.000 description 12
- 239000000463 material Substances 0.000 description 10
- 238000006243 chemical reaction Methods 0.000 description 8
- 238000000034 method Methods 0.000 description 7
- 239000012298 atmosphere Substances 0.000 description 6
- 230000035945 sensitivity Effects 0.000 description 5
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- 230000000694 effects Effects 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- 238000003705 background correction Methods 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000011810 insulating material Substances 0.000 description 3
- 229910052751 metal Inorganic materials 0.000 description 3
- 239000002184 metal Substances 0.000 description 3
- 230000000149 penetrating effect Effects 0.000 description 3
- 230000005855 radiation Effects 0.000 description 3
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 2
- 230000002411 adverse Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000015556 catabolic process Effects 0.000 description 2
- 238000006731 degradation reaction Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 239000010936 titanium Substances 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 230000009471 action Effects 0.000 description 1
- 239000012190 activator Substances 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 230000007797 corrosion Effects 0.000 description 1
- 238000005260 corrosion Methods 0.000 description 1
- 230000006866 deterioration Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 239000011133 lead Substances 0.000 description 1
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- 229920000647 polyepoxide Polymers 0.000 description 1
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- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 230000001954 sterilising effect Effects 0.000 description 1
- 238000002834 transmittance Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T1/00—Measuring X-radiation, gamma radiation, corpuscular radiation, or cosmic radiation
- G01T1/29—Measurement performed on radiation beams, e.g. position or section of the beam; Measurement of spatial distribution of radiation
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K5/00—Irradiation devices
- G21K5/04—Irradiation devices with beam-forming means
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/244—Detectors; Associated components or circuits therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
Landscapes
- High Energy & Nuclear Physics (AREA)
- Analytical Chemistry (AREA)
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Health & Medical Sciences (AREA)
- General Engineering & Computer Science (AREA)
- Engineering & Computer Science (AREA)
- Life Sciences & Earth Sciences (AREA)
- General Physics & Mathematics (AREA)
- Molecular Biology (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Measurement Of Radiation (AREA)
- X-Ray Techniques (AREA)
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2021-169425 | 2021-10-15 | ||
| JP2021169425A JP7153783B1 (ja) | 2021-10-15 | 2021-10-15 | 電子線監視装置及び電子線照射システム |
| PCT/JP2022/023485 WO2023062871A1 (ja) | 2021-10-15 | 2022-06-10 | 電子線監視装置及び電子線照射システム |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN118160050A true CN118160050A (zh) | 2024-06-07 |
Family
ID=83600548
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202280069145.XA Pending CN118160050A (zh) | 2021-10-15 | 2022-06-10 | 电子束监视装置及电子束照射*** |
Country Status (4)
| Country | Link |
|---|---|
| EP (1) | EP4390975A1 (ja) |
| JP (1) | JP7153783B1 (ja) |
| CN (1) | CN118160050A (ja) |
| WO (1) | WO2023062871A1 (ja) |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004361195A (ja) * | 2003-06-04 | 2004-12-24 | Iwasaki Electric Co Ltd | 電子ビーム照射装置とその監視システム |
| JP2007010533A (ja) * | 2005-07-01 | 2007-01-18 | Nhv Corporation | 電子線照射装置 |
| JP5672693B2 (ja) * | 2009-10-07 | 2015-02-18 | 富士通株式会社 | Ｘ線分析方法 |
| JP2013053924A (ja) | 2011-09-05 | 2013-03-21 | Ihi Corp | 電子線照射装置および電子線照射装置のスキャンホーン |
-
2021
- 2021-10-15 JP JP2021169425A patent/JP7153783B1/ja active Active
-
2022
- 2022-06-10 EP EP22880577.6A patent/EP4390975A1/en active Pending
- 2022-06-10 WO PCT/JP2022/023485 patent/WO2023062871A1/ja active Application Filing
- 2022-06-10 CN CN202280069145.XA patent/CN118160050A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| EP4390975A1 (en) | 2024-06-26 |
| JP2023059427A (ja) | 2023-04-27 |
| WO2023062871A1 (ja) | 2023-04-20 |
| JP7153783B1 (ja) | 2022-10-14 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |