CN118090161A - Grating diffraction efficiency and tolerance testing device and method - Google Patents
Grating diffraction efficiency and tolerance testing device and method Download PDFInfo
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Abstract
The invention discloses a grating diffraction efficiency and tolerance testing device and method, wherein the device comprises: a laser; the testing module comprises a polarization control element, a light splitting device, a variable focal length lens group, a three-dimensional platform and a grating to be tested; the light splitting device is used for splitting a laser beam emitted by the laser into a first beam and a second beam, the polarization control element is used for tuning the polarization state of the laser beam, the variable-focus lens group is used for focusing and incidence the second beam to the surface of the grating to be detected along a second light path, then the second beam is diffracted to the second light energy detector by the grating to be detected, and the first beam is directly reflected to the first light energy detector along the first light path by the light splitting device; the detection module comprises a first light energy detector, a second light energy detector, a temperature monitor and control terminal equipment; the temperature monitor is used for automatically acquiring the temperature condition of the surface of the grating to be tested in real time, and can synchronously test the diffraction efficiency and the tolerance performance of the grating.
Description
Technical Field
The invention belongs to the technical field of grating diffraction efficiency and tolerance test, and particularly relates to a device and a method for testing grating diffraction efficiency and tolerance.
Background
The grating is used as a key optical element and widely applied to the fields of spectrum analysis, laser technology, optical information processing and the like, and the main function of the grating is to decompose incident light into spectral components with different wavelengths or spatially separate light beams with different directions through diffraction, and the diffraction efficiency of the grating is an important index for measuring the performance of the grating and represents the capability of the grating to convert incident light energy into light energy with specific diffraction orders in the diffraction process. On the other hand, the use of the grating in the high-power laser is limited by the grating material and part of defects generated in the manufacturing process, and the phenomenon that the local temperature of the grating is too high in the use process is easy to cause.
The invention discloses a grating diffraction efficiency testing device and a method, which are disclosed in China patent application number CN202210253223.3, and comprise a light source, a measuring head, a moving assembly and a sample platform, wherein the sample platform is used for placing a grating to be tested, the measuring head is arranged on the moving assembly, the moving assembly is used for driving the measuring head to linearly move on a parallel plane of the grating to be tested, the sample platform is provided with at least a first position and a second position, the first position and the second position have a phase difference in a Z direction, the Z direction is perpendicular to the grating to be tested, and the measuring head is used for receiving a light beam emitted by the light source and irradiating the light beam to the grating to be tested at a set angle and receiving the light beam returned by diffraction of the grating to be tested. Moreover, the process is that the measuring head moves, the grating to be measured is not required to move, the movement flexibility is good, the problems of high bearing requirement on a displacement table, high test time cost, poor test repeatability and reproducibility and the like caused by repeatedly moving the grating are avoided, and the potential safety hazard in the test process is reduced.
The prior art still has some problems, such as: the existing grating detection device and method can only test the diffraction efficiency or the grating surface temperature condition singly, can not synchronously test the diffraction efficiency and the tolerance performance of the grating, is generally complicated and takes longer time, and can not quickly obtain various performance parameters of the grating under different test conditions.
Disclosure of Invention
Aiming at the defects or improvement demands of the prior art, the invention provides a grating diffraction efficiency and tolerance testing device, which tunes the polarization state of laser light through a polarization control element, then divides the laser light into two beams of laser light with a certain energy ratio through a light splitting device, respectively measures the power by a first light energy detector and a second light energy detector, and calculates the diffraction efficiency of a grating to be tested according to the measured data and a grating diffraction model; meanwhile, the device is also provided with a temperature monitor, and the temperature monitor can automatically acquire the temperature condition of the surface of the grating to be tested in real time, so that the tolerance performance of the grating to light spots with different power densities can be tested by adjusting the output power of the laser and the focal length of the variable focal lens group, and the synchronous test of the diffraction efficiency and the grating tolerance performance is realized.
According to a first aspect of the present invention, there is provided a grating diffraction efficiency and tolerance test apparatus comprising:
A laser for emitting a laser beam;
the testing module comprises a polarization control element, a light splitting device, a variable focal length lens group, a three-dimensional platform and a grating to be tested;
the detection module comprises a first light energy detector, a second light energy detector, a temperature monitor and a control terminal device;
The optical splitting device is used for splitting laser emitted by the laser into a first light beam and a second light beam, the polarization control element is used for tuning the polarization state of the laser light beam, the variable focus lens group is used for focusing the second light beam to be incident on the surface of the grating to be tested along a second light path and diffracting the second light beam to the second light energy detector by the grating to be tested, the first light beam is directly reflected to the first light energy detector along a first light path by the optical splitting device, the power of the corresponding laser light beam is measured through the first light energy detector and the second light energy detector, the diffraction efficiency of the grating to be tested is obtained through calculation according to measured data and a grating diffraction model, and the temperature condition of the surface of the grating to be tested is automatically obtained in real time through the temperature monitor, so that synchronous test of the diffraction efficiency and the grating tolerance performance is realized.
In one embodiment of the invention, a polarization control element is arranged on an outgoing light path of the laser, a beam splitting device is arranged on an outgoing light path of the polarization control element, a variable focus lens group, a three-dimensional platform and a grating to be detected are sequentially arranged on a second light path of a beam splitting device, and a first light energy detector, a control terminal device and a temperature monitor are sequentially arranged on a first light path.
In one embodiment of the invention, the wavelength tuning range of the laser is 1000-1100nm, and the power range is set to 0-1000W.
In one embodiment of the present invention, the light splitting device is a beam splitter, the first light beam is reference light generated by the light splitting device, the second light beam is test light generated by the light splitting device, the test light is diffracted by a grating to be tested, and the formed diffracted light is incident on the second light energy detector.
In one embodiment of the present invention, the control terminal device is in communication connection with the first optical energy detector, the second optical energy detector, and the temperature monitor, so as to implement data transmission.
In an embodiment of the present invention, the three-dimensional platform is disposed at the bottom of the to-be-measured grating, and the incident angle of the to-be-measured grating can be adjusted by rotating the three-dimensional platform.
In one embodiment of the present invention, the laser beam measuring device further comprises a laser cut-off device arranged behind the grating to be measured and used for cutting off the laser beam to be measured.
In one embodiment of the present invention, the temperature monitor is disposed obliquely in front of the grating to be measured, and the temperature monitor is a thermal imager.
According to another aspect of the present invention, there is provided a method for testing diffraction efficiency and tolerance of a grating, comprising the steps of:
S100: the method comprises the steps of sequentially arranging a laser, a polarization control element, a light splitting device, a variable-focus lens group, a grating to be tested and a laser cut-off device on a three-dimensional platform on an optical axis, arranging a corresponding light energy detector, a temperature monitor and a control terminal device at a designated position according to the design of an optical path, and completing communication connection between the control terminal device and the two light energy detectors and the temperature monitor;
S200: starting a laser to generate a narrow linewidth polarized laser beam with continuously adjustable wavelength, tuning the polarization state of the laser beam by a polarization control element, and dividing the laser beam into two laser beams with fixed energy ratio by a light splitting device, wherein the laser on a first optical path is reference light, and the laser on a second optical path is test light;
S300: the reference light of the first light path is incident to a first light energy detector, and the reference light power is obtained; after being focused by the variable focal length lens group, the test light of the second light path is incident on the surface of the grating to be tested, and the test light is diffracted by the grating to be tested and then is incident on the second light energy detector, so that the power of the diffracted light is obtained;
S400: starting a temperature monitor, and automatically acquiring the temperature condition of the surface of the grating to be detected in real time;
S500: starting a control terminal device, automatically acquiring test data of the two light energy detectors and the temperature monitor, calculating the diffraction efficiency of the corresponding grating to be tested, and analyzing the surface heating data of the grating to be tested through the acquired test data of the temperature monitor to obtain the tolerance performance of the grating to be tested.
According to another aspect of the present invention, the diffraction efficiency formula of the grating to be measured is:
，
wherein x is the spectral sampling rate of the spectral device for a particular wavelength, For reference light power,/>For the corresponding transmissivity of the variable focus lens group to the test light,/>For diffracting light power,/>The diffraction efficiency of the grating to be measured is obtained.
In general, the above technical solutions conceived by the present invention, compared with the prior art, enable the following beneficial effects to be obtained:
1. According to the grating diffraction efficiency and tolerance testing device, the polarization state of laser is tuned through the polarization control element, then the laser is divided into two beams of laser with a certain energy ratio through the light splitting equipment, the reference light and the test light are respectively measured by the first light energy detector and the second light energy detector, the power is measured, and the diffraction efficiency of the grating to be tested is calculated according to measured data and a grating diffraction model; meanwhile, the device is further provided with a temperature monitor, and the temperature monitor can automatically acquire the temperature condition of the surface of the grating to be measured in real time, so that the tolerance performance of the grating to light spots with different power densities can be tested by adjusting the output power of the laser and the focal length of the variable focal lens group, thereby realizing synchronous test of diffraction efficiency and grating tolerance performance, and further enabling operators to more comprehensively know the performance of the grating, in particular the adaptability under different working environments and use scenes.
2. According to the grating diffraction efficiency and tolerance testing device, the control terminal equipment is arranged to complete communication connection with the light energy detector and the temperature monitor, the control terminal can automatically acquire test data of the light energy detector and the monitor, corresponding diffraction efficiency and grating surface temperature conditions are calculated and displayed, and the tolerance performance of the grating is obtained by analyzing the grating surface temperature rise data, so that synchronous testing of the grating diffraction efficiency and the tolerance performance is achieved.
3. According to the grating diffraction efficiency and tolerance testing device, by adjusting the wavelength and power output of the laser and combining flexible adjustment of focal distance of the variable focal lens group, a highly controllable experimental environment can be constructed for comprehensively testing the tolerance performance of the grating under the action of light spots with different power densities, and the testing method can not only reveal the performance of the grating under different conditions, but also provide important data support for further optimization and application of the grating; specifically, wavelength and power regulation of the laser can simulate different types of light sources and illumination intensity, so that adaptability of the grating to various light sources is comprehensively evaluated, and the variable-focus lens group can realize accurate control of the size of a light spot, so that the test is closer to an actual application scene.
4. According to the grating diffraction efficiency and tolerance testing device, by adjusting the output power and wavelength of the laser and combining with the accurate adjustment of the polarization control element and the flexible operation of the three-dimensional platform, the diffraction efficiency and tolerance performance of the grating under different powers, wave bands, polarization states and incidence angles can be systematically tested; specifically, the output power of the laser is regulated to enable the diffraction efficiency change of the grating under different light intensities to be studied, the diffraction characteristics of the grating to different colors of light can be revealed by changing the laser wavelength, the response of the grating to different polarization states of light can be studied by adding the polarization control element, the light irradiation condition under different incidence angles can be simulated by controlling the three-dimensional platform, the angle response and the angle tolerance of the grating can be evaluated, and the diffraction efficiency and the performance stability of the grating under different incidence angles can be obtained.
Drawings
FIG. 1 is a schematic diagram of an overall structure of a grating diffraction efficiency and tolerance testing device according to an embodiment of the present invention;
FIG. 2 is a flow chart of a method for testing diffraction efficiency and tolerance of a grating according to an embodiment of the invention.
Like reference numerals denote like technical features throughout the drawings, in particular:
The system comprises a 1-laser, a 2-polarization control element, a 3-light splitting device, a 4-variable focus lens group, a 5-grating to be tested, a 6-three-dimensional platform, a 7-laser cut-off device, an 8-first light energy detector, a 9-second light energy detector, a 10-temperature monitor and an 11-control terminal device.
Detailed Description
Hereinafter, embodiments of the present disclosure will be described with reference to the accompanying drawings. It should be understood that the description is only exemplary and is not intended to limit the scope of the present disclosure. In the following detailed description, for purposes of explanation, numerous specific details are set forth in order to provide a thorough understanding of the embodiments of the present disclosure. It may be evident, however, that one or more embodiments may be practiced without these specific details. In addition, in the following description, descriptions of well-known structures and techniques are omitted so as not to unnecessarily obscure the concepts of the present disclosure.
The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the disclosure. The terms "comprises," "comprising," and/or the like, as used herein, specify the presence of stated features, steps, operations, and/or components, but do not preclude the presence or addition of one or more other features, steps, operations, or components.
All terms (including technical and scientific terms) used herein have the same meaning as commonly understood by one of ordinary skill in the art unless otherwise defined. It should be noted that the terms used herein should be construed to have meanings consistent with the context of the present specification and should not be construed in an idealized or overly formal manner.
Some of the block diagrams and/or flowchart illustrations are shown in the figures. It will be understood that some blocks of the block diagrams and/or flowchart illustrations, or combinations of blocks in the block diagrams and/or flowchart illustrations, can be implemented by computer program instructions. These computer program instructions may be provided to a processor of a general purpose computer, special purpose computer, or other programmable data processing apparatus, such that the instructions, when executed by the processor, create means for implementing the functions/acts specified in the block diagrams and/or flowchart.
As can be seen from fig. 1, an embodiment of the present invention provides a grating diffraction efficiency and tolerance testing device, which includes a laser 1 for emitting a laser beam, a testing module, a detecting module, and a laser cut-off 7.
The testing module comprises a polarization control element 2, a light splitting device 3, a variable focus lens group 4, a three-dimensional platform 6 and a grating 5 to be tested;
The detection module comprises a first light energy detector 8, a second light energy detector 9, a temperature monitor 10 and a control terminal device 11;
The light splitting device 3 is configured to split the laser beam emitted by the laser 1 into a first beam and a second beam, the polarization control element 2 is configured to tune a polarization state of the laser beam, the variable focal length lens set 4 is configured to focus the second beam along a second optical path and make the second beam incident on the surface of the grating 5 to be tested, and then the second beam is diffracted by the grating 5 to be tested to the second light energy detector 9, the first beam is directly reflected by the light splitting device 3 along the first optical path to the first light energy detector 8, the power of the corresponding laser beam is measured by the first light energy detector 8 and the second light energy detector 9, the diffraction efficiency of the grating to be tested is obtained according to the measured data and the grating diffraction model, and the temperature condition of the surface of the grating 5 to be tested is automatically obtained in real time by the temperature monitor 10, so as to realize synchronous test of the diffraction efficiency and the grating tolerance performance.
Specifically, the laser 1 is an output end of a laser beam, and the wavelength and the power of the beam output by the laser 1 can be adjusted according to specific application requirements, so that test beams with different wavelengths and power can be output according to requirements, and a gain medium of the laser 1 with adjustable wavelength and power adopts an optical fiber, so that a stable optical path is provided, and higher energy efficiency and higher beam quality of laser are maintained in the transmission process.
In the present embodiment, the wavelength tuning range of the laser 1 is 1000-1100nm, which covers a part of the near infrared spectrum, so that the laser 1 can be applied to spectroscopic analysis, optical measurement and sensing techniques of various materials, and the power range of the laser 1 is set to 0-1000W.
Specifically, the temperature monitor 10 is disposed in front of the optical grating 5 to be measured, the front end collecting unit of the temperature monitor is aligned to the optical grating 5 to be measured, the temperature rising condition of the surface of the optical grating 5 to be measured is measured and collected in real time, the temperature condition of the surface of the optical grating 5 to be measured is automatically obtained in real time, and the terminal control device 11 is in communication connection with the temperature monitor 10, the first optical energy detector 8 and the second optical energy detector 9.
The polarization control element 2 is arranged between the laser 1 and the light splitting device 3, and has the main function of accurately regulating and controlling the polarization state of the laser beam, and can ensure the best performance of the beam when transmitted in the subsequent optical element by regulating parameters such as polarization direction, polarization degree and the like.
In this embodiment, the polarization control element 2 is a half-wave plate, so that the polarization state of light can be accurately controlled, so as to meet the requirement of the system on the polarization state of light.
In this embodiment, the polarization state of the laser is tuned by the polarization control element 2, and then the laser is split into two beams of laser with a certain energy ratio by the light splitting device 3, the reference light and the test light are respectively measured by the first light energy detector 8 and the second light energy detector 9, and the diffraction efficiency of the grating to be measured is calculated according to the measured data and the grating diffraction model; meanwhile, the device is further provided with a temperature monitor 10, and the temperature monitor 10 can automatically acquire the temperature condition of the surface of the grating 5 to be measured in real time, so that the tolerance performance of the grating to light spots with different power densities can be tested by adjusting the output power of the laser 1 and the focal length of the variable focal lens group 4, and operators can more comprehensively know the performance of the grating, in particular the adaptability under different working environments and use scenes.
The light splitting device 3 is a beam splitting component capable of realizing a certain beam splitting ratio, and is arranged on an optical path of the polarization control element 2 to split a laser beam into a first beam and a second beam, wherein the first beam is reference light generated by the light splitting device 3, the second beam is test light generated by the light splitting device 3, the test light is diffracted by a grating to be detected, and the formed diffracted light is incident on the second light energy detector 9.
In this embodiment, the beam splitting apparatus 3 is a beam splitter, which generally has high transmittance and low reflectance, and can effectively split an incident light beam into two beams according to a predetermined ratio while maintaining the polarization state and other optical characteristics of the light beam.
The variable focal length lens set 4 is used for adjusting the size of a light spot of the test light beam incident on the surface of the grating 5 to be tested, the variable focal length lens set is arranged on the second optical path, the laser light beam is divided into test light by the light splitting device 3, the test light is reflected to the grating 5 to be tested by the variable focal length lens set 4, the focal length of the variable focal length lens set 4 is not limited in theory, so that the variable focal length lens set 4 can meet the requirements of different focal lengths, and the light spot size can be accurately adjusted.
In the embodiment, by adjusting the wavelength and the power output of the laser 1 and combining the flexible adjustment of the focal length by the variable focal length lens group 4, a highly controllable experimental environment can be constructed for comprehensively testing the tolerance performance of the grating under the action of light spots with different power densities, and the testing method can not only reveal the performance of the grating under different conditions, but also provide important data support for further optimization and application of the grating; specifically, wavelength and power regulation of the laser 1 can simulate different types of light sources and illumination intensity, so that adaptability of the grating to various light sources is comprehensively evaluated, and the variable-focus lens group 4 can realize accurate control of the size of the light spots, so that the test is closer to a practical application scene.
The position direction of the grating 5 to be measured can be adjusted, so that the incident angle of the laser beam can be adjusted.
It can be known that a polarization control element 2 is arranged on an outgoing light path of the laser 1, a beam splitting device 3 is arranged on an outgoing light path of the polarization control element 2, a variable focal length lens group 4, a three-dimensional platform 6 and a to-be-detected grating 5 are sequentially arranged on a second light path of a beam split by the beam splitting device 3, and the second light beam is diffracted to a second light energy detector 8 through the to-be-detected grating 5; a first light energy detector 8, a control terminal device 11 and a temperature monitor 10 are arranged on the first light path in sequence.
The three-dimensional platform 6 is arranged on the light-emitting path of the variable-focus lens group 4, and is provided with a grating 5 to be tested, when the incident angle of the laser beam needs to be adjusted, the position of the three-dimensional platform 6 can be rotated to change the position of the grating 5 to be tested, and then the incident angle of the laser beam is adjusted.
In this embodiment, by adjusting the output power and wavelength of the laser 1, in combination with the precise adjustment of the polarization control element 2, and the flexible operation of the three-dimensional platform 6, we can systematically test the diffraction efficiency and tolerance performance of the grating at different powers, wavebands, polarization states, and angles of incidence.
The first light energy detector 8 and the second light energy detector 9 are power meters, and are used for acquiring the power of the reference light and the power of the test light, the first light energy detector 8 is located on a first light path, the first light beam of the laser beam split by the beam splitting device, namely, the reference light directly enters the first light energy detector 8, and the first light energy detector 8 can measure the power of the reference light; the second light energy detector 9 is located in the second light path, the second light beam of the laser beam split by the beam splitting device, namely, the test light is focused by the variable focal lens group 4 and enters the to-be-tested grating 5, the to-be-tested grating 5 is diffracted and then enters the second light energy detector 9, and the second light energy detector 9 can measure the power of the diffracted light.
The laser cut-off device 7 is used for cutting off the laser beam 7 to be measured, and mainly aims to prevent or weaken the propagation of the laser beam so as to protect subsequent optical elements or measuring equipment from being damaged by high-intensity laser, and the laser cut-off device 7 is usually made of special optical materials and can effectively absorb or reflect the laser beam, so that the potential hazard to a system is reduced or eliminated; in this embodiment, the laser cut-off device 7 is disposed at the tail end of the second optical path, so as to ensure that the light beam is effectively cut off after the test is completed.
The working principle of the invention is as follows: starting a laser 1 to emit laser beams, tuning the polarization state of the laser beams through a polarization control element 2, splitting the laser beams into two beams of laser beams through a beam splitting device 3, and enabling first beam reference light to enter a first light energy detector 8 along a first light path, so that the power of the reference light is detected; the second light beam test light is incident to the variable focal length lens group 4 along a second light path, focused and converged on the surface of the grating 5 to be tested, the test light is diffracted by the grating 5 to be tested and then is incident to the second light energy detector 9, so that the power of the diffracted light is detected, meanwhile, the temperature monitor 10 is started, the temperature monitor 10 can observe the temperature condition of the surface of the grating 5 to be tested, finally the control terminal device 11 is started, the temperature monitor 10, the first light energy detector 8 and the second light energy detector 9 are in communication connection with the temperature monitor, the control terminal device 11 can automatically acquire test data of the two light energy detectors and the temperature monitor 10, the diffraction efficiency condition of the grating to be tested is calculated through calculation, and the tolerance performance of the grating to be tested is obtained through analyzing the temperature rising data of the surface of the grating to be tested.
In another embodiment of the present invention, the present invention provides a method for testing diffraction efficiency and tolerance of a grating, comprising the steps of:
S100: the laser 1, the polarization control element 2, the light splitting device 3, the variable focal length lens set 4, the grating 5 to be tested and the laser cut-off device 7 which are arranged on the three-dimensional platform 6 are sequentially arranged on an optical axis, and in addition, a corresponding light energy detector, a temperature monitor 10 and a control terminal device 11 are arranged at a designated position according to the design of an optical path, and the control terminal device 11 is in communication connection with the two light energy detectors and the temperature monitor 10.
Specifically, first, a laser 1, a polarization control element 2, a spectroscopic apparatus 3, and a variable focal length lens group 4 of a second optical path are sequentially arranged along the optical path on the optical axis; a first light energy detector 8, a control terminal device 11 and a temperature monitor 10 are arranged in sequence on a first light path, and a variable focus lens group 4, a three-dimensional platform 6, a grating 5 to be tested and a laser cut-off device 7 are arranged in sequence on a second light path.
S200: the laser 1 is started to generate a narrow linewidth polarized laser beam with continuously adjustable wavelength, the polarization state of the laser beam is tuned by the polarization control element 2, and then the laser beam is divided into two laser beams with fixed energy ratio by the light splitting device 3, wherein the beam on the first optical path is reference light, and the beam on the second optical path is test light.
S300: the reference light of the first light path enters the first light energy detector 8 to acquire the reference light power; the test light of the second light path is focused by the variable focal lens group and then converged on the surface of the grating to be tested, the test light is diffracted by the grating to be tested and then enters the second light energy detector 9, and the power of the diffracted light is obtained.
Specifically, the incidence of the grating under different incidence angles can be obtained by adjusting the position of the three-dimensional platform.
S400: the temperature monitor 10 is started to automatically acquire the temperature condition of the surface of the grating 5 to be measured in real time.
Specifically, the tolerance performance of the grating to be tested to light spots with different power densities is tested by adjusting the output power of the laser and the focal length of the variable-focus lens group.
S500: starting the control terminal equipment 11, automatically acquiring test data of the two light energy detectors and the temperature monitor 10, calculating the diffraction efficiency of the corresponding grating 5 to be tested, and analyzing the surface heating data of the grating to be tested through the acquired test data of the temperature monitor 10 to obtain the tolerance performance of the grating 5 to be tested.
Specifically, the diffraction efficiency calculation method of the grating 5 to be measured is as follows:
the laser output by the laser 1 is tuned by the polarization control element 2 and then is incident on the light splitting device, the light splitting device 3 splits the laser with the specific wavelength at the spectrum sampling rate of x, and after the laser is split by the light splitting device 3, the reference beam is incident on the first light energy detector 8 to measure the reference light power as ; The corresponding transmittance of the variable focal length lens group 4 to the test light is/>The test beam is converged on the surface of the grating 5 to be tested through the variable focal length lens set 4, the diffraction light generated by the grating 5 is incident into the second light energy detector 9, and the measured diffraction light power is recorded as; The diffraction efficiency of the grating 5 to be measured on the lasers with different wavelengths can be obtained by changing the wavelength output by the laser 1.
Specifically, the diffraction efficiency formula of the grating 5 to be measured is as follows:
，
Wherein x is the spectral sampling rate of the spectral device for a particular wavelength, For reference light power,/>For the corresponding transmissivity of the variable focus lens group to the test light,/>For diffracting light power,/>The diffraction efficiency of the grating to be measured is obtained.
It will be readily appreciated by those skilled in the art that the foregoing description is merely a preferred embodiment of the invention and is not intended to limit the invention, but any modifications, equivalents, improvements or alternatives falling within the spirit and principles of the invention are intended to be included within the scope of the invention.
Claims (10)
1. A grating diffraction efficiency and tolerance testing device, comprising:
A laser (1) for emitting a laser beam;
the testing module comprises a polarization control element (2), a light splitting device (3), a variable-focus lens group (4), a three-dimensional platform (6) and a grating (5) to be tested;
and a detection module comprising a first light energy detector (8), a second light energy detector (9), a temperature monitor (10) and a control terminal device (11);
The device comprises a light splitting device (3), a polarization control element (2), a variable focal length lens group (4) and a temperature monitor (10), wherein the light splitting device (3) is used for splitting laser emitted by the laser (1) into a first light beam and a second light beam, the polarization control element (2) is used for tuning the polarization state of the laser light beam, the variable focal length lens group (4) is used for focusing the second light beam along a second light path to be incident on the surface of a grating (5) to be tested, then the second light beam is diffracted to a second light energy detector (9) by the grating (5) to be tested, the first light beam is directly reflected to the first light energy detector (8) along a first light path by the light splitting device (3), the power of the corresponding laser beam is measured through the first light energy detector (8) and the second light energy detector (9), the diffraction efficiency of the grating to be tested is obtained through calculation according to measured data and a grating diffraction model, and the temperature condition of the surface of the grating (5) to be tested is automatically obtained in real time through the temperature monitor (10), and therefore the synchronous test of the diffraction efficiency and the grating tolerance performance is achieved.
2. The grating diffraction efficiency and tolerance testing device according to claim 1, wherein a polarization control element (2) is arranged on an emergent light path of the laser (1), a light splitting device (3) is arranged on an emergent light path of the polarization control element (2), a variable focal length lens group (4), a three-dimensional platform (6) and a grating to be tested (5) are sequentially arranged on a second light path of the light splitting device (3), and a first light energy detector (8), a control terminal device (11) and a temperature monitor (10) are sequentially arranged on the first light path.
3. The grating diffraction efficiency and tolerance test device according to claim 2, wherein the wavelength tuning range of the laser (1) is 1000-1100nm and the power range is set to 0-1000W.
4. A grating diffraction efficiency and tolerance test apparatus according to any one of claims 1-3, characterized in that the spectroscopic device (3) is a spectroscope, the first light beam is a reference light generated by the spectroscopic device (3), the second light beam is a test light generated by the spectroscopic device (3), the test light is diffracted by the grating to be tested, and the diffracted light is incident on the second light energy detector (9).
5. A grating diffraction efficiency and tolerance test device according to any one of claims 1-3, characterized in that the control terminal device (11) is in communication connection with the first light energy detector (8), the second light energy detector (9), the temperature monitor (10) for data transmission.
6. A device for testing diffraction efficiency and tolerance of a grating according to any one of claims 1-3, wherein the three-dimensional platform (6) is arranged at the bottom of the grating (5) to be tested, and the incidence angle of the grating to be tested can be adjusted by rotating the three-dimensional platform.
7. A grating diffraction efficiency and tolerance testing device according to any of claims 1-3, further comprising a laser cut-off (7) arranged behind the grating (5) to be tested for cutting off the laser beam to be tested.
8. A grating diffraction efficiency and tolerance testing device according to any one of claims 1-3, characterized in that the temperature monitor (10) is arranged in front of the grating (5) to be tested, and the temperature monitor is a thermal imager.
9. A method for testing diffraction efficiency and tolerance of a grating, implemented using the apparatus of claims 1-8, comprising the steps of:
S100: the method comprises the steps of sequentially arranging a laser (1), a polarization control element (2), a light splitting device (3), a variable-focus lens group (4), a grating to be tested (5) and a laser cut-off device (7) on a three-dimensional platform (6), arranging a corresponding light energy detector, a temperature monitor (10) and a control terminal device (11) at a designated position according to the design of a light path, and completing communication connection between the control terminal device (11) and the two light energy detectors and between the control terminal device (11) and the two light energy monitor (10);
S200: starting a laser (1) to generate a narrow linewidth polarized laser beam with continuously adjustable wavelength, tuning the polarization state of the laser beam by a polarization control element (2), and dividing the laser beam into two beams of laser beams with fixed energy ratio by a light splitting device (3), wherein the beam on a first optical path is reference light, and the beam on a second optical path is test light;
S300: the reference light of the first light path enters a first light energy detector (8) to acquire the power of the reference light; the test light of the second light path is focused by the variable focal lens group and then enters the surface of the grating to be tested, the test light is diffracted by the grating to be tested and enters the second light energy detector (9), and the power of the diffracted light is obtained;
S400: starting a temperature monitor (10) to automatically acquire the temperature condition of the surface of the grating (5) to be measured in real time;
S500: starting a control terminal device (11), automatically acquiring test data of the two light energy detectors and the temperature monitor (10), calculating diffraction efficiency of the corresponding grating (5) to be tested, and analyzing surface heating data of the grating to be tested through the acquired test data of the temperature monitor (10) to obtain tolerance performance of the grating (5) to be tested.
10. The method for testing diffraction efficiency and tolerance of a grating according to claim 9, wherein the diffraction efficiency of the grating (5) to be tested is:
，
wherein x is the spectral sampling rate of the spectral device for a particular wavelength, For reference light power,/>For the corresponding transmissivity of the variable focus lens group to the test light,/>For diffracting light power,/>The diffraction efficiency of the grating to be measured is obtained.
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| CN103926057A (en) * | 2013-11-14 | 2014-07-16 | 中国电子科技集团公司第十一研究所 | Laser damage resistance testing system |
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