CN107702816B - Method for measuring surface temperature of wall material in situ online real-time non-contact manner - Google Patents
Method for measuring surface temperature of wall material in situ online real-time non-contact manner Download PDFInfo
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- CN107702816B CN107702816B CN201711022170.XA CN201711022170A CN107702816B CN 107702816 B CN107702816 B CN 107702816B CN 201711022170 A CN201711022170 A CN 201711022170A CN 107702816 B CN107702816 B CN 107702816B
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- G01K—MEASURING TEMPERATURE; MEASURING QUANTITY OF HEAT; THERMALLY-SENSITIVE ELEMENTS NOT OTHERWISE PROVIDED FOR
- G01K11/00—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00
- G01K11/20—Measuring temperature based upon physical or chemical changes not covered by groups G01K3/00, G01K5/00, G01K7/00 or G01K9/00 using thermoluminescent materials
Abstract
The invention discloses a method for measuring the surface temperature of a wall material in an in-situ online real-time non-contact manner, which comprises the steps of ablating a measured area by a laser module and generating laser plasmas, wherein the excited laser plasmas emit spectrum signals in the cooling process, collecting plasma emitted light through an aspherical reflecting mirror with a double conjugate focus and then coupling the collected plasma to an optical fiber, finally coupling the collected plasma to a spectrometer, and transmitting spectrum data to a computer for analysis: and carrying out correlation analysis on the collected intensity and characteristics of the plasma emission spectrum and the standard spectrum existing in the database to obtain a correlation coefficient, finding the standard spectrum with the highest correlation coefficient or higher than 0.95, and finding and displaying the matrix temperature corresponding to the standard spectrum in the database so as to achieve the purpose of measuring the temperature. The method can realize high-space (mm magnitude) and depth resolution, rapid, non-contact and active wall part temperature measurement.
Description
Technical Field
The invention relates to the technical field of temperature measurement, in particular to a method for measuring the surface temperature of a wall material in an in-situ online real-time non-contact manner.
Background
During the operation of the fusion device tokamak, interaction (PWI) of Plasma with the Wall may occur due to incompleteness of the magnetic field to particle confinement, such as charge exchange between neutral particles, charged particles transported along the magnetic lines of force, plasma rupture, etc. During PWI, the wall member is constantly subjected to direct irradiation by thermal plasma, fusion alpha particles, 14MeV fusion seeds, neutral atoms, etc., which causes the surface temperature of the wall member to rise. In particular, for a tokamak device with a partial filter configuration for high-temperature full superconductivity, in the steady state and long pulse operation process, the long-time plasma interacts with the wall to lead the surface temperature of the first wall material to rise sharply, so that the material corrodes, melts and evaporates. The drastic change in temperature of the first wall material will seriously affect the service performance of the material, shorten the operating life of the device and even jeopardize the safety of the device. Therefore, there is a need to develop a method that can measure the surface temperature of a wall material in situ, on-line, and in real time.
The main methods for measuring the surface temperature of the sample at present mainly comprise an infrared temperature measuring method and a thermocouple temperature measuring method. The infrared temperature measuring method can measure the surface temperature of the wall material in situ, online and real time, and is currently used in the superconducting tokamak EAST fusion device in China, but the manufacturing cost is very high. The thermocouple temperature measuring method has the advantages of low manufacturing cost, easy calibration, easy use and the like, but is limited by various environments in practical application because the method needs to be contacted with the surface of a measured sample, and is easy to damage.
LIBS has been widely used in a variety of fields because it is a pure spectroscopy method and has the advantages of in situ, online, non-contact, active real-time diagnostics, etc. The working principle is that a high-intensity pulse laser beam irradiates the surface of a measured sample, heats a small volume of an analyzed area, and generates transient laser plasma above the irradiated area. And analyzing the spectrum emitted by the transient laser plasma by using a spectrometer, so that the material can be diagnosed and analyzed.
Experimental results show that LIBS spectrum emission intensity and characteristics have strong correlation with the surface temperature of a measured sample, so that the LIBS technology can be used for carrying out 3D measurement on the surface temperature of the sample by properly calibrating the LIBS spectrum emission intensity and characteristics. Conventional LIBS techniques can control the ablation area by plano-convex lenses, typically with an ablation area of less than 1mm 2 The ablation depth is controllable, so that the LIBS temperature measurement technology can be used for measuring the temperature of a sample in a high space and with high depth resolution. LIBS is a pure spectroscopy technology, so that in-situ, online, non-contact and active diagnosis can be realized. In addition, due to the development of laser technology and spectrometer technology, the spectrum emission and acquisition time can be controlled in the order of seconds. Thus, a measurement method that can be performed in real time is also provided.
Disclosure of Invention
The invention aims to provide a rapid, non-contact and active wall part temperature measurement method capable of realizing high space (in the order of mm) and depth resolution.
The invention provides a method for measuring the surface temperature of a wall material in an in-situ online real-time non-contact manner, which comprises the steps of ablating a measured area by using a laser module and generating laser plasmas, wherein the excited laser plasmas emit spectrum signals in a cooling process, collecting plasma emitted light through an aspherical reflecting mirror with a double conjugate focus and then coupling the collected plasma to an optical fiber, finally coupling the collected plasma to a spectrometer, and transmitting spectrum data to a computer for analysis: and carrying out correlation analysis on the collected intensity and characteristics of the plasma emission spectrum and the standard spectrum existing in the database to obtain a correlation coefficient, finding the standard spectrum with the highest correlation coefficient or higher than 0.95, and finding and displaying the matrix temperature corresponding to the standard spectrum in the database so as to achieve the purpose of measuring the temperature.
Preferably, the laser module is an ultrashort pulse laser.
Preferably, the method specifically comprises the following steps:
step 1: and triggering the FPGA time sequence module B2 by using the data acquisition and analysis computer B1, and simultaneously setting the spectrometer B17 to be in an external triggering state.
Step 2: the data acquisition and analysis computer B1 triggers the FPGA time sequence module B2, after receiving the trigger signal, the FPGA time sequence module B2 respectively triggers the pulse laser B3 to emit laser according to the set time sequence, triggers the oscilloscope B10 to start to acquire data, and triggers the spectrometer B17 to acquire transient laser plasma emission spectrum.
Step 3: the laser emitted by the triggered pulse laser B3 expands the laser beam through the laser expander B4 and continues to propagate.
Step 4: the expanded laser light forms a system for adjusting the laser transmission energy through the half wave plate B5 and the polarization cube B6: the proportion of different polarization states of the laser is changed by rotating the angle of the half wave plate B5, and the laser energy is regulated and controlled; the transmissive portion is used to generate the laser plasma necessary for measuring the temperature and the reflective portion enters the residual laser absorber B7.
Step 5: a quartz plate B8 is added in a transmitted laser light path to scatter a small part of laser to a photodiode B9, and the included angle between the quartz plate B8 and the laser is determined according to the position of the photodiode B9, so that the laser emitted by the quartz plate B8 is ensured to irradiate on the photodiode B9; the photodiode B9 is connected with the oscilloscope B10, and monitors the pulse laser energy in real time, and the monitored data are used for later data processing so as to avoid errors introduced by experimental instruments.
Step 6: the transmitted laser light continues to propagate forward, and the ablated laser light is reflected by a laser high reflecting mirror B11 and focused by a parabolic laser focusing reflecting mirror B12.
Step 7: the focused laser light is directed through a central aperture aspherical mirror B13 to impinge the laser light on a sample or wall element B14 under test.
Step 8: the practical requirement on spatial resolution can be realized by precisely regulating and controlling the focusing degree of the laser through a motor and controlling the parabolic laser focusing reflecting mirror B12.
Step 9: the laser is focused onto the sample or wall part B14 to be measured to form a transient laser plasma B15.
Step 10: the central open-pore aspherical mirror B13 reflects and collects the emitted light of the transient laser plasma B15 into the detection fiber B16.
Step 11: the detection fiber B16 transmits the collected emission light into the spectrometer B17.
Step 12: the spectrometer B17 transmits the acquired spectrum signal to the data acquisition and analysis computer B1.
Step 13: the data acquisition and analysis computer B1 analyzes and calculates the correlation between the acquired spectrum and the standard spectrum, and finds the standard spectrum with the highest correlation or the correlation larger than 0.95; and calculating or directly finding the matrix temperature corresponding to the standard spectrum through the calibrated functional relation to obtain the temperature of the measured sample.
Preferably, the method further comprises the step of 14: and if the depth distribution measurement is required to be carried out on the temperature of the sample, repeating the steps 1-13 to obtain temperature information of different depths of different samples.
The beneficial effects are that: the method of the invention can realize high-space (mm magnitude) and depth resolution, rapid, non-contact and active wall part temperature measurement.
Drawings
FIG. 1 is a schematic diagram of the method for measuring the surface temperature of a wall material in situ on-line and real-time in a non-contact manner.
FIG. 2 is a diagram of a special device for in-situ on-line real-time non-contact measurement of the surface temperature of a wall material according to the present invention.
The drawings are marked: a1 is a data acquisition and analysis module, and the function of the module is (1) spectrum data acquisition; (2) analyzing the spectral data and deriving a sample temperature.
A2, the time sequence control module has the functions of (1) controlling the time sequence of the laser; (2) time sequence control oscilloscope data acquisition; and (3) collecting the time sequence regulation spectrum module.
A3 is laser, and its function is to generate laser plasma.
A4 is an ablation laser energy regulation and control module which has the function of regulating and controlling the ablation laser energy under the condition that the spatial distribution of the spot energy is kept unchanged.
A5 is the sample or wall part to be tested.
A6 is a laser plasma spectrum collection module.
A7 is an ICCD spectrometer with adjustable door width.
B1, a data acquisition and analysis computer; b2, an FPGA time sequence control module; b3, a pulse laser, a B4 and a laser beam expander; b5, half-wave plate; b6, polarization cube; b7, a residual laser absorber; b8, quartz plates; b9, a photodiode; b10, an oscilloscope; b11, a laser high-reflection mirror; b12, a parabolic laser focusing reflector; b13, a center hole aspherical reflecting mirror; b14, the sample to be tested or the wall part; b15, transient laser plasma; b16, detecting optical fibers; b17, a spectrometer.
Description of the embodiments
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
As shown in fig. 1, the method of the present invention mainly comprises 4 modules: (1) a timing control module; (2) a laser module; (3) a spectrum collection module; (4) and the data acquisition and processing module. The invention is not limited in its ablation excitation, but is preferably an ultra-short pulse laser (e.g., picosecond laser, femtosecond laser) for ablating the measured area and generating a laser plasma. Such that the laser heat affected zone (Heating Affect Zone, HAZ) can be reduced; and secondly, the laser ablation depth can be accurately controlled, and the accuracy of the depth resolution capability of the technology is improved. The excited laser plasma emits a spectrum signal in the cooling process, plasma emission light is collected through an aspherical reflecting mirror with a double conjugate focus experimentally and then coupled to an optical fiber, and the advantages of using the aspherical reflecting mirror are that: firstly, spherical aberration and aberration caused by the spherical lens can be avoided, and secondly, the collection solid angle of plasma can be increased. Finally, the collected plasmas are coupled into a spectrometer, and spectral data are transmitted into a computer for analysis. The specific analysis method is that the correlation coefficient is obtained by carrying out correlation analysis on the collected plasma emission spectrum intensity and characteristics and the standard spectrum existing in the database, the standard spectrum with the highest correlation coefficient or higher than (0.95) is found, and the matrix temperature corresponding to the standard spectrum is found in the database and displayed, so that the purpose of measuring the temperature is achieved.
The specific embodiment of the method is described in detail with reference to the schematic diagram of the apparatus in fig. 2:
in order to accurately analyze the temperature of the sample to be measured, LIBS standard spectra of various matrix samples at different temperatures must be established, the characteristics of the standard spectra are analyzed, and a one-to-one correspondence or functional relationship with the matrix temperature is established.
Step 1: and triggering the FPGA time sequence module B2 by using the data acquisition and analysis computer B1, and simultaneously setting the spectrometer B17 to be in an external triggering state.
Step 2: the data acquisition and analysis computer B1 triggers the FPGA time sequence module B2, after receiving the trigger signal, the FPGA time sequence module B2 respectively triggers the pulse laser B3 to emit laser according to the set time sequence, triggers the oscilloscope B10 to start to acquire data, and triggers the spectrometer B17 to acquire transient laser plasma emission spectrum.
Step 3: the laser emitted by the triggered pulse laser B3 expands the laser beam through the laser expander B4 and continues to propagate.
Step 4: the expanded laser light forms a system for adjusting the laser transmission energy through the half wave plate B5 and the polarization cube B6: the proportion of different polarization states of the laser is changed by rotating the angle of the half wave plate B5, and the laser energy is regulated and controlled; the transmissive portion is used to generate the laser plasma necessary for measuring the temperature and the reflective portion enters the residual laser absorber B7.
Step 5: a quartz plate B8 is added in a transmitted laser light path to scatter a small part of laser to a photodiode B9, and the included angle between the quartz plate B8 and the laser is determined according to the position of the photodiode B9, so that the laser emitted by the quartz plate B8 is ensured to irradiate on the photodiode B9; the photodiode B9 is connected with the oscilloscope B10, and monitors the pulse laser energy in real time, and the monitored data are used for later data processing so as to avoid errors introduced by experimental instruments.
Step 6: the transmitted laser light continues to propagate forward, and the ablated laser light is reflected by a laser high reflecting mirror B11 and focused by a parabolic laser focusing reflecting mirror B12.
Step 7: the focused laser light is directed through a central aperture aspherical mirror B13 to impinge the laser light on a sample or wall element B14 under test.
Step 8: the practical requirement on spatial resolution can be realized by precisely regulating and controlling the focusing degree of the laser through a motor and controlling the parabolic laser focusing reflecting mirror B12.
Step 9: the laser is focused onto the sample or wall part B14 to be measured to form a transient laser plasma B15.
Step 10: the central open-pore aspherical mirror B13 reflects and collects the emitted light of the transient laser plasma B15 into the detection fiber B16.
Step 11: the detection fiber B16 transmits the collected emission light into the spectrometer B17.
Step 12: the spectrometer B17 transmits the acquired spectrum signal to the data acquisition and analysis computer B1.
Step 13: the data acquisition and analysis computer B1 analyzes and calculates the correlation between the acquired spectrum and the standard spectrum, and finds the standard spectrum with the highest correlation or the correlation larger than 0.95; and calculating or directly finding the matrix temperature corresponding to the standard spectrum through the calibrated functional relation to obtain the temperature of the measured sample.
Preferably, the method further comprises the step of 14: and if the depth distribution measurement is required to be carried out on the temperature of the sample, repeating the steps 1-13 to obtain temperature information of different depths of different samples.
Summarizing: the invention relates to the technical field of temperature measurement, in particular to a method for measuring the surface temperature of a wall material in an in-situ, online, real-time, non-contact and active mode and capable of being controlled remotely and in a 3D mode. The method is based on laser induced breakdown spectroscopy (Laser Induced Breakdown Spectroscopy, LIBS) technology to measure the surface temperature of the facing wall material in 3D. The invention can realize the temperature measurement of the mm-order space and depth resolution of the sample. In particular, the method is a real-time, in-situ, online, non-contact and active measuring method, works in strong magnetic field and radiation environment, is easy to operate, and is convenient to integrate and miniaturize. The invention is mainly used in the fields of fusion device wall part temperature and the like, and is not excluded from being applied to other technical fields with similar technical characteristics and needing non-contact temperature measurement.
Finally, it should be noted that: the above embodiments are only for illustrating the technical solution of the present invention, and not for limiting the same; although the invention has been described in detail with reference to the foregoing embodiments, it will be understood by those of ordinary skill in the art that: the technical scheme described in the foregoing embodiments can be modified or some or all of the technical features thereof can be replaced by equivalents; such modifications and substitutions do not depart from the spirit of the invention.
Claims (3)
1. A method for measuring the surface temperature of a wall material in an in-situ online real-time non-contact manner is characterized in that a laser module is utilized to ablate a measured area and generate laser plasmas, the excited laser plasmas emit spectrum signals in the cooling process, the plasma emitted light is collected through an aspherical reflector with a double conjugate focus and then coupled to an optical fiber, finally the collected plasmas are coupled to a spectrometer, and spectrum data are transmitted to a computer for analysis: carrying out correlation analysis on the collected plasma emission spectrum intensity and characteristics and the existing standard spectrum in the database to obtain a correlation coefficient, finding the standard spectrum with the highest correlation coefficient or higher than 0.95, and finding and displaying the matrix temperature corresponding to the standard spectrum in the database so as to achieve the purpose of measuring the temperature;
the method specifically comprises the following steps:
step 1: triggering an FPGA time sequence module (B2) by using a data acquisition and analysis computer (B1), and setting a spectrometer (B17) to be in an external triggering state;
step 2: the data acquisition and analysis computer (B1) triggers the FPGA time sequence module (B2), after receiving the trigger signal, the FPGA time sequence module (B2) respectively triggers the pulse laser (B3) to emit laser according to the set time sequence, triggers the oscilloscope (B10) to start to acquire data, and triggers the spectrometer (B17) to acquire transient laser plasma emission spectrum;
step 3: the laser emitted by the triggered pulse laser (B3) expands the laser beam through a laser expander (B4) and continues to propagate;
step 4: the expanded laser light forms a system for adjusting the laser transmission energy through a half wave plate (B5) and a polarization cube (B6): the proportion of different polarization states of the laser is changed by rotating the angle of the half wave plate (B5), and the laser energy is regulated and controlled; the transmission part is used for generating laser plasmas which are necessary for measuring the temperature, and the reflection part enters the residual laser absorber (B7);
step 5: a quartz plate (B8) is added in a transmitted laser light path to scatter a small part of laser light to a photodiode (B9), and the included angle between the quartz plate (B8) and the laser light is determined according to the position of the photodiode (B9) so as to ensure that the laser light emitted by the quartz plate (B8) irradiates the photodiode (B9); the photodiode (B9) is connected with the oscilloscope (B10) and used for monitoring pulse laser energy in real time, and monitored data are used for later data processing so as to avoid errors introduced by the experimental instrument;
step 6: the transmitted laser continues to propagate forwards, and the ablated laser is reflected by a laser high-reflection mirror (B11) and focused by a parabolic laser focusing mirror (B12);
step 7: the focused laser irradiates the sample to be measured or the surface wall part (B14) through the aspheric reflecting mirror (B13) with the central opening;
step 8: the motor is used for accurately regulating and controlling the focusing degree of the laser by a parabolic laser focusing reflecting mirror (B12), so that the practical requirement on spatial resolution can be realized;
step 9: focusing laser on a sample to be tested or a wall part (B14) to form transient laser plasma (B15);
step 10: the central open-pore aspheric mirror (B13) reflects and collects the emitted light of the transient laser plasma (B15) into the detection optical fiber (B16);
step 11: the detection optical fiber (B16) transmits the collected emitted light to the spectrometer (B17);
step 12: the spectrometer (B17) transmits the collected spectrum signals to the data collection and analysis computer (B1);
step 13: the data acquisition and analysis computer (B1) analyzes and calculates the correlation between the acquired spectrum and the standard spectrum, and finds the standard spectrum with the highest correlation or the correlation larger than 0.95; and calculating or directly finding the matrix temperature corresponding to the standard spectrum through the calibrated functional relation to obtain the temperature of the measured sample.
2. The method for in-situ online real-time contactless measurement of surface temperature of a wall material according to claim 1, wherein the laser module is an ultrashort pulse laser.
3. The method of in-situ online real-time contactless measurement of surface temperature of a wall material of claim 1, further comprising the step of 14: and if the depth distribution measurement is required to be carried out on the temperature of the sample, repeating the steps 1-13 to obtain temperature information of different depths of different samples.
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| CN113758992A (en) * | 2020-05-29 | 2021-12-07 | 核工业西南物理研究院 | Plasma surface wall component in-situ diagnosis and defect repair system and method |
| CN115561557B (en) * | 2022-10-17 | 2023-06-09 | 中国空气动力研究与发展中心超高速空气动力研究所 | Device and method for testing electrical properties of heat wave-transparent material based on laser heating |
| CN116429286B (en) * | 2023-06-07 | 2023-09-01 | 西南交通大学 | Object surface transient temperature measurement method, device, equipment and readable storage medium |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007085857A (en) * | 2005-09-21 | 2007-04-05 | Nippon Telegr & Teleph Corp <Ntt> | Data calibration method in surface plasmon resonance spectrum measuring device |
| AT503451B1 (en) * | 2006-06-13 | 2007-10-15 | Ctr Carinthian Tech Res Ag | Solid-state laser for use as ignition source in e.g. jet engine, has resonator held at ends in holding plates, and carrier ring carrying laser diodes mounted between holding plates, where laser diodes are passively wavelength stabilized |
| JP2016017836A (en) * | 2014-07-08 | 2016-02-01 | 住友金属鉱山株式会社 | Metal element concentration analysis method using inductive coupling plasma emission spectrophotometer |
| US9383260B1 (en) * | 2008-05-05 | 2016-07-05 | Applied Spectra, Inc. | Laser ablation analysis system |
| CN107218896A (en) * | 2017-07-26 | 2017-09-29 | 大连理工大学 | The method for measuring vacuum ion plating and plasma spray coating plated film thickness and uniformity |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7440097B2 (en) * | 2006-06-27 | 2008-10-21 | General Electric Company | Laser plasma spectroscopy apparatus and method for in situ depth profiling |
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Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2007085857A (en) * | 2005-09-21 | 2007-04-05 | Nippon Telegr & Teleph Corp <Ntt> | Data calibration method in surface plasmon resonance spectrum measuring device |
| AT503451B1 (en) * | 2006-06-13 | 2007-10-15 | Ctr Carinthian Tech Res Ag | Solid-state laser for use as ignition source in e.g. jet engine, has resonator held at ends in holding plates, and carrier ring carrying laser diodes mounted between holding plates, where laser diodes are passively wavelength stabilized |
| US9383260B1 (en) * | 2008-05-05 | 2016-07-05 | Applied Spectra, Inc. | Laser ablation analysis system |
| JP2016017836A (en) * | 2014-07-08 | 2016-02-01 | 住友金属鉱山株式会社 | Metal element concentration analysis method using inductive coupling plasma emission spectrophotometer |
| CN107218896A (en) * | 2017-07-26 | 2017-09-29 | 大连理工大学 | The method for measuring vacuum ion plating and plasma spray coating plated film thickness and uniformity |
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