CN116336156A - Ultrahigh vacuum rotating device - Google Patents
Ultrahigh vacuum rotating device Download PDFInfo
- Publication number
- CN116336156A CN116336156A CN202310624381.XA CN202310624381A CN116336156A CN 116336156 A CN116336156 A CN 116336156A CN 202310624381 A CN202310624381 A CN 202310624381A CN 116336156 A CN116336156 A CN 116336156A
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- guide rod
- cavity
- rotating shaft
- guide
- bearing
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- 238000007789 sealing Methods 0.000 claims description 31
- 239000004519 grease Substances 0.000 claims description 4
- 230000033001 locomotion Effects 0.000 abstract description 10
- 230000003068 static effect Effects 0.000 abstract description 9
- 238000006073 displacement reaction Methods 0.000 description 4
- 239000000126 substance Substances 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 230000003749 cleanliness Effects 0.000 description 2
- 230000008878 coupling Effects 0.000 description 2
- 238000010168 coupling process Methods 0.000 description 2
- 238000005859 coupling reaction Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000314 lubricant Substances 0.000 description 2
- 239000011553 magnetic fluid Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000008602 contraction Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000005461 lubrication Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
- F16H25/2418—Screw seals, wipers, scrapers or the like
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16H—GEARING
- F16H25/00—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms
- F16H25/18—Gearings comprising primarily only cams, cam-followers and screw-and-nut mechanisms for conveying or interconverting oscillating or reciprocating motions
- F16H25/20—Screw mechanisms
- F16H25/24—Elements essential to such mechanisms, e.g. screws, nuts
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The utility model relates to a rotary device of ultra-high vacuum, comprising: the rotating mechanism comprises a guide rod and a rotating shaft, the rotating shaft is rotationally connected with the cavity through a first bearing, the guide rod penetrates through the cavity through a connecting hole and is inserted into the rotating shaft, a spiral groove is formed in the guide rod, a guide block is fixed in the rotating shaft and is matched with the spiral groove, the linear module is installed outside the cavity through a support, the linear module drives the guide rod to axially move along the rotating shaft, and the connecting hole is sealed with the guide rod through a corrugated pipe. The utility model uses the guide rod of linear motion to drive the rotation of the vacuum inner part, has simple structure and reduced equipment cost; and static seal can be carried out between the guide rod and the cavity through the corrugated pipe, so that reliable seal in an ultra-high vacuum environment is realized.
Description
Technical Field
The utility model relates to the technical field of transmission of vacuum systems, in particular to an ultrahigh vacuum rotating device.
Background
In the application fields of high vacuum and ultra-high vacuum, such as PVD or CVD, the vacuum chamber of the apparatus needs to maintain an extremely high vacuum degree, and since some apparatuses need to transmit the power of the driving end outside the vacuum chamber to the load end inside the vacuum chamber, the prior art often connects the driving end and the load end through a driving shaft, and a certain sealing structure is needed when the driving shaft penetrates through the apparatus to ensure the tightness, but the conventional sealing manner, such as shaft sealing and magnetic fluid sealing, has leakage risks.
In order to solve the problem that the dynamic sealing mode is easy to leak, as disclosed in the Chinese patent publication No. CN201726299U, the magnetic coupling sealing driver adopts a mode of completely isolating the vacuum end from the driving end, adopts a magnet to transmit torsion force to realize rotation of a vacuum part, so that the static sealing can be used for solving the problem, but the magnetic coupling mechanism has the advantages of complex integral structure, large occupied space, more parts and high price.
Disclosure of Invention
Therefore, the utility model aims to overcome the defects of leakage risk and high cost of vacuum dynamic seal in the prior art, provide a novel vacuum environment rotating device and ensure the reliable seal of an ultra-high vacuum environment.
In order to solve the technical problems, the present utility model provides an ultrahigh vacuum rotating device, comprising:
the cavity is provided with a connecting hole;
the rotating mechanism comprises a guide rod and a rotating shaft, the rotating shaft is rotationally connected with the cavity through a first bearing, the guide rod penetrates through the cavity through the connecting hole and is inserted into the rotating shaft, a spiral groove is formed in the guide rod, a guide block is fixed in the rotating shaft, and the guide block is matched with the spiral groove;
the linear module is arranged outside the cavity through a bracket, the linear module drives the guide rod to axially move along the rotating shaft, and the connecting hole is sealed with the guide rod through a corrugated pipe.
In one embodiment of the utility model, the guide rod comprises a rod body and a connector, the spiral groove is arranged on the rod body, the connector is connected to the end part of the rod body outside the cavity, one end of the corrugated pipe is connected with the connector in a sealing way, and the other end of the corrugated pipe is connected with the cavity on the periphery of the connecting hole in a sealing way.
In one embodiment of the utility model, the bellows is connected to the cavity by a first mounting portion, and a sealing ring is arranged between the first mounting portion and the cavity.
In one embodiment of the utility model, a guide bearing is provided between the guide rod and the rotation shaft.
In one embodiment of the utility model, the first bearing and the guide bearing are lubricated by vacuum grease.
In one embodiment of the utility model, the linear module comprises a screw rod, one end of the screw rod is rotatably connected with the bracket through a bearing, the end part of the screw rod is connected with a motor, the screw rod is in threaded connection with a sliding block, the bracket is provided with a sliding rail, the sliding block is in sliding connection with the sliding rail, and the guide rod is connected with the sliding block.
In one embodiment of the utility model, the slider is connected to the guide rod by a connection plate.
In one embodiment of the utility model, the guide block is an externally threaded bearing.
In one embodiment of the utility model, one end of the rotating shaft in the cavity is connected with a rotating tray.
In one embodiment of the utility model, a bearing fixing seat is arranged in the cavity, and the rotating shaft is rotatably connected with the bearing fixing seat.
Compared with the prior art, the technical scheme of the utility model has the following advantages:
according to the rotating device, the guide rod which moves linearly is used for controlling the guide block to move through the spiral groove to drive the rotating shaft to rotate and the rotating tray to rotate, so that static sealing can be carried out between the guide rod and the cavity through the corrugated pipe, sealing is reliable in an ultra-high vacuum environment, the structure is simple and small, the space is saved, the material assembly cost is low, and the assembly and maintenance are convenient.
Drawings
In order that the utility model may be more readily understood, a more particular description of the utility model will be rendered by reference to specific embodiments thereof that are illustrated in the appended drawings, in which
FIG. 1 is a schematic view of the overall structure of the present utility model;
FIG. 2 is a cross-sectional view of the overall structure of the present utility model;
FIG. 3 is a schematic view of the internal structure of the present utility model;
FIG. 4 is a schematic view of a guide bar structure according to the present utility model;
FIG. 5 is a schematic view of the bellows structure of the present utility model;
FIG. 6 is a schematic view of the internal structure of the rotary mechanism of the present utility model;
FIG. 7 is a schematic diagram of a linear module according to the present utility model;
fig. 8 is a schematic diagram of the operation of the present utility model.
Description of the specification reference numerals: 10. a cavity; 11. a connection hole;
20. a rotation mechanism; 21. a guide rod; 211. a lever body; 212. a connector; 22. a rotation shaft; 23. a first bearing; 24. a bearing fixing seat; 25. a spiral groove; 26. a guide block; 27. a guide bearing; 28. rotating the tray;
30. a linear module; 31. a bracket; 32. a motor; 33. a screw rod; 34. a slide block; 35. a slide rail; 36. a connecting plate; 37. a bellows; 38. a first mounting portion; 39. and (3) sealing rings.
Detailed Description
The present utility model will be further described with reference to the accompanying drawings and specific examples, which are not intended to be limiting, so that those skilled in the art will better understand the utility model and practice it.
Referring to fig. 1, 2 and 3, a schematic view of a rotary device for ultra-high vacuum according to the present utility model is shown. The rotating device of the present utility model includes:
the cavity 10, be provided with connecting hole 11 on the cavity 10. The load end is disposed in the cavity 10, in this embodiment, the load end is a rotary tray 28, and the connection hole 11 is used for penetrating out the rotary mechanism 20 to connect with the external driving end of the cavity 10.
The rotating mechanism 20 is used for driving the rotating tray 28 to rotate. The rotating mechanism 20 comprises a guide rod 21 and a rotating shaft 22, and the rotating shaft 22 is rotatably connected with the cavity 10 through a first bearing 23. The first bearing 23 may be embedded in the connection hole 11, or may be disposed outside the cavity 10 or inside the cavity 10 at the outer periphery of the connection hole 11. In this embodiment, in order to avoid oversized connection hole 11, a first bearing 23 is disposed inside the cavity 10, a bearing fixing seat 24 is disposed in the cavity 10, the first bearing 23 is mounted in the bearing fixing seat 24, a hollow rotating shaft 22 is connected to the first bearing 23, and the first bearing 23 supports the rotating shaft 22 to rotate. The rotation shaft 22 is located entirely inside the chamber 10, and the rotation tray 28 is connected to the rotation shaft 22. The guide rod 21 penetrates the cavity 10 through the connecting hole 11 and is inserted into the rotating shaft 22, that is, the guide rod 21 is matched with the rotating shaft 22, and the guide rod 21 is connected with the inside and the outside of the cavity 10. Specifically, a spiral groove 25 is provided on the guide rod 21, a guide block 26 is fixed in the rotation shaft 22, and the guide block 26 is matched with the spiral groove 25. When the guide rod 21 moves along the axial direction of the rotating shaft 22, the guide block 26 is clamped in the spiral groove 25, so that the rotating shaft 22 is driven to move together, but due to the limitation of the first bearing 23, the rotating shaft 22 cannot move along the axial direction, so that the guide block 26 moves in the spiral groove 25, the displacement component of the spiral groove 25 in the axial direction counteracts the displacement of the guide rod 21, and the displacement component of the spiral groove 25 in the circumferential direction enables the rotating shaft 22 to rotate relative to the guide rod 21, so that the rotation of the rotary tray 28 is realized. When the movement speed of the guide bar 21 is the same, the rotational speed of the rotary tray 28 is controlled by the pitch of the spiral groove 25, and the larger the pitch, the slower the rotation, the smaller the pitch and the faster the rotation.
In order to realize the displacement of the guide rod 21 in the axial direction, a linear module 30 is further provided, the linear module 30 is mounted outside the cavity 10 through a bracket 31, the guide rod 21 is connected with the linear module 30, and the guide rod 21 is driven to axially move along the rotating shaft 22 through the linear module 30. At this time, the inside and the outside of the cavity 10 are communicated through the connecting hole 11, and in order to realize the sealing of the cavity 10, the connecting hole 11 is sealed with the guide rod 21 through the corrugated pipe 37. One end of the bellows 37 is connected with the cavity 10 around the connecting hole 11, static seal is arranged between the bellows 37 and the cavity, the other end of the bellows 37 is connected with the guide rod 21, and the guide rod 21 only moves linearly along the axial direction of the rotating shaft 22, the direction is consistent with the expansion and contraction direction of the bellows 37, and the guide rod 21 does not rotate, so that static seal is also arranged between the bellows 37 and the guide rod 21. Although the guide rod 21 connected with the inside and the outside of the cavity 10 moves, the movement does not affect the static sealing of the cavity 10, and the dynamic sealing between the transmission assembly and the cavity 10 is changed into the static sealing, so that the absolute sealing of the cavity 10 is realized.
In the utility model, the corrugated pipe 37 surrounds the guide rod 21, the corrugated pipe 37 plays a role in sealing, the corrugated pipe 37 connects the cavity 10 and the guide rod 21, and the space between the connecting hole 11 and the guide rod 21 is sealed. The rotary motion in the horizontal direction is changed into the linear up-and-down motion, so that the dynamic seal is changed into the static seal, and the magnetic substances sealed by the magnetic fluid are prevented from entering high vacuum. The bellows 37 seals the cavity 10 without magnetic substances, and naturally without the magnetic substances entering the vacuum cavity 10, so that the cleanliness in the cavity 10 is improved when the device works while the tightness is ensured.
Referring to fig. 4, since the bellows 37 is sleeved outside the guide rod 21, the guide rod 21 is in sealing connection with the bellows 37 for convenience, the guide rod 21 includes a rod body 211 and a connector 212, the diameter of the connector 212 is larger than that of the rod body 211, and further, the diameter of the connector 212 is larger than that of the bellows 37. Referring to fig. 5, the spiral groove 25 is disposed on the rod body 211, the connector 212 is connected to the end of the rod body 211 outside the cavity 10, one end of the bellows 37 is connected to the connector 212 in a sealing manner, and since the diameter of the connector 212 is larger than that of the bellows 37, the end of the bellows 37 contacts the surface of the connector 212 facing the cavity 10 and is connected to the surface in a sealing manner. The other end of the corrugated tube 37 contacts the surface of the cavity 10 at the periphery of the connecting hole 11, the connecting hole 11 is enclosed, and the corrugated tube 37 is fixedly connected with the surface of the cavity 10 in a sealing way. The bellows 37 and the guide rod 21 are matched to seal and block the connecting hole 11, the end part of the guide rod 21 is outside the bellows 37, the connection between the linear module 30 and the guide rod 21 is not affected, the guide rod 21 only moves linearly, so that the bellows 37, the cavity 10 and the connector 212 are all static seals, and the reliability of sealing the connecting hole 11 can be ensured. In order to further facilitate the connection between the bellows 37 and the cavity 10, in this embodiment, a first mounting portion 38 is disposed around the bottom surface of the cavity 10 corresponding to the connection hole 11, the first mounting portion 38 is fixedly connected to the cavity 10, and the bellows 37 is connected to the cavity 10 through the first mounting portion 38. In order to improve the tightness of the connection between the first mounting portion 38 and the cavity 10, a sealing ring 39 is provided at the connection between the bellows 37 and the cavity 10.
Referring to fig. 6, since the linear module 30 only moves linearly, the guide bar 21 can only move linearly after being connected to the linear module 30, but since the position connected to the linear module 30 is the end of the guide bar 21, the guide bar 21 has a certain length, in order to prevent the other end of the guide bar 21 from being separated from the spiral groove 25 due to the radial offset generated by the deformation of the guide bar 21 itself, a guide bearing 27 is provided between the guide bar 21 and the rotation shaft 22 in this embodiment. The guide bearings 27 limit the movement of the guide rod 21 in the radial direction, and two guide bearings 27 are provided in the present embodiment to support the guide rod 21, so that the guide rod 21 obtains stable linear movement with high sensitivity and high precision. Since both the first bearing 23 and the guide bearing 27 need lubrication, which are located in a vacuum environment, in order to prevent the lubricant from diffusing into the vacuum, which affects the cleanliness inside the cavity 10, the first bearing 23 and the guide bearing 27 are lubricated by vacuum grease. Vacuum grease is a low-volatility lubricant used in low-pressure environment, and has strong holding capacity to friction surfaces and good sealing performance.
Further, as shown in fig. 2, since the pressing force between the guide block 26 and the spiral groove 25 increases during the movement of the guide bar 21, the guide block 26 is an externally threaded bearing in order to reduce friction loss between the guide block 26 and the spiral groove 25. On the one hand, the guide block 26 is conveniently arranged in the rotary shaft 22, and on the other hand, rolling friction is adopted between the guide block 26 and the spiral groove 25, so that the friction force is small, and the flexible rotation of the rotary shaft 22 is ensured.
Referring to fig. 7, the linear module 30 includes a screw 33, one end of the screw 33 is rotatably connected with the bracket 31 through a bearing, and the end of the screw 33 is connected with a motor 32, in this embodiment, in order to ensure that the motor 32 has enough installation space, the motor 32 is disposed at the bottom of the bracket 31. The upper end of the bracket 31 is mounted on the bottom surface of the cavity 10, and since the bottom surface of the cavity 10 is also connected with the first mounting portion 38, in order to avoid the first mounting portion 38, an avoidance hole is formed in the bracket 31. The motor 32 drives the screw rod 33 to rotate, a sliding block 34 is connected to the screw rod 33 in a threaded manner, a sliding rail 35 is arranged on the bracket 31, the sliding block 34 is in sliding connection with the sliding rail 35, and the sliding block 34 cannot rotate along with the screw rod 33 due to the limitation of the sliding rail 35, but moves along the axial direction of the screw rod 33. The guide rod 21 is connected to the slider 34, so that the guide rod 21 is driven to move in the axial direction of the screw 33. Since the connection surface of the guide rod 21 and the slide block 34 is perpendicular to the connection surface of the slide block 34 and the guide rod 21, the slide block 34 is connected with the guide rod 21 through the connection plate 36 for conveniently connecting the guide rod 21 and the slide block 34.
Referring to fig. 2 and 8, in the rotating device of the present utility model, a guide rod 21 is inserted into a connection hole 11, a first mounting portion 38 is fixed at a position corresponding to the connection hole 11 at the outer bottom surface of a cavity 10, a bearing fixing seat 24 is provided at a position corresponding to the connection hole 11 at the inner bottom surface of the cavity 10, a hollow rotating shaft 22 is connected with a first bearing 23 in the bearing fixing seat 24, the guide rod 21 is inserted into the rotating shaft 22, and the guide rod 21 is connected with the inner wall of the rotating shaft 22 through two guide bearings 27. The upper end of the rotating shaft 22 is connected with a rotating tray 28, a guide block 26 is arranged in the rotating shaft 22, a spiral groove 25 is arranged on the guide rod 21, and the guide block 26 is inserted into the spiral groove 25. The bottom outside the cavity 10 is provided with a bracket 31, the bottom of the bracket 31 is connected with a motor 32, an output shaft of the motor 32 is connected with a screw rod 33, a sliding block 34 is connected to the screw rod 33 in a threaded manner, the sliding block 34 is connected with a connector 212 of the guide rod 21 through a connecting plate 36, the screw rod 33 rotates under the driving of the motor 32, and the sliding block 34 drives the guide rod 21 to move up and down along the axial direction of the screw rod 33. The part of the guide rod 21 outside the cavity 10 is externally surrounded by a corrugated pipe 37, the corrugated pipe 37 stretches and contracts along with the up-and-down movement of the guide rod 21, and the corrugated pipe 37 seals the space between the first mounting part 38 and the connector 212, so that the cavity 10 can maintain an ultrahigh vacuum environment, and the sealing is reliable. According to the utility model, the driving mode of the rotating device is changed, the traditional motor 32 directly drives the rotating tray 28 to rotate through the rotation of the shaft, the guide rod 21 which is converted into linear motion is controlled by the spiral groove 25 to move the guide block 26 to drive the rotating shaft 22 to rotate and the rotating tray 28 to rotate, so that dynamic sealing is not needed, and the device is reliable in sealing, simple and small in structure, saves space, has lower material assembly cost and is convenient to assemble and maintain in an ultra-high vacuum environment.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations and modifications of the present utility model will be apparent to those of ordinary skill in the art in light of the foregoing description. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the utility model.
Claims (9)
1. An ultra-high vacuum rotary device, comprising:
the cavity is provided with a connecting hole;
the rotating mechanism comprises a guide rod and a rotating shaft, the rotating shaft is rotationally connected with the cavity through a first bearing, the guide rod penetrates through the cavity through the connecting hole and is inserted into the rotating shaft, a spiral groove is formed in the guide rod, a guide block is fixed in the rotating shaft, and the guide block is matched with the spiral groove;
the linear module is arranged outside the cavity through a bracket, the linear module drives the guide rod to axially move along the rotating shaft, and the connecting hole is sealed with the guide rod through a corrugated pipe;
the guide rod comprises a rod body and a connector, the spiral groove is formed in the rod body, the connector is connected with the end portion of the rod body outside the cavity, one end of the corrugated pipe is in sealing connection with the connector, and the other end of the corrugated pipe is in sealing connection with the cavity on the periphery of the connecting hole.
2. The ultrahigh vacuum rotary device according to claim 1, wherein the bellows is connected to the chamber via a first mounting portion, and a seal ring is provided between the first mounting portion and the chamber.
3. The ultra-high vacuum rotating apparatus according to claim 1, wherein a guide bearing is provided between the guide rod and the rotating shaft.
4. A rotary device according to claim 3, characterized in that the first bearing and the guide bearing are lubricated by vacuum grease.
5. The ultrahigh vacuum rotating device according to claim 1, wherein the linear module comprises a screw rod, one end of the screw rod is rotatably connected with the bracket through a bearing, the end part of the screw rod is connected with a motor, the screw rod is connected with a sliding block in a threaded manner, the bracket is provided with a sliding rail, the sliding block is in sliding connection with the sliding rail, and the guide rod is connected with the sliding block.
6. The ultra-high vacuum rotating apparatus according to claim 5, wherein the slider is connected to the guide rod through a connection plate.
7. The ultra-high vacuum rotating apparatus according to claim 1, wherein said guide block is an externally threaded bearing.
8. The ultra-high vacuum rotating apparatus according to claim 1, wherein one end of the rotating shaft in the cavity is connected with a rotating tray.
9. The ultra-high vacuum rotating apparatus according to claim 1, wherein a bearing holder is provided in the chamber, and the rotating shaft is rotatably connected to the bearing holder.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310624381.XA CN116336156A (en) | 2023-05-30 | 2023-05-30 | Ultrahigh vacuum rotating device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310624381.XA CN116336156A (en) | 2023-05-30 | 2023-05-30 | Ultrahigh vacuum rotating device |
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| Publication Number | Publication Date |
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| CN116336156A true CN116336156A (en) | 2023-06-27 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN202310624381.XA Pending CN116336156A (en) | 2023-05-30 | 2023-05-30 | Ultrahigh vacuum rotating device |
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| CN118067212A (en) * | 2024-04-18 | 2024-05-24 | 安徽天康(集团)股份有限公司 | Turbine flowmeter for monitoring liquid flow |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN118067212A (en) * | 2024-04-18 | 2024-05-24 | 安徽天康(集团)股份有限公司 | Turbine flowmeter for monitoring liquid flow |
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Application publication date: 20230627 |