CN116165202A - Material texture measuring equipment and image processing method - Google Patents
Material texture measuring equipment and image processing method Download PDFInfo
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- CN116165202A CN116165202A CN202310122370.1A CN202310122370A CN116165202A CN 116165202 A CN116165202 A CN 116165202A CN 202310122370 A CN202310122370 A CN 202310122370A CN 116165202 A CN116165202 A CN 116165202A
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- 239000000463 material Substances 0.000 title claims abstract description 52
- 238000003672 processing method Methods 0.000 title claims abstract description 9
- 238000005259 measurement Methods 0.000 claims description 7
- 239000000284 extract Substances 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 4
- 230000002194 synthesizing effect Effects 0.000 claims description 3
- 230000003028 elevating effect Effects 0.000 claims 1
- 238000000034 method Methods 0.000 description 7
- 238000001514 detection method Methods 0.000 description 6
- 239000000428 dust Substances 0.000 description 5
- 239000011248 coating agent Substances 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- 238000005498 polishing Methods 0.000 description 3
- 239000003638 chemical reducing agent Substances 0.000 description 2
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- 238000005553 drilling Methods 0.000 description 2
- 230000005284 excitation Effects 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 238000006748 scratching Methods 0.000 description 2
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- 238000005305 interferometry Methods 0.000 description 1
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
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Abstract
The invention relates to a material texture measuring device and an image processing method. The image sensor is used for sensing light images; the semi-reflecting semi-transparent mirrors are obliquely arranged below the image sensor at intervals; the light-transmitting plates are arranged below the half-reflecting half-transmitting mirror at intervals; the rotary table is positioned below the light-transmitting plate, a piece to be detected is placed on the rotary table, the piece to be detected rotates along with the rotary table in a control manner, monochromatic line polarized light of the light generator irradiates the half-reflecting half-lens, the monochromatic line polarized light irradiates the light-transmitting plate through reflection of the half-reflecting half-lens, part of reflected light and the other part of reflected light irradiate the piece to be detected through the light-transmitting plate and then are reflected back to the light-transmitting plate to interfere, and interference light is received by the image sensor after passing through the half-reflecting half-lens so as to identify interference light pictures on the surface of the piece to be detected; the rotary table controls the to-be-measured piece to uniformly and slowly rotate at fixed points, so that the image sensor can identify interference images of each position of the to-be-measured piece.
Description
Technical Field
The invention relates to the technical field of material texture measurement, in particular to a material texture measurement device and an image processing method.
Background
In the prior art, according to practical design and application requirements, the textures of the surface, the edge and the holes of an object to be measured, such as thickness and flatness of a film surface after material coating, are required to be measured and reflected rapidly; detecting the number and the depth of scratches on the surface after polishing the metal; and (5) detecting the edge of the drilled hole after the surface of the object is drilled.
The common surface flatness measuring method can use a dial indicator to slide along a one-dimensional path to obtain a two-dimensional image, and then use a plurality of groups of measuring modes to obtain a three-dimensional image of the surface of the material. The method has long measurement period, is difficult to measure plane runout of 1 mu m, is in stress contact with the material, and has the risk of scratching the surface of the material. Or an interferometer or electrons are used for scanning, but the equipment cost is high, the use difficulty is high, and the large-area use cannot be realized. The prior art discloses a device and a method for measuring a material photoinduced deformation coefficient based on an optical interference principle, wherein an interference light source is disclosed for emitting interference light; the excitation light source is used for emitting excitation light for inducing material deformation; the half-reflecting mirror is arranged on an emergent light path of the interference light source; the plane mirror is arranged on the transmission light path of the half-reflecting half-lens; the technical scheme that interference fringes can be formed on an observation screen after light emitted by an interference light source passes through a half-reflecting lens and a material to be detected, however, when the deformation coefficient of the material is measured by utilizing the light interference principle, the requirement on the precision of an instrument is high, and strict requirements are also imposed on the environment, for example, when the instrument is used, when air dust is attached to a local part of the half-reflecting mirror, the deformation coefficient measurement of the corresponding material at the part can be influenced, so that the accuracy of a detection result is influenced, and repeated detection is needed to cause low detection efficiency;
therefore, there is a need to solve the technical problems of low accuracy and low efficiency in measuring texture of materials in the prior art.
Disclosure of Invention
A first object of the present invention is to provide a material texture measuring apparatus, which aims to solve the technical problems of low accuracy and low efficiency in measuring material texture.
In order to solve the technical problems, the material texture measuring device comprises a light generator, an image sensor, a half-reflecting half-lens, a light-transmitting plate and a rotary table. The light emitter is used for manufacturing stable monochromatic linear polarized light, and the light rays are emitted in parallel; the image sensor is used for sensing light images; the half-reflecting mirrors are obliquely arranged below the image sensor at intervals; the light-transmitting plates are arranged below the half-reflecting mirror at intervals; the rotating table is positioned below the light-transmitting plate, a piece to be detected is placed on the rotating table, the piece to be detected rotates under the control of the rotating table, monochromatic linear polarized light of the light generator irradiates to the half-reflecting half-lens, the monochromatic linear polarized light irradiates to the light-transmitting plate through the reflection of the half-reflecting half-lens, on the light-transmitting plate, part of reflected light and the other part of light irradiate on the piece to be detected through the light-transmitting plate and then are reflected back to the light-transmitting plate to interfere, and interference light is received by the image sensor after passing through the half-reflecting half-lens so as to identify interference light pictures on the surface of the piece to be detected;
the rotary table controls the to-be-detected piece to uniformly and slowly rotate at fixed points, so that the image sensor can identify interference images of each position of the to-be-detected piece.
Further, the material texture measuring apparatus further includes a driving source for driving rotation of the rotary table, and an encoder electrically connected to the driving source to control a rotation angle of the rotary table.
Further, the encoder is a time grating or a grating, and the precision of the rotation angle of the rotary table is-3 'to +3'.
Further, the material texture measuring device further comprises a lifting table fixedly connected with the light-transmitting plate, and when the light-transmitting plate is lifted by the lifting table, the to-be-measured piece can be taken and placed on the rotating table.
Further, the lifting platform further comprises a first driving rod and a second driving rod, the first driving rod is fixed at one end of the light-transmitting plate, the second driving rod is fixed at the other end of the light-transmitting plate, and when the distance between the first driving rod and the light-transmitting plate is different from the distance between the second driving rod and the light-transmitting plate, the light-transmitting plate forms an included angle relative to the rotating platform.
Further, the image sensor comprises a plurality of sensing units which are arranged in an array, and each sensing unit is used for sensing interference light pictures at different positions on the surface of the to-be-detected piece.
Further, the encoder is used for controlling the driving source to drive the rotary table to rotate for a certain angle until the rotary table rotates for one circle or a plurality of circles, and the image sensor records and collects image data once after the rotary table rotates each time.
A second object of the present invention is to provide an image processing method, which aims to solve the technical problems of low accuracy and low efficiency of texture of display materials.
In order to solve the technical problem, the image processing method is provided, the material texture measuring device further comprises a memory and a processor, the memory is used for storing the picture data of the interference light, and the processor synthesizes an interference light total graph according to the picture data of the memory.
Further, the processor synthesizes an interference light total map according to the picture data of the memory, including: and the processor extracts the picture data of the memory, filters out malformed picture data caused by the equipment to obtain a data set, and compares and merges the data set to obtain the interference light total image of the to-be-detected piece.
The implementation of the embodiment of the invention has the following beneficial effects:
1. in the material texture measuring device in this embodiment, since the to-be-measured piece is placed on the rotary table and can rotate along with the rotary table, when light is reflected by the half-reflecting and half-transmitting mirror and irradiates on the light-transmitting plate, a part of reflected light and another part of light are interfered by the light reflected back to the light-transmitting plate after irradiating on the to-be-measured piece through the light-transmitting plate, and then the interfered light is received by the image sensor after passing through the half-reflecting and half-transmitting lens to identify an interfered light picture on the surface of the to-be-measured object, so that the technical problems of low accuracy and low efficiency in measuring material textures in the prior art are overcome;
2. in the material texture measuring device in the embodiment, the precision of the rotation angle of the rotary table is controlled to be between-3 'and +3' by the time grating or the grating of the encoder, so that the material to be measured on the rotary table can continuously and slowly rotate, the image sensor can detect the texture condition of each rotation angle of the surface of the material to be measured, and the precision and the reliability of measuring the texture of the material are improved;
3. the material texture measuring equipment in the embodiment can conveniently take and place the to-be-measured piece of the rotary table because the light-transmitting plate is lifted through the lifting table, and the light-transmitting plate and the rotary table can form a tiny included angle wedge when the light-transmitting plate is lifted at the left side of the lifting table, so that the surface texture of the to-be-measured material is measured through optical interferometry.
Drawings
In order to more clearly illustrate the embodiments of the invention or the technical solutions in the prior art, the drawings that are required in the embodiments or the description of the prior art will be briefly described, it being obvious that the drawings in the following description are only some embodiments of the invention, and that other drawings may be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a schematic view of a measuring apparatus according to an embodiment of the present invention;
FIG. 2 is a schematic structural view of a measuring apparatus for a raised state of a light-transmitting plate according to an embodiment of the present invention;
FIG. 3 is a schematic structural diagram of an operating state of a measuring device according to an embodiment of the present invention;
fig. 4 is a schematic structural diagram of an image sensor according to an embodiment of the invention.
Wherein: 100. a measuring device; 110. a light generator; 120. an image sensor; 121. a sensing unit; 130. a half-mirror half-lens; 140. a light-transmitting plate; 150. a rotary table; 160. a piece to be measured; 170. a driving source; 190. a lifting table; 191. a first driving lever; 192. and a second driving lever.
Detailed Description
In order that the invention may be readily understood, a more complete description of the invention will be rendered by reference to the appended drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "fixed to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," and the like are used herein for illustrative purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used herein in the description of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used herein includes any and all combinations of one or more of the associated listed items.
Example 1
Referring to fig. 1-3, an embodiment of the present invention provides a material texture measuring apparatus 100, which includes a light generator 110, an image sensor 120, a half mirror 130, a light-transmitting plate 140, and a rotary table 150. The light emitter is used for manufacturing stable monochromatic linear polarized light, and the light rays are emitted in parallel; the image sensor 120 is used for sensing light images; the half reflecting and half transmitting mirrors 130 are obliquely arranged below the image sensor 120 at intervals; the light-transmitting plates 140 are arranged below the half-reflecting half-transmitting mirror 130 at intervals; the rotary table 150 is located below the light-transmitting plate 140, the to-be-detected member 160 is placed on the rotary table 150, the to-be-detected member 160 rotates along with the rotary table 150, the monochromatic line of the light generator 110 irradiates the half-reflecting half-transmitting mirror 130, the reflected light irradiates the light-transmitting plate 140 through the reflection of the half-reflecting half-transmitting mirror 130, and on the light-transmitting plate 140, part of the reflected light and the other part of the light irradiate the to-be-detected member 160 through the light-transmitting plate 140 and then are reflected back to the light-transmitting plate 140 to interfere, and the interference light is received by the image sensor 120 after passing through the half-reflecting half-transmitting mirror 130 so as to identify the interference light picture on the surface of the to-be-detected member 160. In a specific application, the surface of the to-be-measured member 160 can be subjected to processing such as coating, polishing or drilling, in order to measure the surface of the to-be-measured member 160, a conventional surface flatness measuring method can use a dial indicator to slide along a one-dimensional path to obtain a two-dimensional image, and then a plurality of groups of measuring modes are used to obtain a three-dimensional image of the surface of the material, but the method has a long measuring period, is difficult to measure plane runout of 1 μm, is in stress contact with the material, and has the risk of scratching the surface of the material. Therefore, the texture measuring apparatus 100 of the present invention produces stable monochromatic linear polarization through the light generator 110, the light is emitted to the half mirror 130 in parallel, and then reflected to the light-transmitting plate 140, and the light reflected by one part of the light-transmitting plate 140 interferes with the light reflected to the light-transmitting plate 140 after the other part of the light irradiates the part 160 to be measured through the light-transmitting plate 140, and the interference light passes through the half mirror 130 and is received by the image sensor to identify the interference light picture on the surface of the part 160 to be measured. It should be noted that, because the half mirror 130 or the light-transmitting plate 140 has image distortion caused by dirt, dust, protrusion, etc., and the image distortion position is relatively fixed, in order to filter the influence of the material texture measuring apparatus 100, the reliability and the measuring precision of the apparatus are improved, and the to-be-measured member 160 can be rotated by a certain angle to measure through the rotating table 150, so that the image distortion problem caused by the dirt, dust, protrusion, etc. at the special position on the half mirror 130 or the light-transmitting plate 140 is filtered.
In one possible embodiment, the material texture measuring apparatus 100 further includes a driving source 170 and an encoder (not shown) which is electrically connected to the driving source 170 to control a rotation angle of the rotation table 150, wherein the driving source 170 is used to drive the rotation of the rotation table 150. In a specific application, in order to control the rotation angle of the workpiece 160, the encoder controls the driving source 170 to output the rotation angle, so that the rotating table 150 drives the workpiece 160 to rotate by a certain angle, so as to calculate the texture characteristics of the surface of the workpiece 160, and determine whether the workpiece 160 is qualified after coating, polishing and drilling.
In one possible embodiment, the drive source 170 of the material texture measuring apparatus 100 is provided within the rotary table 150, and the encoder is provided in the drive source 170. In a specific application, the driving source 170 is disposed in the rotary table 150, so that the material texture measuring apparatus 100 can be miniaturized, in addition, the driving source 170 is disposed below the rotary table 150, it can be understood that the driving source 170 can be disposed at one side of the rotary table 150 and connected with the rotary table 150 through a gear reducer, and the driving source 170 can select a servo motor or a stepping motor, and because the motor has a high requirement on the rotation precision of the motor control rotary table 150, as a priority, the servo motor is considered to be selected for driving so as to ensure the continuous precision of the rotation of the motor.
In one possible implementation, the encoder is a time grating or grating, and the precision of the rotation angle of the rotation stage 150 is-3 "to +3". In particular applications, in order to more accurately identify the surface texture of the workpiece 160, it is necessary to control the precision of the rotation angle of the workpiece 160, wherein when the encoder is a time grating or a grating, the precision of the rotation angle of the turntable 150 can be controlled between-3 "and +3", so that the texture of the surface of the workpiece 160 can be more precisely analyzed, and the texture measurement of the surface of the workpiece 160 is not broken, which affects the accuracy of the measurement.
In one possible embodiment, the material texture measuring apparatus 100 further includes a lifting table 190, where the lifting table 190 is fixedly connected to the light-transmitting plate 140, so that the part 160 to be measured can be taken and placed on the rotating table 150 when the lifting table 190 lifts the light-transmitting plate 140. In a specific application, in order to facilitate the to-be-measured piece 160 to be taken and placed from the rotary table 150, when the lifting table 190 is lifted, the transparent plate 140 can be lifted a certain distance, so that the to-be-measured piece 160 is taken out or placed into the rotary table 150, when the lifting table 190 is lifted, the transparent plate 140 is separated from the detection piece by a certain distance, so that the accidental scraping of the transparent plate 140 when the to-be-measured piece 160 is placed can be avoided, and the detection accuracy of the to-be-measured piece 160 is affected.
In one possible embodiment, the lifting table 190 further includes a first driving rod 191 and a second driving rod 192, the first driving rod 191 is fixed at one end of the light-transmitting plate 140, the second driving rod 192 is fixed at the other end of the light-transmitting plate 140, and when the distance that the first driving rod 191 drives the light-transmitting plate 140 is different from the distance that the second driving rod 192 drives the light-transmitting plate 140, the light-transmitting plate 140 forms an included angle with respect to the rotary table 150. In particular applications, in order to enable the light-transmitting plate 140 and the rotary table 150 to form a small included angle wedge, since one end of the light-transmitting plate 140 is fixed on the first driving rod 191 and the other end of the light-transmitting plate 140 is fixed on the second driving rod 192, when the distance between the first driving rod 191 driving the light-transmitting plate 140 and the distance between the second driving rod 192 driving the light-transmitting plate 140 are different, the light-transmitting plate 140 and the rotary table 150 form a small included angle wedge, so that the material texture measuring device 100 can be adjusted to measure the effect of the interference light on the surface of the workpiece 160 to be measured.
In one possible embodiment, the driving end of the first driving rod 191 is engaged with one end of the light-transmitting plate 140, and the driving end of the second driving rod 192 is engaged with the other end of the light-transmitting plate 140, wherein the driving end of the first driving rod 191 has a first extension arm (not shown), and the driving end of the second driving rod 192 has a second extension arm (not shown). In particular applications, in order to prevent the light-transmitting plate 140 from falling off unexpectedly in the lifting process, the first extension arm is abutted under one side of the light-transmitting plate 140, the second extension arm is abutted under the other side of the light-transmitting plate 140, meanwhile, the light-transmitting plate 140 is respectively clamped with the first extension arm and the second extension arm, so that damage to the light-transmitting plate 140 made of glass in a threaded connection mode is avoided, and in addition, in order to enable the lifting process on two sides of the light-transmitting plate 140 to be stable, the first driving rod 191 and the second driving rod 192 are respectively driven by using screw motors, and it is worth noting that, because the lifting of the first driving rod 191 and the second driving rod 192 and the rotation of the rotary table 150 have the corresponding and identical precision level requirements to a certain extent, the following is expected: the driving source 170 is respectively used as the power sources of the rotary table 150, the first driving rod 191 and the second driving rod 192, wherein the driving source 170 respectively adjusts the rotation of the rotary table 150 through a gear reducer and drives the screw rod in the first driving rod 191 to rotate and the screw rod in the second driving rod 192 to rotate so as to realize the lifting of the light-transmitting plate 140, thereby the material texture measuring device 100 can simplify the design, reduce the production cost and simultaneously improve the detection efficiency of the to-be-detected piece 160.
In one possible embodiment, the image sensor 120 includes a plurality of sensing units 121 arranged in an array, and each sensing unit 121 is configured to sense an interference light image at a different position on the surface of the to-be-measured member 160. In a specific application, in order to rapidly measure the texture of the material on each position of the workpiece 160, the image sensor 120 includes a plurality of sensing units 121 arranged in an array, and the light rays irradiated to different positions on the surface of the workpiece 160 are reflected and transmitted through the light-transmitting plate 140, and then transmitted through the half-reflecting half-mirror 130 and received by the sensing units 121 in the image sensor 120, and each sensing unit 121 is used for sensing the pictures of the interference light on different positions on the surface of the workpiece 160, so that the interference light pictures on different positions on the upper surface of the workpiece 160 can be clearly identified at the same time.
In one possible implementation, the encoder controls the driving source 170 to drive the rotation table 150 to rotate a certain angle until the rotation table 150 rotates one or several weeks, and the image sensor 120 records the collected image data once after each rotation of the rotation table 150. In a specific application, in order to accurately identify the texture of the whole surface of the workpiece 160 to be detected, the encoder controls the driving source 170 to drive the rotating table 150 to rotate through an angle until the rotating table 150 drives the workpiece 160 to be detected to rotate for one or more weeks, and after each rotation of the rotating table 150 is finished, the sensing unit 121 of the image sensor 120 records the data of the acquired image, so that the image distortion caused by dirt, dust, protrusion and the like of the light-transmitting plate 140 can be avoided, and in addition, the image distortion caused by dirt, dust, protrusion and the like of the half-reflecting and half-lens 130 can be filtered, thereby improving the identification readiness of the texture of the surface of the workpiece 160 to be detected.
Example two
This embodiment differs from the subject matter claimed in embodiment one in the following, in particular:
to solve the above technical problem, there is provided an image processing method, wherein the material texture measuring device 100 further comprises a memory (not shown) for storing the image data of the interference light as above, and a processor (not shown) for synthesizing an interference light total map according to the image data of the memory. In a specific application, since the image sensor 120 recognizes the interference light image of the surface texture of the to-be-measured piece 160 through the plurality of sensing units 121 arranged in an array, the memory is in communication connection with the sensing units 121, the memory 200 can be used for storing the picture data of the interference light of the surface texture of the to-be-measured piece 160, and then the processor synthesizes the picture data of the memory into a total image of the interference light.
In one possible implementation, the processor synthesizes the interference light total map from the picture data of the memory includes: the processor extracts the picture data of the memory, filters out malformed picture data caused by the equipment, obtains a data set, compares and merges the data set to obtain the interference light total image of the to-be-detected piece 160. In a specific application, in order to filter and remove the malformed picture data caused by the material texture measuring device 100, the processor firstly extracts the picture data of the memory, then filters out the malformed picture data generated by the device, thereby obtaining a data set, compares the data set sets, and combines the data set sets to obtain an interference light total image of the workpiece 160 to be measured, in addition, the material texture measuring device 100 further comprises a display screen, and the display screen is electrically connected with the processor, so that the interference light total image is transmitted to the display screen for an operator to observe the surface texture of the workpiece 160 to be measured.
The above examples illustrate only a few embodiments of the invention, which are described in detail and are not to be construed as limiting the scope of the claims. It should be noted that it will be apparent to those skilled in the art that several variations and modifications can be made without departing from the spirit of the invention, which are all within the scope of the invention. Accordingly, the scope of protection of the present invention is to be determined by the appended claims.
Claims (9)
1. A material texture measuring apparatus, comprising:
the light generator is used for manufacturing stable monochromatic linear polarized light, and the light rays are emitted in parallel;
an image sensor for sensing a light image;
the half-reflecting lenses are obliquely arranged below the image sensor at intervals;
the light-transmitting plates are arranged below the half-reflecting half-transmitting mirror at intervals;
the rotating table is positioned below the light-transmitting plate, a piece to be detected is placed on the rotating table, the piece to be detected rotates under the control of the rotating table, monochromatic linear polarized light of the light generator irradiates the half-reflecting half-lens, reflection of the half-reflecting half-lens irradiates the light-transmitting plate, part of reflected light and the other part of reflected light irradiate the piece to be detected through the light-transmitting plate and then are reflected back to the light-transmitting plate to interfere, and interference light is received by the image sensor after passing through the half-reflecting half-lens so as to identify interference light pictures on the surface of the piece to be detected;
the rotary table controls the to-be-detected piece to uniformly rotate at fixed points, so that the image sensor can identify interference images of each position of the to-be-detected piece.
2. The material texture measuring apparatus according to claim 1, further comprising a driving source for driving rotation of the rotary table, and an encoder electrically connected to the driving source to control a rotation angle of the rotary table.
3. The material texture measuring apparatus according to claim 2, wherein the encoder is a time grating or a grating, and the rotation angle of the rotation table has an accuracy of-3 "to +3".
4. A material texture measuring apparatus as claimed in any one of claims 1 to 3 further comprising a lifting platform fixedly connected to the light-transmitting plate, such that the part to be measured can be taken from and placed on the rotary table when the lifting platform lifts the light-transmitting plate.
5. The material texture measuring apparatus according to claim 4, wherein the elevating table further comprises a first driving lever and a second driving lever, the first driving lever is fixed to one end of the light-transmitting plate, the second driving lever is fixed to the other end of the light-transmitting plate, and the light-transmitting plate forms an angle with respect to the rotary table when a distance by which the first driving lever drives the light-transmitting plate is different from a distance by which the second driving lever drives the light-transmitting plate.
6. The material texture measurement device of claim 2, wherein the image sensor comprises a plurality of sensor units arranged in an array, each sensor unit being configured to sense interference light images at a different location on the surface of the part to be measured.
7. The material texture measuring apparatus according to claim 6, wherein the encoder is configured to control the driving source to rotate the rotary table by a certain angle until the rotary table rotates one or more weeks, and the image sensor records the collected image data once after each rotation of the rotary table.
8. An image processing method, characterized in that the material texture measuring device further comprises a memory for storing picture data of the interference light according to any one of claims 1-7 and a processor for synthesizing an interference light total map from the picture data of the memory.
9. The image processing method according to claim 8, wherein the processor synthesizing an interference light total map from the picture data of the memory includes: and the processor extracts the picture data of the memory, filters out malformed picture data caused by the equipment to obtain a data set, and compares and merges the data set to obtain the interference light total image of the to-be-detected piece.
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| CN202310122370.1A CN116165202A (en) | 2023-02-16 | 2023-02-16 | Material texture measuring equipment and image processing method |
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