CN116149037A - Ultrafast large-size scanning system and method - Google Patents
Ultrafast large-size scanning system and method Download PDFInfo
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- CN116149037A CN116149037A CN202211103036.3A CN202211103036A CN116149037A CN 116149037 A CN116149037 A CN 116149037A CN 202211103036 A CN202211103036 A CN 202211103036A CN 116149037 A CN116149037 A CN 116149037A
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
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- G—PHYSICS
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- G02B21/00—Microscopes
- G02B21/06—Means for illuminating specimens
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- G—PHYSICS
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- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/24—Base structure
- G02B21/26—Stages; Adjusting means therefor
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/36—Microscopes arranged for photographic purposes or projection purposes or digital imaging or video purposes including associated control and data processing arrangements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/182—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors
- G02B7/198—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for mirrors with means for adjusting the mirror relative to its support
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Abstract
The invention relates to an ultrafast large-size scanning system and a method, which belong to the technical field of optical microscopes, can realize automatic control of a sample stage and realize automatic, fast and large-area reliable scanning; the system comprises: a sample stage; the motion control assembly is used for realizing the movement of the sample table along x, y and z axes and leveling the surface of the sample to be measured; a light source assembly; an objective lens; a reflecting mirror for reflecting the optical signal emitted from the objective lens to the high resolution camera; a high resolution camera; the height sensor is used for monitoring the height of each position of the sample to be detected; the light intensity sensor is used for monitoring light intensity data; the control processing unit is used for controlling the motion control assembly to work so as to realize the focusing of the objective lens on the surface of the sample; and the light source module is also used for adjusting the intensity of the light source module in real time according to the light intensity data so as to ensure that the contrast ratio of the acquired image is uniform.
Description
Technical Field
The invention relates to the technical field of optical microscopes, in particular to an ultrafast large-size scanning system and method.
Background
Currently, high power objective lenses and industrial cameras are commonly used for basic optical scanning detection. However, when the existing high-power objective lens and the existing industrial camera are used for scanning, the position is always fixed, and each detection area is limited to the area which can be achieved by the performance of the high-power objective lens and the industrial camera, so that the high-power objective lens has limitation. The sample table is generally manually controlled to move, so that the sample table is inconvenient to use and inaccurate, and cannot meet the requirements of various fields on the scanning precision of an optical microscope. In addition, in the aspect of industrial application, such as semiconductor chips, wafers, silicon wafers, industrial designs and the like, large-area rapid scanning is required to simplify and streamline the operation standard; the demands on industrial applications also place higher demands on optical microscopes.
Accordingly, there is a need to develop a new ultra-fast large-scale scanning system and method to address the deficiencies of the prior art to solve or mitigate one or more of the problems described above.
Disclosure of Invention
In view of the above, the invention provides an ultrafast large-size scanning system and method, which can realize automatic control of a sample stage and realize automatic, fast and large-area reliable scanning.
In one aspect, the present invention provides an ultrafast large-scale scanning system, the system comprising:
the sample stage is used for placing a sample to be tested;
the motion control assembly is connected with the sample table and is used for realizing the movement of the sample table along the x axis, the y axis and the z axis and also for realizing the surface leveling of the sample to be measured;
a light source assembly for providing a light environment required for scanning;
the objective lens is arranged opposite to the sample to be detected and is used for amplifying the corresponding multiplying power of the surface of the sample to be detected;
a reflecting mirror for reflecting the optical signal emitted from the objective lens to the high resolution camera;
the high-resolution camera is used for shooting the optical signals reflected by the reflecting mirror;
the height sensor is arranged above the sample table and is used for monitoring the height of each position of the sample to be detected and transmitting the height data to the control processing unit;
the light intensity sensor is arranged above the reflecting mirror and is used for monitoring light intensity data and transmitting the light intensity data to the control processing unit;
the control processing unit is used for controlling the operation of the motion control assembly, adjusting the height and the posture of the sample to be tested according to the received height data and realizing the focusing of the objective lens on the surface of the sample; and the device is also used for adjusting the intensity of the light source component in real time according to the light intensity data so as to ensure that the contrast ratio of the acquired image is uniform.
In the aspects and any possible implementation manner described above, there is further provided an implementation manner, where the number of the objective lenses is more than two and has different magnifications.
In the aspect and any possible implementation manner described above, there is further provided an implementation manner, where the reflecting mirror can switch between optical paths where two different objective lenses are located, specifically: the reflecting mirror is fixed on the air pump control moving assembly, and the reflecting mirror is driven to move between light paths where different objective lenses are located through the action of the air pump control moving assembly, so that switching is realized.
In the aspect and any possible implementation manner described above, there is further provided an implementation manner, where the air pump control moving assembly includes a slider and a slide rail, where the slide rail is fixed and horizontally disposed above the reflector, and the slider is slidably connected with the slide rail; the sliding block is connected with the air pump, and the air pump is connected with the control processing unit and acts under the control signal of the control processing unit so as to drive the sliding block to move left and right along the sliding rail;
the reflector is fixedly arranged on the sliding block.
Aspects and any one of the possible implementations as described above, further provide an implementation, the motion control assembly includes:
a y-axis moving assembly comprising a y-axis base and a y-axis slider; a wide rail in the y-axis direction is arranged on the y-axis base; the y-axis sliding piece is in a square plate shape with thickness, the square plate shape is provided with a square inner cavity with an opening at two ends in the y-axis direction, the wide rail is arranged in the square inner cavity in a penetrating manner, and the y-axis sliding piece can slide along the wide rail under the action of power equipment;
an x-axis moving assembly comprising an x-axis fixed frame, a screw assembly, and an x-axis slider; the x-axis fixed frame is fixedly arranged on the y-axis moving assembly; the screw rod assembly comprises a screw rod motor and a screw rod, the screw rod is rotatably arranged in the x-axis fixing frame, the screw rod motor is arranged on the outer side of the x-axis fixing frame and is connected with the screw rod, the x-axis sliding piece is fixedly connected with a nut arranged on the screw rod, and the screw rod moves along the x-axis under the action of the screw rod motor;
the z-axis moving assembly comprises an L-shaped z-axis fixing seat and a sample table fixing frame; the inner side of the side wall of the z-axis fixing seat is provided with a z-axis guide rail, the sample table fixing frame is arranged in the z-axis fixing seat and is in a vertical state with the z-axis guide rail, the sample table fixing frame is in sliding connection with the z-axis guide rail through a z-axis sliding block, the z-axis sliding block is connected with power equipment, and the sample table fixing frame can move up and down along the z-axis guide rail under the action of the power equipment;
the rotating assembly comprises a first rotating motor and a second rotating motor; the first rotating motor is used for driving the sample stage to rotate along the y axis, and the second rotating motor is used for driving the sample stage to rotate along the x axis.
In the aspects and any possible implementation manner described above, there is further provided an implementation manner, wherein the number of screws in the screw assembly is more than two.
In the aspect and any possible implementation manner described above, there is further provided an implementation manner, where a motor shaft of the first rotating motor is disposed along the y-axis direction, and the motor shaft of the first rotating motor is fixedly connected to a first penetrating rod, and the first penetrating rod is penetrating in the sample stage and is fixedly connected to the sample stage; the sample stage is driven to rotate along the y axis along with the action of the first rotating motor;
the motor shaft of the second rotating motor is arranged along the x-axis direction, the motor shaft of the second rotating motor is fixedly connected with a second penetrating rod, and the second penetrating rod penetrates through the sample table and is fixedly connected with the sample table, so that the sample table is driven to rotate along the x-axis along with the action of the second rotating motor;
the first rotating motor and the second rotating motor are fixedly connected with the z-axis sliding block, and the positions of the first rotating motor and the second rotating motor are guaranteed to be fixed relative to the z-axis moving assembly.
In the aspect and any possible implementation manner described above, there is further provided an implementation manner, the sample stage is square, and a gap with a specific distance is between the bottom of the sample stage and the upper surface of the bottom plate of the L-shaped z-axis fixing seat, and the gap provides space for rotation of the sample stage and defines a rotation range.
In another aspect, the present invention provides an ultrafast oversized scanning method, the method being implemented using an ultrafast oversized scanning system as described in any one of the above; the method comprises the following steps:
s1, placing a sample to be detected on a sample table, and adjusting the position of the sample table in the x, y and z three axial directions through a motion control assembly to enable the sample to be positioned at a relatively proper position;
s2, the control processing unit judges whether the surface of the sample to be detected is at the optimal focusing height according to the received detection signal of the height sensor, and adjusts the height of the sample stage by controlling the motion control assembly so as to realize that the objective lens can focus on the surface of the sample;
s3, the control processing unit controls the motion control assembly to automatically level the surface of the sample to be detected;
s4, the control processing unit controls the motion control assembly again to adjust the height of the surface of the sample to be detected, and automatic focusing is carried out to ensure that the final image is uniform and clear;
s5, starting scanning: the sample stage is driven by the motion control component to horizontally move at a specific speed and along a specific path, and different scanning areas on the surface of the sample to be detected are continuously moved below the objective lens, so that continuous automatic scanning of the large-size sample is realized.
In the aspects and any possible implementation manners as described above, there is further provided an implementation manner, where the content of step S5 further includes: the reflectivity of the surface of the sample to be detected is detected in real time by the light intensity sensor in the scanning process, and the intensity of the light source component is synchronously regulated according to the detected data so as to ensure that the color of the acquired image signal is uniform.
Compared with the prior art, one of the technical schemes has the following advantages or beneficial effects: the sample table has the function of motion control, automatic displacement, automatic leveling and automatic focusing, and realizes automatic, rapid and large-area scanning; the labor detection cost can be greatly reduced, the productivity is increased, the image acquisition result is stable, and after the motion control is accurately controlled, the scanned pictures are spliced, the speed is high, the images are clear, and the field of view is not wasted;
the other technical scheme has the following advantages or beneficial effects: the high-resolution scanning camera scans, so that the scanning speed is increased, and the detection time is saved;
the other technical scheme has the following advantages or beneficial effects: the reflectivity of the surface of the sample to be detected is detected by the light intensity sensor, so that the uniformity of the contrast of the acquired image can be ensured;
the other technical scheme has the following advantages or beneficial effects: the invention has two objective lenses with different multiples, and forms two light paths through the moving and switching of the total reflection mirror, thereby meeting different scanning requirements.
Of course, it is not necessary for any of the products embodying the invention to achieve all of the technical effects described above at the same time.
Drawings
In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the drawings that are needed in the embodiments will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present invention, and that other drawings can be obtained according to these drawings without inventive effort for a person skilled in the art.
FIG. 1 is a block diagram of an ultra-fast large-scale scanning system provided by one embodiment of the present invention;
FIG. 2 is a block diagram of optical correlation components in an ultra-fast large-scale scanning system provided in one embodiment of the invention;
FIG. 3 is a block diagram of a motion control assembly provided in one embodiment of the present invention;
fig. 4 is a schematic diagram of the optical path principle provided by an embodiment of the present invention.
Wherein, in the figure:
1. a motion control assembly; 2. a sample stage; 31. a first light source; 32. a second light source; 33. a third light source; 34. a fourth light source; 4. a high power objective lens; 5. a low power objective lens; 6. a reflecting mirror; 7. a high resolution camera; 8. a height sensor; 9. a control processing unit;
101-103, and a sample; 104. a light intensity detector; 105. a high speed camera.
Detailed Description
For a better understanding of the technical solution of the present invention, the following detailed description of the embodiments of the present invention refers to the accompanying drawings.
It should be understood that the described embodiments are merely some, but not all, embodiments of the invention. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
The ultra-fast large-size scanning system of the invention, as shown in fig. 1, comprises a motion control assembly 1, a sample stage 2, a light source assembly, a high power objective lens 4, a low power objective lens 5, a height sensor 8, a reflecting mirror 6, a high resolution camera 7, a light intensity sensor and a control processing unit 9. The sample stage is connected with the motion control assembly and is positioned below the whole device to form a mechanical group; other light source components, a height sensor, an objective lens, a reflecting mirror, a high-resolution camera and a light intensity sensor are assembled from bottom to top to form an optical group; the optical group can also comprise a three-ocular lens, the three-ocular lens is arranged above the objective lens, and the surface information of the sample can be directly observed by naked eyes through the three-ocular lens, so that the instant observation effect is achieved.
The motion control assembly 1 is arranged at the bottommost part and is connected with the bottom of the sample stage 2 for controlling the movement of the sample stage along the x, y and z axes and the rotation along the x and y axes. The moving distance along the x, y and z axes is between 1mm and 15 cm; the angles of rotation along the x and y axes are between-5 deg. and 5 deg.. The motion control unit 1 is connected to a control processing unit 9, and the control processing unit 9 sends a control signal to control the motion of the motion control unit 1. A plurality of height sensors are arranged on the fixing frame above the sample table 2, the detection direction of the height sensors is perpendicular to the surface of the sample, the height sensors are used for monitoring the heights of different positions of the surface of the sample at any time, the height monitoring signals are transmitted to the control processing unit 9, the control processing unit 9 calculates and judges the height data of the center of the surface of the sample to be detected, and the height difference value of each position of the surface of the sample is calculated. On the one hand, the control processing unit 9 enables the sample platform to rotate along the x axis and/or the y axis according to the height difference value of each part of the surface of the sample and through the action of the motion control assembly 1, so that the sample on the sample platform is leveled; on the other hand, the control processing unit 9 controls the motion control assembly 1 to act according to the center height data of the surface of the sample to be detected so as to lift or stop lifting the sample table, thereby assisting in realizing the automatic focusing of the objective lens on the surface of the sample. The height sensor is a capacitive sensor or a laser sensor or the like.
The motion control assembly 1 is shown in block diagram form in fig. 3 and includes a base 11, a y-axis slider 12, an x-axis movement assembly, a z-axis movement assembly 16, a first rotary motor 17, and a second rotary motor 18. The base 11 is fixedly arranged on the working platform along the y axis, a y axis guide rail is arranged at the upper part of the base 11, the y axis sliding piece 12 is provided with a hollow structure, and the y axis guide rail is arranged in the hollow structure in a penetrating way, so that the y axis sliding piece 12 can slide along the y axis guide rail; the y-axis slide 12 is connected to a power plant and moves under the influence of the power plant. The x-axis moving assembly comprises an x-axis fixed frame 13, a screw assembly 14 and an x-axis slider 15; the x-axis fixing frame 13 is fixedly arranged on the upper surface of the y-axis sliding piece 12; the screw assembly 14 comprises a screw motor and a screw, the screw is arranged in the x-axis fixing frame 13, the screw motor is arranged at the outer end of the x-axis fixing frame 13 and is connected with the screw, the x-axis sliding piece 15 is fixedly connected with a nut arranged on the screw, and the screw moves along the x-axis under the action of the screw motor. Preferably, the number of the lead screws is more than two, so that reliability is ensured. The z-axis moving assembly 16 comprises a z-axis fixing seat in an L shape, a z-axis guide rail is arranged on the inner side of the side wall of the z-axis fixing seat, the sample table fixing frame is arranged in the z-axis fixing seat and is in a vertical state with the z-axis guide rail, the sample table fixing frame is slidably connected with the z-axis guide rail through a z-axis sliding block, the z-axis sliding block is connected with power equipment such as a motor, and the sample table fixing frame can move up and down along the z-axis guide rail under the action of the motor. A rotating assembly is arranged between the sample table and the sample table fixing frame and comprises a first rotating motor 17 and a second rotating motor 18; the motor shaft of the first rotating motor 17 is arranged along the y-axis direction, the motor shaft is fixedly connected with a first penetrating rod, the first penetrating rod penetrates through the sample platform and is fixedly connected with the sample platform, the first penetrating rod penetrates through the sample platform and is rotatably connected with a concave hole formed in the z-axis sliding block, and the existence of the concave hole limits the height positions of the first penetrating rod and the first rotating motor 17; the first rotary motor 17 is fixedly connected with the z-axis slide block. A gap with a specific distance is arranged between the bottom of the square sample stage and the upper surface of the bottom plate of the L-shaped z-axis fixing seat, and the gap also limits the rotation angle range of the square sample stage to the rotation space, including the rotation limitation of the x-axis direction and the y-axis direction. The motor shaft of the second rotating motor 18 is arranged along the x-axis direction, the motor shaft is fixedly connected with a second penetrating rod, and the second penetrating rod penetrates through the sample table and is fixedly connected with the sample table, and the sample table is driven to rotate along the x-axis along with the action of the second rotating motor 18. The second rotary motor 18 is fixedly connected with the z-axis slide block, and the position of the second rotary motor is ensured to be fixed relative to the z-axis moving assembly.
A sample stage 2 for placing a sample to be scanned, which is suitable for placing a sample with a mass not exceeding 3kg, and on which a gravity sensor is arranged for measuring the weight of the placed sample.
The light source assembly comprises a plurality of specific light sources, namely a first light source 31, a second light source 32, a third light source 33 and a fourth light source 34, a bright field light source and a dark field light source containing visible light, and the light sources are selected according to samples with different materials or different reflectivities or different scanning requirements. The light source can vertically irradiate the surface of the sample, can incline a specific angle to irradiate the surface of the sample, and can manually rotate to adjust the angle so as to achieve the best effect.
The first light source 31 and the second light source 32 are light sources with adjustable positions, and the third light source 33 and the fourth light source 34 are light sources with fixed positions. Further for the figures: the first light source 31 and the second light source 32 are bright field light sources, and the third light source 33 and the fourth light source 34 are dark field light sources; the angle between the light source beam and the surface of the sample is 0-180 degrees; the specific adjusting structure of the position-adjustable light source can drive the light source to move along the screw rod by arranging the light source on the screw rod motor assembly and operating the screw rod motor assembly; when the device works, one or a plurality of light sources can be selected according to the type of a sample, and the use of a bright field light source or a dark field light source is determined according to the type of the image information to be acquired, namely, the control processing unit 9 is electrically connected with the four light sources, and the on-off and the working state of the four light sources are controlled according to the actual situation, so that one, two, three or four light sources work simultaneously, and a required light environment is provided for sample scanning.
Two objective lenses, namely a high power objective lens 4 and a low power objective lens 5, are mounted on the objective changer for viewing the sample on the sample stage. The low-power objective lens 5 is a low-power objective lens with the power of less than or equal to 2 times, and the high-power objective lens 4 is a high-power objective lens with the power of more than or equal to 10 times. The number of the objective lenses is not limited to two, but may be 1 or 3 or more to form a single optical path, a double optical path, a triple optical path, and more optical path systems.
A mirror 6 disposed on the optical path between the objective lens and the high resolution camera 7 for reflecting the optical signal or changing the direction of the optical path and redirecting the optical signal or path to the receiving optical path of the high resolution camera 7. When more than two light paths are provided, two reflectors can be respectively and fixedly arranged in the two light paths, one reflector can be fixed on the air pump control moving assembly, and the reflector is driven to move between the two or more light paths through the action of the air pump control moving assembly, so that the switching among the multiple light paths is realized at any time. The air pump control moving assembly is shown in fig. 2, and is slidably arranged on the lower surface of the top bracket, the reflecting mirror 6 is fixedly arranged on the air pump control moving assembly, and the setting direction of the air pump control moving assembly is about 45 degrees, so that the optical signals emitted by the low-power objective lens or the high-power objective lens below the air pump control moving assembly can be reflected to the high-resolution camera arranged on the side surface. The air pump control moving assembly comprises a sliding block which is in sliding connection with a sliding rail arranged on the lower surface of the top bracket; the slider is connected with the air pump, and the air pump is connected with control processing unit 9, and the air pump receives control processing unit 9's control signal and drives the slider and move about along the slide rail, moves to another objective top from an objective top, realizes the switching of different light paths.
A high resolution camera 7 for rapidly acquiring the optical image signals. The high-resolution camera 7 is a linear array camera or an area array camera; the high-resolution camera is suitable for rapid image capturing, and the rapid image capturing speed is as follows: the speed of 1HZ is less than or equal to 1000kHZ; the resolution can be between 1K and 32K according to the requirements of customers, and a signal acquisition card can be also selected, so that the method is suitable for large-size image acquisition.
The light intensity sensor is arranged above the reflecting mirror and is used for detecting the reflectivity of the surface of the sample to be detected (the actual detection data is light intensity, and the reflectivity of the surface of the sample is obtained according to the detection light intensity and the light intensity of the light source), and the color uniformity of the collected image signals is ensured. The light intensity sensor can sense the reflectivity of the surface of the sample, automatically adjust the contrast of the picture according to the feedback information of the reflectivity sensor to a software system in the control processing unit, and then the picture is uniform in color, so that the situation that the whole color tone of the picture is over white or over black can not occur.
Three ocular lenses can directly observe the surface of the sample and are provided with matched area array cameras.
The control processing unit 9 is in communication with the motion control assembly 1 and the sensors through embedded software, and controls the movement and rotation of the sample stage through the motion control assembly 1, and controls the auto-focusing of the sample surface through combination with the height sensor.
The principle of the optical path in the scanning system of the present invention is shown in fig. 4. Three samples 101, 102 and 103 are placed at the bottom, which are given based on the light path and do not represent three independent samples to be measured. The light intensity detector 104 may be understood as a light intensity sensor of the present invention for detecting light intensity. When two paths of light paths respectively adopt one image pickup apparatus, a high-speed camera 105 is added, which is used for receiving the light signal emitted by the high-power objective lens 4, and the light signal can be directly arranged in the vertical direction of the high-power objective lens 4, and a reflecting mirror is not required.
The method for scanning and detecting by using the ultrafast large-size scanning system comprises the following steps:
(1) Placing a sample on a sample table, and irradiating visible light on the surface of the sample to be detected by using the visible light as a light source, wherein the visible light is reflected on the surface of the sample;
(2) The control processing unit 9 controls the sample stage to automatically move to the position right below the height sensor;
(3) The control processing unit 9 judges whether the surface of the sample is at the optimal height for focusing according to the received detection signal of the height sensor, and adjusts the height of the sample stage by controlling the motion control assembly 1, so that the objective lens can be focused on the surface of the sample finally;
(4) The whole surface of the sample is focused uniformly, and then the control processing unit 9 controls the motion control assembly to automatically level the surface of the sample;
(5) The processing unit 9 is controlled again to control the automatic focusing, so that the final image is ensured to be uniform and clear, and the image quality can be improved by repeated focusing;
(6) After focusing is completed the selected position can be controlled by the control processing unit 9 to scan,
(7) After scanning is started, the sample stage is driven by the motion control assembly 1 to horizontally move at a specific speed and along a specific path, so that continuous automatic scanning of a large-size sample is realized; the scanning process is realized through the movement of the sample, refocusing and other adjustment work of optical group devices are not needed, so that the scanning speed is increased, and the reliability of scanning the large-size sample is also improved;
(8) In the scanning process, the reflectivity of the surface of the sample to be detected is detected by the light intensity sensor, and meanwhile, the contrast is synchronously adjusted by the feedback data, so that the color uniformity of the acquired image signal is ensured.
(9) Finally, image processing and analysis are carried out through collecting pictures, image preprocessing, 3D reconstruction and pattern identification are carried out, and a large-size detection result is rapidly and automatically obtained.
The scanning system of the invention can detect samples: front scratch, back scratch, crack, line cut, fold; stain and greasy dirt; edge unfilled corners and broken feet; bubbles, voids, pits; surface foreign matter, white spots, mole points, crystal defects; bending and raising; flat edge marks, crystal edge marks, uneven grinding and diaphragms; double flat sides; carrying out Rate code checking; check the wafer lattice of the reworked wafer; custom defect inspection and definition.
The above describes in detail an ultrafast large-size scanning system and method provided in the embodiments of the present application. The above description of embodiments is only for aiding in understanding the method of the present application and its core ideas; meanwhile, as those skilled in the art will have modifications in the specific embodiments and application scope in accordance with the ideas of the present application, the present description should not be construed as limiting the present application in view of the above.
It should also be noted that the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a product or system that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such product or system. Without further limitation, an element defined by the phrase "comprising one … …" does not exclude the presence of other like elements in a commodity or system comprising such elements. By "substantially" is meant that within an acceptable error range, a person skilled in the art is able to solve the technical problem within a certain error range, substantially achieving the technical effect.
The terminology used in the embodiments of the invention is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and/or" as used in embodiments of the present invention and the appended claims is merely one association relationship describing associated objects, and means that three relationships may exist, for example, a and/or B may represent: a exists alone, A and B exist together, and B exists alone. In addition, the character "/" herein generally indicates that the front and rear associated objects are an "or" relationship.
Claims (10)
1. An ultrafast oversized scanning system, the system comprising:
the sample stage is used for placing a sample to be tested;
the motion control assembly is connected with the sample table and is used for realizing the movement of the sample table along the x axis, the y axis and the z axis and also for realizing the surface leveling of the sample to be measured;
a light source assembly for providing a light environment required for scanning;
the objective lens is arranged opposite to the sample to be detected and is used for amplifying the corresponding multiplying power of the surface of the sample to be detected;
a reflecting mirror for reflecting the optical signal emitted from the objective lens to the high resolution camera;
the high-resolution camera is used for shooting the optical signals reflected by the reflecting mirror;
the height sensor is arranged above the sample table and is used for monitoring the height of each position of the sample to be detected and transmitting the height data to the control processing unit;
and the control processing unit is used for controlling the operation of the motion control assembly, adjusting the height and the posture of the sample to be tested according to the received height data and realizing the focusing of the objective lens on the surface of the sample.
2. The ultra-fast large-size scanning system according to claim 1, wherein the number of the objective lenses is two or more and has different magnifications.
3. The ultra-fast large-size scanning system according to claim 2, wherein the reflecting mirror is capable of switching between the optical paths of two different objective lenses, in particular: the reflecting mirror is fixed on the air pump control moving assembly, and the reflecting mirror is driven to move between light paths where different objective lenses are located through the action of the air pump control moving assembly, so that switching is realized.
4. The ultra-fast large-size scanning system according to claim 3, wherein the air pump control moving assembly comprises a sliding block and a sliding rail, the sliding rail is fixedly and horizontally arranged above the reflecting mirror, and the sliding block is in sliding connection with the sliding rail; the sliding block is connected with the air pump, and the air pump is connected with the control processing unit and acts under the control signal of the control processing unit so as to drive the sliding block to move left and right along the sliding rail;
the reflector is fixedly arranged on the sliding block.
5. The ultra-fast oversized scanning system of claim 1, wherein the motion control assembly comprises:
a y-axis moving assembly comprising a y-axis base and a y-axis slider; a wide rail in the y-axis direction is arranged on the y-axis base; the y-axis sliding piece is in a square plate shape with thickness, the square plate shape is provided with a square inner cavity with an opening at two ends in the y-axis direction, the wide rail is arranged in the square inner cavity in a penetrating manner, and the y-axis sliding piece can slide along the wide rail under the action of power equipment;
an x-axis moving assembly comprising an x-axis fixed frame, a screw assembly, and an x-axis slider; the x-axis fixed frame is fixedly arranged on the y-axis moving assembly; the screw rod assembly comprises a screw rod motor and a screw rod, the screw rod is rotatably arranged in the x-axis fixing frame, the screw rod motor is arranged on the outer side of the x-axis fixing frame and is connected with the screw rod, the x-axis sliding piece is fixedly connected with a nut arranged on the screw rod, and the screw rod moves along the x-axis under the action of the screw rod motor;
the z-axis moving assembly comprises an L-shaped z-axis fixing seat and a sample table fixing frame; the inner side of the side wall of the z-axis fixing seat is provided with a z-axis guide rail, the sample table fixing frame is arranged in the z-axis fixing seat and is in a vertical state with the z-axis guide rail, the sample table fixing frame is in sliding connection with the z-axis guide rail through a z-axis sliding block, the z-axis sliding block is connected with power equipment, and the sample table fixing frame can move up and down along the z-axis guide rail under the action of the power equipment;
the rotating assembly comprises a first rotating motor and a second rotating motor; the first rotating motor is used for driving the sample stage to rotate along the y axis, and the second rotating motor is used for driving the sample stage to rotate along the x axis.
6. The ultra-fast oversized scanning system of claim 5 wherein the number of lead screws in the lead screw assembly is greater than two.
7. The ultra-fast oversized scanning system of claim 5, characterized by,
the motor shaft of the first rotating motor is arranged along the y-axis direction, the motor shaft of the first rotating motor is fixedly connected with a first penetrating rod, and the first penetrating rod is penetrated in the sample table and is fixedly connected with the sample table; the sample stage is driven to rotate along the y axis along with the action of the first rotating motor;
the motor shaft of the second rotating motor is arranged along the x-axis direction, the motor shaft of the second rotating motor is fixedly connected with a second penetrating rod, and the second penetrating rod penetrates through the sample table and is fixedly connected with the sample table, so that the sample table is driven to rotate along the x-axis along with the action of the second rotating motor;
the first rotating motor and the second rotating motor are fixedly connected with the z-axis sliding block, and the positions of the first rotating motor and the second rotating motor are guaranteed to be fixed relative to the z-axis moving assembly.
8. The ultra-fast large-scale scanning system according to claim 7, wherein the sample stage is square, and a gap of a specific distance is provided between the bottom of the sample stage and the upper surface of the bottom plate of the L-shaped z-axis fixing base, and the gap provides space for rotation of the sample stage and defines a rotation range.
9. An ultrafast large-size scanning method, characterized in that the method is realized by adopting the ultrafast large-size scanning system according to any one of claims 1 to 8; the method comprises the following steps:
s1, placing a sample to be detected on a sample table, and adjusting the position of the sample table in the x, y and z three axial directions through a motion control assembly to enable the sample to be positioned at a relatively proper position;
s2, the control processing unit judges whether the surface of the sample to be detected is at the optimal focusing height according to the received detection signal of the height sensor, and adjusts the height of the sample stage by controlling the motion control assembly so as to realize that the objective lens can focus on the surface of the sample;
s3, the control processing unit controls the motion control assembly to automatically level the surface of the sample to be detected;
s4, the control processing unit controls the motion control assembly again to adjust the height of the surface of the sample to be detected, and automatic focusing is carried out to ensure that the final image is uniform and clear;
s5, starting scanning: the sample stage is driven by the motion control component to horizontally move at a specific speed and along a specific path, and different scanning areas on the surface of the sample to be detected are continuously moved below the objective lens, so that continuous automatic scanning of the large-size sample is realized.
10. The ultra-fast large-size scanning method according to claim 9, wherein the content of step S5 further comprises: the reflectivity of the surface of the sample to be detected is detected in real time by the light intensity sensor in the scanning process, and the intensity of the light source component is synchronously regulated according to the detected data so as to ensure that the color of the acquired image signal is uniform.
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211103036.3A CN116149037A (en) | 2022-09-09 | 2022-09-09 | Ultrafast large-size scanning system and method |
| PCT/CN2022/136686 WO2024051008A1 (en) | 2022-09-09 | 2022-12-05 | System and method for ultrafast and large-size scanning |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211103036.3A CN116149037A (en) | 2022-09-09 | 2022-09-09 | Ultrafast large-size scanning system and method |
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| Publication Number | Publication Date |
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| CN116149037A true CN116149037A (en) | 2023-05-23 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202211103036.3A Pending CN116149037A (en) | 2022-09-09 | 2022-09-09 | Ultrafast large-size scanning system and method |
Country Status (2)
| Country | Link |
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| CN (1) | CN116149037A (en) |
| WO (1) | WO2024051008A1 (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117665032A (en) * | 2024-02-01 | 2024-03-08 | 国仪量子技术(合肥)股份有限公司 | Scanning method, scanning device, scanning system, storage medium and electronic equipment |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2004226939A (en) * | 2002-11-26 | 2004-08-12 | Lasertec Corp | Defect inspection apparatus, defect inspection method and method for manufacturing semiconductor device using the same |
| CN201322684Y (en) * | 2008-11-21 | 2009-10-07 | 中国科学院上海光学精密机械研究所 | Device for optical element transmitted spectrum automatic surface scanning survey |
| CN101603911B (en) * | 2009-07-13 | 2011-01-05 | 浙江大学 | Method and device for large-range and high-resolution atomic force micro detection for large sample |
| CN109443241A (en) * | 2018-12-07 | 2019-03-08 | 哈尔滨工业大学 | A kind of high speed axial direction scanning confocal micro-measurement apparatus and method based on tuning fork driving |
| CN111141713A (en) * | 2020-01-14 | 2020-05-12 | 中国科学院苏州生物医学工程技术研究所 | Multiple-mark biological detection system based on hyperspectral fluorescence microscopic imaging |
-
2022
- 2022-09-09 CN CN202211103036.3A patent/CN116149037A/en active Pending
- 2022-12-05 WO PCT/CN2022/136686 patent/WO2024051008A1/en unknown
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117665032A (en) * | 2024-02-01 | 2024-03-08 | 国仪量子技术(合肥)股份有限公司 | Scanning method, scanning device, scanning system, storage medium and electronic equipment |
| CN117665032B (en) * | 2024-02-01 | 2024-05-14 | 国仪量子技术(合肥)股份有限公司 | Scanning method, scanning device, scanning system, storage medium and electronic equipment |
Also Published As
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| WO2024051008A1 (en) | 2024-03-14 |
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