CN109613301B - Micro sensor capable of simultaneously measuring horizontal direction acceleration and angular velocity - Google Patents
Micro sensor capable of simultaneously measuring horizontal direction acceleration and angular velocity Download PDFInfo
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- CN109613301B CN109613301B CN201811558080.7A CN201811558080A CN109613301B CN 109613301 B CN109613301 B CN 109613301B CN 201811558080 A CN201811558080 A CN 201811558080A CN 109613301 B CN109613301 B CN 109613301B
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- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
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- G—PHYSICS
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- G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
- G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
- G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
- G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
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Abstract
The invention discloses a microsensor capable of simultaneously measuring horizontal acceleration and angular velocity, which comprises an upper silicon microstructure and a lower glass base, wherein the silicon microstructure is bonded on the glass base through first anchor areas at four corners; the angular velocity detection module drives the mode and the angular velocity detection module detects the mode, and the acceleration detection module detects the mode and the angular velocity detection module detects the mode and mutually decouples, so that the acceleration and the angular velocity in the horizontal direction can be measured simultaneously. According to the invention, through the reasonable design of the connecting beam, mutual decoupling between the modes is realized, and the measurement precision is improved.
Description
Technical Field
The invention belongs to the technical field of micro-electromechanical systems and micro-inertia measurement, and relates to a micro-sensor capable of simultaneously measuring acceleration and angular velocity in the horizontal direction.
Background
The micro-mechanical acceleration sensor and the micro-mechanical angular velocity sensor are used as sensors for measuring the motion of a carrier and are widely applied to measurement, navigation, positioning and measurement and control systems. The acceleration sensor is mainly used for measuring acceleration information of a carrier, and the angular velocity sensor is used for measuring the rotation angle or angular velocity of an object relative to an inertial space, and is widely applied to aspects of azimuth determination, navigation, attitude calculation and the like.
At present, the research on an acceleration detection module and an angular velocity detection module at home and abroad has achieved good research results, the research on an integrated micro sensor is not deep enough, most research units separate the acceleration sensor from the angular velocity sensor and then process the acceleration sensor and the angular velocity sensor on the same silicon chip, and the mode is low in integration level and serious in interference.
The microsensor capable of simultaneously measuring the horizontal direction acceleration and the angular velocity can be applied to military aspects such as missile guidance and satellite navigation and civil aspects such as automatic control and industrial automation, and has great development prospect.
Disclosure of Invention
The invention aims to solve the defects of the prior art and provide a microsensor capable of simultaneously measuring horizontal direction acceleration and angular velocity, and the overall size of the microsensor is as small as 2 × 103And the magnitude order of mum can simultaneously measure the acceleration and the angular speed in the Y direction.
The technical scheme is as follows: in order to achieve the purpose, the invention adopts the technical scheme that:
a microsensor capable of simultaneously measuring horizontal acceleration and angular velocity comprises an upper silicon microstructure and a lower glass base, wherein the silicon microstructure is bonded on the glass base through first anchor areas at four corners; the angular velocity detection module drives the mode and the angular velocity detection module detects the mode, and the acceleration detection module detects the mode and the angular velocity detection module detects the mode and mutually decouples, so that the acceleration and the angular velocity in the horizontal direction can be measured simultaneously.
Optionally, the angular velocity detection module includes a driving module and a detection module, the driving module includes a first driving module and a second driving module symmetrically disposed on two sides of the mass block in the X direction, and the detection module includes a first detection module and a second detection module symmetrically disposed on two sides of the mass block in the Y direction; the two ends of the first driving module and the second driving module are connected with the first anchor area through fourth connecting beams, the two ends of the first detection module and the second detection module are connected with the first anchor area through fifth connecting beams, and the first detection module and the second detection module are connected with the glass base through third connecting beams and second anchor areas; the acceleration detection module is arranged in the middle of the mass block.
Optionally, the first driving module includes a first driving frame and a first driving fixed electrode, and the second driving module includes a second driving frame and a second driving fixed electrode; the first driving frame and the second driving frame are arranged on two sides of the mass block in the X direction and are respectively connected with the mass block through first connecting beams; the first driving fixed electrode is connected with the first driving frame through the first driving comb teeth, and the second driving fixed electrode is connected with the second driving frame through the second driving comb teeth;
the first detection module comprises a first detection frame and a first detection fixed electrode, and the second detection module comprises a second detection frame and a second detection fixed electrode; the first detection frame and the second detection frame are arranged on two sides of the mass block in the Y direction and are respectively connected with the mass block through second connecting beams; the first detection frame and the second detection frame are connected with the glass base through a third connecting beam and a second anchor area respectively; the first detection fixed electrode is connected with the first detection frame through the first detection comb teeth, and the second detection fixed electrode is connected with the second detection frame through the second detection comb teeth.
Optionally, the second connecting beam includes a transverse connecting beam and a longitudinal connecting beam, one side of the transverse connecting beam is connected to the first detection frame or the second detection frame, the other side of the transverse connecting beam is connected to one end of the longitudinal connecting beam, and the other end of the longitudinal connecting beam is embedded in the mass block.
Optionally, the first driving comb teeth comprise movable comb teeth arranged on the first driving frame and fixed comb teeth arranged on the first driving fixed electrode, and the movable comb teeth are matched with the fixed comb teeth; the second driving comb tooth structure is the same as the first driving comb tooth structure;
the first detection comb teeth comprise movable comb teeth arranged on the first detection frame and fixed comb teeth arranged on the first detection fixed electrode, and the movable comb teeth are matched with the fixed comb teeth; the second detection comb structure is the same as the first detection comb structure.
Optionally, the movable comb teeth on the first detection frame and the second detection frame and the fixed comb teeth on the first detection fixed electrode and the second detection fixed electrode adopt a design with different thicknesses, and the movable comb teeth on the first driving frame and the second driving frame and the fixed comb teeth on the first driving fixed electrode and the second driving fixed electrode adopt a design with the same thickness.
Optionally, the movable comb teeth on the first detection frame and the second detection frame on the Y + side are thicker than the fixed comb teeth on the first detection fixed electrode and the second detection fixed electrode, and the fixed comb teeth on the first detection fixed electrode and the second detection fixed electrode on the Y-side are thicker than the movable comb teeth on the first detection frame and the second detection frame.
Optionally, the acceleration detection module includes four third detection frames, four fourth detection frames, a fifth detection frame and a sixth detection frame which are arranged in parallel along the Y direction, and eight third detection fixed electrodes with the same structure, where the eight third detection fixed electrodes are averagely divided into three groups, and the groups are arranged in parallel along the Y direction and are respectively located between the third detection frame and the fourth detection frame, between the fourth detection frame and the fifth detection frame, and between the fifth detection frame and the sixth detection frame; the third detection fixed electrode is respectively connected with the third detection frame, the fourth detection frame, the fifth detection frame and the sixth detection frame through the first detection comb tooth group; the acceleration detection module is directly connected with the mass block through a third detection frame, a fourth detection frame, a fifth detection frame and a sixth detection frame.
Optionally, the first detection comb tooth group includes six detection comb teeth symmetrically arranged along the third detection fixed electrode, the detection comb teeth include movable comb teeth arranged on the third detection frame, the fourth detection frame, the fifth detection frame or the sixth detection frame and fixed comb teeth symmetrically arranged on the third detection fixed electrode, and the movable comb teeth are matched with the fixed comb teeth; the movable comb teeth and the fixed comb teeth in the first detection comb tooth group are designed to be equal in thickness.
Optionally, the first detection frame and the second detection frame of the angular velocity detection module are connected to the fifth connection beam of the first anchor region by adopting a Z-shaped structure, so that the Z-direction rigidity of each detection frame of the angular velocity detection module is reduced, and the mass block is ensured to smoothly drive each detection frame of the angular velocity detection module to move in the Z direction.
Has the advantages that: compared with the prior art, the micro sensor capable of simultaneously measuring the acceleration and the angular velocity in the horizontal direction can simultaneously measure the acceleration and the angular velocity in the Y direction. The invention has the following advantages: (1) the acceleration detection module and the angular velocity detection module share one mass block, so that the volume of the structure is greatly reduced; (2) the driving mode of the angular velocity detection module and the detection mode of the angular velocity detection module are decoupled, so that the mutual interference of the two modes during angular velocity detection is reduced; (3) the detection mode of the acceleration detection module is decoupled from the driving mode of the angular velocity detection module and the detection mode of the angular velocity detection module, so that the accuracy of the angular velocity measured in the Y direction is ensured; (4) by designing the acceleration detection module detection comb tooth group into a differential output structure, the interference of the angular velocity detection module driving mode and the angular velocity detection module detection mode on acceleration detection is avoided.
Drawings
FIG. 1 is a top view of the structure of the present invention;
FIG. 2 is a schematic diagram of the driving comb structure of the angular velocity detection module of the present invention;
FIG. 3 is a schematic diagram of the structure of the detection comb teeth of the angular velocity detection module according to the present invention;
FIG. 4 is a schematic diagram of the detection comb structure of the acceleration detection module of the present invention.
Detailed Description
The technical solution of the present invention is described in detail below with reference to the accompanying drawings and specific embodiments.
A microsensor capable of simultaneously measuring horizontal acceleration and angular velocity comprises an upper silicon microstructure and a lower glass base, wherein the silicon microstructure is bonded on the glass base through first anchor areas at four corners; the angular velocity detection module drives the mode and the angular velocity detection module detects the mode, and the acceleration detection module detects the mode and the angular velocity detection module detects the mode and mutually decouples, so that the acceleration and the angular velocity in the horizontal direction can be measured simultaneously.
The X direction is the driving direction of the angular velocity detection module, the Y direction is the detection direction of the acceleration detection module, and the Z direction is the detection direction of the angular velocity detection module; when the angular velocity detection module drives the frame to drive the mass block to move along the X direction, the angular velocity detection module drives the frame to be in a static state in the X direction, when the mass block drives the angular velocity detection module to detect the frame to vibrate along the Z direction, the angular velocity detection module drives the frame to be in a static state in the Z direction, and when the mass block drives the acceleration detection module to detect the frame to move along the Y direction, the angular velocity detection module drives the frame and the angular velocity detection module to detect the frame to be in a static state in the Y direction. Namely, the driving mode of the angular velocity detection module and the detection mode of the angular velocity detection module are decoupled from each other, and the detection mode of the acceleration detection module and the detection mode of the angular velocity detection module are decoupled from each other.
The angular velocity detection module comprises a driving module and a detection module, the driving module comprises a first driving module and a second driving module which are symmetrically arranged on two side edges of the mass block in the X direction, and the detection module comprises a first detection module and a second detection module which are symmetrically arranged on two side edges of the mass block in the Y direction; the two ends of the first driving module and the second driving module are connected with the first anchor area through fourth connecting beams, the two ends of the first detection module and the second detection module are connected with the first anchor area through fifth connecting beams, and the first detection module and the second detection module are connected with the glass base through third connecting beams and second anchor areas; the acceleration detection module is arranged in the middle of the mass block.
The first driving module comprises a first driving frame and a first driving fixed electrode, and the second driving module comprises a second driving frame and a second driving fixed electrode; the first driving frame and the second driving frame are arranged on two sides of the mass block in the X direction and are respectively connected with the mass block through first connecting beams; the first driving fixed electrode is connected with the first driving frame through the first driving comb teeth, and the second driving fixed electrode is connected with the second driving frame through the second driving comb teeth;
the first detection module comprises a first detection frame and a first detection fixed electrode, and the second detection module comprises a second detection frame and a second detection fixed electrode; the first detection frame and the second detection frame are arranged on two sides of the mass block in the Y direction and are respectively connected with the mass block through second connecting beams; the first detection frame and the second detection frame are connected with the glass base through a third connecting beam and a second anchor area respectively; the first detection fixed electrode is connected with the first detection frame through the first detection comb teeth, and the second detection fixed electrode is connected with the second detection frame through the second detection comb teeth.
The second connecting beam comprises a transverse connecting beam and a longitudinal connecting beam, one side of the transverse connecting beam is connected with the first detection frame or the second detection frame, the other side of the transverse connecting beam is connected with one end of the longitudinal connecting beam, and the other end of the longitudinal connecting beam is embedded in the mass block.
The first driving comb teeth comprise movable comb teeth arranged on the first driving frame and fixed comb teeth arranged on the first driving fixed electrode, and the movable comb teeth are matched with the fixed comb teeth; the second driving comb tooth structure is the same as the first driving comb tooth structure;
the first detection comb teeth comprise movable comb teeth arranged on the first detection frame and fixed comb teeth arranged on the first detection fixed electrode, and the movable comb teeth are matched with the fixed comb teeth; the second detection comb structure is the same as the first detection comb structure.
The acceleration detection module comprises four third detection frames, four fourth detection frames, five detection frames, six detection frames and eight third detection fixed electrodes with the same structure, wherein the four third detection frames, the four fourth detection frames, the four fifth detection frames and the six detection frames are arranged in parallel along the Y direction; the third detection fixed electrode is respectively connected with the third detection frame, the fourth detection frame, the fifth detection frame and the sixth detection frame through the first detection comb tooth group; the acceleration detection module is directly connected with the mass block through a third detection frame, a fourth detection frame, a fifth detection frame and a sixth detection frame.
The first detection comb tooth group comprises six detection comb teeth which are symmetrically arranged along the third detection fixed electrode, the detection comb teeth comprise movable comb teeth arranged on the third detection frame, the fourth detection frame, the fifth detection frame or the sixth detection frame and fixed comb teeth symmetrically arranged on the third detection fixed electrode, and the movable comb teeth are matched with the fixed comb teeth.
With reference to fig. 1, the microsensor capable of simultaneously measuring acceleration and angular velocity in the horizontal direction of the invention is used for measuring acceleration and angular velocity input in the Y axis and comprises an upper layer and a lower layer, wherein the lower layer 1 is a glass base, and the upper layer 2 is a silicon microstructure. The silicon microstructure 2 includes: a mass block 9, two-side corner velocity detection module driving frames 14a and 14b in the X direction, an angular velocity detection module driving fixed electrodes 15a and 15b, two-side corner velocity detection module detecting frames 4a and 4b in the Y direction, an angular velocity detection module detecting fixed electrodes 8a and 8b, acceleration detection module detecting frames 12a, 12b, 12c and 12d connected with the mass block, acceleration detection module detecting fixed electrodes 13a, 13b, 13c and 13d, 13e, 13f, 8 anchor areas 16a, 16b, 16c, 16d, 16e, 16f, 16g and 16h, 8 connecting beams 10a, 10b, 10c, 10d, 10e, 10f, 10g and 10h between the driving frame and the anchor area of the angular velocity detection module, and 8 connecting beams 3a, 3b, 3c, 3d and 7a between the detecting frame and the anchor area of the angular velocity detection module, 7b, 7c, 7d, connecting beams 11a, 11b, 11c, 11d of the driving frame of the mass and angular velocity detection module, and connecting beams 5a, 5b, 5c, 5d, 6a, 6b, 6c, 6d of the detection frame of the mass and angular velocity detection module.
The silicon microstructure is suspended above the glass substrate by connecting beams 10a, 10b, 10c, 10d, 10e, 10f, 10g, 10h, 3a, 3b, 3c, 3d, 7a, 7b, 7c, 7d, the connecting beams 3a, 3b, 3c, 3d, 7a, 7b, 7c, 7d, 11a, 11b, 11c, 11d being thinner than the thickness of the structure. The angular velocity detection module drives the mode in the X direction, the angular velocity detection module detects the mode in the Z direction, and the acceleration detection module detects the mode in the Y direction. The rigidity of the angular velocity detection module driving frames 14a and 14b and the connecting beams 10a, 10b, 10c, 10d, 10e, 10f, 10g and 10h of the anchor areas 16a, 16d, 16e and 16h is small in the X direction, and the rigidity is large in the Y direction and the Z direction, so that the angular velocity detection module driving frames can only move in the X direction and are static in other directions, and the interference caused by the angular velocity detection module driving mode and the acceleration detection mode of the acceleration detection module is avoided; the rigidity of the detection frames 4a and 4b of the angular velocity detection module and the connecting beams 3a, 3b, 3c and 3d of the anchor areas 16a, 16d, 16e and 16h in the Y direction and the Z direction is small, and the rigidity in the X direction is large, so that the detection frames of the angular velocity detection module are kept still in the X direction, and the interference caused by the drive mode of the angular velocity detection module on the detection mode of the angular velocity detection module is avoided; the angular velocity detection module detects the frames 4a and 4b and the connecting beams 7a, 7b, 7c and 7d of the anchor areas 16b, 16c, 16f and 16g, so that the angular velocity detection module detection frame is static in the Y direction; the rigidity of the mass 9 and the connecting beams 11a, 11b, 11c and 11d of the driving frame of the angular velocity detection module in the Z direction is far less than that of the connecting beams 10a, 10b, 10c, 10d, 10e, 10f, 10g and 10h, so that the driving frame of the angular velocity detection module keeps static when the mass moves in the Z direction; the rigidity of the mass block 9 and the connecting beams 5a, 5b, 5c, 5d, 6a, 6b, 6c and 6d of the angular velocity detection module detection frame in the Z direction is far greater than that of the connecting beams 11a, 11b, 11c, 11d, 3a, 3b, 3c, 3d, 7a, 7b, 7c and 7d, so that the mass block can drive the angular velocity detection module detection frame to move in the Z direction through the connecting beams 5a, 5b, 5c, 5d, 6a, 6b, 6c and 6 d; because the connecting beams 11a, 11b, 11c, 11d, 5a, 5b, 5c, 5d have low rigidity in the Y direction, the mass block 9 can move in the Y direction along with the detection frames 12a, 12b, 12c, 12d of the dynamic acceleration detection module. The angular velocity detection module of the comb tooth group is designed into a differential output structure, so that common mode interference can be avoided.
Two sides of the silicon microstructure in the X direction and two sides of the silicon microstructure in the Y direction are respectively symmetrical, and the acceleration detection module and the angular velocity detection module share one mass block to reduce the volume of the silicon microstructure; the middle of the mass block is provided with an acceleration detection module detection frame and detection comb teeth, the two sides of the X direction of the mass block are provided with an angular velocity detection module driving frame and driving comb teeth, and the two sides of the Y direction of the mass block are provided with an angular velocity detection module detection frame and detection comb teeth.
The acceleration detection module detects movable comb teeth on the frame and fixed comb teeth on the middle fixed electrode of the mass block as a detection comb tooth group of the acceleration detection module; the angular velocity detection module drives movable comb teeth on the frame and fixed comb teeth on the fixed electrodes on two sides in the X direction to serve as a driving comb tooth group of the angular velocity detection module; the angular velocity detection module detects movable comb teeth on the frame and fixed comb teeth on the fixed electrodes on two sides in the Y direction as a detection comb tooth group of the angular velocity detection module.
The acceleration detection module detection frame is directly connected with the mass block, and the angular velocity detection module driving frame and the angular velocity detection module detection frame are connected with the mass block and the eight anchor areas through connecting beams; the connecting beams are divided into five groups and respectively comprise an angular velocity detection module driving frame and a connecting beam of an anchor area, an angular velocity detection module detecting frame and a connecting beam of a structure vertex angle anchor area, an angular velocity detection module detecting frame and connecting beams of two anchor areas on two sides of the structure in the Y direction, an angular velocity detection module driving frame and a connecting beam of a mass block, a mass block detecting frame and a connecting beam of an angular velocity detection module detecting frame.
In order to realize differential output, the movable comb teeth of the detection frame of the angular velocity detection module and the fixed comb teeth on the fixed electrode adopt the design of unequal thickness, wherein the movable comb teeth in the detection comb tooth group at the Y + side are 10 micrometers thicker than the fixed comb teeth, the fixed comb teeth in the detection comb tooth group at the Y-side are 10 micrometers thicker than the movable comb teeth, and the matching between the movable comb teeth and the fixed comb teeth of the other assemblies is the design of equal thickness.
The angular velocity detection module detection frame and the four connecting beams of the first anchor areas at the four corners are respectively of a Z-shaped structure, so that the rigidity of the angular velocity detection module detection frame in the Z direction is reduced, and the mass block is ensured to smoothly drive the angular velocity detection module detection frame to move in the Z direction.
The angular velocity detection module drives the mode in the X direction, the angular velocity detection module detects the mode in the Z direction, the acceleration detection module detects the mode in the Y direction, and the acceleration detection module detects that the comb tooth group and the angular velocity detection module detect that the comb tooth group are differential output structures. When the acceleration is input along the Y axis, the mass block drives the acceleration detection module detection frame to move along the Y direction, and if the angular velocity input along the Y axis is to be detected, the angular velocity detection module driving frame needs to apply alternating driving force along the X direction, so that the driving frame drives the mass block to vibrate along the X axis in an alternating line mode. When angular speed of the Y axis is input, the mass block drives the angular speed detection module detection frame to do periodic staggered vibration along the Z axis under the action of the Coriolis force. The input acceleration and the input angular velocity can be obtained by detecting the capacitance variation of the comb teeth through the acceleration detection module and the angular velocity detection module.
As shown in FIG. 2, the driving comb structure of the angular velocity detection module comprises fixed comb teeth and movable comb teeth, and the driving force can be effectively increased or decreased only by increasing or decreasing the number of the comb teeth. The drive comb has extremely important sensitivity in the structure for detecting angular velocity. The driving structure is required to provide a large driving force for driving and also provide a certain stability for driving. As shown in FIG. 2, applying a voltage to the fixed comb teeth of the electrodes can cause the X-direction of the movable comb teeth to generate a tangential driving force, thereby driving the movement of the movable comb teeth, wherein d is the distance between the movable comb teeth and the fixed comb teeth, d0The cross distance between the fixed comb teeth and the movable comb teeth, and the change of the single-side area of a single capacitor comb tooth is delta S ═ d0*Δd。
The angular velocity detection module detects a comb structure as shown in fig. 3. The angular velocity detection module generally detects that the displacement is less than the drive displacement, and the reasonable design detects the broach structure and is the key that improves angular velocity detection sensitivity. The angular velocity detection module shown in fig. 3 detects the detection mode that the comb teeth are based on the variable area comb tooth capacitor of the comb teeth with different heights, the structure of the detection mode also comprises fixed comb teeth and movable comb teeth, and the angular velocity detection module detects that the frame drives the comb teeth to move along the Z direction. When the angular velocity is input, the detection frame drives the detection comb teeth to generate displacement in the Z direction, so that the capacitance areas of the fixed comb teeth and the movable comb teeth are changed. Wherein, C1For upper detection of comb capacitors, C2For the lower detection of comb tooth capacitance, d is the crossing distance between the fixed comb tooth and the movable comb tooth, and Δ d is the displacement distance between the movable comb teeth, so that the change Δ S of the single-side area of a single capacitance comb tooth is d × Δ d.
Acceleration detectionThe detection comb structure of the detection module is shown in FIG. 4, wherein d1And d2The distance between the fixed comb teeth and the movable comb teeth on two sides in the Y direction is the crossing distance. The acceleration detection module detects comb teeth and adopts a variable-area comb tooth capacitance detection mode. When acceleration is input, the acceleration detection frame drives the comb teeth to move along the Y direction, so that one side of a capacitor between the movable comb teeth and the fixed comb teeth in the Y direction detection frame is increased and one side of the capacitor is reduced, and a differential output structural form is formed. The comb tooth structure reduces interference between the angular velocity detection module and the acceleration detection module, when the mass block drives the acceleration detection frame to move in the X direction and the Z direction, capacitance changes on two sides of the acceleration detection frame in the Y direction are the same, and total capacitance between movable comb teeth and fixed comb teeth on two sides of the Y direction is constantly zero after difference.
The micro-sensor is used for measuring acceleration and angular velocity input by a Y axis, when the acceleration is input, the input acceleration can be obtained by calculating the capacitance variation between the fixed comb teeth on the fixed electrodes 13a, 13b, 13c, 13d, 13e and 13f detected by the acceleration detection module and the movable comb teeth on the detection frames 12a, 12b, 12c and 12d detected by the acceleration detection module; when the angular velocity is input, the capacitance variation between the fixed comb teeth on the fixed electrodes 8a and 8b and the movable comb teeth on the detection frames 4a and 4b of the angular velocity detection module is detected by the angular velocity detection module and is calculated, so that the input angular velocity can be obtained. Through the two modes, the novel integrated micro sensor of the Y-axis acceleration detection module and the angular velocity detection module achieves the purpose of accurately measuring the input acceleration and the angular velocity of the Y axis.
Through the reasonable design of the connecting beam, the driving mode and the detection mode of the angular velocity detection module and the detection mode of the acceleration detection module and the detection mode of the angular velocity detection module are decoupled mutually. The structural design of the detection comb teeth of the acceleration detection module eliminates the interference influence on the detection of the acceleration detection module caused by the driving mode and the detection mode of the angular velocity detection module, thereby increasing the measurement precision of the acceleration and the angular velocity of the micro sensor in the horizontal direction (Y direction).
Claims (5)
1. A micro sensor capable of simultaneously measuring horizontal direction acceleration and angular velocity is characterized in that: the silicon microstructure comprises an acceleration detection module and an angular velocity detection module, wherein the angular velocity detection module and the acceleration detection module share one mass block, the angular velocity detection module is connected with the mass block through a first connecting beam and a second connecting beam, the acceleration detection module is directly connected with the mass block, and the angular velocity detection module is connected with the glass base through a third connecting beam and a second anchor region; the angular velocity detection module comprises a driving module and a detection module, the driving module comprises a first driving module and a second driving module which are symmetrically arranged on two side edges of the mass block in the X direction, and the detection module comprises a first detection module and a second detection module which are symmetrically arranged on two side edges of the mass block in the Y direction; the two ends of the first driving module and the second driving module are connected with the first anchor area through fourth connecting beams, the two ends of the first detection module and the second detection module are connected with the first anchor area through fifth connecting beams, and the first detection module and the second detection module are connected with the glass base through third connecting beams and second anchor areas; the acceleration detection module is arranged in the middle of the mass block; the acceleration detection module comprises four third detection frames, four fourth detection frames, five detection frames, six detection frames and eight third detection fixed electrodes with the same structure, wherein the four third detection frames, the four fourth detection frames, the four fifth detection frames and the six detection frames are arranged in parallel along the Y direction; the third detection fixed electrode is respectively connected with the third detection frame, the fourth detection frame, the fifth detection frame and the sixth detection frame through the first detection comb tooth group; the acceleration detection module is directly connected with the mass block through a third detection frame, a fourth detection frame, a fifth detection frame and a sixth detection frame; the angular velocity detection module driving mode and the angular velocity detection module detection mode are decoupled from each other, and the acceleration detection module detection mode and the angular velocity detection module detection mode are decoupled from each other, so that the acceleration and the angular velocity in the horizontal direction are measured simultaneously;
the first driving module comprises a first driving frame and a first driving fixed electrode, and the second driving module comprises a second driving frame and a second driving fixed electrode; the first driving frame and the second driving frame are arranged on two sides of the mass block in the X direction and are respectively connected with the mass block through first connecting beams; the first driving fixed electrode is connected with the first driving frame through the first driving comb teeth, and the second driving fixed electrode is connected with the second driving frame through the second driving comb teeth;
the first detection module comprises a first detection frame and a first detection fixed electrode, and the second detection module comprises a second detection frame and a second detection fixed electrode; the first detection frame and the second detection frame are arranged on two sides of the mass block in the Y direction and are respectively connected with the mass block through second connecting beams; the first detection frame and the second detection frame are connected with the glass base through a third connecting beam and a second anchor area respectively; the first detection fixed electrode is connected with the first detection frame through the first detection comb teeth, and the second detection fixed electrode is connected with the second detection frame through the second detection comb teeth;
the first driving comb teeth comprise movable comb teeth arranged on the first driving frame and fixed comb teeth arranged on the first driving fixed electrode, and the movable comb teeth are matched with the fixed comb teeth; the second driving comb tooth structure is the same as the first driving comb tooth structure;
the first detection comb teeth comprise movable comb teeth arranged on the first detection frame and fixed comb teeth arranged on the first detection fixed electrode, and the movable comb teeth are matched with the fixed comb teeth; the second detection comb tooth structure is the same as the first detection comb tooth structure;
the movable comb teeth on the first detection frame and the second detection frame and the fixed comb teeth on the first detection fixed electrode and the second detection fixed electrode adopt the design of unequal thickness, and the movable comb teeth on the first driving frame and the second driving frame and the fixed comb teeth on the first driving fixed electrode and the second driving fixed electrode adopt the design of equal thickness.
2. A microsensor according to claim 1 capable of simultaneous measurement of horizontal acceleration and angular velocity, wherein: the second connecting beam comprises a transverse connecting beam and a longitudinal connecting beam, one side of the transverse connecting beam is connected with the first detection frame or the second detection frame, the other side of the transverse connecting beam is connected with one end of the longitudinal connecting beam, and the other end of the longitudinal connecting beam is embedded in the mass block.
3. A microsensor according to claim 1 capable of simultaneous measurement of horizontal acceleration and angular velocity, wherein: the movable comb teeth on the first detection frame and the second detection frame on the Y + side are thicker than the fixed comb teeth on the first detection fixed electrode and the second detection fixed electrode, and the fixed comb teeth on the first detection fixed electrode and the second detection fixed electrode on the Y-side are thicker than the movable comb teeth on the first detection frame and the second detection frame.
4. A microsensor according to claim 1 capable of simultaneous measurement of horizontal acceleration and angular velocity, wherein: the first detection comb tooth group comprises six detection comb teeth symmetrically arranged along the third detection fixed electrode, the detection comb teeth comprise movable comb teeth arranged on the third detection frame, the fourth detection frame, the fifth detection frame or the sixth detection frame and fixed comb teeth symmetrically arranged on the third detection fixed electrode, and the movable comb teeth are matched with the fixed comb teeth; the movable comb teeth and the fixed comb teeth in the first detection comb tooth group are designed to be equal in thickness.
5. A microsensor according to claim 1 capable of simultaneous measurement of horizontal acceleration and angular velocity, wherein: the first detection frame and the fifth connection beam of the second detection frame of the angular velocity detection module, which are connected with the first anchor area, are of Z-shaped structures, so that the rigidity of each detection frame of the angular velocity detection module in the Z direction is reduced, and the mass block is ensured to smoothly drive each detection frame of the angular velocity detection module to move in the Z direction.
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| JP2000249719A (en) * | 1999-03-03 | 2000-09-14 | Mitsubishi Electric Corp | Semiconductor three-axis acceleration/two-axis angular velocity sensor |
| CN101038299A (en) * | 2007-04-21 | 2007-09-19 | 中北大学 | Uniaxle integrated inertia measurement device based on single mass-block |
| JP2009216693A (en) * | 2008-02-13 | 2009-09-24 | Denso Corp | Physical sensor |
| TWI452297B (en) * | 2011-09-26 | 2014-09-11 | Richwave Technology Corp | Capacitive accelerometer |
| ITTO20120855A1 (en) * | 2012-09-28 | 2014-03-29 | Milano Politecnico | INTEGRATED STRUCTURE OF DETECTIVE DETECTION OF ACCELERATION AND ANGULAR SPEED AND RELATIVE MEMS SENSOR DEVICE |
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| CN105911309B (en) * | 2016-06-24 | 2019-01-29 | 东南大学 | Single anchor points support formula dual-axis silicon-micro resonance accelerometer |
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| CN107655453A (en) * | 2017-09-18 | 2018-02-02 | 东南大学 | A kind of multi-direction silicon micro-resonance type obliquity sensor of gamut |
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