CN116034517A - 射频微电子机械开关、射频装置 - Google Patents
射频微电子机械开关、射频装置 Download PDFInfo
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- CN116034517A CN116034517A CN202180002283.1A CN202180002283A CN116034517A CN 116034517 A CN116034517 A CN 116034517A CN 202180002283 A CN202180002283 A CN 202180002283A CN 116034517 A CN116034517 A CN 116034517A
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- radio frequency
- bridge
- stretchable
- microelectromechanical switch
- ground electrode
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- 239000000758 substrate Substances 0.000 claims abstract description 42
- 239000012528 membrane Substances 0.000 claims abstract description 41
- 239000000463 material Substances 0.000 claims description 23
- 229910052751 metal Inorganic materials 0.000 claims description 5
- 239000002184 metal Substances 0.000 claims description 5
- 238000010276 construction Methods 0.000 claims description 3
- 238000005452 bending Methods 0.000 abstract description 11
- 238000000034 method Methods 0.000 description 15
- 230000008569 process Effects 0.000 description 11
- 230000004044 response Effects 0.000 description 8
- 238000004891 communication Methods 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000005516 engineering process Methods 0.000 description 5
- 238000003780 insertion Methods 0.000 description 4
- 230000037431 insertion Effects 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000000059 patterning Methods 0.000 description 3
- 239000003990 capacitor Substances 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229920002120 photoresistant polymer Polymers 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 230000002159 abnormal effect Effects 0.000 description 1
- WYTGDNHDOZPMIW-RCBQFDQVSA-N alstonine Natural products C1=CC2=C3C=CC=CC3=NC2=C2N1C[C@H]1[C@H](C)OC=C(C(=O)OC)[C@H]1C2 WYTGDNHDOZPMIW-RCBQFDQVSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 230000005540 biological transmission Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000007641 inkjet printing Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 230000001788 irregular Effects 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000004088 simulation Methods 0.000 description 1
- 230000001629 suppression Effects 0.000 description 1
- 238000009827 uniform distribution Methods 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
- B81B3/0018—Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
- B81B3/0021—Transducers for transforming electrical into mechanical energy or vice versa
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
- H01P1/00—Auxiliary devices
- H01P1/10—Auxiliary devices for switching or interrupting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2201/00—Specific applications of microelectromechanical systems
- B81B2201/01—Switches
- B81B2201/012—Switches characterised by the shape
- B81B2201/018—Switches not provided for in B81B2201/014 - B81B2201/016
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/0109—Bridges
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B81—MICROSTRUCTURAL TECHNOLOGY
- B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
- B81B2203/00—Basic microelectromechanical structures
- B81B2203/01—Suspended structures, i.e. structures allowing a movement
- B81B2203/019—Suspended structures, i.e. structures allowing a movement characterized by their profile
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0027—Movable electrode connected to ground in the open position, for improving isolation
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Micromachines (AREA)
Abstract
本公开提供一种射频微电子机械开关、射频装置，属于微电子机械***技术领域，其可至少部分解决现有的射频微电子机械开关功能性能易受器件弯曲变形等场景影响的问题。本公开的频微电子机械开关包括：基底；设置在基底上的信号电极、第一地电极、第二地电极和连接膜桥；所述连接膜桥横跨所述信号电极，且其两端分别与所述第一地电极和所述第二地电极连接；连接膜桥包括可拉伸结构，所述可拉伸结构的可拉伸方向与所述连接膜桥的延伸方向相同。
Description
PCT国内申请，说明书已公开。
Claims (14)
- PCT国内申请，权利要求书已公开。
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/CN2021/114538 WO2023023976A1 (zh) | 2021-08-25 | 2021-08-25 | 射频微电子机械开关、射频装置 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN116034517A true CN116034517A (zh) | 2023-04-28 |
Family
ID=85321609
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202180002283.1A Pending CN116034517A (zh) | 2021-08-25 | 2021-08-25 | 射频微电子机械开关、射频装置 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US20240186095A1 (zh) |
| CN (1) | CN116034517A (zh) |
| WO (1) | WO2023023976A1 (zh) |
Family Cites Families (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6670921B2 (en) * | 2001-07-13 | 2003-12-30 | Hrl Laboratories, Llc | Low-cost HDMI-D packaging technique for integrating an efficient reconfigurable antenna array with RF MEMS switches and a high impedance surface |
| WO2006000611A1 (en) * | 2004-06-24 | 2006-01-05 | Nokia Corporation | Frequency synthesizer |
| TWI587527B (zh) * | 2006-09-06 | 2017-06-11 | 美國伊利諾大學理事會 | 二維設備陣列 |
| CN101262083A (zh) * | 2008-03-26 | 2008-09-10 | 中国科学院光电技术研究所 | 一种应用于低频段的高隔离度宽带rf mems开关电路 |
| CN101777677A (zh) * | 2010-01-21 | 2010-07-14 | 北京邮电大学 | 基于mems技术的可调带通滤波器 |
| US8368491B2 (en) * | 2010-04-22 | 2013-02-05 | Raytheon Company | Systems and methods for providing high-capacitance RF MEMS switches |
| CN102243940B (zh) * | 2011-03-28 | 2013-09-25 | 西安电子科技大学 | 折梁屈曲射频微开关 |
| US10636936B2 (en) * | 2018-03-05 | 2020-04-28 | Sharp Kabushiki Kaisha | MEMS array system and method of manipulating objects |
| CN109375096B (zh) * | 2018-09-04 | 2021-06-29 | 东南大学 | 一种基于柔性基板弯曲条件下的rf mems静电驱动开关微波特性分析方法 |
-
2021
- 2021-08-25 WO PCT/CN2021/114538 patent/WO2023023976A1/zh active Application Filing
- 2021-08-25 US US17/796,501 patent/US20240186095A1/en active Pending
- 2021-08-25 CN CN202180002283.1A patent/CN116034517A/zh active Pending
Also Published As
| Publication number | Publication date |
|---|---|
| US20240186095A1 (en) | 2024-06-06 |
| WO2023023976A1 (zh) | 2023-03-02 |
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