CN115954314A - Pressing jig for ceramic copper-clad substrate - Google Patents
Pressing jig for ceramic copper-clad substrate Download PDFInfo
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- CN115954314A CN115954314A CN202310215807.6A CN202310215807A CN115954314A CN 115954314 A CN115954314 A CN 115954314A CN 202310215807 A CN202310215807 A CN 202310215807A CN 115954314 A CN115954314 A CN 115954314A
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Abstract
The invention discloses a flattening jig for a ceramic copper-clad substrate, relates to the field of production of ceramic copper-clad substrates, aims to solve the technical problem of warping of the ceramic copper-clad substrate, and adopts the technical scheme that: the utility model provides a pottery covers copper base plate's tool that flattens, is including being used for adsorbing the pottery and cover the vacuum negative pressure platform of copper base plate, the top of vacuum negative pressure platform is provided with the vertical supporting seat of increaseing through servo linear mechanism, the bilateral symmetry of supporting seat is provided with bears the frame, both sides the bottom of bearing the frame is fixed with a plurality of buffer, a plurality of respectively the bottom of buffer is fixed with the rubber pressure pad respectively. When the flattening jig for the ceramic copper-clad substrate is applied, the flattening and warping prevention effects are good.
Description
Technical Field
The invention relates to the field of ceramic copper-clad substrate production equipment, in particular to a flattening jig for a ceramic copper-clad substrate.
Background
The problem that the ceramic copper-clad substrate product (DCB/AMB/DPC/DBA) is superior to the difference of copper-ceramic matching after atmosphere or vacuum sintering can be distorted, the highest point of distortion can reach more than 2mm and exceeds the laser cutting focal depth (about 1mm of common laser focal depth), and a defocusing phenomenon occurs in the cutting process, so that the cutting depth is different, and the damage is caused during slicing. The traditional cutting and fixing mode is a pure vacuum adsorption fixing mode, and the product is only placed on the table top no matter manually placed by a person or placed by a mechanical arm.
The chinese patent that has publication number CN101958230B discloses a clamp plate tool, and the tool frame comprises a pair of connection frame, a pair of clamp plate frame and a connecting plate, and a connection frame both ends correspond respectively and link firmly two clamp plate frame one end, and another connection frame both ends correspond respectively and link firmly the two clamp plate frame other ends to the direction of use is the benchmark: the connecting plate is fixedly connected to the outer side of one connecting frame, the connecting plate can be detachably fixed on machine equipment, each independent cross beam is detachably and slidably positioned between the two connecting frames at intervals, and the bottoms of the independent cross beams are flush with the bottoms of the press plate frames.
The prior publication No. CN104118598A discloses a film flattening jig. The jig comprises a base and an inverted L-shaped supporting frame, wherein the base is connected with the supporting frame through a positioning pin, a fixing device is arranged on the base and comprises a support, and a first mechanical arm and a second mechanical arm which are connected with the support, the support is fixed on the base, the first mechanical arm and the second mechanical arm are arranged in parallel, the supporting frame supports a push rod capable of moving up and down, and the central axis of the push rod is perpendicular to the central lines of the two mechanical arms.
In the patents, the product is adsorbed and fixed by the negative pressure generated by vacuum, if the product is tilted, the product cannot be flatly adsorbed by the negative pressure generated by the vacuum if the product is tilted reversely.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide a flattening jig for a ceramic copper-clad substrate to solve the problems in the background art.
The technical purpose of the invention is realized by the following technical scheme: the utility model provides a pottery covers tool that flattens of copper base plate, is including the vacuum negative pressure platform that is used for adsorbing pottery and covers the copper base plate, the top of vacuum negative pressure platform is provided with the supporting seat through the vertical increasement of servo linear mechanism, the bilateral symmetry of supporting seat is provided with bears the frame, both sides the bottom of bearing the frame is fixed with a plurality of buffer, a plurality of respectively the bottom of buffer is fixed with the rubber pressure pad respectively.
By adopting the technical scheme, when the flattening jig for the ceramic copper-clad substrate is applied, after a product is automatically or manually placed on a vacuum adsorption platform, vacuum adsorption is started, the supporting seat is driven by the servo linear mechanism to move downwards, the supporting seat can drive the buffer and the rubber pressure pad to press the substrate downwards for fixation when the supporting seat moves downwards, the supporting seat is driven to rise after the vacuum negative pressure reaches-13 kpa, and the substrate can be flattened and can be effectively prevented from warping.
The invention is further configured to: the bottom of supporting seat is fixed with the mount, the symmetry is provided with two sets of sliding seats on the mount, and two sets of the both sides of sliding seat rotate respectively and are connected with the compression roller.
By adopting the technical scheme, the pressing roll on the sliding seat at the bottom of the fixing frame can be used for assisting in flattening the ceramic copper-clad substrate.
The invention is further configured to: the sliding seat is driven by a power mechanism to adjust the position, the power mechanism comprises a servo motor, a bidirectional screw rod, a threaded cylinder, a bolt rod, a worm rod part, a worm wheel part and a traction spring, the servo motor is fixed on a fixing frame, the bidirectional screw rod is horizontally and rotatably connected in the fixing frame through a bearing, the threaded cylinder is vertically and rotatably connected on the fixing frame through a bearing, the two groups of sliding seats are respectively and threadedly connected to the outer part of the bidirectional screw rod, the bolt rod is threadedly connected in the threaded cylinder, one end of the bolt rod is inserted into the bearing frame and the supporting seat, the worm rod part is fixed to the outer part of the bidirectional screw rod, the worm wheel part is fixed to the outer part of the threaded cylinder, the worm rod part and the worm wheel part are meshed with each other, and the traction spring is connected between the two bearing frames.
By adopting the technical scheme, when the servo motor in the power mechanism is started, the servo motor can drive the bidirectional screw rod to rotate, when the bidirectional screw rod which is rotatably connected in the fixed frame rotates, the bidirectional screw rod can drive the two sliding seats to mutually approach or separate, and when the two sliding seats mutually approach or separate, the two sliding seats can drive the compression roller on the sliding seats to change the pressing position; can drive worm part when two-way lead screw rotates in step and rotate, can drive screw thread section of thick bamboo through the meshing of worm part and rotate, can drive the bolt pole when screw thread section of thick bamboo rotates and go up and down, can break away from bearing frame and supporting seat when the bolt pole descends, will bear the locking of bearing frame and supporting seat and remove, after the locking is removed, the compression roller can be along with sliding seat positioning and positioning, the compression roller can promote blotter and rubber pressure pad and break away from the base plate top, thereby realize breaking away from flattening, prevent that the warpage from taking place, traction spring can guarantee that follow-up two bear the frame return.
The invention is further configured to: a first gear is fixed at the end of a motor shaft of the servo motor, a second gear is fixed outside the bidirectional screw rod, and the first gear and the second gear are meshed with each other.
Through adopting above-mentioned technical scheme, when servo motor started, can drive first gear and rotate, drive the second gear rotation through the meshing of first gear and second gear to drive two-way lead screw and rotate.
The invention is further configured to: the bottom of the supporting seat is provided with a guide groove, the tops of the bearing frames on two sides are respectively fixed with a guide block, and the guide blocks are horizontally and slidably connected in the guide groove.
Through adopting above-mentioned technical scheme, when the carriage slided in supporting seat bottom, it can improve and bear gliding stability of frame through the direction cooperation of guide block with the guide way.
The invention is further configured to: the cross sections of the guide groove and the guide block are respectively trapezoidal.
Through adopting above-mentioned technical scheme, adopt trapezoidal cross-section's guide block can improve and bear gliding stability of frame.
The invention is further configured to: the bilateral symmetry of supporting seat is fixed with the auxiliary frame, two the bottom of auxiliary frame is fixed with two product brackets respectively, set up four recesses that supply product bracket card to go into in the vacuum negative pressure platform.
Through adopting above-mentioned technical scheme, adopt auxiliary frame and product bracket can improve the effect of flattening to the base plate.
The invention is further configured to: the figure of buffer is six, the rubber pressure pad is the chloroprene rubber piece, rubber pressure pad threaded connection is in the bottom of buffer.
By adopting the technical scheme, when the number of the buffers is 6 and the rubber pressure pad adopts a chloroprene rubber block, the flattening effect is good.
In conclusion, the invention has the following beneficial effects:
when the flattening jig for the ceramic copper-clad substrate is applied, the flattening and warping prevention effects are good; when the flattening jig for the ceramic copper-clad substrate is applied, a product is automatically or manually placed on a vacuum adsorption platform, vacuum adsorption is started, a servo linear mechanism can be used for driving a supporting seat to move downwards, a buffer and a rubber pressing pad can be driven to press and fix the substrate downwards when the supporting seat moves downwards, the supporting seat is driven to ascend after vacuum negative pressure reaches-13 kpa, the substrate can be flattened, and the substrate can be effectively prevented from warping; when a servo motor in the power mechanism is started, the servo motor can drive the bidirectional screw rod to rotate, when the bidirectional screw rod rotatably connected in the fixed frame rotates, the servo motor can drive the two sliding seats to mutually approach or separate, and when the two sliding seats mutually approach or separate, the servo motor can drive the compression roller on the sliding seats to change the pressing position; when the bidirectional screw rod rotates, the worm rod part can be synchronously driven to rotate, the threaded cylinder can be driven to rotate through the meshing of the worm rod part and the worm wheel part, the bolt rod can be driven to lift when the threaded cylinder rotates, the bolt rod can be separated from the bearing frame and the supporting seat when the bolt rod descends, the bearing frame and the supporting seat can be unlocked, after the locking is unlocked, the compression roller can be adjusted along with the sliding seat, the compression roller can push the cushion pad and the rubber pressure pad to be separated from the upper side of the base plate, so that the flattening and the flattening are realized, the warping is prevented, and the traction spring can ensure the return of the subsequent two bearing frames.
Drawings
FIG. 1 is a schematic structural view of the present invention;
FIG. 2 is a schematic view of the present invention after hiding the vacuum platform;
FIG. 3 is an enlarged view of FIG. 2 at A;
FIG. 4 is a second schematic view of the present invention after hiding the vacuum platform;
fig. 5 is an enlarged view of fig. 4 at B.
In the figure: 1. a vacuum negative pressure platform; 2. a servo linear mechanism; 3. a supporting base; 4. a carrier; 5. a buffer; 51. a rubber pressure pad; 6. a fixed mount; 61. a sliding seat; 62. a compression roller; 7. a power mechanism; 71. a bidirectional lead screw; 72. a threaded barrel; 73. a latch rod; 74. a worm part; 75. a worm gear portion; 79. a traction spring; 76. a servo motor; 77. a first gear; 78. a second gear; 41. a guide block; 42. a guide groove; 8. an auxiliary frame; 81. a product carrier; 82. and (6) a groove.
Detailed Description
The invention is described in detail below with reference to the figures and examples.
Referring to fig. 1 to 5, a pottery covers copper base plate's tool that flattens, including being used for adsorbing the pottery and covering the vacuum negative pressure platform 1 of copper base plate, the top of vacuum negative pressure platform 1 is provided with through the vertical heightened supporting seat 3 of servo linear mechanism 2, the bilateral symmetry of supporting seat 3 is provided with bears frame 4, both sides bear the bottom of frame 4 and be fixed with a plurality of buffer 5, a plurality of the bottom of buffer 5 is fixed with rubber pressure pad 51 respectively. When the flattening jig for the ceramic copper-clad substrate is applied, after a product is automatically or manually placed on a vacuum adsorption platform, vacuum adsorption is started, the supporting seat 3 is driven by the servo linear mechanism 2 to move downwards, the supporting seat 3 can be driven to drive the buffer 5 and the rubber pressure pad 51 to press the substrate downwards for fixation when moving downwards, and the supporting seat 3 is driven to ascend after vacuum negative pressure reaches-13 kpa, so that the substrate can be flattened and the substrate can be effectively prevented from warping.
Referring to fig. 1 to 5, in order to achieve a good flattening effect when the suction cup is detached from the substrate by using the device, a fixing frame 6 is fixed at the bottom of the supporting seat 3, two sets of sliding seats 61 are symmetrically arranged on the fixing frame 6, two sides of the two sets of sliding seats 61 are respectively connected with a pressing roller 62 in a rotating manner, and the pressing roller 62 on the sliding seat 61 at the bottom of the fixing frame 6 can assist in flattening the ceramic copper-clad substrate.
Referring to fig. 1 to 5, in order to realize linkage control, the sliding seat 61 is driven by a power mechanism 7 to adjust the position, the power mechanism 7 includes a servo motor 76, a bidirectional screw 71, a threaded cylinder 72, a latch rod 73, a worm part 74, a worm wheel part 75 and a traction spring 79, the servo motor 76 is fixed on a fixed frame 6, the bidirectional screw 71 is horizontally and rotatably connected in the fixed frame 6 through a bearing, the threaded cylinder 72 is vertically and rotatably connected on the fixed frame 6 through a bearing, two sets of the sliding seats 61 are respectively and threadedly connected outside the bidirectional screw 71, the latch rod 73 is threadedly connected in the threaded cylinder 72, one end of the latch rod 73 is inserted in the bearing frame 4 and the support seat 3, the worm rod part 74 is fixed outside the bidirectional screw 71, the worm wheel part 75 is fixed outside the threaded cylinder 72, the worm rod part 74 and the worm wheel part 75 are engaged with each other, and the traction spring 79 is connected between the two bearing frames 4; when the servo motor 76 in the power mechanism 7 is started, it can drive the bidirectional lead screw 71 to rotate, when the bidirectional lead screw 71 rotatably connected in the fixed frame 6 rotates, it can drive the two sliding seats 61 to approach or separate from each other, and when the two sliding seats 61 approach or separate from each other, it can drive the press roller 62 on the sliding seats 61 to change the pressing position; when the bidirectional screw 71 rotates, the worm rod part 74 can be synchronously driven to rotate, the threaded cylinder 72 can be driven to rotate through the meshing of the worm rod part 74 and the worm wheel part 75, the threaded cylinder 72 can drive the plug rod 73 to lift when rotating, the plug rod 73 can be separated from the bearing frame 4 and the supporting seat 3 when descending, the locking of the bearing frame 4 and the supporting seat 3 is released, after the locking is released, the press roller 62 can be adjusted along with the sliding seat 61, the press roller 62 can push the cushion pad and the rubber pressure pad 51 to be separated from the upper side of the substrate, so that the separation and flattening are realized, the warping is prevented, and the traction spring 79 can ensure the return of the two subsequent bearing frames 4.
Referring to fig. 1 to 5, a first gear 77 is fixed at the end of a motor shaft of the servo motor 76, a second gear 78 is fixed outside the bidirectional screw 71, and the first gear 77 and the second gear 78 are engaged with each other; when the servo motor 76 is started, the first gear 77 is driven to rotate, and the second gear 78 is driven to rotate through the meshing of the first gear 77 and the second gear 78, so that the bidirectional screw 71 is driven to rotate.
Referring to fig. 1 to 5, a guide groove 42 is formed at the bottom of the supporting seat 3, guide blocks 41 are respectively fixed at the tops of the bearing frames 4 at both sides, the guide blocks 41 are horizontally slidably connected in the guide groove 42, and when the bearing frame 4 slides at the bottom of the supporting seat 3, the bearing frame 4 can be guided and matched with the guide groove 42 through the guide blocks 41, so that the sliding stability of the bearing frame 4 is improved; the guide grooves 42 and the guide blocks 41 have trapezoidal cross sections, and the guide blocks 41 with trapezoidal cross sections can improve the sliding stability of the bearing frame 4.
Referring to fig. 1 to 5, auxiliary frames 8 are symmetrically fixed on two sides of the supporting seat 3, two product brackets 81 are respectively fixed at the bottoms of the two auxiliary frames 8, four grooves 82 for the product brackets 81 to be clamped into are formed in the vacuum negative pressure platform 1, and the auxiliary frames 8 and the product brackets 81 can improve the flattening effect on the substrate; wherein the figure of buffer 5 is six, rubber pressure pad 51 is the chloroprene rubber piece, rubber pressure pad 51 threaded connection has good effect of flattening in the bottom of buffer 5, when buffer 5 adopts 6 figures, when rubber pressure pad 51 adopted the chloroprene rubber piece.
When the device is applied, a product can be automatically or manually placed on the vacuum negative pressure platform 1, then the vacuum adsorption is started, the servo linear mechanism 2 can be used for driving the supporting seat 3 to move downwards, and the supporting seat 3 can drive the buffer 5 and the rubber pressure pad 51 to press and fix the substrate downwards when moving downwards; then, a servo motor 76 in the power mechanism 7 is started, and can drive the bidirectional screw 71 to rotate, when the bidirectional screw 71 rotatably connected in the fixed frame 6 rotates, the servo motor can drive the two sliding seats 61 to approach or separate from each other, and when the two sliding seats 61 approach or separate from each other, the servo motor can drive the compression roller 62 on the sliding seats 61 to change the pressing position; when the bidirectional screw 71 rotates, the worm rod part 74 can be synchronously driven to rotate, the threaded cylinder 72 can be driven to rotate through the meshing of the worm rod part 74 and the worm wheel part 75, the threaded cylinder 72 can drive the plug rod 73 to lift when rotating, the plug rod 73 can be separated from the bearing frame 4 and the supporting seat 3 when descending, the locking of the bearing frame 4 and the supporting seat 3 is released, after the locking is released, the press roller 62 can be adjusted along with the adjustment of the sliding seat 61, the press roller 62 can push the cushion pad and the rubber pressure pad 51 to be separated from the upper side of the substrate, so that the separation and flattening are realized, the warping is prevented, and the traction spring 79 can ensure the return of the following two bearing frames 4; when the vacuum negative pressure reaches-13 kpa, the supporting base 3 is driven to rise, so that the substrate can be flattened and the substrate can be effectively prevented from warping.
The above description is only a preferred embodiment of the present invention, and the protection scope of the present invention is not limited to the above embodiments, and all technical solutions belonging to the idea of the present invention belong to the protection scope of the present invention. It should be noted that modifications and embellishments within the scope of the invention may occur to those skilled in the art without departing from the principle of the invention, and are considered to be within the scope of the invention.
Claims (8)
1. The utility model provides a pottery covers copper base plate's tool that flattens, includes vacuum negative pressure platform (1) that is used for adsorbing pottery to cover copper base plate, its characterized in that: the vacuum negative pressure platform is characterized in that a supporting seat (3) which is vertically heightened through a servo linear mechanism (2) is arranged above the vacuum negative pressure platform (1), a bearing frame (4) is symmetrically arranged on two sides of the supporting seat (3), a plurality of buffers (5) are fixed to the bottoms of the bearing frame (4) respectively, and a plurality of rubber pressure pads (51) are fixed to the bottoms of the buffers (5) respectively.
2. The flattening jig for the ceramic copper-clad substrate according to claim 1, characterized in that: the bottom of supporting seat (3) is fixed with mount (6), be provided with two sets of sliding seat (61) on mount (6) the symmetry, it is two sets of the both sides of sliding seat (61) rotate respectively and are connected with compression roller (62).
3. The flattening jig for the ceramic copper-clad substrate according to claim 2, characterized in that: the sliding seat (61) is driven by a power mechanism (7) to adjust the position, the power mechanism (7) comprises a servo motor (76), a bidirectional screw rod (71), a threaded cylinder (72), a bolt rod (73), a worm part (74), a worm wheel part (75) and a traction spring (79), the servo motor (76) is fixed on a fixing frame (6), the bidirectional screw rod (71) is horizontally and rotatably connected in the fixing frame (6) through a bearing, the threaded cylinder (72) is vertically and rotatably connected on the fixing frame (6) through a bearing, two groups of sliding seats (61) are respectively and threadedly connected to the outer part of the bidirectional screw rod (71), the bolt rod (73) is threadedly connected in the threaded cylinder (72), one end of the bolt rod (73) is inserted in the bearing frame (4) and the supporting seat (3), the worm rod part (74) is fixed to the outer part of the bidirectional screw rod (71), the worm wheel part (75) is fixed to the outer part of the threaded cylinder (72), the worm rod part (74) and the worm wheel part (75) are meshed with the worm wheel part (79), and the traction spring is connected between the two bearing frames (4).
4. The flattening jig for the ceramic copper-clad substrate according to claim 3, characterized in that: a first gear (77) is fixed at the end part of a motor shaft of the servo motor (76), a second gear (78) is fixed outside the bidirectional screw rod (71), and the first gear (77) and the second gear (78) are meshed with each other.
5. The flattening jig for the ceramic copper-clad substrate according to claim 3, characterized in that: the bottom of the supporting seat (3) is provided with a guide groove (42), the tops of the bearing frames (4) on two sides are respectively fixed with a guide block (41), and the guide blocks (41) are horizontally and slidably connected in the guide groove (42).
6. The flattening jig for the ceramic copper-clad substrate according to claim 5, characterized in that: the sections of the guide groove (42) and the guide block (41) are respectively trapezoidal.
7. The flattening jig for the ceramic copper-clad substrate according to claim 1, characterized in that: the bilateral symmetry of supporting seat (3) is fixed with auxiliary frame (8), two the bottom of auxiliary frame (8) is fixed with two product bracket (81) respectively, set up four recess (82) that supply product bracket (81) card to go into in vacuum negative pressure platform (1).
8. The flattening jig for the ceramic copper-clad substrate according to claim 1, characterized in that: the number of the buffer (5) is six, the rubber pressure pad (51) is a chloroprene rubber block, and the rubber pressure pad (51) is in threaded connection with the bottom of the buffer (5).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310215807.6A CN115954314B (en) | 2023-03-08 | 2023-03-08 | Flattening jig for ceramic copper-clad substrate |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202310215807.6A CN115954314B (en) | 2023-03-08 | 2023-03-08 | Flattening jig for ceramic copper-clad substrate |
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| CN115954314A true CN115954314A (en) | 2023-04-11 |
| CN115954314B CN115954314B (en) | 2023-05-16 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116921877A (en) * | 2023-09-14 | 2023-10-24 | 四川富乐华半导体科技有限公司 | Copper-clad ceramic carrier plate cutting and coding device |
Citations (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0511500U (en) * | 1991-07-22 | 1993-02-12 | 日本ケミコン株式会社 | Substrate pressing guide device |
| JP2000124299A (en) * | 1998-10-16 | 2000-04-28 | Hitachi Ltd | Manufacture of semiconductor device and semiconductor manufacturing apparatus |
| JP2003243817A (en) * | 2002-02-20 | 2003-08-29 | Asuriito Fa Kk | Pickup head, device, and method for supplying solder ball |
| JP2008034766A (en) * | 2006-08-01 | 2008-02-14 | Allied Material Corp | Suction member |
| KR101610256B1 (en) * | 2014-11-05 | 2016-04-07 | 김성기 | Apparatus For Vacuum Suction Plate |
| US20170053822A1 (en) * | 2015-08-23 | 2017-02-23 | Camtek Ltd. | Warped wafers vacuum chuck |
| CN109179037A (en) * | 2018-08-13 | 2019-01-11 | 上海申和热磁电子有限公司 | It is a kind of for reduce DBC substrate single side sintering after buckling deformation presser device |
| CN109244028A (en) * | 2018-09-28 | 2019-01-18 | 上海微松工业自动化有限公司 | A kind of smooth fixing means of wafer |
| CN109351808A (en) * | 2018-10-19 | 2019-02-19 | 杨翠痕 | A kind of adjustable sheet metal component pressing jig |
| CN112192033A (en) * | 2020-10-22 | 2021-01-08 | 技感半导体设备(南通)有限公司 | Large-area substrate flattening, absorbing and positioning device |
| CN112571367A (en) * | 2019-09-30 | 2021-03-30 | 盟立自动化股份有限公司 | Laminating equipment, intermediary mechanism thereof and laminating method |
| CN213888739U (en) * | 2020-10-27 | 2021-08-06 | 江苏富乐德半导体科技有限公司 | Laser cutting adsorbs tool with covering copper base plate warpage blank pressing |
| CN215200237U (en) * | 2021-04-06 | 2021-12-17 | 江苏富乐德半导体科技有限公司 | Semiconductor substrate laser cutting fixing jig |
| CN215644409U (en) * | 2021-06-22 | 2022-01-25 | 南瑞联研半导体有限责任公司 | Welding tool for large warping degree long substrate of IGBT device |
| CN114501784A (en) * | 2022-03-10 | 2022-05-13 | 深圳洲旭电路科技有限公司 | Device for improving warping of circuit board |
| CN217822719U (en) * | 2022-05-31 | 2022-11-15 | 江苏芯德半导体科技有限公司 | Vacuum base plate for wafer |
| CN217892212U (en) * | 2022-07-04 | 2022-11-25 | 深圳思睿辰新材料有限公司 | High positioning accuracy pottery copper-clad plate printing jig |
| CN218473509U (en) * | 2022-09-15 | 2023-02-10 | 宁夏储芯科技有限公司 | Flattening mechanism for preventing substrate from warping and chip packaging machine |
| TWI794116B (en) * | 2021-10-28 | 2023-02-21 | 盟立自動化股份有限公司 | Attaching device and attaching module |
-
2023
- 2023-03-08 CN CN202310215807.6A patent/CN115954314B/en active Active
Patent Citations (19)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0511500U (en) * | 1991-07-22 | 1993-02-12 | 日本ケミコン株式会社 | Substrate pressing guide device |
| JP2000124299A (en) * | 1998-10-16 | 2000-04-28 | Hitachi Ltd | Manufacture of semiconductor device and semiconductor manufacturing apparatus |
| JP2003243817A (en) * | 2002-02-20 | 2003-08-29 | Asuriito Fa Kk | Pickup head, device, and method for supplying solder ball |
| JP2008034766A (en) * | 2006-08-01 | 2008-02-14 | Allied Material Corp | Suction member |
| KR101610256B1 (en) * | 2014-11-05 | 2016-04-07 | 김성기 | Apparatus For Vacuum Suction Plate |
| US20170053822A1 (en) * | 2015-08-23 | 2017-02-23 | Camtek Ltd. | Warped wafers vacuum chuck |
| CN109179037A (en) * | 2018-08-13 | 2019-01-11 | 上海申和热磁电子有限公司 | It is a kind of for reduce DBC substrate single side sintering after buckling deformation presser device |
| CN109244028A (en) * | 2018-09-28 | 2019-01-18 | 上海微松工业自动化有限公司 | A kind of smooth fixing means of wafer |
| CN109351808A (en) * | 2018-10-19 | 2019-02-19 | 杨翠痕 | A kind of adjustable sheet metal component pressing jig |
| CN112571367A (en) * | 2019-09-30 | 2021-03-30 | 盟立自动化股份有限公司 | Laminating equipment, intermediary mechanism thereof and laminating method |
| CN112192033A (en) * | 2020-10-22 | 2021-01-08 | 技感半导体设备(南通)有限公司 | Large-area substrate flattening, absorbing and positioning device |
| CN213888739U (en) * | 2020-10-27 | 2021-08-06 | 江苏富乐德半导体科技有限公司 | Laser cutting adsorbs tool with covering copper base plate warpage blank pressing |
| CN215200237U (en) * | 2021-04-06 | 2021-12-17 | 江苏富乐德半导体科技有限公司 | Semiconductor substrate laser cutting fixing jig |
| CN215644409U (en) * | 2021-06-22 | 2022-01-25 | 南瑞联研半导体有限责任公司 | Welding tool for large warping degree long substrate of IGBT device |
| TWI794116B (en) * | 2021-10-28 | 2023-02-21 | 盟立自動化股份有限公司 | Attaching device and attaching module |
| CN114501784A (en) * | 2022-03-10 | 2022-05-13 | 深圳洲旭电路科技有限公司 | Device for improving warping of circuit board |
| CN217822719U (en) * | 2022-05-31 | 2022-11-15 | 江苏芯德半导体科技有限公司 | Vacuum base plate for wafer |
| CN217892212U (en) * | 2022-07-04 | 2022-11-25 | 深圳思睿辰新材料有限公司 | High positioning accuracy pottery copper-clad plate printing jig |
| CN218473509U (en) * | 2022-09-15 | 2023-02-10 | 宁夏储芯科技有限公司 | Flattening mechanism for preventing substrate from warping and chip packaging machine |
Non-Patent Citations (1)
| Title |
|---|
| 杨维生: "多层印制板层压工艺及减少翘曲产生的方法", 电子工艺技术 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116921877A (en) * | 2023-09-14 | 2023-10-24 | 四川富乐华半导体科技有限公司 | Copper-clad ceramic carrier plate cutting and coding device |
| CN116921877B (en) * | 2023-09-14 | 2023-12-01 | 四川富乐华半导体科技有限公司 | Copper-clad ceramic carrier plate cutting and coding device |
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| CN115954314B (en) | 2023-05-16 |
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