CN115627443A

CN115627443A - Vapor deposition mask, vapor deposition module, vapor deposition device, display device, and method and device for manufacturing display device

Info

Publication number: CN115627443A
Application number: CN202011299713.4A
Authority: CN
Inventors: 蓝秋亮
Original assignee: Jiangbo Advanced Materials Technology Guangzhou Co ltd
Current assignee: Jiangbo Advanced Materials Technology Guangzhou Co ltd
Priority date: 2020-11-18
Filing date: 2020-11-18
Publication date: 2023-01-20

Abstract

The invention provides a manufacturing method of an evaporation mask, which comprises the following steps: providing a metal coiled material, wherein the thickness T of the metal coiled material satisfies the relation: t is more than or equal to 5um and less than or equal to 40um; respectively attaching dry film photoresistors to the upper surface and the lower surface of the metal coiled material in vacuum, and patterning the dry film photoresistors through exposure and development; etching the upper surface through the patterned dry film photoresist to form a first surface side, and attaching resin to the first surface side in vacuum to fill the first concave part; etching the lower surface through the patterned dry film photoresist to form a second surface side, defining a longitudinal section vertical to the upper surface and the lower surface, wherein the longitudinal section width of the first opening is D, the longitudinal section width of the through hole is F, and the relationship is satisfied: D-F is more than or equal to 1um and less than or equal to 4um. Therefore, the metal coil is prevented from being directly etched through by the first etching in the manufacturing process of the vapor deposition mask.

Description

Vapor deposition mask, vapor deposition module, vapor deposition device, display device, and method and device for manufacturing display device

[ technical field ] A method for producing a semiconductor device

The invention relates to the technical field of optical mask plates, in particular to a vapor deposition mask, an assembly, a device, a display device and a manufacturing method and device thereof.

[ background ] A method for producing a semiconductor device

In recent years, displays used in mobile terminals such as smartphones and tablet computers are required to be very fine (number of pixels: 400ppi or more). In the future, mobile terminals will be required to use Ultra High Definition (UHD) and it is expected that OLED panels of higher definition (number of pixels: 800 ppi) will be required. An evaporation mask is required to be used in the OLED panel manufacturing process, the evaporation mask also needs to be highly refined in order to correspond to the high refinement of the OLED panel, and the adoption of the evaporation mask with the smaller thickness is beneficial to improving the refinement.

The vapor deposition mask is generally formed by etching a metal coil in two opposite directions on the upper and lower surfaces thereof, and the size of the through-hole is determined by the minimum size formed in the two etches. Referring to fig. 1, in the conventional etching method, when the thickness of the metal coil is greater than 40um, the etching amount of the first etching is large, and the overhang size t of the first recess formed by the first etching is larger than the opening size s. Referring to fig. 2, it is only necessary to control the etching amount of the second etching to make the opening size at the X position greater than or equal to the opening size s of the first etching, so that the opening size s during the first etching can be ensured to be the through hole size u. Referring to fig. 3, when the thickness of the metal coil is 40um or less, the related art method easily etches through the metal coil, resulting in process failure. Meanwhile, in the conventional etching method, when the thickness of the metal coil is greater than 40um, the sectional height v from the upper surface Y of the metal coil to the X of the through hole in fig. 2 is controlled to be 6um, but when the thickness of the metal coil is less than or equal to 40um, the sectional height v needs to be controlled to be less than 4um, and the second etching in the conventional etching method is difficult to achieve the accuracy. Therefore, it is necessary to provide a method for manufacturing an evaporation mask which avoids the first etching to directly etch through the metal coil in the case where the thickness T of the metal coil is not more than 40um.

[ summary of the invention ]

The invention aims to provide a vapor deposition mask, a vapor deposition mask assembly, a vapor deposition mask device, an organic display device, a manufacturing method of the vapor deposition mask and a manufacturing device for realizing the manufacturing method of the vapor deposition mask, so as to solve the problem that a metal coil is easy to etch through for the first time when the thickness of the metal coil is not more than 40um in the manufacturing process of the vapor deposition mask.

The technical scheme of the invention is as follows: a method for manufacturing a vapor deposition mask used for vapor deposition of a vapor deposition material onto a vapor deposition substrate, the vapor deposition mask comprising:

a first surface side constituting a side of the vapor deposition mask facing the vapor deposition substrate;

a second surface side which constitutes a side of the vapor deposition mask opposite to the first surface side; and

a through hole penetrating the first surface side and the second surface side,

the method is characterized by comprising the following steps:

providing a metal coiled material comprising an upper surface and a lower surface opposite to the upper surface, wherein the thickness T of the metal coiled material satisfies the relation: t is more than or equal to 5um and less than or equal to 40um;

respectively attaching dry film photoresistors to the upper surface and the lower surface of the metal coiled material in vacuum, and patterning the dry film photoresistors through exposure and development;

etching the upper surface through the patterned dry film photoresist to form a first surface side, wherein the first surface side at least comprises a plurality of first concave parts, each first concave part comprises a first opening and a first etching surface, the first opening is flush with the upper surface, and the first etching surface is a surface formed by sinking from the first opening to the lower surface;

vacuum bonding a resin to the first surface side to fill the first recess;

etching the lower surface through the patterned dry film photoresist to form a second surface side, wherein the second surface side at least comprises a plurality of second concave parts, the second concave parts are sunken towards the upper surface, the second concave parts and the first concave parts penetrate through each other to form a through hole, and the first etching surface is connected with the first opening and the through hole; a longitudinal section perpendicular to the upper surface and the lower surface is defined, the longitudinal section width of the first opening is D, the longitudinal section width of the through hole is F, and the relationship is satisfied: D-F is more than or equal to 1um and less than or equal to 4um;

stripping the resin and the dry film photoresist;

cutting the metal coiled material to form a plurality of metal sheets;

and cutting the metal sheet to form a plurality of strip-shaped evaporation masks.

Preferably, the dry film photoresist is attached to the upper surface and the lower surface of the metal coil in a hot pressing manner.

Preferably, the metal coil is preheated before the dry film photoresist is attached to the upper surface and the lower surface of the metal coil by hot pressing.

Preferably, the dry film photoresist comprises a first dry film photoresist and a second dry film photoresist, the first dry film photoresist is attached to the upper surface of the metal coil in a hot pressing manner, and the second dry film photoresist is attached to the lower surface of the metal coil in a hot pressing manner.

More preferably, the resin is a thermoplastic acid-resistant resin.

A manufacturing apparatus for performing the vapor deposition mask manufacturing method described above, the manufacturing apparatus comprising:

the rolling machine is used for rolling and releasing the metal coiled material, and the thickness T of the metal coiled material satisfies the relational expression: t is more than or equal to 5um and less than or equal to 40um;

the first laminating equipment is used for laminating dry film photoresistors on the upper surface and the lower surface of the metal coiled material in a vacuum manner;

the exposure equipment is used for exposing the dry film photoresist;

the developing equipment is used for developing the dry film photoresist to realize patterning;

the first etching equipment is used for etching the upper surface through the patterned dry film photoresist to form a first surface side; the first surface side at least comprises a plurality of first concave parts, each first concave part comprises a first opening and a first etching surface, the first opening is flush with the upper surface, and the first etching surface is a surface formed by sinking from the first opening to the lower surface;

a second bonding device that vacuum bonds resin to the first surface to fill the first recess;

the second etching equipment is used for etching the lower surface through the patterned dry film photoresist to form a second surface side, the second surface side at least comprises a plurality of second concave parts, the second concave parts are concave towards the upper surface, the second concave parts and the first concave parts penetrate through to form a through hole, and the first etching surface is connected with the first opening and the through hole; defining a vertical section vertical to the upper surface and the lower surface, wherein the width of the vertical section of the first opening is D, the width of the vertical section of the through hole is F, and the relation is satisfied: D-F is more than or equal to 1um and less than or equal to 4um;

a stripping device for stripping the resin and the dry film photoresist;

the first cutting equipment is used for cutting the metal coiled material into a plurality of metal sheets;

and the second cutting equipment is used for cutting the metal sheet to form a plurality of strip-shaped evaporation masks.

Preferably, the exposure equipment is vertical, and the metal coil exposes through the exposure equipment from top to bottom.

More preferably, the exposure apparatus includes at least a first exposure mask and a second exposure mask, the first exposure mask being disposed apart from the second exposure mask.

Preferably, the first exposure mask and the second exposure mask are aligned before exposure.

More preferably, the first exposure mask and the second exposure mask are positionally aligned with an alignment accuracy of 2um or less.

More preferably, the ambient temperature t of the first exposure mask and the second exposure mask within the exposure apparatus is controlled to be: t is more than or equal to minus 2 ℃ and less than or equal to 2 ℃.

Preferably, the first attaching device at least comprises a hot pressing roller, and the dry film photoresist is attached to the metal coil through the hot pressing roller in a hot pressing mode.

Preferably, the first attaching device further comprises a preheating device, and the metal coil is preheated by the preheating device before the dry film photoresist is attached to the metal coil by hot pressing through the hot pressing roller.

An evaporation mask produced by the above-described evaporation mask production method.

An evaporation mask assembly comprising an evaporation mask as described above.

An evaporation mask device includes the above evaporation mask assembly.

An organic display device obtained by vapor deposition by the vapor deposition mask device as described above.

The invention has the beneficial effects that: by defining the longitudinal section width of the first opening of the vapor deposition mask as D and the longitudinal section width of the through hole as F, the relationship: D-F is larger than or equal to 1um and smaller than or equal to 4um, so that a through hole can be formed through twice etching under the condition that the thickness T of the metal coil is not larger than 40um in the manufacturing process of the vapor deposition mask, and the metal coil is prevented from being directly etched through by the first etching.

[ description of the drawings ]

FIG. 1 is a schematic view of an evaporation mask device according to the present invention;

FIG. 2 is a schematic view of an evaporation mask assembly according to the present invention;

FIG. 3 is a schematic view of a vapor deposition mask according to the present invention with a first surface facing upward;

FIG. 4 is a schematic view of a vapor deposition mask according to the present invention with the second surface facing upward;

FIG. 5 isbase:Sub>A schematic cross-sectional view taken at A-A in FIG. 3;

FIG. 6 is a schematic cross-sectional view taken at B-B of FIG. 3;

FIG. 7 is a flow chart of a method for fabricating an evaporation mask according to the present invention;

FIG. 8 is a schematic structural view of a first bonding apparatus according to the present invention;

FIG. 9 is a schematic view of the structure of an exposure apparatus of the present invention;

FIG. 10 is a schematic view of the structure of a developing apparatus of the present invention;

FIG. 11 is a schematic view showing a sequence of conveying the metal coil in the manufacturing apparatus according to the present invention;

FIG. 12 is a cross-sectional view of a vapor deposition mask structure corresponding to step S20;

fig. 13 is a cross-sectional view of a vapor deposition mask structure corresponding to step S40 of the present invention;

fig. 14 is a cross-sectional view of a vapor deposition mask structure corresponding to step S50 of the present invention;

fig. 15 is a cross-sectional view of a vapor deposition mask structure corresponding to step S60 of the present invention;

fig. 16 is a sectional view of a vapor deposition mask structure corresponding to step S70 of the present invention.

[ detailed description ] embodiments

The invention is further described below with reference to the drawings and the embodiments.

(vapor deposition mask device 4000)

The present embodiment provides an evaporation mask device 4000, and referring to fig. 1, the evaporation mask device 4000 includes: vapor deposition mask assembly 1000, vapor deposition assembly 2000, and vapor deposition substrate 3000, vapor deposition assembly 2000 heats vapor deposition material 2300 that is vaporized or sublimated and deposits it on vapor deposition substrate 3000 through vapor deposition mask assembly 1000.

Preferably, referring to fig. 2, the vapor deposition mask assembly 1000 includes a vapor deposition mask 100 and a frame 200, wherein a through region 210 is formed in a middle portion of the frame 200, the vapor deposition substrate 3000 is disposed in the through region 210, the vapor deposition mask 100 is fixed to the frame 200 and is in close contact with the vapor deposition substrate 3000, and a vapor deposition material 2300 is attached to the vapor deposition substrate 3000 in contact with the vapor deposition mask 100 through the vapor deposition mask 100.

The evaporation substrate 3000 is preferably made of a glass material, and in this embodiment, the evaporation substrate 3000 is specifically electrode glass provided with an electrode.

More preferably, the evaporation assembly 2000 includes a heater 2100, a crucible 2200, and an evaporation material 2300, the evaporation material 2300 is placed in the crucible 2200, and the heater 2100 is used for heating the crucible 2200. Specifically, the evaporation material 2300 is an organic light emitting material. The heater 2100 heats the crucible 2200 to vaporize or sublimate the vapor deposition material 2300, and the material is adhered to one surface of the vapor deposition substrate 3000 facing the vapor deposition module 2000 through the vapor deposition mask 100. In this embodiment, the deposition substrate 3000 is electrode glass, and the electrodes of the electrode glass adsorb the evaporated deposition material 2300, thereby improving the deposition effect.

(vapor deposition mask Assembly 1000)

Referring to fig. 2, the vapor deposition mask assembly 1000 includes a frame 200 and a plurality of vapor deposition masks 100, in this embodiment, the number of the vapor deposition masks 100 is 7, and 7 strip-shaped vapor deposition masks 100 are fixed to the frame 200 at intervals.

Preferably, the frame 200 has a rectangular structure with a through region 210 formed therein, the vapor deposition mask 100 is welded to the frame 200 through a mesh, the active region 110 of the vapor deposition mask 100 is disposed in the through region 210 of the frame 200, and the frame 200 supports the vapor deposition mask 100. In this embodiment, the frame 200 is made of a metal material that can be fixed by magnetic attraction.

Preferably, the vapor deposition mask 100 includes an effective region 110, a surrounding region 120 and a fixing region 130, wherein a plurality of effective regions 110 are disposed on one strip-shaped vapor deposition mask 100, in this embodiment, 5 effective regions 110 are arranged on the vapor deposition mask 100 at intervals, the surrounding region 120 surrounds the effective region 110, and mainly plays a role of supporting the effective regions 110, the fixing region 130 is connected with the surrounding region 120, and the fixing region 130 is fixed to the frame 200.

More preferably, referring to fig. 3 and 4, the effective region 110 is configured with a plurality of through holes 30, the vapor deposition material 2300 is closely attached to the vapor deposition substrate 3000 through the through holes 30, the through holes 30 may be designed into a plurality of arbitrary sizes and arbitrary shapes according to actual requirements and organically arranged and combined to obtain a desired pattern, and a process of attaching the vapor deposition material 2300 to the vapor deposition substrate 3000 may be understood as a process of transferring the actually desired pattern to the vapor deposition substrate 3000 through the effective region 110 of the vapor deposition mask 100.

(vapor deposition mask 100)

Referring to fig. 2, the vapor deposition mask 100 includes an effective region 110, a peripheral region 120, and a fixed region 130, wherein a plurality of effective regions 110 are disposed on a strip-shaped vapor deposition mask 100, the peripheral region 120 surrounds the effective regions 110, and the fixed region 130 is connected to the peripheral region 120. The vapor deposition mask 100 is formed by etching a metal coil 40, in this embodiment, the metal coil 40 is a nickel-iron alloy, also called invar (invar), which is 36% nickel characterized by a thermal expansion coefficient of about 1 ppm/DEG C.

More preferably, referring to fig. 3 and 4, the effective region 110 includes a first surface side 10, a second surface side 20, and a through hole 30, the first surface side 10 constituting a side of the vapor deposition mask 100 facing the vapor deposition substrate 3000, the second surface side 20 constituting a side of the vapor deposition mask 100 opposite to the first surface side 10, the second surface side 20 facing the vapor deposition module 2000 in the present embodiment, and the through hole 30 penetrating the first surface side 10 and the second surface side 20 in a thickness direction of the vapor deposition mask 100.

Specifically, the number of the through holes 30 is plural, the plural through holes 30 are arranged in the effective region 110 at a constant interval according to actual needs, and a desired pattern is obtained by depositing the vapor deposition material 2300 on the vapor deposition substrate 3000 according to the size and shape of the through holes 30 and the organic arrangement and combination among the through holes 30.

Specifically, referring to fig. 3, the first surface side 10 includes a first concave portion 11 and a first support portion 12, the first concave portion 11 surrounds the through hole 30, the first support portion 12 is a flat surface, the first support portion 12 surrounds the first concave portion 11, and the first support portion 12 is configured to be attached to the vapor deposition substrate 3000.

Specifically, referring to fig. 4, the second face side 20 includes a second concave portion 21 and a second support portion 22, the second concave portion 21 surrounds the through hole 30, and the number of the second concave portions 21 is plural. The second supporting portion 22 is a plane, the second supporting portion 22 is formed between the plurality of second recesses 21, and the projection of the second supporting portion 22 on the first surface side 10 is located in the first supporting portion 12, in this embodiment, 1 second supporting portion 22 is formed by surrounding 4 second recesses 21, and the second supporting portion 22 extends in a direction away from the first surface side 10, and the thickness of the first supporting portion 12 from the second supporting portion 22 to the first surface side 10 is equal to the thickness of the metal coil 40 for etching to form the vapor deposition mask 100 plate.

Specifically, the vapor deposition mask 100 is formed by etching a metal coil 40, and in the present invention, the thickness T of the metal coil 40 satisfies the following relation: t is more than or equal to 5um and less than or equal to 40um.

Specifically, referring to fig. 5 and 6, the first recess 11 includes a first opening 111 and a first etching surface 112, the first opening 111 is located on the upper surface 41, and the first etching surface 112 is an arc surface concavely formed from the first opening 111 to the lower surface 42. The first opening 111 is connected to the first support 12, the first etching surface 112 is bent and extended from the first opening 111 toward the through hole 30, and the first etching surface 112 connects the first opening 111 and the through hole 30.

Specifically, referring to fig. 5 and 6, the second recess 21 includes a second opening 211 and a second etching surface 212, the second opening 211 is connected to the second supporting portion 22, the second etching surface 212 is bent and extended from the second opening 211 toward the through hole 30, and the second etching surface 212 connects the second opening 211 and the through hole 30.

Preferably, a longitudinal section perpendicular to the first surface side 10 and the second surface side 20 is defined, a longitudinal section width of the first opening 111 is D, a longitudinal section width of the through hole 30 is F, and a relation: D-F is not less than 1um and not more than 4um, and when the relation is satisfied, the vapor deposition mask 100 can be etched twice to form the through hole 30 under the condition that the thickness T of the metal coil 40 is not more than 40um in the etching forming process, so that the metal coil 40 is prevented from being directly etched through by the first etching.

(method for manufacturing vapor deposition mask 100)

The present embodiment provides a method for manufacturing an evaporation mask 100, for manufacturing the evaporation mask 100, with reference to fig. 7 to 16, the method including:

step S10: a metal coil 40 is provided.

Specifically, the metal coil 40 includes an upper surface 41 and a lower surface 42, the upper surface 41 is opposite to the lower surface 42, the thickness T of the metal coil 40 is the thickness from the upper surface 41 to the lower surface 42, and the relationship: t is more than or equal to 5um and less than or equal to 40um;

more preferably, metal coil 40 is used to etch to form evaporation mask 100, in this embodiment, metal coil 40 is embodied as a nickel-iron alloy, which is a 36% nickel-iron alloy characterized by a coefficient of thermal expansion of about 1 ppm/deg.C. This method can suppress dimensional variation due to the deposition heat temperature.

Preferably, the upper surface 41 and the lower surface 42 require conventional acid cleaning and inspection prior to etching of the metal coil 40. Specifically, the upper surface 41 and the lower surface 42 of the metal coil 40 are sprayed with acid and alkali, and the metal coil 40 can be released by the winding machine 61 to slowly pass through the cleaning device, and then be wound after being cleaned so as to facilitate the subsequent process. Can remove foreign matters on the surface of the metal coil 40, remove metal impurities on the surface of the metal coil 40, and prevent defects of hole shape

Step S20: a dry film resist 50 is vacuum bonded to the upper surface 41 and the lower surface 42 of the metal coil 40, respectively.

Specifically, the dry film photoresist 50 includes a first dry film photoresist 51 and a second dry film photoresist 52, the first dry film photoresist 51 is attached to the upper surface 41 of the metal coil 40, and the second dry film photoresist 52 is attached to the lower surface 42 of the metal coil 40.

Specifically, the dry film photoresist 50 is attached to the upper surface 41 and the lower surface 42 of the metal coil 40 by hot pressing. Before the hot pressing laminating, metal coil 40 rolls up in rolling machine 61, metal coil 40 slowly passes through preheating device 623 through rolling machine 61 release, and preheating device 623 is right metal coil 40's upper surface 41 and lower surface 42 preheat, and metal coil 40 after preheating slowly laminates with dry film photoresistance 50 mutually through hot pressing gyro wheel 625. Before hot-pressing laminating, the dry film photoresistor 50 is rolled up in another rolling machine 61, the dry film photoresistor 50 of this embodiment is still covered at least and is used for bearing and protecting the substrate layer 53 of dry film photoresistor 50, the dry film photoresistor 50 slowly releases and peels off the substrate layer 53 from the rolling machine 61, the dry film photoresistor 50 of peeling off the substrate layer 53 is laminated with the metal coiled material 40 through hot-pressing roller 625, the metal coiled material 40 that is laminated with the dry film photoresistor 50 is rolled up in the rolling machine 61 so as to be convenient for transfer to the next process.

Preferably, the process of thermally pressing the dry film photoresist 50 to the metal coil 40 is performed in a vacuum environment to improve the adhesion between the dry film photoresist 50 and the upper surface 41 and the lower surface 42 of the metal coil 40. So as to prevent the dry film resist 50 from being caught up with the metal coil 40 and generating bubbles, and to improve the adhesion of the dry film resist 50 and to prevent the hole shape defect.

Step S30: the dry film photoresist 50 is patterned by exposure and development.

Specifically, the dry film photoresist 50 is used for exposure and development to form a patterned dry film photoresist 50, and the patterned dry film photoresist 50 is used as a mask to transfer a designed pattern onto the metal coil 40 for etching to form the size and shape of the first surface side 10, the second surface side 20 and the through hole 30.

Specifically, exposure development is performed in the exposure apparatus 63 and the development apparatus 64, respectively.

Specifically, the exposure apparatus 63 at least includes several winding machines 61, several conveying rollers 632, and an exposure machine 633. In this embodiment, the exposure machine 633 is a vertical exposure machine 633, and the metal coil 40 attached with the dry film photoresist 50 is wound in the winding machine 61. The metal coil 40 is released from the winder 61 and is driven by a plurality of conveying rollers 632 to pass through the exposure machine 633 from the top down.

Specifically, the exposure machine 633 at least includes an exposure lamp 6331, an exposure machine frame 6332, a vacuum seal 6333, a first exposure mask 6334 and a second exposure mask 6335, the exposure machine frames 6332 are provided in pairs, the first exposure mask 6334 and the second exposure mask 6335 are respectively provided in the exposure machine frames 6332, and the first exposure mask 6334 and the second exposure mask 6335 are respectively located on both sides of the metal coil 40. Specifically, the first exposure mask 6334 is located on one side of the metal coil 40 attached with the first dry film photoresist 51, the second mask is located on one side of the metal coil 40 attached with the second dry film photoresist 52, and the first exposure mask 6334 and the second exposure mask 6335 are opposite and spaced.

Before exposure, the first exposure mask 6334 and the second exposure mask 6335 are aligned. The first exposure mask 6334 and the second exposure mask 6335 are positionally aligned with an alignment accuracy of 2um or less.

Preferably, a metal coil 40 attached to the dry film photoresist 50 is interposed between the first exposure mask 6334 and the second exposure mask 6335, and is exposed after vacuum attachment.

At the time of exposure, a vacuum environment is formed between the first exposure mask 6334 and the second exposure mask 6335 by the vacuum seal 6333, and the metal coil material 40 is exposed to the vacuum environment. In this case, in the vapor deposition mask 100, the first exposure mask 6334 faces the first surface side 10 of the vapor deposition mask 100, the second exposure mask 6335 faces the second surface side 20 of the vapor deposition mask 100, and the ambient temperature t of the first exposure mask 6334 and the second exposure mask 6335 is controlled to be: t is more than or equal to minus 2 ℃ and less than or equal to 2 ℃.

Specifically, in this embodiment, the exposure mask is a glass substrate patterned by forming chromium, the exposure mask is one of soda lime glass or quartz glass, in this embodiment, the exposure mask is soda lime glass, and chromium is specifically a membrane disposed on the glass substrate and an oxide membrane disposed on the membrane, and the following specific parameters are adopted in this embodiment:

after exposure, the metal coil 40 is wound in a winder 61. Thus, the tension applied to the metal plate can be minimized, the temperature variation in the pattern can be minimized, the pattern size variation in the glass pattern can be minimized, and the position deviation defect of the hole can be prevented.

Specifically, the developing device 64 employs a known developing device 64, and the exposed metal coil 40 is patterned in the developing device 64 to transfer the designed pattern to the dry film resist 50. Specifically, the patterned first dry film resist 51 is used to etch the upper surface 41 of the metal web 40 to form the first surface side 10 of the evaporation mask 100, and the patterned second dry film resist 52 is used to etch the lower surface 42 of the metal web 40 to form the second surface side 20 and the through holes 30 of the evaporation mask 100.

Step S40: etching the upper surface 41 by the patterned dry film resist 50 to form a first face side 10;

specifically, the dry film photoresist 50 includes a first dry film photoresist 51 and a second dry film photoresist 52, and in this step, the upper surface 41 is etched by the patterned first dry film photoresist 51 to form the first surface side 10. Specifically, the first dry film resist 51 is patterned to serve as an etching mask, and a designed pattern is transferred to the upper surface 41 of the metal coil 40 to form the designed first surface side 10.

Specifically, the first surface side 10 includes at least a plurality of first recesses 11, the first recesses 11 include first openings 111 and first etching surfaces 112, the first openings 111 are located on the upper surface 41, the first openings 111 are flush with the upper surface 41, and the first etching surfaces 112 are curved surfaces formed by recessing from the first openings 111 toward the lower surface 42. It can be understood that the first opening 111 is an opening profile of the first recess 11 formed on the upper surface 41, and the first etching surface 112 is a curved surface formed during the process of recessing the first recess 11 toward the lower surface 42.

Specifically, before step S40, an etching condition teaching process is performed to obtain an etching condition at the time of actual etching.

Specifically, in order to obtain etching conditions during actual etching, a guide plate is firstly passed through an etching device, in this embodiment, the guide plate is made of a PET material (polyethylene terephthalate) with a thickness of 0.3mm, an etching surface for first etching is adhered to the lower surface of the guide plate, in this embodiment, the upper surface 41 of the metal coil 40 is an etching surface for first etching, and various etching conditions are obtained through an etching test in combination with computer simulation.

Specifically, after the etching condition extraction is finished, the metal coil 40 actually used for etching is set in the etching apparatus, and the guide plate is connected to the metal coil 40 actually used for etching. In this embodiment, the upper surface 41 is faced downward, the upper surface 41 is etched, and the etching solution etches the upper surface 41 through the patterned first dry film resist 51 to form the first surface side 10. In this embodiment, the etching degree is controlled by limiting the structure size of the first opening 111, and the specific process parameters may be specifically set according to the actual situation, and the finally formed structure size of the first opening 111 is used as the standard debugging process parameters. And after etching, fully cleaning with pure water, drying and rolling. This enables accurate control of the hole size in mass production.

Step S50: vacuum bonding a resin 70 to the first surface side 10 to fill the first recess 11;

specifically, the first groove is filled with a resin 70 in a vacuum atmosphere, and in the present embodiment, the resin 70 covers the first surface side 10 in a bonded manner and fills the first recess 11 of the first surface side 10. The vacuum environment is used to improve the filling tightness between the resin 70 and the first groove, so as to prevent the etching liquid from entering the first recess 11 through the through hole 30. In this embodiment, the resin 70 is a thermoplastic acid-resistant resin 70. The resin 70 is a film-like structure obtained by coating a resin on a base material PET. This prevents air bubbles from entering between the resin and the first recess 11, and thus prevents defects in the hole shape.

Step S60: etching the lower surface 42 through the patterned dry film photoresist 50 to form a second face side 20;

specifically, in this step, the lower surface 42 is etched through the patterned second dry film resist 52 to form the second side 20. Specifically, the second dry film resist 52 is patterned as a mask for etching, and the designed pattern is transferred to the lower surface 42 of the metal coil 40, thereby forming the designed second surface side 20.

Specifically, the second surface side 20 at least includes a plurality of second recesses 21, the second recesses 21 are recessed toward the upper surface 41, the second recesses 21 penetrate the first recesses 11 to form through holes 30, and the first etching surface 112 connects the first openings 111 and the through holes 30; it can be understood that the first recesses 11 correspond to the second recesses 21 one by one, and the through holes 30 are formed therethrough.

Specifically, a longitudinal section perpendicular to the upper surface 41 and the lower surface 42 is defined, and a longitudinal section width of the first opening 111 is D, a longitudinal section width of the through hole 30 is F, and the following relation is satisfied: D-F is more than or equal to 1um and less than or equal to 4um; when the above relation is satisfied, the vapor deposition mask 100 can be etched twice to form the through hole 30 in the etching process under the condition that the thickness T of the metal coil 40 is not greater than 40um, thereby preventing the first etching from directly etching through the metal coil 40.

Specifically, before step S40 is performed, an etching condition adjustment step is first performed to obtain an etching condition at the time of actual etching. In order to obtain etching conditions in the actual etching method, the guide plate was first passed through an etching apparatus, and in this example, the guide plate was made of a pet material (Polyethylene terephthalate) of 0.3mm, and an etched surface for the first etching was attached to the lower portion of the guide plate. In this embodiment, the lower surface 42 of the metal coil material 40 is an etched surface of the second etching, and the corresponding etching conditions are obtained by combining an etching test and a computer simulation.

Specifically, after the etching condition extraction is finished, the metal coil material 40 actually used for etching is set in the etching apparatus, and the guide plate is connected to the metal coil material 40 actually used for etching. In this embodiment, the upper surface 41 is faced downward, the upper surface 41 is etched, and the etching solution etches the upper surface 41 through the patterned first dry film resist 51 to form the first surface side 10. In this embodiment, the etching degree is controlled by limiting the structure size of the first opening 111, and the specific process parameters may be specifically set according to the actual situation, and the finally formed structure size of the first opening 111 is used as the standard debugging process parameters. And after etching, fully cleaning with pure water, drying and rolling.

Step S70: stripping the resin 70 and the dry film photoresist 50;

the metal coil 40 is released into a peeling apparatus, and the resin 70, the first dry film resist 51 and the second dry film resist 52 are peeled off and sufficiently washed with pure water. In this embodiment, the peeling treatment is carried out by one or a combination of both of an inorganic base and an organic base. Thus, resin stripping and dry film photoresist drying can be realized in the same device.

Step S80: after the stripping is completed, the metal coil 40 is cut to form a plurality of metal sheets.

Specifically, the metal coil 40 is cut in a direction perpendicular to the winding direction of the metal coil 40 to form a plurality of sheet-like metal sheets.

Step S90: the metal sheet is cut out to form a plurality of strip-shaped evaporation masks 100.

Specifically, the metal sheet is cut into a strip-shaped vapor deposition mask 100 according to the designed vapor deposition mask 100.

Preferably, after the strip-shaped vapor deposition mask 100 is obtained, a corresponding inspection process is performed as needed.

Specifically, the automatic appearance inspection step of automatically inspecting all the through holes 30 in the vapor deposition mask 100 cut out by separation by comparison with the through holes 30 on the outer periphery of the through hole to be inspected; comparing the average value of the outer peripheral through holes 30 with the target through holes 30 by image processing; the comparison check is performed by comparing the area of the through-hole, and the shortest dimension and the longest dimension

Specifically, the inspection step is checked, and the defective through hole 30 is retrieved to perform the defect determination.

Specifically, in the appearance sorting step, acceptable vapor deposition masks 100 and defective vapor deposition masks 100 are sorted out according to actual requirements.

Specifically, in the dimension inspection step, the qualified vapor deposition mask 100 is placed, and the dimension parameter of the vapor deposition mask 100 is measured by the vapor deposition mask measuring device measuring means.

Specifically, in the size sorting step, a good vapor deposition mask 100 and a bad vapor deposition mask 100 are sorted out according to actual requirements.

Specifically, in the visual appearance step, the acceptable vapor deposition mask 100 is placed, and the vapor deposition mask visual inspection stage is used to inspect the vapor deposition mask 100 for foreign matter deformation and the like.

Specifically, in the visual appearance sorting step, the acceptable vapor deposition masks 100 and the defective vapor deposition masks 100 are sorted out according to actual requirements.

Specifically, in the packaging step, the vapor deposition masks 100 that have passed through the above-described steps are placed in a predetermined number in a vacuum package.

In this embodiment, the key parameters involved in the vapor deposition mask 100 plate and the process are as follows:

where T is the thickness of the metal coil 40, D is the longitudinal sectional width of the first opening 111, and F is the longitudinal sectional width of the through-hole 30.

Parameter(s)	Size of	Unit
			T	5	um
D	7	um
			F	8	um

As another example, the following parameters may also be employed:

parameter(s)	Size of	Unit of
			T	25	um
D
		40	um
F
		42	um

As yet another example, the following parameters may also be employed:

parameter(s)	Size of	Unit of
			T	40	um
D	55	um
			F	59	um

(vapor deposition mask manufacturing apparatus 60)

In the present embodiment, there is provided a vapor deposition mask manufacturing apparatus 60 for realizing the above-described method for manufacturing a vapor deposition mask 100, with reference to fig. 8 to 16, the manufacturing apparatus 60 including: the metal coil 40 is conveyed by the winding machine 61 to sequentially pass through the first attaching device 62, the exposure device 63, the developing device 63, the first cutting device 691 and the second cutting device 692, and the metal coil 40 is conveyed by the winding machine 61 to sequentially pass through the first attaching device 62, the exposure device 63, the developing device 64, the first etching device 65, the second attaching device 66, the second etching device 67, the peeling device 68 and the first cutting device 691.

More preferably, the winder 61 is used to wind or release the metal coil 40;

specifically, the number of the winding machines 61 is several, and the winding machines 61 are applied to a first attaching device 62, an exposing device 63, a developing device 64, a first etching device 65, a second attaching device 66, a second etching device 67, a peeling device 68, a first cutting device 691 and a second cutting device 692, the winding machines 61 are used in pairs, one winding machine 61 releases the metal coil 40 wound thereon, the other winding machine 61 winds the metal coil 40 thereon, so that the metal coil 40 slowly passes through the corresponding processing device, and the winding machines 61 can be flexibly used in cooperation with a conveying roller 632, a tensioning wheel and the like according to actual requirements.

Preferably, the first attaching device 62 is used for vacuum attaching the dry film photoresist 50 on the upper surface 41 and the lower surface 42 of the metal coil 40.

Specifically, the first attaching device 62 includes a vacuum cavity 621, a first winding machine 622, a preheating device 623, a second winding machine 624, and a hot pressing roller 625. The first winding machine 622, the preheating device 623, the second winding machine 624 and the hot pressing roller 625 are arranged in the vacuum cavity 621, and the first winding machine 622 is arranged in pairs and used for conveying the metal coil 40 to pass through the preheating device 623 and the hot pressing roller 625 slowly in sequence. The second winder 624 is used in cooperation with the first winder 622 and the hot press roller 625, and is used for conveying the dry film photoresist 50 to be attached to the upper surface 41 and the lower surface 42 of the metal coil 40 at the position of the hot press roller 625. In this embodiment, the dry film photoresist 50 is provided with a substrate layer 53, the substrate layer 53 is peeled off by the second winder 624 before the dry film photoresist 50 is attached to the metal coil 40, and the peeling process may adopt a known peeling method.

Specifically, before the hot pressing laminating, metal coil 40 rolls up in first rolling machine 622, metal coil 40 slowly passes through preheating device 623 through first rolling machine 622 release, and preheating device 623 is right metal coil 40's upper surface 41 and lower surface 42 preheat, and metal coil 40 after preheating slowly laminates with dry film photoresistance 50 through hot pressing gyro wheel 625. Before hot-pressing and attaching, the dry film photoresist 50 is wound in a second winding machine 624, the dry film photoresist 50 is slowly released from the second winding machine 624 and peels off the substrate layer 53, the dry film photoresist 50 which peels off the substrate layer 53 is attached to the metal coil 40 through a hot-pressing roller 625, and the metal coil 40 to which the dry film photoresist 50 is attached is wound in a first winding machine 622 so as to be transferred to the next process.

Specifically, the vacuum cavity 621 forms a vacuum environment, and the dry film photoresist 50 is thermally pressed and attached to the metal coil 40 in the vacuum environment, so that the adhesion tightness between the dry film photoresist 50 and the upper surface 41 and the lower surface 42 of the metal coil 40 is improved.

More preferably, the exposure apparatus 63 is used to expose the dry film resist 50. The exposure apparatus 63 includes a third winder 631, a conveying roller 632, and an exposure machine 633. The third winder 631 is provided in pairs for conveying the metal coil 40 slowly through the exposure machine 633, and the conveying roller 632 cooperates with the third winder 631 to convey the metal coil 40. In this embodiment, the exposure machine 633 is a vertical exposure machine 633, and when the metal coil 40 passes through the exposure machine 633, the patterns and materials on the metal coil 40 release tension before vacuum adhesion.

Specifically, the exposure machine 633 includes an exposure lamp 6331, an exposure machine frame 6332, a vacuum seal 6333, a first exposure mask 6334, and a second exposure mask 6335, the exposure machine frames 6332 are provided in pairs, the first exposure mask 6334 and the second exposure mask 6335 are respectively provided in the exposure machine frames 6332, and the first exposure mask 6334 and the second exposure mask 6335 are respectively located on both sides of the metal coil 40. Specifically, the first exposure mask 6334 is located on one side of the metal coil 40 attached with the first dry film photoresist 51, the second mask is located on one side of the metal coil 40 attached with the second dry film photoresist 52, and the first exposure mask 6334 and the second exposure mask 6335 are opposite and spaced.

Specifically, the developing device 64 is used for developing the dry film photoresist 50 to realize patterning, in this embodiment, the developing device 64 includes a developing device 641 and a fourth winder 642, and the fourth winder 642 is arranged in pairs and is used for conveying the metal coil 40 to slowly pass through the developing device 641. The developing device 641 employs a known device for realizing development.

Specifically, the first etching device 65 etches the upper surface 41 through the patterned dry film resist 50 to form the first surface side 10.

Specifically, the first surface side 10 includes at least a plurality of first recesses 11, the first recesses 11 include first openings 111 and first etching surfaces 112, the first openings 111 are flush with the upper surface 41, and the first etching surfaces 112 are formed by recessing from the first openings 111 toward the lower surface 42. In this embodiment, the first etching surface 112 is a curved surface.

Specifically, the second bonding apparatus 66 is used for vacuum bonding a resin 70 on the first surface side 10 to fill the first recess 11.

Specifically, the second etching device 67 etches the lower surface 42 through the patterned dry film photoresist 50 to form the second face side 20.

Specifically, the second surface side 20 at least includes a plurality of second recesses 21, the second recesses 21 are recessed toward the upper surface 41, the second recesses 21 and the first recesses 11 penetrate to form through holes 30, and the first etching surface 112 connects the first openings 111 and the through holes 30; a vertical cross section perpendicular to the upper surface 41 and the lower surface 42 is defined, a vertical cross section width of the first opening 111 is D, a vertical cross section width of the through hole 30 is F, and the following relations are satisfied: D-F is more than or equal to 1um and less than or equal to 4um;

specifically, the stripping device 68 is used for stripping the resin 70 and the dry film photoresist 50, in this embodiment, the stripping device 68 implements stripping treatment by one or a combination of inorganic base or organic base;

in particular, the first cutting device 691 is intended for cutting the metal coil 40 into a number of metal sheets.

Specifically, the second cutting apparatus 692 is used to cut the metal sheet to form several strip-shaped evaporation masks 100.

(organic display device)

The present embodiment provides an organic display device having a structure,

the organic display device is manufactured by performing vapor deposition using the vapor deposition mask device 4000.

Thereby, the longitudinal sectional width of the first opening of the vapor deposition mask is defined as D, and the longitudinal sectional width of the through hole is defined as F, so that the relationship: D-F is larger than or equal to 1um and smaller than or equal to 4um, so that a through hole can be formed through twice etching under the condition that the thickness T of the metal coil is not larger than 40um in the manufacturing process of the vapor deposition mask, and the metal coil is prevented from being directly etched through by the first etching.

Finally, it should be noted that: the above examples are only intended to illustrate the technical solution of the present invention, but not to limit it; although the present invention has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art will understand that: the technical solutions described in the foregoing embodiments may still be modified, or some technical features may be equivalently replaced; such modifications and substitutions do not necessarily depart from the spirit and scope of the corresponding technical solutions.

Claims

1. A method for manufacturing an evaporation mask used for evaporation of an evaporation material onto an evaporation substrate, the evaporation mask comprising:

a through hole penetrating the first surface side and the second surface side,

the method is characterized by comprising the following steps:

vacuum bonding a resin to the first surface side to fill the first recess;

etching the lower surface by the patterned dry film photoresist to form a second surface side, wherein the second surface side at least comprises a plurality of second concave parts, the second concave parts are concave towards the upper surface, the second concave parts and the first concave parts penetrate through to form a through hole, and the first etching surface is connected with the first opening and the through hole; a longitudinal section perpendicular to the upper surface and the lower surface is defined, the longitudinal section width of the first opening is D, the longitudinal section width of the through hole is F, and the relationship is satisfied: D-F is more than or equal to 1um and less than or equal to 4um;

stripping the resin and the dry film photoresist;

cutting the metal coiled material to form a plurality of metal sheets;

2. The vapor deposition mask manufacturing method according to claim 1, characterized in that: and the dry film photoresist is hot-pressed and attached to the upper surface and the lower surface of the metal coil.

3. The vapor deposition mask manufacturing method according to claim 2, wherein: the dry film photoresistor is attached to the upper surface and the lower surface of the metal coiled material through hot pressing, and the metal coiled material is preheated firstly.

4. The vapor deposition mask manufacturing method according to claim 1, wherein: the dry film photoresistor comprises a first dry film photoresistor and a second dry film photoresistor, the first dry film photoresistor is attached to the upper surface of the metal coiled material in a hot-pressing mode, and the second dry film photoresistor is attached to the lower surface of the metal coiled material in a hot-pressing mode.

5. The vapor deposition mask manufacturing method according to claim 1, characterized in that: the resin is thermoplastic acid-resistant resin.

6. A manufacturing apparatus for performing the vapor deposition mask manufacturing method according to any one of claims 1 to 5, the manufacturing apparatus comprising:

the first attaching device is used for attaching the dry film photoresist to the upper surface and the lower surface of the metal coiled material in a vacuum manner;

the exposure equipment is used for exposing the dry film photoresist;

a developing device for developing the dry film photoresist to realize patterning;

the second etching equipment is used for etching the lower surface through the patterned dry film photoresist to form a second surface side, the second surface side at least comprises a plurality of second concave parts, the second concave parts are sunken towards the upper surface, the second concave parts and the first concave parts penetrate through each other to form a through hole, and the first etching surface is connected with the first opening and the through hole; a longitudinal section perpendicular to the upper surface and the lower surface is defined, the longitudinal section width of the first opening is D, the longitudinal section width of the through hole is F, and the relationship is satisfied: D-F is more than or equal to 1um and less than or equal to 4um;

a stripping device for stripping the resin and the dry film photoresist;

a first cutting device for cutting the metal coil into a number of metal sheets;

7. The manufacturing apparatus according to claim 6, wherein: the exposure equipment is vertical, and the metal coiled material is exposed through the exposure equipment from top to bottom.

8. The manufacturing apparatus according to claim 6, wherein: the exposure equipment at least comprises a first exposure mask and a second exposure mask, and the first exposure mask and the second exposure mask are arranged at intervals.

9. The manufacturing apparatus according to claim 8, wherein: the first exposure mask and the second exposure mask are first aligned before exposure.

10. The manufacturing apparatus according to claim 9, wherein: the first exposure mask and the second exposure mask are position-aligned with an alignment accuracy of 2um or less.

11. The manufacturing apparatus according to claim 8, wherein: the ambient temperature t of the first exposure mask and the second exposure mask in the exposure equipment is controlled to be: t is more than or equal to minus 2 ℃ and less than or equal to 2 ℃.

12. The manufacturing apparatus according to claim 6, wherein: the first laminating equipment includes the hot pressing gyro wheel at least, dry film photoresistor passes through hot pressing gyro wheel hot pressing laminating in metal coil.

13. The manufacturing apparatus according to claim 6, wherein: the first laminating equipment further comprises a preheating device, and before the dry film photoresist is laminated on the metal coiled material through the hot pressing roller in a hot pressing mode, the metal coiled material is preheated through the preheating device.

14. An evaporation mask, characterized in that: which is produced by the vapor deposition mask production method according to claim 1.

15. An evaporation mask assembly comprising the evaporation mask of claim 14.

16. An evaporation mask device comprising the evaporation mask assembly according to claim 15.

17. An organic display device obtained by vapor deposition using the vapor deposition mask device according to claim 16.