CN115560587A - Atmosphere bell-jar furnace capable of rapidly heating and control method thereof - Google Patents
Atmosphere bell-jar furnace capable of rapidly heating and control method thereof Download PDFInfo
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- CN115560587A CN115560587A CN202211285111.2A CN202211285111A CN115560587A CN 115560587 A CN115560587 A CN 115560587A CN 202211285111 A CN202211285111 A CN 202211285111A CN 115560587 A CN115560587 A CN 115560587A
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- 238000010438 heat treatment Methods 0.000 title claims abstract description 93
- 238000000034 method Methods 0.000 title claims abstract description 18
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims abstract description 4
- 229910010271 silicon carbide Inorganic materials 0.000 claims abstract description 4
- 230000005540 biological transmission Effects 0.000 claims description 102
- 230000001681 protective effect Effects 0.000 claims description 31
- 238000001816 cooling Methods 0.000 claims description 27
- 238000012546 transfer Methods 0.000 claims description 16
- 238000005245 sintering Methods 0.000 claims description 8
- 239000000463 material Substances 0.000 claims description 4
- 238000004321 preservation Methods 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims description 2
- 238000010792 warming Methods 0.000 claims 2
- 238000009413 insulation Methods 0.000 claims 1
- 238000004519 manufacturing process Methods 0.000 abstract description 2
- 238000004891 communication Methods 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 239000003990 capacitor Substances 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- HMDDXIMCDZRSNE-UHFFFAOYSA-N [C].[Si] Chemical compound [C].[Si] HMDDXIMCDZRSNE-UHFFFAOYSA-N 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
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Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B11/00—Bell-type furnaces
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
- F27D2007/063—Special atmospheres, e.g. high pressure atmospheres
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D7/00—Forming, maintaining, or circulating atmospheres in heating chambers
- F27D7/06—Forming or maintaining special atmospheres or vacuum within heating chambers
- F27D2007/066—Vacuum
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0028—Regulation
- F27D2019/0034—Regulation through control of a heating quantity such as fuel, oxidant or intensity of current
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D19/00—Arrangements of controlling devices
- F27D2019/0028—Regulation
- F27D2019/0056—Regulation involving cooling
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Furnace Details (AREA)
Abstract
The invention relates to a fast-heating atmosphere bell-type furnace and a control method thereof, and the fast-heating atmosphere bell-type furnace comprises a furnace body (21), wherein a cavity inside the furnace body (21) is provided with an annular heat-insulating layer (22), a hearth (27) is arranged inside the heat-insulating layer (22), an upper heating body (23), a lower heating body (24) and a central heating body (25) are arranged in the hearth (27), the upper heating body (23) and the lower heating body (24) are arranged on the inner wall of the hearth (27) to form a heating ring, the central heating body (25) is positioned at the central part of the hearth (27), and a heating object is positioned between the heating ring and the central heating body (25). According to the invention, the silicon carbide rod is used as the heating body, and the upper layer and the lower layer are arranged and the center is arranged, so that the heating rate of the product is accelerated to reach 20 ℃/min within the product bearing range, and the aim of improving the production efficiency is finally achieved.
Description
Technical Field
The invention relates to an atmosphere bell-jar furnace, in particular to an atmosphere bell-jar furnace capable of rapidly heating and a control method thereof.
Background
The atmosphere bell jar furnace is a special sintering device for producing a chip capacitor (MLCC) and has the characteristics of uniform sintering temperature field and accurate metering control of hearth atmosphere.
In the prior art, the heating rate of the furnace chamber of the atmosphere bell jar furnace is restricted, and the non-uniform temperature in the furnace chamber influences the yield of the chip capacitor.
Disclosure of Invention
The invention designs an atmosphere bell jar furnace capable of rapidly heating and a control method thereof, and solves the technical problems that in the prior art, the heating rate of a furnace chamber of the atmosphere bell jar furnace is slow, and the non-uniform temperature in the furnace chamber influences the yield of a chip capacitor.
In order to solve the technical problems, the invention adopts the following scheme:
the utility model provides a rapid heating up's atmosphere bell jar furnace, includes the furnace body, is equipped with annular heat preservation at the inside cavity of furnace body, and the heat preservation is inside to be furnace, is equipped with heating member, lower heating member and central heating member in furnace, goes up the heating member and installs on the furnace inner wall with lower heating member and form the heating ring, and central heating member is located furnace central point, and the heating target is located between heating ring and the central heating member.
Preferably, the upper heating body, the lower heating body and the central heating body are silicon carbon rods.
Preferably, the upper heating body, the lower heating body and the central heating body adopt a three-phase Y-shaped connection method.
Preferably, the warm atmosphere bell-jar furnace is installed on a furnace frame, and a material lifting frame, an electrical control cabinet, an atmosphere control cabinet, a humidifier and a vacuum pump are further arranged around the furnace frame.
Preferably, the furnace also comprises a heat transfer mechanism which comprises a first gas transmission pipeline and a second gas transmission pipeline, wherein one end of the first gas transmission pipeline is positioned at the top of the furnace chamber to collect high-temperature protective gas, the other end of the first gas transmission pipeline is communicated with one end of the second gas transmission pipeline through a gas pump, the second gas transmission pipeline and the gas pump are positioned outside the furnace chamber, the annular heat-insulating layer is provided with a cavity, the other end of the second gas transmission pipeline extends into the cavity, the second gas transmission pipeline is connected with a plurality of communicating pipes in parallel, each communicating pipe is connected with one annular gas outlet pipe, and each annular gas outlet pipe is positioned at different vertical heights of the furnace chamber; during the high temperature protective gas on furnace top got into first gas transmission pipeline, sent into second gas transmission pipeline through the air pump, the annular outlet duct of rethread communicating pipe entering furnace lower extreme and discharge, shifts the high-temperature gas of furnace top to the furnace lower extreme for temperature in the furnace is even, ensures the sintering quality.
Preferably, the temperature compensation device comprises a plurality of thermocouples, each thermocouple is located at a different height, an annular gas outlet pipe is arranged above or below each thermocouple, and the control unit can start the corresponding annular gas outlet pipe to output high-temperature protective gas to perform heat compensation on a heating object at the height according to temperature values acquired by different thermocouples.
Preferably, each communicating pipe is provided with a valve, so that the annular air outlet pipes can work independently.
Preferably, the gas pipeline protection device further comprises a third gas pipeline, a fourth valve is arranged on the third gas pipeline, one end of the third gas pipeline is connected to the second gas pipeline, and the other end of the third gas pipeline is connected with a protection gas input device; the middle part of the third gas transmission pipeline is connected with the inlet end of the cooling device through a fifth gas transmission pipeline, a seventh valve is arranged on the fifth gas transmission pipeline, the output end of the cooling device is connected with the second gas transmission pipeline through a fourth gas transmission pipeline, and a sixth valve is arranged on the fourth gas transmission pipeline; and a fifth valve is arranged on the second gas transmission pipeline.
A fast temperature-rising atmosphere bell-type furnace control method comprises the following steps:
and 5, starting the cooling device, guiding high-temperature protective gas out of the cooling device for heat exchange, returning low-temperature protective gas to the hearth, and quickly cooling the heated body to reach the process temperature.
Preferably, in step 3, a valve on the first gas transmission pipeline is closed, a fourth valve on the third gas transmission pipeline is opened, and a valve on the lowermost end communicating pipe is opened, so that the shielding gas generated by the shielding gas input device sequentially passes through the third gas transmission pipeline, the second gas transmission pipeline, the lowermost end communicating pipe and the lowermost end annular gas outlet pipe to enter the hearth;
preferably, in step 5, a valve on the first gas transmission pipeline is opened, a fourth valve on the third gas transmission pipeline is closed, a seventh valve on the fifth gas transmission pipeline and a sixth valve on the fourth gas transmission pipeline are opened, a fifth valve on the second gas transmission pipeline is closed, and valves on the communicating pipe are opened; high-temperature gas in the hearth sequentially enters the cooling device through the first gas transmission pipeline, the gas pump and the fifth gas transmission pipeline to be cooled, and low-temperature protective gas after being cooled sequentially enters the hearth through the fourth gas transmission pipeline, the second gas transmission pipeline, the communicating pipes and the annular gas outlet pipes to rapidly cool a heating object.
The atmosphere bell jar furnace capable of rapidly heating and the control method thereof have the following beneficial effects:
(1) According to the invention, the silicon carbide rod is used as the heating body, and the upper layer and the lower layer are arranged and the center is arranged, so that the heating rate of the product is accelerated to reach 20 ℃/min within the product bearing range, and the aim of improving the production efficiency is finally achieved.
(2) According to the invention, the heat transfer mechanism is utilized to transfer the upper high-temperature protective gas in the hearth to the lower low-temperature area of the hearth, so that the heating is more balanced, and the yield of products is ensured.
(3) On the basis of using the heat transfer mechanism, the protective gas input device and the cooling device are compatible with the heat transfer mechanism, so that multiple functions are realized, the utilization rate of mechanical parts is brought into full play, and the cost is saved.
Drawings
FIG. 1: the invention relates to an installation schematic diagram of a rapid heating atmosphere bell-type furnace;
FIG. 2 is a schematic diagram: the invention relates to a top view of a fast heating atmosphere bell-type furnace;
FIG. 3: the invention relates to an external schematic view of a rapid-heating atmosphere bell-jar furnace;
FIG. 4: the cross-sectional view taken along line A-A in FIG. 3;
FIG. 5 is a schematic view of: the cross-sectional view taken along line B-B in FIG. 3;
FIG. 6: the structure of the heat transfer mechanism is shown schematically;
FIG. 7: FIG. 6 is a schematic diagram of an annular outlet structure;
FIG. 8: the invention relates to a schematic connection diagram of an atmosphere bell-jar furnace with rapid temperature rise and auxiliary components.
Description of reference numerals:
1-a furnace frame; 2-atmosphere bell-type furnace; 21-furnace body; 22-insulating layer; 23-upper heating body; 24-lower heating body; 25-central heating body; 26-a connecting terminal; 27-a hearth; 28-a cavity; 3, a material lifting frame; 4, an electrical control cabinet; 5-atmosphere control cabinet; 6, a humidifier; 7-a vacuum pump; 80-a first gas line; 81-air pump; 82-a second gas transmission pipeline; 821-a fifth valve; 83-a first annular outlet duct; 84 — a first valve; 841-first communicating pipe; 85-second annular outlet pipe; 86 — a second valve; 861-a second communicating tube; 87-a third annular outlet duct; 88-a third valve; 881 — a third communication pipe; 89-a third gas transmission pipeline; 891-a fourth valve; 91 — first thermocouple; 92-a second thermocouple; 93-third thermocouple; 94-protective gas input device; 95-a cooling device; 96-a fourth gas transmission pipeline; 961-sixth valve; 97-fifth gas line; 971-seventh valve.
Detailed Description
The invention is further described below with reference to fig. 1 to 8:
as shown in figures 1 and 2, the warm atmosphere bell-jar furnace 2 is arranged on a furnace frame 1, and a material lifting frame 3, an electrical control cabinet 4, an atmosphere control cabinet 5, a humidifier 6 and a vacuum pump 8 are arranged around the furnace frame 1.
As shown in fig. 3 and 4, the atmosphere bell-type furnace capable of rapidly increasing the temperature comprises a furnace body 21, an annular heat-insulating layer 22 is arranged in a cavity inside the furnace body 21, a hearth 27 is arranged inside the heat-insulating layer 22, an upper heating body 23, a lower heating body 24 and a central heating body 25 are arranged in the hearth 27, the upper heating body 23 and the lower heating body 24 are arranged on the inner wall of the hearth 27 to form a heating ring, the central heating body 25 is positioned at the central part of the hearth 27, and a heating object is positioned between the heating ring and the central heating body 25.
The upper heater 23, the lower heater 24 and the central heater 25 are silicon carbide rods. The upper heating body 23, the lower heating body 24 and the central heating body 25 adopt a three-phase Y-shaped connection method.
As shown in fig. 6 and 7, the heat transfer mechanism includes a first gas transmission pipeline 80 and a second gas transmission pipeline 82, one end of the first gas transmission pipeline 80 is located at the top of the furnace 27 to collect high-temperature protective gas, the other end of the first gas transmission pipeline 80 is communicated with one end of the second gas transmission pipeline 82 through an air pump 81, the second gas transmission pipeline 82 and the air pump 81 are located outside the furnace 27, the annular insulating layer 22 is provided with a cavity 28, the other end of the second gas transmission pipeline 82 extends into the cavity 28, the second gas transmission pipeline 82 is connected in parallel with a plurality of communicating pipes, each communicating pipe is connected with one annular gas outlet pipe, and each annular gas outlet pipe is located at a different vertical height of the furnace 27; high-temperature protective gas at the top end of the hearth 27 enters the first gas transmission pipeline 80, is sent into the second gas transmission pipeline 82 through the gas pump 81, enters the annular gas outlet pipe at the lower end of the hearth 27 through the communicating pipe, is discharged, and transfers the high-temperature gas at the uppermost end of the hearth 27 to the lower end of the hearth 27, so that the temperature in the hearth 27 is uniform, and the sintering quality is ensured.
The high-temperature protection device comprises a plurality of thermocouples, wherein each thermocouple is located at different heights, an annular air outlet pipe is arranged above or below each thermocouple, and a control unit can output high-temperature protection gas to perform heat compensation on a heating object at the height according to temperature values acquired by different thermocouples by starting the corresponding annular air outlet pipe.
Each communicating pipe is provided with a valve, so that the annular air outlet pipes can work independently.
As shown in fig. 6 and 7, the annular outlet pipes include a first annular outlet pipe 83, a second annular outlet pipe 85, and a third annular outlet pipe 87, and the first annular outlet pipe 83, the second annular outlet pipe 85, and the third annular outlet pipe 87 may be fixed to the inner wall of the furnace 27.
The first annular outlet pipe 83 is highest, the second annular outlet pipe is 85 times, the third annular outlet pipe 87 is lowest, and a plurality of outlet holes are formed in the circumferential directions of the first annular outlet pipe 83, the second annular outlet pipe and the third annular outlet pipe. The first annular outlet pipe 83 is connected with the second gas transmission pipeline 82 through a first communicating pipe 841, and the first communicating pipe 841 is provided with a first valve 84. The second annular outlet pipe 85 is connected with the second gas transmission pipeline 82 through a second communication pipe 861, and a second valve 86 is arranged on the second communication pipe 861. The third annular air outlet pipe 87 is connected with the second air delivery pipeline 82 through a third communication pipe 881, and a third valve 88 is arranged on the third communication pipe 881. A first thermocouple 91 is located above the first annular outlet duct 83, a second thermocouple 92 is located above the second annular outlet duct 85, and a third thermocouple 93 is located above the third annular outlet duct 87.
As shown in fig. 8, a shielding gas input device 94 and a cooling device 95 can be combined with the heat transfer mechanism of the present invention.
Specifically, the method comprises the following steps: the gas pipeline device further comprises a third gas pipeline 89, a fourth valve 891 is arranged on the third gas pipeline 89, one end of the third gas pipeline 89 is connected to the second gas pipeline 82, and the other end of the third gas pipeline 89 is connected with a protective gas input device 94. The middle part of the third gas transmission pipeline 89 is connected with the inlet end of the cooling device 95 through a fifth gas transmission pipeline 97, the fifth gas transmission pipeline 97 is provided with a seventh valve 971, the output end of the cooling device 95 is connected with the second gas transmission pipeline 82 through a fourth gas transmission pipeline 96, and the fourth gas transmission pipeline 96 is provided with a sixth valve 961; a fifth valve 821 is disposed on the second gas transmission pipeline 82, and the fifth valve 821 is located between the connection of the fifth gas transmission pipeline 97 and the connection of the fourth gas transmission pipeline 96. A fourth valve 891 is located in third gas line 89 between the connection of fifth gas line 97 and shield gas inlet 94. A valve is also provided in the first gas line 80.
The invention relates to a method for controlling a fast-heating atmosphere bell-type furnace, which comprises the following steps:
And 2, starting the vacuum pump 8 to vacuumize the furnace body 21 to reach the target vacuum degree.
And 3, starting the protective gas input device 94, and conveying protective gas to the furnace body 21 to enable the furnace body 21 to reach a preset pressure P.
And 5, starting the cooling device 95, guiding high-temperature protective gas out of the cooling device for heat exchange, returning low-temperature protective gas to the hearth 27, and rapidly cooling the heated body to reach the process temperature.
The shield gas input device 94 of the present invention operates as follows: in step 3, the valve on the first gas transmission pipeline 80 is closed, the fourth valve 891 on the third gas transmission pipeline 89 is opened, and the valve 881 on the lowermost connecting pipe is opened, so that the shielding gas generated by the shielding gas input device 94 sequentially passes through the third gas transmission pipeline 89, the second gas transmission pipeline 82, the lowermost connecting pipe 881 and the lowermost annular gas outlet pipe 88 and enters the furnace 27.
The cooling device 95 of the present invention operates as follows: in step 5, opening a valve on the first gas transmission pipeline 80, closing a fourth valve 891 on the third gas transmission pipeline 89, opening a seventh valve 971 on the fifth gas transmission pipeline 97 and a sixth valve 961 on the fourth gas transmission pipeline 96, closing a fifth valve 821 on the second gas transmission pipeline 82, and opening valves on the communicating pipes; the high-temperature gas in the furnace 27 sequentially passes through the first gas transmission pipeline 80, the gas pump 81 and the fifth gas transmission pipeline 97 to enter the cooling device 95 for cooling, and the cooled low-temperature protective gas sequentially passes through the fourth gas transmission pipeline 96, the second gas transmission pipeline 82, the communicating pipes and the annular gas outlet pipes to enter the furnace 27 for rapidly cooling the heating object.
The invention is described above with reference to the accompanying drawings, it is obvious that the implementation of the invention is not limited in the above manner, and it is within the scope of the invention to adopt various modifications of the inventive method concept and solution, or to apply the inventive concept and solution directly to other applications without modification.
Claims (10)
1. The utility model provides a rapid heating up's atmosphere bell jar furnace, includes furnace body (21), is equipped with annular heat preservation (22) at furnace body (21) inside cavity, and heat preservation (22) are inside to be furnace (27), its characterized in that: an upper heating body (23), a lower heating body (24) and a central heating body (25) are arranged in the hearth (27), the upper heating body (23) and the lower heating body (24) are arranged on the inner wall of the hearth (27) to form a heating ring, the central heating body (25) is positioned in the central part of the hearth (27), and a heating object is positioned between the heating ring and the central heating body (25).
2. The rapidly increasing temperature atmosphere bell jar furnace of claim 1 wherein: the upper heating body (23), the lower heating body (24) and the central heating body (25) are silicon carbide rods.
3. The rapidly increasing temperature atmosphere bell jar furnace of claim 2 wherein: the upper heating body (23), the lower heating body (24) and the central heating body (25) adopt a three-phase Y-shaped connection method.
4. A rapidly increasing temperature atmosphere bell jar according to any one of claims 1-3 wherein: the warm atmosphere bell-type furnace (2) is arranged on the furnace frame (1), and a material lifting frame (3), an electrical control cabinet (4), an atmosphere control cabinet (5), a humidifier (6) and a vacuum pump (8) are arranged around the furnace frame (1).
5. The rapidly increasing temperature atmosphere bell jar furnace of claim 4 wherein: the heat transfer mechanism comprises a first gas transmission pipeline (80) and a second gas transmission pipeline (82), one end of the first gas transmission pipeline (80) is located at the top of the hearth (27) to collect high-temperature protective gas, the other end of the first gas transmission pipeline (80) is communicated with one end of the second gas transmission pipeline (82) through a gas pump (81), the second gas transmission pipeline (82) and the gas pump (81) are located outside the hearth (27), the annular heat insulation layer (22) is provided with a cavity (28), the other end of the second gas transmission pipeline (82) extends into the cavity (28), the second gas transmission pipeline (82) is connected with a plurality of communicating pipes in parallel, each communicating pipe is connected with one annular gas outlet pipe, and each annular gas outlet pipe is located at different vertical heights of the hearth (27); high-temperature protective gas on the top end of the hearth (27) enters the first gas transmission pipeline (80), is sent into the second gas transmission pipeline (82) through the gas pump (81), then enters the annular gas outlet pipe at the lower end of the hearth (27) through the communicating pipe and is discharged, and the high-temperature gas at the uppermost end of the hearth (27) is transferred to the lower end of the hearth (27), so that the temperature in the hearth (27) is uniform, and the sintering quality is ensured.
6. The rapidly increasing temperature atmosphere bell jar furnace of claim 5 wherein: the high-temperature protection device comprises a plurality of thermocouples, wherein each thermocouple is located at different heights, an annular air outlet pipe is arranged above or below each thermocouple, and a control unit can output high-temperature protection gas to perform heat compensation on a heating object at the height according to temperature values acquired by different thermocouples by starting the corresponding annular air outlet pipe.
7. The rapidly increasing temperature atmosphere bell jar furnace of claim 6 wherein: each communicating pipe is provided with a valve, so that the annular air outlet pipes can work independently.
8. The rapidly increasing temperature atmosphere bell jar furnace of claim 7 wherein: the device is characterized by further comprising a third gas transmission pipeline (89), wherein a fourth valve (891) is arranged on the third gas transmission pipeline (89), one end of the third gas transmission pipeline (89) is connected to the second gas transmission pipeline (82), and the other end of the third gas transmission pipeline (89) is connected with a protective gas input device (94); the middle part of the third gas transmission pipeline (89) is connected with the inlet end of the cooling device (95) through a fifth gas transmission pipeline (97), a seventh valve (971) is arranged on the fifth gas transmission pipeline (97), the output end of the cooling device (95) is connected with the second gas transmission pipeline (82) through a fourth gas transmission pipeline (96), and a sixth valve (961) is arranged on the fourth gas transmission pipeline (96); a fifth valve (821) is arranged on the second gas transmission pipeline (82).
9. A rapid warming atmosphere bell jar control method as set forth in claim 8, comprising the steps of:
step 1, feeding a heated object into a hearth (27) of an atmosphere bell-type furnace, and then sealing a furnace body (21);
step 2, starting a vacuum pump (8) to vacuumize the furnace body (21) to reach a target vacuum degree;
step 3, starting a protective gas input device (94), and conveying protective gas to the furnace body (21) to enable the furnace body (21) to reach a preset pressure P;
step 4, starting the heating body in the furnace, and heating the heated object in the hearth (27) until sintering is completed; the control unit automatically monitors the gas temperatures of the hearth (27) at different heights in real time, and when the temperature difference between the top of the hearth (27) and the height of a certain position below reaches a preset value, the heat transfer mechanism is started to transfer the high-temperature protective gas at the top of the hearth (27) to the low-temperature position for heat compensation, so that a heating object is ensured to be uniformly heated;
and 5, starting the cooling device (95), guiding high-temperature protective gas out of the cooling device for heat exchange, returning low-temperature protective gas to the hearth (27), and rapidly cooling the heated body to reach the process temperature.
10. The rapid warming atmosphere bell jar furnace control method according to claim 9, wherein:
in the step 3, a valve on the first gas transmission pipeline (80) is closed, a fourth valve (891) on the third gas transmission pipeline (89) is opened, and a valve (881) on the lowermost end communicating pipe is opened, so that the protective gas generated by the protective gas input device (94) sequentially passes through the third gas transmission pipeline (89), the second gas transmission pipeline (82), the lowermost end communicating pipe (881) and the lowermost end annular gas outlet pipe (88) to enter the hearth (27);
or in the step 5, opening a valve on the first gas transmission pipeline (80), closing a fourth valve (891) on the third gas transmission pipeline (89), opening a seventh valve (971) on the fifth gas transmission pipeline (97) and a sixth valve (961) on the fourth gas transmission pipeline (96), closing a fifth valve (821) on the second gas transmission pipeline (82), and opening valves on the communicating pipe; high-temperature gas in the hearth (27) sequentially passes through the first gas transmission pipeline (80), the gas pump (81) and the fifth gas transmission pipeline (97) to enter the cooling device (95) for cooling, and low-temperature protective gas after cooling sequentially passes through the fourth gas transmission pipeline (96), the second gas transmission pipeline (82), the communicating pipes and the annular gas outlet pipes to enter the hearth (27) for rapidly cooling a heating object.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211285111.2A CN115560587B (en) | 2022-10-20 | 2022-10-20 | Atmosphere bell jar furnace capable of quickly heating and control method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211285111.2A CN115560587B (en) | 2022-10-20 | 2022-10-20 | Atmosphere bell jar furnace capable of quickly heating and control method thereof |
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| Publication Number | Publication Date |
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| CN115560587A true CN115560587A (en) | 2023-01-03 |
| CN115560587B CN115560587B (en) | 2023-07-07 |
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| CN202211285111.2A Active CN115560587B (en) | 2022-10-20 | 2022-10-20 | Atmosphere bell jar furnace capable of quickly heating and control method thereof |
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| CN212962766U (en) * | 2020-09-16 | 2021-04-13 | 南京新中磁电技术工程有限公司 | Novel high-temperature bell-jar furnace |
| CN112665377A (en) * | 2020-12-25 | 2021-04-16 | 湖南金炉科技股份有限公司 | Rotary bell-jar furnace |
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| CN115560587B (en) | 2023-07-07 |
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