CN211497700U

CN211497700U - Vacuum annealing furnace

Info

Publication number: CN211497700U
Application number: CN201922332192.7U
Authority: CN
Inventors: 于锋
Original assignee: Shenyang Darrente Vacuum Technology Co ltd
Current assignee: Shenyang Darrente Vacuum Technology Co ltd
Priority date: 2019-12-23
Filing date: 2019-12-23
Publication date: 2020-09-15
Anticipated expiration: 2029-12-23

Abstract

The utility model discloses a vacuum annealing furnace, which comprises a base and a furnace body, wherein the bottom of the furnace body is provided with a support column, the end of the supporting column far away from the furnace body is connected with the base, the open end of the furnace body is hinged with a furnace door through a rotating shaft, a heating cavity is arranged in the furnace body, a heating element is arranged at the upper end of the inner wall of the heating cavity, a heat-insulating layer is arranged on the outer surface of the heating cavity, the outer surface of the heat-insulating layer is provided with a cooling layer, both sides of the furnace body are provided with nitrogen pumps, the air outlets of the nitrogen pumps are connected with air outlet pipes, the air outlet pipe is uniformly provided with air outlet holes, the base is provided with a cold water tank arranged at one side of the furnace body, a water pump is arranged on the cold water tank, a water pumping port of the water pump is connected with a spiral condensation pipe extending into the cooling layer, spiral condenser pipe laminating cover is established and is established the setting of heat preservation lateral surface, the utility model discloses advantage compared with prior art lies in: the cooling time of the workpiece is short, and the furnace body has good air tightness.

Description

Vacuum annealing furnace

Technical Field

The utility model relates to the technical field of fishing gear, in particular to a vacuum annealing furnace.

Background

The vacuum annealing furnace is typical heat treatment equipment in semiconductor processing, is used for annealing, alloying, sintering and other processes in the integrated circuit, discrete devices and solar photovoltaic industries, can obviously improve the surface performance of materials, improve the surface purity of the materials, improve the fatigue strength, plasticity, toughness, corrosion resistance and other parameters of the materials, is a processing and manufacturing technology with high precision, high quality, energy conservation, cleanness and no pollution in the aspect of material modification, is an important field of the current manufacturing technology and a hotspot field of process development, but the existing vacuum annealing furnace has an insulating layer and a heating cavity, so that the cooling time is too long, mechanical performance indexes such as hardness, toughness and the like of a workpiece after annealing are difficult to meet the process requirements, the product quality is difficult to guarantee, and meanwhile, the condition that the workpiece does not reach the standard can be caused due to the fact that the air tightness is not well controlled.

SUMMERY OF THE UTILITY MODEL

The to-be-solved technical problem of the utility model is to overcome above technical defect, provide a vacuum annealing furnace, this kind of vacuum annealing furnace cools down simultaneously heating chamber and heat preservation, can shorten the cooling time of work piece greatly and have good gas tightness.

In order to solve the technical problem, the utility model provides a technical scheme does: a vacuum annealing furnace comprises a base and a furnace body, wherein a supporting column is arranged at the bottom of the furnace body, one end of the supporting column, which is far away from the furnace body, is connected with the base, the open end of the furnace body is hinged with a furnace door through a rotating shaft, a heating cavity is arranged in the furnace body, a vacuum valve communicated with the heating cavity is arranged on the furnace body, a heating element is arranged at the upper end of the inner wall of the heating cavity, a workpiece frame is arranged at the bottom of the heating cavity, a heat preservation layer is arranged on the outer surface of the heating cavity, a cooling layer is arranged on the outer surface of the heat preservation layer, nitrogen pumps are arranged on both sides of the furnace body, an air outlet pipe extending into the heating cavity is connected with an air outlet pipe, air outlet holes are uniformly arranged on the air outlet pipe, a cold water tank arranged on, the laminating cover of spiral condenser pipe is established and is established the setting at the heat preservation lateral surface, the one end and the cold water storage cistern intercommunication of water pump are kept away from to the spiral condenser pipe, the delivery port of water pump leads to pipe and cold water storage cistern intercommunication.

Compared with the prior art, the utility model the advantage lie in: the utility model discloses a nitrogen pump lets in nitrogen gas to heating the intracavity, can make the heating chamber reach rapid cooling's purpose, simultaneously through starting the water pump, because the spiral condenser pipe is connected with the mouth that draws water of water pump and the mouth and the cold water storage cistern intercommunication of spiral condenser pipe, so cold water in the cold water storage cistern flows through the spiral condenser pipe under the effect of water pump and gets back to the cold water storage cistern once more, make cold water in the spiral condenser pipe be in the state that flows again when cyclic utilization cold water, be convenient for make the heat preservation cooling fast, thereby reach the heating chamber and cool down with the heat preservation simultaneously, can shorten the cool time of work piece greatly.

As an improvement, a motor is arranged on the outer end face of one end, far away from the furnace door, of the furnace body, an output shaft of the motor is connected with a fan located in the heating cavity, the fan is arranged to enable hot air generated by the heating element to be in a flowing state in the heating process of the workpiece, so that the workpiece is fully heated, and meanwhile, nitrogen can be in a flowing state in the cooling process, so that the heating cavity can be cooled quickly.

As an improvement, the circumference is equipped with the engaging lug on the furnace gate, the lateral surface circumference that the furnace body is close to the furnace gate is equipped with the L template, threaded connection has the locking bolt with engaging lug screw-thread fit on the L template, the tip that the engaging lug was kept away from to the locking bolt is equipped with changes the handle, changes the handle through revolving soon and makes the furnace gate hug closely the furnace body opening part setting, prevents that the gas in the heating chamber from spilling over from the joint seam department of furnace gate and furnace body.

As an improvement, the outer end face of the furnace door is provided with a handle, the inner end face of the furnace door is provided with a sealing ring, and the sealing ring is arranged to further prevent gas in the heating cavity from overflowing.

As an improvement, the top and the bottom of the cold water tank are respectively provided with a water inlet and a water outlet, the water inlet and the water outlet are respectively provided with a valve, and the arrangement of the water inlet and the water outlet is convenient for replacing cold water in the cold water tank.

As an improvement, the bottom of the base is provided with a shock pad, and the shock pad can prevent the whole vacuum annealing furnace from vibrating during working.

As an improvement, the furnace body is provided with a barometer communicated with the heating cavity, and the arrangement of the barometer is convenient for observing and controlling the air pressure condition in the heating cavity.

Drawings

FIG. 1 is a schematic view of a vacuum annealing furnace according to the present invention.

FIG. 2 is a schematic view of the top view of the vacuum annealing furnace according to the present invention.

FIG. 3 is a front view of the vacuum annealing furnace of the present invention.

As shown in the figure: 1. the device comprises a base, 2, a furnace body, 3, support columns, 4, a furnace door, 5, a heating cavity, 6, a vacuum valve, 7, a heating element, 8, a cooling layer, 9, a nitrogen pump, 10, an air outlet pipe, 11, a cold water tank, 12, a water pump, 13, a spiral condenser pipe, 14, a motor, 15, a fan, 16, a connecting lug, 17, an L-shaped plate, 18, a locking bolt, 19, a rotating handle, 20, a handle, 21, a water inlet, 22, a water outlet, 23, a shock pad, 24, a gas pressure gauge, 25, a workpiece frame, 26 and a heat insulation layer.

Detailed Description

The present invention will be described in further detail with reference to the accompanying drawings.

With reference to the attached drawings 1-3, a vacuum annealing furnace comprises a base 1 and a furnace body 2, wherein a support column 3 is arranged at the bottom of the furnace body 2, one end of the support column 3, which is far away from the furnace body 2, is connected with the base 1, an opening end of the furnace body 2 is hinged with a furnace door 4 through a rotating shaft, a heating cavity 5 is arranged inside the furnace body 4, a vacuum valve 6 communicated with the heating cavity 5 is arranged on the furnace body 2, a heating element 7 is arranged at the upper end of the inner wall of the heating cavity 5, a workpiece frame 25 is arranged at the bottom of the heating cavity 5, a heat preservation layer 26 is arranged on the outer surface of the heating cavity 5, a cooling layer 8 is arranged on the outer surface of the heat preservation layer 26, nitrogen pumps 9 are arranged on two sides of the furnace body 2, an air outlet pipe 10 extending into the heating cavity 5 is connected with an air outlet pipe, be equipped with water pump 12 on the cold water storage cistern 11, the mouth that draws water of water pump 12 is connected with the spiral condenser pipe 13 that stretches into in the cooling layer 8, the setting of heat preservation 26 lateral surface is established to the laminating cover of spiral condenser pipe 13, the one end and the cold water storage cistern 11 intercommunication of water pump 12 are kept away from to spiral condenser pipe 13, the delivery port of water pump 12 leads to pipe and cold water storage cistern 11 intercommunication.

The outer end face of one end, far away from the furnace door 4, of the furnace body 2 is provided with a motor 14, and an output shaft of the motor 14 is connected with a fan 15 located in the heating cavity 5.

The furnace door 4 is provided with a connecting lug 16 on the upper circumference, an L-shaped plate 17 is arranged on the outer side circumference of the furnace body 2 close to the furnace door 4, a locking bolt 18 in threaded fit with the connecting lug 16 is connected to the L-shaped plate 17 in a threaded manner, and a rotating handle 19 is arranged at the end part of the locking bolt 18 far away from the connecting lug 16.

The outer end face of the furnace door 4 is provided with a handle 20, and the inner end face of the furnace door 4 is provided with a sealing ring.

The top and the bottom of the cold water tank 11 are respectively provided with a water inlet 21 and a water outlet 22, and the water inlet 21 and the water outlet 22 are both provided with valves.

The bottom of the base 1 is provided with a shock pad 23.

And the furnace body 2 is provided with a barometer 24 communicated with the heating cavity 5.

When the utility model is implemented, a workpiece is put into the workpiece frame, then the furnace door is closed through the handle, the locking bolt is connected with the connecting lug through the twisting rotary handle, the vacuum pump is connected through the vacuum valve to ensure that the heating cavity is in a vacuum state, the heating element is started to heat the workpiece, and the master opens the fan to ensure that the heating element fully heats the workpiece, when the temperature needs to be reduced, nitrogen is introduced into the heating cavity through the nitrogen pump to ensure that the heating cavity can achieve the purpose of rapid temperature reduction, meanwhile, through starting the water pump, because the spiral condenser pipe is connected with the water pumping port of the water pump and the water pumping port of the spiral condenser pipe is communicated with the cold water tank, cold water in the cold water tank flows through the spiral condenser pipe under the action of the water pump and returns to the cold water tank again from the water outlet of the water pump, the cold water in the spiral condenser pipe is in, the heat preservation layer is convenient to cool quickly, so that the heating cavity and the heat preservation layer are cooled simultaneously, and the cooling time of the workpiece can be greatly shortened.

The present invention and the embodiments thereof have been described above, but the description is not limited thereto, and the embodiment shown in the drawings is only one of the embodiments of the present invention, and the actual structure is not limited thereto. In summary, those skilled in the art should understand that they should not be limited to the embodiments described above, and that they can design the similar structure and embodiments without departing from the spirit of the invention.

Claims

1. The utility model provides a vacuum annealing stove, package base (1) and furnace body (2), its characterized in that: the bottom of furnace body (2) is equipped with support column (3), the one end that furnace body (2) was kept away from in support column (3) is connected with base (1), the open end of furnace body (2) articulates through the pivot has furnace gate (4), the inside of furnace body (2) is equipped with heating chamber (5), be equipped with on furnace body (2) with vacuum valve (6) that heating chamber (5) communicate, the inner wall upper end of heating chamber (5) is equipped with heating element (7), the bottom of heating chamber (5) is equipped with work piece frame (25), the surface of heating chamber (5) is equipped with heat preservation (26), the surface of heat preservation (26) is equipped with cooling layer (8), the both sides of furnace body (2) all are equipped with nitrogen pump (9), the gas outlet of nitrogen pump (9) is connected with and stretches into outlet duct (10) in heating chamber (5), evenly be equipped with the venthole on outlet duct (10), be equipped with cold water storage cistern (11) that are located furnace body (2) one side setting on base (1), be equipped with water pump (12) on cold water storage cistern (11), the mouth that draws water of water pump (12) is connected with spiral condenser pipe (13) that stretch into in cooling layer (8), spiral condenser pipe (13) laminating cover is established and is established in heat preservation (26) lateral surface setting, the one end and cold water storage cistern (11) intercommunication of water pump (12) are kept away from in spiral condenser pipe (13), the delivery port of water pump (12) leads to pipe and cold water storage cistern (11) intercommunication.

2. A vacuum annealing furnace according to claim 1, characterized in that: the furnace body (2) is equipped with motor (14) on keeping away from the outer terminal surface of furnace gate (4) one end, the output shaft of motor (14) is connected with fan (15) that are located heating chamber (5).

3. A vacuum annealing furnace according to claim 2, characterized in that: the circumference is equipped with engaging lug (16) on furnace gate (4), the lateral surface circumference that furnace body (2) are close to furnace gate (4) is equipped with L template (17), threaded connection has locking bolt (18) with engaging lug (16) screw-thread fit on L template (17), the tip that engaging lug (16) were kept away from in locking bolt (18) is equipped with changes handle (19).

4. A vacuum annealing furnace according to claim 1, characterized in that: the outer end face of the furnace door (4) is provided with a handle (20), and the inner end face of the furnace door (4) is provided with a sealing ring.

5. A vacuum annealing furnace according to claim 1, characterized in that: the top and the bottom of the cold water tank (11) are respectively provided with a water inlet (21) and a water outlet (22), and the water inlet (21) and the water outlet (22) are respectively provided with a valve.

6. A vacuum annealing furnace according to claim 1, characterized in that: the bottom of the base (1) is provided with a shock pad (23).

7. A vacuum annealing furnace according to claim 3, characterized in that: and the furnace body (2) is provided with a barometer (24) communicated with the heating cavity (5).