CN115488798A - Auxiliary dismounting device for spray plate and spray plate mounting method - Google Patents
Auxiliary dismounting device for spray plate and spray plate mounting method Download PDFInfo
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- CN115488798A CN115488798A CN202211197485.9A CN202211197485A CN115488798A CN 115488798 A CN115488798 A CN 115488798A CN 202211197485 A CN202211197485 A CN 202211197485A CN 115488798 A CN115488798 A CN 115488798A
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- 239000007921 spray Substances 0.000 title claims abstract description 92
- 238000000034 method Methods 0.000 title claims abstract description 33
- 238000005507 spraying Methods 0.000 claims abstract description 53
- 238000009434 installation Methods 0.000 claims abstract description 47
- 239000004065 semiconductor Substances 0.000 claims abstract description 10
- 239000010409 thin film Substances 0.000 claims abstract description 7
- 238000002360 preparation method Methods 0.000 claims abstract description 3
- 239000007769 metal material Substances 0.000 claims description 7
- 239000004809 Teflon Substances 0.000 claims description 4
- 229920006362 Teflon® Polymers 0.000 claims description 4
- 229910052755 nonmetal Inorganic materials 0.000 claims description 4
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000015572 biosynthetic process Effects 0.000 claims description 2
- 238000012423 maintenance Methods 0.000 description 5
- 239000002184 metal Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 238000013461 design Methods 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000007790 scraping Methods 0.000 description 3
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 230000002035 prolonged effect Effects 0.000 description 2
- 238000011161 development Methods 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
- B25B11/02—Assembly jigs
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
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- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Mechanical Engineering (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Abstract
The invention provides an auxiliary dismounting device and a mounting method of a spray plate, which are used for positioning and mounting the auxiliary spray plate at a preset mounting position on an upper cover plate in a semiconductor thin film preparation device, and comprise: the supporting plate is vertically fixed below the preset installation position on the upper cover plate so as to support the positioning disassembly and assembly between the spray plate and the upper cover plate; the sliding direction of the sliding rail is vertical to the plane of the upper cover plate; and the shape of the upper side of the positioning plate is matched with the shape of the periphery of the spraying plate so that the positioning plate is fixed with the spraying plate along the periphery of the spraying plate, and the lower side of the positioning plate is matched with the sliding rail so that the positioning plate drives the spraying plate to slide to the preset mounting position along the sliding rail.
Description
Technical Field
The invention relates to the field of semiconductor equipment, in particular to an auxiliary dismounting device of a spray plate and a spray plate mounting method.
Background
In the practical use of semiconductor spraying process equipment, a process gas spraying plate positioned at a preset position of an upper cover plate needs to be installed or detached when a new device is installed and debugged or after the device is used for a period of time. With the development of the semiconductor film preparation technology, the design of the spray plate structure becomes complex and various, and the overall mass of the spray plate is too large, so that inconvenience is brought to the disassembly and assembly process of the spray plate.
As is easily understood by the technical personnel in the field, for the spray plate with large mass, the problems of collision, friction and the like between the spray plate and other parts are avoided while the concentricity between each part is required to be ensured during disassembly and assembly. In the prior art, a special disassembly auxiliary tool is not provided, and the spray plate needs to be disassembled and assembled manually by equipment maintenance personnel. Or a simple three-jaw auxiliary tool is adopted in some technical schemes, the tool adopts a simple mechanical structure, has no better support, can not ensure the positioning precision among all parts, is lack of stability, and increases the maintenance time; in addition, because the tool is made of metal materials, the outer surface of the spray plate is extremely easy to scrape and touch in the maintenance process, the service life of the spray plate is shortened, the operation cost is increased, and a plurality of defects exist.
In order to overcome the above-mentioned defect that prior art exists, need urgently in the field an auxiliary dismouting device and a spray plate mounting method of spray plate for the installation dismantlement work of auxiliary spray plate, make the spray plate can effectively avoid the mutual drunkenness between spray plate and metal frock to cause scraping and bumping, the friction scheduling problem at the dismouting in-process, and then can improve spray plate life, can realize the accurate positioning of spray plate on upper cover plate default position simultaneously, make operating personnel's loading and unloading work simple and convenient, easily operation, thereby the efficiency of lifting means maintenance work.
Disclosure of Invention
The following presents a simplified summary of one or more aspects in order to provide a basic understanding of such aspects. This summary is not an extensive overview of all contemplated aspects, and is intended to neither identify key or critical elements of all aspects nor delineate the scope of any or all aspects. Its sole purpose is to present some concepts of one or more aspects in a simplified form as a prelude to the more detailed description that is presented later.
In order to overcome the above-mentioned drawbacks of the prior art, the present invention provides an auxiliary mounting/dismounting device for a shower plate, which is used for positioning and mounting the shower plate at a predetermined mounting position on an upper cover plate in a semiconductor thin film manufacturing apparatus, the auxiliary mounting/dismounting device comprising: the supporting plate is used for being vertically fixed below the preset installation position on the upper cover plate so as to support the positioning, dismounting and mounting between the spraying plate and the upper cover plate; the sliding rail is arranged on the supporting plate, and the sliding direction of the sliding rail is vertical to the plane of the upper cover plate; and the upper side shape of the positioning plate is matched with the peripheral shape of the spraying plate so that the positioning plate is fixed with the spraying plate along the periphery of the spraying plate, and the lower side of the positioning plate is matched and mounted with the sliding rail so that the positioning plate drives the spraying plate to slide to the preset mounting position along the sliding rail.
In an embodiment, preferably, the auxiliary detaching device further includes: and the positioning bolt is used for inserting into positioning holes arranged on the side periphery of the spraying plate and the corresponding position of the upper cover plate after the spraying plate slides to the preset installation position along the slide rail so as to realize the positioning of the spraying plate on the upper cover plate.
In an embodiment, preferably, the positioning plate is provided with a plurality of countersunk holes on a contact surface with the spray plate, and the countersunk holes are used for matching with threaded holes arranged at corresponding positions on the spray plate to realize positioning and installation between the positioning plate and the spray plate.
In an embodiment, preferably, the auxiliary detaching device further includes: the first gasket is made of non-metallic materials, is arranged between the spray plate and the positioning plate, and is matched with the contact surface between the spray plate and the positioning plate in shape; and the second gasket is made of non-metal materials, is arranged between the supporting plate and the upper cover plate, and is matched with the contact surface between the supporting plate and the upper cover plate in shape.
In one embodiment, the first gasket and the second gasket are preferably made of teflon.
In an embodiment, preferably, the supporting plate is provided with a positioning pin and a screw hole on a contact surface with the upper cover plate, and the positioning pin and the screw hole are respectively used for matching with a positioning hole and a screw hole which are arranged at corresponding positions on the upper cover plate to realize positioning and installation between the supporting plate and the upper cover plate.
In an embodiment, preferably, the periphery of the spray plate and the corresponding position of the upper cover plate are provided with a plurality of screw holes which are symmetrically arranged.
In an embodiment, preferably, the slide rail and the support plate, and the positioning plate and the sliding table disposed on the slide rail are fixed by screws.
Another aspect of the present invention also provides a shower plate mounting method for use in a semiconductor thin film formation apparatus, which employs the above-described auxiliary attaching and detaching apparatus for a shower plate, the shower plate mounting method including: fixedly mounting the support plate at a predetermined position on the upper cover plate; fixedly mounting the spray plate and the positioning plate; pushing the positioning plate to make the spraying plate slide to the preset mounting position; after the spray plate is fixedly installed to the preset installation position, the fixed installation between the spray plate and the positioning plate is removed; and removing the fixed installation between the supporting plate and the upper cover plate to remove the auxiliary dismounting device.
In an embodiment, preferably, the auxiliary dismounting device further includes a positioning latch, and the shower plate mounting method further includes: after the positioning plate is pushed to enable the spraying plate to slide to the preset installation position, the fixed installation between the spraying plate and the positioning plate is loosened, the positioning bolt is inserted into the positioning hole formed in the side periphery of the spraying plate and the corresponding position of the upper cover plate to realize the positioning of the spraying plate on the upper cover plate, and then the spraying plate is fixedly installed at the preset installation position of the upper cover plate.
In one embodiment, preferably, in the auxiliary attaching and detaching device, the positioning plate is provided with a plurality of countersunk holes on a contact surface with the shower plate, and the fixedly mounting of the shower plate and the positioning plate includes: the spraying plate and the positioning plate are fixedly installed through the threaded holes and the counter bores.
In an embodiment, preferably, after the shower plate is fixedly installed to the preset installation position, the removing of the fixed installation between the shower plate and the positioning plate includes: the initial fixed installation between the spray plate and the upper cover plate is realized through partial screw holes arranged at the periphery of the spray plate and the corresponding positions on the upper cover plate; and dismantling the fixed mounting between the spray plate and the positioning plate, reversely pulling the positioning plate, and realizing the complete fixed mounting between the spray plate and the upper cover plate through the rest screw holes arranged at the corresponding positions on the periphery of the spray plate and the upper cover plate.
In an embodiment, preferably, the outer periphery of the shower plate and the corresponding position of the upper cover plate are provided with a plurality of screw holes which are symmetrically arranged, and the shower plate mounting method further includes: when this preliminary fixed mounting and this complete fixed mounting between this board and this upper cover plate are sprayed in execution, arrange the position with screw fastening in proper order and be this screw hole of central symmetry.
In one embodiment, preferably, the support plate is provided with a positioning pin on a contact surface with the upper cover plate, and the fixing the support plate to a predetermined position on the upper cover plate includes: the support plate is positioned at the preset position on the upper cover plate through the positioning pin, and then the support plate and the upper cover plate are fixedly installed through screws.
Drawings
The above features and advantages of the present disclosure will be better understood upon reading the detailed description of embodiments of the disclosure in conjunction with the following drawings. In the drawings, components are not necessarily drawn to scale, and components having similar associated characteristics or features may have the same or similar reference numerals.
Fig. 1 is an exploded view of an apparatus structure of a spray plate auxiliary dismounting apparatus according to an embodiment of the present invention;
fig. 2 is a schematic view illustrating an assembling method of the auxiliary dismounting device for a shower plate according to an embodiment of the present invention; and
fig. 3 is a schematic view illustrating an assembly effect of the spray plate auxiliary dismounting device according to an embodiment of the present invention.
For clarity, a brief description of the reference numerals is given below:
1. spray plate
2. Supporting plate
3. Sliding rail
4. Positioning plate
5. Positioning bolt
6. First gasket
7. Second gasket
8. Upper cover plate
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will become apparent to those skilled in the art from the present disclosure. While the invention will be described in connection with the preferred embodiments, there is no intent to limit its features to those embodiments. On the contrary, the invention is described in connection with the embodiments for the purpose of covering alternatives or modifications that may be extended based on the claims of the present invention. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. The invention may be practiced without these particulars. Moreover, some of the specific details have been left out of the description in order to avoid obscuring or obscuring the focus of the present invention.
In the description of the present invention, it should be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
Additionally, the terms "upper," "lower," "left," "right," "top," "bottom," "horizontal," "vertical" and the like as used in the following description are to be understood as referring to the segment and the associated drawings in the illustrated orientation. The relative terms are used for convenience of description and do not imply that the described apparatus should be constructed or operated in the specific orientation and therefore should not be construed as limiting the invention.
It will be understood that, although the terms first, second, third, etc. may be used herein to describe various elements, regions, layers and/or sections, these elements, regions, layers and/or sections should not be limited by these terms, but rather are used to distinguish one element, region, layer and/or section from another element, region, layer and/or section. Thus, a first component, region, layer and/or section discussed below could be termed a second component, region, layer and/or section without departing from some embodiments of the present invention.
In order to overcome the defects in the prior art, the invention provides an auxiliary dismounting device of a spray plate and a spray plate mounting method, which are used for assisting the mounting and dismounting work of the spray plate, so that the problems of scraping, collision, friction and the like caused by mutual play between the spray plate and a metal tool in the dismounting process of the spray plate can be effectively avoided, the service life of the spray plate can be further prolonged, meanwhile, the accurate positioning of the spray plate on the preset position of an upper cover plate can be realized, the dismounting work of operators is simple, convenient and easy to operate, and the efficiency of equipment maintenance work is improved.
Fig. 1 is an exploded view of an apparatus structure of a shower plate auxiliary dismounting device according to an embodiment of the present invention; fig. 2 is a schematic view illustrating an assembling method of the auxiliary dismounting device for a shower plate according to an embodiment of the present invention.
Referring to fig. 1 and 2, the present invention provides an auxiliary mounting/dismounting device for a shower plate, which is used for positioning and mounting an auxiliary shower plate 1 at a predetermined mounting position on an upper cover plate 8 in a semiconductor thin film manufacturing apparatus, and the auxiliary mounting/dismounting device comprises: the supporting plate 2 is vertically fixed below the preset installation position on the upper cover plate 8 so as to support the positioning disassembly and assembly between the spray plate 1 and the upper cover plate 8; the sliding rail 3 is arranged on the supporting plate 2, and the sliding direction of the sliding rail 3 is vertical to the plane of the upper cover plate 8; and the upper side shape of the positioning plate 4 is matched with the peripheral shape of the spray plate 1 so that the positioning plate 4 is fixed with the spray plate 1 along the periphery of the spray plate 1, and the lower side of the positioning plate 4 is matched and mounted with the slide rail 3 so that the positioning plate 4 drives the spray plate 2 to slide to the preset mounting position along the slide rail 3.
It should be noted that the illustrated shower plate in the embodiment of the present invention is a circular shower plate, and the shape of the shower plate is only exemplary and not intended to limit the scope of the present invention. In fact, the auxiliary dismounting device for the spray plate provided by the invention has no special limitation on the type and shape of the spray plate, the structural shape of the auxiliary dismounting device can be customized according to different types or shapes of spray plates, and the auxiliary dismounting of the spray plate is realized, so similar schemes adopting the same principle to assist dismounting different types of spray plates in different shapes are all included in the protection scope of the invention.
In an embodiment, please preferably continue to refer to fig. 1 and fig. 2, the auxiliary dismounting device for a shower plate according to the present invention further includes: and the positioning bolt 5 is used for inserting the spraying plate 1 into positioning holes formed in the side periphery of the spraying plate 1 and the corresponding position of the upper cover plate 8 to realize the positioning of the spraying plate 1 on the upper cover plate 8 after the spraying plate 1 slides to the preset installation position along the slide rail 3.
In an embodiment, preferably, the positioning plate is provided with a plurality of countersunk holes on a contact surface with the spray plate, and the countersunk holes are used for matching with threaded holes arranged at corresponding positions on the spray plate to realize positioning and installation between the positioning plate and the spray plate.
With continuing reference to fig. 1 and fig. 2, in an embodiment, preferably, the auxiliary dismounting device for a shower plate provided by the present invention further includes: the first gasket 6 is made of non-metallic materials, the first gasket 6 is arranged between the spray plate 1 and the positioning plate 4, and the shape of the first gasket is matched with the contact surface between the spray plate 1 and the positioning plate 4; and the second gasket 7 made of non-metal materials, the second gasket 7 is installed between the supporting plate 2 and the upper cover plate 8, and the shape of the second gasket is matched with the contact surface between the supporting plate 2 and the upper cover plate 8.
Preferably, the first gasket 6 and the second gasket 7 may be made of teflon material, for example. The first gasket 6 and the second gasket 7 can effectively prevent friction and scraping between the auxiliary tool made of metal and the spray plate or the upper cover plate, so that the service life of the spray plate device can be prolonged.
It should be noted that, the gasket is made of teflon for exemplary purposes only, and is not intended to limit the scope of the present application, and in fact, the first gasket and the second gasket may be made of other materials instead, as long as the metal can be effectively prevented from being scraped against each other, and the solution of these other materials should also be included in the scope of the present invention.
With continued reference to fig. 1, in an embodiment, preferably, the support plate 2 is provided with a positioning pin and a screw hole on a contact surface with the upper cover plate, respectively for matching with a positioning hole and a screw hole provided at a corresponding position on the upper cover plate to realize positioning and installation between the support plate 2 and the upper cover plate. The hole design matching the dowel pin and screw hole can be referenced to the second shim 7.
In an embodiment, preferably, a plurality of screw holes are symmetrically arranged at positions corresponding to the upper cover plate on the periphery of the spray plate 1. For example, 12 screw holes are uniformly arranged along the outer circumference of the shower plate 1, and the screw holes follow the holes sequentially fastened at symmetrical positions when being installed, thereby increasing the stability of the shower plate installation while ensuring the installation firmness.
In an embodiment, preferably, the slide rail 3 and the support plate 2, and the positioning plate 4 and a sliding table disposed on the slide rail 3 are fixed by screws. For example, as shown in fig. 1, 8 hexagon screws may be used to fix the slide rail 3 and the support plate 2, and 6 hexagon screws may be used to stably connect the positioning plate 4 and the sliding table.
Fig. 3 is a schematic view illustrating an assembly effect of the spray plate auxiliary dismounting device according to an embodiment of the invention.
Referring to fig. 2 and 3, another aspect of the present invention provides a method for installing a shower plate in a semiconductor thin film manufacturing apparatus, wherein the method for installing a shower plate includes: fixedly mounting the support plate at a predetermined position on the upper cover plate; fixedly mounting the spray plate and the positioning plate; pushing the positioning plate to make the spraying plate slide to the preset mounting position; after the spray plate is fixedly installed to the preset installation position, the fixed installation between the spray plate and the positioning plate is removed; and removing the fixed installation between the supporting plate and the upper cover plate to remove the auxiliary dismounting device.
In an embodiment, preferably, the auxiliary dismounting device further includes a positioning latch, and the shower plate mounting method further includes: after the positioning plate is pushed to enable the spraying plate to slide to the preset installation position, the fixed installation between the spraying plate and the positioning plate is loosened, the positioning bolt is inserted into the positioning hole formed in the side periphery of the spraying plate and the corresponding position of the upper cover plate to realize the positioning of the spraying plate on the upper cover plate, and then the spraying plate is fixedly installed at the preset installation position of the upper cover plate.
As shown in fig. 1 and 2, in an embodiment, the positioning plate has a plurality of countersunk holes on a contact surface with the shower plate in the auxiliary dismounting device, and the fixing and mounting of the shower plate and the positioning plate includes: the spray plate and the positioning plate are fixedly installed through a plurality of threaded holes and countersunk holes.
As can be seen from fig. 1 to 3, in an embodiment, preferably, after the shower plate is fixedly installed at the preset installation position, the removing the fixed installation between the shower plate and the positioning plate includes: the initial fixed installation between the spray plate and the upper cover plate is realized through partial screw holes arranged at the periphery of the spray plate and the corresponding position on the upper cover plate; and dismantling the fixed mounting between the spray plate and the positioning plate, reversely pulling the positioning plate, and realizing the complete fixed mounting between the spray plate and the upper cover plate through the rest screw holes arranged at the corresponding positions on the periphery of the spray plate and the upper cover plate.
Meanwhile, in an embodiment, a plurality of screw holes are symmetrically arranged at the corresponding positions of the periphery of the spray plate and the upper cover plate, and the spray plate mounting method further comprises the following steps: when executing this preliminary fixed mounting and this complete fixed mounting between this shower plate and this upper cover plate, it is this screw hole that centrosymmetry to arrange the position with screw fastening in proper order. The screw that the fastening is central symmetry in proper order and arranges can make the installation of spraying the board more stable and firm, also can install more accurately for the preset mounted position of upper cover plate simultaneously. For example, in conjunction with fig. 1, 12 screw holes may be uniformly arranged along the outer circumference of the shower plate 1, and the screw holes may be sequentially fastened to symmetrically positioned holes during installation so as to increase the stability of the installation of the shower plate while ensuring the installation stability.
In one embodiment, preferably, the support plate is provided with a positioning pin on a contact surface with the upper cover plate, and the fixing the support plate to a predetermined position on the upper cover plate includes: the preset position of the support plate on the upper cover plate is positioned through the positioning pin, and the support plate and the upper cover plate are fixedly installed through screws. The spray plate is positioned and then installed, and the positioning and installation accuracy of the spray plate is further enhanced.
While, for purposes of simplicity of explanation, the methodologies are shown and described as a series of acts, it is to be understood and appreciated that the methodologies are not limited by the order of acts, as some acts may, in accordance with one or more embodiments, occur in different orders and/or concurrently with other acts from that shown and described herein or not shown and described herein, as would be understood by one skilled in the art.
The previous description of the disclosure is provided to enable any person skilled in the art to make or use the disclosure. Various modifications to the disclosure will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other variations without departing from the spirit or scope of the disclosure. Thus, the disclosure is not intended to be limited to the examples and designs described herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.
Claims (14)
1. An auxiliary dismounting device for a spray plate, which is used for assisting the positioning and installation of the spray plate at a preset installation position on an upper cover plate in a semiconductor thin film preparation device, comprises:
the supporting plate is used for being vertically fixed below the preset installation position on the upper cover plate so as to support the positioning, dismounting and mounting between the spraying plate and the upper cover plate;
the sliding direction of the sliding rail is vertical to the plane of the upper cover plate; and
the upper side shape of the positioning plate is matched with the peripheral shape of the spraying plate so that the positioning plate is fixed with the spraying plate along the periphery of the spraying plate, and the lower side of the positioning plate is matched with the sliding rail so that the positioning plate drives the spraying plate to slide along the sliding rail to the preset mounting position.
2. The auxiliary attaching and detaching device according to claim 1, further comprising:
and the positioning bolt is used for inserting the spraying plate into the positioning holes in the side periphery of the spraying plate and the corresponding position of the upper cover plate after the spraying plate slides to the preset installation position along the slide rail, so as to realize the positioning of the spraying plate on the upper cover plate.
3. An auxiliary dismounting device as recited in claim 1, wherein the positioning plate has a plurality of counter bores on a contact surface with the spray plate for cooperating with corresponding threaded bores on the spray plate to position and mount the positioning plate with the spray plate.
4. The auxiliary attaching and detaching device according to claim 1, further comprising:
the first gasket is made of a non-metal material, is arranged between the spray plate and the positioning plate, and is matched with a contact surface between the spray plate and the positioning plate in shape; and
and the second gasket is made of a non-metal material, is arranged between the support plate and the upper cover plate, and is matched with the contact surface between the support plate and the upper cover plate in shape.
5. The device of claim 4, wherein the first gasket and the second gasket are made of Teflon.
6. The auxiliary dismounting device as claimed in claim 1, wherein the support plate is provided with a positioning pin and a screw hole on a contact surface with the upper cover plate, and the positioning pin and the screw hole are respectively used for matching with a positioning hole and a screw hole which are provided at corresponding positions on the upper cover plate to realize positioning and mounting between the support plate and the upper cover plate.
7. The auxiliary dismounting device as recited in claim 1, wherein a plurality of screw holes are symmetrically arranged at positions corresponding to the upper cover plate on the periphery of the spraying plate.
8. The auxiliary dismounting device as claimed in claim 1, wherein the slide rail and the support plate, and the positioning plate and the sliding table disposed on the slide rail are fixed by screws.
9. A shower plate mounting method for use in a semiconductor thin film formation apparatus, using the shower plate auxiliary attaching and detaching apparatus according to claim 1, the shower plate mounting method comprising:
fixedly mounting the support plate at a preset position on the upper cover plate;
fixedly mounting the spraying plate and the positioning plate;
pushing the positioning plate to enable the spraying plate to slide to the preset installation position;
after the spray plate is fixedly installed to the preset installation position, the fixed installation between the spray plate and the positioning plate is removed; and
and detaching the auxiliary dismounting device by detaching the fixed installation between the support plate and the upper cover plate.
10. The shower plate mounting method of claim 9 wherein the auxiliary removal device further comprises a positioning latch, the shower plate mounting method further comprising:
after the positioning plate is pushed to enable the spraying plate to slide to the preset installation position, the fixed installation between the spraying plate and the positioning plate is loosened, the positioning bolt is inserted into the positioning hole in the side periphery of the spraying plate and the corresponding position of the upper cover plate to realize the positioning of the spraying plate on the upper cover plate, and then the spraying plate is fixedly installed on the upper cover plate at the preset installation position.
11. The shower plate attaching method according to claim 9, wherein the auxiliary attaching and detaching device in which the positioning plate is provided with a plurality of countersunk holes on a contact surface with the shower plate and the positioning plate are fixedly attached comprises:
the spraying plate and the positioning plate are fixedly installed through the threaded holes and the counter bores.
12. The shower plate mounting method of claim 9, wherein said removing said fixed mounting between said shower plate and said positioning plate after said fixedly mounting said shower plate to said predetermined mounting position comprises:
the initial fixed installation between the spraying plate and the upper cover plate is realized through partial screw holes arranged at the periphery of the spraying plate and the corresponding position on the upper cover plate; and
and dismantling the fixed mounting between the spray plate and the positioning plate, reversely pulling the positioning plate, and realizing the complete fixed mounting between the spray plate and the upper cover plate through the rest screw holes arranged at the periphery of the spray plate and the corresponding position on the upper cover plate.
13. The shower plate mounting method of claim 12, wherein a plurality of screw holes are symmetrically arranged at positions corresponding to the outer periphery of the shower plate and the upper cover plate, the shower plate mounting method further comprising:
and when the initial fixed mounting and the complete fixed mounting between the spraying plate and the upper cover plate are carried out, the screw holes are arranged in a central symmetry manner by screw fastening in sequence.
14. The shower plate mounting method of claim 9, wherein the support plate is provided with a positioning pin on a contact surface with the upper cover plate, and the fixedly mounting the support plate to a predetermined position on the upper cover plate comprises:
and positioning the preset position of the support plate on the upper cover plate through the positioning pin, and fixing and mounting the support plate and the upper cover plate through screws.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211197485.9A CN115488798A (en) | 2022-09-29 | 2022-09-29 | Auxiliary dismounting device for spray plate and spray plate mounting method |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202211197485.9A CN115488798A (en) | 2022-09-29 | 2022-09-29 | Auxiliary dismounting device for spray plate and spray plate mounting method |
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| CN115488798A true CN115488798A (en) | 2022-12-20 |
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| CN202211197485.9A Pending CN115488798A (en) | 2022-09-29 | 2022-09-29 | Auxiliary dismounting device for spray plate and spray plate mounting method |
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| US20050258280A1 (en) * | 2004-05-24 | 2005-11-24 | Shin-Etsu Chemical Co., Ltd. | Shower plate for plasma processing apparatus and plasma processing apparatus |
| CN102441857A (en) * | 2011-09-30 | 2012-05-09 | 安徽大学 | Positioning supporting mechanism with changeable positioning part |
| CN104439814A (en) * | 2013-09-14 | 2015-03-25 | 牛玉琴 | Assembling and welding auxiliary device of large slender workpieces |
| CN106607794A (en) * | 2015-10-23 | 2017-05-03 | 沈阳拓荆科技有限公司 | Auxiliary dismounting and mounting tool for spraying device in semiconductor device and application method |
| CN107116330A (en) * | 2017-04-28 | 2017-09-01 | 安徽江淮汽车集团股份有限公司 | One kind welding auxiliary mould |
| CN213953002U (en) * | 2020-10-15 | 2021-08-13 | 石保恒 | Building templates demolishs device |
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2022
- 2022-09-29 CN CN202211197485.9A patent/CN115488798A/en active Pending
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| US20050258280A1 (en) * | 2004-05-24 | 2005-11-24 | Shin-Etsu Chemical Co., Ltd. | Shower plate for plasma processing apparatus and plasma processing apparatus |
| CN102441857A (en) * | 2011-09-30 | 2012-05-09 | 安徽大学 | Positioning supporting mechanism with changeable positioning part |
| CN104439814A (en) * | 2013-09-14 | 2015-03-25 | 牛玉琴 | Assembling and welding auxiliary device of large slender workpieces |
| CN106607794A (en) * | 2015-10-23 | 2017-05-03 | 沈阳拓荆科技有限公司 | Auxiliary dismounting and mounting tool for spraying device in semiconductor device and application method |
| CN107116330A (en) * | 2017-04-28 | 2017-09-01 | 安徽江淮汽车集团股份有限公司 | One kind welding auxiliary mould |
| CN213953002U (en) * | 2020-10-15 | 2021-08-13 | 石保恒 | Building templates demolishs device |
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