CN115297980A - 表面包覆切削工具 - Google Patents

表面包覆切削工具 Download PDF

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CN115297980A
CN115297980A CN202080098792.4A CN202080098792A CN115297980A CN 115297980 A CN115297980 A CN 115297980A CN 202080098792 A CN202080098792 A CN 202080098792A CN 115297980 A CN115297980 A CN 115297980A
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layer
average
tool
carbonitride
thickness
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中村惠滋
阿部光宏
河野和弘
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Mitsubishi Materials Corp
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • B23B27/148Composition of the cutting inserts
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36Carbonitrides
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23BTURNING; BORING
    • B23B27/00Tools for turning or boring machines; Tools of a similar kind in general; Accessories therefor
    • B23B27/14Cutting tools of which the bits or tips or cutting inserts are of special material
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02Pretreatment of the material to be coated
    • C23C16/0272Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/308Oxynitrides
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    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34Nitrides
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/403Oxides of aluminium, magnesium or beryllium
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/40Oxides
    • C23C16/405Oxides of refractory metals or yttrium
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    • C23C16/00Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
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    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
    • C23C28/042Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material including a refractory ceramic layer, e.g. refractory metal oxides, ZrO2, rare earth oxides
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    • C23C28/00Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D
    • C23C28/04Coating for obtaining at least two superposed coatings either by methods not provided for in a single one of groups C23C2/00 - C23C26/00 or by combinations of methods provided for in subclasses C23C and C25C or C25D only coatings of inorganic non-metallic material
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  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
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  • Cutting Tools, Boring Holders, And Turrets (AREA)
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Abstract

一种表面包覆切削工具,在工具基体上具有硬质包覆层,所述硬质包覆层从所述工具基体朝向表面依次具有内层、下部中间层、上部中间层、结合辅助层和外层,所述内层为Ti碳氮化物层且平均层厚为4.0~20.0μm,所述下部中间层为Ti氮化物层且平均层厚为0.1~2.0μm,所述上部中间层为Ti碳氮化物层且平均层厚为0.1~2.5μm,所述下部中间层的Ti氮化物的晶界和所述上部中间层的Ti碳氮化物的晶界与所述内层的Ti碳氮化物的晶界连续,所述结合辅助层为Ti碳氮氧化物层且平均层厚为3~80nm,所述外层为α型氧化铝层且平均层厚为2.0~20.0μm,所述内层和所述上部中间层的Ti碳氮化物的织构系数TC(422)为3.0以上,所述外层的α型氧化铝的织构系数TC(0 0 12)为5.0以上。

Description

表面包覆切削工具
技术领域
本发明涉及一种表面包覆切削工具(以下,有时称为包覆工具)。
背景技术
以改善切削工具的切削性能为目的,以往,已知具有如下包覆工具:该包覆工具在碳化钨(以下,用WC表示)基硬质合金等工具基体的表面,通过蒸镀法包覆形成有硬质包覆层,这会发挥优异的耐磨性。
关于前述的包覆形成有硬质包覆层的现有包覆工具,虽然是耐磨性优异的包覆工具,但人们提出了与硬质包覆层的进一步改善有关的各种提案。
例如,在专利文献1中记载了一种具有硬质包覆层的包覆工具,所述硬质包覆层从工具基体朝向表面具有TiCN层、粘结层、α型Al2O3层,所述TiCN层的平均层厚为4~20μm,织构系数TC(220)(以下,有时仅用TC表示)为0.5以下,TC(422)为3以上,TC(311)与TC(422)之和为4以上,所述粘结层为TiN、TiCN、TiCO及TiCNO中的至少一层且平均层厚为0.5~2μm,所述α型Al2O3层的平均层厚为2~20μm,TC(0 0 12)为7.2以上,I(0 0 12)/I(0 0 14)为1以上。
另外,例如在专利文献2中记载了一种具有硬质包覆层的包覆工具,所述硬质包覆层从工具基体朝向表面具有TiCN层、粘结层、α型Al2O3层,所述TiCN层的平均层厚为2~20μm,所述粘结层为针状组织的TiCNO或TiBN,所述α型Al2O3层的平均层厚为1~15μm,TC(006)大于5。
专利文献1:日本专利公开2016-137564号公报
专利文献2:日本专利第5872746号公报
近年来,切削加工中的省力化及节能化的要求强烈,伴随此,切削加工有进一步高速化、高效率化的倾向,对包覆工具的硬质包覆层进一步要求耐崩刃性、耐缺损性、耐剥离性等耐异常损伤性,并且在长期使用中要求优异的耐磨性。
然而,根据本发明人的研究,上述专利文献1及专利文献2所记载的包覆工具在刀尖承受较大负担的切削加工中,谈不上具有充分的耐久性。
发明内容
本发明是鉴于该状况而提出的,其目的是提供一种在刀尖承受较大负担的切削加工中具有充分的耐久性的包覆工具。
本发明的一实施方式所涉及的表面包覆切削工具的特征在于,
具有工具基体和该工具基体上的硬质包覆层,
所述硬质包覆层从所述工具基体朝向表面依次具有内层、下部中间层、上部中间层、结合辅助层和外层,
所述内层为Ti碳氮化物层且平均层厚为4.0~20.0μm,
所述下部中间层为Ti氮化物层且平均层厚为0.1~2.0μm,
所述上部中间层为Ti碳氮化物层且平均层厚为0.1~2.5μm,所述下部中间层的Ti氮化物的晶界和所述上部中间层的Ti碳氮化物的晶界与所述内层的Ti碳氮化物的晶界连续,
所述结合辅助层为Ti碳氮氧化物层且平均层厚为3~80nm,
所述外层为α型氧化铝层且平均层厚为2.0~20.0μm,
所述内层和所述上部中间层的Ti碳氮化物的织构系数TC(422)为3.0以上,所述外层的α型氧化铝的织构系数TC(0 0 12)为5.0以上。
根据前述,在刀尖承受较大负担的切削加工中,具有充分的耐久性。
附图说明
图1是表示本发明的一实施方式的包覆工具的内层、下部中间层、上部中间层、结合辅助层和外层的示意图。
具体实施方式
本发明人为了提高将α型氧化铝层作为硬质包覆层包含的包覆工具的耐久性,着眼于α型氧化铝层和结合辅助层(粘结层)反复进行了深入研究。其结果,发现粘结层的针状组织对耐久性带来不良影响。
即,上述专利文献1所记载的粘结层虽然在该文献中没有明确记载,但为了得到用于使与α型氧化铝层的接合牢固的锚定效应,与专利文献2的粘结层同样具有针状组织。
然而,根据本发明人的研究,明确了该针状组织是在α型氧化铝层与粘结层的界面区域中产生空隙的原因。即,发现用于形成α型氧化铝层的原料气体没有充分供给到针状组织所形成的间隙中,由此产生空隙,难以得到针状组织所带来的锚定效应。另外,还发现通过将上述专利文献1和专利文献2所记载的Ti碳氮化物层设为Ti碳氮化物层-Ti氮化物层-Ti碳氮化物层这三层,从而提高耐崩刃性。
下面,对本发明的一实施方式进行详细说明。此外,在本说明书及权利要求书中,在用“A~B”(A、B均为数值)表示数值范围时,其范围包括上限值(B)和下限值(A),上限值(B)与下限值(A)的单位相同。另外,数值包括公差。
另外,Ti氮化物、Ti碳氮化物、Ti碳氮氧化物、Ti碳氮化物、Ti氧化物的各层及α型氧化铝层的组成并不限定于化学计量组成,而是包含以往公知的所有原子比的组成。
如图1示意性地表示那样,本发明的一实施方式的包覆工具在工具基体8上的硬质包覆层1中具有内层2、下部中间层3、上部中间层4、结合辅助层5和外层6。而且,通过对内层2、下部中间层3、上部中间层4、结合辅助层5(以下,将这些层统称为主要层)调整成膜气体的气体组成和反应气氛压力而使之进行外延生长。因此,当在纵截面(与工具基体8的表面垂直的截面)中进行观察时,下部中间层3的Ti氮化物的晶界和上部中间层4的Ti碳氮化物的晶界与内层的具有柱状粒子7的Ti碳氮化物的晶界连续,在将它们视为一体时,能够视为恰似构成一个较大的柱状粒子的一部分的组织。而且,结合辅助层5并不是针状组织。即,结合辅助层5为非针状组织,例如由等轴晶构成。
此外,所谓晶界连续是指通过扫描型电子显微镜(SEM:Scanning ElectronMicroscope)观察后述的硬质包覆层的任意的纵截面时,能够视觉辨别为晶界连续的情况。
如此,能够视觉辨别为晶界连续的理由可以考虑是如下原因:由于外延生长的Ti氮化物和Ti碳氮化物的晶格常数可以视为实质上相同,因此下部中间层的Ti氮化物为内层的Ti碳氮化物,另外,上部中间层的Ti碳氮化物与下部中间层的Ti氮化物分别在与工具基体的表面平行的方向上,以使晶格间隔(面间隔)一致的方式生长,即便经过成膜后的冷却也能够保持该晶格间隔,从而内层的Ti碳氮化物的面间隔直接被下部中间层的Ti氮化物、上部中间层的Ti碳氮化物继承。
以下,对各层进行说明。
内层:
内层是与工具基体或后述的最内层相邻且具有柱状粒子的Ti碳氮化物层,其平均层厚优选为4.0~20.0μm。将平均层厚设为该范围的理由是因为,在小于4.0μm时,耐磨性会降低,另一方面,在大于20.0μm时,耐缺损性会降低。平均层厚更优选为5.0~15.0μm,进一步优选为8.0~12.0μm。
下部中间层:
下部中间层设置在内层与上部中间层之间,该下部中间层是Ti氮化物层,平均层厚优选为0.1~2.0μm。由于Ti氮化物层与其他主要层相比柔软且杨氏模量较低,因此提高硬质包覆层的韧性,从而提高耐崩刃性。即,如后所述,虽然在作为结合辅助层的Ti碳氮氧化物层与外层的α型氧化铝层的附着变得牢固时,由于这些物质的热膨胀系数等的物理性质差异而在与结合辅助层相邻的中间层内产生较大的变形,但认为通过杨氏模量低的Ti氮化物层会缓和该变形。此外,由于在下部中间层的平均层厚大于2.0μm时,前述的晶界连续受损,因此下部中间层的平均层厚优选为0.1~2.0μm,更优选为0.3~1.5μm,进一步优选为0.5~1.0μm。
另外,下部中间层还起到使上部中间层与内层牢固地结合的作用。
上部中间层:
上部中间层是设置在下部中间层与结合辅助层之间的Ti碳氮化物层。设为Ti碳氮化层的理由是因为,由于后述的结合辅助层为Ti碳氮化氧化物层而具有氧,因此与外层的α型氧化铝层的化学亲和性较高,而且在考虑Ti碳氮化物的(422)面的倾斜度和α型氧化铝的(0 0 12)面的倾斜度时结晶学亲和性较高。在上部中间层的平均层厚小于0.1μm时,该亲和性的效果不充分,另一方面,在大于2.5μm时,不能发挥前述的下部中间层对硬质包覆层的韧性提高效果。平均层厚更优选为0.3~2.0μm,进一步优选为0.5~1.5μm。
内层和上层中间层的Ti碳氮化物的织构系数TC(422):
如前所述,在主要层中的可看作是一个较大的柱状粒子的内层、下部中间层、上部中间层中,作为这些层的主要构成相的Ti碳氮化物的TC(422)优选为3.0以上。其理由是因为,在为3.0以上时,因前述的外延生长而使得后述的外层的α型氧化铝的TC(0 0 12)成为5.0以上,从而耐磨性会提高。在此,TC(织构系数TC)是通过使用CuKα的2θ/θ会聚光学***的X射线衍射进行测量,且为由以下叙述的哈里斯公式规定的参数。
[数学式1]
Figure BDA0003853858560000041
在此,I(hkl)为(hkl)面的衍射强度,I0(hkl)为在同一面的ICDD文件编号00-042-1489中记载的标准强度,n为反射面的总数。应考虑为反射面的面是(111)面、(200)面、(220)面、(311)面、(331)面、(420)面、(422)面和(511)面。
结合辅助层:
结合辅助层是与外层的α型氧化铝层相接的层,是与上述专利文献1和专利文献2的粘结层对应且其平均层厚为3~80nm的Ti碳氮氧化物层。由于该层具有氧,因此具有与外层的α型氧化铝层的附着牢固的特性,在平均层厚为3~80nm时,能够发挥该特性。另外,从该特性的发挥方面考虑,平均层厚更优选为3~50nm,进一步优选为3~30nm。
该结合辅助层通过调整成膜气体的组成和反应时间而成为平均层厚为3~80nm的薄层,其组织并不是针状组织。因此,在形成外层的α型氧化铝层时,α型氧化铝层不会在结合辅助层的附近区域产生空隙,外层的α型氧化铝层能够通过结合辅助层与内层、下部中间层及上部中间层牢固地结合。
外层:
外层优选为平均层厚为2.0~20.0μm且TC(0 0 12)为5以上的α型氧化铝层。在平均层厚小于2.0μm时,由于薄而在长期使用中不能充分确保耐久性,另一方面,在大于20.0μm时,导致α型氧化铝层的晶粒变大,容易产生崩刃。在TC(00 12)为5.0以上时,发挥较高的耐磨性。
在此,在求TC(0 0 12)时,使用ICDD文件编号00-010-0173中记载的(104)面、(110)面、(113)面、(024)面、(116)面、(214)面、(300)面、(0 0 12)面的标准强度。
其他层:
在本实施方式中,该其他层由Ti碳化物层及Ti氮化物层中的一层或二层以上的Ti化合物层构成,可以将具有0.1~2.0μm的合计平均层厚的最内层以与工具基体相邻的方式设置在该工具基体与内层之间。在设置该最内层的情况下,更进一步发挥包覆工具的耐久性。在此,在最内层的合计平均层厚小于0.1μm时,不能充分起到设置最内层的效果,另一方面,在大于2.0μm时,晶粒容易粗大化,从而容易产生崩刃。
另外,在本实施方式中,该其他层由Ti氮化物层、Ti碳化物层及Ti碳氮化物层中的一层或二层以上的Ti化合物层构成,可以将具有0.1~4.0μm的合计平均层厚的最外层设置在外层的上部。当设置该最外层时,由于呈现出明显的色彩等效果,在包覆工具为刀片的情况下,容易进行切削使用后的拐角识别(コーナー識別,已使用部位的识别)。在此,在合计平均层厚小于0.1μm时,不能充分发挥设置最外层的效果,另一方面,在大于4.0μm时,容易产生崩刃。
工具基体:
在本实施方式中,工具基体可以使用硬质合金(WC基硬质合金:除了WC以外,还包括Co,进一步包括添加Ti、Ta、Nb等的碳氮化物而成的物质的合金等)、金属陶瓷(以TiC、TiN、TiCN等为主成分的陶瓷等)、陶瓷(氮化硅、赛隆、氧化铝等)或者cBN烧结体,但并不限定于此。
平均层厚的测定:
在此,例如能够使用聚焦离子束装置(FIB:Focused Ion Beam system)、截面抛光装置(CP:Cross section Polisher)等,制作用于观察硬质包覆层的任意位置的纵截面(利用与工具基体的表面垂直的面切断而成的截面)的试样,并且使用扫描型电子显微镜(SEM)或透射型电子显微镜(TEM:Transmission Electron Microscope)、扫描型透射电子显微镜(STEM:Scanning Transmission Electron Microscope)或者附带SEM或TEM的能量色散型X射线分析(EDX:Energy Dispersive X-ray spectrometry)装置观察该纵截面的多个部位(例如,五个部位)并取平均值,从而得到构成硬质包覆层的各层的平均层厚。
实施例
接着,对实施例进行说明。
在此,虽然作为实施例对适用于使用WC基硬质合金作为工具基体的刀片切削工具的情况进行描述,但作为工具基体使用前述的工具基体的情况也同样,而且适用于钻头、立铣刀的情况也是同样的。
作为原料粉末,准备均具有1~3μm的平均粒径的WC粉末、TiC粉末、TiN粉末、NbC粉末、Cr3C2粉末及Co粉末,按表1所示的配合组成配合这些原料粉末,并且进一步加入蜡,在丙酮中进行球磨混合24小时,在减压干燥之后,以98MPa的压力压制成型为规定形状的压坯体,将该压坯体在5Pa的真空中、在1370~1470℃的范围内的规定温度保持1小时的条件下进行真空烧结,在烧结之后,分别制造具有ISO规格的CNMG120412的刀片形状的WC基硬质合金制的工具基体A~B。
接着,在这些工具基体A~B的表面进行主要层的成膜。在主要层中,关于内层和外层,根据表2所示的成膜条件进行成膜,关于下部中间层、上部中间层和结合辅助层,根据表3所示的成膜条件进行成膜,并且紧接着进行该表3所示的氧化处理,制成表6所示的本发明包覆工具1~6。此外,除了实施例工具1和4以外,根据表4所示的成膜条件进行最内层和/或最外层(Ti氮化物层)的成膜。
为了进行比较,在这些工具基体A~B的表面,根据表2、表3或表5所示的以上述专利文献1所记载的成膜条件为标准的成膜条件,进行硬质包覆层的成膜,制成表6所示的比较例工具1~6。该比较包覆工具为:不存在下部中间层或虽然转用本发明包覆工具的成膜条件进行成膜但是下部中间层的平均层厚不满足本发明的一实施方式中规定的范围的包覆工具;不具有上部中间层或其平均层厚不满足本发明的一实施方式中规定的范围的包覆工具;以及结合辅助层的平均层厚不满足本发明的一实施方式中规定的范围的包覆工具。另外,利用SEM(倍率500~5000倍)进行观察,其结果相当于本发明的一实施方式的结合辅助层的TiCNO层均具有针状组织。此外,与实施例同样,除了比较例工具1和4以外,根据表4所示的成膜条件进行最内层和/或最外层(Ti氮化物层)的成膜。
[表1]
Figure BDA0003853858560000071
*“-”表示不含有。
[表2]
Figure BDA0003853858560000072
[表3]
Figure BDA0003853858560000081
α:从成膜开始到10分钟
β:成膜开始经过10分钟后[表4]
Figure BDA0003853858560000091
[表5]
Figure BDA0003853858560000092
Figure BDA0003853858560000101
接着,关于上述实施例工具1~6和上述比较例工具1~6,在均用固定夹具夹持到工具钢制车刀的前端部的状态下,实施球墨铸铁、合金钢的干式车床的切削试验1和切削试验2,评价切削性能。切削试验如下所述。
切削试验1
对象:实施例工具1~3和比较例工具1~3
工件:FCD700
切削速度:400m/min
进给量:0.3mm/rev
切削深度:1.5mm
切削时间:1道次1分钟
评价:在每1分钟切削时间用放大率为2倍的放大镜观察切削刃,测定直到能够确认α型氧化铝层的剥离为止的时间。
将结果示于表7。
切削试验2
对象:实施例工具4~6及比较例工具4~6
工件:SNCM439
切削速度:200m/min
进给量:0.55mm/rev
切削深度:4mm
切削时间:2分钟
评价:观察切削时间2分钟后的崩刃产生状况
对各工具评价五个拐角,以产生崩刃的拐角数进行了评价。
将结果示于表8。
[表7]
Figure BDA0003853858560000121
[表8]
Figure BDA0003853858560000122
由表7及表8的结果明确可知,实施例工具即便提供于球墨铸铁的刀尖承受较大负担的切削加工、合金钢的刀尖承受较大负担的切削加工,也呈现出良好的切削性能,然而比较例工具在短时间内α型氧化铝(Al2O3)层剥离或者产生较多崩刃,在短时间内达到寿命。
前述公开的实施方式在所有方面只是示例性的,而不是限制性的。本发明的范围是由权利要求书表现,而不是由前述的实施方式表现,旨在包括与权利要求书等同的意义及范围内的所有变更。
附图标记说明
1 硬质包覆层
2 内层(Ti碳氮化物层)
3 下部中间层(Ti氮化物层)
4 上部中间层(Ti碳氮化物层)
5 结合辅助层(Ti碳酸化物层)
6 外层(α型氧化铝层)
7 柱状粒子
8 工具基体

Claims (1)

1.一种表面包覆切削工具,具有工具基体和该工具基体上的硬质包覆层,其特征在于,
所述硬质包覆层从所述工具基体朝向表面依次具有内层、下部中间层、上部中间层、结合辅助层和外层,
所述内层为Ti碳氮化物层且平均层厚为4.0~20.0μm,
所述下部中间层为Ti氮化物层且平均层厚为0.1~2.0μm,
所述上部中间层为Ti碳氮化物层且平均层厚为0.1~2.5μm,
所述下部中间层的Ti氮化物的晶界和所述上部中间层的Ti碳氮化物的晶界与所述内层的Ti碳氮化物的晶界连续,
所述结合辅助层为Ti碳氮氧化物层且平均层厚为3~80nm,
所述外层为α型氧化铝层且平均层厚为2.0~20.0μm,
所述内层和所述上部中间层的Ti碳氮化物的织构系数TC(422)为3.0以上,所述外层的α型氧化铝的织构系数TC(0 0 12)为5.0以上。
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