CN115112045A - Interference measurement method based on all-fiber orthogonal polarization optical path matching short coherent light source - Google Patents
Interference measurement method based on all-fiber orthogonal polarization optical path matching short coherent light source Download PDFInfo
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Abstract
The invention discloses an interference measurement method based on full-fiber cross-polarization optical path matching short coherent light source, which uses a short coherent laser, a first polarization maintaining fiber, a fiber polarization beam splitter, a second polarization maintaining fiber, a fiber adjustable attenuator, a third polarization maintaining fiber, a fourth polarization maintaining fiber, a fiber delay line, a fifth polarization maintaining fiber, a fiber polarization beam combiner and a sixth polarization maintaining fiber to form a full-fiber cross-polarization optical path matching short coherent light source; aiming at the interference characteristic of short coherent light, compensating the optical path difference between reference light and test light in the interferometer by using an optical fiber delay line to realize optical path matching; the optical fiber adjustable attenuator is used for adjusting the light intensity difference between two orthogonal polarized lights to realize light intensity matching so as to obtain clear and stable interference fringes and finish short coherence interferometry. Compared with the prior art, the method provided by the invention can ensure the stability of the interference fringes, improve the integration level, simplicity and anti-interference capability of the short coherence interferometry device, and is more suitable for industrialization.
Description
Technical Field
The invention belongs to the technical field of optical interferometry, and particularly relates to an interferometric measurement method based on all-fiber orthogonal polarization optical path matching short coherent light sources.
Background
With the progress of society and science and technology, optics is widely used in scientific research and production and manufacture, and optical elements are becoming more abundant and diversified as carriers for optical technology implementation. The diversification of optical elements not only needs to rely on high-end manufacturing capability, but also needs high-precision detection capability as a reference standard. The precision of the optical interference measurement technology can reach the nanometer level and has the characteristic of non-contact, the optical interference measurement technology is widely accepted and used in the field of optical detection, and accurate surface type information of elements can be efficiently obtained by processing and resolving interference fringe images.
The short coherent light source has short coherent length and poor temporal coherence, the incoherent optical path difference between two light waves generated by the short coherent light source is extremely small, interference fringes can be observed basically near the position with zero optical path difference, and only a few fringes exist, by utilizing the characteristic, the short coherent interferometry can overcome the defect of monochromatic light fringe level ambiguity, the vertical axis detection range of the interferometry is greatly expanded, and the difficult problems in some monochromatic light interferometry can be solved, such as: and (4) detecting the piston error between the sub-mirrors of the large-scale spliced telescope.
In short coherence interferometry, aiming at the distance between an element to be measured and a standard element, particularly a large light source element with cavity length difficult to change by moving a mirror to be measured, optical path matching at the position of a light source in a certain mode is a more rapid and effective mode; aiming at the problem of poor fringe contrast caused by mismatching of the light intensities of the reference light beam and the measuring light beam, an effective adjusting mechanism needs to be added at the position of a light source to adjust the light intensity of the coherent light beam; compared with the existing free space scheme, the all-fiber light source structure has stronger anti-interference capability, more flexible structure and maneuverability, no need of optical alignment, realization of instant use in succession on the premise of no instability and accuracy, simpler and easier construction and operation, and more suitability for industrialization. The invention provides an interference measurement method based on full-optical-fiber orthogonal polarization optical path matching short coherent light source, which can be adapted to interferometers with different structures to complete short coherent interference measurement, and adopts an optical fiber delay line and an optical fiber adjustable attenuator to respectively solve two key problems of optical path matching and light intensity matching in short coherent interference.
Disclosure of Invention
The invention aims to provide an interference measurement method based on an all-fiber orthogonal polarization optical path matching short coherent light source, which has the advantages of high device integration, simplicity and easiness in operation, strong anti-jamming capability and higher suitability for industrialization.
The technical solution for realizing the purpose of the invention is as follows: an interference measurement method based on all-fiber orthogonal polarization optical path matching short coherent light source comprises the following steps:
step 1, connecting the all-fiber orthogonal polarization optical path matching short coherent light source with an interferometer.
The all-fiber cross-polarization optical path matching short coherent light source comprises a short coherent laser, a first polarization maintaining fiber, a fiber polarization beam splitter, a second polarization maintaining fiber, an optical fiber adjustable attenuator, a third polarization maintaining fiber, a fourth polarization maintaining fiber, an optical fiber delay line, a fifth polarization maintaining fiber, a fiber polarization beam combiner and a sixth polarization maintaining fiber.
And 2, placing the tested piece in a test light path of the interferometer, and controlling the length of the interference cavity to be a free space equivalent light path of the difference value of the lengths of the S light path and the P light path in the all-fiber orthogonal polarization light path matching short coherent light source.
And 3, opening the short coherent laser, adjusting the optical path difference between orthogonal polarized beams through the optical fiber delay line, observing the contrast change of the gray level image received by the polarization camera of the interferometer, and further adjusting when sudden change occurs and interference fringes appear, namely the position near the optimal optical path matching position, wherein when the interference fringes are clearest and the contrast is the optimal optical path matching position, namely the zero optical path position.
And 4, adjusting the light intensity difference between the orthogonal polarized beams through the optical fiber adjustable attenuator until the contrast of the interference fringes is optimal.
And 5, acquiring a short coherent interference fringe pattern through an interferometer polarization camera, and resolving by using a four-step phase-shifting algorithm.
Compared with the prior art, the invention has the remarkable advantages that:
(1) the light source device is a highly integrated all-fiber structure, combines with a dynamic interferometer, can resist environmental vibration and air flow interference, has low requirement on environment, has more flexible structure and maneuverability, does not need complicated optical alignment during device installation, can realize instant use on the premise of no instability and precision, and is more suitable for industrialization compared with a free space scheme;
(2) the light source device can generate a pair of short coherent orthogonal linear polarized light with adjustable optical path difference and matched light intensity, and clear interference fringes can be obtained without moving a measured piece to change the cavity length of the interferometer;
(3) the short coherent light source is adopted, so that the influence of stray stripes in the system on the measurement result can be avoided;
(4) the optical fiber delay line which is widely used and verified in the communication industry is adopted to regulate and control the optical path difference, and the scheme has strong reliability;
(5) the test process is simple, and the adjustment is convenient.
Drawings
FIG. 1 is a flow chart of an interferometric method based on all-fiber cross-polarization optical path matching short coherent light sources.
FIG. 2 is a schematic structural diagram of an all-fiber cross-polarization optical path matching short-coherence light source according to the present invention.
Fig. 3 is a schematic diagram of the optical path delay principle of the optical fiber delay line.
FIG. 4 is a schematic diagram of interference wave packets formed during scanning of profiles of different heights on the surface of a measured object.
FIG. 5 is a schematic diagram of an optical fiber tunable attenuator.
FIG. 6 is a schematic diagram of the optical path structure of the present invention applied to a Taeman-Green type dynamic interferometer.
Fig. 7 is a schematic diagram of an optical path structure applied to a fizeau-type dynamic interferometer.
Detailed Description
The present invention is described in further detail below with reference to the attached drawing figures.
With reference to fig. 1 and fig. 2, an interferometric method based on an all-fiber orthogonal polarization optical path matching short coherent light source includes the following steps:
step 1, connecting the all-fiber orthogonal polarization optical path matching short coherent light source with an interferometer 8 through an optical fiber connector 7.
The all-fiber orthogonal polarization optical path matching short coherent light source comprises: the device comprises a short coherent laser 1, a first polarization maintaining fiber 2-1, an optical fiber polarization beam splitter 3, a second polarization maintaining fiber 2-2, an optical fiber adjustable attenuator 4, a third polarization maintaining fiber 2-3, a fourth polarization maintaining fiber 2-4, an optical fiber delay line 5, a fifth polarization maintaining fiber 2-5, an optical fiber polarization beam combiner 6 and a sixth polarization maintaining fiber 2-6.
Further, the short coherence laser 1 is connected with an optical fiber polarization beam splitter 3 through a first polarization maintaining fiber 2-1, and the optical fiber polarization beam splitter 3 divides the optical path into two paths, namely a P optical path and an S optical path; the P light path is sequentially provided with a second polarization maintaining optical fiber 2-2, an optical fiber adjustable attenuator 4 and a third polarization maintaining optical fiber 2-3; the S optical path is sequentially provided with a fourth polarization maintaining optical fiber 2-4, an optical fiber delay line 5 and a fifth polarization maintaining optical fiber 2-5; the optical fiber polarization beam combiner 6 combines the optical paths into one path again and is connected with the optical fiber joint 7 through the sixth polarization-maintaining optical fibers 2-6.
Further, the method is carried out. The output light of the short coherent laser 1 is wide spectrum linear polarization laser, and the laser frequency and power stability meet the stability requirement of interference measurement fringes.
And 2, placing the tested piece 9 in a test light path of the interferometer 8, and controlling the length of the interference cavity to be a free space equivalent light path of the difference value of the lengths of the S light path and the P light path in the all-fiber orthogonal polarization light path matching short coherent light source.
Referring to fig. 3, the fiber delay line 5 includes a fiber coupling input port 10, a fiber coupling output port 11, a pyramid prism 12, a screw 13, and an adjusting nut 14. The S light is transmitted to the optical fiber coupling input port 10 through the fourth polarization maintaining optical fiber 2-4, then transmitted to the pyramid prism 12 through the free space in a collimated light beam mode, and is reflected back to the free space in parallel due to the parallel property of incident light and emergent light of the pyramid prism 12, generates a certain radial offset, is finally received by the optical fiber coupling output port 11 which is spaced from the optical fiber coupling input port 11 by the radial offset of the incident light and the emergent light of the pyramid prism 12 and is output by the fifth polarization maintaining optical fiber 2-5; the adjusting nut 14 is rotated to drive the screw 13 to make the pyramid prism 12 translate, so as to adjust the optical path delay of the S light.
And with reference to fig. 4, the height profile of the surface of the measured part 9 is scanned by adjusting the optical fiber delay line 5, interference wave packets can be formed on the profiles with different heights on the surface of the measured part 9 in the scanning process, the pixel points on different horizontal positions on the polarization camera of the interferometer 8 can obtain the brightness change of the corresponding interference wave packets in the adjusting process, the contrast change of the gray level image received by the polarization camera of the interferometer 8 is observed, when sudden change occurs and interference fringes appear, the gray level image is near the optimal position of optical path matching, the adjustment is further performed, when the interference fringes are clearest, and the optimal contrast is the optimal position of optical path matching, namely the peak position of the interference wave packets.
Further, the adjustment precision of the optical fiber delay line 5 is much smaller than the coherence length of the broad spectrum linear polarization laser output by the short coherent laser 1, and the adjustment range is much larger than the maximum value of the surface topography height difference of the measured piece 9.
And 4, adjusting the light intensity difference between the orthogonal polarized beams through the optical fiber adjustable attenuator 4 until the contrast of the interference fringes is optimal.
Referring to fig. 5, the optical fiber adjustable attenuator 4 is composed of an input optical fiber 2-2, a collimating lens 15, a focusing lens 16, a blocking device 17 and an output optical fiber 2-3; input fiber 2-2 and output fiber 2-3, i.e., second polarization maintaining fiber 2-2 and third polarization maintaining fiber 2-3. The collimating lens 15 expands the P light from the fiber space to the free space, the adjusting screw is rotated to move the blocking device 17 to the beam path to block part of the free space beam, then the focusing lens 16 couples the light to the output fiber 2-3 to manually change the coupling efficiency until the required attenuation, i.e. the best contrast of interference fringes, is obtained, at this time, the P light passing through the fiber adjustable attenuator 4 is matched with the S light passing through the fiber delay line 5 in light intensity.
And 5, acquiring a short coherent interference fringe pattern through an interferometer 8 polarization camera, and resolving by using a four-step phase-shifting algorithm.
Example 1
Fig. 6 is a schematic diagram of an optical path structure of a tmann-golling dynamic interferometer 8-1 to which the interferometric method based on the all-fiber orthogonal polarization optical path matching short coherent light source of the present invention is applied.
Step 1, connecting an all-fiber orthogonal polarization optical path matching short coherent light source with a Taeman-Green type dynamic interferometer 8-1 through an optical fiber connector 7.
And 2, placing the tested piece 9 in a detection light path, and controlling the difference value between the distance between the tested piece 9 and the polarization beam splitter 19 and the distance between the standard piece 21 and the polarization beam splitter 18, namely the interference cavity length to be the free space equivalent value of the difference value between the S light path and the P light path in the all-fiber orthogonal polarization light path matching short coherent light source.
The optical fiber delay line 5 is used to adjust the optical path difference between the S light and the P light in the all-fiber orthogonal polarization optical path matching short coherent light source, and when the optical path difference between the two light beams is equal to the interference cavity length, that is, at the position of zero optical path difference, the polarization camera 22 will receive the interference fringes.
And 4, adjusting the optical fiber adjustable attenuator 4, and performing light intensity matching on the two dry light beams to improve the fringe contrast so as to finally obtain clear short coherent interference fringes with the best contrast.
And 5, recording positions of corresponding interference fringe peak value optical path differences generated at different points on the surface to be measured, and calculating the phase-shifting interference pattern generated by the polarization camera 22 through a four-step phase-shifting algorithm to obtain the surface height appearance of the measured piece 9.
Example 2
With reference to fig. 7, the interferometric method based on the all-fiber orthogonal polarization optical path matching short coherent light source of the present invention is applied to the optical path structure diagram of the fizeau-type dynamic interferometer 8-2.
Step 1, connecting the all-fiber orthogonal polarization optical path matching short coherent light source with a Fizeau type dynamic interferometer 8-2 through an optical fiber connector 7.
And 2, placing the tested piece 9 in a detection light path, and controlling the distance between the tested piece 9 and the standard piece 26, namely the length of an interference cavity, to be a free space equivalent value of the length difference between an S light path and a P light path in the all-fiber orthogonal polarization light path matching short coherent light source.
And 3, turning on the short-coherence laser 1, expanding the beam of a pair of orthogonal linear polarized lights which are output by the all-fiber orthogonal polarized light matching short-coherence light source and have certain optical path difference and are matched in light intensity, transmitting the light by half through the beam splitter prism 24 and reflecting the light by half, wherein the transmitted light is collimated by the collimating lens 25, then reflecting the light by one beam through the rear surface of the standard part 26 and the front surface of the tested part 9, transmitting the light by half again after passing through the beam splitter prism 24 and reflecting the light by half, wherein the reflected light penetrates through the imaging lens 27 and forms an image on the target surface of the polarization camera 29 after passing through the lambda/4 wave plate 28, adjusting the fiber delay line 5 to change the optical path difference between the S light and the P light, and when the S light reflected by the rear surface of the standard part 26 and the P light reflected by the front surface of the tested part 9 meet the condition of zero optical path difference, the polarization camera 29 receives interference fringes.
And 4, adjusting the optical fiber adjustable attenuator 4 to enable the light intensity of the S light and the light intensity of the P light to be matched, and enabling the contrast ratio of the interference fringes to be optimal.
And 5, recording positions of corresponding interference fringe peak value optical path differences generated at different points on the surface to be measured, and calculating the phase-shifting interference pattern generated by the polarization camera 29 through a four-step phase-shifting algorithm to obtain the surface height morphology of the measured piece 9.
In conclusion, the invention can be applied to interferometers with different structures, clear short coherent interference fringes can be obtained without changing the cavity length of the interferometer, the stability of the interference fringes is ensured, the integration level, the simplicity and the anti-interference capability of a short coherent interference measurement device are improved, and the invention is more suitable for industrialization.
Claims (7)
1. An interference measurement method based on all-fiber orthogonal polarization optical path matching short coherent light source is characterized by comprising the following steps:
step 1, connecting an all-fiber orthogonal polarization optical path matching short coherent light source with an interferometer (8) through an optical fiber joint (7);
the all-fiber orthogonal polarization optical path matching short coherent light source comprises a short coherent laser (1), a first polarization maintaining fiber (2-1), a fiber polarization beam splitter (3), a second polarization maintaining fiber (2-2), an optical fiber adjustable attenuator (4), a third polarization maintaining fiber (2-3), a fourth polarization maintaining fiber (2-4), an optical fiber delay line (5), a fifth polarization maintaining fiber (2-5), an optical fiber polarization beam combiner (6) and a sixth polarization maintaining fiber (2-6);
step 2, placing the tested piece (9) in a test light path of an interferometer (8), and controlling the length of an interference cavity to be a free space equivalent light path of a difference value between the lengths of an S light path and a P light path in a full-fiber orthogonal polarization light path matching short coherent light source;
step 3, opening the short coherent laser (1), adjusting the optical path difference between orthogonal polarized beams through the optical fiber delay line (5), observing the contrast change of a gray level image received by a polarization camera of the interferometer (8), and further adjusting when sudden change occurs and interference fringes appear, namely the position near the optimal optical path matching position, wherein when the interference fringes are clearest and the contrast is the optimal optical path matching position, namely the zero optical path position;
step 4, adjusting the light intensity difference between orthogonal polarized beams through the optical fiber adjustable attenuator (4) until the contrast of interference fringes is optimal;
and 5, acquiring a short coherent interference fringe pattern through a polarization camera of the interferometer (8), and resolving by using a four-step phase-shifting algorithm.
2. The interferometry method based on the all-fiber orthogonal polarization optical path matching short coherent light source according to claim 1, wherein: in the all-fiber orthogonal polarization optical path matching short coherent light source, a short coherent laser (1) is connected with an optical fiber polarization beam splitter (3) through a first polarization maintaining fiber (2-1), and the optical fiber polarization beam splitter (3) divides an optical path into two paths, namely a P optical path and an S optical path; a second polarization maintaining optical fiber (2-2), an optical fiber adjustable attenuator (4) and a third polarization maintaining optical fiber (2-3) are sequentially arranged along the light path of the P light; a fourth polarization maintaining optical fiber (2-4), an optical fiber delay line (5) and a fifth polarization maintaining optical fiber (2-5) are sequentially arranged along the optical path of the S light; the output ends of the third polarization maintaining optical fiber (2-3) and the fifth polarization maintaining optical fiber (2-5) are connected with an optical fiber polarization beam combiner (6), the two optical paths are combined into one path again by the optical fiber polarization beam combiner (6), and the optical fiber polarization beam combiner is connected with an optical fiber joint (7) through the sixth polarization maintaining optical fiber (2-6);
the short coherent laser (1) outputs light which enters an optical fiber polarization beam splitter (3) through a first polarization maintaining fiber (2-1), and the optical fiber polarization beam splitter (3) divides the light beam into two short coherent orthogonal linearly polarized light beams, namely S light and P light; after the P light is input into the optical fiber adjustable attenuator (4) through the second polarization maintaining light beam (2-2), the P light beam with the attenuation adjusted is input into the optical fiber polarization beam combiner (6) through the third polarization maintaining optical fiber (2-3); s light is input into the optical fiber delay line (5) through the fourth polarization maintaining optical fiber (2-4), and is input into the optical fiber polarization beam combiner (6) through the fifth polarization maintaining optical fiber (2-5) after the optical path is adjusted through the optical fiber delay line (5); the processed P light and S light are combined by the optical fiber polarization beam combiner (6) to form short coherent orthogonal polarized light with adjustable optical path difference, and a pair of linearly polarized light with adjustable optical path difference and orthogonal polarization direction is output by connecting the sixth polarization-maintaining optical fiber (2-6) with the optical fiber connector (7).
3. The all-fiber cross-polarization optical path matching short coherent light source of claim 2, wherein: the output light of the short coherent laser (1) is wide spectrum linear polarization laser, and the laser frequency and power stability meet the stability requirement of interference measurement fringes.
4. The all-fiber cross-polarization optical path matching short coherent light source of claim 3, wherein: the optical fiber polarization beam splitter (3) comprises a first input port, a first output port and a second output port, wherein the first output port is a P optical output port, and the second output port is an S optical output port; the first polarization maintaining fiber (2-1) is connected with the first input port, and the slow axis direction of the first polarization maintaining fiber is aligned with the light splitting direction of the optical fiber polarization beam splitter (3) at an angle of 45 degrees; the second polarization-maintaining optical fiber (2-2) is connected with the first output port, and the slow axis direction of the second polarization-maintaining optical fiber is parallel to the P light polarization direction; and a fourth polarization maintaining optical fiber (2-4) is connected with the second output port, and the slow axis direction of the fourth polarization maintaining optical fiber is parallel to the S light polarization direction.
5. The all-fiber cross-polarization optical path matching short coherent light source of claim 4, wherein: the optical path delay of the optical fiber delay line (5) is adjusted by rotating the nut, the adjusting range is far larger than the vertical axis measuring range required by detecting the surface topography of the detected piece (9), and the adjusting precision is far smaller than the coherence length of the wide spectrum linear polarization laser output by the short coherent laser (1).
6. The all-fiber cross-polarization optical path matching short coherent light source of claim 5, wherein: the optical fiber polarization beam combiner (6) comprises a second input port, a third input port and a third output port, wherein the second input port is a P optical input port, and the third input port is an S optical input port; the third polarization maintaining fiber (2-3) is connected with the second input port, and the slow axis direction of the third polarization maintaining fiber is the same as that of the second polarization maintaining fiber (2-2); the fifth polarization maintaining optical fiber (2-5) is connected with the third input port, and the slow axis direction of the fifth polarization maintaining optical fiber is the same as that of the fourth polarization maintaining optical fiber (2-4); and the sixth polarization maintaining optical fiber (2-6) is connected with the third output port, and the slow axis direction of the sixth polarization maintaining optical fiber is the same as that of the third polarization maintaining optical fiber (2-3).
7. The interferometry method based on the all-fiber orthogonal polarization optical path matching short coherent light source according to claim 1, wherein: the interferometer (8) adopts a Taeman-Grilin type or Fizeau type dynamic interferometer.
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| RENHUI GUO等: "《Surface defect measurement of ICF capsules under a limited depth of field》", 《OPTICS EXPRESS》 * |
| XINYU MIAO等: "《Optical phase-shifting methods based on low coherence laser for large aperture Fizeau interferometer》", 《OPTICS AND LASERS IN ENGINEERING》 * |
| ZHIGANG HAN等: "《All-fiber orthogonal-polarized white-noise-modulated laser for short-coherence dynamic interferometry》", 《OPTICS EXPRESS》 * |
| 孙沁园，等: "《采用短相干光源的动态斐索干涉仪》", 《红外与激光工程》 * |
| 杨光，等: "《用于液晶盒表面面形检测的短相干载频干涉方法》", 《液晶与显示》 * |
| 王军，等: "《基于短相干光干涉的平行平板型光学元件面形测量》", 《激光与光电子学进展》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN116242278A (en) * | 2023-05-11 | 2023-06-09 | 山东高速工程检测有限公司 | Orthogonal optical fiber interference fringe projector for three-dimensional measurement of asphalt pavement texture |
| CN116242278B (en) * | 2023-05-11 | 2023-07-11 | 山东高速工程检测有限公司 | Orthogonal optical fiber interference fringe projector for three-dimensional measurement of asphalt pavement texture |
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| CN115112045B (en) | 2024-03-26 |
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