CN110017793A - A kind of Dual-channel type anti-vibration interferometric measuring means and method - Google Patents
A kind of Dual-channel type anti-vibration interferometric measuring means and method Download PDFInfo
- Publication number
- CN110017793A CN110017793A CN201910285098.2A CN201910285098A CN110017793A CN 110017793 A CN110017793 A CN 110017793A CN 201910285098 A CN201910285098 A CN 201910285098A CN 110017793 A CN110017793 A CN 110017793A
- Authority
- CN
- China
- Prior art keywords
- light
- interference
- vibration
- measured piece
- dual
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/02075—Reduction or prevention of errors; Testing; Calibration of particular errors
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Instruments For Measurement Of Length By Optical Means (AREA)
Abstract
The invention discloses a kind of Dual-channel type anti-vibration interferometric measuring means and methods, device includes setting gradually for carrying out the light source beam-expanding collimation system of beam-expanding collimation to light source, for detecting the auxiliary interferometer measuration system of measured piece vibration phase plane, for combining the main interference measuring system and measured piece light path system of auxiliary interferometer measuration system measurement measured piece phase distribution；Light source beam-expanding collimation system and the same optical axis of measured piece light path system are denoted as primary optic axis, and auxiliary interferometer measuration system and the optical axis of main interference measuring system are denoted as the second optical axis, third optical axis respectively, vertical with primary optic axis；Light source beam-expanding collimation system, main interference measuring system and measured piece light path system constitute main Thailand it is graceful-Green's optical interference circuit；Light source beam-expanding collimation system, auxiliary interferometer measuration system and measured piece light path system, which are constituted, assists safe graceful-Green's optical interference circuit.Not only anti-vibration effect is good, measurement accuracy is high for apparatus and method of the present invention, and simple and compact for structure, and cost is relatively low.
Description
Technical field
The invention belongs to interference of light metrology and measurement field, especially a kind of Dual-channel type anti-vibration interferometric measuring means and side
Method.
Background technique
Nowadays optical interferometry technology is widely used to measure optical component surface shape, traditional optical interference means and measurement
Method is all kinds of, such as the devices such as Michelson's interferometer, safe graceful interferometer, fizeau interferometer and phase-shifting method interferometry,
The measuring techniques such as fourier transform method interferometry, shearing interferometry measurement and difference interference measuring.But these methods develop to
The present, the requirement to measurement environment is all very stringent, can not especially accurately measure tested phase under vibration.
It is existing to there is the interference device of preferable robustness and measurement method to be broadly divided into two major classes ambient vibration, it is a kind of
It is that vibration problem is solved from data processing algorithm, this kind of scheme does not make any changes on interference device, normal acquisition one
Serial interference pattern is calculated with data processing algorithm by ambient vibration bring error, so that phase calculation is more quasi-
Really.In such methods there are many kinds of data processing algorithms, but measurement error will show when interference pattern fringe number is less
Out, especially zero interference fringe.It is another kind of to vibrate bring influence mainly from interference device to overcome, it is more commonly used
Be to be solved in striking rope type interference with common path instrument with synchronous four step phase-shifting methods, striking rope type interference device inherently has centainly
Antivibration effect, then interfering beam is divided into four beams behind optical path, introduces different shiftings by polarizer in every light beams
Phasor can acquire fourth officer phase-shift interference simultaneously, and vibration can effectively be overcome to influence measurement bring.In this kind of schemes
In, the relative space position relationship between each phase shift figure is unknown, and its relative position lacks the calibration technique of mature and reliable,
Location matches error is easily led to, measurement accuracy is influenced.
Summary of the invention
Ambient vibration bring influences, improves measurement accuracy when overcoming interferometry the purpose of the present invention is to provide one kind
Dual-channel type anti-vibration interferometric measuring means and method.
The technical solution for realizing the aim of the invention is as follows: a kind of Dual-channel type anti-vibration interferometric measuring means, including according to
Secondary setting: for carrying out the light source beam-expanding collimation system of beam-expanding collimation to light source, for detecting measured piece vibration phase plane
Auxiliary interferometer measuration system, for combine auxiliary interferometer measuration system measurement measured piece phase distribution main interference measure system
System and measured piece light path system；
Light source beam-expanding collimation system and the same optical axis of measured piece light path system are denoted as primary optic axis, assist interferometer measuration system
It is denoted as the second optical axis, third optical axis respectively with the optical axis of main interference measuring system, it is vertical with primary optic axis；Light source beam-expanding collimation
System, main interference measuring system and measured piece light path system constitute main Thailand it is graceful-Green's optical interference circuit；Light source beam-expanding collimation system,
Interferometer measuration system and measured piece light path system auxiliary is assisted to constitute safe graceful-Green's optical interference circuit.
Measurement method based on above-mentioned Dual-channel type anti-vibration interferometric measuring means, comprising the following steps:
Step 1, light source beam-expanding collimation system are emitted linearly polarized light, and are carried out by auxiliary interferometer measuration system to linearly polarized light
Transmission and reflection；
The transmitted light of step 1 is divided into orthogonal p light and s light by step 2, main interference measuring system, and s light is surveyed through main interference
Amount system forms first reference light orthogonal with original s light；P light forms test light through measured piece light path system and measures through main interference
Systematic reflection and transmission obtain the first test light, the second test light respectively；
Step 3, the reflected light of step 1 are through assisting interferometer measuration system to reflect to form the second reference light；
Step 4, the first test light and the first reference light close beam through main interference measuring system and generate interference, adjust measured piece
Light path system keeps interference fringe sparse, acquires corresponding interference image sequence later；Second test light and the second reference light simultaneously
Beam is closed through auxiliary interferometer measuration system and generates interference, and adjusting auxiliary interferometer measuration system keeps interference fringe intensive, acquires later
Corresponding interference image sequence；
Step 5, the interference pattern obtained according to step 4, resolve the phase distribution of measured piece.
Compared with prior art, the present invention its remarkable advantage are as follows: 1) present invention using Dual-channel type Thailand it is graceful-Green interference
Device and measurement method can acquire two path interferometric signals simultaneously, resolve the plane of oscillation all the way, resolve tested phase, energy all the way
Realization efficiently and rapidly measures, and vibration bring in measurement can be overcome to influence；2) apparatus of the present invention not only can solve ring
Border vibrates the influence to measurement, and simple and compact for structure, and measurement method is ingenious understandable, at low cost.
Present invention is further described in detail with reference to the accompanying drawing.
Detailed description of the invention
Fig. 1 is Dual-channel type anti-vibration interferometric measuring means structural schematic diagram of the present invention.
Fig. 2 is a width interference pattern of main interference measuring system acquisition in the embodiment of the present invention.
Fig. 3 is a width interference pattern of auxiliary interferometer measuration system acquisition in the embodiment of the present invention.
Fig. 4 is the optical element phase distribution schematic diagram obtained in the embodiment of the present invention using the present invention program measurement.
Fig. 5 is to measure same optical element phase distribution signal using traditional four-step phase shift scheme in the embodiment of the present invention
Figure.
Specific embodiment
In conjunction with Fig. 1, a kind of Dual-channel type anti-vibration interferometric measuring means of the present invention, including what is set gradually: for light
Source carries out the light source beam-expanding collimation system 24 of beam-expanding collimation, for detecting the auxiliary interferometry system of measured piece vibration phase plane
System 25 measures the main interference measuring system 27 of measured piece phase distribution for combination auxiliary interferometer measuration system 25, and tested
Part light path system 28；
Light source beam-expanding collimation system 24 and the same optical axis of measured piece light path system 28 are denoted as primary optic axis, assist interferometry
The optical axis of system 25 and main interference measuring system 27 is denoted as the second optical axis, third optical axis respectively, vertical with primary optic axis；Light source
Beam-expanding collimation system 24, main interference measuring system 27 and measured piece light path system 28 constitute main Thailand it is graceful-Green's optical interference circuit；Light
Source beam-expanding collimation system 24, auxiliary interferometer measuration system 25 and measured piece light path system 28, which are constituted, assists safe graceful-Green's interference light
Road.
Further, light source beam-expanding collimation system 24 includes laser assembly 1, the half-wave plate set gradually along primary optic axis
2, the first object lens 3, the first diaphragm 4 and the second object lens 5；The laser assembly 1 includes linearly polarized laser device, or including laser
And the polarizer；
Main interference measuring system 27 includes the first standard reference lens 12 set gradually along third optical axis, the first a quarter
Wave plate 13, polarization splitting prism 7, the first polarizing film 18, be made of third object lens 19, the second diaphragm 20 and the 4th object lens 21
One shrink beam imaging system and the first planar array detector 23；
Auxiliary interferometer measuration system 25 includes the second standard reference lens 11 set gradually along the second optical axis, beam splitter prism 6,
Second polarizing film 14, the second shrink beam imaging system being made of the 5th object lens 15, third diaphragm 16 and the 6th object lens 17, Yi Ji
Two planar array detectors 22；
Polarization splitting prism 7 and beam splitter prism 6 are located on primary optic axis simultaneously；Second standard reference lens 11 and first
Standard reference lens 12 are fixed on same adjustment frame 26, and adjustment frame 26 is used to adjust the tilt angle of reference mirror；
Measured piece light path system 28 includes the second quarter-wave plate 8 set gradually along primary optic axis, convergence objective lens 9
With measured piece 10.
It is further preferred that the light beam for being incident to polarization splitting prism 7 is divided into the p wave of transmission and the s wave of reflection, first
The fast axle of quarter-wave plate 13 and the angle of s wave are 45 °, and the fast axle of the second quarter-wave plate 8 and the angle of p wave are
22.5°。
It is further preferred that the first planar array detector 23, the second planar array detector 22 are CCD or CMOS camera.
Measurement method based on above-mentioned Dual-channel type anti-vibration interferometric measuring means, comprising the following steps:
Step 1, light source beam-expanding collimation system 24 are emitted linearly polarized light, and by auxiliary interferometer measuration system 25 to linearly polarized light
It is transmitted and is reflected；
The transmitted light of step 1 is divided into orthogonal p light and s light by step 2, main interference measuring system 27, and s light is through main interference
Measuring system 27 forms first reference light orthogonal with original s light；P light is through the formation test light of measured piece light path system 28 and through trunk
The reflection of measuring system 27 and transmission are related to, obtains the first test light, the second test light respectively；
Step 3, the reflected light of step 1 are through assisting interferometer measuration system 25 to reflect to form the second reference light；
Step 4, the first test light and the first reference light close beam through main interference measuring system 27 and generate interference, adjust tested
Part light path system 28 keeps interference fringe sparse, acquires corresponding interference image sequence later；Second test light and the second ginseng simultaneously
Light is examined to close beam through auxiliary interferometer measuration system 25 and generate interference, adjusting auxiliary interferometer measuration system 25 keeps interference fringe intensive,
Corresponding interference image sequence is acquired later；
Step 5, the interference pattern obtained according to step 4, resolve the phase distribution of measured piece 10.
Further, step 1 specifically:
It is made of linearly polarized laser device 1, half-wave plate 2, the first object lens 3, the first diaphragm 4 and the second object lens 5 set gradually
Light source beam-expanding collimation system 24 be emitted linearly polarized light, and be incident to auxiliary interferometer measuration system 25 beam splitter prism 6, beam splitting rib
Mirror 6 is transmitted and is reflected to linearly polarized light.
Further, step 2 specifically:
The transmitted light of step 1 is divided into orthogonal p light and s light by the polarization splitting prism 7 of main interference measuring system 27；
Later, s light becomes circularly polarized light through the first quarter-wave plate 13, then through the reflection of the first standard reference lens 12, the
One quarter-wave plate 13 forms first reference light orthogonal with original s light, and the first reference light is incident to after polarizing beam splitter mirror 7 thoroughly
It penetrates；
P light becomes elliptically polarized light through the second quarter-wave plate 8, anti-through measured piece 10 again after converging objective lens 9
Penetrating becomes test light, which becomes linearly polarized light through four point of one wave plate 8 and be incident to polarization splitting prism 7,
And the angular separation of the linearly polarized light and p light is 45 °；Polarization splitting prism 7 is reflected and is transmitted to linearly polarized light, reflected light
The first test light of Shu Jiwei, transmitted light beam are denoted as the second test light.
Further, step 3 specifically: the reflected light of step 1 reflects through the second standard reference lens 11 and is incident to beam splitting
Transmission forms the second reference light after prism 6.
Further, step 4 specifically:
First test light and the first reference light generate interference through the first polarizing film 18 through the conjunction beam of polarization splitting prism 7, it
By be incident to after the first shrink beam imaging system being made of third object lens 19, the second diaphragm 20 and the 4th object lens 21 first face battle array
The target surface of detector 23；In the process, it realizes by adjusting half-wave plate 2 and the first polarizing film 18 and adjusts the first planar array detector
The contrast of the 23 interference pattern stripeds received, adjusting measured piece light path system 28 keeps interference fringe sparse, and acquisition is corresponding later
Interference image sequence；
Second reference light and the second test light close beam through beam splitter prism 6, and generate interference through the second polarizing film 14, after pass through
The battle array detection of the second face is incident to after the second shrink beam imaging system being made of the 5th object lens 15, third diaphragm 16 and the 6th object lens 17
The target surface of device 22；In the process, realize that adjusting the second planar array detector 22 connects by adjusting half-wave plate 2 and the second polarizing film 14
The contrast of the interference pattern striped received, the inclination for adjusting the second standard reference lens 11 by adjusting frame 26 keep interference fringe close
Collection, acquires corresponding interference image sequence later.
Further, the interference pattern obtained described in step 5 according to step 4 resolves the phase distribution of measured piece 10, specifically
Are as follows:
Step 5-1, the phase of the collected every width interference pattern of the second planar array detector 22 is sought using fourier transform methodWherein n=1,2,3 ..., N, N are the sum of the interference pattern of the second planar array detector 22 acquisition；
Step 5-2, the phase of every width interference pattern is soughtVibration of the corresponding part to be measured relative to the second standard reference lens 11
Dynamic phase faceFormula used are as follows:
In formula,For the phase of the first width interference pattern；
Step 5-3, according to vibration phase faceObtain muting vibration phase plane Pn(x, y):
Pn(x, y)=αnx+βny+γn
In formula, αn、βn、γnIt is coefficient, is fitted by least square methodIt obtains；
Step 5-4, the interference pattern light intensity expression of main interference Measurement channel acquisition are as follows:
In=a (x, y)+b (x, y) cos (φ (x, y)+Pn(x,y))
In formula, a (x, y) is background light intensity, and b (x, y) is modulation amplitude；
In conjunction with InAnd Pn(x, y) solves part phase (x, y) to be measured using least square solution phase method.
Below with reference to embodiment, the present invention is described in further detail.
Embodiment
In the present embodiment, light source section laser 1 is output power 5mw's in Dual-channel type anti-vibration interferometric measuring means
He-Ne laser, wavelength 632.8nm, beam diameter is 10mm after beam-expanding collimation system 24, converges effective coke of objective lens 9
Away from for 50mm, part 10 to be measured is concave mirror, radius of curvature 125mm, clear aperature 25mm, the 5th lens 15, the 6th object
17 focal length of mirror is respectively 150mm and 75mm, and the third lens 19,21 focal length of the 4th object lens are similarly 150mm and 75mm, the second face battle array
Detector 22 and 23 sampled pixel of the first planar array detector are 1920 × 1200, pixel size 5.8um.
It is measured by above-mentioned apparatus, the secondary interference fringe picture of the one of main interference measuring system acquisition is as shown in Fig. 2, auxiliary
The width interference fringe picture that interferometer measuration system 25 acquires utilizes this group of interference pattern meter as shown in figure 3, obtain one group of interference pattern altogether
The phase distribution of concave mirror 10 to be measured is calculated as shown in figure 4, PV=0.3306 λ, RMS=0.0578 λ；Utilize conventional synchronization phase shift
Scheme measures the phase distribution of same concave mirror 10 as shown in figure 5, PV=0.3718 λ, RMS=0.0594 λ.
Fig. 4, Fig. 5 phase distribution are roughly the same, thus demonstrate the correctness that the present invention measures.And traditional simultaneous phase-shifting
Scheme will appear four amplitude shift phasor contrast inconsistence problems, so as to cause fringe error, as phase just has apparent item in Fig. 5
Line error, and not because of fringe error caused by vibrating in Fig. 4.
It follows that not only anti-vibration effect is good for apparatus and method of the present invention, measurement accuracy compared to traditional scheme
Height, and it is simple and compact for structure, cost is relatively low.
Claims (10)
1. a kind of Dual-channel type anti-vibration interferometric measuring means, which is characterized in that including what is set gradually: for being carried out to light source
The light source beam-expanding collimation system (24) of beam-expanding collimation, for detecting the auxiliary interferometer measuration system of measured piece vibration phase plane
(25), the main interference measuring system (27) for combination auxiliary interferometer measuration system (25) measurement measured piece phase distribution, and
Measured piece light path system (28)；
Light source beam-expanding collimation system (24) and measured piece light path system (28) same optical axis are denoted as primary optic axis, assist interferometry
The optical axis of system (25) and main interference measuring system (27) is denoted as the second optical axis, third optical axis respectively, vertical with primary optic axis；
Light source beam-expanding collimation system (24), main interference measuring system (27) and measured piece light path system (28) constitute main Thailand it is graceful-Green does
Relate to optical path；Light source beam-expanding collimation system (24), auxiliary interferometer measuration system (25) and measured piece light path system (28) constitute and assist
Tai Man-Green's optical interference circuit.
2. Dual-channel type anti-vibration interferometric measuring means according to claim 1, which is characterized in that the light source expands standard
Direct line system (24) includes the laser assembly (1), half-wave plate (2), the first object lens (3), the first light set gradually along primary optic axis
Late (4) and the second object lens (5)；The laser assembly (1) includes linearly polarized laser device, or including laser and the polarizer；
The main interference measuring system (27) includes the first standard reference lens (12) set gradually along third optical axis, and the one or four point
One of wave plate (13), polarization splitting prism (7), the first polarizing film (18), by third object lens (19), the second diaphragm (20) and the 4th
The the first shrink beam imaging system and the first planar array detector (23) of object lens (21) composition；
Auxiliary interferometer measuration system (25) includes the second standard reference lens (11) set gradually along the second optical axis, beam splitting rib
Mirror (6), the second polarizing film (14), the second shrink beam being made of the 5th object lens (15), third diaphragm (16) and the 6th object lens (17)
Imaging system and the second planar array detector (22)；
The polarization splitting prism (7) and beam splitter prism (6) are located on primary optic axis simultaneously；Second standard reference lens (11)
It is fixed on same adjustment frame (26) with the first standard reference lens (12), adjustment frame (26) is used to adjust the inclination angle of reference mirror
Degree；
The measured piece light path system (28) includes the second quarter-wave plate (8) set gradually along primary optic axis, convergence object
Microscope group (9) and measured piece (10).
3. Dual-channel type anti-vibration interferometric measuring means according to claim 2, which is characterized in that be incident to polarization spectro
The light beam of prism (7) is divided into the p wave of transmission and the s wave of reflection, the fast axle of first quarter-wave plate (13) and the s
The angle of wave is 45 °, and the angle of the fast axle of the second quarter-wave plate (8) and the p wave is 22.5 °.
4. Dual-channel type anti-vibration interferometric measuring means according to claim 3, which is characterized in that the first face battle array is visited
Survey device (23), the second planar array detector (22) is CCD or CMOS camera.
5. the measurement method based on Dual-channel type anti-vibration interferometric measuring means described in claim 1, which is characterized in that including with
Lower step:
Step 1, light source beam-expanding collimation system (24) are emitted linearly polarized light, and by auxiliary interferometer measuration system (25) to linearly polarized light
It is transmitted and is reflected；
The transmitted light of step 1 is divided into orthogonal p light and s light by step 2, main interference measuring system (27), and s light is surveyed through main interference
Amount system (27) forms first reference light orthogonal with original s light；P light is through measured piece light path system (28) formation test light and through master
Interferometer measuration system (27) reflection and transmission, obtain the first test light, the second test light respectively；
Step 3, the reflected light of step 1 are through assisting interferometer measuration system (25) to reflect to form the second reference light；
Step 4, the first test light and the first reference light close beam through main interference measuring system (27) and generate interference, adjust measured piece
Light path system (28) keeps interference fringe sparse, acquires corresponding interference image sequence later；Second test light and the second ginseng simultaneously
It examines light to close beam through auxiliary interferometer measuration system (25) and generate interference, adjusting auxiliary interferometer measuration system (25) keeps interference fringe close
Collection, acquires corresponding interference image sequence later；
Step 5, the interference pattern obtained according to step 4, resolve the phase distribution of measured piece (10).
6. Dual-channel type anti-vibration interferometric method according to claim 5, which is characterized in that step 1 specifically:
By linearly polarized laser device (1), half-wave plate (2), the first object lens (3), the first diaphragm (4) and the second object lens set gradually
(5) the light source beam-expanding collimation system (24) constituted is emitted linearly polarized light, and is incident to the beam splitting of auxiliary interferometer measuration system (25)
Prism (6), beam splitter prism (6) are transmitted and are reflected to linearly polarized light.
7. Dual-channel type anti-vibration interferometric method according to claim 6, which is characterized in that step 2 specifically:
The transmitted light of step 1 is divided into orthogonal p light and s light by the polarization splitting prism (7) of main interference measuring system (27)；
Later, s light becomes circularly polarized light through the first quarter-wave plate (13), then through the first standard reference lens (12) reflection, the
One quarter-wave plate (13) forms first reference light orthogonal with original s light, after the first reference light is incident to polarizing beam splitter mirror (7)
Transmission；
P light becomes elliptically polarized light through the second quarter-wave plate (8), again through measured piece (10) after converging objective lens (9)
It is reflected as test light, which becomes linearly polarized light through four point of one wave plate (8) and be incident to polarization spectro rib
Mirror (7), and the angular separation of the linearly polarized light and p light is 45 °；Polarization splitting prism (7) to linearly polarized light carry out reflection and thoroughly
It penetrates, the reflected beams are denoted as the first test light, and transmitted light beam is denoted as the second test light.
8. Dual-channel type anti-vibration interferometric method according to claim 7, which is characterized in that step 3 specifically: step
The transmission after the second standard reference lens (11) are reflected and are incident to beam splitter prism (6) of 1 reflected light forms the second reference light.
9. Dual-channel type anti-vibration interferometric method according to claim 8, which is characterized in that step 4 specifically:
First test light and the first reference light generate interference through the first polarizing film (18) through polarization splitting prism (7) conjunction beam, it
By being incident to after the first shrink beam imaging system being made of third object lens (19), the second diaphragm (20) and the 4th object lens (21)
The target surface of one planar array detector (23)；In the process, adjusting the is realized by adjusting half-wave plate (2) and the first polarizing film (18)
The contrast for the interference pattern striped that one planar array detector (23) receives, adjusting measured piece light path system (28) keeps interference fringe dilute
It dredges, acquires corresponding interference image sequence later；
Second reference light and the second test light close beam through beam splitter prism (6), and generate interference through the second polarizing film (14), after pass through
The second face is incident to after the second shrink beam imaging system being made of the 5th object lens (15), third diaphragm (16) and the 6th object lens (17)
The target surface of array detector (22)；In the process, second face that adjusts is realized by adjusting half-wave plate (2) and the second polarizing film (14)
The contrast for the interference pattern striped that array detector (22) receives, by adjusting frame (26) adjustment the second standard reference lens (11)
Inclination keeps interference fringe intensive, acquires corresponding interference image sequence later.
10. Dual-channel type anti-vibration interferometric method according to claim 9, which is characterized in that basis described in step 5
The interference pattern that step 4 obtains resolves the phase distribution of measured piece (10), specifically:
Step 5-1, the phase of the collected every width interference pattern of the second planar array detector (22) is sought using fourier transform method
Wherein n=1,2,3 ..., N, N are the sum of the interference pattern of the second planar array detector (22) acquisition；
Step 5-2, the phase of every width interference pattern is soughtVibration of the corresponding part to be measured relative to the second standard reference lens (11)
Phase faceFormula used are as follows:
In formula,For the phase of the first width interference pattern；
Step 5-3, according to vibration phase faceObtain muting vibration phase plane Pn(x, y):
Pn(x, y)=αnx+βny+γn
In formula, αn、βn、γnIt is coefficient, is fitted by least square methodIt obtains；
Step 5-4, the interference pattern light intensity expression of main interference Measurement channel acquisition are as follows:
In=a (x, y)+b (x, y) cos (φ (x, y)+Pn(x,y))
In formula, a (x, y) is background light intensity, and b (x, y) is modulation amplitude；
In conjunction with InAnd Pn(x, y) solves part phase (x, y) to be measured using least square solution phase method.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910285098.2A CN110017793B (en) | 2019-04-10 | 2019-04-10 | Double-channel anti-vibration interference measurement device and method |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201910285098.2A CN110017793B (en) | 2019-04-10 | 2019-04-10 | Double-channel anti-vibration interference measurement device and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN110017793A true CN110017793A (en) | 2019-07-16 |
| CN110017793B CN110017793B (en) | 2020-09-18 |
Family
ID=67190878
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201910285098.2A Active CN110017793B (en) | 2019-04-10 | 2019-04-10 | Double-channel anti-vibration interference measurement device and method |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN110017793B (en) |
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111207844A (en) * | 2020-01-17 | 2020-05-29 | 中国科学院上海光学精密机械研究所 | Bilateral multi-plane inclined wave surface interferometer and detection method thereof |
| CN111288955A (en) * | 2020-03-07 | 2020-06-16 | 中国计量科学研究院 | Integrated strain calibration system |
| CN111929036A (en) * | 2020-07-28 | 2020-11-13 | 南京理工大学 | Double Fizeau cavity dynamic short coherence interferometry device and method |
| CN112033279A (en) * | 2020-07-24 | 2020-12-04 | 长沙麓邦光电科技有限公司 | White light interference system |
| CN112066909A (en) * | 2020-08-24 | 2020-12-11 | 南京理工大学 | Anti-vibration interference measurement method based on inclined plane high-precision extraction |
| CN112525070A (en) * | 2020-11-18 | 2021-03-19 | 南京理工大学 | Vibration-resistant white light interference measurement method based on non-uniform sampling correction |
| CN113048877A (en) * | 2021-03-16 | 2021-06-29 | 上海乾曜光学科技有限公司 | Anti-vibration phase shifting method applied to phase shifting laser interferometer |
| CN113358037A (en) * | 2021-08-10 | 2021-09-07 | 中国计量科学研究院 | Laser displacement measuring device and method |
| CN115248083A (en) * | 2022-01-12 | 2022-10-28 | 浙江科技学院 | Method and device for making reference light vertically incident on detection surface in coherent detection light path |
Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1085315A (en) * | 1993-07-29 | 1994-04-13 | 陈赋 | Common mode inhibition is floated frequently and is disturbed the heterodyne frequency-shifting-type twin laser interferometer |
| US5526118A (en) * | 1993-12-07 | 1996-06-11 | Fuji Photo Film Co., Ltd. | Apparatus for obtaining refractive index distribution information of light scattering media |
| CN101033939A (en) * | 2007-02-07 | 2007-09-12 | 中国科学院上海光学精密机械研究所 | Micro-displacement high-precision real-time interferometer |
| CN102175141A (en) * | 2011-01-13 | 2011-09-07 | 清华大学 | Double-channel single-frequency laser interferometer |
| CN102944169A (en) * | 2012-11-26 | 2013-02-27 | 中国科学院长春光学精密机械与物理研究所 | Simultaneous polarization phase-shifting interferometer |
| CN103471533A (en) * | 2013-09-22 | 2013-12-25 | 浙江大学 | Surface appearance anti-vibration interferometry system |
| CN106840027A (en) * | 2017-01-20 | 2017-06-13 | 南京理工大学 | The astigmatic compensation type interference checking device and detection method of freeform optics surface |
| CN108955565A (en) * | 2018-07-11 | 2018-12-07 | 安徽大学 | Self-adaptive zero compensator space distance self-calibration method in free-form surface interferometer |
| CN109470173A (en) * | 2018-12-29 | 2019-03-15 | 华南师范大学 | A kind of binary channels simultaneous phase shifting interference microscopic system |
-
2019
- 2019-04-10 CN CN201910285098.2A patent/CN110017793B/en active Active
Patent Citations (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1085315A (en) * | 1993-07-29 | 1994-04-13 | 陈赋 | Common mode inhibition is floated frequently and is disturbed the heterodyne frequency-shifting-type twin laser interferometer |
| US5526118A (en) * | 1993-12-07 | 1996-06-11 | Fuji Photo Film Co., Ltd. | Apparatus for obtaining refractive index distribution information of light scattering media |
| CN101033939A (en) * | 2007-02-07 | 2007-09-12 | 中国科学院上海光学精密机械研究所 | Micro-displacement high-precision real-time interferometer |
| CN102175141A (en) * | 2011-01-13 | 2011-09-07 | 清华大学 | Double-channel single-frequency laser interferometer |
| CN102944169A (en) * | 2012-11-26 | 2013-02-27 | 中国科学院长春光学精密机械与物理研究所 | Simultaneous polarization phase-shifting interferometer |
| CN103471533A (en) * | 2013-09-22 | 2013-12-25 | 浙江大学 | Surface appearance anti-vibration interferometry system |
| CN106840027A (en) * | 2017-01-20 | 2017-06-13 | 南京理工大学 | The astigmatic compensation type interference checking device and detection method of freeform optics surface |
| CN108955565A (en) * | 2018-07-11 | 2018-12-07 | 安徽大学 | Self-adaptive zero compensator space distance self-calibration method in free-form surface interferometer |
| CN109470173A (en) * | 2018-12-29 | 2019-03-15 | 华南师范大学 | A kind of binary channels simultaneous phase shifting interference microscopic system |
Non-Patent Citations (5)
| Title |
|---|
| MINGLIANG DUAN等: "Dual-channel interferometer for vibration-resistant optical measurement", 《OPTICS AND LASERS IN ENGINEERING》 * |
| WU DONG等: "Adaptive phase-shifting interferometer with optical heterodyne vibration measuring and compensating system", 《PROC. OF SPIE》 * |
| 刘成淼等: "基于双通道剪切干涉的高光谱偏振成像方法", 《光学学报》 * |
| 左芬: "同步移相抗振光干涉测量技术研究进展", 《测试和计量》 * |
| 马云等: "用于相位缺陷检测的动态泰曼干涉仪", 《中国激光》 * |
Cited By (15)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN111207844A (en) * | 2020-01-17 | 2020-05-29 | 中国科学院上海光学精密机械研究所 | Bilateral multi-plane inclined wave surface interferometer and detection method thereof |
| CN111207844B (en) * | 2020-01-17 | 2021-07-27 | 中国科学院上海光学精密机械研究所 | Bilateral multi-plane inclined wave surface interferometer and detection method thereof |
| CN111288955A (en) * | 2020-03-07 | 2020-06-16 | 中国计量科学研究院 | Integrated strain calibration system |
| CN111288955B (en) * | 2020-03-07 | 2021-06-29 | 中国计量科学研究院 | Integrated strain calibration system |
| CN112033279B (en) * | 2020-07-24 | 2021-12-10 | 长沙麓邦光电科技有限公司 | White light interference system |
| CN112033279A (en) * | 2020-07-24 | 2020-12-04 | 长沙麓邦光电科技有限公司 | White light interference system |
| CN111929036A (en) * | 2020-07-28 | 2020-11-13 | 南京理工大学 | Double Fizeau cavity dynamic short coherence interferometry device and method |
| CN112066909A (en) * | 2020-08-24 | 2020-12-11 | 南京理工大学 | Anti-vibration interference measurement method based on inclined plane high-precision extraction |
| CN112066909B (en) * | 2020-08-24 | 2022-04-08 | 南京理工大学 | Anti-vibration interference measurement method based on inclined plane high-precision extraction |
| CN112525070A (en) * | 2020-11-18 | 2021-03-19 | 南京理工大学 | Vibration-resistant white light interference measurement method based on non-uniform sampling correction |
| CN112525070B (en) * | 2020-11-18 | 2022-04-01 | 南京理工大学 | Vibration-resistant white light interference measurement method based on non-uniform sampling correction |
| CN113048877A (en) * | 2021-03-16 | 2021-06-29 | 上海乾曜光学科技有限公司 | Anti-vibration phase shifting method applied to phase shifting laser interferometer |
| CN113358037B (en) * | 2021-08-10 | 2021-11-09 | 中国计量科学研究院 | Laser displacement measuring device and method |
| CN113358037A (en) * | 2021-08-10 | 2021-09-07 | 中国计量科学研究院 | Laser displacement measuring device and method |
| CN115248083A (en) * | 2022-01-12 | 2022-10-28 | 浙江科技学院 | Method and device for making reference light vertically incident on detection surface in coherent detection light path |
Also Published As
| Publication number | Publication date |
|---|---|
| CN110017793B (en) | 2020-09-18 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN110017793A (en) | A kind of Dual-channel type anti-vibration interferometric measuring means and method | |
| TWI401413B (en) | Apparatus and method for measuring surface topography of an object | |
| CN102944169B (en) | A kind of synchronous polarization phase-shifting interferometer | |
| CN101788263B (en) | Coaxial Fizeau synchronous phase shifting interferometer capable of adjusting extended light illumination | |
| EP3118571B1 (en) | Instantaneous phase-shift interferometer and measurement method | |
| US7675628B2 (en) | Synchronous frequency-shift mechanism in Fizeau interferometer | |
| CN107462149B (en) | Phase-shift interferometry system and wave plate phase-shift method thereof | |
| US8345258B2 (en) | Synchronous frequency-shift mechanism in fizeau interferometer | |
| US7561279B2 (en) | Scanning simultaneous phase-shifting interferometer | |
| CN105300273B (en) | Dynamic Point Diffraction Interferometer with Adjustable Fringe Contrast | |
| CN106338333B (en) | High robust homodyne laser vibration measurer and four steppings based on wave plate yaw | |
| CN101324421A (en) | Synchronous phase-shifting Fizeau interferometer | |
| CN110095085A (en) | A kind of real-time phase shift interference with common path microscope equipment and method | |
| CN110017794B (en) | Dynamic phase deformation interference measurement device and method | |
| CN106767389B (en) | Striking rope type simultaneous phase-shifting interference testing device based on prismatic decomposition phase shift | |
| CN107449361B (en) | Stable dual-wavelength real-time interference microscopic device and using method thereof | |
| CN101113927A (en) | Phase-shifting lateral shearing interferometer | |
| CN104913838A (en) | Anti-polarization mixing single-path circular polarization interference and single wollaston prism splitting-type homodyne laser vibrometer | |
| CN110319769A (en) | Anti-vibration Feisuo interferometric measuring means and method | |
| CN102401630B (en) | Spatial phase shift Fizeau spherical interferometer | |
| Morris et al. | Dynamic phase-shifting electronic speckle pattern interferometer | |
| CN102680117B (en) | Common-path radial cutting liquid crystal phase shift interference wave-front sensor | |
| CN101319873B (en) | Space phase shifter for synchronous phase-shifting interferometer | |
| CN105698702B (en) | A kind of diplopore heterodyne ineterferometer based on acousto-optic low frequency differences phase shift | |
| KR102007004B1 (en) | Apparatus for measuring three dimensional shape |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |