CN115014438A - Bionic multifunctional sensor and preparation method and application thereof - Google Patents
Bionic multifunctional sensor and preparation method and application thereof Download PDFInfo
- Publication number
- CN115014438A CN115014438A CN202210629501.0A CN202210629501A CN115014438A CN 115014438 A CN115014438 A CN 115014438A CN 202210629501 A CN202210629501 A CN 202210629501A CN 115014438 A CN115014438 A CN 115014438A
- Authority
- CN
- China
- Prior art keywords
- film
- circuit board
- thermoelectric
- flexible
- porous
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D21/00—Measuring or testing not otherwise provided for
- G01D21/02—Measuring two or more variables by means not covered by a single other subclass
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
- G01D11/00—Component parts of measuring arrangements not specially adapted for a specific variable
Abstract
The invention relates to the technical field of wearable sensors, and provides a bionic multifunctional sensor and a preparation method and application thereof. The bionic multifunctional sensor provided by the invention can simultaneously sense the approach of a heat source, temperature, pressure, airflow and high-frequency vibration; the sensor is simple in structure, the preparation process is very simple, the potential of full-automatic and mechanized production is achieved, meanwhile, the perception of the signals is excellent, and the sensor has important application prospects in the fields of bionic robots, intelligent monitoring, human-computer interfaces and the like.
Description
Technical Field
The invention relates to the technical field of wearable sensors, in particular to a bionic multifunctional sensor and a preparation method and application thereof.
Background
The wearable device is a device which can be installed on people, animals and articles and can sense, transmit and process information, and the sensor is a core device of the wearable device. The wearable sensor is widely applied to industrial production, medical health and daily home, and rapid development in the fields of human-computer interaction, high-performance robots, health monitoring and the like is promoted. Among them, pressure, strain, temperature, vibration, and wind speed sensors have received much attention over the past decade. The method has the advantages that the sensitivity, the response time, the test range and the fatigue resistance of the sensor are improved, and meanwhile, how to integrate various sensing functions is also an important research direction. The development of good multifunctional sensing equipment can greatly expand the sensing capability to the surrounding environment and the like, and simultaneously can reduce the use area and the manufacturing cost of the sensing equipment.
Recently, there is a report in the literature (Advanced Materials, 2019, volume 31, No. 36, page 1902831) that a sensor array made of barium titanate, a pyroelectric material, can detect temperature and also can detect oscillating pressure. There is also literature (Nature Communications, 2020, vol. 11, phase 1, pages 1-10) that reports a self-healing sponge prepared by mixing nickel particles and PVDF-HFP, which can achieve pressure and proximity sensing. Another document (Science Advances, 2020, vol 6, vol 45, eabd 0202) reports that the sensing of these signals is achieved by integrating all the ecg, temperature, acoustic and motion sensors on a self-healing elastic membrane.
However, in these reported sensing devices, the detected signals are either few, and only dual-function sensing is not enough to meet the increasing demand; or the structure is complicated, excessive and dense lines are generated, more delay is generated for data reading time, and more external ports are also needed. Therefore, how to obtain a sensor with more excellent overall performance such as multi-function sensing and simple structure has become one of the problems that researchers in this field need to solve.
Disclosure of Invention
In view of this, the application provides a bionic multifunctional sensor, and a preparation method and an application thereof.
The invention provides a bionic multifunctional sensor which comprises a flexible circuit board and a porous thermoelectric film, wherein the porous thermoelectric film is in a strip shape and is obliquely arranged on the flexible circuit board, and two ends of the porous thermoelectric film in the length direction are in conductive connection with a circuit of the flexible circuit board.
In an embodiment of the present invention, the porous thermoelectric thin film includes: the flexible porous substrate film is obliquely arranged on the flexible circuit board, and the thermoelectric film is compounded on at least one surface of the flexible porous substrate film; the thermoelectric film is strip-shaped, and two ends in the length direction are in conductive connection with the circuit of the flexible circuit board.
In the embodiment of the invention, the thickness of the thermoelectric film is 200-700 nm, and the Seebeck factor is 50-200 mu V/K.
In the embodiment of the invention, at least one end of the thermoelectric film in the length direction is connected with the conductive film for electrically connecting with the circuit of the flexible circuit board.
In the embodiment of the invention, the thickness of the conductive film is 50-200 nm.
In the embodiment of the invention, only one end of the thermoelectric film in the length direction is connected with the conductive film and forms a U-shaped structure with the conductive film.
In the embodiment of the invention, the inclined angle between the porous thermoelectric thin film and the flexible circuit board is 40-70 degrees.
In the embodiment of the invention, the flexible circuit board is composed of a flexible substrate and a liquid metal circuit on the surface of the flexible substrate, wherein the flexible substrate is provided with an inclined groove for obliquely arranging the porous thermoelectric thin film; the liquid metal circuit is electrically connected with two ends of the porous thermoelectric film in the length direction.
The invention provides a preparation method of the bionic multifunctional sensor, which comprises the following steps:
respectively providing a flexible circuit board and a strip-shaped porous thermoelectric film;
and obliquely arranging the porous thermoelectric film on the flexible circuit board, and electrically connecting and packaging the porous thermoelectric film and the flexible circuit board.
The invention also provides the application of the bionic multifunctional sensor in manufacturing robots, man-machine interaction and health monitoring.
The embodiment of the invention provides a bionic multifunctional sensor which comprises a flexible substrate, a porous thermoelectric film and a liquid metal circuit, wherein the flexible substrate is provided with a plurality of holes; the flexible substrate and the liquid metal circuit form a flexible circuit board, the porous thermoelectric film is strip-shaped and obliquely arranged on the flexible circuit board, and two ends of the porous thermoelectric film in the length direction are in conductive connection with the circuit. For example, after the porous thermoelectric film is inserted into the flexible substrate, the end (the closed end of the U-shape) where the thermoelectric film and the conductive film are overlapped is suspended in the air, and the two are respectively connected with the liquid metal line. Meanwhile, another object of the present invention is to provide a simplified method for manufacturing a multifunctional sensor. Compared with the prior art, the bionic multifunctional sensor provided by the invention can simultaneously sense the approach of a heat source, temperature, pressure, airflow and high-frequency vibration; the sensor is simple in structure, the preparation process is very simple, the potential of full-automatic and mechanized production is realized, and meanwhile, the sensor has excellent performance on sensing of signals. Experimental results show that the bionic multifunctional sensor prepared by the invention has important application prospects in the fields of bionic robots, intelligent monitoring, human-computer interfaces and the like in the aspects of detecting a heat source with a distance of 25cm and a temperature of a target object at 40 ℃, a wind speed detection range of 1-20.4 m/s and high-frequency vibration induction of 1000 Hz.
Drawings
FIG. 1 is a schematic diagram of a multifunctional sensor according to some embodiments of the present invention;
FIG. 2 is a dimensional view of a U-shaped configuration of thermoelectric and copper films in accordance with certain embodiments of the present invention;
FIG. 3 is a sensing curve of a proximity distance of a heat source of the multi-functional sensor according to example 1 of the present invention;
FIG. 4 is a resistance response curve against pressure cycling for the multifunctional sensor prepared in example 1 of the present invention;
FIG. 5 is a voltage response curve of the multifunctional sensor prepared in example 1 of the present invention with respect to the temperature of a target object;
FIG. 6 is a resistance response curve of the multifunctional sensor prepared in example 1 of the present invention to different wind speeds in the forward wind;
FIG. 7 is a resistance response curve of the multifunctional sensor prepared in example 1 of the present invention to different wind speeds facing away from the wind;
fig. 8 is a current response curve of the multifunctional sensor prepared in example 1 of the present invention to high frequency vibration.
Detailed Description
For a further understanding of the invention, reference will now be made to the preferred embodiments of the invention by way of example, and it is to be understood that the description is intended to further illustrate features and advantages of the invention, and not to limit the scope of the claims.
The invention provides a bionic multifunctional sensor which comprises a flexible circuit board and a porous thermoelectric film, wherein the porous thermoelectric film is in a strip shape and is obliquely arranged on the flexible circuit board, and two ends of the porous thermoelectric film in the length direction are in conductive connection with a circuit of the flexible circuit board.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a multifunctional sensor according to some embodiments of the present invention; wherein, 1 is a flexible substrate, 2 is a liquid metal circuit, 3 is a thermoelectric film, and 4 is a copper film.
The bionic multifunctional sensor comprises a flexible circuit board, preferably consists of a flexible substrate 1 and a liquid metal circuit 2 on the surface of the flexible substrate, and mainly plays a role in supporting a sensing part, deriving an electric signal and the like. The invention has no special restriction on the selection of the material type, the shape and the size of the flexible substrate, and the like, and the flexible substrate generally only needs to meet the deformation properties of lightness, thinness, bending, stretching and the like; preferred flexible substrate materials of the present invention include one or more of PDMS, thermoplastic polyurethane, polyamide, and hydrogel, more preferably PDMS or thermoplastic polyurethane, and most preferably PDMS. PDMS is polydimethylsiloxane, and has the advantages of being convenient and easy to obtain, stable in chemical property, transparent, good in thermal stability and the like.
According to the preferred embodiment of the invention, a commercially available Polydimethylsiloxane (PDMS) matrix and a curing agent can be mixed and cured to form a thin flexible substrate with the thickness of 1-2 mm; preferably, the mass fraction ratio of the PDMS matrix to the curing agent is (8-12): 1. The PDMS matrix and curing agent are conventional experimental materials in the art and are available directly from Dow Corning as Sylgard 184. The substrate is prepared under the condition of the mass ratio, the strength and the toughness are moderate, and the flexible substrate is easy to prepare.
In some embodiments of the present invention, the flexible substrate 1 has an inclined groove thereon for obliquely disposing the porous thermoelectric thin film; the surface of the flexible substrate 1 can be printed to form a liquid metal circuit 2 which is electrically connected with two ends of the porous thermoelectric film in the length direction. According to the embodiment of the invention, a series of inclined grooves can be etched on the flexible substrate by using laser processing equipment, then the PDMS substrate containing the grooves is subjected to hydrophilic treatment, and then the liquid metal circuit is printed near the inclined grooves to form the flexible circuit board. The related liquid metal is commonly gallium indium tin alloy, and the line size can be 0.5-2 mm wide.
Preferably, the inclined groove has an inclination angle of 40-70 degrees, a length of 3.5mm, a depth of 0.4-1 mm and a width of 0.02-0.1 mm. The liquid metal circuit is made of materials commonly used in the field and can lead out electric signals.
Preferably, the porous thermoelectric film according to the embodiment of the present invention includes a flexible porous substrate film and a thermoelectric film 3. The flexible porous substrate film is obliquely arranged on the flexible circuit board, and the surface of the flexible porous substrate film can be deposited to form a thermoelectric film 3 through a mask plate, so that the porous thermoelectric film can sense various signals such as temperature, heat source approach, pressure, airflow and the like.
The embodiment of the invention has no particular limitation on the material selection of the flexible porous substrate film; the present invention preferably comprises one or more of a cellulose film, a polytetrafluoroethylene film, a polyvinylidene fluoride film and a nylon film, more preferably a polytetrafluoroethylene film and/or a nylon film, most preferably a nylon film. The pore diameter of the flexible porous substrate film is preferably 0.1 μm, the thickness is about 100 μm, and the flexible porous substrate film is a commercially available material; if the porosity or pore size is too large, the initial resistance of the material is increased, signal noise may be increased, and if the thickness is thicker, the sensing of small pressure may not be sensitive enough. The included angle between the obliquely arranged flexible porous substrate film and the flexible circuit board is 40-70 degrees, such as 40 degrees, 45 degrees, 50 degrees, 60 degrees and the like.
The thermoelectric film is formed by thermoelectric materials, has a pore structure and is in a strip shape; and two ends of the thermoelectric film in the length direction are in conductive connection with a circuit of the flexible circuit board. The present invention is not particularly limited in the selection of the thermoelectric material, and the present invention preferably includes antimony telluride (Sb) 2 Te 3 ) Bismuth telluride (Bi) 2 Te 3 ) N-type bismuth telluride (Bi) 2 Te 2.7 Se 0.3 ) And p-type bismuth telluride (Bi) 0.5 Sb 1.5 Te 3 ) More preferably Sb 2 Te 3 And Bi 0.5 Sb 1.5 Te 3 Most preferably Sb 2 Te 3 。
In the embodiment of the invention, the thickness of the thermoelectric film is preferably 200-700 nm, and the Seebeck factor is 50-200 μ V/K. The pores and the inclined structure of the thermoelectric film are basically consistent with those of the flexible porous substrate film, the strip shape of the thermoelectric film is similar to human hair, and the length of the thermoelectric film is far greater than the width of the thermoelectric film; the composite film is compounded on the surface of the obliquely arranged flexible porous substrate film, so that signals such as pressure, vibration and the like are sensed to a certain extent.
As shown in fig. 1, one end of the thermoelectric thin film 3 in the length direction is connected with the liquid metal circuit 2, and the other end is connected with the liquid metal circuit through the copper thin film 4; the copper film and the thermoelectric film can form a U-shaped or V-shaped connection mode. The copper film 4 functions as a conductive connection circuit, and other metals can be used as the conductive film, which is not limited in the present invention.
FIG. 2 is a dimension diagram of a U-shaped structure formed by thermoelectric thin films and copper thin films according to some embodiments of the present invention, wherein the thermoelectric thin films are connected in a non-overlapping manner and have a rectangular shape, the width of the thermoelectric thin films is 1mm, the width of the overlapping connection part is 1mm, the length of the overlapping connection part is 3mm, the copper thin films have the same dimension, and the total length of the copper thin films is 8 mm. In the embodiment of the invention, the thickness of the conductive film can be 50-200 nm. Fig. 2 is only an example of the size and shape, and the shape of the porous thermoelectric thin film structure according to the present invention is not limited thereto.
The bionic multifunctional sensor is prepared by the embodiment of the invention, firstly, the flexible circuit board and the strip-shaped porous thermoelectric film are respectively prepared; and then the porous thermoelectric film is obliquely arranged on the flexible circuit board, and the porous thermoelectric film and the flexible circuit board are electrically connected to form the sensing device.
The embodiment of the invention provides a preparation method of a bionic multifunctional sensor, which comprises the following steps:
s1) depositing a plurality of strip-shaped thermoelectric thin films (such as telluride thermoelectric materials) on the flexible porous substrate thin film through a mask plate; depositing a copper film (as a copper electrode) beside the thermoelectric film, and partially overlapping the thermoelectric film to form a U-shaped structure;
s2) mixing and curing the PDMS matrix and the curing agent to form a thin flexible substrate; etching a series of inclined grooves on the flexible substrate by using laser processing equipment, and printing liquid metal lines near the grooves (the flexible substrate is subjected to hydrophilic treatment before printing) to form a flexible circuit board;
s3) cutting the thermoelectric film and the copper film into a single U-shaped unit, inserting into the groove of the flexible substrate and ensuring good connection with the liquid metal line, and finally packaging the device.
All the raw materials in the examples of the present invention are as described above, and the sources thereof are not particularly limited, and those commercially available or prepared according to a conventional method well known to those skilled in the art may be used. The flexible porous substrate film can be one or more polymer films selected from cellulose films, polytetrafluoroethylene films, polyvinylidene fluoride films and nylon films, more preferably polytetrafluoroethylene films or nylon films, and most preferably nylon films. The thickness of the thermoelectric thin film material is 200-700 nm, and the Seebeck factor is 50-200 mu V/K.
The deposition, curing and printing in the embodiments of the present invention are all well known operations in the art, and the present invention is not limited thereto. For example, magnetron sputtering techniques can be used to deposit the thermoelectric film. Preferably, a Polydimethylsiloxane (PDMS) matrix and a curing agent are mixed according to the mass fraction of 8-12: 1, poured into a mold, and cured at 50-70 ℃ to form a thin flexible substrate.
In the preferred embodiment of the invention, firstly, a large number of U-shaped units formed by thermoelectric thin films and copper thin films are deposited on the front surface of a flexible porous polymer thin film through a mask plate, then, a large number of U-shaped units on the flexible porous base film are cut one by one to form thermoelectric whiskers, then, inclined grooves are etched on PDMS through laser etching, liquid metal lines are printed around the conductive grooves, and finally, the thermoelectric whiskers are inserted into the grooves of the PDMS substrate to be connected with the printed liquid metal lines and packaged, so that the final multifunctional sensor is obtained.
The invention also provides the application of the bionic multifunctional sensor in manufacturing robots, man-machine interaction and health monitoring, for example, the sensor can be connected and assembled with a signal collection unit, a display unit, wearable auxiliary equipment and the like.
Compared with the prior art, the method provided by the invention is very simple, has high repeatability, can realize full-mechanical production, and has the characteristics of economy and less time consumption. Meanwhile, all aspects of the sensing functions of the flexible sensor are excellent. The sensor preparation method provided by the embodiment of the invention has the advantages of simple steps and high automation degree, and can avoid some manual operations as much as possible, so that the product repeatability is good. In addition, the thermoelectric film and the copper film prepared by the invention are deposited in a magnetron sputtering mode, so that the thicknesses of the thermoelectric film and the conductive film are controllable, and the films can be deposited on most other substrates, including Polycarbonate (PC), Polyester (PET), Polyimide (PI), filter paper and the like. Meanwhile, automatic printing, laser etching and the like are adopted in other preparation processes, so that the method can prepare the sensor efficiently, economically and environmentally, and lays the premise and guarantee of industrialization and practicality for the research of the multifunctional sensor.
To further illustrate the technical aspects of the present invention, the following preferred embodiments of the present invention are described in conjunction with examples, but it should be understood that the descriptions are only for further illustrating the characteristics and advantages of the present invention and are not to be construed as limiting the present invention.
Example 1:
A1) as shown in fig. 1, it is a multifunctional sensor model of the present embodiment. And depositing a layer of antimony telluride film array on the flexible porous nylon film through magnetron sputtering and a mask plate, wherein the thickness of the antimony telluride film is 450nm, and the Seebeck factor is 111 muV/K.
A2) Depositing a copper film with the thickness of 75nm beside a single antimony telluride film, and partially overlapping the antimony telluride film to form a U-shaped structure; the structural dimensions of the antimony telluride thermoelectric film and the copper film of this example are shown in fig. 2.
A3) Mixing a Polydimethylsiloxane (PDMS) matrix and a curing agent according to the mass fraction of 10:1, pouring the mixture into a mold, and curing for 4 hours at 60 ℃ to form a thin flexible substrate.
A4) A series of inclined grooves were etched in a flexible substrate using a laser processing apparatus, the grooves having a length of 4mm, a depth of 0.7mm, a width of 0.04mm and an inclination of 57.5 °.
A5) Placing the PDMS substrate with the groove in an ethanol solution of 3-aminopropyltriethoxysilane, soaking overnight, taking out and drying, and then printing a liquid metal circuit near the groove to form a flexible circuit board;
A6) cutting the antimony telluride film and the copper film array into single U-shaped units, inserting the U-shaped units into the groove of the flexible substrate, ensuring good connection with the liquid metal circuit, and finally packaging the device by using PDMS.
The thickness of the substrate is 2mm, the aperture of the nylon film is 0.1 μm, the nylon film is a film directly purchased from commerce, and the mass ratio of the liquid metal is 68.5% of gallium: 21.5 percent of indium, 10 percent of tin and a curing agent which is a vulcanizing agent of Dow Corning company, and only one sensor is arranged in a U-shaped unit.
The obtained multifunctional sensor is tested for the ability of sensing the approaching of a heat source, pressure circulation, the temperature of a target object, wind speed, high-frequency vibration and the like, and the test results shown in figures 3-8 are obtained.
FIG. 3 is a sensing curve of a proximity distance of a heat source of the multi-functional sensor according to example 1 of the present invention; the specific test process is as follows: a 40 ℃ flat heat source was gradually brought closer from just above the "hair" part of the sensor (the suspended end of the U-shaped structure) (the heat source was parallel to the substrate part of the sensor) and the output voltage of the sensor was measured at different distances. As can be seen from fig. 3, as the heat source gets closer to the sensor, the induced voltage gradually rises, and a distance of 25cm can be detected at the farthest.
FIG. 4 is a resistance response curve against pressure cycling for the multifunctional sensor prepared in example 1 of the present invention; the specific test process is as follows: the sensor was cyclically compressed by a mechanical fatigue machine to the "hair" tip portion of the sensor, and was also pressed down parallel to the substrate portion by a mechanical flat plate of the mechanical fatigue machine, with a compression distance of 3 mm. As can be seen from fig. 4, after the sensor is compressed for 25 ten thousand cycles, the initial resistance change is small, the resistance change amplitude is also small, and the performance is basically unchanged.
FIG. 5 is a voltage response curve of the multifunctional sensor prepared in example 1 of the present invention with respect to the temperature of a target object; the specific test process is as follows: objects of different temperatures are attached to the tip of the hair part of the sensor, and voltage signals generated by the sensor are collected. As can be seen from FIG. 5, the detection range is-189 to 150 ℃.
FIG. 6 is a resistance response curve of the multifunctional sensor prepared in example 1 of the present invention to different wind speeds in the forward wind; the specific test process is as follows: the blower is placed in front of the sensor at different distances to test the resistance change condition of the sensor at different wind speeds. As can be seen from FIG. 6, the detection range in this direction is 2 to 20.4 m/s.
FIG. 7 is a resistance response curve of the multifunctional sensor prepared in example 1 of the present invention to different wind speeds facing away from the wind; the specific test process is as follows: the blower is placed behind the sensor at different distances to test the resistance change condition of the sensor at different wind speeds. As can be seen from FIG. 7, the detection range in this direction is 1 to 8.6 m/s.
FIG. 8 is a current response curve of the multifunctional sensor prepared in example 1 of the present invention to high frequency vibration; the specific test process is as follows: the surface of the sound box is coated with a PE preservative film which is attached to the tip part of the sensor, and when the sound box is started, the sound waves can drive the preservative film to vibrate, so that the sound waves are conducted to the sensor to collect electrical signals. As can be seen from FIG. 8, the sensor can detect high frequency vibrations at 1000 Hz.
The embodiment of the invention discloses a preparation method of a bionic multifunctional sensor, which comprises the steps of firstly respectively depositing a layer of telluride thermoelectric material and a layer of copper electrode on a flexible porous film through a mask plate, then forming a series of oblique-angle grooves on a flexible stretchable substrate through laser etching and the like, then printing liquid metal conducting circuits on the substrate with a large number of etched grooves, and finally inserting the porous film containing the thermoelectric material on the substrate, communicating with the liquid metal circuits and packaging to obtain the multifunctional sensor.
Experimental results show that the bionic multifunctional sensor prepared by the invention can detect a heat source with a distance of 25cm and a temperature of a target object at 40 ℃, a wind speed detection range of 1-20.4 m/s, high-frequency vibration induction of 1000Hz and the like at-189-150 ℃. At the same time, the perception of these signals is of excellent performance. The bionic multifunctional sensor prepared by the method has wide application prospects in the aspects of robots, human-computer interaction, health monitoring and the like. Compared with the prior art, the method provided by the invention is very simple, has high repeatability, can realize full-mechanical production, and has the characteristics of economy and less time consumption. Meanwhile, the flexible sensor has good perception function performance in all aspects, and thus, the flexible sensor has a great application prospect in the fields of human-computer interfaces, bionic robots and the like.
The above-described embodiments are merely illustrative of the preferred embodiments of the present invention, and do not limit the scope of the present invention, and various modifications and improvements of the technical solutions of the present invention can be made by those skilled in the art without departing from the spirit of the present invention, and the technical solutions of the present invention are within the scope of the present invention defined by the claims.
Claims (10)
1. The bionic multifunctional sensor is characterized by comprising a flexible circuit board and a porous thermoelectric film, wherein the porous thermoelectric film is in a strip shape and is obliquely arranged on the flexible circuit board, and two ends of the porous thermoelectric film in the length direction are in conductive connection with a circuit of the flexible circuit board.
2. The biomimetic multifunctional sensor of claim 1, wherein the porous thermoelectric film comprises: the flexible porous substrate film is obliquely arranged on the flexible circuit board, and the thermoelectric film is compounded on at least one surface of the flexible porous substrate film; the thermoelectric film is strip-shaped, and two ends in the length direction are in conductive connection with the circuit of the flexible circuit board.
3. The biomimetic multifunctional sensor according to claim 2, wherein the thickness of the thermoelectric thin film is 200-700 nm, and the Seebeck factor is 50-200 μ V/K.
4. The biomimetic multifunctional sensor according to claim 2, wherein at least one end of the thermoelectric film in the length direction is connected with the conductive film for electrically connecting with a circuit of the flexible circuit board.
5. The biomimetic multifunctional sensor according to claim 4, wherein the conductive thin film has a thickness of 50-200 nm.
6. The biomimetic multifunctional sensor according to claim 4, wherein only one end in the length direction of the pyroelectric film is connected with the conductive film and forms a U-shaped structure with the conductive film.
7. The biomimetic multifunctional sensor according to any one of claims 1 to 6, wherein an included angle between the obliquely arranged porous thermoelectric thin film and the flexible circuit board is 40-70 °.
8. The biomimetic multifunctional sensor according to claim 7, wherein the flexible circuit board is composed of a flexible substrate and a liquid metal circuit on the surface of the flexible substrate, and the flexible substrate is provided with an inclined groove for obliquely arranging the porous thermoelectric thin film; the liquid metal circuit is electrically connected with two ends of the porous thermoelectric film in the length direction.
9. The method for preparing a biomimetic multifunctional sensor according to any one of claims 1 to 8, comprising the steps of:
respectively providing a flexible circuit board and a strip-shaped porous thermoelectric film;
and obliquely arranging the porous thermoelectric film on the flexible circuit board, and electrically connecting and packaging the porous thermoelectric film and the flexible circuit board.
10. Use of a biomimetic multifunctional sensor according to any of claims 1-8 in manufacturing robots, human-machine interaction, and health monitoring.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210629501.0A CN115014438B (en) | 2022-06-06 | 2022-06-06 | Bionic multifunctional sensor and preparation method and application thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210629501.0A CN115014438B (en) | 2022-06-06 | 2022-06-06 | Bionic multifunctional sensor and preparation method and application thereof |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN115014438A true CN115014438A (en) | 2022-09-06 |
| CN115014438B CN115014438B (en) | 2023-07-14 |
Family
ID=83073777
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210629501.0A Active CN115014438B (en) | 2022-06-06 | 2022-06-06 | Bionic multifunctional sensor and preparation method and application thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN115014438B (en) |
Citations (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02116169A (en) * | 1988-10-26 | 1990-04-27 | Matsushita Electric Ind Co Ltd | Manufacture of matrix type infrared solid state image sensing device |
| US5471060A (en) * | 1993-08-23 | 1995-11-28 | Matsushita Electric Industrial Co., Ltd. | Pyroelectric infrared radiation detector and method of producing the same |
| US20050021247A1 (en) * | 2003-06-06 | 2005-01-27 | The Board Of Trustees Of The University Of Illionis | Sensor chip and apparatus for tactile and/or flow sensing |
| US20050109102A1 (en) * | 2002-01-18 | 2005-05-26 | The Board Of Trustees Of The University O F Illinois | Microscale out-of-plane anemometer |
| TW200929629A (en) * | 2007-12-28 | 2009-07-01 | Ind Tech Res Inst | Thermoelectric device with thin film elements, apparatus and stacks having the same |
| CN102263198A (en) * | 2010-05-26 | 2011-11-30 | 苏州汉申温差电科技有限公司 | Method for preparing thermoelectric material in low-dimension structure |
| KR20120006620A (en) * | 2010-07-13 | 2012-01-19 | 한국생산기술연구원 | Heat-radiating substrate having thermoelectric thin film and thermal via and manufacturing method of the same |
| WO2014007225A1 (en) * | 2012-07-06 | 2014-01-09 | 国立大学法人九州工業大学 | Method for producing thermoelectric conversion material |
| KR20140110410A (en) * | 2013-03-07 | 2014-09-17 | 홍익대학교 산학협력단 | Fabrication methods of thermoelectric thin film modules using moulds consisting of via-holes and thermoelectric thin film modules produced using the same method |
| CN104480508A (en) * | 2014-12-24 | 2015-04-01 | 北京化工大学 | Preparation method of porous and laminar Bi2Te3 nano thermoelectric film |
| US20160035958A1 (en) * | 2014-07-31 | 2016-02-04 | National Tsing Hua University | Manufacturing process of the thermoelectric conversion element |
| WO2016095460A1 (en) * | 2014-12-17 | 2016-06-23 | 深圳市敏杰电子科技有限公司 | Thin-film temperature sensor |
| CN105789425A (en) * | 2016-01-05 | 2016-07-20 | 中国科学院金属研究所 | Cellulose paper/Bi2Te3 thermoelectric thin-film composite material and preparation method thereof |
| CN111006809A (en) * | 2019-12-25 | 2020-04-14 | 中国海洋大学 | Three-dimensional MEMS ocean turbulence sensor |
| CN112853492A (en) * | 2019-11-27 | 2021-05-28 | 中国科学院金属研究所 | SnSe/CNT high-temperature flexible thermoelectric thin film material and preparation method thereof |
| US20210391522A1 (en) * | 2020-06-12 | 2021-12-16 | Tianma Japan, Ltd. | Thermoelectric transducer and thermoelectric transducer module |
| WO2022021815A1 (en) * | 2020-07-31 | 2022-02-03 | 山东大学 | Embedded high-temperature-resistant transparent conductive thin film, preparation method therefor and use thereof |
| CN114199426A (en) * | 2021-12-03 | 2022-03-18 | 宁波诺丁汉新材料研究院有限公司 | Flexible sensing layer, preparation method of flexible sensor and flexible sensor |
| CN114264385A (en) * | 2021-12-29 | 2022-04-01 | 陕西中建建乐智能机器人股份有限公司 | Robot flexible electronic skin based on thermoelectric effect |
| CN114459603A (en) * | 2022-01-13 | 2022-05-10 | 山东大学 | High-power laser sensor and laser power meter |
-
2022
- 2022-06-06 CN CN202210629501.0A patent/CN115014438B/en active Active
Patent Citations (20)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02116169A (en) * | 1988-10-26 | 1990-04-27 | Matsushita Electric Ind Co Ltd | Manufacture of matrix type infrared solid state image sensing device |
| US5471060A (en) * | 1993-08-23 | 1995-11-28 | Matsushita Electric Industrial Co., Ltd. | Pyroelectric infrared radiation detector and method of producing the same |
| US20050109102A1 (en) * | 2002-01-18 | 2005-05-26 | The Board Of Trustees Of The University O F Illinois | Microscale out-of-plane anemometer |
| US20050021247A1 (en) * | 2003-06-06 | 2005-01-27 | The Board Of Trustees Of The University Of Illionis | Sensor chip and apparatus for tactile and/or flow sensing |
| TW200929629A (en) * | 2007-12-28 | 2009-07-01 | Ind Tech Res Inst | Thermoelectric device with thin film elements, apparatus and stacks having the same |
| CN102263198A (en) * | 2010-05-26 | 2011-11-30 | 苏州汉申温差电科技有限公司 | Method for preparing thermoelectric material in low-dimension structure |
| KR20120006620A (en) * | 2010-07-13 | 2012-01-19 | 한국생산기술연구원 | Heat-radiating substrate having thermoelectric thin film and thermal via and manufacturing method of the same |
| WO2014007225A1 (en) * | 2012-07-06 | 2014-01-09 | 国立大学法人九州工業大学 | Method for producing thermoelectric conversion material |
| KR20140110410A (en) * | 2013-03-07 | 2014-09-17 | 홍익대학교 산학협력단 | Fabrication methods of thermoelectric thin film modules using moulds consisting of via-holes and thermoelectric thin film modules produced using the same method |
| US20160035958A1 (en) * | 2014-07-31 | 2016-02-04 | National Tsing Hua University | Manufacturing process of the thermoelectric conversion element |
| WO2016095460A1 (en) * | 2014-12-17 | 2016-06-23 | 深圳市敏杰电子科技有限公司 | Thin-film temperature sensor |
| CN104480508A (en) * | 2014-12-24 | 2015-04-01 | 北京化工大学 | Preparation method of porous and laminar Bi2Te3 nano thermoelectric film |
| CN105789425A (en) * | 2016-01-05 | 2016-07-20 | 中国科学院金属研究所 | Cellulose paper/Bi2Te3 thermoelectric thin-film composite material and preparation method thereof |
| CN112853492A (en) * | 2019-11-27 | 2021-05-28 | 中国科学院金属研究所 | SnSe/CNT high-temperature flexible thermoelectric thin film material and preparation method thereof |
| CN111006809A (en) * | 2019-12-25 | 2020-04-14 | 中国海洋大学 | Three-dimensional MEMS ocean turbulence sensor |
| US20210391522A1 (en) * | 2020-06-12 | 2021-12-16 | Tianma Japan, Ltd. | Thermoelectric transducer and thermoelectric transducer module |
| WO2022021815A1 (en) * | 2020-07-31 | 2022-02-03 | 山东大学 | Embedded high-temperature-resistant transparent conductive thin film, preparation method therefor and use thereof |
| CN114199426A (en) * | 2021-12-03 | 2022-03-18 | 宁波诺丁汉新材料研究院有限公司 | Flexible sensing layer, preparation method of flexible sensor and flexible sensor |
| CN114264385A (en) * | 2021-12-29 | 2022-04-01 | 陕西中建建乐智能机器人股份有限公司 | Robot flexible electronic skin based on thermoelectric effect |
| CN114459603A (en) * | 2022-01-13 | 2022-05-10 | 山东大学 | High-power laser sensor and laser power meter |
Non-Patent Citations (6)
| Title |
|---|
| 张景;马仲;李晟;潘力佳;施毅;: "仿生触觉传感器研究进展", 中国科学:技术科学, no. 01 * |
| 翟庆彬;莫黎昕;杨威;朱冬严;陈鑫灿;耿璐;李路海;: "电容式柔性压力传感器性能影响因素研究", 信息记录材料, no. 05 * |
| 詹斌;兰金叻;林元华;: "CaMnO_3热电薄膜的制备及其性能表征", 稀有金属材料与工程, no. 1, pages 54 - 56 * |
| 陈学江 等: "基于X型力敏器件的俯冲高度传感器", 《传感器技术》 * |
| 陈学江 等: "基于X型力敏器件的俯冲高度传感器", 《传感器技术》, vol. 20, no. 8, 31 December 2001 (2001-12-31), pages 35 - 37 * |
| 颜卓程: "基于力电耦合的可延展柔性传感器的设计与制备", 《中国博士学位论文全文数据库信息科技辑》, no. 2022, pages 28 - 37 * |
Also Published As
| Publication number | Publication date |
|---|---|
| CN115014438B (en) | 2023-07-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN109068477B (en) | A kind of sensitive member of pliable pressure temperature integrated thin-film sensor array and preparation method | |
| CN110207866B (en) | High-sensitivity flexible pressure sensor based on modified paper base and preparation method thereof | |
| CN108318162B (en) | A kind of flexible sensor and preparation method thereof | |
| CN110082010A (en) | Flexible touch sensation sensor array and array scanning system applied to it | |
| CN110375895B (en) | Multifunctional fully flexible fingerprint-shaped touch sensor | |
| CN104283453B (en) | Sliding friction generator, generating method and vector displacement sensor | |
| CN106618521A (en) | Wearable wrist integrated sensor based on PVDF piezoelectric film and preparation method of wearable wrist integrated sensor | |
| CN104253561A (en) | Sliding friction generator, power generation method and vector displacement sensor | |
| CN107525613B (en) | Stretchable pliable pressure sensor and its manufacturing method | |
| CN102506693A (en) | Graphene-based strain measuring and motion sensing device and manufacturing method thereof | |
| CN109406012A (en) | A kind of threedimensional haptic sensor array of flexible piezoelectric formula and preparation method thereof | |
| CN106953001B (en) | A kind of pliable pressure sensor and preparation method thereof based on carbon nano-tube film and photoresist | |
| CN107123470B (en) | A kind of flexible conductive film and preparation method thereof | |
| CN104979467B (en) | A kind of preparation method of composite construction electromechanical transducing material | |
| CN109387235A (en) | Flexible touch sensor array based on film bulk acoustic wave resonator | |
| CN113049148B (en) | Multi-information flexible touch sensor of bionic cilium structure and preparation method thereof | |
| CN113340480B (en) | Flexible pressure sensor and preparation method thereof | |
| CN103970352A (en) | Paper-based flexible touch sensor and manufacturing method thereof | |
| CN107101752A (en) | It is a kind of based on high sensitivity pressure sensor with pointed cone structure graphite alkene and preparation method thereof | |
| CN112179530B (en) | Flexible pressure sensor based on double-sided microstructure electrode and paper and preparation method | |
| CN112945429A (en) | High-sensitivity flexible pressure sensor and manufacturing method thereof | |
| CN115014438B (en) | Bionic multifunctional sensor and preparation method and application thereof | |
| CN209117220U (en) | A kind of threedimensional haptic sensor array of flexible piezoelectric formula | |
| CN114370961A (en) | MXene-GO/adhesive tape composite Janus structure, preparation and application thereof | |
| CN113295085A (en) | Wearable non-woven fabric sensor based on three-dimensional conductive network and preparation method thereof |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |