CN108318162B - A kind of flexible sensor and preparation method thereof - Google Patents
A kind of flexible sensor and preparation method thereof Download PDFInfo
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- CN108318162B CN108318162B CN201810021363.1A CN201810021363A CN108318162B CN 108318162 B CN108318162 B CN 108318162B CN 201810021363 A CN201810021363 A CN 201810021363A CN 108318162 B CN108318162 B CN 108318162B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L1/00—Measuring force or stress, in general
- G01L1/20—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress
- G01L1/22—Measuring force or stress, in general by measuring variations in ohmic resistance of solid materials or of electrically-conductive fluids; by making use of electrokinetic cells, i.e. liquid-containing cells wherein an electrical potential is produced or varied upon the application of stress using resistance strain gauges
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- Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)
Abstract
The embodiment of the invention provides a kind of flexible sensors and preparation method thereof, the sensor includes two sheets of flexible substrate, electrode and sensing layer, there is closed conduct cavity between two sheets of flexible substrate, it include sensing layer in the closed conduct cavity, the sensing layer is made of conductive solids and conducting liquid, or be made of conductive solids and metallic film, the electrode is connected to sensing layer and extends outward the boundary of flexible substrate；The transducer production method includes that tube cavity structure is prepared in hard substrate, coats liquefied conductive solids or flexible liner bottom plate in tube cavity, form tube cavity structure, after adhesive electrode with it is another lead flexible substrate encapsulation after, inject conducting liquid, obtain sensor.The transducer sensitivity is high, and stretchable rate is high, and tolerance is strong, can be applied to wearable electronic equipment, can be to face surface, limb motion, pulse, and a variety of life signals such as breathing respond rapidly to.
Description
Technical field
The present invention relates to strain transducer technical fields, and in particular to a kind of wearable flexible sensor.
Background technique
Wearable electronic equipment can be completed to interact with human body and carry out it long-term monitoring, receive in recent years
Extensive concern.So far, flexible sensor has been prepared to combine with clothes, or directly with the electronics of skin contact
Skin is to realize the real-time monitoring to the physics of human body, chemistry, biology and local environment state.Wearable electronic equipment
To the more demanding of the sensor being disposed therein, this kind of sensor must satisfy high efficiency, high tensility, flexibility, persistently
Property, low-power consumption, biological tolerance and it is light etc. require, electronic skin is more harsh to sensor requirements, extensibility ε > 100%.
When people are in joint parts such as movable knee, fingers, not only need sensor to perceive the size of outer its loading force of bound pair, be both
Need to detect the angle of the positions such as joint rotation and the length of stretching.
Force-sensitive material is that mechanics sensor experiences the most common sensitive material of extraneous mechanical change, is mainly used for measurement pressure
The mechanical quantities such as power, speed, stretching.When by external force, mechanical signal is converted to electrical signal (electricity by mechanics sensor
Resistance, capacitor or voltage etc.).Currently, most common force-sensitive material mainly has metal strain resistance material, semiconductor strain resistance material
Material, alloy strain resistor material, quartz crystal materials, high technology ceramics material etc., but these materials all lack flexibility, it can not be curved
Song is covered in human body surface to may not apply to flexible sensor.In order to meet requirement flexible, power in the prior art
It learns sensor and mostly uses composite conducting material, especially filled-type conductive polymer material, this composite material is mainly to height
Conductive material is added in Molecularly Imprinted Polymer to be combined.
In realizing process of the present invention, at least there are the following problems in the prior art for inventor's discovery: first, when flexibility passes
Sensor meets the requirement of extensibility, and when can be used for wearable electronic equipment, sensitivity is lower, is unsuitable for monitoring human body arteries and veins
It the signals such as fights, breathe；Second, when flexible sensor meets the requirement of sensitivity, extensibility is substantially reduced, biological tolerance power
Difference may not apply to wearable electronic equipment.
Summary of the invention
The embodiment of the invention provides a kind of flexible sensor and preparation method thereof, provide it is a kind of have it is highly sensitive and
The sensor of big extensibility can be used for wearable electronic equipment, and can directly array give birth to as electronic skin monitoring human body
Destiny is dynamic.
In a first aspect, the flexible sensor includes: two sheets of flexible the embodiment of the invention provides a kind of flexible sensor
Substrate, electrode, sensing layer have closed conduct cavity between the two sheets of flexible substrate, include in the closed conduct cavity
There is sensing layer, the electrode is connected to sensing layer and extends outward the boundary of flexible substrate.
Second aspect, the embodiment of the invention provides a kind of preparation methods of flexible sensor, which comprises
Tube cavity template is prepared on hard substrate surface by patterning process；
By the dispersion liquid of conductive solids material after ultrasonic disperse, it is uniformly coated on the surface of tube cavity template；
One layer of liquefied flexible substrate material is uniformly coated on the surface of hard substrate and conductive solids；
After the solidification of liquefied flexible substrate material, it will be shelled in the slave hard substrate of flexible substrate and conductive solids one
From the conductive solids forms tube cavity shape；
It adhesion electrode and is encapsulated with another layer of flexible substrate at tube cavity；
Conducting liquid and encapsulation process are injected in tube cavity.
The third aspect, the embodiment of the invention provides the preparation methods of another flexible sensor, which comprises
Tube cavity template is prepared on hard substrate surface by patterning process；
One layer of liquefied flexible substrate material is uniformly coated on hard substrate surface；
Flexible substrate is formed after liquefied flexible substrate material solidification, flexible substrate is removed from hard substrate, it is described
Flexible substrate surface forms tube cavity shape；
The conductive metal deposition film layer in tube cavity；
It adhesion electrode and is encapsulated with another layer of flexible substrate at tube cavity；
Conducting liquid and encapsulation process are injected in tube cavity.
Above-mentioned technical proposal is had the following beneficial effects: because being coated the technology hand of sensing layer using two sheets of flexible substrate
Section, so having reached the technical effect of flexible sensor high sensitivity and super large extensibility；The preparation side of the flexible sensor
Method process is simple, and the success rate for preparing flexible sensor is high.
Detailed description of the invention
In order to more clearly explain the embodiment of the invention or the technical proposal in the existing technology, to embodiment or will show below
There is attached drawing needed in technical description to be briefly described, it should be apparent that, the accompanying drawings in the following description is only this
Some embodiments of invention for those of ordinary skill in the art without creative efforts, can be with
It obtains other drawings based on these drawings.
Fig. 1 is the structural schematic diagram of 1 flexible sensor of the embodiment of the present invention；
Fig. 2 is the structural schematic diagram of 2 flexible sensor of the embodiment of the present invention；
Fig. 3 is the flow chart of the preparation method of 1 flexible sensor of the embodiment of the present invention；
Fig. 4 is the flow chart of the preparation method of 2 flexible sensor of the embodiment of the present invention；
Fig. 5 is the schematic diagram of the preparation process of 1 flexible sensor of the embodiment of the present invention, wherein Fig. 5 (a) is to prepare pipeline
Cavity template, Fig. 5 (b) are the liquefied conductive solids materials of coating, and Fig. 5 (c) is the liquefied flexible substrate material of coating, Fig. 5 (d)
It is the conductive solids and flexible substrate of integrally transfer curing, Fig. 5 (e) is that adhesive electrode encapsulates another layer of flexible substrate, Fig. 5
It (f) is injection conductive liquid material, Fig. 5 (g) encapsulation obtains completed device；
Fig. 6 is the test result figure of flexible sensor different stretch ratio of the embodiment of the present invention；
Fig. 7 is the test result figure of flexible sensor multi-drawing of the embodiment of the present invention；
Fig. 8 is resistance change rate-time graph under the conditions of flexible sensor different deformation of the embodiment of the present invention, wherein scheming
8 (a) be resistance change rate-time graph when being bent, resistance change rate-time graph when Fig. 8 (b) is compression；
Fig. 9 is resistance change rate-time graph that flexible sensor of the embodiment of the present invention is applied to human body different parts,
Resistance change rate-time graph when middle Fig. 9 (a) is applied to finger-joint, electricity when Fig. 9 (b) is applied to wrist joint
Resistive rate-time graph, resistance change rate-time graph when Fig. 9 (c) is applied between finger；
Wherein, 1- flexible substrate, 2- conducting liquid, 3- electrode, 4- conductive solids, 5- metal film layer.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, it is obtained by those of ordinary skill in the art without making creative efforts every other
Embodiment shall fall within the protection scope of the present invention.
Fig. 1 and Fig. 2 are please referred to, Fig. 1 is the structural schematic diagram of 1 flexible sensor of the embodiment of the present invention, and Fig. 2 is of the invention real
Apply the structural schematic diagram of 2 flexible sensor of example.
A kind of flexible sensor, which is characterized in that including two sheets of flexible substrate 1, electrode 3, sensing layer, the two sheets of flexible
There is closed conduct cavity between substrate 1, include sensing layer in the closed conduct cavity, the electrode 3 connects with sensing layer
Lead to and extend outward the boundary of flexible substrate 1.
Preferably, the sensing layer is made of conducting liquid 2 and conductive solids 4, the conducting liquid 2 and conductive solids 4
Structural relation share following four:
Conductive solids 4 is located at the side of the closed conduct cavity, and conducting liquid 2 is located at the another of the closed conduct cavity
Side, conductive solids 4 and conducting liquid 2 are independent adjacent double-layer structure, for the double-deck flow through structure；
Conductive solids 4 is located at the two sides of the closed conduct cavity, and conducting liquid 2 is located at two layers of conductive solids, 4 shape
At intermediate course, be wrapped in conducting liquid 2 between two layers of conductive solids 4, be three laminar flow general formula structures；
Conductive solids 4 is located at whole inner surfaces of the closed conduct cavity, and the conducting liquid 2 is located at described conductive solid
In the cavity that body 4 is formed, 2 surrounding of single layer of conductive liquid is surrounded by conductive solids 4, is three layers of enclosed construction；
Conductive solids 4 is dispersed in the conducting liquid 2, is embedded overall structure；
Preferably, the electrode 3 is connected to sensing layer between two sheets of flexible substrate 1 and extends outward flexible liner
The boundary at bottom 1.
Preferably, the sensing layer is made of conducting liquid 2 and metallic film 5；
Metal film layer 5 is deposited on the side of the closed conduct cavity, and conducting liquid 2 is located at the closed conduct cavity
The other side, metal film layer and conducting liquid are independent adjacent double-layer structure, for the double-deck flow through structure；
Metal film layer 5 is deposited on the two sides of the closed conduct cavity, and conducting liquid 2 is located at the metallic film and is formed
Intermediate course, single layer conducting liquid is wrapped up between double layer of metal film, for the double-deck flow through structure；
Metal film layer 5 is deposited on whole inner surfaces of the closed conduct cavity, and conducting liquid 2 is located at the metal foil
In the cavity that film layer is formed, 2 surrounding of single layer of conductive liquid is surrounded by metallic film, is three layers of enclosed construction.
Preferably, the cross sectional shape of the closed conduct cavity formed between two sheets of flexible substrate 1 includes: rectangle, triangle,
Circle, polygon, irregular shape；The closed conduct cavity includes: straight line along the axis that section extends, snakelike, waveform, mosquito
Fragrant shape.
Preferably, the material of conducting liquid 2 includes: Polyglycolic acid fibre-poly styrene sulfonate, Signa Gel, receives
Rice corpuscles dispersion liquid, ionic liquid, liquid metal, conducting polymer；
Preferably, the material of conductive solids 4 includes: nano particle, monodimension nanometer material, two-dimension nano materials；It is described to receive
Rice material includes: gold nano grain, silver nano-grain, copper nano particles and carbon nano-particle；Monodimension nanometer material includes: that carbon is received
Mitron, graphene ribbon, nanowires of gold, silver nanowires, copper nano-wire, semiconductor nanowires, stick；Two-dimension nano materials include: stone
Black alkene and its derivative, black phosphorus, hexagonal boron nitride, molybdenum disulfide, transient metal sulfide, graphitic nitralloy boron, oxo transition metal
Compound, metal oxyhalide；
Preferably, metal film layer 5 includes: gold thin film, Ag films, Copper thin film, platinum film, aluminium film；
Preferably, the material of flexible substrate 1 includes: dimethyl silicone polymer, silicon rubber, polyurethane, poly terephthalic acid
Ethyl alcohol ester, polyimides, platinum catalysis silicon rubber, polyethylene naphthalate, epoxy resin.
Referring to FIG. 3, Fig. 3 is the flow chart of the preparation method of 1 flexible sensor of the embodiment of the present invention,
101, tube cavity template is prepared on hard substrate surface by patterning process；
102, by the dispersion liquid of conductive solids material after ultrasonic disperse, it is uniformly coated on the table of tube cavity template
Face；
103, one layer of liquefied flexible substrate material is uniformly coated on the surface of hard substrate and conductive solids 4；
104, after liquefied flexible substrate material solidifies, by the slave hard substrate of 4 one of flexible substrate 1 and conductive solids
Upper removing, the conductive solids 4 form tube cavity shape；
105, it adhesion electrode 3 and is encapsulated with another layer of flexible substrate 1 at tube cavity；
106, conducting liquid 2 and encapsulation process are injected in tube cavity.
Referring to FIG. 4, Fig. 4 is the flow chart of the preparation method of 2 flexible sensor of the embodiment of the present invention,
201, tube cavity template is prepared on hard substrate surface by patterning process；
202, one layer of liquefied flexible substrate material is uniformly coated on hard substrates surface；
203, flexible substrate 1 is formed after liquefied flexible substrate material solidification, flexible substrate 1 is shelled from hard substrate
From 1 surface of flexible substrate forms tube cavity shape；
204, the conductive metal deposition film layer 5 in tube cavity；
205, it adhesion electrode 3 and is encapsulated with another layer of flexible substrate 1 at tube cavity；
206, conducting liquid 2 and encapsulation process are injected in tube cavity.
Preferably, the tube cavity cross sectional shape includes: rectangle, and triangle is round, polygon, irregular shape；It is described
Closed conduct cavity includes: straight line along the axis that section extends, snakelike, waveform, mosquito-repellent incense-shaped.
It is further preferred that the coating, comprising: spin coating, drop coating, dip coated, blade coating.
Preferably, the dispersion liquid by 4 material of conductive solids is uniformly coated on tube cavity after ultrasonic disperse
The surface of template, comprising:
The dispersion liquid of 4 material of conductive solids only coats the side of the closed conduct cavity after ultrasonic disperse；
The dispersion liquid of 4 material of conductive solids is after ultrasonic disperse, the two sides coated on the closed conduct cavity；
The dispersion liquid of 4 material of conductive solids is after ultrasonic disperse, table in the whole coated on the closed conduct cavity
Face.
It is preferably, described that conducting liquid 2 and encapsulation process are injected in tube cavity, further includes:
The conducting liquid 2 and encapsulation process dissolved with conductive solids 4 are injected in tube cavity.
It is preferably, described in tube cavity deposited inside conductive metal film layer 5, comprising:
Metal film layer 5 is deposited on to the side of tube cavity；
Metal film layer 5 is deposited on to the two sides of tube cavity；
Metal film layer 5 is deposited on to whole inner surfaces of tube cavity；
It is further preferred that the deposition, comprising: vacuum evaporation, magnetron sputtering, ion plating, pulse laser deposition, chemistry
Immersion plating, the method for spin coating.
Referring to FIG. 5, Fig. 5 is the schematic diagram of the preparation process of 1 flexible sensor of the embodiment of the present invention, wherein Fig. 5
It (a) is to prepare tube cavity template, Fig. 5 (b) is the liquefied conductive solids material of coating, and Fig. 5 (c) is the liquefied flexible liner of coating
Bottom material, Fig. 5 (d) are the conductive solids and flexible substrate of integrally transfer curing, and Fig. 5 (e) is that adhesive electrode encapsulates another layer
Flexible substrate, Fig. 5 (f) are injection conductive liquid materials, and Fig. 5 (g) encapsulation obtains completed device.Using patterning process in hard
Substrate surface prepares tube cavity template, and the hard substrate can be glass, quartz etc., as shown in Fig. 5 (a)；In pipeline sky
The surface of cavity template, the 4 material dispersion liquid of conductive solids of spin coating, drop coating, dip coated, one layer of blade coating after ultrasonic disperse, such as
Shown in Fig. 5 (b)；One layer of liquefied flexible substrate material is uniformly coated on the surface of hard substrate and conductive solids 4, such as Fig. 5 (c)
It is shown；After flexible substrate material solidification, the integrally conductive solids 4 and flexible substrate 1 of transfer curing, the conductive solids 4
With tube cavity structure corresponding with tube cavity template, as shown in Fig. 5 (d)；It is solid with conduction by the conducting wire as electrode 3
Body 4 is pasted together, and is encapsulated with the cured flexible substrate of another layer, as shown in Fig. 5 (e)；It is infused in the tube cavity
Enter conducting liquid 2, encapsulation obtains complete device, as shown in Fig. 5 (g).
Above-mentioned technical proposal have the following beneficial effects: the present invention using the excellent electric conductivity of Nano grade conductive solids and
Pliability improves the electric property of sensor；Secondly it is higher to impart sensor for the combination of conductive solids and conducting liquid
The tolerance of sensitivity and multiple deformation；Select dimethyl silicone polymer, silicon rubber, polyurethane, polyethanol terephthalate,
The materials such as polyimides, platinum catalysis silicon rubber, polyethylene naphthalate, epoxy resin are as flexible substrate material to sensing
Device is packaged, and imparts the stretching range of sensor excellent flexibility and superelevation, the closing formed between two sheets of flexible substrate
Pipeline configuration ensure that the flowing of conducting liquid；This sensor application has huge latent in the electronic equipment of flexible wearable
Power.
Not only preparation process is simple for this flexible sensor, but also has good flexible and biological tolerance, to stretch,
The human bodies life movements such as bending, Compressive Mechanical deformation and face surface, limb motion, pulse, breathing can produce significantly
Response.Other than monitoring mechanical change, monitoring temperature, humidity and illumination variation can be also used for, can collect in external environment
Different directions, various forms of energy, and it is translated into electric energy.
Above-mentioned technical proposal of the embodiment of the present invention is described in detail below in conjunction with application example:
When sensor array is with for electronic skin with direct body contact, not only need to meet demand flexible, but also
The material for needing elasticity, can stretch, be bent, and meet the needs of positions such as human synovial movement.
Pressure touch sensor master for detection object by external force pressure applied size and distribution situation simultaneously
Hardness and the shape etc. that contact object can be detected indirectly, to differentiate the material and classification of object.The class of pressure touch sensor
It is not basically divided into resistance strain type pressure sensor, capacitance pressure transducer, piezoelectric pressure indicator, inductance type pressure
Sensor etc., but these sensors lack flexibility, size is larger, is difficult to apply on human skin.Therefore, multiple with conduction
Novel flexible pressure tactility apparatus based on condensation material occurs in succession, and when being acted on by ambient pressure, the resistance of composite material will
It changes, by the corresponding variation of measurement sensor output signal, can be obtained the situation of change of ambient pressure, but it is multiple
The sensitivity of condensation material after being stretched will reduce, the faint life signal of human body out unable to monitor.
Low-dimension nano material (nano particle；One-dimensional nano line, stick, pipe, band；Two-dimentional synusia) relative to other materials and
Speech, the physical size of certain dimension are limited in nanometer range, due to the influence of quantum effect etc., the general machine with superelevation
The excellent properties such as tool intensity, thermoelectricity capability, luminous efficiency, catalytic performance, magnetic property.It can be used for preparing and be received with particular functionality
Rice structure and device, such as: field-effect tube (Field Effect Transistor, FET), sensor (Sensor) are transparent to lead
Conductive film (Transparent Conductive Film, TCF) etc..
The response mechanism of flexible sensor provided in an embodiment of the present invention mainly has following four: geometrical factor: by R=ρ
L/S is it is found that the change of nano material length can cause the variation of resistance value.Piezoresistive effect: the malformation of sensor can cause
Resistance changes, and resistance change rate can be expressed asFirst part can be understood as external force and cause
Influence, second part is the variation of nano material resistivity itself.Be broken effect and slight crack expansion: deformation occurs for sensor
Afterwards, it may cause between nano material that overlapping region reduces, nano material slips off and nano material is possibly into elastic fluid
Breaking part.These phenomenons all can cause the resistance of device to change.Tunnel-effect: the tunnel resistor between neighbouring nano material
It can be expressed as this formulaWherein A is tunnel cross sectional product, and J is represented
Tunneling current density, after deformation occurs for sensor, tunnel resistor changes, and device resistance increases.Based on above-mentioned four kinds of sound
Mechanism is answered, the sensitivity superelevation of this sensor is worn on human body for monitoring when this flexible sensor array is at electronic skin
The life movement of human body can detect extremely faint signal.
Referring to FIG. 6, Fig. 6 is the test result figure of flexible sensor different stretch ratio of the embodiment of the present invention, abscissa
For the time, ordinate is resistance change rate, and 20%, 40% in figure, 60% is by the size of flexible sensor by the stretching in figure
Direction is stretched as the 120% of full size, resistance change rate figure when 140%, 160%.As seen from the figure, flexible sensor is stretched to
When 160%, sensitivity is still higher.
Referring to FIG. 7, Fig. 7 is the test result figure of flexible sensor multi-drawing of the embodiment of the present invention, as shown in Figure 7,
Flexible sensor is tested through multi-drawing, and resistance change rate is consistent substantially through multi-drawing.When flexible sensor is used for
When wearable electronic equipment, that is, it is used in the physical feeling of the frequent activities such as similar finger-joint, sensor will not be influenced
Sensitivity.
Referring to FIG. 8, Fig. 8 is resistance change rate-time under the conditions of flexible sensor different deformation of the embodiment of the present invention
Curve, resistance change rate-time graph when wherein Fig. 8 (a) is bending, resistance change rate-time when Fig. 8 (b) is compression
Curve.Referring to FIG. 9, Fig. 9 is resistance change rate-time that flexible sensor of the embodiment of the present invention is applied to human body different parts
Curve, resistance change rate-time graph when wherein Fig. 9 (a) is applied to finger-joint, Fig. 9 (b) are to be applied to wrist joint
When resistance change rate-time graph, resistance change rate-time graph when Fig. 9 (c) is applied between finger.To sum up may be used
Know, when the flexible sensor array is at electronic skin, when applied to the life movement for measuring human body, sensor can quickly be rung
It answers.
The preparation process and method of the flexible sensor of different structure is described in detail below:
Embodiment 1:
1, sheet glass is cleaned with clean ethyl alcohol, with being dried with nitrogen rear equidistant pasted with high temperature-resistant adhesive tape.
2, the NANO CRYSTAL COPPER WIRE of isopropanol (IPA) will be dissolved in after ultrasonic disperse, it is uniform to draw dispersion solution with dropper
Sheet glass is placed on the hot plate in glove box and is heated at high temperature after IPA volatilization on high-temperature plastic band by drop coating, NANO CRYSTAL COPPER WIRE it
Between intersect and mutually melt, form conductive network.
3, uniform spin coating liquid dimethyl silicone polymer (PDMS) on the glass sheet, be subsequently placed on hot plate be heated to it is solid
Change, it is removed from sheet glass, NANO CRYSTAL COPPER WIRE conductive network has been embedded in the surface PDMS, and is formed obviously at NANO CRYSTAL COPPER WIRE
Tube cavity structure.
4, elargol is smeared in NANO CRYSTAL COPPER WIRE film layer two sides, adhesion conducting wire is simultaneously bonded top layer PDMS.
5, conductive liquid material PEDOT:PSS (poly- enedioxy is injected at closed conduct cavity structure between two layers of PDMS
Thiophene-poly styrene sulfonate), obtain wearable flexible sensor.
Embodiment 2:
1, sheet glass is cleaned with clean ethyl alcohol, with being dried with nitrogen rear equidistant pasted with high temperature-resistant adhesive tape.
2, the NANO CRYSTAL COPPER WIRE for being dissolved in IPA is drawn into the dispersion uniform drop coating of solution resistance to dropper after ultrasonic disperse
On high temperature gummed tape, sheet glass is placed on the hot plate in glove box after IPA volatilization and is heated at high temperature, phase is intersected between NANO CRYSTAL COPPER WIRE
Melt, forms conductive network.
3, uniform spin coating platinum catalysis silicon rubber on the glass sheet removes it after solidifying under normal temperature state from sheet glass,
NANO CRYSTAL COPPER WIRE conductive network has been embedded in platinum catalysis silastic surface, and apparent tube cavity knot is formed at NANO CRYSTAL COPPER WIRE
Structure.
4, elargol is smeared in NANO CRYSTAL COPPER WIRE film layer two sides, adhesion conducting wire is simultaneously bonded top layer platinum catalysis silicon rubber.
5, conductive liquid material PEDOT:PSS is injected at micro- channel structure between two layers of platinum catalysis silicon rubber, obtains to wear
Wear flexible mechanics sensor.
Embodiment 3:
1, sheet glass is cleaned with clean ethyl alcohol, with being dried with nitrogen rear equidistant pasted with high temperature-resistant adhesive tape.
2, the NANO CRYSTAL COPPER WIRE for being dissolved in ethyl alcohol is drawn into the dispersion uniform drop coating of solution resistance to dropper after ultrasonic disperse
On high temperature gummed tape, intersects between nano-silver thread after ethyl alcohol volatilization and mutually melt, form conductive network.
3, uniform spin coating liquid PDMS on the glass sheet, is subsequently placed in and is heated to solidifying on hot plate, by it from sheet glass
Removing, nano-silver thread conductive network, which has been embedded at the surface PDMS and NANO CRYSTAL COPPER WIRE, forms apparent tube cavity structure.In
Elargol is smeared in nano-silver thread film layer two sides, and adhesion conducting wire is simultaneously bonded top layer PDMS.
4, conductive liquid material PEDOT:PSS is injected at tube cavity structure between two layers of PDMS, obtains wearable flexibility
Mechanics sensor.
Embodiment 4:
1, sheet glass is cleaned with clean ethyl alcohol, with being dried with nitrogen rear equidistant pasted with high temperature-resistant adhesive tape.
2, uniform spin coating liquid PDMS on the glass sheet, is subsequently placed in and is heated to solidifying on hot plate, by it from sheet glass
Removing forms apparent micro- channel structure.
3, in micro- channel structure bottom vacuum gold coated films by the way of metal hot evaporation.
4, elargol is smeared in gold thin film layer two sides, adhesion conducting wire is simultaneously bonded top layer PDMS.
5, conductive liquid material PEDOT:PSS is injected at micro- channel structure between two layers of PDMS, obtains wearable flexible force
Learn sensor.
It should be understood that the particular order or level of the step of during disclosed are the examples of illustrative methods.Based on setting
Count preference, it should be appreciated that in the process the step of particular order or level can be in the feelings for the protection scope for not departing from the disclosure
It is rearranged under condition.Appended claim to a method is not illustratively sequentially to give the element of various steps, and not
It is to be limited to the particular order or level.
In above-mentioned detailed description, various features are combined together in single embodiment, to simplify the disclosure.No
This published method should be construed to reflect such intention, that is, the embodiment of theme claimed needs to compare
The more features of the feature clearly stated in each claim.On the contrary, as appended claims is reflected
Like that, the present invention is in the state fewer than whole features of disclosed single embodiment.Therefore, appended claims
It is hereby expressly incorporated into detailed description, wherein each claim is used as alone the individual preferred embodiment of the present invention.
For can be realized any technical staff in the art or using the present invention, above to disclosed embodiment into
Description is gone.To those skilled in the art；The various modifications mode of these embodiments will be apparent from, and this
The General Principle of text definition can also be suitable for other embodiments on the basis of not departing from the spirit and scope of the disclosure.
Therefore, the disclosure is not limited to embodiments set forth herein, but most wide with principle disclosed in the present application and novel features
Range is consistent.
Description above includes the citing of one or more embodiments.Certainly, in order to describe above-described embodiment and description portion
The all possible combination of part or method is impossible, but it will be appreciated by one of ordinary skill in the art that each implementation
Example can do further combinations and permutations.Therefore, embodiment described herein is intended to cover fall into the appended claims
Protection scope in all such changes, modifications and variations.In addition, with regard to term used in specification or claims
The mode that covers of "comprising", the word is similar to term " includes ", just as " including " solved in the claims as transitional word
As releasing.In addition, the use of any one of specification in claims term "or" being to indicate " non-exclusionism
Or ".
Above-described specific embodiment has carried out further the purpose of the present invention, technical scheme and beneficial effects
It is described in detail, it should be understood that being not intended to limit the present invention the foregoing is merely a specific embodiment of the invention
Protection scope, all within the spirits and principles of the present invention, any modification, equivalent substitution, improvement and etc. done should all include
Within protection scope of the present invention.
Claims (8)
1. a kind of flexible sensor, which is characterized in that including two sheets of flexible substrate (1), electrode (3), sensing layer, described two layers soft
Property substrate (1) between there is closed conduct cavity, include sensing layer in the closed conduct cavity, the sensing layer is by conduction
Liquid (2) and conductive solids (4) composition or the sensing layer are made of conducting liquid (2) and metal film layer (5), described
Electrode (3) is connected to sensing layer and extends outward the boundary of flexible substrate (1)；
Wherein, when the sensing layer is made of conducting liquid (2) and conductive solids (4):
The conductive solids (4) is located at the side of the closed conduct cavity, and the conducting liquid (2) is located at the closed conduct
The other side of cavity；
Alternatively, the conductive solids (4) is located at conducting liquid (2) described in the two sides of the closed conduct cavity positioned at described two layers
The intermediate course that conductive solids (4) is formed；
Alternatively, the conductive solids (4) is located at whole inner surfaces of the closed conduct cavity, the conducting liquid (2) is located at
In the cavity that the conductive solids (4) is formed；
When the sensing layer is made of conducting liquid (2) and metal film layer (5):
The metal film layer (5) is deposited on the side of the closed conduct cavity, and the conducting liquid (2) is located at the closing
The other side of tube cavity；
Alternatively, the metal film layer (5) is deposited on the two sides of the closed conduct cavity, the conducting liquid (2) is located at institute
State the intermediate course of metal film layer (5) formation；
Alternatively, the metal film layer (5) is deposited on whole inner surfaces of the closed conduct cavity, the conducting liquid (2)
In the cavity that the metal film layer (5) are formed.
2. flexible sensor according to claim 1, which is characterized in that formed between the two sheets of flexible substrate (1)
The cross sectional shape of closed conduct cavity includes: rectangle, and triangle, polygon is round, irregular shape；The closed conduct cavity
The axis extended along section includes: straight line, snakelike, waveform, mosquito-repellent incense-shaped.
3. flexible sensor according to claim 1, which is characterized in that
The material of the conducting liquid (2) includes: Polyglycolic acid fibre-poly styrene sulfonate, Signa Gel, nanoparticle
Dispersion liquid, ionic liquid, liquid metal, conducting polymer；
The material of the conductive solids (4) includes: nano particle, monodimension nanometer material, two-dimension nano materials；The nano material
It include: gold nano grain, silver nano-grain, copper nano particles and carbon nano-particle；Monodimension nanometer material include: carbon nanotube,
Graphene ribbon, nanowires of gold, silver nanowires, copper nano-wire, semiconductor nanowires, stick；Two-dimension nano materials include: graphene and
Its derivative, black phosphorus, hexagonal boron nitride, molybdenum disulfide, transient metal sulfide, graphitic nitralloy boron, transition metal oxide, gold
Belong to oxyhalide；
The metal film layer (6) includes: gold thin film, Ag films, Copper thin film, platinum film, aluminium film；
The material of the flexible substrate (1) includes: dimethyl silicone polymer, silicon rubber, polyurethane, poly terephthalic acid ethyl alcohol
Ester, polyimides, platinum catalysis silicon rubber, polyethylene naphthalate, epoxy resin.
4. a kind of preparation method of the flexible sensor as described in claims 1 or 2 or 3, which is characterized in that the method packet
It includes:
Tube cavity template is prepared on hard substrate surface by patterning process；
By the dispersion liquid of conductive solids material after ultrasonic disperse, it is uniformly coated on the surface of tube cavity template；
One layer of liquefied flexible substrate material is uniformly coated on the surface of hard substrate and conductive solids (4)；
After the solidification of liquefied flexible substrate material, it will be shelled in the slave hard substrate of flexible substrate (1) and conductive solids (4) one
From the conductive solids (4) forms tube cavity shape；
It adhesion electrode (3) and is encapsulated with another layer of flexible substrate (1) at tube cavity；
Conducting liquid (2) and encapsulation process are injected in tube cavity.
5. a kind of preparation method of the flexible sensor as described in claims 1 or 2 or 3, which is characterized in that the method packet
It includes:
Tube cavity template is prepared on hard substrate surface by patterning process；
One layer of liquefied flexible substrate material is uniformly coated on hard substrate surface；
Flexible substrate (1) is formed after liquefied flexible substrate material solidification, flexible substrate (1) is removed from hard substrate, institute
It states flexible substrate (1) surface and forms tube cavity shape；
Conductive metal deposition film layer (5) in tube cavity；
It adhesion electrode (3) and is encapsulated with another layer of flexible substrate (1) at tube cavity；
Conducting liquid (2) and encapsulation process are injected in tube cavity.
6. the preparation method of flexible sensor according to claim 4, which is characterized in that the tube cavity cross sectional shape
It include: rectangle, triangle, polygon is round, irregular shape；The closed conduct cavity includes: straight along the axis that section extends
Line, snakelike, waveform, mosquito-repellent incense-shaped.
7. the preparation method of flexible sensor according to claim 4, which is characterized in that the coating, comprising: spin coating,
Drop coating, dip coated, blade coating；
The dispersion liquid by conductive solids (4) material is uniformly coated on the table of tube cavity template after ultrasonic disperse
Face, comprising:
The dispersion liquid of conductive solids (4) material only coats the side of the closed conduct cavity after ultrasonic disperse；
The dispersion liquid of conductive solids (4) material is after ultrasonic disperse, the two sides coated on the closed conduct cavity；
The dispersion liquid of conductive solids (4) material is after ultrasonic disperse, whole inner surfaces coated on the closed conduct cavity；
It is described that conducting liquid (2) and encapsulation process are injected in tube cavity, further includes:
The conducting liquid (2) and encapsulation process dissolved with conductive solids (4) are injected in tube cavity.
8. the preparation method of flexible sensor according to claim 5, which is characterized in that described to sink on the inside of tube cavity
Product conductive metal film layer (5), comprising:
Metal film layer (5) is deposited on to the side of tube cavity；
Metal film layer (5) is deposited on to the two sides of tube cavity；
Metal film layer (5) is deposited on to whole inner surfaces of tube cavity；
The deposition, comprising: vacuum evaporation, magnetron sputtering, ion plating, pulse laser deposition, electroless plated, the method for spin coating.
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