CN115014438B - Bionic multifunctional sensor and preparation method and application thereof - Google Patents
Bionic multifunctional sensor and preparation method and application thereof Download PDFInfo
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- CN115014438B CN115014438B CN202210629501.0A CN202210629501A CN115014438B CN 115014438 B CN115014438 B CN 115014438B CN 202210629501 A CN202210629501 A CN 202210629501A CN 115014438 B CN115014438 B CN 115014438B
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Abstract
The invention relates to the technical field of wearable sensors, and provides a bionic multifunctional sensor and a preparation method and application thereof. The bionic multifunctional sensor provided by the invention can sense the approach of a heat source, the temperature, the pressure, the air flow and the high-frequency vibration at the same time; the sensor has a simple structure, a very simple preparation process, full-automatic and mechanized production potential, and excellent performance on the perception of the signals, and the sensor has important application prospects in the fields of bionic robots, intelligent monitoring, human-computer interfaces and the like.
Description
Technical Field
The invention relates to the technical field of wearable sensors, in particular to a bionic multifunctional sensor, a preparation method and application thereof.
Background
A wearable device is a device that can be mounted on humans, animals, and objects, and that can sense, communicate, and process information, and a sensor is the core device of the wearable device. The wearable sensor is widely applied to industrial production, medical health and daily families, and promotes the rapid development of the fields of man-machine interaction, high-performance robots, health monitoring and the like. Among them, pressure, strain, temperature, vibration, wind speed sensors, etc. have received a great deal of attention in the past decade. It is also an important research direction how to integrate various sensing functions while improving the sensitivity, response time, test range and fatigue resistance of the sensor. The research and development of the multifunctional sensing equipment is good, the sensing capability of surrounding environment and the like is greatly expanded, and meanwhile, the use area and the manufacturing cost of the sensing equipment can be reduced.
Recently, it has been reported in the literature (Advanced Materials,2019, 31, 36, 1902831) that the temperature can be detected by using a sensor array made of pyroelectric material barium titanate, and the pressure of vibration can also be detected. There is also a document (Nature Communications,2020, volume 11, phase 1, pages 1-10) reporting a self-healing sponge made with a mix of nickel particles and PVDF-HFP that can achieve a perception of pressure and proximity. It is also reported in literature (Science Advances,2020, volume 6, 45 th edition, page ambd 0202) that the sensing of these signals is achieved by integrating all of the electrocardiographic, temperature, acoustic and motion sensors on a sheet of self-healing elastic film.
However, these reported sensing devices either have fewer signals to detect, are only bifunctional sensing, and are insufficient to meet the increasing demands; or the structure is complex, excessive and dense lines are generated, more delay is generated on the data reading time, and more external ports are needed. Therefore, how to obtain a sensor with more excellent comprehensive performance such as multifunctional sensing and simple structure has become one of the problems to be solved by researchers in the field.
Disclosure of Invention
In view of the above, the application provides a bionic multifunctional sensor, a preparation method and application thereof, and the multifunctional sensor provided by the invention has a simple structure and is beneficial to application while guaranteeing multifunctional perceptions of temperature, pressure, air flow and the like.
The invention provides a bionic multifunctional sensor which comprises a flexible circuit board and a porous thermoelectric film, wherein the porous thermoelectric film is strip-shaped and obliquely arranged on the flexible circuit board, and two ends of the porous thermoelectric film in the length direction are electrically connected with a circuit of the flexible circuit board.
In an embodiment of the present invention, the porous thermoelectric film includes: a flexible porous base film obliquely disposed on the flexible circuit board, and a thermoelectric film composited on at least one surface of the flexible porous base film; the thermoelectric film is strip-shaped, and two ends in the length direction are connected with the circuit of the flexible circuit board in a conductive manner.
In an embodiment of the invention, the thickness of the thermoelectric film is 200-700 nm, and the Seebeck factor is 50-200 mu V/K.
In an embodiment of the invention, at least one end of the thermoelectric film in the length direction is connected with a conductive film for conductive connection with a circuit of the flexible circuit board.
In an embodiment of the present invention, the thickness of the conductive film is 50 to 200nm.
In the embodiment of the invention, only one end of the thermoelectric film in the length direction is connected with the conductive film, and the conductive film and the thermoelectric film form a U-shaped structure.
In the embodiment of the invention, the included angle between the porous thermoelectric film and the flexible circuit board is 40-70 degrees.
In the embodiment of the invention, the flexible circuit board is composed of a flexible substrate and a liquid metal circuit on the surface of the flexible substrate, wherein the flexible substrate is provided with an inclined groove for obliquely arranging the porous thermoelectric film; the liquid metal circuit is electrically connected with the two ends of the porous thermoelectric film in the length direction.
The invention provides a preparation method of the bionic multifunctional sensor, which comprises the following steps:
providing a flexible circuit board and a strip-shaped porous thermoelectric film respectively;
and the porous thermoelectric film is obliquely arranged on the flexible circuit board, and the porous thermoelectric film and the flexible circuit board are connected in a conductive manner and packaged.
The invention also provides application of the bionic multifunctional sensor in manufacturing robots, man-machine interaction and health monitoring.
The embodiment of the invention provides a bionic multifunctional sensor, which comprises a flexible substrate, a porous thermoelectric film and a liquid metal circuit, wherein the flexible substrate is arranged on the porous thermoelectric film; the flexible substrate and the liquid metal circuit form a flexible circuit board, the porous thermoelectric film is strip-shaped and obliquely arranged on the flexible circuit board, and two ends of the porous thermoelectric film in the length direction are electrically connected with the circuit. For example, after the porous thermoelectric film is inserted into the flexible substrate, one end (a U-shaped closed end) where the thermoelectric film and the conductive film are overlapped is suspended in the air, and the thermoelectric film and the conductive film are respectively connected with the liquid metal circuit. Meanwhile, another object of the present invention is to provide a simplified manufacturing method of the multifunctional sensor. Compared with the prior art, the bionic multifunctional sensor provided by the invention can sense the approach of a heat source, the temperature, the pressure, the air flow and the high-frequency vibration at the same time; the sensor has simple structure, very simple preparation flow, full-automatic and mechanized production potential, and excellent performance on the perception of the signals. Experimental results show that the bionic multifunctional sensor prepared by the invention has important application prospects in the fields of bionic robots, intelligent monitoring, human-computer interfaces and the like when being used for detecting a heat source with a distance of 25cm and at a temperature of 40 ℃, a target object temperature of-189-150 ℃, a wind speed detection range of 1-20.4 m/s and high-frequency vibration induction of 1000 Hz.
Drawings
FIG. 1 is a schematic diagram of a multifunctional sensor according to some embodiments of the present invention;
FIG. 2 is a diagram illustrating the dimensions of a U-shaped structure formed by a thermoelectric film and a copper film in accordance with some embodiments of the present invention;
FIG. 3 is a graph showing the sensing of the heat source approaching distance by the multifunctional sensor prepared in example 1 of the present invention;
FIG. 4 is a graph showing the resistance response of the multifunctional sensor prepared in example 1 of the present invention to pressure cycling;
FIG. 5 is a graph showing the voltage response of the multifunctional sensor prepared in example 1 of the present invention to the temperature of a target object;
FIG. 6 is a graph showing the resistance response of the multifunctional sensor prepared in example 1 of the present invention to different wind speeds of forward wind;
FIG. 7 is a graph showing the resistance response of the multifunctional sensor prepared in example 1 of the present invention to different wind speeds against the back wind;
FIG. 8 is a graph showing the current response of the multifunctional sensor prepared in example 1 of the present invention to high frequency vibration.
Detailed Description
For a further understanding of the present invention, preferred embodiments of the invention are described below in conjunction with the examples, but it should be understood that these descriptions are merely intended to illustrate further features and advantages of the invention and are not limiting of the invention claims.
The invention provides a bionic multifunctional sensor which comprises a flexible circuit board and a porous thermoelectric film, wherein the porous thermoelectric film is strip-shaped and obliquely arranged on the flexible circuit board, and two ends of the porous thermoelectric film in the length direction are electrically connected with a circuit of the flexible circuit board.
Referring to fig. 1, fig. 1 is a schematic structural diagram of a multifunctional sensor according to some embodiments of the present invention; wherein 1 is a flexible substrate, 2 is a liquid metal circuit, 3 is a thermoelectric film, and 4 is a copper film.
The bionic multifunctional sensor comprises a flexible circuit board, preferably comprises a flexible substrate 1 and a liquid metal circuit 2 on the surface of the flexible substrate, and mainly plays roles of supporting a sensing component, guiding out an electric signal and the like. The invention has no special limitation on the selection of the material types, the shape and the size of the flexible substrate, and the flexible substrate can generally meet the requirements of the light and thin substrate with the deformation properties such as bending, stretching and the like; preferred flexible substrate materials of the present invention include one or more of PDMS, thermoplastic polyurethane, polyamide, and hydrogel, more preferably PDMS or thermoplastic polyurethane, most preferably PDMS. PDMS is named as polydimethylsiloxane, and advantages of PDMS include convenience and availability, stable chemical properties, transparency, good thermal stability and the like.
According to the preferred embodiment of the invention, a commercially available Polydimethylsiloxane (PDMS) matrix and a curing agent are mixed and cured to form a thinner flexible substrate, and the thickness is 1-2 mm; preferably, the mass fraction ratio of the PDMS matrix to the curing agent is (8-12): 1. The PDMS matrix and curing agent are materials commonly used in the art for experiments and can be directly purchased from Dow Corning company under the model Sylgard 184. The substrate is prepared under the condition of the mass ratio, the strength and toughness are moderate, and the flexible substrate is easy to prepare.
In some embodiments of the present invention, the flexible substrate 1 has inclined grooves thereon for disposing the porous thermoelectric film obliquely; the surface of the flexible substrate 1 can be printed to form a liquid metal circuit 2 which is electrically connected with two ends of the porous thermoelectric film in the length direction. According to the embodiment of the invention, a series of inclined grooves can be etched on the flexible substrate by using laser processing equipment, then the PDMS substrate containing the grooves is subjected to hydrophilic treatment, and then a liquid metal circuit is printed near the inclined grooves, so that the flexible circuit board is formed. The liquid metal is common gallium indium tin alloy, and the line size is 0.5-2 mm wide.
Further preferably, the inclined groove has an inclination angle of 40-70 degrees, a length of 3.5mm, a depth of 0.4-1 mm and a width of 0.02-0.1 mm. The liquid metal circuit is made of materials commonly used in the field, and can be used for leading out an electric signal.
Preferably, the porous thermoelectric film according to the embodiment of the present invention includes a flexible porous base film and a thermoelectric film 3. The flexible porous substrate film is obliquely arranged on the flexible circuit board, and a layer of thermoelectric film 3 can be formed on the surface of the flexible porous substrate film through deposition of a mask plate, so that the porous thermoelectric film can sense various signals such as temperature or heat source approaching, pressure, air flow and the like.
The material selection of the flexible porous substrate film is not particularly limited; the present invention preferably includes one or more of a cellulose film, a polytetrafluoroethylene film, a polyvinylidene fluoride film and a nylon film, more preferably a polytetrafluoroethylene film and/or a nylon film, and most preferably a nylon film. The pore diameter of the flexible porous substrate film is preferably 0.1 mu m, the thickness is about 100 mu m, and the flexible porous substrate film is a commercially purchased material; the initial resistance of the material increases with an excessive porosity or pore size, which may increase signal noise, while the perception of small pressure may not be sufficiently sensitive with a thicker thickness. The included angle between the obliquely arranged flexible porous substrate film and the flexible circuit board is 40-70 degrees, such as 40 degrees, 45 degrees, 50 degrees, 60 degrees and the like.
The thermoelectric film is formed by thermoelectric materials, has a pore structure and is strip-shaped; and two ends of the thermoelectric film in the length direction are electrically connected with a circuit of the flexible circuit board. The choice of the thermoelectric material is not particularly limited, and the present invention preferably includes antimony telluride (Sb 2 Te 3 ) Bismuth telluride (Bi) 2 Te 3 ) N-type bismuth telluride (Bi) 2 Te 2.7 Se 0.3 ) P-type bismuth telluride (Bi 0.5 Sb 1.5 Te 3 ) One or more telluride thermoelectric materials of (a), more preferably Sb 2 Te 3 And Bi (Bi) 0.5 Sb 1.5 Te 3 One or more of them, most preferably Sb 2 Te 3 。
In the embodiment of the invention, the thickness of the thermoelectric film is preferably 200-700 nm, and the Seebeck factor is 50-200 mu V/K. The pore and inclined structure of the thermoelectric film are basically consistent with those of the flexible porous substrate film, the strip shape of the thermoelectric film is similar to human hair, and the length of the thermoelectric film is far greater than the width of the thermoelectric film; the composite is arranged on the surface of the flexible porous substrate film in an inclined way, so that signals such as pressure, vibration and the like are sensed to a certain extent.
As shown in fig. 1, one end of the thermoelectric film 3 in the length direction is connected with the liquid metal circuit 2, and the other end is connected with the liquid metal circuit through the copper film 4; the copper film can form U-shaped, V-shaped and other connection modes with the thermoelectric film. The copper film 4 plays a role of a conductive communication circuit, and other metals can be used as the conductive film, and the present invention is not particularly limited.
FIG. 2 is a diagram of the dimensions of a U-shaped structure formed by a thermoelectric film and a copper film in some embodiments of the invention, the shape of the non-overlapping connection of the thermoelectric films is rectangular, the width is 1mm, the width of the overlapping connection is 1mm, the length is 3mm, the dimensions of the copper films are the same, and the total length is 8mm. In an embodiment of the present invention, the thickness of the conductive film may be 50 to 200nm. Fig. 2 is merely an example of a size and shape, and the shape of the porous thermoelectric film structure according to the present invention is not limited thereto.
The embodiment of the invention prepares the bionic multifunctional sensor, and firstly prepares a flexible circuit board and a strip-shaped porous thermoelectric film respectively; and the porous thermoelectric film is obliquely arranged on the flexible circuit board, and the porous thermoelectric film and the flexible circuit board are connected in a conductive manner to form the sensing device.
The embodiment of the invention provides a preparation method of a bionic multifunctional sensor, which specifically comprises the following steps:
s1) depositing a plurality of strip thermoelectric films (such as telluride thermoelectric materials) on a flexible porous substrate film through a mask plate; depositing a layer of copper film (serving as a copper electrode) beside the thermoelectric film, and forming a U-shaped structure by partially overlapping the thermoelectric film;
s2) mixing and curing the PDMS matrix and the curing agent to form a thinner flexible substrate; etching a series of inclined grooves on the flexible substrate by using laser processing equipment, and printing a liquid metal circuit near the grooves (the flexible substrate is subjected to hydrophilic treatment before printing) to form a flexible circuit board;
s3) cutting the thermoelectric film and the copper film into single U-shaped units, inserting the single U-shaped units into grooves of the flexible substrate, ensuring good connection with liquid metal lines, and finally packaging the device.
All the raw materials in the examples of the present invention are as described above, and the sources thereof are not particularly limited, and may be commercially available or prepared according to conventional methods well known to those skilled in the art. Wherein the flexible porous substrate film can be one or more polymer films selected from cellulose film, polytetrafluoroethylene film, polyvinylidene fluoride film and nylon film, more preferably polytetrafluoroethylene film or nylon film, and most preferably nylon film. The thickness of the thermoelectric film material is 200-700 nm, and the Seebeck factor is 50-200 mu V/K.
The deposition, curing and printing in the embodiments of the present invention are all well known operations to those skilled in the art, and the present invention is not particularly limited. For example, magnetron sputtering techniques can be used to deposit thermoelectric films. Preferably, the Polydimethylsiloxane (PDMS) matrix and the curing agent are mixed according to the mass fraction of 8-12:1, poured into a mold, and cured at 50-70 ℃ to form a thinner flexible substrate.
In the preferred embodiment of the invention, a large number of U-shaped units consisting of thermoelectric films and copper films are deposited on the front surface of a flexible porous polymer film through a mask plate, then the U-shaped units on the flexible porous substrate film are cut one by one to form thermoelectric whiskers, inclined grooves are etched on PDMS by laser etching, liquid metal circuits are printed around the conductive grooves, and finally the thermoelectric whiskers are inserted into the grooves of the PDMS substrate, so that the thermoelectric whiskers are connected with the printed liquid metal circuits and packaged, and a final multifunctional sensor is obtained.
The invention also provides application of the bionic multifunctional sensor in manufacturing robots, man-machine interaction and health monitoring, for example, the sensor can be connected and assembled with a signal collecting unit, a display unit, wearable auxiliary equipment and the like.
Compared with the prior art, the method provided by the invention is very simple, has high repeatability and can realize full-mechanized production, and has the characteristics of economy and less time consumption. At the same time, the sensing function of each aspect of the flexible sensor is excellent. The sensor is simple in steps, high in automation degree, and good in product repeatability, and manual operations are avoided as much as possible. In addition, the thermoelectric film and the copper film prepared by the method are deposited in a magnetron sputtering mode, so that the thickness of the thermoelectric film and the conductive film is controllable, and the films can be deposited on most other substrates, including polycarbonate PC, polyester PET, polyimide PI, filter paper and the like. Meanwhile, other preparation processes adopt automatic printing, laser etching and the like, so that the method can prepare the sensor efficiently, economically and environmentally-friendly, and lays the precondition and guarantee of industrialization and practicability for the research of the multifunctional sensor.
In order to further illustrate the technical aspects of the present invention, preferred embodiments of the present invention are described below with reference to examples, but it should be understood that these descriptions are only for further illustrating the features and advantages of the present invention, and are not limiting of the present invention.
Example 1:
a1 As shown in fig. 1, which is a multifunctional sensor model of the present embodiment. And depositing a layer of antimony telluride film array on the flexible porous nylon film through magnetron sputtering and a mask plate, wherein the thickness of the antimony telluride film is 450nm, and the Seebeck factor is 111 mu V/K.
A2 Depositing a layer of copper film with the thickness of 75nm beside the single antimony telluride film, and partially overlapping the antimony telluride film to form a U-shaped structure; the structural dimensions of the antimony telluride thermoelectric film and the copper film of this example are shown in fig. 2.
A3 Polydimethylsiloxane (PDMS) matrix and curing agent are mixed according to the mass fraction of 10:1, and then poured into a mold to be cured for 4 hours at 60 ℃ to form a thinner flexible substrate.
A4 A series of inclined grooves are etched on the flexible substrate by using laser processing equipment, the length of the grooves is 4mm, the depth is 0.7mm, the width is 0.04mm, and the inclination angle is 57.5 degrees.
A5 Placing the PDMS substrate carved with the groove in an ethanol solution of 3-aminopropyl triethoxy silane, soaking overnight, taking out and drying, and then printing a liquid metal circuit near the groove to form a flexible circuit board;
a6 Cutting the antimony telluride film and the copper film array into single U-shaped units, inserting the single U-shaped units into grooves of a flexible substrate, ensuring good connection with liquid metal lines, and finally packaging the device by using PDMS.
The thickness of the substrate is 2mm, the pore diameter of the nylon film is 0.1 mu m, the nylon film is a film which is commercially and directly purchased, and the mass ratio of the liquid metal is 68.5% of gallium: 21.5% of indium, 10% of tin and curing agent which is a vulcanizing agent of Dow Corning company, and only one sensor is arranged in the U-shaped unit.
And testing the obtained multifunctional sensor for the ability of sensing the heat source approaching, the pressure circulation, the temperature of the target object, the wind speed, the high-frequency vibration and the like, and obtaining the test results shown in figures 3-8.
FIG. 3 is a graph showing the sensing of the heat source approaching distance by the multifunctional sensor prepared in example 1 of the present invention; the specific test process is as follows: a flat plate heat source at 40 ℃ is gradually approaching from the part (parallel to the substrate part of the sensor) just above the hair part (one end of the U-shaped structure) of the sensor, and the output voltage of the sensor is measured at different distances. As can be seen from fig. 3, the induced voltage increases gradually as the heat source gets closer to the sensor, and a distance of 25cm can be detected at the most.
FIG. 4 is a graph showing the resistance response of the multifunctional sensor prepared in example 1 of the present invention to pressure cycling; the specific test process is as follows: the 'hair' tip part of the sensor is circularly compressed by a mechanical fatigue machine, and the mechanical flat plate of the mechanical testing machine is also downwards pressed parallel to the substrate part, wherein the compression distance is 3mm. As can be seen from fig. 4, the sensor has very small initial resistance change after 25 ten thousand compression cycles, and the resistance change amplitude is very small, which indicates that the performance is basically unchanged.
FIG. 5 is a graph showing the voltage response of the multifunctional sensor prepared in example 1 of the present invention to the temperature of a target object; the specific test process is as follows: objects with different temperatures are just attached to the tip of the 'hair' part of the sensor, and voltage signals generated by the sensor are collected. As can be seen from FIG. 5, the detection range is-189 to 150 ℃.
FIG. 6 is a graph showing the resistance response of the multifunctional sensor prepared in example 1 of the present invention to different wind speeds of forward wind; the specific test process is as follows: the blower is placed in front of the sensor for different distances to test the resistance change condition of the sensor at different wind speeds. As can be seen from FIG. 6, the detection range in this direction is 2 to 20.4m/s.
FIG. 7 is a graph showing the resistance response of the multifunctional sensor prepared in example 1 of the present invention to different wind speeds against the back wind; the specific test process is as follows: the blower is placed at different distances behind the sensor to test the resistance change condition of the sensor at different wind speeds. As can be seen from FIG. 7, the detection range in this direction is 1 to 8.6m/s.
FIG. 8 is a graph showing the current response of the multifunctional sensor prepared in example 1 of the present invention to high frequency vibration; the specific test process is as follows: the sound box surface is coated with a PE preservative film, the PE preservative film is attached to the tip end of the sensor, and after the sound box is started, sound waves drive the preservative film to vibrate, so that the sound waves are transmitted to the sensor to collect electrical signals. As can be seen from fig. 8, the sensor can detect high frequency vibrations of 1000 Hz.
The embodiment of the invention discloses a preparation method of a bionic multifunctional sensor, which comprises the steps of respectively depositing a layer of telluride thermoelectric material and a copper electrode on a flexible porous film through a mask plate, forming a series of oblique angle grooves on a flexible stretchable substrate through laser etching and the like, printing liquid metal conductive lines on the substrate with a large number of grooves etched, and finally inserting the porous film containing the thermoelectric material on the substrate, communicating with the liquid metal lines and packaging to obtain the multifunctional sensor.
Experimental results show that the bionic multifunctional sensor prepared by the invention can detect the temperature of a target object with the temperature of-189-150 ℃ at the temperature of a heat source with the temperature of 40 ℃ with the distance of 25cm, and can detect the wind speed in the detection range of 1-20.4 m/s, high-frequency vibration induction of 1000Hz and the like. At the same time, the perception of these signals is excellent. The bionic multifunctional sensor prepared by the method has wide application prospects in the aspects of robots, man-machine interaction, health monitoring and the like. Compared with the prior art, the method provided by the invention is very simple, has high repeatability and can realize full-mechanized production, and has the characteristics of economy and less time consumption. Meanwhile, the sensing function of each aspect of the flexible sensor is excellent, and the flexible sensor has a huge application prospect in the fields of human-computer interfaces, bionic robots and the like.
The above embodiments are only illustrative of the preferred embodiments of the present invention and are not intended to limit the scope of the present invention, and various modifications and improvements made by those skilled in the art to the technical solutions of the present invention should fall within the protection scope defined by the claims of the present invention without departing from the design spirit of the present invention.
Claims (8)
1. The bionic multifunctional sensor is characterized by comprising a flexible circuit board and a porous thermoelectric film, wherein the porous thermoelectric film is strip-shaped and obliquely arranged on the flexible circuit board, and two ends of the porous thermoelectric film in the length direction are electrically connected with a circuit of the flexible circuit board; the porous thermoelectric film includes: a flexible porous base film obliquely disposed on the flexible circuit board, and a thermoelectric film composited on at least one surface of the flexible porous base film; the thermoelectric film is strip-shaped, two ends in the length direction are in conductive connection with a circuit of the flexible circuit board, and the pore and inclined structure of the thermoelectric film are basically consistent with those of the flexible porous substrate film; at least one end of the thermoelectric film in the length direction is connected with the conductive film and is used for conducting connection with a circuit of the flexible circuit board.
2. The biomimetic multifunctional sensor of claim 1, wherein the thermoelectric thin film has a thickness of 200-700 nm and a seebeck factor of 50-200 μv/K.
3. The biomimetic multifunctional sensor of claim 1, wherein the conductive thin film has a thickness of 50-200 nm.
4. The biomimetic multifunctional sensor of claim 1, wherein only one end of the thermoelectric film in the length direction is connected to the conductive film and forms a U-shaped structure with the conductive film.
5. The biomimetic multifunctional sensor of any one of claims 1-4, wherein the included angle between the obliquely arranged porous thermoelectric film and the flexible circuit board is 40-70 °.
6. The bionic multifunctional sensor according to claim 5, wherein the flexible circuit board is composed of a flexible substrate and a liquid metal circuit on the surface of the flexible substrate, and the flexible substrate is provided with an inclined groove for obliquely arranging a porous thermoelectric film; the liquid metal circuit is electrically connected with the two ends of the porous thermoelectric film in the length direction.
7. The method for preparing the bionic multifunctional sensor according to any one of claims 1 to 6, comprising the following steps:
providing a flexible circuit board and a strip-shaped porous thermoelectric film respectively;
and the porous thermoelectric film is obliquely arranged on the flexible circuit board, and the porous thermoelectric film and the flexible circuit board are connected in a conductive manner and packaged.
8. Use of the biomimetic multi-functional sensor of any one of claims 1-7 in manufacturing robots, human-machine interactions and health monitoring.
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