CN114937629B - MiniLED acupuncture transfer equipment - Google Patents

MiniLED acupuncture transfer equipment Download PDF

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Publication number
CN114937629B
CN114937629B CN202210414998.4A CN202210414998A CN114937629B CN 114937629 B CN114937629 B CN 114937629B CN 202210414998 A CN202210414998 A CN 202210414998A CN 114937629 B CN114937629 B CN 114937629B
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crystal
substrate
crystal film
transfer
feeding
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CN114937629A (en
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邱国诚
周峻民
李浩然
赖远军
林琪生
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Dongguan Dezhun Precision Equipment Co ltd
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Dongguan Dezhun Precision Equipment Co ltd
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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/683—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for supporting or gripping
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
    • H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L25/00—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof
    • H01L25/03—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes
    • H01L25/04—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers
    • H01L25/075—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00
    • H01L25/0753—Assemblies consisting of a plurality of individual semiconductor or other solid state devices ; Multistep manufacturing processes thereof all the devices being of a type provided for in the same subgroup of groups H01L27/00 - H01L33/00, or in a single subclass of H10K, H10N, e.g. assemblies of rectifier diodes the devices not having separate containers the devices being of a type provided for in group H01L33/00 the devices being arranged next to each other

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  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Manufacturing & Machinery (AREA)
  • Liquid Crystal (AREA)
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Abstract

The application relates to the field of semiconductor display device manufacturing technology, in particular to a MiniLED needling transfer device. The key points of the technical scheme are as follows: the device comprises a needling transfer device, a first visual detection assembly and a second visual detection assembly, wherein the needling mechanism is coaxial and opposite to the first visual detection assembly on an axis, a crystal film can be placed at the position of the needling mechanism, and the position of the needling mechanism is used for sequentially ejecting crystal grains on the crystal film from the crystal film to a glass substrate so as to transfer the crystals to the substrate; the crystal moving device is arranged adjacent to the needling transfer device and is used for moving the crystal film with the crystals to the puncturing mechanism or taking the transferred crystal film out of the puncturing mechanism; and the base plate moves the material device, with the adjacent setting of acupuncture transfer device for transfer the base plate to puncture mechanism department, so that the base plate is put to crystal membrane relative position department, or be used for taking out the base plate that finishes transferring from puncture mechanism, this application has the effect that promotes MiniLED's transfer efficiency.

Description

MiniLED acupuncture transfer equipment
Technical Field
The application relates to the field of semiconductor display device manufacturing technology, in particular to a MiniLED needling transfer device.
Background
MiniLED is as a novel LED display technology who derives on the booth apart from LED basis, because it possesses good display effect and longer life-span, has received extensive concern since birth, is honored as next generation display technology, and its low reaches application covers a great deal of fields such as RGB display screen, notebook computer backlight, TV backlight, automotive lighting and general illumination, has good industrial application prospect.
The MiniLED display screen comprises a substrate, a PCB, a display screen, a MiniLED, a plurality of LED light sources and a plurality of LEDs, wherein the MiniLED firstly needs to manufacture chips on the substrate in the production process, and then is cut and transferred to the PCB, wherein each pixel point consists of one R, G and B three-color lamp beads, and the MiniLED display screen needs six million chips because the chip spacing is small and one display screen with the resolution ratio of 1080p is required; in the process of transferring the lamp beads, a huge transfer technology is generally adopted, along with the technical development, the huge transfer technology is diversified, and generally comprises a plurality of genres such as precise grabbing, self-assembly, laser transfer and transfer printing technologies, the transfer technologies of different genres need to be processed through different types of equipment, and before huge transfer, crystals are sorted and sorted firstly.
In the sorting and sequencing process, because the size of a chip is smaller, usually about 50-200 μm, the precision requirement during chip transfer needs to reach the level of μm, and because the transfer quantity is huge, the transfer efficiency of the equipment in the related art is still deficient on the premise of ensuring the transfer precision, and the improvement space of the transfer efficiency is also large.
Disclosure of Invention
In order to promote MiniLED's transfer efficiency, this application provides a MiniLED acupuncture transfer apparatus.
The application provides a miniLED acupuncture transfer apparatus adopts following technical scheme:
a MiniLED needle transfer apparatus, comprising: the acupuncture transfer device is provided with a puncture mechanism and a first visual detection assembly, the puncture mechanism and the first visual detection assembly are coaxial and opposite on an axis, a crystal film can be placed at the puncture mechanism, and the puncture mechanism is used for ejecting crystal grains on the crystal film out of the crystal film to a glass substrate in sequence so as to transfer the crystals to the substrate; the crystal moving device is arranged adjacent to the needling transfer device and is used for moving the crystal film with the crystals to the puncturing mechanism or taking the transferred crystal film out of the puncturing mechanism; and the substrate moving device is arranged adjacent to the needling transfer device and used for moving the substrate to the puncturing mechanism so as to place the substrate at the position corresponding to the crystal film or take out the transferred substrate from the puncturing mechanism.
Through adopting the above technical scheme, the crystal moves the material device and the base plate moves the material device and can transfer crystal and base plate to acupuncture transfer device alone respectively, make two actions go on in step, high operating efficiency, in addition, with puncture mechanism and the coaxial setting of first visual detection subassembly, the puncture position that can make puncture mechanism obtains the accurate positioning, judge the acupuncture position through visual detection mechanism, precision when guaranteeing the puncture, the structure is whole to set up rationally, under the prerequisite of guaranteeing the puncture precision, miniLED's transfer efficiency obtains promoting.
Preferably, the puncturing mechanism comprises: the crystal displacement assembly is provided with a puncture channel and used for placing the crystal film, the crystal displacement assembly is adjacent to the first visual detection assembly and can drive the crystal film to be offset and adjusted along a plane, and when the crystal film is placed at the crystal displacement mechanism, the puncture channel is communicated with the crystal area on the crystal film; the machining offset adjusting assembly is arranged at the crystal displacement assembly, is in contact with the crystal film and drives the crystal film to rotate; and the needling transfer component is adjacent to the processing offset adjusting component and positioned on one side of the crystal displacement component back to the first visual detection component, and the needling transfer component performs reciprocating piercing on the crystal film through a piercing channel.
By adopting the technical scheme, in the crystal sequencing and transferring process, the needling transferring component is started to puncture the crystal film on the crystal transferring component so as to eject the crystal to the outside and realize the transferring action; simultaneously, the crystal displacement subassembly can drive the crystal membrane and remove, and then realize the position control, puncture action and adjustment action can go on in step, puncture efficiently, and processing skew adjusting part can be before puncture processing or the planar position of in-process adjustment crystal membrane, because of some crystals on the crystal membrane probably arrange along the line, consequently can be regular with the puncture sequencing of crystal, be convenient for the crystal displacement subassembly drive crystal and remove to suitable position, and processing error reduces, and the machining precision obtains promoting.
Preferably, the needle transfer assembly comprises: the two ends of the shell are respectively provided with an air inlet hole and an air outlet hole; the telescopic rod extends from one end of the shell to the inside of the shell and is movably matched with the shell, an air channel for air to flow is formed between the shell and the telescopic rod, the air channel is respectively communicated with the air inlet hole and the air outlet hole so that air enters from the air inlet hole and flows out from the air outlet hole, and one end of the shell, close to the air inlet hole, is used for adsorbing a crystal film; the driving piece is connected with the telescopic rod and is used for driving the telescopic rod to reciprocate; the air exhaust element is connected with the shell and communicated with the air outlet; and the ejector pin is fixedly arranged on the telescopic rod, and one end for puncturing is adjacent to the air outlet hole.
By adopting the technical scheme, the driving piece is started, power can be output to drive the telescopic rod to move, so that the ejector pin is driven to reciprocate, the ejection action is realized, the structural design is reasonable, the ejector pin is simple and efficient, and meanwhile, in the ejection process, the air exhaust element can be started to drive the air in the air passage to flow, so that suction force is formed at the end part of the shell, and the crystal film is adsorbed and positioned; at the moment, the crystal film is not easy to deviate relative to the thimble, the thimble ejection action is more stable, and the precision of the crystal ejection transfer is improved.
Preferably, the machining offset adjustment assembly includes: the outer edge of the rotating gear ring is provided with driving teeth, the rotating gear ring is rotatably arranged on the crystal displacement assembly, and the interior of the rotating gear ring is communicated with the puncture channel and used for sleeving a crystal film; the deflection motor is arranged on the crystal displacement assembly, and the output end of the deflection motor is provided with a deflection gear; and the toothed belt is respectively coated on the deflection gear and the rotating toothed ring and meshed with the driving teeth.
Through adopting above-mentioned technical scheme, when placing the crystal membrane in crystal displacement subassembly, the crystal membrane can cup joint on rotating the ring gear in step, starts the deflection motor this moment, and deflection motor output torque, and then drives the deflection gear and rotate, and deflection gear drive toothed belt rotates, and toothed belt drives and rotates the ring gear rotation, and then realizes adjusting the wafer membrane in plane department, and the precision when the wafer membrane is put obtains promoting.
Preferably, the crystal moving device comprises: the storage mechanism is provided with an opening at one side and is used for stacking and placing a plurality of groups of crystal films at intervals; the crystal swinging material taking mechanism can extend into the material storage mechanism, takes out or sends a crystal film from the material storage mechanism into the material storage mechanism, and can swing to the position near the needling transfer device; and the crystal feeding mechanism is positioned between the crystal swinging material taking mechanism and the acupuncture transfer device and is used for adsorbing a crystal film and transferring the crystal film to the acupuncture transfer device.
Through adopting above-mentioned technical scheme, storage mechanism can store many crystal films to realize lasting material loading, shorten the time gap of reloading, simultaneously through crystal swing extracting mechanism, realize taking out and transferring of crystal film near acupuncture transfer device, so that crystal feed mechanism adsorbs the crystal film to acupuncture transfer device department, shortens to adsorb and transfers the stroke, realizes stable automatic material loading.
Preferably, the crystal swing material taking mechanism comprises: the end part of the first material taking and placing linear module is close to the material storage mechanism and is provided with a first machine base capable of moving in a reciprocating mode; the first lifting element is arranged on the first base; the first lifting element is connected with the swing arm rotating motor and drives the swing arm rotating motor to move up and down; the swing arm is connected with the swing arm rotating motor, and the swing arm rotating motor is used for driving the swing arm to rotate so as to enable the swing arm to swing to the storage mechanism and the needling transfer device respectively, so that the swing arm can take and place crystal films conveniently; the deviation rectifying assembly is arranged on the swing arm and used for driving the crystal film to rotate so as to adjust the placing position; and the second visual detection assembly is arranged on the first base, faces the swing arm and is used for detecting the crystal film on the swing arm.
By adopting the technical scheme, in the process of taking out the crystal film, the first material taking and placing linear module can be started firstly, the first machine base can be driven by the first material taking and placing linear module to reciprocate relative to the material storage mechanism and the needling transfer device, and the first machine base can drive a plurality of structures such as the first lifting element, the swing arm rotating motor, the swing arm, the deviation correcting component and the second visual detection component to synchronously move in the process; and, the swing arm is driven by the swing arm rotating motor to face the storage mechanism, under the drive of the first material taking and placing linear module, the swing arm can extend into the bottom of the crystal film, then the first lifting element and the first material taking and placing linear module are started, the crystal film can be taken out from the storage mechanism, the swing arm rotating motor drives the swing arm to drive the crystal film to be close to the acupuncture transfer device, meanwhile, the deviation rectifying component can drive the crystal film to rotate so as to reduce the deviation of the crystal arrangement sequence on the crystal film, the second visual detection component detects for the offset, and the preliminary positioning before the crystal film is fed is realized, so that the position precision when the crystal feeding mechanism picks is improved, and the subsequent precision adjustment and the processing error are reduced.
Preferably, the crystal feeding mechanism comprises: a first crystal feeding and traversing module; the second crystal feeding transverse moving module is arranged on the first crystal feeding transverse moving module and is vertical to the first crystal feeding transverse moving module; the feeding lifting component is connected with the second crystal feeding transverse moving module; the crystal film grabbing motor is arranged at the feeding lifting part; the crystal film grabbing component is connected with the crystal film grabbing motor and is used for adsorbing and grabbing the crystal film; the first crystal feeding transverse moving module, the second crystal feeding transverse moving module and the feeding lifting component can drive the crystal film grabbing component to be close to the acupuncture transfer component and the crystal swinging material taking mechanism respectively, and the crystal film grabbing motor is used for driving the crystal film grabbing component to swing back and forth between the acupuncture transfer component and the crystal swinging material taking mechanism.
By adopting the technical scheme, in the process of conveying the crystal film to the needling transfer component from the crystal swinging material taking mechanism, the first crystal feeding transverse moving module, the second crystal feeding transverse moving module and the feeding lifting component form a three-dimensional moving frame, so that the crystal film grabbing component can flexibly and accurately move to the crystal swinging material taking mechanism and the needling transfer component, and meanwhile, the crystal film on the crystal film grabbing component can swing 180 degrees under the driving of the crystal film grabbing motor, so that the crystal film can quickly and accurately move between the crystal swinging material taking mechanism and the needling transfer component, and the structure is reasonable, flexible and accurate in movement.
Preferably, the substrate transferring device comprises: the substrate turnover mechanism is provided with at least two first substrate grabbing components, the first substrate grabbing components can respectively grab transferred and non-transferred substrate workpieces, and the substrate turnover mechanism drives the first substrate grabbing components to rotate so as to switch the picking and placing positions of the substrate workpieces; the substrate feeding mechanism can be close to or far away from the acupuncture transfer device and is used for adsorbing and grabbing the substrate so as to enable the substrate to be opposite to the crystal film; and the substrate swinging and taking mechanism is positioned between the substrate feeding mechanism and the substrate turnover mechanism and used for transferring the untransferred substrate to the substrate feeding mechanism for grabbing or transferring the transferred substrate to the substrate turnover mechanism to realize discharging.
By adopting the technical scheme, in the substrate feeding process, the substrate turnover mechanism can grab the substrate which is not transferred, and can stably feed the substrate into the feeding mechanism for transferring action under the transfer action of the substrate swinging and taking mechanism, and the structure is reasonably and stably arranged; meanwhile, the substrate feeding mechanism can also withdraw the substrate into the substrate swinging and taking mechanism, before a new substrate is placed, the plurality of first substrate grabbing assemblies are switched by starting the substrate overturning mechanism, the spare first substrate grabbing assemblies suck out the transferred substrate, then the first substrate grabbing assembly substrate overturning mechanism is started again, the substrate with the non-transfer function is placed into the substrate swinging and taking mechanism at the same station, and efficient feeding of the substrate is achieved.
Preferably, the substrate feeding mechanism includes: a first substrate feeding transverse moving module; the second substrate feeding transverse moving module is arranged on the first substrate feeding transverse moving module and is vertical to the moving direction of the first substrate feeding transverse moving module; and the third substrate grabbing component is arranged at the second substrate feeding transverse moving module and used for adsorbing the substrate.
By adopting the technical scheme, the first substrate feeding transverse moving module and the second substrate feeding transverse moving module can drive the third substrate grabbing assembly to adjust in the plane direction, at the moment, if the substrate grabbing position deviates, the defect of inaccurate substrate position arrangement can be overcome, and the position precision during transfer is further improved.
Preferably, the needling transfer devices are arranged in a plurality of groups, the needling transfer devices are arranged adjacently, the crystal moving devices can respectively take and place the crystal films in the needling transfer devices, and the substrate moving devices can respectively take and place the substrates in the needling transfer devices.
By adopting the technical scheme, the plurality of groups of needling transfer devices can synchronously transfer a plurality of products, the capacity of equipment is doubled and increased, and meanwhile, the plurality of groups of needling transfer devices share one group of substrate material moving devices and one group of crystal material moving devices, so that the structure is compact and efficient, and the design is novel.
Preferably, the crystal displacement assembly comprises: the needle punching transfer assembly is arranged on the fixed seat; the first displacement linear module is arranged on the fixed seat; the first displacement seat is arranged on the first displacement linear module, and the first displacement linear module is used for driving the first displacement seat to reciprocate; the second displacement linear module is arranged on the first displacement seat; the second displacement seat is arranged on the second displacement straight line module, the second displacement straight line module is used for driving the second displacement seat to reciprocate, the displacement direction of the second displacement seat is perpendicular to the movement direction of the first displacement seat, and the machining offset adjusting assembly is arranged on the second displacement seat.
Through adopting above-mentioned technical scheme, the fixing base provides stable the bearing to first displacement straight line module, first displacement seat, second displacement straight line module, the second displacement seat, acupuncture shifts subassembly and processing displacement adjusting part isotructure, and, first displacement seat and second displacement seat can be at plane skew adjustment under the drive of first displacement straight line module and second displacement straight line module, place the crystal membrane on the second displacement seat this moment, under the displacement effect, can drive the crystal membrane and realize automatic adjustment for acupuncture transfer mechanism.
Preferably, the deviation rectifying assembly includes: the deviation rectifying cylinder is fixedly arranged on the swing arm; the rectification motor is fixedly arranged on the telescopic rod of the rectification cylinder and is close to or far away from the crystal film through the rectification cylinder; the deviation rectifying wheel is fixedly arranged on an output shaft of the deviation rectifying motor and is used for being contacted with the crystal film to drive the crystal film to rotate; and the positioning bearings are rotatably arranged on the swing arms and are abutted against the periphery of the crystal film so as to position the crystal film.
Through adopting above-mentioned technical scheme, when there is the problem of skew in the crystal membrane in the swing arm, through starting the cylinder of rectifying, can drive and rectify the motor and rectify the wheel and be close to the crystal membrane, the motor drive crystal membrane of rectifying this moment rotates, and under a plurality of location bearings's positioning action, the difficult displacement that produces of crystal membrane realizes the location, and then can make when rectifying the wheel and touching with the crystal membrane, carries out the rotation, realizes the high accuracy and rectifies a deviation, and stable in structure and operating accuracy are high.
Preferably, the substrate swinging and material taking mechanism comprises: the end part of the second material taking and placing linear module is close to the substrate turnover mechanism and is provided with a second machine base capable of moving back and forth; the second lifting element is arranged on the second base; the substrate rotating motor is arranged on the second base in a sliding mode, the second lifting element is connected with the substrate rotating motor, and the second lifting element drives the substrate rotating motor to move up and down; and the second substrate grabbing component is connected with the substrate rotating motor, and the substrate rotating motor is used for driving the second substrate grabbing component to rotate so that the second substrate grabbing component swings to the substrate overturning mechanism and the substrate feeding mechanism respectively, so that the second substrate grabbing component can conveniently pick and place the substrate.
By adopting the technical scheme, the second material taking and placing linear module is started, the second material taking and placing linear module can drive the second machine base to reciprocate between the substrate turnover mechanism and the substrate feeding mechanism, and the second machine base can drive a plurality of structures such as the second lifting element, the second substrate grabbing assembly and the substrate rotating motor to synchronously move in the process; and when the substrate rotating motor drives the second substrate grabbing component to face the substrate overturning mechanism, the second substrate grabbing component can conveniently grab the substrate to take the substrate into and out of the substrate overturning mechanism, and meanwhile, when the substrate rotating motor drives the second substrate grabbing component to face the substrate feeding mechanism, the second substrate grabbing component can conveniently grab the substrate to take the substrate into and out of the substrate feeding mechanism, so that automatic transfer of the substrate is realized, and the structure is reasonable and efficient.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the crystal and the substrate can be synchronously transferred into the needling transfer device respectively, two materials are synchronously transported, the operation efficiency is high, in addition, the puncture mechanism and the first visual detection assembly are coaxially arranged, the puncture position is not easy to deviate, the puncture mechanism is accurately positioned, the needling position is judged through the visual detection mechanism, and the processing is accurate and efficient;
2. the plurality of groups of needling transfer devices can synchronously transfer a plurality of products, the capacity of equipment is doubled and increased, meanwhile, the plurality of groups of needling transfer devices share one group of substrate material transfer devices and one group of crystal material transfer devices to realize the loading and unloading of the substrate and the crystal film, the processing is efficient, and the design is novel;
3. the subassembly of rectifying can make the crystal membrane at the material loading in-process, carries out preliminary adjustment to the locating position of crystal membrane to position accuracy when promoting the feeding, simultaneously, in the course of working, processing skew adjusting part can carry out the accuracy adjustment to the crystal membrane, adjusts the precision of putting in order to promote the crystal membrane through many times, and then reduces the error of adding man-hour, reduces the position control in the course of working, and machining precision and efficiency obtain further promotion.
Drawings
Fig. 1 is a schematic view of the overall structure of a needle transfer device in the embodiment of the present application.
Fig. 2 is a schematic structural diagram of a needle crystal material moving device in the embodiment of the application.
Fig. 3 is a schematic structural diagram of a crystal swing material taking mechanism in an embodiment of the present application.
FIG. 4 is a schematic structural diagram of a deviation rectifying assembly in the embodiment of the present application.
FIG. 5 is a schematic structural diagram of a crystal feeding mechanism in an embodiment of the present application.
Fig. 6 is an enlarged view of a portion a in fig. 5.
Fig. 7 is a schematic structural diagram of a substrate transfer device in an embodiment of the present application.
Fig. 8 is a schematic structural diagram of a substrate turnover mechanism in an embodiment of the present application.
Fig. 9 is a schematic structural diagram of a substrate swinging reclaiming mechanism in the embodiment of the present application.
Fig. 10 is a schematic structural diagram of a substrate loading mechanism in an embodiment of the present application.
Fig. 11 is a schematic structural view of a gripper arm in an embodiment of the present application.
FIG. 12 is a schematic structural diagram of a needle punching transfer device in the embodiment of the present application.
Fig. 13 is a schematic structural view of another perspective of the spine transfer device in the embodiment of the present application.
Fig. 14 is a schematic structural view of a puncture mechanism in an embodiment of the present application.
Fig. 15 is a partial cross-sectional view of a lancing mechanism in an embodiment of the present application.
Fig. 16 is a schematic end view of the housing in the embodiment of the present application.
Description of the reference numerals:
1. a frame;
2. a needle transfer device;
21. a puncture mechanism;
211. a crystal displacement assembly; 2111. a fixed seat; 2112. a first displacement linear module; 2113. a first displacement seat; 2114. a second displacement seat; 2115. a second displacement linear module;
212. machining an offset adjustment assembly; 2121. rotating the toothed ring; 2122. a deflection motor; 2123. a deflection gear; 2124. a toothed belt;
213. a needle transfer assembly; 2131. a base; 2132. a dial slide table; 2133. a housing; 2134. a telescopic rod; 2135. a drive member; 2136. a thimble; 2137. an air extraction element;
22. a first visual detection assembly;
3. a crystal transfer device;
31. a material storage mechanism; 311. lifting a basket; 3111. a convex edge; 312. a basket lifting module;
32. a crystal swinging material taking mechanism; 321. a first material taking and placing linear module; 3211. a first base; 322. a first lifting element; 323. a swing arm rotating motor; 324. swinging arms;
33. a crystal feeding mechanism; 331. a first crystal feeding and traversing module; 332. a second crystal feeding and traversing module; 333. a feeding lifting component; 334. a crystalline film grabbing motor; 335. a crystal film grasping assembly;
34. a deviation rectifying component; 341. a deviation rectifying cylinder; 342. a deviation rectifying motor; 343. a deviation rectifying wheel; 344. positioning the bearing;
35. a second visual detection assembly;
4. a substrate transfer device;
41. a substrate turnover mechanism; 411. turning over a motor; 412. a first substrate capture assembly;
42. a substrate feeding mechanism; 421. a first substrate feeding transverse moving module; 422. a second substrate feeding and traversing module; 423. a third substrate capture assembly; 4231. a grabbing arm; 4232. a lifting cylinder;
43. the substrate swinging material taking mechanism; 431. a second substrate capture assembly; 432. a second material taking and placing linear module; 4321. a second base; 433. a second lifting element; 434. a substrate rotating electric machine; 5. a puncture channel; 6. an airway; 7. an air inlet; 8. an air outlet; 9. puncturing a hole; 10. an annular adsorption tank; 11. and positioning the circular groove.
Detailed Description
The present application is described in further detail below with reference to figures 1-16.
In the production and manufacturing process of the MiniLED, the steps of crystal expansion, crystal discharge, crystal solidification and the like are required. In the process of expanding the crystal, the LED chip is usually required to be bonded to a crystal film, which may be referred to as a crystal expansion film, and the crystal expansion film generally includes an elastic film body, which is usually made of a ductile plastic material, such as PVC, PO material, etc., and has a certain viscosity, so that the crystals can be compactly arranged thereon; and then stretching the crystal film to expand the space between the crystals through deformation so as to facilitate the subsequent transfer of the crystals to the substrate. It should be noted that the substrate may be a carrier such as a PCB substrate or a glass substrate, and the substrate capable of carrying the crystal may be applicable to any substrate, and is not limited in a specific application scheme.
In addition, in the process of transferring the crystals to the substrate, the crystals can be sequenced synchronously, for example, the crystals can be placed in an array form, the step is also a crystal arrangement step, and the next crystal fixing process is carried out after the crystal arrangement is finished.
The embodiment of the application discloses MiniLED acupuncture transfer equipment for realizing the high-efficient transfer of LED crystals.
Referring to fig. 1, the equipment comprises a rack 1, a needling transfer device 2, a crystal moving device 3 and a substrate moving device 4, wherein the needling transfer device 2, the crystal moving device 3 and the substrate moving device 4 are respectively arranged on the rack 1, and the rack 1 plays a bearing role for each component device. Meanwhile, the crystal moving device 3 and the substrate moving device 4 are respectively disposed adjacent to the needle punching transfer device 2, specifically, in this embodiment, are respectively disposed on two opposite sides of the needle punching transfer device 2.
On one hand, the substrate transferring device 4 is used for transferring the substrate to the needle punching transfer device 2, on the other hand, the crystal transferring device 3 is used for synchronously transferring the crystal film with the crystal to the needle punching transfer device 2 and placing the crystal film on the needle punching transfer device 2, at the moment, the glass substrate is positioned at the opposite position of the crystal film, and the needle punching transfer device 2 is used for sequentially ejecting the crystal grains on the crystal film from the crystal film to the glass substrate so as to transfer the crystal to the substrate, thereby realizing the transfer of the crystal.
Subsequently, the crystal transfer device 3 takes out the transferred crystal film from the needle punching transfer device 2 and feeds a new crystal film into the needle punching transfer device 2 again, and the substrate transfer device 4 takes out the transferred substrate from the puncture mechanism 21 and feeds it into the puncture mechanism 21 again, so that the automatic transfer of the processing material is realized.
Referring to fig. 2, in order to realize accurate and efficient crystal taking and placing actions, the crystal material moving device 3 includes a material storage mechanism 31 and a crystal swinging material taking mechanism 32.
The storage mechanism 31 is used for stacking and placing a plurality of groups of crystal films at intervals, wherein in this embodiment, the storage mechanism 31 comprises a basket 311 and a basket 311 lifting module, wherein the basket 311 lifting module adopts a linear motor module, and the basket 311 lifting module is installed on the rack 1 in the vertical direction; in addition, the lifting basket 311 is fixedly installed on a sliding table of a lifting module of the lifting basket 311, a box body part which can be taken out is arranged in the lifting basket 311, a plurality of horizontal protruding ribs 3111 which are arranged at intervals along the vertical direction are arranged in the box body part, the protruding ribs 3111 are respectively positioned on the inner walls of two opposite sides of the lifting basket 311, the horizontal protruding ribs 3111 positioned on the inner walls of the two sides are combined in pairs respectively, and a crystal film can be placed in the horizontal protruding ribs 3111 which are positioned at the same horizontal height, so that the storage and placement of the crystal film are realized; by starting the lifting basket 311 lifting module, the crystal film can be driven to move up and down, so that the placing positions of the crystal films at different heights can be adjusted; meanwhile, an opening is formed in one side of the box portion of the basket 311, and the crystal film is taken and placed by the crystal swing material taking mechanism 32 through the opening side of the basket 311.
In order to improve the operation efficiency of the crystal film, in this embodiment, the storage mechanisms 31 are provided in two sets, wherein the crystal swing material taking mechanism 32 is provided on the rack 1 and located between the two sets of storage mechanisms 31, the crystal swing material taking mechanism 32 can extend into the storage mechanism 31 to take out the crystal film that is not punctured from the storage mechanism 31 or feed the crystal film that is punctured into the storage mechanism 31, and can swing to the vicinity of the needle punching transfer device 2 to perform a transit function. Here, one group of the storage mechanisms 31 is used for placing the crystal films which are not punctured, and the other group of the storage mechanisms 31 is used for placing the crystal films which are taken and placed completely, so that the storage capacity of the crystal films is improved, and the baskets 311 which are placed with different crystal films are conveniently and independently replaced.
Referring to fig. 2 and 3, in detail, the crystal swing material taking mechanism 32 includes a first material taking and placing linear module 321, a first lifting element 322, a swing arm rotating motor 323, and a swing arm 324.
The first material taking and placing linear module 321 is a linear module capable of achieving a linear reciprocating function, such as a motor screw linear module or a synchronous belt linear module, and is not particularly limited herein; the first material taking and placing linear module 321 is fixedly mounted on the rack 1, and an end of the first material taking and placing linear module 321 is close to the storage mechanisms 31, specifically, in this embodiment, two ends of the first material taking and placing linear module 321 are close to the two sets of storage mechanisms 31, where a sliding table of the first material taking and placing linear module 321 is defined as a first base 3211, and the first base 3211 can reciprocate at the two sets of storage mechanisms 31.
In addition, the first lifting element 322 is mounted on the first chassis 3211, the first lifting element 322 in this embodiment employs a motor having a screw rod telescopic structure, and the telescopic rod 2134 is extended and retracted by outputting a torque and matching with the screw rod, meanwhile, the telescopic rod 2134 of the first lifting element 322 is vertically disposed, and the swing arm rotating motor 323 is slidably disposed on the first lifting element 322; a vertically arranged slide rail can be fixedly arranged on the first lifting element 322, a slide block which is in slide fit with the slide rail is arranged on the swing arm rotating motor 323, and an output shaft of the swing arm rotating motor 323 is vertically arranged; at this time, the telescopic rod 2134 of the first lifting element 322 is connected with the swing arm rotating motor 323, the first lifting element 322 can apply up-and-down lifting power to the swing arm rotating motor 323, in the process, the slide rail and the slide block play a guiding role on the swing arm rotating motor 323, and the swing arm rotating motor 323 can output torque; the swing arm 324 is connected to the swing arm rotating motor 323, specifically, one end of the swing arm 324 is fixedly mounted to an output shaft of the swing arm rotating motor 323, and the swing arm rotating motor 323 can drive the swing arm 324 to swing horizontally.
In the process of taking and placing the crystal film, the first material taking and placing linear module 321 is started, the first machine base 3211 can be driven by the first material taking and placing linear module 321 to approach the storage mechanism 31, the swing arm rotating motor 323 is synchronously started, the swing arm rotating motor 323 can drive the swing arm 324 to face the storage mechanism 31, the first material taking and placing linear module 321 is driven by the first material taking and placing linear module 321 to be inserted to the bottom of the crystal film, then the first lifting element 322 is started, the swing arm 324 lifts the crystal film, the first material taking and placing linear module 321 is started again to take out the crystal film, otherwise, the crystal film is placed in the storage mechanism 31, and finally the taking and placing of the material are achieved.
Under the driving of the swing arm rotating motor 323, the crystal film can swing on the horizontal plane, on one hand, the swing arm 324 can swing to the storage mechanism 31 for realizing material taking and material placing, on the other hand, the crystal moving device 3 further comprises a crystal feeding mechanism 33, the swing arm 324 can swing and is close to the crystal feeding mechanism 33, it should be noted that the crystal feeding mechanism 33 is located between the crystal swinging material taking mechanism 32 and the needling transfer device 2, and is used for moving the crystal film between the swing arm 324 and the needling transfer device 2, and making the crystal close to the crystal feeding mechanism 33 so as to take the material.
Referring to fig. 3 and 4, before the crystal film is transferred from the swing arm 324 to the needle punching transfer device 2, if the crystal film is displaced, the order of the crystal transferred to the needle punching transfer device 2 may be disordered, which may affect the accuracy of the needle punching, and to overcome the above-mentioned defects, the crystal swing material taking mechanism 32 further includes a deviation-correcting component 34 for driving the crystal film to rotate, so as to adjust the placement position, and a second visual detecting component 35 for detecting the displacement degree of the crystal film.
The deviation correcting assembly 34 is arranged on the swing arm 324, the deviation correcting assembly 34 comprises a deviation correcting cylinder 341, the deviation correcting cylinder 341 is fixedly arranged on the swing arm 324, the deviation correcting motor 342 is further comprised, the deviation correcting motor 342 is fixedly arranged on a telescopic rod 2134 of the deviation correcting motor 342, the deviation correcting cylinder 341 is started to drive the deviation correcting motor 342 to reciprocate, the deviation correcting device further comprises a deviation correcting wheel 343, and the deviation correcting wheel 343 is fixedly arranged on an output shaft of the deviation correcting motor 342; in addition, the deviation rectifying assembly 34 further comprises a plurality of positioning bearings 344, and the positioning bearings 344 are rotatably mounted on the swing arms 324; in this embodiment, the number of the positioning bearings 344 is three, and the arrangement contour of the plurality of positioning bearings 344 is the same as the peripheral contour of the wafer expanding ring, it should be noted that in this embodiment, the wafer expanding ring of the crystal film is arranged in a circular ring shape, and the three positioning bearings 344 in this embodiment are arranged along the track and also arranged in a triangular shape, and at this time, if the crystal film is placed on the swing arm 324, the positioning bearings 344 may abut against the peripheral inner wall of the wafer expanding ring to limit the crystal ring, so that the crystal ring is not easily horizontally shifted.
Further, the telescopic rod 2134 of the deviation rectifying cylinder 341 faces the position where the positioning bearing 344 is located, when the crystal film is placed on the swing arm 324, the deviation rectifying wheel 343 faces the crystal film, at this time, the deviation rectifying cylinder 341 is started, the deviation rectifying motor 342 can be driven to be close to or far away from the crystal film, when the deviation rectifying wheel 343 is close to the crystal film, the deviation rectifying wheel 343 can abut against the crystal film, at this time, under the driving of the deviation rectifying motor 342, the deviation rectifying wheel 343 rotates, and the deviation rectifying wheel 343 further drives the crystal film to rotate under the self-rotation action, so that the high-precision deflection adjustment is realized, and the position precision when the crystal film is placed is improved.
With reference to fig. 3 and fig. 4, in order to accurately determine the offset of the crystal film, the second visual inspection assembly 35 is a CCD visual inspection device in this embodiment, the second visual inspection assembly 35 is mounted on the first chassis 3211 and faces the crystal film on the swing arm 324, and the second visual inspection assembly 35 and the deviation rectification assembly 34 can be controlled by the PLC controller to detect and adjust the position of the crystal film.
Referring to fig. 5, the crystalline film is then transferred to the needle punching transfer device 2 by the crystalline loading mechanism 33 through an adsorption manner, and specifically, the crystalline loading device includes a first crystalline loading traverse module 331, a second crystalline loading traverse module 332, a loading lifting member 333, a crystalline film grabbing motor 334 and a crystalline film grabbing assembly 335.
In the embodiment, the first crystal feeding traversing module 331 and the second crystal feeding traversing module 332 are linear modules such as motor screws, and may also be linear modules in a synchronous belt form, and linear modules capable of realizing traversing function may be selected, which is not limited herein; the first crystal feeding traversing module 331 is fixedly mounted on the rack 1, and both the first crystal feeding traversing module 331 and the second crystal feeding traversing module 332 are provided with sliding tables capable of reciprocating; the first crystal feeding traversing module 331 is fixedly installed on the rack 1 and is located above the needle-punching transfer device 2 and the crystal swinging material taking mechanism 32, in addition, the second crystal feeding traversing module 332 is fixedly installed at the sliding table of the first crystal feeding traversing module 331, the moving directions of the sliding tables of the first crystal feeding traversing module 331 and the second crystal feeding traversing module 332 are perpendicular to each other, meanwhile, the moving direction of the sliding table of the second crystal feeding traversing module 332 is set between the needle-punching transfer device 2 and the crystal swinging material taking mechanism 32, the feeding lifting component 333 is fixedly installed on the sliding table of the second crystal feeding traversing module 332, and the feeding lifting component 333 can traverse between the needle-punching transfer device 2 and the crystal swinging material taking mechanism 32 under the driving of the first crystal feeding traversing module 331 and the second crystal feeding traversing module 332.
Referring to fig. 6, further, a crystal film grabbing motor 334 is disposed at the position of the feeding lifting unit 333, a crystal film grabbing component 335 is connected to the crystal film grabbing motor 334, at this time, the feeding lifting unit 333 drives the crystal film grabbing motor 334 to move up and down, the first crystal feeding traversing module 331, the second crystal feeding traversing module 332 and the feeding lifting unit 333 can drive the crystal film grabbing component 335 to respectively approach the needle punching transfer device 2 and the crystal swing material fetching mechanism 32,
the crystalline film grabbing motor 334 drives the crystalline film grabbing component 335 to rotate in the horizontal direction, and the crystalline film grabbing component 335 is used for adsorbing and grabbing a crystalline film, wherein in the embodiment, the feeding lifting component 333 is selected as an air cylinder, and can also be selected as an element capable of outputting reciprocating motion, such as an electric telescopic cylinder and a hydraulic cylinder, and the like, and the arrangement is not required, so that the air cylinder structure is quick and efficient in motion; in addition, the crystal film grasping motor 334 is selected as a rotating motor which can output torque to rotate the crystal film grasping assembly 335, wherein in this embodiment, the rotating angle of the rotating motor is set to 180 °, and by rotating 180 °, the crystal film on the crystal film grasping assembly 335 can be rapidly swung to the orientation of the needle punching transfer device 2, so as to place the crystal film in the needle punching transfer device 2, and the crystal film grasping motor 334 can drive the crystal film grasping assembly 335 to swing back and forth between the needle punching transfer device 2 and the crystal swinging material taking mechanism 32.
In addition, in this embodiment, the crystal membrane snatchs subassembly 335 chooses for use to be the vacuum adsorption structure, include the bedplate and install a plurality of vacuum chuck on the bedplate, a plurality of vacuum chuck evenly arranges, vacuum chuck can communicate the vacuum pump, adsorb the crystal membrane through vacuum negative pressure and snatch, in other embodiments, also can try to adopt modes such as centre gripping, magnetism, can realize snatching the crystal membrane can, no matter what kind of absorption is taken and the means of snatching, all should encapsulate in the notion of adsorbing and snatching, concrete means do not do the restriction here.
In the process of transferring the crystal film, on one hand, the crystal swing material taking mechanism 32 is firstly started, the crystal film is taken out from one of the material storing mechanisms 31 under the mutual matching of the first material taking and placing linear module 321, the first lifting element 322, the swing arm rotating motor 323 and the swing arm 324, and then the crystal film placed on the swing arm 324 is deflected and adjusted through the deviation correcting component 34 and the second visual detection component 35, so that the placing precision of the crystal film is improved, meanwhile, the crystal swing material taking mechanism 32 transfers the crystal film to the vicinity of the acupuncture transfer device 2, so that the crystal feeding mechanism 33 can conveniently adsorb the crystal film to the acupuncture transfer device 2, and the adsorption and transfer stroke is shortened; then the crystal feeding mechanism 33 grabs and grabs the crystal film to the needling transfer device 2 for transfer; on the other hand, after the crystal film is transferred, the crystal feeding mechanism 33 may be started, the crystal feeding mechanism 33 may transfer the pierced crystal film to the swing arm 324, and then the crystal film is transferred to another storage mechanism 31 for storage under the mutual cooperation of the first material taking and placing linear module 321, the first lifting element 322, the swing arm rotating motor 323, and the swing arm 324, so as to achieve automatic material taking and placing of the crystal film, and meanwhile, the substrate material transferring device 4 synchronously transfers the glass substrate right above the crystal film, and the glass substrate is used for carrying the crystal.
Referring to fig. 7, the substrate transferring apparatus 4 includes a substrate turning mechanism 41, a substrate loading mechanism 42 and a substrate swinging and fetching mechanism 43, wherein the glass substrate is defined as a glass substrate with crystals not transferred, and the glass substrate with crystals transferred and sorted, and a glue layer may be disposed on the glass substrate to adhere the crystals.
The substrate turnover mechanism 41 is used for grabbing transferred and non-transferred substrate workpieces, so that the glass substrate and the outside of the equipment can be exchanged conveniently, and automatic material changing is realized. Specifically, base plate tilting mechanism 41 includes that upset motor 411 and first base plate snatch subassembly 412, wherein, upset motor 411 fixed mounting is in frame 1, first base plate snatchs subassembly 412 and links to each other with upset motor 411, first base plate snatchs subassembly 412 and is the platelike setting, its inside runner that is equipped with the confession gas flow and install the vacuum chuck with the runner intercommunication, the runner is connected with the vacuum pump, suction through the vacuum pump forms the negative pressure, place the glass substrate on first base plate snatchs subassembly 412 this moment, can realize adsorbing the outside glass substrate of equipment.
Further, the first substrate grabbing assemblies 412 may be arranged in a group, and meanwhile, to improve the operation efficiency, the number of the first substrate grabbing assemblies 412 may be at least two, for example, two, three, or four, and the like, and two are selected in this embodiment for example. The plurality of first substrate grabbing components 412 are circumferentially arranged along the output shaft of the flipping motor 411 and are simultaneously and fixedly mounted on the output shaft of the flipping motor 411, at this time, the first substrate flipping mechanism 41 can grab a plurality of glass substrates simultaneously, for example, grab glass substrates that have been transferred and have not been transferred simultaneously, at this time, by starting the flipping motor 411, the positions of the plurality of first substrate grabbing components 412 can be transferred, and the suction positions of the substrate flipping mechanism 41 are switched; when grabbing the glass substrate that has shifted, remaining first substrate snatchs subassembly 412 still can place the glass substrate that does not shift, for the equipment of the class that needs to transfer different grade type glass substrate many times, the structure that this implementation disclosed has reduced and has snatched the step, and material transfer efficiency obtains promoting.
Referring to fig. 9 and 10, the substrate feeding mechanism 42 is closer to the needling transfer apparatus 2 than the substrate swing take-out mechanism 43, and the substrate feeding mechanism 42 may be closer to or farther from the needling transfer apparatus 2 for adsorbing and grasping the substrate to oppose the crystal film to achieve crystal alignment with the glass substrate. Meanwhile, the substrate swing material taking mechanism 43 is located between the substrate feeding mechanism 42 and the substrate turnover mechanism 41, and is configured to transfer the substrate that is located at the substrate turnover mechanism 41 and is not transferred to the substrate feeding mechanism 42 for grabbing, or is configured to transfer the substrate that is located at the substrate feeding mechanism 42 and is transferred to the substrate turnover mechanism 41 to realize material discharging, so as to perform a transfer function.
In particular, the continuous transfer of different glass substrates is realized. The substrate swing-taking mechanism 43 includes a second substrate grabbing component 431, a second material taking linear module 432, a second lifting element 433 and a substrate rotating motor 434, and the structure of the substrate swing-taking mechanism 43 is similar to that of the crystal swing-taking mechanism 32, wherein the second material taking linear module 432 is generally a motor screw type linear module, the second material taking linear module 432 is provided with a second base 4321 capable of reciprocating, and one end of the second material taking linear module 432 is close to the substrate turnover mechanism 41, at this time, the second base 4321 can be close to or far away from the substrate turnover mechanism 41.
In addition, the second lifting element 433 is fixedly installed on the second base 4321, the structure of the second lifting element 433 is similar to that of the first lifting element 322, meanwhile, the substrate rotating motor 434 is slidably installed on the second base 4321 or the second lifting element 433, the substrate rotating motor 434 can be installed in a manner of additionally installing a sliding rail and a sliding block, which is not described herein again, the telescopic rod 2134 of the second lifting element 433 is fixedly connected with the substrate rotating motor 434, and at this time, the substrate rotating motor 434 can perform lifting movement under the driving of the second lifting element 433.
In addition, the second substrate grabbing component 431 is used for taking and placing the substrate, specifically, the second substrate component is generally in a long plate shape in this application, one end of the second substrate grabbing component 431 is fixedly connected with an output shaft of the substrate rotating motor 434, the other end of the second substrate grabbing component 431 is provided with an adsorption element such as a vacuum chuck, the cover plate can be adsorbed into the second substrate grabbing component 431, the second substrate grabbing component 431 can realize swinging and lifting actions under the driving of the substrate rotating motor 434 and the second lifting element 433, and further can swing into the substrate overturning mechanism 41 and the substrate loading mechanism 42 respectively.
On one hand, when the second substrate grabbing assembly 431 swings into the substrate loading mechanism 42, the transferred glass substrate may be taken down, and the glass substrate that is not transferred may also be transferred into the substrate loading mechanism 42; on the other hand, when the second substrate grabbing assembly 431 swings to the substrate turning mechanism 41, the unprocessed glass substrate in the substrate turning mechanism 41 can be grabbed, and meanwhile, the processed glass substrate can be transferred to the substrate turning mechanism 41.
Referring to fig. 10, the substrate feeding mechanism 42 includes a first substrate feeding traversing module 421, a second substrate feeding traversing module 422, and a third substrate grabbing component 423, wherein the first substrate feeding traversing module 421 and the second substrate feeding traversing module 422 both adopt motor screw linear modules, and simultaneously can adopt synchronous belt linear modules, so that the linear modules capable of moving back and forth can be adopted, and no limitation is made herein.
The first substrate feeding traversing module 421 is fixedly installed on the rack 1 and located above the needling transfer device 2, the second substrate feeding traversing module 422 is installed at a sliding table position of the first substrate feeding traversing module 421, at this time, a sliding table moving direction of the second substrate feeding traversing module 422 is perpendicular to a sliding table moving direction of the first substrate feeding traversing module 421, the third substrate grabbing component 423 is installed at the second substrate feeding traversing module 422, the third substrate grabbing component 423 is used for adsorbing the substrates, the first substrate feeding traversing module 421 and the second substrate feeding traversing module 422 are matched with each other to enable the third substrate grabbing component 423 to move horizontally and adjust, so that the glass substrates can be transferred between the needling transfer device 2 and the substrate swing material taking mechanism 43, and if the substrate grabbing positions are deviated, the first substrate feeding traversing module 421 and the second substrate feeding traversing module 422 can drive the third substrate grabbing component 423 to adjust in a plane direction, the defect of substrate position placement can be overcome, and the position placement accuracy during transferring is improved.
Referring to fig. 10 and 11, in order to precisely grasp the substrate, specifically, the third substrate grasping assembly 423 includes a grasping arm 4231 and a lifting cylinder 4232 which are arranged in a plate shape, the lifting cylinder 4232 is fixedly mounted on a sliding table of the second substrate loading transverse moving module 422, the grasping arm 4231 is fixedly mounted on an expansion link 2134 of the lifting cylinder 4232, a window for observing the relative position between the glass substrate and the crystal film is opened in the middle of the grasping arm 4231, and the third substrate grasping assembly 423 is arranged horizontally; meanwhile, the bottom surface of the third substrate grabbing component 423 is further provided with an annular adsorption groove 10 which is concavely arranged from outside to inside along the peripheral direction, the annular adsorption groove 10 is communicated with a vacuum pump, at the moment, the vacuum pump is started to form negative pressure at the annular adsorption groove 10, at the moment, if a glass substrate is placed in the third substrate grabbing component 423, the third substrate grabbing component 423 can provide adsorption force on a plurality of circumferential directions for the glass substrate through the annular adsorption groove 10, grabbing is stable, the glass substrate is not prone to shift, working precision during transferring is improved, meanwhile, the lifting cylinder 4232 is started, the lifting cylinder 4232 can drive the grabbing arm 4231 to move downwards and get materials close to the substrate swinging material taking mechanism 43, and material taking stroke and time are shortened.
When the substrate feeding mechanism 42 snatchs the glass substrate to acupuncture transfer device 2 department, the crystal membrane is located under the glass substrate just, acupuncture transfer device 2 is ejecting crystal to glass substrate department from bottom to top, in order to realize the crystal and shift, for the efficiency when promoting the transfer, acupuncture transfer device 2 is the multiunit, multiunit acupuncture transfer device 2 is adjacent to be set up, acupuncture transfer device 2 can set up to two sets of, three groups, five groups or eight groups etc, multiunit acupuncture transfer device 2 sets up along a straight line direction interval in proper order, multiunit acupuncture transfer device 2 can start-up in step, in order to realize the multistation and shift.
The plurality of groups of needle punching transfer devices 2 can simultaneously share the one group of crystal moving device 3 and the one group of substrate moving device 4, specifically, the first crystal feeding traversing module 331, the first material taking and placing linear module 321 and the second material taking and placing linear module 432 are arranged in parallel, and meanwhile, the interval arrangement direction of the plurality of groups of needle punching transfer devices 2 is arranged along the moving direction of the sliding table of the first material taking and placing linear module 321, at this time, under the driving of the first material taking and placing linear module 321, the crystal swinging material taking mechanism 32 can respectively take and place the crystal film on the plurality of groups of needle punching transfer devices 2, and meanwhile, the substrate swinging material taking mechanism 43 can respectively take and place the substrate on the plurality of groups of needle punching transfer devices 2, so that the structure is compact, and the operation efficiency of the substrate and the crystal film is further improved.
Referring to fig. 12, in order to improve efficiency and precision during transferring, the needling transferring device 2 includes a puncturing mechanism 21 and a first visual inspection assembly 22, wherein the puncturing mechanism 21 is disposed on the frame 1, a crystal film is disposed on the puncturing mechanism 21, the first visual inspection assembly 22 is fixedly mounted on the frame 1 and is located right above the first visual inspection assembly 22, the puncturing mechanism 21 and the first visual inspection assembly 22 are coaxial and opposite to each other on an axis, it should be explained that the first visual inspection assembly 22 selects a CCD visual inspection device in this embodiment, and the axis of a detection area of the CCD visual inspection device is defined as a detection axis.
The detection axis of the first visual detection assembly 22 can observe the puncturing position between the glass substrate and the crystal film through the window on the third substrate grabbing assembly 423, and under the action of coaxial arrangement, the puncturing mechanism 21 can be guided to adjust the puncturing position, so that accurate puncturing is realized.
Referring to fig. 12 and 13, in the piercing transfer process, in order to satisfy the accuracy and efficiency of piercing, the piercing mechanism 21 includes a crystal displacement assembly 211, a machining offset adjustment assembly 212, and a piercing transfer assembly 213.
The crystal displacement assembly 211 is adjacent to the first visual inspection assembly 22 and is used for placing the crystal film, so as to drive the crystal film to displace in the horizontal plane direction, thereby adjusting the puncturing position. Specifically, crystal displacement subassembly 211 includes fixing base 2111 of fixed mounting on frame 1, fixing base 2111 is the bedplate form setting in this embodiment, acupuncture shifts subassembly 213 fixed mounting on fixing base 2111, and be located the middle part position department of fixing base 2111, in addition, crystal displacement subassembly 211 still includes the first displacement straight line module 2112 of installing on fixing base 2111, first displacement straight line module 2112 can adopt the lead screw motor straight line module, in addition, still can adopt the straight line module of hold-in range form, do not make the restriction here, here fixing base 2111 plays the effect of supporting first displacement straight line module 2112 and acupuncture and shifting subassembly 213.
The crystal displacement assembly 211 further comprises a first displacement seat 2113, a second displacement linear module 2115 and a second displacement seat 2114, wherein the first displacement seat 2113 is fixedly mounted on the sliding table of the first displacement linear module 2112, and the first displacement linear module 2112 can drive the first displacement seat 2113 to reciprocate; in addition, the second displacement linear module 2115 is fixedly mounted on the first displacement seat 2113, and the structure of the second displacement linear module 2115 is similar to that of the first displacement linear module 2112, which is not described herein again; the direction of the slider movement of the second linear translation module 2115 is perpendicular to the direction of the slider movement of the first translation seat 2113, and the second translation seat 2114 is mounted on the second linear translation module 2115, wherein the first translation seat 2113, the first linear translation module 2112 and the second linear translation module 2115 can drive the second translation seat 2114 to move and adjust at a horizontal position.
The top of the second displacement seat 2114 is provided with a platform part for placing the crystal film, and the crystal film can be placed on the top of the second displacement seat 2114; in addition, the machining offset adjustment assembly 212 is disposed on the second displacement seat 2114 of the crystal displacement assembly 211, and the machining offset adjustment assembly 212 is in contact with the crystal film for driving the crystal film to rotate along the detection axis of the first visual detection assembly 22 to achieve precise adjustment of the position.
Referring to fig. 12 and 13, in particular, the machining offset adjustment assembly 212 includes a rotating toothed ring 2121, the rotating toothed ring 2121 is rotatably mounted on top of the second displacement seat 2114, and the rotating toothed ring 2121 has driving teeth on the outside; meanwhile, the axis of the rotating toothed ring 2121 coincides with the detection axis of the first visual detection assembly 22, and the top of the rotating toothed ring 2121 is coaxially provided with a positioning circular groove 11 for sleeving and placing the crystal expansion ring of the crystal film, so as to realize the position positioning of the crystal film.
The machining offset adjustment assembly 212 further includes a deflection motor 2122 fixedly mounted on the second mounting base, a deflection gear 2123 fixedly mounted on an output shaft of the deflection motor 2122, and a toothed belt 2124 respectively wrapped around the deflection gear 2123 and the rotating toothed ring 2121, wherein the toothed belt 2124 is engaged with the driving teeth.
It should be noted that, in order to improve the position accuracy of the rotating toothed ring 2121 during rotation, the tooth profiles on the rotating toothed ring 2121 and the toothed belt 2124 are gt teeth, and the outer edge profile of the rotating ring is greater than the outer edge profile of the deflecting gear 2123, so as to achieve the effect of decelerating the rotating toothed ring 2121, and the gt teeth have the effect of stable and accurate transmission.
Here, by starting the deflection motor 2122, the deflection motor 2122 outputs a torque to drive the deflection gear 2123 to rotate, the deflection gear 2123 drives the toothed belt 2124 to rotate, the toothed belt 2124 drives the rotating toothed ring 2121 to rotate precisely, and the rotating toothed ring 2121 contacts with the crystal film, so that the crystal film is rotated precisely, and the position precision of the crystal film is improved.
With continued reference to fig. 12 and 13, in order to realize precise ejection of the crystal from the crystal film, the piercing mechanism 21 has a piercing channel 5, specifically, the piercing channel 5 vertically penetrates through the second displacement seat 2114, while the inside of the rotating toothed ring 2121 is communicated with the piercing channel 5, when the crystal film is placed at the crystal displacement mechanism, the piercing channel 5 is communicated with the crystal region on the crystal film, the piercing transfer component 213 is adjacent to the processing offset adjustment component 212 and is located on the side of the crystal displacement component 211 opposite to the first visual inspection component 22, and the piercing transfer component 213 pierces the crystal film back and forth through the piercing channel 5 to realize crystal transfer.
Specifically, the needle stick transfer assembly 213 includes a base 2131, a dial slide 2132, a housing 2133, a telescopic rod 2134, a driving member 2135, an air extracting element 2137 and a thimble 2136; wherein, base 2131 fixed mounting is on fixing base 2111, thousandth slip table 2132 fixed mounting is on base 2131, in addition, shell 2133 fixed mounting is on thousandth slip table 2132, through adjusting thousandth slip table 2132, can adjust the position of shell 2133.
Referring to fig. 14 and 15, the telescopic rod 2134 is coaxially arranged with the housing 2133, the telescopic rod 2134 extends from the bottom end of the housing 2133 to the inside of the housing 2133, meanwhile, the telescopic rod 2134 is slidably mounted on the housing 2133, the housing 2133 is vertically arranged, and the inside of the housing 2133 is hollow; generally, a sliding hole can be formed in the shell 2133, the telescopic rod 2134 is sleeved in the sliding hole, the movable fit of the telescopic rod 2134 between the shell 2133 is realized, at the moment, the telescopic rod 2134 can slide in a reciprocating manner in the vertical direction, and one end of the telescopic rod 2134 extending into the shell 2133 is provided with a clamp, the ejector pin 2136 is coaxially fixed on the telescopic rod 2134 through the clamp, and a through hole for the ejector pin 2136 to extend out of the shell 2133 is formed in the top end of the shell 2133, in the reciprocating movement process of the telescopic rod 2134, the ejector pin 2136 can be driven to reciprocate in the vertical direction, so that the ejection action is realized, and the driving piece 2135 outputs power in the process.
The driving piece 2135 adopts the voice coil motor in the application, in addition, one type of elements capable of realizing high-frequency reciprocating motion can be selected, the limitation is not made, the driving piece 2135 is fixedly installed on the micrometer sliding table 2132, the telescopic rod 2134 of the driving piece 2135 is fixedly connected with the telescopic rod 2134, the voice coil motor is started, the telescopic rod 2134 can be driven to reciprocate at high speed and high frequency, power output is realized, and the working condition requirements are met.
Here, in the process of ejecting the crystal, the inventors found that the crystal film is liable to shift and shake, and that there is a defect that the position of the crystal is not accurate and the puncture position is not stable at the time of puncturing, and based on this, when the size of the extendable rod 2134 is set smaller than the inner edge of the outer shell 2133, an air passage 6 through which air flows is formed between the outer shell 2133 and the extendable rod 2134; meanwhile, an air inlet 7 is formed in the top end of the shell 2133, an air outlet 8 is formed in the bottom of the shell 2133, the air channel 6 is communicated with the air inlet 7 and the air outlet 8 respectively, and one end, used for puncturing, of the ejector pin 2136 is adjacent to the air outlet 8.
Air extracting element 2137 adopts a vacuum pump, the vacuum pump is fixedly connected with shell 2133 through a pipeline, the vacuum pump is communicated with air outlet hole 8, air extracting element 2137 is started at the moment, air can enter from air inlet hole 7 and flow out from air outlet hole 8, when the crystal is ejected, the top end of shell 2133 is close to the crystal film, negative pressure is generated near air inlet hole 7, the crystal film is adsorbed and attached to one end, close to air inlet hole 7, of shell 2133, the crystal film is not prone to shifting and shaking at the moment, and the precision when ejector pin 2136 is ejected is further improved.
Further, in the process of adjusting the dial slide table 2132, the position of the ejector pin 2136 can be adjusted by the housing 2133 in the moving process, the ejector pin 2136 coincides with the detection axis of the first visual detection mechanism, the puncture position can be accurately observed, and meanwhile, the puncture mechanism 21 and the first visual detection assembly 22 are connected through a PLC controller, so that mutual automatic linkage matching can be realized.
The application principle of the MiniLED acupuncture transfer equipment in the embodiment of the application is as follows: the crystal material moving device 3 and the substrate material moving device 4 can respectively and independently move the crystal and the substrate into the needle punching transfer device 2, two actions of taking and placing a crystal film and a substrate can be synchronously carried out, and a plurality of groups of needle punching transfer devices 2 can share one group of crystal material moving device 3 and the substrate material moving device 4, so that the structure is compact, and the material operation efficiency is high; in the process, the first visual detection assembly 22 and the second visual detection assembly 35 can be started, the placing position of the crystal film can be adjusted, and the material running precision is high.
In addition, the puncture mechanism 21 and the first visual detection component 22 are coaxially arranged, so that the puncture position of the puncture mechanism 21 can be accurately positioned, the puncture position can be judged through the visual detection structure, meanwhile, the crystal film can be sucked by the puncture transfer component 213, the possibility of deviation generated during the puncture of the crystal film is reduced, the precision during the puncture is ensured, and the puncture transfer efficiency of the MiniLED is improved by the device.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: equivalent changes in structure, shape and principle of the present application shall be covered by the protection scope of the present application.

Claims (9)

1. A MiniLED needling transfer apparatus, comprising:
the needling transfer device (2) is provided with a puncturing mechanism (21) and a first visual detection component (22), the puncturing mechanism (21) and the first visual detection component (22) are coaxial and opposite on an axis, a crystal film can be placed at the puncturing mechanism (21), and crystal grains on the crystal film are sequentially ejected out of the crystal film to a glass substrate at the puncturing mechanism (21) so as to transfer the crystal into the substrate; the crystal moving device (3) is arranged adjacent to the needling transfer device (2) and is used for moving the crystal film with the crystal to the puncturing mechanism (21) or taking out the transferred crystal film from the puncturing mechanism (21); the crystal moving device (3) comprises: the needle punching device comprises a storage mechanism (31), a crystal swinging material taking mechanism (32) and a crystal feeding mechanism (33), wherein one side of the storage mechanism (31) is provided with an opening and is used for stacking a plurality of groups of crystal films at intervals, the crystal swinging material taking mechanism (32) can extend into the storage mechanism (31) and take out or send the crystal films into the storage mechanism (31) from the storage mechanism (31) and can swing to the position near the needle punching transfer device (2), and the crystal feeding mechanism (33) is positioned between the crystal swinging material taking mechanism (32) and the needle punching transfer device (2) and is used for adsorbing the crystal films and transferring the crystal films to the needle punching transfer device (2);
and the substrate transferring device (4) is arranged adjacent to the needling transfer device (2) and is used for transferring the substrate to the puncture mechanism (21) so as to place the substrate at the position corresponding to the crystal film or taking out the transferred substrate from the puncture mechanism (21).
2. A MiniLED needle transfer device according to claim 1, wherein the piercing mechanism (21) comprises:
a crystal displacement component (211) which is provided with a puncture channel (5) and is used for placing the crystal film, wherein the crystal displacement component (211) is adjacent to the first visual detection component (22) and can drive the crystal film to shift and adjust along a plane, and when the crystal film is placed at the crystal displacement mechanism, the puncture channel (5) is communicated with the crystal region on the crystal film;
the machining offset adjusting component (212) is arranged at the crystal displacement component (211), is in contact with the crystal film and drives the crystal film to rotate;
and a needle punching transfer component (213) which is adjacent to the processing offset adjusting component (212) and is positioned at one side of the crystal displacement component (211) opposite to the first visual detection component (22), and is used for performing reciprocating punching on the crystal film through a punching channel (5).
3. A MiniLED needle transfer device according to claim 2, wherein the needle transfer assembly (213) comprises:
the two ends of the shell (2133) are respectively provided with an air inlet (7) and an air outlet (8);
the telescopic rod (2134) extends into the shell (2133) from one end of the shell (2133) and is movably matched with the shell (2133), an air passage (6) for air to flow is formed between the shell (2133) and the telescopic rod (2134), the air passage (6) is respectively communicated with the air inlet hole (7) and the air outlet hole (8) so that air enters from the air inlet hole (7) and flows out from the air outlet hole (8), and one end, close to the air inlet hole (7), of the shell (2133) is used for adsorbing a crystal film;
the driving piece (2135) is connected with the telescopic rod (2134) and is used for driving the telescopic rod (2134) to move in a reciprocating manner;
the air extracting element (2137) is connected with the shell (2133) and is communicated with the air outlet hole (8);
and the ejector pin (2136) is fixedly arranged on the telescopic rod (2134), and one end for puncturing is adjacent to the air outlet hole (8).
4. The MiniLED needle transfer apparatus of claim 2 or 3, wherein the process offset adjustment assembly (212) comprises:
the outer edge of the rotating gear ring (2121) is provided with driving teeth, the rotating gear ring is rotatably arranged on the crystal displacement assembly (211), and the interior of the rotating gear ring is communicated with the puncture channel (5) and is used for sleeving a crystal film;
a deflection motor (2122) arranged on the crystal displacement component (211), and the output end of the deflection motor is provided with a deflection gear (2123);
and a toothed belt (2124) that is wrapped around the deflection gear (2123) and the rotating ring gear (2121), respectively, and that meshes with the drive teeth.
5. The MiniLED needle transfer apparatus of claim 1, wherein the crystal swing pick off mechanism (32) comprises:
the end part of the first material taking and placing linear module (321) is close to the material storage mechanism (31) and is provided with a first machine base (3211) capable of moving back and forth; a first lifting element (322) disposed on the first chassis (3211);
the swing arm rotating motor (323), the first lifting element (322) is connected with the swing arm rotating motor (323), and the first lifting element (322) drives the swing arm rotating motor (323) to move up and down;
the swing arm (324) is connected with the swing arm rotating motor (323), and the swing arm rotating motor (323) is used for driving the swing arm (324) to rotate, so that the swing arm (324) swings to the storing mechanism (31) and the needling transfer device (2) respectively, and the swing arm (324) can take and place the crystalline film conveniently;
the deviation rectifying assembly (34) is arranged on the swing arm (324) and is used for driving the crystal film to rotate so as to adjust the placing position;
and a second visual detection assembly (35) arranged on the first machine base (3211) and facing the swing arm (324) and used for detecting the crystal film on the swing arm (324).
6. The MiniLED needle transfer apparatus of claim 2, wherein the crystal feed mechanism (33) comprises:
a first crystal feeding traversing module (331);
the second crystal feeding traversing module (332) is arranged on the first crystal feeding traversing module (331) and is vertical to the first crystal feeding traversing module (331);
a feeding lifting component (333) connected with the second crystal feeding traversing module (332);
the crystalline film grabbing motor (334) is arranged at the feeding lifting part (333);
the crystal film grabbing component (335) is connected with the crystal film grabbing motor (334) and is used for adsorbing and grabbing the crystal film;
the first crystal feeding traversing module (331), the second crystal feeding traversing module (332) and the feeding lifting component (333) can drive the crystal film grabbing component (335) to be close to the needling transfer component (213) and the crystal swinging material taking mechanism (32) respectively, and the crystal film grabbing motor (334) is used for driving the crystal film grabbing component (335) to swing back and forth between the needling transfer component (213) and the crystal swinging material taking mechanism (32).
7. The MiniLED needle transfer apparatus of claim 1, wherein the substrate transfer device (4) comprises:
the substrate turnover mechanism (41) is provided with at least two first substrate grabbing components (412), the first substrate grabbing components (412) can grab the transferred and untransferred substrate workpieces respectively, and the substrate turnover mechanism (41) drives the first substrate grabbing components (412) to rotate so as to switch the pick-and-place positions of the substrate workpieces;
a substrate feeding mechanism (42) which can be close to or far away from the needling transfer device (2) and is used for adsorbing and grabbing the substrate so as to enable the substrate to be opposite to the crystal film;
and the substrate swinging and taking mechanism (43) is positioned between the substrate feeding mechanism (42) and the substrate overturning mechanism (41) and is used for transferring the substrate which is positioned at the substrate overturning mechanism (41) and is not transferred to the substrate feeding mechanism (42) for grabbing, or transferring the substrate which is positioned at the substrate feeding mechanism (42) and is transferred to the substrate overturning mechanism (41) to realize discharging.
8. The MiniLED needle transfer apparatus of claim 7, wherein the substrate feed mechanism (42) comprises:
a first substrate loading traversing module (421);
the second substrate feeding transverse moving module (422) is arranged on the first substrate feeding transverse moving module (421) and is vertical to the moving direction of the first substrate feeding transverse moving module (421);
and the third substrate grabbing assembly (423) is arranged at the second substrate feeding transverse moving module (422) and used for adsorbing the substrate.
9. A MiniLED needle transfer apparatus according to any one of claims 1-3, 5, 8, wherein: the multi-group needling transfer device (2) is provided with a plurality of groups of needling transfer devices (2) which are arranged adjacently, the crystal moving device (3) can respectively take and place the crystal film in the plurality of groups of needling transfer devices (2), and the substrate moving device (4) can respectively take and place the substrate in the plurality of groups of needling transfer devices (2).
CN202210414998.4A 2022-04-20 2022-04-20 MiniLED acupuncture transfer equipment Active CN114937629B (en)

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CN117198959B (en) * 2023-11-03 2024-02-27 迈为技术(珠海)有限公司 Chip transfer method and device

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