CN114930525A - 一种光电合封集成器件 - Google Patents

一种光电合封集成器件 Download PDF

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Publication number
CN114930525A
CN114930525A CN202080091874.6A CN202080091874A CN114930525A CN 114930525 A CN114930525 A CN 114930525A CN 202080091874 A CN202080091874 A CN 202080091874A CN 114930525 A CN114930525 A CN 114930525A
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China
Prior art keywords
eic
terminal
substrate
integrated device
pic
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Granted
Application number
CN202080091874.6A
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English (en)
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CN114930525B (zh
Inventor
张胜利
湛红波
杨明
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Huawei Technologies Co Ltd
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Huawei Technologies Co Ltd
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Publication of CN114930525A publication Critical patent/CN114930525A/zh
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Publication of CN114930525B publication Critical patent/CN114930525B/zh
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00Details of semiconductor or other solid state devices
    • H01L23/52Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames
    • H01L23/538Arrangements for conducting electric current within the device in operation from one component to another, i.e. interconnections, e.g. wires, lead frames the interconnection structure between a plurality of semiconductor chips being formed on, or in, insulating substrates
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/10Bump connectors; Manufacturing methods related thereto
    • H01L2224/15Structure, shape, material or disposition of the bump connectors after the connecting process
    • H01L2224/16Structure, shape, material or disposition of the bump connectors after the connecting process of an individual bump connector
    • H01L2224/161Disposition
    • H01L2224/16151Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/16221Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/16225Disposition the bump connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/4805Shape
    • H01L2224/4809Loop shape
    • H01L2224/48091Arched
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48135Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip
    • H01L2224/48137Connecting between different semiconductor or solid-state bodies, i.e. chip-to-chip the bodies being arranged next to each other, e.g. on a common substrate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2224/00Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
    • H01L2224/01Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
    • H01L2224/42Wire connectors; Manufacturing methods related thereto
    • H01L2224/47Structure, shape, material or disposition of the wire connectors after the connecting process
    • H01L2224/48Structure, shape, material or disposition of the wire connectors after the connecting process of an individual wire connector
    • H01L2224/481Disposition
    • H01L2224/48151Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
    • H01L2224/48221Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
    • H01L2224/48225Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
    • H01L2224/48227Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation connecting the wire to a bond pad of the item
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/15Details of package parts other than the semiconductor or other solid state devices to be connected
    • H01L2924/151Die mounting substrate
    • H01L2924/153Connection portion
    • H01L2924/1531Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface
    • H01L2924/15311Connection portion the connection portion being formed only on the surface of the substrate opposite to the die mounting surface being a ball array, e.g. BGA

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  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Light Receiving Elements (AREA)

Abstract

一种光电合封集成器件,PIC(7)和EIC(5)正向贴装在封装基板(2)上,ASIC(3)倒装在封装基板(2)上,PIC通过引线键合与EIC耦合,EIC通过引线键合与封装基板耦合,并通过封装基板与ASIC耦合,从而实现了PIC、EIC与ASIC之间的高频连接。PIC没有采用倒装,不需要开发TSV工艺,通过引线键合方式与EIC实现耦合,解决了目前包含PIC的光电合封集成器件成品率较低的技术问题。

Description

PCT国内申请,说明书已公开。

Claims (12)

  1. PCT国内申请,权利要求书已公开。
CN202080091874.6A 2020-03-31 2020-03-31 一种光电合封集成器件 Active CN114930525B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/CN2020/082366 WO2021195942A1 (zh) 2020-03-31 2020-03-31 一种光电合封集成器件

Publications (2)

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CN114930525A true CN114930525A (zh) 2022-08-19
CN114930525B CN114930525B (zh) 2024-05-03

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CN (1) CN114930525B (zh)
WO (1) WO2021195942A1 (zh)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116264223A (zh) * 2021-12-14 2023-06-16 中兴通讯股份有限公司 芯片封装结构及其光电设备

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130308898A1 (en) * 2012-04-26 2013-11-21 Acacia Communications Inc. Co-packaging photonic integrated circuits and application specific integrated circuits
US20160124164A1 (en) * 2014-10-29 2016-05-05 Acacia Communications, Inc. Optoelectronic ball grid array package with fiber
CN208256644U (zh) * 2017-04-14 2018-12-18 谷歌有限责任公司 用于高数据速率的硅光子ic的集成
CN110235039A (zh) * 2017-01-06 2019-09-13 洛克利光子有限公司 Asic与硅光子器件的共同封装
CN110718593A (zh) * 2018-06-27 2020-01-21 台湾积体电路制造股份有限公司 半导体结构及其形成方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7081667B2 (en) * 2004-09-24 2006-07-25 Gelcore, Llc Power LED package
US10037982B2 (en) * 2016-01-04 2018-07-31 Infinera Corporation Photonic integrated circuit package
US11043478B2 (en) * 2018-04-24 2021-06-22 Cisco Technology, Inc. Integrated circuit bridge for photonics and electrical chip integration

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20130308898A1 (en) * 2012-04-26 2013-11-21 Acacia Communications Inc. Co-packaging photonic integrated circuits and application specific integrated circuits
US20160124164A1 (en) * 2014-10-29 2016-05-05 Acacia Communications, Inc. Optoelectronic ball grid array package with fiber
CN110235039A (zh) * 2017-01-06 2019-09-13 洛克利光子有限公司 Asic与硅光子器件的共同封装
CN208256644U (zh) * 2017-04-14 2018-12-18 谷歌有限责任公司 用于高数据速率的硅光子ic的集成
CN110718593A (zh) * 2018-06-27 2020-01-21 台湾积体电路制造股份有限公司 半导体结构及其形成方法

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CN114930525B (zh) 2024-05-03
WO2021195942A1 (zh) 2021-10-07

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