CN114727464B - Method for prolonging service life of plasma spheroidization radio frequency torch and radio frequency torch - Google Patents
Method for prolonging service life of plasma spheroidization radio frequency torch and radio frequency torch Download PDFInfo
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- CN114727464B CN114727464B CN202210324761.7A CN202210324761A CN114727464B CN 114727464 B CN114727464 B CN 114727464B CN 202210324761 A CN202210324761 A CN 202210324761A CN 114727464 B CN114727464 B CN 114727464B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B22—CASTING; POWDER METALLURGY
- B22F—WORKING METALLIC POWDER; MANUFACTURE OF ARTICLES FROM METALLIC POWDER; MAKING METALLIC POWDER; APPARATUS OR DEVICES SPECIALLY ADAPTED FOR METALLIC POWDER
- B22F9/00—Making metallic powder or suspensions thereof
- B22F9/02—Making metallic powder or suspensions thereof using physical processes
- B22F9/14—Making metallic powder or suspensions thereof using physical processes using electric discharge
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/02—Arrangements for confining plasma by electric or magnetic fields; Arrangements for heating plasma
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
Abstract
The invention discloses a method for prolonging the service life of a plasma spheroidizing radio frequency torch and the radio frequency torch, and belongs to the technical field of plasma.A constraint tube (2) is arranged outside a vacuum cavity (1) of the radio frequency torch, a heating induction coil (6) for exciting ionization of working gas in the vacuum cavity is arranged in the constraint tube (2), and one end of the heating induction coil (6) is led in a radio frequency power supply through a leading-in wire (61) and is led out at the other end through a leading-out wire (62); the wire leading-in mode of the leading-in wire (61) and the wire routing direction of the leading-out wire (62) are adjusted, the strength of an induced electric field in the vacuum cavity (1) along the radial direction is reduced, the disturbance of an induced electromagnetic field in the radial direction is eliminated, the probability that ions bombard the inner wall of the torch along the radial direction in the plasma ignition process is reduced, the hitting force of plasma on the wall of the restraint tube is effectively weakened, the service life of the radio frequency plasma spheroidizing torch is prolonged, the structure and the material of the restraint tube are changed, and the service life of the device is further prolonged.
Description
Technical Field
The invention relates to the technical field of plasma, in particular to a method for prolonging the service life of a plasma spheroidizing radio frequency torch and the radio frequency torch.
Background
The plasma has the characteristics of high temperature, high enthalpy, high activity and large temperature gradient, and has great technical advantages in the aspect of spheroidization of micron and submicron and some nano powder materials by taking the plasma as a heat source. The RF plasma technology and equipment without any impurity has continuous and stable operation, fast material treating speed, high production capacity and moderate equipment cost, and thus may be used widely in powder material technology field compared with microwave and DC arc plasma heat source. Has higher application value in the fields of preparation and processing of high-performance structural materials or functional materials.
At present, the more mature methods for preparing metal alloys mainly comprise vacuum melting, precision casting and powder metallurgy. The smelting method and the precision casting have defects, easily segregated components, uneven structure, low production efficiency and high production cost. The traditional powder metallurgy method adopts a simple process to produce the titanium alloy with higher performance, but the method can only produce parts with simple shapes. Injection molding, while allowing near net-size fabrication of complex parts, has limited part size. The gel casting forming method can be used for producing large-size parts with complex shapes, uniform components and tissues and near net sizes in batches, the utilization rate of raw materials almost reaches 100%, the stability of the parts is good, the uniformity and the mechanical property can be completely guaranteed, the gel casting forming method is applied to the field of alloys, and the low-cost continuous production of the alloy parts can be realized. However, in the injection molding and gel casting of active metal products, raw material powder with better sphericity is required, and currently, aerosol alloy powder is mainly adopted, so that the cost is higher. The spheroidization of the active metal powder with irregular shape and low cost by adopting the plasma technology is an effective way for further reducing the cost of titanium products formed by injection and gel injection molding, accords with the development direction of active metal product industry, and has important practical significance for realizing the large-scale application of low-cost high-performance active metal products in the civil industry.
The spherical metal powder is prepared by firstly adopting the metal molten liquid droplet flow to impact a baffle plate, and cooling, solidifying and forming after the metal molten liquid droplet flow is split into droplets under the action of a resistance force, so that the obtained metal balls are mostly ellipsoid and rod-shaped powder with round heads at two ends. Thereafter, preston et al in the united states succeeded in obtaining spheroidized powder free of spheroids and rod-like particles by direct current arc plasma melting and cooling molding, but the finished product was inspected for non-spheroidized particles and reprocessed. After the 90 s of the last century, the demand for spherical powder became greater and greater, and the plasma spraying technology was fully developed. The plasma spraying technology has been successfully applied to a plurality of fields such as spherical powder preparation, ultrafine powder preparation, spraying, CVD diamond deposition and the like abroad. For example, pyrogenesis, inc., canada, which used a DC non-rotating arc plasma nozzle for the industrial-scale production of spherical powder at the end of 1998, and a plasma spraying apparatus consisting of three nozzles forming an angle of 20 to 40 degrees with the vertical direction, thereby overcoming the disadvantage that powder particles are difficult to reach the high temperature region of the plasma arc core. However, the main defects of the direct current arc plasma methods are that the electrodes are burnt and impurities are introduced, and the electrodes must be replaced at regular time, so that the continuous and stable operation of the equipment system is influenced.
The existing method for preparing fine spherical metal powder has low production rate and high cost. The radio frequency plasma method is a better technical approach for preparing metal powder or alloy powder with uniform components, less defects, good fluidity and good sphericity, and has lower production cost and higher production efficiency.
Gas discharge plasma is an important foundation of ion source technology, and thus, the ion source technology is also an important direction for the application and development of plasma. Various plasma sources used in the ion source technology at present are hot filament electron beam assistance, vacuum arc, radio frequency, microwave electron cyclotron resonance and the like, and ion sources suitable for various application fields, such as wide-beam high current, high energy, micron beam, high brightness, negative ions, heavy ions, multi-charge state, polarized ion sources and the like, are developed and formed. They play an important role in the fields of ion beam assisted deposition, ion cluster deposition, surface modification, ion beam plate making, etching, implantation doping and high-energy physical research. The method is characterized in that almost all ion beams can be used for injecting different materials to form a non-equilibrium alloy phase which is difficult to obtain by a common method, and the crystal form, the appearance, the density, the residual stress, the gas phase doping, the chemical proportion and the like of the film can be influenced by controlling the atom type and the energy, so that the physical and chemical properties of the surface of the material are changed. The ion source technology provides a new way for the coating synthesis of new materials.
However, in the experiment and production process, it is found that the winding mode of the heating coil of the radio frequency torch is shown in fig. 8 at present, the routing directions of the leading-in wire and the leading-out wire extend outwards along the radius direction of the cylinder, which can cause disorder of the induced magnetic field, so that the micro powder forms turbulent flow along with the movement of the eddy current. This turbulence causes the metal powder to stick to the wall and, with continued radial impact of the particles, creates an annular rupture zone in the middle of the constraining tube wall, resulting in a reduced life of the device.
Disclosure of Invention
The invention aims to overcome the problem of short service life of a radio frequency torch in the prior art, and provides a method for prolonging the service life of a plasma spheroidizing radio frequency torch and the radio frequency torch.
The purpose of the invention is realized by the following technical scheme:
there is provided generally a method of extending the service life of a plasma spheroidizing radio frequency torch having a confinement tube disposed outside a vacuum chamber of the radio frequency torch and a heating induction coil disposed in the confinement tube for exciting ionization of a working gas in the vacuum chamber, the method comprising:
one end of the heating induction coil is led in a radio frequency power supply through an incoming line and is led out at the other end through an outgoing line; and adjusting the wire inlet mode of the leading wire and the wire routing direction of the leading wire, and reducing the strength of the induced electric field in the vacuum cavity along the radial direction.
As a preferred option, the confinement tube is lined with a silicon carbide fiber composite material and the heating induction coil is wrapped with a polyimide composite material in other areas of the confinement tube.
As a preferred item, a method for prolonging the service life of a plasma spheroidization radio frequency torch, which adjusts the wire inlet mode of the leading-in wire and the wire outlet mode of the leading-out wire, comprises the following steps:
the wiring direction of the leading-in wire is upward or downward along the vacuum cavity bus, and the wiring direction of the leading-out wire is opposite to the wiring direction of the leading-in wire and is close to the leading-in wire at the radio frequency power supply.
As a preferred item, a method for prolonging the service life of a plasma spheroidization radio frequency torch, which adjusts the wire inlet mode of the leading-in wire and the wire outlet mode of the leading-out wire, comprises the following steps:
the wiring direction of the lead-in wire and the wiring direction of the outgoing wire are both upward or downward along the vacuum cavity bus, and the lead-in wire and the outgoing wire are close to each other near the cavity.
As a preferred item, a method for prolonging the service life of a plasma spheroidization radio frequency torch, which adjusts the wire inlet mode of the leading-in wire and the wire outlet mode of the leading-out wire, comprises the following steps:
the wiring direction of the lead-in wire and the wiring direction of the lead-out wire are respectively along the same direction of the tangent of the vacuum cavity.
As a preferred item, a method for prolonging the service life of a plasma spheroidization radio frequency torch, which adjusts the wire inlet mode of the leading-in wire and the wire outlet mode of the leading-out wire, further comprises:
the wiring direction of the lead-in wire and the wiring direction of the lead-out wire are respectively opposite to the tangential direction of the vacuum cavity.
The invention also provides a plasma spheroidizing radio-frequency torch which comprises a vacuum cavity and a constraint pipe arranged on the outer wall of the vacuum cavity, wherein the top end of the vacuum cavity is provided with a carrier gas conveying port, reaction gas conveying ports arranged on two sides of the carrier gas conveying port and a cooling gas conveying port arranged on the outer side of the reaction gas conveying port; the restraint tube is internally provided with a heating induction coil, two ends of the heating induction coil are respectively provided with a leading-in wire and a leading-out wire, and the leading-in wire and the leading-out wire are structurally arranged according to the method of any one of claims 1-6.
As a preference, the cooling gas delivery channel is close to the inner wall of the vacuum chamber.
As a preference, the plasma spheroidizing radio frequency torch, the heating induction coil is a 5-turn coaxial coil.
As a preferred item, in the plasma spheroidizing radio frequency torch, the routing direction of the lead-in wire is upward or downward along the vacuum cavity bus, and the routing direction of the lead-out wire is opposite to the routing direction of the lead-in wire.
It should be further noted that the technical features corresponding to the above options can be combined with each other or replaced to form a new technical solution without conflict.
Compared with the prior art, the invention has the beneficial effects that:
(1) The invention reduces the strength of the induced electric field in the vacuum cavity along the radial direction by changing the lead mode of the radio frequency lead-in wire and the lead-out wire, eliminates the disturbance of the induced electromagnetic field in the radial direction, reduces the probability that ions bombard the inner wall of the torch along the radial direction in the plasma ignition process, effectively weakens the striking force of the plasma on the wall of the restraint tube, and improves the service life of the radio frequency plasma spheroidizing torch.
(2) The device and the method provided by the invention are different from a common radio frequency plasma torch, aiming at the fact that a wire part led out to a power supply part is led in by a high-frequency electromagnetic induction coil, the wiring direction of the wire part effectively reduces the number of plasmas vertically striking on the wall of the restraint tube, the striking force of the plasmas on the wall of the restraint tube is effectively weakened, the service life of the radio frequency plasma spheroidizing torch is prolonged, and the spheroidizing cost is reduced.
(3) The silicon carbide fiber composite material layer is lined in the restraint tube, so that the restraint tube has the advantages of stable chemical property, high temperature resistance, high heat conductivity coefficient, small thermal expansion coefficient, good wear resistance, impact resistance and the like, and in addition, the silicon carbide has high hardness, the Mohs hardness is 9.5 grade, and the service life of the device can be greatly prolonged.
(4) According to the invention, the constraint tube is filled with a polyimide composite material, and the polyimide composite material is wrapped on the heating induction coil. The high-temperature-resistant polyimide dielectric material can ensure strong insulativity between coils, simultaneously, the high temperature resistance of polyimide reaches more than 400 ℃, the polyimide dielectric material is one of the highest varieties of heat stability in polymers so far, excellent mechanical property, very high irradiation resistance and excellent thermal conductivity after inorganic heat-conducting filler is added, the characteristics ensure that the polyimide dielectric material can not deform under the high-temperature and high-radiation conditions when being used as a dielectric layer, in addition, the material with electromagnetic shielding property is added into a polyimide substrate, a composite electromagnetic shielding material can be formed, thereby effectively solving the phenomenon of induced electromagnetic field turbulence in a cavity caused by electromagnetic coupling between the coils, further avoiding the damage of the pipe wall and further prolonging the service life of the device.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this application, illustrate embodiment(s) of the invention and together with the description serve to explain the invention without limiting the invention.
FIG. 1 is a schematic cross-sectional view of a long life plasma spheroidizing RF torch apparatus for preparing metal powder according to the present invention;
FIG. 2 is a front view of a long life plasma spheroidizing RF torch apparatus for preparing metal powder according to the present invention;
FIG. 3 is a drawing of a RF torch apparatus of the present invention shown with a silicon carbide fiber composite layer and a constraint tube filled with polyimide composite;
FIG. 4 is a schematic view of the present invention showing the reverse orientation of the outgoing line and the incoming line, wherein the RF outgoing line is up the vacuum chamber bus and the incoming line is down the vacuum chamber bus;
FIG. 5 is a schematic view showing the leading-in wire and the leading-out wire both arranged upwards along the generatrix of the vacuum cavity;
FIG. 6 is a schematic view showing that the leading-in wire and the leading-out wire are respectively arranged along the tangential direction of the vacuum chamber in the same direction;
FIG. 7 is a schematic view showing that the leading-in wire and the leading-out wire are respectively arranged along the tangential direction of the vacuum cavity in a reverse direction;
fig. 8 is a diagram illustrating an arrangement manner of the lead-in wire and the lead-out wire according to the prior art, wherein the routing directions of the lead-in wire and the lead-out wire extend outward along the radius direction of the cylinder.
Detailed Description
The technical solutions of the present invention will be described clearly and completely with reference to the accompanying drawings, and it should be understood that the described embodiments are some, but not all embodiments of the present invention. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, it should be noted that directions or positional relationships indicated by "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", and the like are directions or positional relationships described based on the drawings, and are only for convenience of description and simplification of description, and do not indicate or imply that the device or element referred to must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless otherwise explicitly stated or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be connected directly or indirectly through intervening media, or they may be interconnected between two elements. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In addition, the technical features involved in the different embodiments of the present invention described below may be combined with each other as long as they do not conflict with each other.
The invention mainly eliminates the disturbance of the induced electromagnetic field in the radial direction by changing the lead mode of the lead wire 61 and the lead wire 62, reduces the probability that ions bombard the inner wall of the torch along the radial direction in the plasma ignition process, effectively weakens the striking force of the plasma on the wall of the restraint tube, prolongs the service life of the radio frequency plasma spheroidizing torch, simultaneously, the restraint tube liner is made of silicon carbide fiber composite material, and the heating induction coil 6 is wrapped by polyimide material, thereby further prolonging the service life of the device.
Example 1
In this exemplary embodiment, a method for extending the service life of a plasma spheroidizing rf torch is provided, as shown in fig. 1 and 2, a confinement tube 2 is disposed outside a vacuum chamber 1 of the rf torch, and a heating induction coil 6 for exciting ionization of a working gas in the vacuum chamber is disposed in the confinement tube 2, the method comprising:
one end of the heating induction coil 6 is led in a radio frequency power supply through an leading-in wire 61 and is led out from the other end through a leading-out wire 62; and adjusting the wire feeding mode of the lead wire 61 and the wire feeding direction of the lead wire 62 to reduce the strength of the induced electric field in the vacuum chamber 1 along the radial direction.
Specifically, a radio frequency power supply is connected with a heating induction coil 6 through a leading-in wire 61 and a radio frequency leading-out wire, the heating induction coil 6 excites working gas to ionize to generate plasma, an induced electric field of the plasma in a vacuum cavity 1 forms eddy current, and carries and melts metal raw powder to carry out eddy current movement.
The radio frequency plasma spheroidizing device generates an annular eddy current electric field in a coil, plasma can do annular eddy current motion under the action of the electric field, ions cannot collide with a wall surface perpendicular to the wall surface in a perfect state, but due to the existing lead wire mode, a lead wire in and out can generate a radial electric field when the plasma is started, partial plasma can generate radial ion current under the action of the radial electric field, the plasma perpendicularly bombards the wall of a torch, and the thermal stress caused by high thermal load of the plasma can cause the wall to crack. The current method adopts a method of frequently replacing the lining, but the lining is expensive, so that the spheroidizing cost is high.
According to the invention, by changing the lead mode of the radio frequency lead-in wire 61 and the lead-out wire 62, the strength of the induced electric field in the vacuum cavity 1 along the radial direction is reduced, the generation of the radial electric field is avoided, the disturbance of the induced electromagnetic field in the radial direction is eliminated, the probability that ions bombard the inner wall of the torch along the radial direction in the plasma ignition process is reduced, the hitting power of the plasma on the wall of the restraint tube is effectively weakened, the service life of the radio frequency plasma spheroidizing torch is prolonged, and the spheroidizing cost is reduced.
Example 2
Based on example 1, there is provided a method for prolonging the service life of a plasma spheroidizing radio frequency torch, as shown in fig. 4 to 7, the method for adjusting the wire leading-in mode of the leading-in wire 61 and the wire leading-out mode of the leading-out wire 62 includes:
the routing direction of the leading wire 61 is upward or downward along the vacuum cavity 1 bus, and the routing direction of the leading wire 62 is opposite to the routing direction of the leading wire 61 and is close to the leading wire 61 at the radio frequency power supply.
Further, in another example, the routing direction of the lead-in wire 61 and the routing direction of the lead-out wire 62 are both upward or downward along the generatrix of the vacuum chamber 1, and the lead-in wire 61 and the lead-out wire 62 are close to each other near the chamber.
Further, in another example, the lead-in line 61 and the lead-out line 62 are routed in the same direction along the tangent of the vacuum chamber 1.
Further, in another example, the lead-in wire 61 and the lead-out wire 62 are routed in opposite directions along the tangent of the vacuum chamber 1.
Further, by utilizing ANSYS modeling simulation, induced electromagnetic fields in the five model vacuum cavities and electric field intensity along the radius direction can be calculated and compared. Wherein, the electric field intensity of the induced electric field along the radial direction of the cylinder is the minimum after the device in FIG. 4 is electrified; FIG. 5 shows that the induced electric field intensity along the radial direction of the cylinder after the device is powered on is slightly stronger than that in FIG. 4; after the device in fig. 6 and 7 is powered on, the upper and lower parts of the induced electric field in the vacuum cavity are similar, and the middle part is different, but the induced electric field intensity of the two parts along the radial direction of the cylinder is larger than that of the device in fig. 4 and 5; the electric field intensity of the induced electric field which is outwards along the radius direction of the cylinder after the device in the figure 8 is electrified is the largest, the induced electric field generated by introducing the leading-out wire can guide the plasma to form a current component along the radius direction, the current can carry the plasma to continuously impact on the wall of the restraint tube, the restraint tube can be damaged as long as time passes, and even the restraint tube is broken. In summary, in the five designs selected, the device of fig. 4 is more effective in increasing the service life of the confinement walls, and the rf heating induction coil 6 of fig. 4-7 designed according to the present invention can greatly increase the service life of the vacuum isolation chamber walls.
The device and the method provided by the invention are different from a common radio frequency plasma torch, aiming at the electric wire part led out of the power supply part and led in by the high-frequency electromagnetic induction coil, the wiring direction effectively reduces the number of plasmas vertically striking the wall of the restraint tube, effectively weakens the striking force of the plasmas on the wall of the restraint tube, prolongs the service life of the radio frequency plasma spheroidizing torch and reduces the spheroidizing cost.
Example 3
Based on example 1, a method for prolonging the service life of a plasma spheroidizing radio frequency torch is provided, wherein the constraint tube 2 adopts silicon carbide fiber composite material as a tube wall lining, and a heating induction coil 6 is wrapped by polyimide composite material in other areas in the constraint tube 2.
Specifically, the silicon carbide fiber composite material layer is lined in the restraint tube 2, so that the restraint tube has the advantages of stable chemical property, high temperature resistance, high heat conductivity coefficient, small thermal expansion coefficient, good wear resistance, impact resistance and the like, and in addition, the silicon carbide has high hardness, the Mohs hardness is 9.5 grade, and the service life of the device can be greatly prolonged.
Specifically, the constraining tube 2 is filled with a polyimide composite material, and the polyimide composite material is wrapped around the heating induction coil 6. The high-temperature-resistant polyimide dielectric material can ensure strong insulativity between coils, simultaneously, the high temperature resistance of polyimide reaches more than 400 ℃, the polyimide dielectric material is one of the highest varieties of heat stability in polymers so far, excellent mechanical property, very high irradiation resistance and excellent thermal conductivity after inorganic heat-conducting filler is added, the characteristics ensure that the polyimide dielectric material can not deform under the high-temperature and high-radiation conditions when being used as a dielectric layer, in addition, the material with electromagnetic shielding property is added into a polyimide substrate, a composite electromagnetic shielding material can be formed, thereby effectively solving the phenomenon of induced electromagnetic field turbulence in a cavity caused by electromagnetic coupling between the coils, further avoiding the damage of the pipe wall and further prolonging the service life of the device.
Example 4
Based on the method, a plasma spheroidizing radio frequency torch is provided, as shown in fig. 1 and 2, and comprises a vacuum cavity 1 and a constraint pipe 2 arranged on the outer wall of the vacuum cavity 1, wherein the top end of the vacuum cavity 1 is provided with a carrier gas conveying channel 3, reaction gas conveying channels 4 arranged on two sides of the carrier gas conveying channel 3, and a cooling gas conveying channel 5 arranged outside the reaction gas conveying channels 4; the restraint tube 2 is internally provided with a heating induction coil 6, two ends of the heating induction coil 6 are respectively provided with an leading-in wire 61 and a leading-out wire 62, and the leading-in wire 61 and the leading-out wire 62 are structurally arranged according to the method in the embodiment.
The carrier gas conveying channel 3 is connected with the vacuum cavity 1 and an external material storage area and used for conveying metal powder by carrier gas, the reaction gas conveying channel 4 is connected with the vacuum cavity 1, reaction gas is discharged to generate and maintain plasma, and the cooling gas conveying channel 5 is connected with the vacuum cavity 1 and used for conveying cooling gas and cooling the device. The vacuum chamber 1 is connected with a beam focusing area (conventionally arranged, not shown in the figure), the restraint tube 2 is used for separating a plasma heating area from the outside, the heating induction coil 6 is arranged for heating the vacuum chamber 1, and the leading-in wire 61 and the leading-out wire 62 are respectively connected with an external radio frequency power supply.
When the device is used, working gas enters the vacuum cavity 1 through the carrier gas conveying channel 3, reaction gas enters the vacuum cavity 1 through the reaction gas conveying channel 4, cooling gas enters the vacuum cavity 1 through the cooling gas conveying channel 5, although the three gases have different effects, inert gas or gas which does not react with active metal can be used, and the gas flow rate is different at different positions.
Further, argon is selected as the three gases; the radio frequency power supply is connected with the heating induction coil 6 through the leading-in wire 61 and the leading-out wire 62, the heating induction coil 6 excites the working gas to ionize to generate plasma, an induced electric field of the plasma in the vacuum cavity forms eddy current, and carries and melts metal raw powder to carry out eddy current movement.
Furthermore, by utilizing ANSYS modeling simulation, induced electromagnetic fields in the five model vacuum cavities and electric field intensity along the radius direction can be calculated and compared. The electric field intensity of the device shown in fig. 4, which is induced outwards along the radius direction of the cylinder after being electrified, is the minimum, and the effect of prolonging the service life of the constraint pipe wall is better.
Example 5
Based on the embodiment 4, the plasma spheroidizing radio frequency torch is provided, and the service life of the device is further prolonged on the basis of improving the coil.
On the one hand, the generation of the turbulent current is related to the electromagnetic coupling interference between the excitation coils besides the winding mode of the coils. On the other hand, the heat preservation effect of the currently used radio frequency plasma source generating device is not obvious, and the heat of the heating center part is easy to lose, so that on one hand, the heating temperature of the micro powder in the production process can not meet the standard requirement, the melting and spheroidizing quality of the micro powder is poor, the temperature gradient is low, and the re-cooling effect after heating is not ideal; on the other hand, compared with the ideal situation, the cost is higher, the energy utilization rate is low, resources are wasted, and meanwhile, the operating environment is continuously heated, so that burden is brought to operators.
In order to solve the above problems, a plasma spheroidizing radio frequency torch is provided, as shown in fig. 3, the silicon carbide fiber composite material layer 21 is lined in the constraint tube 2, so that the constraint tube 2 has the advantages of stable chemical properties, high temperature resistance, high thermal conductivity, small thermal expansion coefficient, good wear resistance, impact resistance and the like, and in addition, the hardness of silicon carbide is very high, the mohs hardness is 9.5 grade, and the service life of the device can be greatly prolonged.
Further, the heating induction coil 6 is a 5-turn coaxial coil, the turn-to-turn distance is 36mm, and the diameter of the coil is 10mm.
Further, the cooling gas conveying channel 5 is close to the inner wall of the vacuum cavity 1, so that the cooling gas flows close to the inner wall of the plasma confinement tube 2, and the wall of the confinement tube 2 is cooled.
Further, the vacuum chamber 1 is a cylindrical chamber, the height of the plasma radio frequency torch is 350mm, and the radius of the vacuum chamber 1 is 29mm. The wall thickness of the restraint tube 2 is 3mm, and the channel diameter of the carrier gas conveying channel 3The lengths of the carrier gas transport passage 3, the reaction gas transport passage 4 and the cooling gas transport passage 5 were all 100mm, which was 3 mm. The diameter of the reactant gas delivery channel 4 was 36mm. The heating induction coil 6 is a high-frequency induction copper coil, the thickness of the polyimide heat-conducting insulating layer is 20mm, the current of the coil is 250A, and the current frequency is 3MHz; setting the flow rate of the carrier gas to be 0m under the condition of analyzing the heating process of the radio frequency torch without considering the powder feeding experiment 3 H, on the basis of which the reaction gas flow is 2m 3 Flow of cooling gas 4m 3 H is used as the reference value. In other embodiments, the current magnitude and frequency, the gas flow and the flow rate are selected to meet the corresponding requirements according to the actual conditions and the requirements of the selected prepared metal material.
The above detailed description is for the purpose of describing the invention in detail, and it should not be construed that the detailed description is limited to the description, and it will be apparent to those skilled in the art that various modifications and substitutions can be made without departing from the spirit of the invention.
Claims (9)
1. A method for extending the service life of a plasma spheroidization rf torch, a confinement tube (2) being provided outside a vacuum chamber (1) of the rf torch, and a heating induction coil (6) being provided in the confinement tube (2) for exciting the ionization of a working gas in the vacuum chamber, characterized in that the method comprises:
one end of the heating induction coil (6) is led in a radio frequency power supply through an leading-in wire (61) and is led out from the other end through a leading-out wire (62); adjusting the wire inlet mode of the lead-in wire (61) and the wire routing direction of the lead-out wire (62) to reduce the strength of an induced electric field in the vacuum cavity (1) along the radial direction;
the restraint tube (2) adopts a silicon carbide fiber composite material as a tube wall lining, and the heating induction coil (6) is wrapped by a polyimide composite material in other areas in the restraint tube (2).
2. The method of claim 1, wherein adjusting the lead-in pattern of the lead-in wire (61) and the lead-out pattern of the lead-out wire (62) comprises:
the wiring direction of the leading-in wire (61) is upward or downward along a bus of the vacuum cavity (1), and the wiring direction of the leading-out wire (62) is opposite to the wiring direction of the leading-in wire (61) and is close to the leading-in wire (61) at the radio frequency power supply.
3. The method for extending the service life of a plasma spheroidization RF torch according to claim 1, wherein the adjusting the incoming line mode of the leading-in line (61) and the outgoing line mode of the leading-out line (62) comprises:
the routing direction of the lead-in wire (61) and the routing direction of the lead-out wire (62) are both upward or downward along a generatrix of the vacuum cavity (1), and the lead-in wire (61) and the lead-out wire (62) are close to each other near the cavity.
4. The method for extending the service life of a plasma spheroidization RF torch according to claim 1, wherein the adjusting the incoming line mode of the leading-in line (61) and the outgoing line mode of the leading-out line (62) comprises:
the routing direction of the lead-in wire (61) and the routing direction of the lead-out wire (62) are respectively in the same direction along the tangent line of the vacuum cavity (1).
5. The method for prolonging the service life of a plasma spheroidization radio frequency torch according to the claim 1, wherein the method for adjusting the wire inlet mode of the leading wire (61) and the wire outlet mode of the leading wire (62) further comprises the following steps:
the routing direction of the lead-in wire (61) and the routing direction of the lead-out wire (62) are respectively opposite to each other along the tangent line of the vacuum cavity (1).
6. The plasma spheroidization radio-frequency torch is characterized by comprising a vacuum cavity (1) and a constraint pipe (2) arranged on the outer wall of the vacuum cavity (1), wherein the top end of the vacuum cavity (1) is provided with a carrier gas conveying channel (3), reaction gas conveying channels (4) arranged on two sides of the carrier gas conveying channel (3) and a cooling gas conveying channel (5) arranged on the outer sides of the reaction gas conveying channels (4); a heating induction coil (6) is arranged in the restraint tube (2), two ends of the heating induction coil (6) are respectively provided with a leading-in wire (61) and a leading-out wire (62), and the leading-in wire (61) and the leading-out wire (62) are structurally arranged according to the method of any one of claims 1 to 5.
7. The plasma spheroidization RF torch according to claim 6, wherein the cooling gas delivery channel (5) is close to the inner wall of the vacuum chamber (1).
8. A plasma spheroidization RF torch according to claim 6, characterized in that the heating induction coil (6) is a 5 turn coaxial coil.
9. The plasma spheroidization RF torch according to claim 7, wherein the lead-in wire (61) is routed upwards or downwards along the generatrix of the vacuum chamber (1), and the lead-out wire (62) is routed in the opposite direction to the lead-in wire (61).
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Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09306695A (en) * | 1996-05-17 | 1997-11-28 | Komatsu Ltd | Plasma generating device and surface processing device using it |
| CN202231940U (en) * | 2011-08-30 | 2012-05-23 | 中芯国际集成电路制造(上海)有限公司 | Plasma reactor capable of improving uniformity of plasma reaction |
| CN103811262A (en) * | 2012-11-14 | 2014-05-21 | 东京毅力科创株式会社 | Inductive coupled plasma processing apparatus |
| JP5638727B1 (en) * | 2014-03-31 | 2014-12-10 | Ｓｐｐテクノロジーズ株式会社 | Plasma processing apparatus and coil used in the same |
| CN109371479A (en) * | 2018-12-21 | 2019-02-22 | 青岛科技大学 | A kind of solution melt cospinning multi-nozzle electrospinning integrating device |
| CN110277293A (en) * | 2018-02-05 | 2019-09-24 | 朗姆研究公司 | Taper top electrode for uniformity controlling in corona treatment |
| CN112572803A (en) * | 2020-12-22 | 2021-03-30 | 苏州极目机器人科技有限公司 | Aviation electrostatic spraying device and system |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3017581B2 (en) * | 1991-12-13 | 2000-03-13 | 松下電工株式会社 | Electrodeless lamp |
| JP2004165345A (en) * | 2002-11-12 | 2004-06-10 | Pearl Kogyo Kk | Remote plasma type cleaning apparatus for deposition chamber |
| CN207952637U (en) * | 2018-01-17 | 2018-10-12 | 北京金物科技发展有限公司 | A kind of integrated apparatus of sensing heating and radio frequency plasma combined atomizing nozzle |
| CN209843655U (en) * | 2019-04-17 | 2019-12-24 | 大连民族大学 | Radio frequency coil for eliminating inductively coupled plasma mass spectrometer tube and secondary discharge |
-
2022
- 2022-03-29 CN CN202210324761.7A patent/CN114727464B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09306695A (en) * | 1996-05-17 | 1997-11-28 | Komatsu Ltd | Plasma generating device and surface processing device using it |
| CN202231940U (en) * | 2011-08-30 | 2012-05-23 | 中芯国际集成电路制造(上海)有限公司 | Plasma reactor capable of improving uniformity of plasma reaction |
| CN103811262A (en) * | 2012-11-14 | 2014-05-21 | 东京毅力科创株式会社 | Inductive coupled plasma processing apparatus |
| JP5638727B1 (en) * | 2014-03-31 | 2014-12-10 | Ｓｐｐテクノロジーズ株式会社 | Plasma processing apparatus and coil used in the same |
| CN110277293A (en) * | 2018-02-05 | 2019-09-24 | 朗姆研究公司 | Taper top electrode for uniformity controlling in corona treatment |
| CN109371479A (en) * | 2018-12-21 | 2019-02-22 | 青岛科技大学 | A kind of solution melt cospinning multi-nozzle electrospinning integrating device |
| CN112572803A (en) * | 2020-12-22 | 2021-03-30 | 苏州极目机器人科技有限公司 | Aviation electrostatic spraying device and system |
Non-Patent Citations (1)
| Title |
|---|
| 小流量双边平面感应电磁泵的设计及试验研究;宋德宽等;《产业与科技论坛》(第10期);全文 * |
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