CN209843655U - Radio frequency coil for eliminating inductively coupled plasma mass spectrometer tube and secondary discharge - Google Patents
Radio frequency coil for eliminating inductively coupled plasma mass spectrometer tube and secondary discharge Download PDFInfo
- Publication number
- CN209843655U CN209843655U CN201920522260.3U CN201920522260U CN209843655U CN 209843655 U CN209843655 U CN 209843655U CN 201920522260 U CN201920522260 U CN 201920522260U CN 209843655 U CN209843655 U CN 209843655U
- Authority
- CN
- China
- Prior art keywords
- radio frequency
- tube
- plasma
- frequency coil
- coil
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Fee Related
Links
Landscapes
- Plasma Technology (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
Abstract
A radio frequency coil for eliminating inductively coupled plasma mass spectrometry tube and secondary discharge belongs to the technical field of plasma. The utility model relates to a coaxial setting of radio frequency coil is outside the plasma square tube of constituteing by inner tube, well pipe and outer tube, and with plasma square tube contactless, plasma square tube bottom is equipped with the sample awl, does not connect between sample awl and the plasma square tube bottom, and radio frequency coil is cavity anaerobic copper pipe, inscription circulating water, and the radio frequency coil both ends are equipped with binding post, and binding post passes through the ground connection sheetmetal with the sample awl and is connected. The utility model discloses a to radio frequency coil's transformation, reduce or even eliminate the secondary discharge phenomenon that induced potential brought in the plasma torch pipe, greatly reduced manufacturing cost and use cost.
Description
Technical Field
The utility model belongs to the technical field of plasma, concretely relates to eliminate inductively coupled plasma mass spectrometry pipe and secondary discharge's radio frequency coil.
Background
Inductively Coupled Plasma Mass Spectrometry (ICP-MS) is a trace element analysis technology developed in the 80 th 20 th century, can measure most elements in the periodic table of elements, has the characteristics of extremely low detection limit, extremely wide dynamic linear range, simple spectral line, less interference, high precision, high analysis speed, capability of providing isotope analysis and the like, and is applied to the environmental field (drinking water, seawater, environmental water resource food, health and epidemic prevention, commodity inspection and the like); material analysis (high purity metals, high purity reagents, ultra trace impurities of Si wafers, photoresists, etc.); medical and physiological analysis (medical research on hair, whole blood, serum, urine, biological tissue, and the like, particularly, measurement of total blood lead); the nuclear industry field (analysis of radioactive isotopes of nuclear fuel, pollution analysis of primary cooling water, and the like) and other fields such as chemical industry, petrochemical industry, geology, and the like are widely used.
Inductively Coupled Plasma (ICP) is a key component in ICP-MS, and is formed by the combined action of a high-frequency generator (high-frequency current flows through a coil, usually in a short-wave radio frequency band, 2-200 MHz), an induction coil, a plasma rectangular tube and a working gas, and is an important light source in spectral analysis, such as an Inductively Coupled plasma atomic Emission Spectrometer (ICP-AES) Inductively Coupled plasma Emission Spectrometer (ICP-OES), etc., by ionizing the working gas (usually Ar) flowing through the plasma rectangular tube to generate a flame-shaped plasma by using a high-frequency induction heating principle. The charged particles (electrons and ions) generated by spark ignition are subjected to reciprocating acceleration under the action of an axially distributed high-frequency electromagnetic field and collide with gas in a plasma rectangular tube for multiple times, so that lenz-Joule heating is caused, the energy of the high-frequency electromagnetic field is absorbed, the gas flowing through the plasma rectangular tube is excited and ionized, when the charged particles in the gas are so much as to enable the gas to have enough conductivity, a closed circular current perpendicular to the axis of the plasma rectangular tube is formed in the plasma rectangular tube, the circular current has high strength, and the gas in the plasma rectangular tube is instantly formed into a stable flame-shaped plasma (plasma torch) with the temperature being higher than thousands of degrees, so that elements in a sample in carrier gas are evaporated, atomized, excited and ionized.
Unlike the application in spectral analysis, in ICP-MS, the interface between ICP and mass MS is often subject to interference from secondary discharges. Working gas in the plasma torch, including plasma gas and auxiliary gas (usually argon gas) and carrier gas carrying samples, is ionized by the high-frequency electric field formed by the induction coil, the generated ionization and ions are continuously subjected to the action of the high-frequency electric field in the high-frequency electric field, and are induced by electric field coupling to form voltages of tens to hundreds of volts, when the plasma with voltage bombards a Sample cone (at ground potential, Sample cone) positioned at a vacuum interface of the mass spectrometer, discharge (called Secondary discharge) is formed, the Secondary discharge can seriously affect the energy distribution of the generated ions, not only can bring serious interference to qualitative and quantitative analysis of elements, but also can seriously damage the interface of the Sample cone and seriously shorten the service life of the Sample cone, therefore, in various commercial ICP-MS instrument devices, respective patent technologies are adopted to reduce or eliminate the Secondary discharge process, for example, ICP-MS of Agilent (Agilent) adopts a shielding distance technology, namely a grounded high-temperature-resistant metal shielding cover is additionally arranged between an induction coil and a plasma rectangular tube to reduce the induced voltage of a plasma torch so as to reduce or eliminate the secondary discharge phenomenon, the metal shielding cover is commonly used in a radio frequency field with the frequency of 27.15MHz, but for a high-frequency electric field with the frequency of more than 40MHz, the metal shielding cover can reduce the coupling efficiency of the radio frequency electric field; PerkinElmer and ThermoFisher adopt a technology of eliminating cone secondary arc discharge by virtual grounding and without additional dependence on external physical grounding, use two-path balanced radio frequency design technology, and need to modify a radio frequency power supply; techniques of grounding the induction coil are also adopted, but the radio frequency power supply needs to be modified.
In summary, the problem of secondary discharge between the ICP and mass MS interfaces is a common problem in ICP-MS. In the prior art, the structure between an induction coil and a plasma rectangular tube needs to be modified, or a radio frequency power supply needs to be modified to use two-path balanced radio frequency design and the like.
Theoretical analysis and experimental analysis show that the generation and the level of the induced voltage of the plasma torch are mainly caused by the low coupling efficiency between the radio frequency electric field of the induction coil and the working gas and the electromagnetic induction of the radio frequency electric field to the plasma at the plasma torch outlet.
SUMMERY OF THE UTILITY MODEL
In order to solve the problems existing in the prior art, especially to avoid the transformation of commercial radio frequency power supply, the utility model provides an eliminate inductively coupled plasma mass spectrometry pipe and secondary discharge's radio frequency coil. On the basis of a general commercial radio frequency power supply, the induction coil is reasonably designed, so that the secondary discharge phenomenon between an ICP (inductively coupled plasma) interface and a mass spectrum MS (mass spectrometry) interface is reduced or eliminated, the service lives of the radio frequency coil and a sample cone are prolonged, and the equipment cost and the use cost are reduced.
The utility model provides a device that technical problem adopted includes following part: the device comprises an inner tube, a middle tube, an outer tube, a radio frequency coil, a wiring terminal A, a wiring terminal B, a grounding metal sheet and a sample cone. The plasma torch comprises an inner tube, a middle tube, an outer tube, a middle tube end part and a plasma rectangular tube. The plasma rectangular tube is close to the bottom end and is coaxially provided with a radio frequency coil, the diameter of the radio frequency coil is larger than the outer diameter of the plasma rectangular tube, the radio frequency coil and the plasma rectangular tube are not in contact, a wiring terminal A and a wiring terminal B are arranged at two ends of the radio frequency coil, and the wiring terminal A and the wiring terminal B are connected with a radio frequency power supply. Plasma square tube bottom opening contactless sets up the sample awl, is atmospheric environment between sample awl and the plasma square tube bottom, is the rough vacuum environment of vacuum pump pumping in the sample awl, has the hole between the sample awl, even has ground connection sheetmetal between sample awl and the binding post B.
The structure of the wiring terminal A is completely the same as that of the wiring terminal B, a radio frequency metal sheet and a radio frequency wrapping part are arranged in the wiring terminal, the radio frequency wrapping part is cylindrical, the bottom end of the radio frequency metal sheet is of a rectangular sheet structure with 3/4 circles, a power hole is formed in the radio frequency metal sheet and used for being connected with a radio frequency power supply, the inner diameter of the 3/4 circle is larger than the outer diameter of the radio frequency coil, the outer diameter of the circle is the same as the inner diameter of the radio frequency wrapping part, and the radio frequency coil, the radio frequency metal sheet and the.
The plasma rectangular tube is made of quartz.
The radio frequency coil is an oxygen-free copper pipe, and circulating water is introduced into the middle of the radio frequency coil to cool the radio frequency coil.
The radio frequency metal sheet is made of copper or silver.
The grounding metal sheet is made of oxygen-free copper or silver foil, and the surface of the grounding metal sheet is plated with gold or silver.
The utility model relates to a let in the circulating water in the device during operation radio frequency coil and cool off, binding post A and binding post B insert radio frequency power supply, and inside working gas got into through the inner tube arrival plasma rectangular pipe by the inner tube air inlet, inside auxiliary gas got into respectively through well pipe and outer tube arrival plasma rectangular pipe by well pipe air inlet and outer tube air inlet, and sample awl space entering detection device detects after with gaseous collision.
The radio frequency coil is a key component in the inductively coupled plasma mass spectrum, is arranged outside the plasma torch and is coaxial with the plasma torch, and provides a necessary radio frequency electric field for generating and maintaining stable discharge of inductively coupled plasma. Electrons and ions generated by high-frequency electric spark ignition are accelerated in a reciprocating manner under the action of a radio-frequency electric field, collide with working gas and auxiliary gas (usually argon) in a plasma torch tube for many times, generate a large amount of lenz-Joule heat, form plasma flame with stable discharge, and enable a sample carried by carrier gas to be vaporized, elemental, excited and ionized through collision of high-temperature ions and electrons.
The sample cone (mass spectrometry vacuum interface, made of high temperature resistant metal) is a key interface for introducing ions in plasma flame generated by the plasma rectangular tube into the mass spectrometry vacuum environment from the atmospheric pressure environment. The sample cone faces directly into the high temperature plasma flame, needs to be cooled by cooling water, and is vacuum sealed (in electrical communication) with the mass spectrometer and is therefore typically at ground potential. The secondary discharge phenomenon often occurs between the plasma flame and the sample cone and results in a high divergence of ion energy, causing severe interference with mass spectrometry.
As mentioned above, the charged particles (ions, electrons) in the plasma flame generate an induced potential under the action of the radio frequency electric field, and a potential difference exists between the induced potential and the grounded sample cone, so that a secondary discharge phenomenon is caused. Therefore, the reduction of the induced potential of the plasma is essential to eliminate the secondary discharge. Therefore, the coupling efficiency of a high-frequency electric field generated by the radio frequency coil and plasma circumfluence is improved, the collision times and efficiency of charged particles and neutral particles in the plasma rectangular tube are improved, the electromagnetic induction potential in plasma flame at the outlet of the plasma rectangular tube can be effectively reduced, and the secondary discharge phenomenon is reduced. This requires that the high frequency electric field generated by the rf coil be confined to a small space as much as possible, which improves the coupling efficiency between the rf power supply and the rf coil and between the rf coil and the plasma circulating current.
The proper inductance value of the radio frequency coil can improve the coupling efficiency of the high-frequency electric field generated by the radio frequency coil and the plasma circulating current. In shortwave radio frequency band, 2 ~ 200MHz, radio frequency coil inductance value is in microhenry (H) magnitude, and the radio frequency coil inductance value simplification that the hollow metal tube was made calculates to be: l (μ H) ═ DN2V (D +2S)/500, wherein D is the inner diameter (in mm) of the radio frequency coil, N is the number of coil turns, and S is the total number of the radio frequency coilLength (in millimeters, mm).
In order to prevent the plasma rectangular tube and the water-cooled radio frequency coil from being cracked due to contact when the plasma rectangular tube works at high temperature, the inner diameter of the radio frequency coil is slightly larger than the outer diameter of the plasma rectangular tube, the distance between the radio frequency coil and the outer wall of the plasma rectangular tube is 1-3mm, and the rectangular tube is too hot and is easy to damage when being close to the water-cooled coil; greater than this distance is not conducive to rf field concentration.
The radio frequency coil is arranged between the outlet end of the inner tube and the outlet end of the plasma rectangular tube, the distance between the radio frequency coil and the outlet end of the inner tube is 3-10mm, and the distance between the radio frequency coil and the outlet end of the plasma rectangular tube is 3-10 mm.
For a given plasma rectangular tube, the total length and the minimum inner diameter of the radio frequency coil are determined according to the factors, each parameter of the radio frequency coil is calculated according to the formula, and a radio frequency coil manufacturing mould (comprising the inner diameter, the distance and the pipe diameter) which accords with the corresponding parameter is designed and processed. And (3) winding a hollow metal pipe (a common oxygen-free copper pipe, wherein cooling water is used for cooling the radio frequency coil in the pipe) with a proper pipe diameter on the radio frequency coil manufacturing mould for a specific number of turns.
In order to reduce the connection resistance with the radio frequency electric field (local overheating can be caused, the coupling efficiency of the radio frequency electric field is reduced), improve the oxidation resistance of the radio frequency coil and prolong the service life of the radio frequency coil, the surface of the radio frequency coil is subjected to silver plating or gold plating treatment.
And two ends of the radio frequency coil need to be connected with cooling water and connected with the output of a radio frequency power supply. In order to reduce and eliminate the induced potential of the plasma, the side of the radio frequency coil close to the outlet end of the plasma rectangular tube is in good contact with the sample cone by a wider metal sheet with good conductivity. Meanwhile, the radio frequency coil is connected with the output of the radio frequency power supply in a cladding structure, and the two ends of the radio frequency coil are clad with semicircular metal sheets (copper or silver sheets) with good conductivity, inserted into a semi-closed wiring terminal with a slightly larger diameter of a through hole and fastened by screws, so that the radio frequency coil is in large-area close contact with the output of the radio frequency power supply.
The utility model has the advantages that:
the utility model discloses a to radio frequency coil's transformation, reduce or even eliminate the secondary discharge phenomenon that induced potential brought in the plasma torch pipe, greatly reduced manufacturing cost and use cost.
Drawings
Fig. 1 is a schematic structural diagram of the present invention.
Fig. 2 is a schematic structural view of the connection terminal.
Fig. 3 is a schematic diagram of an rf metal plate in a terminal.
Fig. 4 is a schematic diagram of an rf-encapsulated portion of a wire terminal.
Figure 5 is a schematic diagram of a radio frequency coil.
Fig. 1 shows an inner tube inlet, 2 shows a middle tube inlet, 3 shows an outer tube inlet, 4 shows a radio frequency coil, 5 shows a terminal a, 6 shows a terminal B, 7 shows a cooling water inlet, 8 shows a cooling water outlet, 9 shows a sample cone, 10 shows a ground metal sheet, 11 shows an inner tube, 12 shows a middle tube, 13 shows an outer tube, 101 shows a radio frequency metal sheet, 102 shows a radio frequency wrapping portion, and 103 shows a power supply hole.
Detailed Description
The present invention will be further described with reference to the following examples.
Example 1
The utility model discloses 11 tops of inner tube are equipped with inner tube air inlet 1, and well pipe 12 and outer tube 13 are close to the top and are equipped with well pipe air inlet 12 and outer tube air inlet 13, and the three forms the different sleeve pipe in top position, and this sleeve pipe is named as plasma quarter bend. The plasma rectangular tube is close to the coaxial radio frequency coil 4 that sets up of bottom, and the diameter of radio frequency coil 4 is greater than plasma rectangular tube external diameter, and both contactless, 4 both ends of radio frequency coil are equipped with binding post A5 and binding post B6, and binding post A5 and binding post B6 are connected radio frequency power supply. The bottom end of the plasma rectangular tube is not contacted with a sample cone 9, a rough vacuum environment pumped by a vacuum pump is arranged in the sample cone 9, a hole is formed between the sample cones 9, and a grounding metal sheet 10 is connected between the sample cones 9 and a wiring terminal B6.
Example 2
The utility model relates to a let in the circulating water in the device during operation radio frequency coil and cool off, binding post A5 and binding post B6 insert radio frequency power supply, and inside working gas got into through inner tube 11 arrival plasma rectangular tube by inner tube air inlet 1, inside auxiliary gas got into respectively through well pipe 12 and outer tube 13 arrival plasma rectangular tube by well pipe air inlet 2 and outer tube air inlet 3, and the sample got into detection device through sample awl 9 spaces after colliding with gas and detects.
Example 3
Will the utility model be used for optimize ICP-MS operating condition. Use the utility model discloses when the plasma that the preparation radio frequency coil formed when radio frequency power is 800W was exported to the sample awl from plasma rectangular tube and is sprayed, can form stable plasma efflux, and do not produce or do not have obvious secondary discharge phenomenon. Wherein:
plasma rectangular tube parameters; the total length is 138 mm; the outer diameter of the outer pipe is 19.6 mm; the outer diameter of the middle pipe is 9.5mm, the inner diameter of the inner pipe is 1.0mm, and the distance from the outlet of the inner pipe to the outlet of the plasma rectangular pipe is 23.5 mm;
a gas parameter; the plasma gas of the outer tube is argon gas, and the flow rate is 15L/min; the auxiliary gas of the middle pipe is argon, and the flow rate is 1.5L/min; the inner tube carrier gas is argon or nitrogen, and the flow rate is 0.5L/min;
radio frequency coil parameters: the outer diameter is 3mm, and the inner diameter is 2.2 mm. Determining the parameters of the radio frequency coil according to the parameters of the plasma rectangular tube and a calculation formula: the inner diameter is 23.3mm, 3 circles and the total length is 14.8 mm; the distance between the grounding end of the radio frequency coil and the outlet of the plasma rectangular tube is 8-12 mm; the distance between the grounding end of the radio frequency coil and the outlet of the inner tube of the plasma rectangular tube is 2-4 mm;
radio frequency power supply parameters: the working frequency is 27.12MHz, and the radio frequency power provided for the radio frequency coil is 1-2000W.
Opening of a sample cone: 0.5mm, made of stainless steel, with a cone angle of 120 degrees.
Comparative example
The plasma generated by the radio frequency coil which is not manufactured according to the utility model has obvious secondary discharge phenomenon when being sprayed to the sample cone from the plasma rectangular tube. The parameters of the plasma rectangular tube, the gas parameters, the radio frequency power supply parameters, the sample cone opening and the like are the same as the working parameters of the embodiment 3, but the parameters are different from the radio frequency coil parameters. The radio frequency coil is also 3 circles, but the total length and the inner diameter parameter deviate from the formula to calculate results greatly, the inner diameter of the radio frequency coil parameter is 26mm, and the total length is 24 mm; the distance between the grounding end of the radio frequency coil and the outlet of the inner tube of the plasma rectangular tube is 2-4 mm;
the above description is only the specific implementation manner of the preferred embodiment of the present invention, but the protection scope of the present invention is not limited thereto, and any person skilled in the art can substitute or change the technical solution of the present invention and the design of the present invention within the technical scope of the present invention.
Claims (9)
1. A radio frequency coil for eliminating secondary discharge of an inductively coupled plasma mass spectrometer is characterized in that two ends of the radio frequency coil are provided with a wiring terminal A (5) and a wiring terminal B (6); be equipped with radio frequency sheetmetal (101) and radio frequency parcel portion (102) in binding post A (5), radio frequency parcel portion (102) are cylindricly, radio frequency sheetmetal (101) are 3/4 circular rectangle sheet structure for the bottom, be equipped with power supply hole (103) on radio frequency sheetmetal (101) and be used for connecting radio frequency power supply, this 3/4 circular internal diameter is greater than radio frequency coil (4) external diameter, this circle external diameter is the same with radio frequency parcel portion (102) internal diameter, radio frequency coil (4), radio frequency sheetmetal (101) and radio frequency parcel portion (102) three pass through screwed connection together.
2. The RF coil for eliminating secondary discharge of an inductively coupled plasma mass spectrometer tube as claimed in claim 1, wherein terminal A (5) and terminal B (6) are identical in structure.
3. The radio frequency coil for eliminating the secondary discharge of the inductively coupled plasma mass spectrometer tube according to claim 1, wherein the radio frequency coil (4) is an oxygen-free copper tube.
4. The RF coil for eliminating secondary discharge of an inductively coupled plasma mass spectrometer tube as claimed in claim 1, wherein the RF metal sheet (101) is made of copper or silver.
5. An inductively coupled plasma mass spectrometer tube, comprising: the device comprises a plasma rectangular tube, a radio frequency coil (4), a connecting terminal A (5), a connecting terminal B (6), a grounding metal sheet (10) and a sample cone (9); a radio frequency coil (4) is coaxially arranged near the bottom end of the plasma rectangular tube, the diameter of the radio frequency coil (4) is larger than the outer diameter of the plasma rectangular tube, the radio frequency coil and the radio frequency coil are not in contact, a wiring terminal A (5) and a wiring terminal B (6) are arranged at two ends of the radio frequency coil (4), and the wiring terminal A (5) and the wiring terminal B (6) are connected with a radio frequency power supply; plasma square tube bottom opening sets up the sample awl, is atmospheric environment between sample awl (9) and the plasma square tube bottom, and the thick vacuum environment of vacuum pump evacuation in sample awl (9) has the hole between sample awl (9), even has ground connection sheetmetal (10) between sample awl (9) and binding post B (6).
6. The tube of claim 5, wherein the plasma torch comprises an inner tube (11), a middle tube (12), and an outer tube (13); wherein inner tube (11) top is equipped with inner tube air inlet (1), well pipe (12) and outer tube (13) are close to the top and are equipped with well pipe air inlet (2) and outer tube air inlet (3), inner tube (11) diameter < well pipe (12) diameter < outer tube (13) diameter, inner tube (11), well pipe (12) and outer tube (13) set up for coaxial center, well pipe (12) cover is in inner tube (11) outside, outer tube (13) cover is in well pipe (12) outside, inner tube (11) tip salient in well pipe (12) tip, well pipe (12) tip salient in outer tube (13) tip.
7. The ICP mass spectrometer tube of claim 5, wherein the plasma torch is made of quartz.
8. The ICP MS of claim 5, wherein said grounding plate (10) is made of oxygen-free copper or silver foil, and is plated with gold or silver on its surface.
9. The mass spectrometer tube for eliminating the inductively coupled plasma according to claim 5, wherein the RF coil (4) is disposed between the outlet end of the inner tube (11) and the outlet end of the plasma torch, the distance between the RF coil (4) and the outer wall of the plasma torch is 1-3mm, the distance between the RF coil (4) and the outlet end of the inner tube (11) is 3-10mm, and the distance between the RF coil (4) and the outlet end of the plasma torch is 3-10 mm.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920522260.3U CN209843655U (en) | 2019-04-17 | 2019-04-17 | Radio frequency coil for eliminating inductively coupled plasma mass spectrometer tube and secondary discharge |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201920522260.3U CN209843655U (en) | 2019-04-17 | 2019-04-17 | Radio frequency coil for eliminating inductively coupled plasma mass spectrometer tube and secondary discharge |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN209843655U true CN209843655U (en) | 2019-12-24 |
Family
ID=68911912
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201920522260.3U Expired - Fee Related CN209843655U (en) | 2019-04-17 | 2019-04-17 | Radio frequency coil for eliminating inductively coupled plasma mass spectrometer tube and secondary discharge |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN209843655U (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109950124A (en) * | 2019-04-17 | 2019-06-28 | 大连民族大学 | A kind of radio-frequency coil for eliminating inductivity coupled plasma mass spectrometry secondary discharge |
| CN110519904A (en) * | 2019-08-16 | 2019-11-29 | 中国地质大学（武汉） | A kind of ICP plasma source formation device and method based on collection chinaware |
| CN114727464A (en) * | 2022-03-29 | 2022-07-08 | 电子科技大学 | Method for prolonging service life of plasma spheroidization radio frequency torch and radio frequency torch |
| CN109950124B (en) * | 2019-04-17 | 2024-05-31 | 大连民族大学 | Radio frequency coil for eliminating secondary discharge of inductively coupled plasma mass spectrum |
-
2019
- 2019-04-17 CN CN201920522260.3U patent/CN209843655U/en not_active Expired - Fee Related
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109950124A (en) * | 2019-04-17 | 2019-06-28 | 大连民族大学 | A kind of radio-frequency coil for eliminating inductivity coupled plasma mass spectrometry secondary discharge |
| CN109950124B (en) * | 2019-04-17 | 2024-05-31 | 大连民族大学 | Radio frequency coil for eliminating secondary discharge of inductively coupled plasma mass spectrum |
| CN110519904A (en) * | 2019-08-16 | 2019-11-29 | 中国地质大学（武汉） | A kind of ICP plasma source formation device and method based on collection chinaware |
| CN114727464A (en) * | 2022-03-29 | 2022-07-08 | 电子科技大学 | Method for prolonging service life of plasma spheroidization radio frequency torch and radio frequency torch |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| KR100906836B1 (en) | Microwave plasma nozzle with enhanced plume stability and heating efficiency, plasma generating system and method thereof | |
| Jankowski et al. | Microwave induced plasma analytical spectrometry | |
| CN209843655U (en) | Radio frequency coil for eliminating inductively coupled plasma mass spectrometer tube and secondary discharge | |
| JPH02215038A (en) | Device for analyzing trace element using microwave plasma | |
| JP2009510670A (en) | Induction device for plasma generation | |
| TWI494031B (en) | High frequency antenna unit and plasma processing device | |
| AU2011248185B2 (en) | Oxidation resistant induction devices | |
| CN107195527B (en) | Hydrogen molecular ion ratio system and its method in a kind of raising ecr ion source | |
| Abdallah et al. | An assessment of an atmospheric pressure helium microwave plasma produced by a surfatron as an excitation source in atomic emission spectroscopy | |
| CN102263004B (en) | Inductively coupled plasma ion source gas protection device | |
| CN109979794A (en) | A kind of radio frequency induction coupled plasma averager | |
| EP3449699B1 (en) | Method of use of a microwave electromagnetic field shaping adapter, which heats a toroidal plasma discharge | |
| Zhang et al. | Practical 2.45-GHz microwave-driven Cs-free H− ion source developed at Peking University | |
| CN109950124B (en) | Radio frequency coil for eliminating secondary discharge of inductively coupled plasma mass spectrum | |
| CN112888132A (en) | Tandem type double-coil radio frequency driving gas discharge device | |
| CN111526653A (en) | Microwave coupling plasma generating device with electromagnetic energy dual excitation function | |
| CN109950124A (en) | A kind of radio-frequency coil for eliminating inductivity coupled plasma mass spectrometry secondary discharge | |
| CN104602437B (en) | A kind of energy field generating means and its control method | |
| CN110519904B (en) | ICP plasma source forming device and method based on magnetic collector | |
| CN108398414B (en) | Microwave coupling plasma excitation light source | |
| CN203690253U (en) | Inductively coupled plasma source | |
| Shimabukuro et al. | Microwave excitation of a low-energy atomic hydrogen | |
| CN209055461U (en) | A kind of microwave coupling plasma exciatiaon light source | |
| CN204389024U (en) | A kind of energy field generating means and detector thereof | |
| CN220306209U (en) | Tubular radio frequency vacuum ionization device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20191224 Termination date: 20210417 |