CN114701815B - Guide rail structure and chip testing machine - Google Patents
Guide rail structure and chip testing machine Download PDFInfo
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- CN114701815B CN114701815B CN202210424643.3A CN202210424643A CN114701815B CN 114701815 B CN114701815 B CN 114701815B CN 202210424643 A CN202210424643 A CN 202210424643A CN 114701815 B CN114701815 B CN 114701815B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B65—CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
- B65G—TRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
- B65G35/00—Mechanical conveyors not otherwise provided for
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B66—HOISTING; LIFTING; HAULING
- B66F—HOISTING, LIFTING, HAULING OR PUSHING, NOT OTHERWISE PROVIDED FOR, e.g. DEVICES WHICH APPLY A LIFTING OR PUSHING FORCE DIRECTLY TO THE SURFACE OF A LOAD
- B66F7/00—Lifting frames, e.g. for lifting vehicles; Platform lifts
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- Life Sciences & Earth Sciences (AREA)
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Abstract
The invention provides a guide rail structure and a chip testing machine, which belong to the technical field of movable guide rails, and the guide rail structure comprises: a mounting platform; a first substrate; a second substrate; the sliding direction of the first substrate and the sliding direction of the second substrate are perpendicular to the sliding direction of the third substrate in pairs; a first driving mechanism; a second driving mechanism; and a third driving mechanism. According to the guide rail structure provided by the invention, the mounting part is extended out of the third substrate, and the mounting part is driven by the first driving mechanism, the second driving mechanism and the third driving mechanism to move back and forth, left and right, up and down by the reciprocating sliding of the three substrates, so that the alignment part is driven to move back and forth, left and right, up and down, the position of the chip is corrected in the moving process of the alignment part, and the adjustment of the displacement of the alignment part in three directions is facilitated, so that the position and the angle of the chip are adjusted.
Description
Technical Field
The invention relates to the technical field of movable guide rails, in particular to a guide rail structure and a chip testing machine.
Background
Integrated circuits (Integrated Circuit, ICs), also known as microchips, wafers, or chips, are a means of miniaturizing circuits (including semiconductor devices, also including passive components, etc.) and are often manufactured on semiconductor wafer surfaces.
With the development of the semiconductor industry, the thinner the thickness of the integrated circuit chip is, the higher the processing and detection precision of the chip is. For the chip size manufactured by manufacturers to be most common in a rectangular shape, the existing chip needs to be detected through a detection mechanism after processing is finished so as to ensure that the quality and performance of the chip are qualified, the existing detection means generally adopt a suction nozzle to place the chip on a carrying platform for detection, at present, a camera is adopted for visual positioning, the suction nozzle is used for grabbing the chip to shift in the XY direction, and the chip is placed on a test platform, but when the chip is placed on the test platform, certain displacement and angle deflection can be mostly generated, so that the prior art provides a positioning piece, the position and the angle of the chip are adjusted through the movement of the positioning piece, and the positioning piece needs to be driven in three directions when moving.
Disclosure of Invention
Therefore, the invention provides the guide rail structure and the chip testing machine which are convenient for driving the alignment piece to move.
In order to solve the above technical problems, the present invention provides a guide rail structure, including:
a mounting platform;
the first base plate is slidably mounted on the mounting platform;
a second substrate slidably mounted on the first substrate;
the third base plate is slidably mounted on the second base plate, a mounting part suitable for mounting the alignment piece extends out of the third base plate, and the sliding direction of the first base plate and the sliding direction of the second base plate are perpendicular to the sliding direction of the third base plate in pairs;
the first driving mechanism is arranged on the first substrate, the driving end of the first driving mechanism is connected with the mounting platform, and the first driving mechanism is suitable for driving the first substrate to slide back and forth relative to the mounting platform;
the second driving mechanism is arranged on the second substrate, the driving end of the second driving mechanism is connected with the first substrate, and the second driving mechanism is suitable for driving the second substrate to slide back and forth relative to the first substrate;
the third driving mechanism is arranged on the third base plate, the driving end of the third driving mechanism is connected with the first base plate, and the second driving mechanism is suitable for driving the third base plate to slide back and forth relative to the second base plate.
Optionally, the second substrate is provided with a mounting plate, and a plane where the mounting plate is located is perpendicular to the sliding direction of the second substrate;
the third base plate is slidably mounted on the mounting plate.
Optionally, the first driving mechanism includes a first motor, a first driving wheel, a first fixed wheel and a first elastic element, the first motor is installed on the first substrate, the driving end of the first motor is installed with the first driving wheel, the first fixed wheel is rotationally installed on a first supporting rod on the installation platform, and the first driving wheel is abutted with the first fixed wheel;
the first driving wheel is of a cam structure;
the first elastic piece is connected between the first base plate and the mounting platform and has a biasing force enabling the first moving wheel to be abutted with the first fixed wheel.
Optionally, a first concave portion is formed on one side of the protruding end of the first wheel, and the radius of the circumferential portion between the first concave portion and the other side of the protruding end is gradually increased.
Optionally, the second driving mechanism includes a second motor, a second driving wheel, a second fixed wheel, and a second elastic member, where the second motor is installed on the second substrate, the driving end of the second motor is installed with the second driving wheel, the second fixed wheel is rotatably installed on a second supporting rod on the first substrate, and the second driving wheel is abutted with the second fixed wheel;
the second driving wheel is of a cam structure;
the second elastic piece is connected between the second base plate and the first base plate and has a biasing force enabling the second moving wheel to be in abutting contact with the second fixed wheel.
Optionally, a second concave portion is formed on one side of the protruding end of the second driving wheel, and a radius of a circumferential portion between the second concave portion and the other side of the protruding end of the second driving wheel is gradually increased.
Optionally, the third driving mechanism includes a third motor, a third wheel, a third fixed wheel, and a third elastic element, where the third motor is mounted on the third substrate, the driving end of the third motor is mounted with the third wheel, the third fixed wheel is mounted on the mounting plate, the driving end of the third motor is mounted with the third wheel, the third fixed wheel is mounted on a third support rod on the third substrate, and the third wheel is abutted with the third fixed wheel;
the third driving wheel is of a cam structure;
the third elastic piece is connected between the third base plate and the mounting plate, and has a biasing force enabling the third moving wheel to be in abutting contact with the third fixed wheel.
Optionally, a third recess is formed on one side of the third pulley protruding end, and a radius of a circumferential portion between the third recess and the other side of the third pulley protruding end is gradually increased.
Optionally, at least one first guide rail is arranged on the mounting platform, a first sliding block is arranged on the first substrate, and the first substrate is slidably mounted on the first guide rail through the first sliding block;
the first substrate is provided with at least one second guide rail, the second substrate is provided with a second sliding block, and the second substrate is slidably arranged on the second guide rail through the second sliding block;
the mounting plate is provided with at least one third guide rail, the third base plate is provided with a third sliding block, and the third base plate is slidably mounted on the third guide rail through the third sliding block.
The chip tester comprises the guide rail structure.
The technical scheme of the invention has the following advantages:
1. the guide rail structure comprises a mounting platform, a first substrate, a second substrate and a third substrate, wherein the first substrate can slide relative to the mounting platform, the second substrate can slide relative to the first substrate, the third substrate can slide relative to the second substrate, the sliding direction of the first substrate, the sliding direction of the second substrate and the sliding direction of the third substrate are perpendicular to each other, a mounting part extends out of the third substrate, and the mounting part is driven by a first driving mechanism, a second driving mechanism and a third driving mechanism to move back and forth, left and right, up and down, so as to drive a positioning piece to move back and forth, left and right, up and down, and the position of a chip is corrected in the moving process of the positioning piece, so that the position and angle of the chip are adjusted.
2. The first driving mechanism comprises a first motor, a first driving wheel, a first fixed wheel and a first elastic piece, wherein the first driving wheel is of a cam structure and is in butt joint with the first fixed wheel, when the first motor drives the first driving wheel to rotate, the first fixed wheel is always in butt joint with the circumference of the first driving wheel in the rotation process of the first driving wheel due to the radius change of the first driving wheel, the first driving wheel drives the first substrate to move, and the first elastic piece is connected between the first substrate and the mounting platform, so that the first driving wheel is always attached to the first fixed wheel, and the first driving wheel is prevented from being separated from the first fixed wheel when the first driving wheel rotates to the circumference surface with a smaller radius.
3. According to the guide rail structure provided by the invention, the first concave part is formed at one side of the protruding end of the first driving wheel, the radius of the circumferential part between the first concave part and the other side of the protruding end is gradually increased, the first concave part can prevent the first driving wheel from rotating at an excessive angle, so that the first fixing wheel can only contact the circumferential part between the first concave part and the other side of the protruding end, the first driving wheel can reciprocate in the range, the gradually increased radius enables the circle center distance between the first driving wheel and the first fixing wheel to change more smoothly, and further the sliding of the first substrate on the mounting platform is more accurate and smooth, and the chip is prevented from being damaged by the alignment part. Meanwhile, abrupt switching between the farthest point and the closest point between the driving wheel and the fixed wheel can be avoided, and stability in the sliding process of the substrate is ensured.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings that are needed in the description of the embodiments or the prior art will be briefly described, and it is obvious that the drawings in the description below are some embodiments of the present invention, and other drawings can be obtained according to the drawings without inventive effort for a person skilled in the art.
Fig. 1 is a first angular structure schematic diagram of a guide rail structure provided in embodiment 1 of the present invention;
fig. 2 is a second angular structure schematic diagram of the guide rail structure provided in embodiment 1 of the present invention;
fig. 3 is a schematic view illustrating a first angle connection between a mounting platform and a first substrate according to embodiment 1 of the present invention;
fig. 4 is a schematic diagram illustrating a second angle connection between the mounting platform and the first substrate according to embodiment 1 of the present invention;
fig. 5 is a bottom view of a second substrate according to embodiment 1 of the present invention.
Reference numerals illustrate:
1. a mounting platform; 2. a first substrate; 3. a second substrate; 4. a third substrate; 5. a mounting plate; 6. a mounting part; 7. a first motor; 8. a second motor; 9. a third motor; 10. a first guide rail; 11. a second guide rail; 12. a third guide rail; 13. a first slider; 14. a second slider; 15. a third slider; 16. a first wheel; 17. a first fixed wheel; 18. a first strut; 19. a first fixing rod; 21. a first elastic member; 22. a second fixing rod; 23. a second elastic member; 24. a third elastic member; 25. a third wheel; 26. a third strut; 27. a third fixed wheel; 28. a second concave portion; 29. a second wheel; 30. a second fixed wheel; 31. and a second support rod.
Detailed Description
The following description of the embodiments of the present invention will be made apparent and fully in view of the accompanying drawings, in which some, but not all embodiments of the invention are shown. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
In the description of the present invention, it should be noted that the directions or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the directions or positional relationships shown in the drawings, are merely for convenience of describing the present invention and simplifying the description, and do not indicate or imply that the devices or elements referred to must have a specific orientation, be configured and operated in a specific orientation, and thus should not be construed as limiting the present invention. Furthermore, the terms "first," "second," "third," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
In the description of the present invention, it should be noted that, unless explicitly specified and limited otherwise, the terms "mounted," "connected," and "connected" are to be construed broadly, and may be either fixedly connected, detachably connected, or integrally connected, for example; can be mechanically or electrically connected; can be directly connected or indirectly connected through an intermediate medium, and can be communication between two elements. The specific meaning of the above terms in the present invention will be understood in specific cases by those of ordinary skill in the art.
In addition, the technical features of the different embodiments of the present invention described below may be combined with each other as long as they do not collide with each other.
Example 1
The present embodiment provides a specific embodiment of a guide rail structure, as shown in fig. 1 and 2, including a mounting platform 1, a first substrate 2, a second substrate 3, and a third substrate 4, where the first substrate 2 is slidably mounted on the mounting platform 1, the second substrate 3 is slidably mounted on the first substrate 2, the third substrate 4 is slidably mounted on the second substrate 3, a mounting portion 6 adapted to mount an alignment member extends on the third substrate 4, and the sliding direction of the first substrate 2, the sliding direction of the second substrate 3, and the sliding direction of the third substrate 4 are perpendicular to each other. The first substrate 2 is provided with a first driving mechanism, and the driving end of the first driving mechanism is connected with the mounting platform 1; the second substrate 3 is provided with a second driving mechanism, and the driving end of the second driving mechanism is connected with the first substrate 2; the third base plate 4 is provided with a third driving mechanism, and the driving end of the third driving mechanism is connected with the second base plate 3. Under the drive of the first driving mechanism, the second driving mechanism and the third driving mechanism, the reciprocating sliding of the three substrates realizes the front, back, left, right, up and down movement of the mounting part 6 so as to drive the alignment part to move front, back, left, right, up and down, and the position of the chip is corrected in the movement process of the alignment part, so that the alignment part can be conveniently adjusted to displace in three directions, and the position and the angle of the chip are adjusted.
Specifically, the second substrate 3 is provided with a mounting plate 5, a plane where the mounting plate 5 is located is perpendicular to the sliding direction of the second substrate 3, the third substrate 4 is slidably mounted on the mounting plate 5, and the driving end of the third driving mechanism is connected with the mounting plate 5 so as to realize two-by-two perpendicularity of three sliding directions.
As an alternative embodiment, the driving direction of the third driving mechanism may be changed, and thus the sliding direction of the third substrate 4 may be changed, for example, by changing the driving direction through a gear structure, so as to achieve that three sliding directions are perpendicular to each other.
The mounting platform 1 is extended with a first supporting rod 18, and a first fixed wheel 17 is rotatably mounted on the first supporting rod 18; the first base plate 2 is extended with a second supporting rod 31, and the second fixed wheel 30 is rotatably arranged on the second supporting rod 31; a third strut 26 extends from the mounting plate 5, and a third fixed wheel 27 is rotatably mounted on the third strut 26.
In this embodiment, the first driving mechanism includes the first motor 7, the first driving wheel 16, the first fixed wheel 17, the first elastic member 21, the first driving wheel 16 is of a cam structure, the first driving wheel 16 is abutted against the first fixed wheel 17, when the first motor 7 drives the first driving wheel 16 to rotate, the first driving wheel 16 drives the first substrate 2 to move due to the radius change of the first driving wheel 16, the first elastic member 21 is connected between the first substrate 2 and the mounting platform 1, so that the first driving wheel 16 is always attached to the first fixed wheel 17, and the first driving wheel 16 is prevented from being separated from the first fixed wheel 17 when the first driving wheel 16 rotates to the circumferential surface with smaller radius.
Specifically, the first base plate 2 extends toward the side surface of the mounting platform 1 and has a first fixing rod 19, the mounting platform 1 extends toward the side surface of the first base plate 2 and has a second fixing rod 22, two ends of the first elastic member 21 are respectively connected to the first fixing rod 19 and the second fixing rod 22, and the first elastic member 21 has a biasing force that enables the first driving wheel 16 and the first fixing wheel 17 to keep a bonding state all the time.
In this embodiment, a first concave portion is formed on one side of the protruding end of the first wheel 16, the radius of the circumferential portion between the first concave portion and the other side of the protruding end is gradually increased, the first concave portion can prevent the rotation angle of the first wheel 16 from being too large, so that the first fixed wheel 17 can only contact the circumferential portion between the first concave portion and the other side of the protruding end, the first wheel 16 can reciprocally rotate within this range, the gradually increased radius enables the circle center distance between the first wheel 16 and the first fixed wheel 17 to change more smoothly, and further the sliding of the first substrate 2 on the mounting platform 1 is more accurate and gentle, and the chip is prevented from being damaged by the alignment element.
In this embodiment, the second driving structure includes the second motor 8, the second driving wheel 29, the second fixed wheel 30, and the second elastic member 23, the second driving wheel 29 is a cam structure, the second driving wheel 29 is abutted against the second fixed wheel 30, when the second motor 8 drives the second driving wheel 29 to rotate, the second driving wheel 29 drives the second substrate 3 to move relative to the first substrate 2 due to the radius change of the second driving wheel 29, and the second elastic member 23 is connected between the second substrate 3 and the first substrate 2, so that the second driving wheel 29 is always attached to the second fixed wheel 30, and the second driving wheel 29 is prevented from being separated from the second fixed wheel 30 when the second driving wheel 29 rotates to the circumferential surface with smaller radius.
Specifically, the second substrate 3 extends toward the side surface of the first substrate 2 to form a second fixing rod 22, the side surface of the first substrate 2 extending toward the second substrate 3 to form a third fixing rod, two ends of the second elastic member 23 are respectively connected to the second fixing rod 22 and the third fixing rod, and the second elastic member 23 has a biasing force for keeping the second driving wheel 29 and the second fixing wheel 30 in a bonded state all the time.
In this embodiment, as shown in fig. 5, a second concave portion 28 is formed on one side of the protruding end of the second driving wheel 29, the radius of the circumferential portion between the second concave portion 28 and the other side of the protruding end is gradually increased, the second concave portion 28 can prevent the second driving wheel 29 from rotating at an excessive angle, so that the second fixed wheel 30 can only contact the circumferential portion between the second concave portion 28 and the other side of the protruding end of the second driving wheel 29, the first driving wheel 16 can reciprocally rotate within this range, the gradually increased radius enables the change of the center distance between the second driving wheel 29 and the second fixed wheel 30 to be more stable, and further the sliding of the second substrate 3 on the first substrate 2 is more accurate and smooth, and the chip is prevented from being damaged by the alignment.
In this embodiment, the third driving mechanism includes the third motor 9, the third moving wheel 25, the third fixed wheel 27, and the third elastic member 24, the third moving wheel 25 is in a cam structure, the third moving wheel 25 is abutted against the third fixed wheel 27, when the third motor 9 drives the third moving wheel 25 to rotate, the third moving wheel 25 drives the third substrate 4 to move relative to the mounting plate 5 due to the radius change of the third moving wheel 25, the third elastic member 24 is connected between the third substrate 4 and the mounting plate 5, so that the third moving wheel 25 is always attached to the third fixed wheel 27, and the third moving wheel 25 is prevented from being separated from the third fixed wheel 27 when the third moving wheel 25 rotates to the circumferential surface with a smaller radius.
Specifically, the side surface of the third base plate 4 facing the mounting plate 5 extends to form a fifth fixing rod, the side surface of the mounting plate 5 facing the third base plate 4 extends to form a sixth fixing rod, two ends of the third elastic member 24 are respectively connected to the fifth fixing rod and the sixth fixing rod, and the third elastic member 24 has a biasing force for keeping the third movable wheel 25 and the third fixed wheel 27 in a bonded state all the time.
In this embodiment, a third recess is formed on one side of the protruding end of the third movable wheel 25, the radius of the circumferential portion between the first recess and the other side of the protruding end is gradually increased, the third recess can prevent the rotation angle of the third movable wheel 25 from being too large, so that the third fixed wheel 27 can only contact the circumferential portion between the third recess and the other side of the protruding end of the third movable wheel 25, the third movable wheel 25 can reciprocally rotate within this range, the gradually increased radius enables the change of the center distance between the third movable wheel 25 and the third fixed wheel 27 to be more stable, and further the sliding of the third substrate 4 on the mounting plate 5 is more accurate and gentle, and the chip is prevented from being damaged by the alignment element.
In this embodiment, the first wheel 16, the second wheel 29 and the third wheel 25 are identical in structure, as shown in fig. 5.
Specifically, the first elastic member 21, the second elastic member 23 and the third elastic member 24 are springs, and as an alternative embodiment, the elastic members may be other elastic members, such as rubber.
In this embodiment, at least one first guide rail 10, and preferably two first guide rails in this embodiment, are disposed on the mounting platform 1, and a first slider 13 is disposed on the first substrate 2, where the first slider 13 is slidably mounted on the first guide rail 10; at least one second guide rail 11, and preferably two in this embodiment, are arranged on the first base plate 2, second slide blocks 14 are arranged on the second base plate 3, and the second slide blocks 14 are slidably mounted on the second guide rails 11; at least one third guide rail 12, preferably two in this embodiment, is provided on the mounting plate 5, and a third slider 15 is provided on the third base plate 4, the third slider 15 being slidably mounted on the third guide rail 12.
Example 2
The embodiment provides a specific implementation manner of the chip testing machine, which comprises a guide rail structure in embodiment 1, wherein the guide rail structure is installed on the testing machine, and an alignment member is installed on an installation part 6 on the guide rail structure, so that the alignment member can adjust the position and the angle of a chip on a slide holder.
It is apparent that the above examples are given by way of illustration only and are not limiting of the embodiments. Other variations or modifications of the above teachings will be apparent to those of ordinary skill in the art. It is not necessary here nor is it exhaustive of all embodiments. While still being apparent from variations or modifications that may be made by those skilled in the art are within the scope of the invention.
Claims (8)
1. A guide rail structure, characterized by comprising:
a mounting platform (1);
a first base plate (2) slidably mounted on the mounting platform (1);
a second substrate (3) slidably mounted on the first substrate (2);
the third base plate (4) is slidably mounted on the second base plate (3), a mounting part (6) suitable for mounting an alignment element is extended from the third base plate (4), and the sliding direction of the first base plate (2) and the sliding direction of the second base plate (3) are perpendicular to the sliding direction of the third base plate (4) in pairs;
the first driving mechanism is arranged on the first base plate (2), the driving end of the first driving mechanism is connected with the mounting platform (1), and the first driving mechanism is suitable for driving the first base plate (2) to slide back and forth relative to the mounting platform (1);
the second driving mechanism is arranged on the second base plate (3), the driving end of the second driving mechanism is connected with the first base plate (2), and the second driving mechanism is suitable for driving the second base plate (3) to slide back and forth relative to the first base plate (2);
the third driving mechanism is arranged on the third base plate (4), the driving end of the third driving mechanism is connected with the first base plate (2), and the second driving mechanism is suitable for driving the third base plate (4) to slide back and forth relative to the second base plate (3);
the first driving mechanism comprises a first motor (7), a first fixed wheel (16), a first fixed wheel (17) and a first elastic piece (21), wherein the first motor (7) is installed on the first base plate (2), the first fixed wheel (16) is installed at the driving end of the first motor (7), the first fixed wheel (17) is rotatably installed on a first supporting rod (18) on the installation platform (1), and the first fixed wheel (16) is in butt joint with the first fixed wheel (17);
the first driving wheel (16) is of a cam structure;
the first elastic piece (21) is connected between the first base plate (2) and the mounting platform (1), and the first elastic piece (21) has a biasing force for enabling the first driving wheel (16) to be in contact with the first fixed wheel (17);
a first concave part is formed on one side of the protruding end of the first driving wheel (16), and the radius of the circumference part between the first concave part and the other side of the protruding end is gradually increased.
2. The guide rail structure according to claim 1, characterized in that the second base plate (3) is provided with a mounting plate (5), and a plane where the mounting plate (5) is located is perpendicular to the sliding direction of the second base plate (3);
the third base plate (4) is slidably mounted on the mounting plate (5).
3. The guide rail structure according to claim 1, characterized in that the second driving mechanism comprises a second motor (8), a second driving wheel (29), a second fixed wheel (30) and a second elastic member (23), the second motor (8) is mounted on the second base plate (3), the driving end of the second motor (8) is provided with the second driving wheel (29), the second fixed wheel (30) is rotatably mounted on a second supporting rod (31) on the first base plate (2), and the second driving wheel (29) is abutted with the second fixed wheel (30);
the second driving wheel (29) is of a cam structure;
the second elastic member (23) is connected between the second base plate (3) and the first base plate (2), and the second elastic member (23) has a biasing force that causes the second driving wheel (29) to abut against the second fixed wheel (30).
4. A guide rail structure according to claim 3, characterized in that one side of the protruding end of the second wheel (29) is formed with a second recess (28), the radius of the circumferential portion between the second recess (28) and the other side of the protruding end of the second wheel (29) being gradually increased.
5. The guide rail structure according to claim 2, characterized in that the third driving mechanism comprises a third motor (9), a third movable wheel (25), a third fixed wheel (27) and a third elastic member (24), the third motor (9) is mounted on the third base plate (4), the third movable wheel (25) is mounted at the driving end of the third motor (9), the third fixed wheel (27) is rotatably mounted on the mounting plate (5), the third movable wheel (25) is mounted at the driving end of the third motor (9), the third fixed wheel (27) is rotatably mounted on a third support rod (26) on the third base plate (4), and the third movable wheel (25) is abutted with the third fixed wheel (27);
the third driving wheel (25) is of a cam structure;
the third elastic member (24) is connected between the third base plate (4) and the mounting plate (5), and the third elastic member (24) has a biasing force that causes the third driving wheel (25) to abut against the third fixed wheel (27).
6. The guide rail structure according to claim 5, wherein a third recess is formed at one side of the protruding end of the third wheel (25), and a radius of a circumferential portion between the third recess and the other side of the protruding end of the third wheel (25) is gradually increased.
7. The guide rail structure according to claim 2, characterized in that at least one first guide rail (10) is provided on the mounting platform (1), a first slider (13) is provided on the first base plate (2), and the first base plate (2) is slidably mounted on the first guide rail (10) through the first slider (13);
at least one second guide rail (11) is arranged on the first base plate (2), a second sliding block (14) is arranged on the second base plate (3), and the second base plate (3) is slidably arranged on the second guide rail (11) through the second sliding block (14);
the mounting plate (5) is provided with at least one third guide rail (12), the third base plate (4) is provided with a third sliding block (15), and the third base plate (4) is slidably mounted on the third guide rail (12) through the third sliding block (15).
8. Chip tester, characterized by comprising a rail structure according to any one of claims 1-7.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
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| CN202210424643.3A CN114701815B (en) | 2022-04-21 | 2022-04-21 | Guide rail structure and chip testing machine |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210424643.3A CN114701815B (en) | 2022-04-21 | 2022-04-21 | Guide rail structure and chip testing machine |
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| Publication Number | Publication Date |
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| CN114701815A CN114701815A (en) | 2022-07-05 |
| CN114701815B true CN114701815B (en) | 2023-06-23 |
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| CN114701815A (en) | 2022-07-05 |
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