CN114636314A - Reduction furnace graphite preheater structure based on electronic-grade polycrystalline silicon production device - Google Patents
Reduction furnace graphite preheater structure based on electronic-grade polycrystalline silicon production device Download PDFInfo
- Publication number
- CN114636314A CN114636314A CN202011488752.9A CN202011488752A CN114636314A CN 114636314 A CN114636314 A CN 114636314A CN 202011488752 A CN202011488752 A CN 202011488752A CN 114636314 A CN114636314 A CN 114636314A
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- China
- Prior art keywords
- graphite
- preheater
- connecting rod
- production device
- reduction furnace
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 75
- 229910002804 graphite Inorganic materials 0.000 title claims abstract description 75
- 239000010439 graphite Substances 0.000 title claims abstract description 75
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 21
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229920005591 polysilicon Polymers 0.000 claims abstract description 10
- 229910052710 silicon Inorganic materials 0.000 abstract description 11
- 239000010703 silicon Substances 0.000 abstract description 11
- 238000000034 method Methods 0.000 abstract description 4
- 238000000746 purification Methods 0.000 abstract 1
- 238000006722 reduction reaction Methods 0.000 description 14
- 230000002159 abnormal effect Effects 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000007770 graphite material Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000004064 recycling Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27D—DETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
- F27D13/00—Apparatus for preheating charges; Arrangements for preheating charges
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
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- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Inorganic Chemistry (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Silicon Compounds (AREA)
Abstract
The invention aims to disclose a reducing furnace graphite preheater structure based on an electronic grade polycrystalline silicon production device, which comprises graphite connecting rods and a connector, wherein the graphite connecting rods are connected with each other in a conical socket mode; compared with the prior art, the connection structure of the graphite preheater is improved, the disassembly is convenient, and the removal of silicon attached to the surface is facilitated, so that the secondary purification and the reuse of the preheater are realized, and in addition, the cracked graphite preheater can be collected, purified and machined again to achieve the purpose of reusing the original length of the graphite rod of the preheater; the method meets the quality requirement of electronic grade polysilicon production, has high utilization rate and obvious energy saving and consumption reduction, and achieves the aim of the invention.
Description
Technical Field
The invention relates to an electronic grade polycrystalline silicon production device, in particular to a graphite preheater structure of a reduction furnace based on the electronic grade polycrystalline silicon production device.
Background
A large amount of graphite materials with stable chemical performance, good conductivity and high temperature resistance are used in the existing reduction furnace, a silicon core is connected with an electrode through a graphite component in the reduction furnace, the reduction furnace is mostly started in a preheating mode, the internal environment temperature of the reduction furnace is heated to the temperature at which the silicon core can be conducted by electrifying a graphite preheater in the reduction furnace, and then the silicon core is conducted by electrifying.
At present, most electronic grade polysilicon production enterprises preheat reducing furnaces by means of graphite preheaters in the reducing furnaces.
Graphite pre-heater that uses at present comprises upper and lower graphite rod and star connector, between the graphite rod from top to bottom, all adopts threaded connection between graphite and the electrode, in the actual production operation in-process, has following problem:
(1) in the process of reduction reaction of the graphite preheater in the reduction furnace, a small amount of silicon can be deposited on the surface, the threaded connection part of the upper rod and the lower rod of the preheater can not be detached again, when the reduction furnace runs for a plurality of times continuously, the thickness of silicon on the surface of the preheater is too large, and when the surface temperature of the preheater is restarted, the frequency of silicon deposition falling is large, and the frequency of abnormal shutdown of the reduction furnace is increased due to silicon scale falling.
(2) When the silicon of the preheater is excessive, the calorific capacity of the preheater is reduced, the conduction difficulty of the silicon core is higher, and the preheater can only be replaced.
(3) The cost of the preheater is high, after the preheater runs for 3-4 batches, the surface silicon is too much, the preheater needs to be replaced and cannot be reused after being dismantled, and the utilization rate of the preheater is low, so that the production cost is high.
Therefore, a graphite preheater structure for a reduction furnace based on an electronic grade polysilicon production device is particularly needed to solve the existing problems.
Disclosure of Invention
The invention aims to provide a reducing furnace graphite preheater structure based on an electronic grade polysilicon production device, which solves the problems that the reducing furnace is abnormally shut down, the heat productivity of the preheater is reduced and the conduction difficulty of a silicon core is higher due to excessive silicon bonding and falling off on the surface of the reducing furnace graphite preheater aiming at the defects of the prior art, prolongs the service cycle of the graphite preheater, improves the reuse ratio of the graphite preheater and reduces the production cost.
The technical problem solved by the invention can be realized by adopting the following technical scheme:
the graphite preheater structure is characterized by comprising graphite connecting rods and connectors, wherein the graphite connecting rods are connected with each other in a conical socket mode, and the graphite preheater and an electrode are connected with each other in a conical socket mode.
In one embodiment of the invention, the conical connection port of the graphite preheater and the electrode in a conical socket mode is matched with the conical head of the electrode.
In one embodiment of the invention, the graphite connecting rod at least comprises a graphite upper connecting rod and a graphite lower connecting rod which are connected with each other in a conical socket manner.
Furthermore, the graphite upper connecting rod and the graphite lower connecting rod of the graphite connecting rod are connected with each other in a multi-time socket mode, and the length of the graphite connecting rod is matched with that of the silicon core.
Compared with the prior art, the reducing furnace graphite preheater structure based on the electronic grade polysilicon production device is convenient to disassemble and beneficial to removing silicon attached to the surface by modifying the connecting structure of the graphite preheater, so that the preheater is purified and reused again, and in addition, the cracked graphite preheater can be collected, purified and machined again to achieve the purpose of reusing the original length of the graphite rod of the preheater; the method meets the quality requirement of electronic grade polysilicon production, has high utilization rate and obvious energy saving and consumption reduction, and achieves the aim of the invention.
The features of the present invention will be apparent from the accompanying drawings and from the detailed description of the preferred embodiments which follows.
Drawings
FIG. 1 is a schematic structural view of a graphite connecting rod of the graphite preheater structure of the present invention;
FIG. 2 is a schematic structural view of a graphite preheater structure of the present invention.
Detailed Description
In order to make the technical means, the creation characteristics, the achievement purposes and the effects of the invention easy to understand, the invention is further explained below by combining the specific drawings.
Examples
As shown in fig. 1 and 2, the structure of the graphite preheater of the reduction furnace based on the electronic grade polysilicon production device comprises graphite connecting rods and connectors, wherein the graphite connecting rods are connected with each other in a conical socket manner, and the graphite preheater and the electrode are connected with each other in a conical socket manner.
In this embodiment, the conical connection port of the conical socket manner between the graphite preheater and the electrode is matched with the conical head of the electrode.
In this embodiment, the graphite connecting rod at least includes a graphite upper connecting rod and a graphite lower connecting rod, and the graphite upper connecting rod and the graphite lower connecting rod are connected to each other in a conical socket manner.
The graphite upper connecting rod and the graphite lower connecting rod of the graphite connecting rod are connected with each other in a multi-time socket mode, and the length of the graphite connecting rod is matched with that of the silicon core.
The reducing furnace graphite preheater structure based on the electronic grade polycrystalline silicon production device meets the production requirement of electronic grade polycrystalline silicon, effectively solves the problem of abnormal shutdown of the reducing furnace caused by excessive silicon falling off on the surface of the reducing furnace graphite preheater, and simultaneously solves the problems of reduced heat productivity of the preheater and larger conduction difficulty of a silicon core caused by excessive silicon falling on the surface of the reducing furnace graphite preheater; the aim of recycling is achieved, the production cost is obviously reduced, and the generated economic benefit is obvious. The foregoing shows and describes the general principles and broad features of the present invention and advantages thereof. It will be understood by those skilled in the art that the present invention is not limited to the embodiments described above, which are merely illustrative of the principles of the present invention, but that various changes and modifications may be made without departing from the spirit and scope of the invention, which is defined by the appended claims and their equivalents.
Claims (4)
1. The graphite preheater structure is characterized by comprising graphite connecting rods and connectors, wherein the graphite connecting rods are connected with each other in a conical socket mode, and the graphite preheater and electrodes are connected with each other in a conical socket mode.
2. The reduction furnace graphite preheater structure based on the electronic grade polysilicon production device according to claim 1, wherein a tapered connection port of a tapered socket manner between the graphite preheater and the electrode is matched with a tapered head of the electrode.
3. The reduction furnace graphite preheater structure based on an electronic grade polysilicon production device according to claim 1, wherein the graphite connecting rods comprise at least an upper graphite connecting rod and a lower graphite connecting rod, and the upper graphite connecting rod and the lower graphite connecting rod are connected with each other in a conical socket manner.
4. The reduction furnace graphite preheater structure based on the electronic grade polysilicon production device as claimed in claim 3, wherein the graphite upper connecting rod and the graphite lower connecting rod of the graphite connecting rod are connected with each other in a multi-time socket-and-spigot manner, and the length of the graphite connecting rod is matched with the length of the silicon core.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011488752.9A CN114636314A (en) | 2020-12-16 | 2020-12-16 | Reduction furnace graphite preheater structure based on electronic-grade polycrystalline silicon production device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202011488752.9A CN114636314A (en) | 2020-12-16 | 2020-12-16 | Reduction furnace graphite preheater structure based on electronic-grade polycrystalline silicon production device |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN114636314A true CN114636314A (en) | 2022-06-17 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202011488752.9A Pending CN114636314A (en) | 2020-12-16 | 2020-12-16 | Reduction furnace graphite preheater structure based on electronic-grade polycrystalline silicon production device |
Country Status (1)
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|---|---|
| CN (1) | CN114636314A (en) |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1389805A (en) * | 1972-05-17 | 1975-04-09 | Dow Corning | Methods and apparatus for making elongated structures of silicon and silicon carbide |
| CN102196611A (en) * | 2010-03-19 | 2011-09-21 | 瓦克化学股份公司 | Graphite electrode |
| KR20120054240A (en) * | 2010-11-19 | 2012-05-30 | 박철훈 | Apparatus for recycling silicon and method thereof |
| CN203212338U (en) * | 2013-02-26 | 2013-09-25 | 青海黄河上游水电开发有限责任公司新能源分公司 | Polycrystalline silicon core and bridge connecting device |
| CN204981167U (en) * | 2015-09-15 | 2016-01-20 | 无锡中硅新材料股份有限公司 | Graphite base for polycrystalline silicon reduction furnace with exhausting function |
| CN107055544A (en) * | 2017-04-27 | 2017-08-18 | 内蒙古盾安光伏科技有限公司 | The silicon core structure of polycrystalline silicon reducing furnace |
| CN208700584U (en) * | 2018-08-16 | 2019-04-05 | 青海黄河上游水电开发有限责任公司新能源分公司 | Reduction furnace electrode, silicon core clamping device and polycrystalline silicon reduction furnace |
| CN209618901U (en) * | 2019-01-23 | 2019-11-12 | 四川永祥多晶硅有限公司 | A kind of reduction furnace graphite piece |
-
2020
- 2020-12-16 CN CN202011488752.9A patent/CN114636314A/en active Pending
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| GB1389805A (en) * | 1972-05-17 | 1975-04-09 | Dow Corning | Methods and apparatus for making elongated structures of silicon and silicon carbide |
| CN102196611A (en) * | 2010-03-19 | 2011-09-21 | 瓦克化学股份公司 | Graphite electrode |
| KR20120054240A (en) * | 2010-11-19 | 2012-05-30 | 박철훈 | Apparatus for recycling silicon and method thereof |
| CN203212338U (en) * | 2013-02-26 | 2013-09-25 | 青海黄河上游水电开发有限责任公司新能源分公司 | Polycrystalline silicon core and bridge connecting device |
| CN204981167U (en) * | 2015-09-15 | 2016-01-20 | 无锡中硅新材料股份有限公司 | Graphite base for polycrystalline silicon reduction furnace with exhausting function |
| CN107055544A (en) * | 2017-04-27 | 2017-08-18 | 内蒙古盾安光伏科技有限公司 | The silicon core structure of polycrystalline silicon reducing furnace |
| CN208700584U (en) * | 2018-08-16 | 2019-04-05 | 青海黄河上游水电开发有限责任公司新能源分公司 | Reduction furnace electrode, silicon core clamping device and polycrystalline silicon reduction furnace |
| CN209618901U (en) * | 2019-01-23 | 2019-11-12 | 四川永祥多晶硅有限公司 | A kind of reduction furnace graphite piece |
Non-Patent Citations (1)
| Title |
|---|
| MINORU SUZUKI等: "锥形多层橡胶弹簧、低蠕变轴箱悬挂***的开发", 《国外机车车辆工艺》 * |
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Application publication date: 20220617 |