CN114551317A - Motion platform and control system - Google Patents

Motion platform and control system Download PDF

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Publication number
CN114551317A
CN114551317A CN202210118119.3A CN202210118119A CN114551317A CN 114551317 A CN114551317 A CN 114551317A CN 202210118119 A CN202210118119 A CN 202210118119A CN 114551317 A CN114551317 A CN 114551317A
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China
Prior art keywords
motion
position sensor
linear position
linear
platform
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Pending
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CN202210118119.3A
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Chinese (zh)
Inventor
罗岩
谢扬
陆海亮
李伟民
约翰纳斯·雅各布斯·格尔曼娜·玛丽亚·杜伊斯特
田丹女
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Jiangsu Jicui Sukesi Technology Co ltd
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Jiangsu Jicui Sukesi Technology Co ltd
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Application filed by Jiangsu Jicui Sukesi Technology Co ltd filed Critical Jiangsu Jicui Sukesi Technology Co ltd
Priority to CN202210118119.3A priority Critical patent/CN114551317A/en
Publication of CN114551317A publication Critical patent/CN114551317A/en
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
    • H01L22/10—Measuring as part of the manufacturing process
    • H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/06—Means for converting reciprocating motion into rotary motion or vice versa
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
    • Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]

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  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Power Engineering (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Details Of Measuring And Other Instruments (AREA)

Abstract

The invention relates to a motion table and a control system. The motion table comprises a base, a Y-direction motion table and 2 groups of Y-direction linear motors, and further comprises an X-direction motion table and 2 groups of X-direction linear motors, wherein the 2 groups of X-direction linear motors are arranged on the Y-direction motion table, the 2 groups of X-direction linear motors are symmetrically arranged on two sides of the X-direction motion table, and a rotor of each group of X-direction linear motors is connected with the X-direction motion table. The motion platform is beneficial to avoid unnecessary rotation of the X-direction motion platform and the motion mechanism above the X-direction motion platform in the Ry direction.

Description

Motion platform and control system
Technical Field
The present invention relates to the field of semiconductor and control systems, and more particularly to a motion stage and control system.
Background
In the field of thickness detection of semiconductor silicon wafers, a motion table is often required. Such a motion stage for accurate positioning of a workpiece is a core component of precision semiconductor equipment. There are various embodiments of the motion stage described above.
For example, chinese patent 202020876271.4 discloses a micropositioner and a motion device comprising the micropositioner.
Furthermore, in addition to the micropositioners disclosed in the above-mentioned chinese patent, there is currently another type of motion stage which is generally movable in the X and Y directions. On the horizontal plane, the X direction is vertical to the Y direction, the X-direction and the Y-direction are vertical to the horizontal plane, and a three-dimensional coordinate system is formed by the X direction, the Y direction and the Z direction. The motion table generally includes a base, on which a Y-direction motion table and 2Y-direction linear motors are disposed, and on the Y-direction motion table, 1X-direction linear motor is disposed, and the X-direction linear motor is disposed at the bottom of the X-direction motion table. The top of the X-direction motion platform can be also provided with a motion mechanism which can be a Z-direction displacement platform and an Rz-rotation platform.
The existing design scheme has the following defects:
1. when the X-direction moving table is used, the X-direction moving table and an upper moving mechanism have the problem of rotation in the Ry direction, and the use precision is influenced.
2. When the X-direction linear position sensor assembly is used, the measurement error is large, and the use precision is influenced.
3. The X-direction linear motor is arranged at the bottom of the X-direction moving table, so that the Z-direction size of the whole device is large, and other mechanisms are inconvenient to install.
4. The acceleration of the X-direction motion table is small, and the overall reaction speed of the motion table is low.
5. The whole motion table has poor heat dissipation effect.
Disclosure of Invention
Based on this, a motion table is provided. The motion platform is beneficial to avoid unnecessary rotation of the X-direction motion platform and the motion mechanism above the X-direction motion platform in the Ry direction.
A motion table comprises a base, a Y-direction motion table, 2 groups of Y-direction linear motors, an X-direction motion table and 2 groups of X-direction linear motors,
the 2 groups of X-direction linear motors are arranged on the Y-direction moving platform, the 2 groups of X-direction linear motors are symmetrically arranged on two sides of the X-direction moving platform, and a rotor of each group of X-direction linear motors is connected with the X-direction moving platform.
In this application, be provided with 2X of group to linear electric motor, and 2X of group are in to linear electric motor symmetry setting X is to the both sides of motion platform. The X-direction linear motor is not arranged at the bottom of the X-direction motion table like the traditional design idea. Through deep research, the X-direction linear motor is arranged at the bottom of the X-direction motion table in the traditional design idea, so that the driving force of the X-direction linear motor acts on the bottom of the X-direction motion table, and the matching with the mass center of the X-direction motion table in the Z direction is difficult. So that the X-direction motion table and the motion mechanism above the X-direction motion table can easily rotate in the Ry direction.
This application sets up 2 group's X to linear electric motor symmetry X is to the both sides of motion platform, is convenient for directly perceived 2 group's X like this to linear electric motor and X to carrying out accurate control and adjustment to the mounted position of motion platform, that is X to linear electric motor setting in X to the side of motion platform, its mounting height is adjustable from top to bottom, is favorable to making 2 group's X to linear electric motor's comprehensive drive power and X match to the barycenter of motion platform in the Z direction like this. Therefore, when the X-direction motion platform is driven to move by 2 groups of X-direction linear motors, the X-direction motion platform and the motion mechanism above the X-direction motion platform can be effectively prevented from rotating in the direction Ry unnecessarily.
In one embodiment, the Y-direction moving table is disposed on the base, an air bearing is disposed between the bottom of the Y-direction moving table and the base, an air bearing is disposed between a side wall of the Y-direction moving table and the base, 2 groups of Y-direction linear motors are disposed on two sides of the Y-direction moving table, and 2 groups of Y-direction linear motors are mounted on the base, and a mover of each group of Y-direction linear motors is connected with the Y-direction moving table.
In one embodiment, the Y-direction moving table comprises an outer frame and an X-direction guiding structure arranged in the outer frame,
be provided with air bearing between X to the bottom of motion platform and the base, X is provided with the through-hole that supplies X to guide structure to pass to the motion platform, X is provided with air bearing to between the inside wall of the through-hole of motion platform and the X guide structure, 2X of group sets up to linear electric motor Y is in to the outer frame of motion platform.
In one embodiment, the device further comprises 2X-direction linear position sensor assemblies, wherein the 2X-direction linear position sensor assemblies are symmetrically arranged on two sides of the X-direction moving table, each X-direction linear position sensor assembly comprises an X-direction linear position sensor and an X-direction linear position sensor reading head matched with the X-direction linear position sensor, the X-direction linear position sensor is arranged on the Y-direction moving table, and the X-direction linear position sensor reading head is connected with the X-direction moving table through a linear position sensor support.
In one embodiment, data acquired by the 2X-direction linear position sensor assemblies control the operation of the 2 sets of X-direction linear motors.
In one embodiment, after the X-direction moving table rotates, the X-direction moving table is enabled to be corrected and kept not to rotate by adjusting the output of the two X-direction linear motors.
In one embodiment, the Y-direction motion stage comprises an outer frame including two spaced apart lateral support walls, the X-direction motion stage is positioned between the two lateral support arms, and the X-direction linear position sensor of the X-direction linear position sensor assembly is positioned on top of the lateral supports.
In one embodiment, the outer frame includes two lateral support walls spaced apart from each other, the X-motion stage is located between the two lateral support arms, and the 2 sets of X-linear motors are respectively mounted on the two lateral support arms.
A control system comprises a base, a Y-direction motion platform, 2 groups of Y-direction linear motors, an X-direction motion platform and 2 groups of X-direction linear motors,
the 2 groups of X-direction linear motors are arranged on the Y-direction moving platform, the 2 groups of X-direction linear motors are symmetrically arranged at two sides of the X-direction moving platform, a rotor of each group of X-direction linear motors is connected with the X-direction moving platform,
the X-direction linear position sensor assembly is arranged on the X-direction moving table and comprises an X-direction linear position sensor and an X-direction linear position sensor reading head matched with the X-direction linear position sensor, the X-direction linear position sensor is arranged on the Y-direction moving table, the X-direction linear position sensor reading head is connected with the X-direction moving table through a linear position sensor bracket,
the operation of 2 groups of X-direction linear motors is controlled by data obtained by 2X-direction linear position sensor assemblies, and after the X-direction motion table rotates, the X-direction motion table is enabled to be corrected and kept not to rotate by adjusting the output of the 2 groups of X-direction linear motors.
Drawings
Fig. 1 is a top view of a motion stage of an embodiment of the present application.
Fig. 2 is a side view of a motion stage of an embodiment of the present application.
Fig. 3 is a schematic view of the internal structure of the motion stage according to the embodiment of the present application.
Wherein:
101. a base, 102, an outer frame, 103, an X-guide,
104. a Y-direction motion table, 105, a Y-direction linear motor, 106, an X-direction motion table,
107. an X-direction linear motor, a 108-direction linear position sensor assembly,
109. an X-direction linear position sensor assembly is provided,
110. a motion mechanism, 112, a linear position sensor support,
106a, a U-shaped frame, 106b, a reinforcing plate,
210. air bearing, 220, air bearing, 230, air bearing,
240. an air bearing.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below. In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein, as those skilled in the art will recognize without departing from the spirit and scope of the present invention.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
As shown in fig. 1 and 2, embodiments of the present application provide a motion stage. The device comprises a base 101, a Y-direction motion platform 104, 2 groups of Y-direction linear motors 105, an X-direction motion platform 106 and 2 groups of X-direction linear motors 107. The base 101 may be a marble base, or other type of base 101.
The 1 group of Y-directional linear motors 105 includes 1, 2, 3, or another number of Y-directional linear motors 105. The number of the 2 groups of Y-directional linear motors 105 is the same, that is, the number of the first group of Y-directional linear motors 105 is the same as the number of the second group of Y-directional linear motors 105.
The 1 group of X-direction linear motors 107 includes 1, 2, 3 or other number of X-direction linear motors 107. The number of the 2 groups of X-direction linear motors 107 is the same, that is, the number of the first group of X-direction linear motors 107 is the same as the number of the second group of X-direction linear motors 107.
The 2 groups of X-directional linear motors 107 are disposed on the Y-directional moving stage 104, and the 2 groups of X-directional linear motors 107 are symmetrically disposed on both sides of the X-directional moving stage 106, that is, on the left and right sides of the X-directional moving stage 106. The rotor of each group of X-direction linear motors 107 is connected with the X-direction motion table 106.
In use, the X-direction motion stage 106 is driven by 2 sets of X-direction linear motors 107 to move in the X direction.
In the present application, 2 sets of X-directional linear motors 107 are symmetrically disposed on two sides of the X-directional motion stage 106, so that unnecessary rotation of the X-directional motion stage 106 and the upper motion mechanism 110 can be effectively avoided. Moreover, since the X-direction linear motor 107 is disposed on the side of the X-direction moving stage 106, the heat dissipation effect thereof is significantly improved. Because the traditional design mode is to set up X to linear electric motor in the bottom of X to the motion platform, the heat that X produced to linear electric motor gathers easily, is unfavorable for whole device long-term steady operation. According to the application, the X-direction linear motor 107 is arranged on the side surface of the X-direction moving table 106, and heat generated by the X-direction linear motor 107 is easily and quickly transferred to the periphery. Thereby being beneficial to the long-term stable work of the whole device.
Further, since the X-direction linear motor 107 is provided on the side surface of the X-direction moving stage 106 and no motor is provided on the bottom of the X-direction moving stage 106, the height of the X-direction moving stage 106 in the Z direction with respect to the base 101 is lowered, and the relative height of the moving mechanism 110 provided above the X-direction moving stage 106 is also lowered. In this way, the floor space of the whole motion table is saved.
Furthermore, 2 groups of X-direction linear motors 107 are symmetrically arranged on two sides of the X-direction moving table 106, so that the acceleration of the X-direction moving table is high, and the reaction speed is high.
In one embodiment, when the Y-direction moving stage 104 is disposed, the Y-direction moving stage 104 is disposed on the base 101, and an air bearing 220 is disposed between the bottom of the Y-direction moving stage 104 and the base 101. For example, 4 air bearings 220 may be provided at the bottom of the Y-motion stage 104, with 4 air bearings 220 supporting the Y-motion stage 104.
An air bearing 210 is provided between the side wall of the Y-direction moving stage 104 and the base 101. For example, 2 air bearings 210 are provided between each side wall of the Y-motion stage 104 and the corresponding side wall of the base 101. The air bearing 210 is used to guide the Y-motion stage 104.
Specifically, 2 groups of Y-directional linear motors 105 are arranged on two sides of the Y-directional motion stage, and 2 groups of Y-directional linear motors 105 are installed on the base 101, and a mover of each group of Y-directional linear motors 105 is connected with the Y-directional motion stage 104.
Two (2) Y-direction linear position sensor assemblies 108 may also be provided on either side of the Y-direction motion stage 104. The 2Y-direction linear position sensor assemblies 108 are disposed above the corresponding Y-direction linear motors 105.
The Y-direction linear position sensor assembly 108 is comprised of a Y-direction linear position sensor and a Y-direction linear position sensor readhead that cooperates with the Y-direction linear position sensor. The Y-direction linear position sensor is mounted on the base 101, and the Y-direction linear position sensor reading head is connected with the Y-direction moving table 104 through a support.
In use, the Y-direction motion stage 104 can be driven to move along the Y direction by 2 sets of Y-direction linear motors 105. The Y-motion stage 104 drives the corresponding Y-linear position sensor read head to move along with it.
In one embodiment, the Y-motion stage 104 includes an outer frame 102 and an X-guide 103 disposed within the outer frame 102.
Further, an air bearing 230 is disposed between the bottom of the X-direction moving stage 106 and the base 101. For example, 4 air bearings 230 may be disposed between the bottom of the X-direction motion stage 106 and the base 101, and the 4 air bearings 230 are used to support the X-direction motion stage 106.
The X-direction moving stage 106 is provided with a through hole for the X-direction guiding structure 103 to pass through, that is, the X-direction guiding structure 103 passes through the through hole.
Specifically, the X-direction moving stage 106 is a U-shaped frame 106a, and a reinforcing plate 106b may be further disposed at the bottom of the U-shaped frame 106a, so as to form a box-type structure. The middle through hole of the box structure may allow the X-direction guide structure 103 to pass through.
An air bearing 240 is arranged between the inner side wall of the through hole of the X-direction moving platform 106 and the X-direction guiding structure 103.
For example, the through hole of the X-direction moving stage 106 has two inner sidewalls, which are respectively located at both sides of the X-direction guiding structure 103. 2 air bearings 240 are provided between the inner side wall of each through-hole and the corresponding X-direction guide structure 103.
The 2X-direction linear motors 107 are provided on the outer frame 102 of the Y-direction moving stage 104. Specifically, the outer frame 102 of the Y-direction moving stage 104 is provided with a mounting groove for mounting the X-direction linear motor 107. The stator of the X-direction linear motor 107 is mounted in the mounting groove. The mover of the X-direction linear motor 107 is connected to the X-direction moving stage 106.
In one embodiment, the outer frame 102 includes two spaced lateral support walls, the X-motion stage 106 is located between the two lateral support arms, and the 2 sets of X-linear motors 107 are respectively mounted on the two lateral support arms.
For example, the above-described mounting groove may be provided on the lateral support arm, and then the stator of the X-directional linear motor 107 is mounted in the mounting groove.
In one embodiment, the present application further comprises 2X-direction linear position sensor assemblies 109, and the 2X-direction linear position sensor assemblies 109 are symmetrically disposed on two sides of the X-direction moving stage 106. Each X-direction linear position sensor assembly 109 includes an X-direction linear position sensor disposed on the outer frame 102 and an X-direction linear position sensor read head cooperating with the X-direction linear position sensor and coupled to the X-direction motion stage 106 by a linear position sensor support 112.
Specifically, the X-direction linear position sensor assembly 109 is positioned higher than the corresponding 1 group of X-direction linear motors 107 when installed.
The present application places 2X-direction linear position sensor assemblies 109 on either side of the X-direction motion stage 106. With this arrangement, the Z-direction setting height of the X-direction linear position sensor assembly 109 can be set as desired. For example, the height of the X-direction linear position sensor assembly 109 may be the same as the height of the X-direction motion stage 106, or the height of the X-direction linear position sensor assembly 109 may be higher than the X-direction motion stage 106, or the height of the X-direction motion stage 106 may be lower than the X-direction motion stage 106. The arrangement is such that the X-direction linear position sensor assembly 109, when arranged, can be located closer to the top surface of the motion mechanism 110 located above the X-direction work table. Since the top surface of the moving mechanism 110 is provided with the sample to be detected, the point of interest of the detection is located on the top surface of the moving mechanism 110. The Z-direction height of the X-direction linear position sensor assembly 109 is higher, so that the X-direction linear position sensor assembly 109 is closer to the interest point in the Z direction, the influence of Abbe errors is reduced, and the measurement precision is improved.
Further, as shown in fig. 1 and 3, the present application is provided with X-direction linear position sensor assemblies 109 on both sides of the X-direction moving stage 106, respectively. This arrangement is advantageous for reducing measurement errors caused by rotation of the X-direction motion stage 106 if the rotation occurs in the Rz direction.
This is because, if the X-direction linear position sensor unit is provided only on one side, the distance that the X-direction moving table moves in the X direction is set to Xp, and the X-direction moving table stops moving after the X-direction linear position sensor unit measures Xp. However, if the X-direction moving stage rotates in the Rz direction during the moving process, the measured value of the X-direction linear position sensor assembly reaches Xp, but the actual moving distance of some detection points on the Z-direction rotating stage on the X-direction moving stage may be Δ Z more than the Xp value or Δ Z less than the Xp value. This causes a large measurement error.
In the present application, the X-direction linear position sensor assemblies 109 are provided on both sides, and when in use, a value obtained by adding the measurement values of the two X-direction linear position sensor assemblies 109 and dividing the sum by 2 is used as the measurement value of the movement distance of the X-direction moving stage 106. Namely Xs = (X1+ X2)/2. Where Xs is a measurement of the moving distance of the X-direction moving stage 106, X1 is a measurement of one X-direction linear position sensor assembly 109, and X2 is a measurement of the other X-direction linear position sensor assembly 109. In the present application, the value of Xs is used as a basis for determining the final moving distance of the X-direction moving stage 106, instead of using one of the measured values of the X-direction linear position sensor assembly 109 as a final basis for determination. Therefore, the measurement error can be effectively reduced, and the overall moving precision of the motion platform is improved.
In one embodiment, the present application controls the operation of 2 sets of X-direction linear motors 107 via data obtained by 2X-direction linear position sensor assemblies 109.
Specifically, after the X-direction moving stage 106 rotates in the Rz direction, the X-direction moving stage 106 is corrected and kept from rotating by adjusting the output of the 2 groups of X-direction linear motors 107.
For example, when the measurements of the two X-direction linear position sensor assemblies 109 are inconsistent after the X-direction motion stage 106 is rotated in the Rz direction, the X-direction motion stage 106 can be considered to be slightly rotated. The position of the X-direction moving stage 106 can be adjusted by adjusting the outputs of the 2 groups of X-direction linear motors 107 so that the output of the X-direction linear motor 107 corresponding to the backward side of the X-direction moving stage 106 is increased or the output of the X-direction linear motor 107 corresponding to the forward side of the X-direction moving stage 106 is decreased. Thereby righting the X-motion stage 106. Thereby avoiding detection errors caused by rotation of the X-direction motion stage 106.
In one embodiment, as shown in fig. 1 and 3, the outer frame 102 includes two spaced apart lateral support walls, the X-motion stage 106 is located between the two lateral support walls, and the X-linear position sensor of the X-linear position sensor assembly 109 is disposed on top of the lateral support walls.
The technical features of the embodiments described above may be arbitrarily combined, and for the sake of brevity, all possible combinations of the technical features in the embodiments described above are not described, but should be considered as being within the scope of the present specification as long as there is no contradiction between the combinations of the technical features.
The above-mentioned embodiments only express several embodiments of the present invention, and the description thereof is more specific and detailed, but not construed as limiting the scope of the invention. It should be noted that, for a person skilled in the art, several variations and modifications can be made without departing from the inventive concept, which falls within the scope of the present invention. Therefore, the protection scope of the present patent shall be subject to the appended claims.

Claims (9)

1. A motion table comprises a base, a Y-direction motion table and 2 groups of Y-direction linear motors, and is characterized by further comprising an X-direction motion table and 2 groups of X-direction linear motors,
the 2 groups of X-direction linear motors are arranged on the Y-direction moving table, the 2 groups of X-direction linear motors are symmetrically arranged on two sides of the X-direction moving table, and a rotor of each group of X-direction linear motors is connected with the X-direction moving table.
2. Motion stage according to claim 1,
y is in to the motion platform setting on the base, Y is provided with air bearing to being provided with between the bottom of motion platform and the base, and Y is provided with air bearing to being provided with between the lateral wall of motion platform and the base, and 2 groups Y sets up to linear electric motor Y to the both sides of motion platform, and 2 groups Y installs on the base to linear electric motor, and every group Y links to each other to the motion platform to linear electric motor's active cell and Y.
3. Motion stage according to claim 1,
the Y-direction moving table comprises an outer frame and an X-direction guiding structure arranged inside the outer frame,
be provided with air bearing between X to the bottom of motion platform and the base, X is provided with the through-hole that supplies X to guide structure to pass to the motion platform, X is provided with air bearing to between the inside wall of the through-hole of motion platform and the X guide structure, 2X of group sets up to linear electric motor Y is in to the outer frame of motion platform.
4. Motion stage according to claim 1,
still include 2X to linear position sensor subassembly, 2X sets up in X to the both sides of moving the platform to linear position sensor subassembly symmetry, every X to linear position sensor subassembly include X to linear position sensor and with X to linear position sensor complex X to linear position sensor reading head, X is to linear position sensor setting on Y moves the platform to, X is to linear position sensor reading head and X through linear position sensor support and be connected to X to moving the platform.
5. The motion stage of claim 4, wherein data obtained by the 2X-direction linear position sensor assemblies controls the operation of the 2 sets of X-direction linear motors.
6. The motion stage of claim 5, wherein the X-motion stage is aligned and maintained from rotation by adjusting the output of 2 sets of X-linear motors after the X-motion stage has rotated.
7. The motion stage of claim 4, wherein the Y-motion stage comprises an outer frame including two spaced apart lateral support walls, the X-motion stage being positioned between the two lateral support walls, and the X-linear position sensor of the X-linear position sensor assembly being positioned on top of the lateral supports.
8. The motion table of claim 3, wherein the outer frame includes two spaced apart lateral support walls, the X-motion table being positioned between the two lateral support arms, the 2 sets of X-linear motors being mounted on the two lateral support arms, respectively.
9. A control system is characterized by comprising a base, a Y-direction motion platform, 2 groups of Y-direction linear motors, an X-direction motion platform and 2 groups of X-direction linear motors,
the 2 groups of X-direction linear motors are arranged on the Y-direction moving platform, the 2 groups of X-direction linear motors are symmetrically arranged at two sides of the X-direction moving platform, a rotor of each group of X-direction linear motors is connected with the X-direction moving platform,
the X-direction linear position sensor assembly is arranged on the X-direction moving table and comprises an X-direction linear position sensor and an X-direction linear position sensor reading head matched with the X-direction linear position sensor, the X-direction linear position sensor is arranged on the Y-direction moving table, the X-direction linear position sensor reading head is connected with the X-direction moving table through a linear position sensor bracket,
the operation of 2 groups of X-direction linear motors is controlled by data obtained by 2X-direction linear position sensor assemblies, and after the X-direction motion table rotates, the X-direction motion table is enabled to be corrected and kept not to rotate by adjusting the output of the 2 groups of X-direction linear motors.
CN202210118119.3A 2022-02-08 2022-02-08 Motion platform and control system Pending CN114551317A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202210118119.3A CN114551317A (en) 2022-02-08 2022-02-08 Motion platform and control system

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202210118119.3A CN114551317A (en) 2022-02-08 2022-02-08 Motion platform and control system

Publications (1)

Publication Number Publication Date
CN114551317A true CN114551317A (en) 2022-05-27

Family

ID=81674049

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202210118119.3A Pending CN114551317A (en) 2022-02-08 2022-02-08 Motion platform and control system

Country Status (1)

Country Link
CN (1) CN114551317A (en)

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