CN106907550A - A kind of voice coil motor drives two-dimensional ultraprecise locating platform - Google Patents
A kind of voice coil motor drives two-dimensional ultraprecise locating platform Download PDFInfo
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- CN106907550A CN106907550A CN201710107153.XA CN201710107153A CN106907550A CN 106907550 A CN106907550 A CN 106907550A CN 201710107153 A CN201710107153 A CN 201710107153A CN 106907550 A CN106907550 A CN 106907550A
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- 238000006073 displacement reaction Methods 0.000 claims abstract description 29
- 230000004044 response Effects 0.000 claims abstract description 7
- 238000004891 communication Methods 0.000 claims description 5
- 230000001133 acceleration Effects 0.000 claims description 4
- 241001269238 Data Species 0.000 claims description 3
- 230000005611 electricity Effects 0.000 claims 1
- 230000005540 biological transmission Effects 0.000 description 5
- 230000007246 mechanism Effects 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000000465 moulding Methods 0.000 description 2
- 230000036632 reaction speed Effects 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000007812 deficiency Effects 0.000 description 1
- 239000000835 fiber Substances 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000004647 photon scanning tunneling microscopy Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000004621 scanning probe microscopy Methods 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16M—FRAMES, CASINGS OR BEDS OF ENGINES, MACHINES OR APPARATUS, NOT SPECIFIC TO ENGINES, MACHINES OR APPARATUS PROVIDED FOR ELSEWHERE; STANDS; SUPPORTS
- F16M11/00—Stands or trestles as supports for apparatus or articles placed thereon ; Stands for scientific apparatus such as gravitational force meters
- F16M11/02—Heads
- F16M11/04—Means for attachment of apparatus; Means allowing adjustment of the apparatus relatively to the stand
- F16M11/043—Allowing translations
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- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Control Of Position Or Direction (AREA)
Abstract
Two-dimensional ultraprecise locating platform, the first motor is driven to be installed on horizontal base the present invention relates to a kind of voice coil motor；Move up and down platform and be connected in the first motor top and driven by the first motor and moved up and down along the first guide rail for being layed in perpendicular base, and by being separately mounted to the first grating scale reading ruler of perpendicular base side and moving up and down the first grating scale reading head conjunction measuring upper and lower displacement amount of platform side；Movable platform is located at and moves up and down platform top, move forward and backward along being layed in the second guide rail moved up and down on platform by being driven installed in the second motor for moving up and down on platform, and by being separately mounted to move up and down the second grating scale reading head of platform side and the second grating scale reading ruler conjunction measuring amount of moving forward and backward of movable platform side；The present invention has the advantages that driving error is small, platform by volume is small, fast response time, bearing capacity is strong, accuracy is high, man-machine efficiency is high, achievable different control models.
Description
Technical field
Two-dimensional ultraprecise positioning is driven the present invention relates to the technical field of precise distance measurement, more particularly to a kind of voice coil motor
Platform.
Background technology
With the development of science and technology, to the performance requirement more and more higher of ultraprecise displacement platform, ultraprecise displacement platform
Increasingly tend to miniaturization, commercialization, precision.Ultraprecise displacement platform is increasingly widely used in：Novel mechanical is manufactured, surpassed
Precision Machining, bioengineering, IC manufacturing, medical science, scanning probe microscopy, PSTM, optics are adjusted
Whole, fiber alignment.
Using stepper motor as motor and ball-screw as transmission mechanism common ultraprecise displacement platform more
Fit structure, when identical displacement and identical load is met, the volume of the structure is relatively large, while ball-screw
Transmission mechanism can there is driving error, so as to influence the positioning precision of platform.And the speed responsive of the structure is slow, carry energy
Power is low.The use of the module of linear electric motors is generally one-dimensional module for the displacement platform system using other linear electric motors, its control
System complex, its precise Positioning Control is difficult to realize for the personnel of non-controlling industry, and its control model is fixed, purposes has
Limit, high cost.The structure of existing Ultra-precision positioning platform and moulding are perfect not enough on the market, there is that volume is big, be difficult behaviour
The problems such as work, moulding initialization, man-machine inefficiency.
The content of the invention
It is an object of the invention to overcome the deficiencies in the prior art, there is provided a kind of driving error is small, platform by volume is small, response
Speed is fast, bearing capacity is strong, accuracy is high, man-machine efficiency is high, the voice coil motor of achievable different control models drives two dimension super
Precisely locating platform.
To achieve the above object, technical scheme provided by the present invention is：A kind of voice coil motor drives two-dimensional ultraprecise to determine
Bit platform, including platform base, mobile platform, first and second guide rail, first and second motor and first and second grating scale, wherein, put down
Platform base is made up of horizontal base and perpendicular base, and the first motor is installed on horizontal base；Mobile platform include move up and down platform and
Movable platform, moves up and down platform and is connected in the first motor top and driven along being layed in the of perpendicular base by the first motor
One guide rail is moved up and down, and by being separately mounted to the first grating scale reading ruler of perpendicular base side and moving up and down platform side
First grating scale reading head conjunction measuring upper and lower displacement amount；Movable platform is located at and moves up and down platform top, by being arranged on
Move up and down the driving of the second motor on platform and moved forward and backward along the second guide rail moved up and down on platform is layed in, and by dividing
The second grating scale reading head of platform side and the second grating scale reading of movable platform side An Zhuan not moved up and down
The chi conjunction measuring amount of moving forward and backward.
Further, first and second motor is voice coil motor.
Further, first and second grating scale is increment type grating scale, used as position feedback device.
Further, two motors are by the DC driver drives installed in perpendicular base another side, and the DC drivers are received
Control command sent by the controller of the side of being provided thereon.
Further, controller includes control model selecting module, limits gain setting module, control parameter setting mould
Block, displacement and translational speed setting module and display module；
Wherein, control model selecting module, including current control mode, speed control mode, position control mode；
Gain setting module is limited, the limitation and gain of DC drivers is set, the vibrations of locating platform are reduced, platform is improved
Response performance；
Control parameter setting module, maximum speed, acceleration and deceleration, back to zero side when setting mobile platform is moved
Formula；
Displacement and translational speed setting module, set the displacement and translational speed of mobile platform；
Display module, the current various peration datas of display.
Further, data are transmitted by serial communication between controller and DC drivers.
This programme principle is as follows：
On the controller setting control model, limit gain, control parameter and displacement and translational speed, therewith
The order for setting is sent to DC drivers, and DC drivers drive first and second motor according to order, thus drive move up and down it is flat
Platform is moved up and down along the first guide rail, and movable platform is moved forward and backward along the second guide rail, moves up and down platform and preceding
Respectively by first and second optical grating ruler measurement, display module shows the number such as displacement and translational speed to the displacement of mobile platform afterwards
According to back to zero after completion work.
Compared with prior art, this programme has advantages below and beneficial effect：
1. voice coil motor is selected, in structure, it is not necessary to transmission mechanism, reduce driving error and platform by volume；Property
On energy, fast response time, bearing capacity is strong.
2. grating scale is coordinated, and the positioning precision of platform is higher；Theoretical upper mounting plate whether there is the big resolution ratio of limit, and its resolution ratio is only
It is limited to displacement transducer；For different positioning accuracy requests, it is only necessary to install the grating reading chi of different precision.
3.DC drivers can complete electric current loop, speed ring, the relative parameters setting of displacement ring, when use environment changes only
The relevant parameter of DC drivers need to be adjusted, just can complete the precise control to platform.
4. the outgoing position and reaction speed of DC drivers, the work of its control ring are directly controlled by controller serial communication
Pattern is various, only need to send the control that corresponding call instruction defecate collection can realize the different mode of platform to DC drivers by serial ports
System, current control mode can be used when to mobile platform power output requirement precise control, and the translational speed to mobile platform is needed
Want to use speed control mode during precise control, displacement control mode is used when the positioning accuracy request to mobile platform is high.
5. mechanical structure can system extension, system reconstructing, to adapt to different application platforms；System meet it is open, can
Transplantability, autgmentability, the requirement of mutual operation.
6. the two-dimensional ultraprecise positioning of up and down and back and forth direction is met.
Brief description of the drawings
Fig. 1 is structural representation of the invention；
Fig. 2 is the structural representation of controller in the present invention.
Specific embodiment
With reference to specific embodiment, the invention will be further described：
Referring to shown in accompanying drawing 1-2, a kind of voice coil motor described in the present embodiment drives two-dimensional ultraprecise locating platform, including
Platform base 1, mobile platform 2, the increment type grating scale 9 of first and second guide rail, 3,4, first and second voice coil motor 5,6, first and second,
10th, DC drivers 11 and controller 12.
Wherein, platform base 1 is made up of horizontal base 101 and perpendicular base 102, and the first voice coil motor 5 is installed on horizontal base 101
On.
Mobile platform 2 includes moving up and down platform 7 and movable platform 8.
Move up and down platform 7 and be connected in the top of the first voice coil motor 5 and driven along being layed in perpendicular bottom by the first voice coil motor 5
First guide rail 3 of seat 102 is moved up and down, and by being separately mounted to the reading ruler of the first increment type grating scale 9 of the perpendicular side of base 102
With the reading head conjunction measuring upper and lower displacement amount of the first increment type grating scale 9 for moving up and down the side of platform 7.
Movable platform 8 is located at and moves up and down the top of platform 7, by installed in the second voice coil loudspeaker voice coil moved up and down on platform 7
Motor 6 drives and move forward and backward along being layed in the second guide rail 4 moved up and down on platform 7, and by being separately mounted to move up and down
The reading head of second increment type grating scale 10 of the side of platform 7 and the second increment type grating scale 10 of the side of movable platform 8 are read
The number chi conjunction measuring amount of moving forward and backward.
First and second voice coil motor 5,6 is driven by installed in the DC drivers 11 of the another side of perpendicular base 102, and the DC drives
The control command that device 11 is received is sent by the controller 12 of the side of being provided thereon, by string between controller 12 and DC drivers 11
Mouth communication data transmission；
Controller 12 includes control model selecting module 1101, limits gain setting module 1102, control parameter setting mould
Block 1103, displacement and translational speed setting module 1104 and display module 1105.
Wherein, control model selecting module 1101, including current control mode, speed control mode, position control mode；
Gain setting module 1102 is limited, the limitation and gain of DC drivers is set, the vibrations of locating platform are reduced, improved
The response performance of platform, directly can be connected to set by computer in coarse adjustment with driver；
Control parameter setting module 1103, maximum speed, acceleration and deceleration, back to zero when setting mobile platform is moved
Mode；
Displacement and translational speed setting module 1104, the displacement of mobile platform can be as accurate as 1um, for example, set
Surely 4000 are moved and is mobile 4000um, translational speed reaches translational speed during stabilized speed, the shifting of platform for mobile platform
Dynamic speed can reach speed quickly, for observation running fix process it can also be provided that slower movement velocity；
Display module 1105, the current various peration datas of display.
The present embodiment course of work is as follows：
Position control mode, the limitation and gain of reasonable set DC drivers and platform is selected to move in controller 12
When maximum speed, acceleration and deceleration, reset mode, displacement and translational speed, will order hair after each module setting
DC drivers 11 are given, DC drivers 11 drive first and second voice coil motor 5,6 according to order, so as to drive move up and down platform 7
Moved up and down along the first guide rail 3, movable platform 8 is moved forward and backward along the second guide rail 4, moves up and down the He of platform 7
The displacement of movable platform 8 is measured by first and second increment type grating scale 9,10 respectively, the display of display module 1105 it is mobile away from
From with the data such as translational speed, complete back to zero after work.
In the present embodiment, from voice coil motor, in structure, it is not necessary to transmission mechanism, driving error and platform are reduced
Volume；In performance, fast response time, bearing capacity is strong.
Coordinate grating scale, the positioning precision of platform is higher；Theoretical upper mounting plate whether there is the big resolution ratio of limit, and its resolution ratio is only received
It is limited to displacement transducer；For different positioning accuracy requests, it is only necessary to install the grating reading chi of different precision.
DC drivers can complete electric current loop, and speed ring, the relative parameters setting of displacement ring is only needed when use environment changes
Relevant parameter to DC drivers is adjusted, and just can complete the precise control to platform.
The outgoing position and reaction speed of DC drivers are directly controlled by controller serial communication, its control ring Working mould
Formula is various, only need to send the control that corresponding call instruction defecate collection can realize the different mode of platform to DC drivers by serial ports,
Current control mode can be used when to mobile platform power output requirement precise control, the translational speed to mobile platform needs essence
Speed control mode is really used during control, displacement control mode is used when the positioning accuracy request to mobile platform is high.
Mechanical structure can system extension, system reconstructing, to adapt to different application platforms；System meets open, removable
Plant property, the requirement of autgmentability, mutual operation.
Meet the two-dimensional ultraprecise positioning of up and down and back and forth direction.
The examples of implementation of the above are only the preferred embodiments of the invention, not limit implementation model of the invention with this
Enclose, therefore the change that all shapes according to the present invention, principle are made, all should cover within the scope of the present invention.
Claims (6)
1. a kind of voice coil motor drives two-dimensional ultraprecise locating platform, it is characterised in that：Including platform base (1), mobile platform
(2), first and second guide rail (3,4), first and second motor (5,6) and first and second grating scale (9,10), wherein, platform base (1)
It is made up of horizontal base (101) and perpendicular base (102), the first motor (5) is installed on horizontal base (101)；Mobile platform (2) includes
Platform (7) and movable platform (8) are moved up and down, platform (7) is moved up and down and is connected in the first motor (5) top by the first electricity
Machine (5) drives and is moved up and down along the first guide rail (3) for being layed in perpendicular base (102), and by being separately mounted to perpendicular base (102)
On first grating scale (9) reading ruler of side and first grating scale (9) the reading head conjunction measuring for moving up and down platform (7) side
Bottom offset amount；Movable platform (8) positioned at moving up and down platform (7) top, by installed in move up and down on platform (7) the
Two motors (6) driving is moved forward and backward along the second guide rail (4) moved up and down on platform (7) is layed in, and by being separately mounted to
Move up and down second grating scale (10) reading head of platform (7) side and the second grating scale of movable platform (8) side
(10) the reading ruler conjunction measuring amount of moving forward and backward.
2. a kind of voice coil motor according to claim 1 drives two-dimensional ultraprecise locating platform, it is characterised in that：Described
First, two motors (5,6) are voice coil motor.
3. a kind of voice coil motor according to claim 1 drives two-dimensional ultraprecise locating platform, it is characterised in that：Described
First, two grating scales (9,10) are increment type grating scale.
4. a kind of voice coil motor according to claim 1 drives two-dimensional ultraprecise locating platform, it is characterised in that：Described
First, two motors (5,6) are driven by the DC drivers (11) installed in perpendicular base (102) another side, and the DC drivers (11) connect
The control command for receiving is sent by the controller (12) of the side of being provided thereon.
5. a kind of voice coil motor according to claim 4 drives two-dimensional ultraprecise locating platform, it is characterised in that：The control
Device (12) processed includes control model selecting module (1101), restriction gain setting module (1102), control parameter setting module
(1103), displacement and translational speed setting module (1104) and display module (1105)；
Wherein, control model selecting module (1101), including current control mode, speed control mode, position control mode；
Gain setting module (1102) is limited, the limitation and gain of DC drivers is set, the vibrations of locating platform are reduced, improves flat
The response performance of platform；
Control parameter setting module (1103), maximum speed, acceleration and deceleration, back to zero side when setting mobile platform is moved
Formula；
Displacement and translational speed setting module (1104), set the displacement and translational speed of mobile platform；
Display module (1105), the current various peration datas of display.
6. a kind of voice coil motor according to claim 4 drives two-dimensional ultraprecise locating platform, it is characterised in that：The control
Data are transmitted by serial communication between device (12) processed and DC drivers (11).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710107153.XA CN106907550A (en) | 2017-02-27 | 2017-02-27 | A kind of voice coil motor drives two-dimensional ultraprecise locating platform |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201710107153.XA CN106907550A (en) | 2017-02-27 | 2017-02-27 | A kind of voice coil motor drives two-dimensional ultraprecise locating platform |
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| CN106907550A true CN106907550A (en) | 2017-06-30 |
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| CN201710107153.XA Pending CN106907550A (en) | 2017-02-27 | 2017-02-27 | A kind of voice coil motor drives two-dimensional ultraprecise locating platform |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112344139A (en) * | 2020-10-27 | 2021-02-09 | 燕山大学 | Two-rotation two-movement vibration isolation platform |
| CN113126239A (en) * | 2021-04-13 | 2021-07-16 | 西安交通大学 | Five-degree-of-freedom adjusting platform for splicing off-axis aspheric sub-mirrors |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN112344139A (en) * | 2020-10-27 | 2021-02-09 | 燕山大学 | Two-rotation two-movement vibration isolation platform |
| CN112344139B (en) * | 2020-10-27 | 2021-09-14 | 燕山大学 | Two-rotation two-movement vibration isolation platform |
| CN113126239A (en) * | 2021-04-13 | 2021-07-16 | 西安交通大学 | Five-degree-of-freedom adjusting platform for splicing off-axis aspheric sub-mirrors |
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