CN114540791B - Process and equipment for preparing artificial diamond - Google Patents

Process and equipment for preparing artificial diamond Download PDF

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Publication number
CN114540791B
CN114540791B CN202210207787.3A CN202210207787A CN114540791B CN 114540791 B CN114540791 B CN 114540791B CN 202210207787 A CN202210207787 A CN 202210207787A CN 114540791 B CN114540791 B CN 114540791B
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rod
composite substrate
substrate
fixing
floating
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CN114540791A (en
Inventor
余斌
余海粟
朱轶方
陆骁莹
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Hangzhou Chaoran Diamond Co ltd
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Hangzhou Chaoran Diamond Co ltd
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/271—Diamond only using hot filaments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Abstract

The invention relates to the field of diamond preparation, in particular to a process and equipment for preparing artificial diamond, wherein the process for preparing artificial diamond comprises the following steps: the substrate is processed as follows: cleaning and drying the substrate; preparing diamond micro powder slurry, coating the slurry on the surface of a substrate, and drying to obtain a composite substrate; placing the composite substrate in an oxygen environment, and heating at 600-800 ℃ to obtain a required substrate for later use; and growing a diamond film on the required substrate by adopting a hot filament chemical vapor deposition method. Heating at 600-800 deg.c to oxidize carbon element into carbon dioxide and exhaust, so that the graphite structure is reduced and micro pores are formed in the diamond powder coating after carbon dioxide is exhausted.

Description

Process and equipment for preparing artificial diamond
Technical Field
The invention relates to the field of diamond preparation, in particular to a process and equipment for preparing artificial diamond.
Background
The diamond is used as a material with highest natural hardness, and has the excellent properties of large forbidden bandwidth, extremely high heat conductivity, corrosion resistance, good light transmittance, high longitudinal wave sound velocity, dielectric breakdown field strength and the like.
Along with the development of technology, besides natural diamond, artificial diamond synthesis and preparation are also started, and a main preparation method is a chemical vapor deposition mode.
The method mainly comprises the steps of depositing and growing a diamond film on a substrate in a deposition furnace, wherein the currently used substrate mainly comprises the steps of coating a layer of diamond micro powder slurry on materials such as silicon and the like, and drying to obtain a composite substrate, however, as gaps of diamond structures of diamond micro powder exist in some graphite structures, the quality of the finally obtained diamond can be affected if the diamond is directly deposited and grown on the diamond micro powder.
Disclosure of Invention
In order to solve at least one technical problem mentioned in the background art, the invention aims to provide a preparation process and manufacturing equipment of artificial diamond.
In order to achieve the above purpose, the present invention provides the following technical solutions:
a process for preparing synthetic diamond, comprising the steps of:
s1, processing a substrate, wherein the substrate is specifically as follows:
s11, cleaning and drying the substrate;
s12, preparing diamond micro powder slurry, coating the slurry on the surface of a substrate, and drying to obtain a composite substrate;
s13, placing the composite substrate in an oxygen environment, and heating at 600-800 ℃ to obtain a required substrate for later use;
s2, growing a diamond film on the required substrate by adopting a hot wire chemical vapor deposition method.
Preferably, the specific step of the step S2 is to grow a nitrogen doped diamond film on the surface of the required substrate by using CH4, ar and NH3 as gas sources.
The invention also provides artificial diamond preparation equipment which is applied to the artificial diamond preparation process and is used for processing a composite substrate into a required substrate, and the artificial diamond preparation equipment comprises the following components:
a heating furnace, in which a heating element is arranged;
the track comprises a first guide sliding surface and a second guide sliding surface, wherein the first guide sliding surface and the second guide sliding surface have height difference in the vertical direction, and the first guide sliding surface and the second guide sliding surface are connected to form a circular track surface;
the floating assembly comprises a sleeve which is vertically arranged, a floating rod which is arranged on the sleeve and can axially move along the sleeve, the bottom of the floating rod is provided with a roller, and an elastic piece which is arranged between the floating rod and the sleeve and is used for enabling the floating rod to always keep downward movement trend; the roller rolls on the annular track surface;
the driving assembly is connected with the sleeve and used for driving the sleeve to rotate along the circumferential direction of the annular track surface;
and the clamping assembly is arranged on the floating rod and used for clamping the composite substrate.
Preferably, the clamping assembly comprises a fixing rod fixed on the floating rod and vertically arranged, a fixing clamp used for clamping the bottom of the composite substrate is arranged at the bottom of the fixing rod, and a movable clamp arranged on the fixing rod and used for clamping the top of the composite substrate, wherein the movable clamp can move vertically relative to the fixing rod.
Preferably, the movable clamp comprises a sliding block and a locking bolt, wherein the sliding block is arranged on the fixed rod, and can slide relative to the fixed rod in the vertical direction, and the sliding block and the fixed rod are kept in relative positioning in the horizontal direction; the fixing rod is provided with a plurality of screw holes which are distributed at intervals along the vertical direction, the screw holes penetrate through the fixing rod, and the sliding block comprises a clamping jaw and a through hole for the locking bolt to penetrate through; in the clamping state, the bolt passes through the perforation and is in threaded connection with one of the screw holes, one surface of the composite substrate is abutted against the clamping jaw, and the other surface is abutted against the end part of the bolt.
Preferably, the side walls on two sides of the fixing rod are provided with sliding grooves which are vertically arranged, and the sliding block comprises two sliding parts which are respectively and slidably connected in the two sliding grooves.
Preferably, the fixing clamp comprises a supporting claw and a fixing bolt, the supporting claw is arranged on the fixing rod, the fixing bolt is in threaded connection with the fixing rod, the composite substrate is supported on the supporting claw in a clamping state, one surface of the composite substrate is abutted against the supporting claw, and the other surface of the composite substrate is abutted against the end part of the fixing bolt.
Preferably, the elastic member includes a spring and a slider; the sliding block is fixed on the floating rod and vertically moves in the movable cavity; one end of the spring is abutted against the sliding block, and the other end of the spring is abutted against the upper wall of the movable cavity.
Preferably, the sliding block is polygonal, and the section of the movable cavity is matched with the shape of the sliding block.
Preferably, the driving assembly comprises a rotating shaft which is rotatably connected in the heating furnace and is coaxially arranged with the annular track surface, and a motor for driving the rotating shaft to rotate, and the sleeve is fixed on the rotating shaft.
Compared with the prior art, the invention has the beneficial effects that:
firstly, in the manufacturing method provided by the invention, after the composite substrate is obtained, the composite substrate is placed in an oxygen environment, and is heated at 600-800 ℃, such as 750 ℃, so as to obtain the required substrate. The aim of this step is to cut down the graphite structure in the diamond micropowder coating and form some micropores; because the heating is carried out at the temperature of 600-800 ℃, the carbon element in the graphite is oxidized into carbon dioxide by oxygen and is discharged, so that the graphite structure is reduced, a few micro-pores are formed in the diamond micro-powder coating after the carbon dioxide is discharged, and during deposition, gas can be deposited on the surface of the diamond and can enter the pores for deposition, thereby further promoting the formation of the diamond.
And secondly, the equipment provided by the invention can heat the composite substrate, reduce the graphite structure in the diamond micro powder coating in the heating engineering and form micropores.
Moreover, the device comprises the floating assembly, the driving assembly and the track, so that the composite substrate can be clamped by the clamping assembly to be heated in the heating furnace in a horizontal rotation mode, and the composite substrate can be better contacted with oxygen and heated.
In addition, in the invention, the composite substrate is clamped on the floating assembly due to the fact that the composite substrate corresponds to a plate surface structure, when the floating assembly rotates in the heating furnace, the composite substrate corresponds to a blade which disturbs the air flow in the heating furnace, so that oxygen in the heating furnace is continuously disturbed, and contact between the oxygen and the composite substrate is facilitated.
Finally, the track comprises a first guide sliding surface and a second guide sliding surface with height difference, and is matched with the floating assembly, so that the floating assembly can drive the composite substrate to float up and down, the contact effect and the heating effect of the composite substrate and oxygen are further improved, the height positions of the composite substrate on the first guide sliding surface are different from the height positions of the composite substrate on the first guide sliding surface, when the composite substrate rotates, the composite substrate at a higher position can disturb the air flow at a higher position, and the composite substrate at a lower position can disturb the air flow at a lower position, so that the air flow disturbing effect is further improved, and the contact of oxygen and the substrate is facilitated.
Drawings
FIG. 1 is a schematic overall structure of embodiment 2;
fig. 2 is a schematic view of the internal structure of embodiment 2;
FIG. 3 is a schematic view showing the structure of a floating assembly in embodiment 2;
FIG. 4 is an internal cross-sectional view of the sleeve;
fig. 5 is an exploded view of the movable clamp.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely, and it is apparent that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Example 1
The embodiment provides a process for preparing artificial diamond, which comprises the following steps:
s1, processing a substrate, wherein the substrate is specifically as follows:
s11, cleaning and drying the substrate; the substrate may be one or more of silicon, titanium, and tantalum, and is not particularly limited herein.
S12, preparing diamond micro powder slurry, coating the slurry on the surface of a substrate, and drying to obtain a composite substrate; specifically, the diamond micro powder slurry is placed in a mortar and is dripped into ethylene glycol for grinding and dispersing, then the ground material is placed in a ball mill for continuous grinding and dispersing, the slurry is taken out after finishing, the slurry is coated on a substrate in a spin coating mode, and the diamond micro powder coating is formed after drying, so that the composite substrate compounded with the diamond micro powder coating is obtained.
S13, placing the composite substrate in an oxygen environment, and heating at 600-800 ℃ to obtain a required substrate for later use;
s2, growing a diamond film on the required substrate by adopting a hot wire chemical vapor deposition method, specifically, growing a nitrogen doped diamond film on the surface of the required substrate by adopting a hot wire chemical vapor deposition furnace and taking CH4, ar and NH3 as gas sources, and naturally, obtaining an undoped diamond film by adopting CH4, ar and H2 as gas sources, wherein a large number of documents are described in the prior art for the hot wire chemical vapor deposition method, so that redundant description is omitted.
Example 2
Referring to fig. 1 to 5, the present embodiment provides an apparatus for manufacturing synthetic diamond, which is mainly used for processing a composite substrate to change the composite substrate into a desired substrate, and includes a heating furnace 1, and a track 2, a floating assembly, a driving assembly, and a clamping member provided in the heating furnace 1, wherein the number of the floating assemblies may be 1 or more, and the embodiment shows the case of 4 floating assemblies, and the present apparatus is specifically explained below.
As shown in fig. 1, a heating furnace 1 is mainly used for heating a composite substrate in an oxygen environment, a heating element (view angle reason is not shown in the figure) is arranged in the heating furnace, the heating element can be an electric heating element, a microwave heating element or the like, a material inlet and outlet 12 is arranged at the side of the heating furnace 1, a material gate 13 for covering the material inlet and outlet 12 is hinged on the material inlet and outlet 12, and the material gate 13 is opened for operation during feeding or discharging. During heating, oxygen is introduced into the heating furnace 1, and of course, protective gas such as nitrogen, argon and the like can be simultaneously introduced while oxygen is introduced, then the material door 13 is closed to start heating, and during heating, the temperature is set to 600-800 ℃.
As shown in fig. 2, the track 2 is formed in a circular structure, and the upper surface thereof includes a first guiding and sliding surface 213 and a second guiding and sliding surface 211, wherein the first guiding and sliding surface 213 and the second guiding and sliding surface 211 have a height difference in the vertical direction, and specifically, the first guiding and sliding surface 213 and the second guiding and sliding surface 211 are both in a planar structure, and the first guiding and sliding surface 213 is higher than the second guiding and sliding surface 211.
The first guide sliding surface 213 and the second guide sliding surface are connected to form a circular track surface 21; in order to make the floating assembly switch between the first guide sliding surface 213 and the second guide sliding surface 211 smoothly, in this embodiment, the junction between the first guide sliding surface 213 and the second guide sliding surface 211 forms a slant or arc-shaped guide surface 212.
As shown in fig. 2-4, the floating assembly comprises a vertically arranged sleeve 31, a floating rod 32 arranged on the sleeve 31 and capable of moving along the axial direction of the sleeve 31, and provided with a roller 33 at the bottom, and an elastic piece 34 arranged between the floating rod 32 and the sleeve 31 and used for keeping the floating rod 32 always moving downwards; the floating rod 32 and the roller 33 can roll along the track of the circular track surface 21, specifically, under the elastic force of the elastic piece 34 and the dead weights of the floating rod 32 and the roller 33, the roller 33 always abuts against the circular track 2 surface, and when the sleeve 31 rotates, the floating rod 32 drives the roller 33 to roll on the circular track surface 21; when the roller 33 rolls from the second guiding sliding surface 211 to the first guiding sliding surface 213, the floating rod 32 will move upwards against the elastic force of the elastic member 34 until the roller 33 rises to the first guiding sliding surface 213, at this time, the floating rod 32 and the roller 33 rotate on the first guiding sliding surface 213 for a distance, then return to the second guiding sliding surface 211 for a distance, and the above actions are repeated, so that the floating rod 32 can float up and down while rotating.
As shown in fig. 4, the specific structure of the elastic member 34 is: the elastic member 34 includes a spring 342 and a slider 341; a movable cavity is formed in the sleeve 31, the floating rod 32 vertically penetrates through the movable cavity, and the sliding block 341 is fixed on the floating rod 32 and vertically moves in the movable cavity; the spring 342 is located in the movable cavity and sleeved on the floating rod 32, one end of the spring 342 abuts against the upper wall of the sliding block 341, and the other end abuts against the upper wall of the movable cavity, so that downward pressure is applied to the sliding block 341 under the elasticity of the spring 342, and the floating rod 32 keeps moving downwards.
Of course, in order to avoid the floating rod 32 from deflecting circumferentially relative to the sleeve 31, in this embodiment, the sliding block 341 is polygonal, the cross section of the movable cavity is adapted to the shape of the sliding block 341, for example, the sliding block 341 is square, and the cross section of the movable cavity is also square, so that the sliding block 341 can only move up and down and cannot rotate circumferentially under the limitation of the movable cavity, thereby preventing the floating rod 32 from deflecting circumferentially relative to the sleeve 31.
The driving assembly is connected with the sleeve 31 and used for driving the sleeve 31 to rotate along the circumferential direction of the annular track surface 21; specifically, the driving assembly includes a rotating shaft 41 rotatably connected in the heating furnace 1 and coaxially disposed with the circular track surface 21, and a motor (not shown in the drawing) for driving the rotating shaft 41 to rotate, the sleeve 31 is fixed on the rotating shaft 41 through a connecting rod 35, an electric room 11 is disposed at the bottom of the heating furnace 1, and the motor is installed in the electric room 11, as shown in fig. 1.
The clamping assembly is disposed on the floating rod 32 for clamping the composite substrate, and the clamping state is shown in fig. 2, wherein the part M in fig. 2 is the composite substrate. Specific:
the clamping assembly comprises a fixed rod 51 fixed to the floating rod 32 by a connecting shaft 36 and arranged vertically, the connecting shaft 36 being fixed to the upper part of the floating rod 32 above the sleeve 31.
The bottom of the fixed rod 51 is provided with a fixed clamp 53 for clamping the bottom of the composite substrate, and a movable clamp 52 arranged on the fixed rod 51 for clamping the top of the composite substrate, the fixed clamp 53 is kept fixed, the movable clamp 52 can vertically move relative to the fixed rod 51, and thus, the interval between the movable clamp 52 and the fixed clamp 53 can be adjusted to adapt to the clamping requirements of the composite substrates with different lengths (namely heights).
As shown in fig. 3, the fixing clamp 53 has a specific structure that the fixing clamp 53 includes a holding claw 531 and a fixing bolt 532, where the holding claw 531 is disposed on the fixing rod 51, and the holding claw 531 is L-shaped and includes two separate sides disposed on the fixing rod 51, and is used for holding and matching with the fixing bolt 532 to clamp the composite substrate.
The fixing bolt 532 is in threaded connection with the fixing rod 51, during clamping, the composite substrate is supported on the supporting claw 531, one surface of the diamond micro powder coating faces away from one side of the fixing rod 51, then the fixing bolt 532 is rotated to enable the fixing bolt 532 to advance until the end portion of the fixing bolt 532 pushes the composite substrate to the supporting claw 531 to be abutted against the supporting claw 531, and therefore the bottom of the composite substrate is clamped between the fixing bolt 532 and the supporting claw 531.
As shown in fig. 3 and 5, the movable clamp 52 has a specific structure: the movable clamp 52 includes a slider 521 and a locking bolt 522, where the slider 521 is disposed on the fixed rod 51, and in a vertical direction, the slider 521 and the fixed rod 51 may slide relatively, and in a horizontal direction, the slider 521 and the fixed rod 51 may be positioned relatively, and in short, the slider 521 may slide vertically only along the fixed rod 51, specifically: the side walls on two sides of the fixed rod 51 are provided with vertically arranged sliding grooves 512, the sliding block 521 comprises two sliding parts 5212, and the two sliding parts 5212 are clamped into the sliding grooves 512 and can slide up and down in the sliding grooves 512.
The fixing rod 51 is provided with a plurality of screw holes 511 which are distributed at intervals along the vertical direction, the screw holes 511 penetrate through the fixing rod 51, the slide block 521 comprises clamping jaws 5211 and through holes 5213 for the locking bolts 522 to penetrate through, the clamping jaws 5211 are L-shaped and comprise 2 clamping jaws which are respectively positioned at two sides of the fixing rod 51 and used for clamping the top of the composite substrate in cooperation with the locking bolts 522; before clamping, the height of the slider 521 is adjusted according to the height of the composite substrate, specifically comprising the following steps: the bolts are screwed down to be screwed out of the screw holes 511 of the fixed rods 51, then the slide blocks 521 are moved to the positions of the screw holes 511 with the corresponding heights according to the heights of the composite substrates, then the bolts are rotated to penetrate into the screw holes 511, and at the moment, the slide blocks 521 are positioned on the fixed rods 51 under the limitation of the bolts and cannot move upwards continuously, so that adjustment is completed.
Then, the clamping is started, the bottom of the composite substrate is clamped by the fixing clamp 53, the locking bolt 522 is rotated continuously, the inner end of the locking bolt 522 is pressed against the composite substrate, and the conforming substrate is pressed against the clamping jaw 5211, so that one surface of the composite substrate is abutted against the clamping jaw 5211, and the other surface is abutted against the end of the bolt, and the top clamping is completed.
Therefore, in this embodiment, the locking bolt 522 has two functions, one of which can be used as a positioning member of the slider 521, so that the slider 521 can be positioned on the fixing rod 51 after the adjustment is completed; secondly, as the clamping piece for clamping the composite substrate, the clamping piece is used for clamping the composite substrate by matching with the clamping jaw 5211, so that the design structure is compact, the space and the workpieces are saved, and the operation is convenient.
The device comprises a floating assembly, a driving assembly and a track 2, so that the composite substrate can be clamped by the clamping assembly to be heated in the heating furnace 1 in a horizontal rotation mode, and the composite substrate can be better contacted with oxygen and heated.
In addition, in the invention, the composite substrate is clamped on the floating assembly as a plate surface structure, and when the floating assembly rotates in the heating furnace 1, the composite substrate drives the composite substrate to rotate together, and the composite substrate is equivalent to a blade to disturb the air flow in the heating furnace 1, so that the oxygen in the heating furnace 1 is continuously disturbed, and the contact between the oxygen and the composite substrate is facilitated.
In addition, the track 2 in the invention comprises a first guide sliding surface 213 and a second guide sliding surface 211 with height difference, and is matched with a floating assembly, so that the floating assembly can drive the composite substrate to float up and down, and the contact effect and the heating effect of the composite substrate and oxygen are further improved.
The height position of the composite substrate on the first sliding surface 213 is different from the height position of the composite substrate on the first sliding surface 213, so that when the composite substrate rotates, the composite substrate at a higher position can disturb the air flow at a higher position, i.e. the composite substrate rotating on the first sliding surface 213 can disturb the air flow at a higher position.
The lower composite substrate can disturb the lower air flow, that is, the composite substrate rotating on the second sliding guide surface 211 can disturb the lower air flow, so that the air flow disturbing effect is further improved, and the contact between oxygen and the substrate is facilitated.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential characteristics thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Claims (7)

1. An artificial diamond preparing apparatus, which is applied to an artificial diamond preparing process for processing a composite substrate into a desired substrate, comprising:
a heating furnace, in which a heating element is arranged;
the track comprises a first guide sliding surface and a second guide sliding surface, wherein the first guide sliding surface and the second guide sliding surface have a height difference in the vertical direction, and the first guide sliding surface and the second guide sliding surface are connected to form a circular track surface;
the floating assembly comprises a sleeve which is vertically arranged, a floating rod which is arranged on the sleeve and can axially move along the sleeve, the bottom of the floating rod is provided with a roller, and an elastic piece which is arranged between the floating rod and the sleeve and is used for enabling the floating rod to always keep downward movement trend; the roller rolls on the annular track surface;
the driving assembly is connected with the sleeve and used for driving the sleeve to rotate along the circumferential direction of the annular track surface;
the clamping assembly is arranged on the floating rod and used for clamping the composite substrate;
the elastic piece comprises a spring and a sliding block; the sliding block is fixed on the floating rod and vertically moves in the movable cavity; one end of the spring is abutted against the sliding block, and the other end of the spring is abutted against the upper wall of the movable cavity.
2. An artificial diamond preparing apparatus according to claim 1, wherein the holding assembly comprises a fixing rod fixed on the floating rod and arranged vertically, a fixing clamp for holding the bottom of the composite substrate is arranged at the bottom of the fixing rod, and a movable clamp arranged on the fixing rod and used for holding the top of the composite substrate is arranged at the bottom of the fixing rod, wherein the movable clamp can move vertically relative to the fixing rod.
3. The apparatus according to claim 2, wherein the movable jig includes a slider and a lock bolt, the slider being provided on the fixed rod, the slider being relatively slidable with respect to the fixed rod in a vertical direction, and the slider being relatively positioned with respect to the fixed rod in a horizontal direction; the fixing rod is provided with a plurality of screw holes which are distributed at intervals along the vertical direction, the screw holes penetrate through the fixing rod, and the sliding block comprises a clamping jaw and a through hole for the locking bolt to penetrate through; in the clamping state, the bolt passes through the perforation and is in threaded connection with one of the screw holes, one surface of the composite substrate is abutted against the clamping jaw, and the other surface is abutted against the end part of the bolt.
4. A synthetic diamond manufacturing apparatus according to claim 3 wherein the side walls of the two sides of the fixing rod are provided with vertically arranged sliding grooves, and the sliding block comprises two sliding parts which are respectively and slidably connected in the two sliding grooves.
5. An artificial diamond preparing apparatus according to claim 2, wherein the fixing jig comprises a holding claw and a fixing bolt, the holding claw is provided on the fixing rod, the fixing bolt is screwed on the fixing rod, the composite substrate is held on the holding claw in a clamped state, one surface of the composite substrate is abutted against the holding claw, and the other surface is abutted against an end of the fixing bolt.
6. A synthetic diamond manufacturing apparatus according to claim 1 wherein the slide block is polygonal and the movable cavity is adapted in cross section to the shape of the slide block.
7. A synthetic diamond manufacturing apparatus according to claim 1 wherein the driving assembly comprises a spindle rotatably connected to the heating furnace and coaxially disposed with the circular track surface, and a motor for driving the spindle to rotate, and the sleeve is fixed to the spindle.
CN202210207787.3A 2022-03-04 2022-03-04 Process and equipment for preparing artificial diamond Active CN114540791B (en)

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