CN114540791A - Artificial diamond preparation process and equipment thereof - Google Patents

Artificial diamond preparation process and equipment thereof Download PDF

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Publication number
CN114540791A
CN114540791A CN202210207787.3A CN202210207787A CN114540791A CN 114540791 A CN114540791 A CN 114540791A CN 202210207787 A CN202210207787 A CN 202210207787A CN 114540791 A CN114540791 A CN 114540791A
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China
Prior art keywords
composite substrate
substrate
sliding block
rod
sleeve
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Granted
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CN202210207787.3A
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Chinese (zh)
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CN114540791B (en
Inventor
余斌
余海粟
朱轶方
陆骁莹
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Hangzhou Chaoran Diamond Co ltd
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Hangzhou Chaoran Diamond Co ltd
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Publication of CN114540791A publication Critical patent/CN114540791A/en
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Publication of CN114540791B publication Critical patent/CN114540791B/en
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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/26—Deposition of carbon only
    • C23C16/27—Diamond only
    • C23C16/271—Diamond only using hot filaments
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0227—Pretreatment of the material to be coated by cleaning or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/02—Pretreatment of the material to be coated
    • C23C16/0272—Deposition of sub-layers, e.g. to promote the adhesion of the main coating
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P40/00—Technologies relating to the processing of minerals
    • Y02P40/50—Glass production, e.g. reusing waste heat during processing or shaping
    • Y02P40/57—Improving the yield, e-g- reduction of reject rates

Abstract

The invention relates to the field of diamond preparation, in particular to a process and equipment for preparing artificial diamond, wherein the process for preparing the artificial diamond comprises the following steps: processing the substrate, specifically as follows: cleaning and drying the substrate; preparing diamond micro powder slurry, coating the slurry on the surface of a substrate, and drying to obtain a composite substrate; placing the composite substrate in an oxygen environment, and heating at 600-800 ℃ to obtain a required substrate for later use; and growing the diamond film on the required substrate by adopting a hot wire chemical vapor deposition method. Heating at the temperature range of 600-.

Description

Artificial diamond preparation process and equipment thereof
Technical Field
The invention relates to the field of diamond preparation, in particular to a preparation process and equipment of an artificial diamond.
Background
The diamond is used as a material with the highest natural hardness, and has the advantages of large forbidden bandwidth, extremely high heat conductivity, corrosion resistance, good light transmittance, high longitudinal wave sound velocity, dielectric breakdown field strength and the like.
With the development of science and technology, people begin to prepare artificial diamonds by synthesis in addition to natural diamonds, and the main preparation method is a chemical vapor deposition method.
The method mainly comprises the steps of depositing and growing a diamond film on a substrate in a deposition furnace, wherein the currently used substrate is mainly formed by coating a layer of diamond micropowder slurry on materials such as silicon and the like and drying the diamond micropowder slurry to obtain a composite substrate, however, because some graphite structures exist in gaps of the diamond structures of the diamond micropowder, the quality of finally obtained diamond is influenced if the diamond micropowder is directly deposited and grown on the graphite structures.
Disclosure of Invention
In order to solve at least one of the technical problems mentioned in the background art, the present invention aims to provide a process and an apparatus for manufacturing a synthetic diamond.
In order to achieve the purpose, the invention provides the following technical scheme:
a preparation process of artificial diamond comprises the following steps:
s1, processing the substrate, specifically as follows:
s11, cleaning and drying the substrate;
s12, preparing diamond micropowder slurry, coating the slurry on the surface of the substrate, and drying to obtain a composite substrate;
s13, placing the composite substrate in an oxygen environment, and heating at 600-800 ℃ to obtain a required substrate for later use;
and S2, growing the diamond film on the required substrate by adopting a hot wire chemical vapor deposition method.
Preferably, the specific step of step S2 is to grow the nitrogen-doped diamond film on the surface of the desired substrate using CH4, Ar and NH3 as gas sources.
The invention also provides a device for preparing the artificial diamond, which is applied to the artificial diamond preparation process and used for processing the composite substrate into a required substrate, and comprises the following components:
the heating furnace is internally provided with a heating element;
the track comprises a first guide sliding surface and a second guide sliding surface, wherein the first guide sliding surface and the second guide sliding surface have a height difference in the vertical direction, and the first guide sliding surface and the second guide sliding surface are connected to form a circular track surface;
the floating assembly comprises a sleeve, a floating rod and an elastic piece, wherein the sleeve is vertically arranged, the floating rod is arranged on the sleeve and can move along the axial direction of the sleeve, and the bottom of the floating rod is provided with a roller; the roller rolls on the circular track surface;
the driving assembly is connected with the sleeve and used for driving the sleeve to rotate along the circumferential direction of the circular track surface;
and the clamping assembly is arranged on the floating rod and used for clamping the composite substrate.
Preferably, the clamping assembly comprises a fixed rod vertically fixed on the floating rod, a fixed clamp used for clamping the bottom of the composite substrate is arranged at the bottom of the fixed rod, and a movable clamp arranged on the fixed rod and used for clamping the top of the composite substrate, wherein the movable clamp can vertically move relative to the fixed rod.
Preferably, the movable clamp comprises a sliding block and a locking bolt, the sliding block is arranged on the fixed rod, the sliding block and the fixed rod can slide relatively in the vertical direction, and the sliding block and the fixed rod are kept in relative positioning in the horizontal direction; the fixed rod is provided with a plurality of screw holes which are distributed at intervals along the vertical direction, the screw holes penetrate through the fixed rod, and the sliding block comprises a clamping jaw and a through hole for a locking bolt to penetrate through; under the clamping state, the bolt penetrates through the through hole to be in threaded connection with one of the screw holes, one surface of the composite substrate is abutted to the clamping jaw, and the other surface of the composite substrate is abutted to the end part of the bolt.
Preferably, the side walls of the two sides of the fixing rod are provided with vertically arranged sliding grooves, the sliding block comprises two sliding parts, and the two sliding parts are respectively connected in the two sliding grooves in a sliding manner.
Preferably, the fixing clamp comprises a supporting claw and a fixing bolt, the supporting claw is arranged on the fixing rod, the fixing bolt is in threaded connection with the fixing rod, the composite substrate is supported on the supporting claw in a clamping state, one surface of the composite substrate is abutted to the supporting claw, and the other surface of the composite substrate is abutted to the end part of the fixing bolt.
Preferably, the elastic member includes a spring and a sliding block; a movable cavity is formed in the sleeve, and the sliding block is fixed on the floating rod and vertically moves in the movable cavity; spring one end is contradicted with the sliding block, and the other end is contradicted with the upper wall in activity chamber mutually.
Preferably, the sliding block is polygonal, and the cross section of the movable cavity is matched with the shape of the sliding block.
Preferably, the driving assembly comprises a rotating shaft which is rotatably connected in the heating furnace and is coaxially arranged with the circular track surface, and a motor which drives the rotating shaft to rotate, and the sleeve is fixed on the rotating shaft.
Compared with the prior art, the invention has the beneficial effects that:
firstly, in the manufacturing method provided by the invention, after the composite substrate is obtained, the composite substrate is placed in an oxygen environment and heated at the temperature of 600-. The purpose of this step is to cut down the graphite structure in the diamond micropowder coating and form some micropores; because the heating is carried out in the temperature range of 600-.
Secondly, the device provided by the invention can heat the composite substrate, reduce the graphite structure in the diamond micro powder coating in the heating process and form micropores.
Furthermore, the apparatus of the present invention comprises a floating assembly, a driving assembly, and a rail, so that the composite substrate can be held by the holding assembly to be heated in the heating furnace by horizontal rotation, thereby enabling the composite substrate to be better contacted with oxygen and better heated.
In addition, in the invention, the composite substrate is equivalent to a plate surface structure and clamped on the floating assembly, and when the floating assembly rotates in the heating furnace, the composite substrate is equivalent to a blade to disturb the airflow in the heating furnace, so that the oxygen in the heating furnace is disturbed continuously, and the contact between the oxygen and the composite substrate is facilitated.
Finally, the track of the invention comprises a first guide sliding surface and a second guide sliding surface with height difference, and is matched with the floating assembly, so that the floating assembly can drive the composite substrate to float up and down, the contact effect and the heating effect of the composite substrate and oxygen are further improved, and the height positions of the composite substrate positioned on the first guide sliding surface and the composite substrate positioned on the first guide sliding surface are different, so that when the composite substrate rotates, the composite substrate positioned at a higher position can disturb airflow at a higher position, and the composite substrate positioned at a lower position can disturb airflow at a lower position, so that the airflow disturbance effect is further improved, and the contact of the oxygen and the substrate is facilitated.
Drawings
FIG. 1 is a schematic view of the overall structure of embodiment 2;
FIG. 2 is a schematic view of the internal structure of embodiment 2;
FIG. 3 is a schematic structural view of a floating unit according to embodiment 2;
FIG. 4 is an internal cross-sectional view of the sleeve;
fig. 5 is an exploded view of the movable clamp.
Detailed Description
The technical solutions in the embodiments of the present invention are clearly and completely described below, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Example 1
The embodiment provides a preparation process of artificial diamond, which comprises the following steps:
s1, processing the substrate, specifically as follows:
s11, cleaning and drying the substrate; the material of the substrate may be one or more of silicon, titanium, and tantalum, and is not particularly limited herein.
S12, preparing diamond micropowder slurry, coating the slurry on the surface of the substrate, and drying to obtain a composite substrate; specifically, the diamond micro powder slurry can be placed in a mortar, ethylene glycol is dripped into the mortar for grinding and dispersing, then the ground material is placed in a ball mill for continuous grinding and dispersing, the slurry is taken out after the grinding is finished, then the slurry is coated on a substrate in a spin coating mode, and a diamond micro powder coating is formed after drying, so that the composite substrate compounded with the diamond micro powder coating is obtained.
S13, placing the composite substrate in an oxygen environment, and heating at 600-800 ℃ to obtain a required substrate for later use;
and S2, growing a diamond film on the required substrate by adopting a hot wire chemical vapor deposition method, specifically, growing a nitrogen-doped diamond film on the surface of the required substrate by using a hot wire chemical vapor deposition furnace and using CH4, Ar and NH3 as gas sources, and certainly obtaining an undoped diamond film by using CH4, Ar and H2 as gas sources.
Example 2
Referring to fig. 1 to 5, the present embodiment provides an apparatus for manufacturing a synthetic diamond, which is mainly used for processing a composite substrate to obtain a desired substrate, and includes a heating furnace 1, and a rail 2, a floating assembly, a driving assembly, and a clamping member, which are disposed in the heating furnace 1, wherein the number of the floating assemblies may be 1 or more, and the present embodiment illustrates the case of 4 floating assemblies, and the apparatus is explained in detail below.
As shown in fig. 1, the heating furnace 1 is mainly used for heating a composite substrate in an oxygen environment, and a heating element (not shown in the figure) is arranged in the heating furnace 1, wherein the heating element may be an electric heating element or a microwave heating element, a material inlet and outlet 12 is arranged on the side of the heating furnace 1, a material door 13 for covering the material inlet and outlet 12 is hinged on the material inlet and outlet 12, and the material door 13 is opened for operation during feeding or discharging. When heating, oxygen is introduced into the heating furnace 1, and certainly, protective gas such as nitrogen, argon and the like can be introduced simultaneously while introducing oxygen, and then the charging door 13 is closed to start heating, and when heating, the temperature is set to 600-.
As shown in fig. 2, the track 2 is a circular ring structure, the upper surface of the track includes a first guiding and sliding surface 213 and a second guiding and sliding surface 211, a height difference exists between the first guiding and sliding surface 213 and the second guiding and sliding surface 211 in the vertical direction, specifically, the first guiding and sliding surface 213 and the second guiding and sliding surface 211 are both planar structures, and the first guiding and sliding surface 213 is higher than the second guiding and sliding surface 211.
The first sliding guide surface 213 and the second sliding guide surface are connected to form a circular track surface 21; in order to make the floating assembly switch at the joint of the first guiding and sliding surface 213 and the second guiding and sliding surface 211 more smoothly, in this embodiment, the joint of the first guiding and sliding surface 213 and the second guiding and sliding surface 211 forms a slope or arc-shaped guiding surface 212.
As shown in fig. 2-4, the floating assembly includes a vertically arranged sleeve 31, a floating rod 32 which is arranged on the sleeve 31 and can move along the axial direction of the sleeve 31 and is provided with a roller 33 at the bottom, and an elastic member 34 which is arranged between the floating rod 32 and the sleeve 31 and is used for enabling the floating rod 32 to keep a downward movement trend all the time; the floating rod 32 and the roller 33 can roll along the track of the circular track surface 21, specifically, under the elastic force of the elastic piece 34 and the dead weight of the floating rod 32 and the roller 33, the roller 33 always props against the circular track 2 surface, and when the sleeve 31 rotates, the floating rod 32 drives the roller 33 to roll on the circular track surface 21; when the roller 33 rolls from the second sliding guide surface 211 to the first sliding guide surface 213, the floating rod 32 will move upward against the elastic force of the elastic element 34 until the roller 33 rises to the first sliding guide surface 213, at this time, the floating rod 32 and the roller 33 will rotate on the first sliding guide surface 213 for a certain distance, and then move back to the second sliding guide surface 211 for a certain distance, and the above actions are repeated, so that the floating rod 32 can float up and down while rotating.
As shown in fig. 4, the specific structure of the elastic member 34 is: the elastic member 34 includes a spring 342 and a sliding block 341; a movable cavity is formed in the sleeve 31, the floating rod 32 vertically penetrates through the movable cavity, and the sliding block 341 is fixed on the floating rod 32 and vertically moves in the movable cavity; the spring 342 is located in the movable cavity and sleeved on the floating rod 32, one end of the spring 342 abuts against the upper wall of the sliding block 341, and the other end abuts against the upper wall of the movable cavity, so that downward pressure is applied to the sliding block 341 under the elastic force of the spring 342, and the floating rod 32 keeps a downward movement trend.
Of course, in order to avoid circumferential deflection of the floating rod 32 relative to the sleeve 31, in this embodiment, the sliding block 341 is polygonal, the cross section of the movable cavity is adapted to the shape of the sliding block 341, for example, the sliding block 341 is square, and the cross section of the movable cavity is also square, so that the sliding block 341 can only move up and down but cannot rotate circumferentially under the limitation of the movable cavity, so that the floating rod 32 cannot circumferentially deflect relative to the sleeve 31.
The driving component is connected with the sleeve 31 to drive the sleeve 31 to rotate along the circumferential direction of the circular track surface 21; specifically, the driving assembly includes a rotating shaft 41 rotatably connected in the heating furnace 1 and coaxially disposed with the circular orbit surface 21, and a motor (not shown in the figure) for driving the rotating shaft 41 to rotate, the sleeve 31 is fixed on the rotating shaft 41 through a connecting rod 35, an electrical room 11 is disposed at the bottom of the heating furnace 1, and the motor is installed in the electrical room 11, as shown in fig. 1.
The clamping assembly is disposed on the floating rod 32 for clamping the composite substrate, and the clamping state is shown in fig. 2, where the portion M in fig. 2 is the composite substrate. Specifically, the method comprises the following steps:
the clamping assembly comprises a fixing rod 51 which is fixed on the floating rod 32 through a connecting shaft 36 and is vertically arranged, and the connecting shaft 36 is fixed on the upper portion of the floating rod 32 and is positioned above the sleeve 31.
The bottom of the fixed rod 51 is provided with a fixed clamp 53 for clamping the bottom of the composite substrate and a movable clamp 52 arranged on the fixed rod 51 for clamping the top of the composite substrate, the fixed clamp 53 is kept fixed, the movable clamp 52 can vertically move relative to the fixed rod 51, and thus, the distance between the movable clamp 52 and the fixed clamp 53 can be adjusted to adapt to the clamping requirements of the composite substrates with different lengths (namely heights).
As shown in fig. 3, the fixing clamp 53 has a specific structure that the fixing clamp 53 includes a supporting claw 531 and a fixing bolt 532, the supporting claw 531 is disposed on the fixing rod 51, and the supporting claw 531 is L-shaped and includes two parts disposed on two sides of the fixing rod 51 for supporting and clamping the composite substrate with the fixing bolt 532.
The fixing bolt 532 is in threaded connection with the fixing rod 51, during clamping, the composite substrate is supported on the supporting claw 531, one side of the diamond micro powder coating deviates from one side of the fixing rod 51, then the fixing bolt 532 is rotated to enable the fixing bolt 532 to advance until the end part of the fixing bolt 532 presses the composite substrate onto the supporting claw 531 to be abutted against the supporting claw 531, and thus the bottom of the composite substrate is clamped between the fixing bolt 532 and the supporting claw 531.
Referring to fig. 3 and 5, the movable clamp 52 has the following specific structure: the movable clamp 52 comprises a sliding block 521 and a locking bolt 522, the sliding block 521 is arranged on the fixed rod 51, the sliding block 521 and the fixed rod 51 can slide relatively in the vertical direction, the sliding block 521 and the fixed rod 51 are relatively positioned in the horizontal direction, in short, the sliding block 521 can only slide vertically along the fixed rod 51, specifically: the side walls of the two sides of the fixing rod 51 are provided with vertically arranged sliding grooves 512, the sliding block 521 comprises two sliding parts 5212, and the two sliding parts 5212 are clamped in the sliding grooves 512 and can slide up and down in the sliding grooves 512.
The fixing rod 51 is provided with a plurality of screw holes 511 which are distributed at intervals along the vertical direction, the screw holes 511 penetrate through the fixing rod 51, the sliding block 521 comprises a clamping jaw 5211 and a through hole 5213 for the locking bolt 522 to penetrate through, the clamping jaw 5211 is L-shaped and comprises 2 clamping jaws, the 2 clamping jaws are respectively positioned at two sides of the fixing rod 51 and are used for being matched with the locking bolt 522 to clamp the top of the composite substrate; before clamping, firstly, the height of the sliding block 521 is adjusted according to the height of the composite substrate, and the specific steps are as follows: and (3) screwing down the bolt to enable the bolt to be screwed out of the screw hole 511 of the fixed rod 51, moving the sliding block 521 to the position of the screw hole 511 with the corresponding height according to the height of the composite substrate, and then rotating the bolt to enable the bolt to penetrate into the screw hole 511, wherein at the moment, under the limitation of the bolt, the sliding block 521 is positioned on the fixed rod 51 and cannot move upwards continuously, so that the adjustment is completed.
Then, the clamping is started, the bottom of the composite substrate is clamped by the fixing clamp 53, and then the locking bolt 522 is rotated continuously, so that the inner end of the locking bolt 522 presses the composite substrate, and the composite substrate is pressed against the clamping jaw 5211, so that one surface of the composite substrate is abutted against the clamping jaw 5211, and the other surface of the composite substrate is abutted against the end of the bolt, thereby completing the top clamping.
Therefore, in the present embodiment, the locking bolt 522 has two functions, one of which can be used as a positioning element for the sliding block 521, so that the sliding block 521 can be positioned on the fixing rod 51 after the adjustment is completed; secondly, as a clamping member for clamping the composite substrate, it is used in conjunction with the clamping jaws 5211 to clamp the composite substrate, so that the design is compact, space and work-piece are saved, and the operation is convenient.
The equipment comprises a floating assembly, a driving assembly and a rail 2, so that the composite substrate can be clamped by the clamping assembly to horizontally rotate and heat in the heating furnace 1, and the composite substrate can be better contacted with oxygen and better heated.
In addition, in the invention, the composite substrate is equivalent to a plate surface structure and clamped on the floating assembly, when the floating assembly rotates in the heating furnace 1, the composite substrate is driven to rotate together, and the composite substrate is equivalent to a blade which disturbs airflow in the heating furnace 1, so that oxygen in the heating furnace 1 is constantly disturbed, and the contact between the oxygen and the composite substrate is facilitated.
In addition, the track 2 of the present invention comprises a first guiding sliding surface 213 and a second guiding sliding surface 211 with a height difference, and is matched with a floating component, so that the floating component can drive the composite substrate to float up and down, and the contact effect and the heating effect of the composite substrate and oxygen are further improved.
Moreover, the height position of the composite substrate on the first slide guiding surface 213 is different from that of the composite substrate on the first slide guiding surface 213, so that the composite substrate at the higher position can disturb the air flow at the higher position when the composite substrate rotates, that is, the composite substrate rotating on the first slide guiding surface 213 can disturb the air flow at the higher position.
The lower composite substrate may disturb the lower gas flow, that is, the composite substrate rotating on the second sliding guide surface 211 may disturb the lower gas flow, so as to further improve the gas flow disturbance effect and facilitate the contact between oxygen and the substrate.
It will be evident to those skilled in the art that the invention is not limited to the details of the foregoing illustrative embodiments, and that the present invention may be embodied in other specific forms without departing from the spirit or essential attributes thereof. The present embodiments are therefore to be considered in all respects as illustrative and not restrictive, the scope of the invention being indicated by the appended claims rather than by the foregoing description, and all changes which come within the meaning and range of equivalency of the claims are therefore intended to be embraced therein.

Claims (10)

1. A process for preparing artificial diamond is characterized by comprising the following steps:
s1, processing the substrate, specifically as follows:
s11, cleaning and drying the substrate;
s12, preparing diamond micropowder slurry, coating the slurry on the surface of the substrate, and drying to obtain a composite substrate;
s13, placing the composite substrate in an oxygen environment, and heating at 600-800 ℃ to obtain a required substrate for later use;
and S2, growing the diamond film on the required substrate by adopting a hot wire chemical vapor deposition method.
2. The process of claim 1, wherein the step S2 is carried out by growing a nitrogen-doped diamond film on the surface of a desired substrate using CH4, Ar and NH3 as gas sources.
3. An apparatus for manufacturing a synthetic diamond, which is used in the synthetic diamond manufacturing process according to claim 1 or 2, for processing a composite substrate into a desired substrate, comprising:
the heating furnace is internally provided with a heating element;
the track comprises a first guide sliding surface and a second guide sliding surface, wherein the first guide sliding surface and the second guide sliding surface have a height difference in the vertical direction, and the first guide sliding surface and the second guide sliding surface are connected to form a circular track surface;
the floating assembly comprises a sleeve, a floating rod and an elastic piece, wherein the sleeve is vertically arranged, the floating rod is arranged on the sleeve and can move along the axial direction of the sleeve, and the bottom of the floating rod is provided with a roller; the roller rolls on the circular track surface;
the driving assembly is connected with the sleeve and used for driving the sleeve to rotate along the circumferential direction of the circular track surface;
and the clamping assembly is arranged on the floating rod and used for clamping the composite substrate.
4. The apparatus for preparing artificial diamond according to claim 3, wherein the clamping assembly comprises a fixed rod vertically fixed to the floating rod, a fixed clamp provided at the bottom of the fixed rod for clamping the bottom of the composite substrate, and a movable clamp provided on the fixed rod for clamping the top of the composite substrate, wherein the movable clamp is vertically movable relative to the fixed rod.
5. The apparatus for preparing artificial diamond according to claim 4, wherein the movable jig comprises a sliding block and a locking bolt, the sliding block is disposed on the fixed rod, the sliding block and the fixed rod can slide relative to each other in a vertical direction, and the sliding block and the fixed rod are kept in relative positioning in a horizontal direction; the fixed rod is provided with a plurality of screw holes which are distributed at intervals along the vertical direction, the screw holes penetrate through the fixed rod, and the sliding block comprises a clamping jaw and a through hole for a locking bolt to penetrate through; under the clamping state, the bolt penetrates through the through hole to be in threaded connection with one of the screw holes, one surface of the composite substrate is abutted to the clamping jaw, and the other surface of the composite substrate is abutted to the end part of the bolt.
6. The apparatus as claimed in claim 5, wherein the fixing rod has two side walls formed with vertically disposed sliding grooves, and the sliding block has two sliding portions slidably connected to the two sliding grooves.
7. The apparatus as claimed in claim 4, wherein the fixing jig comprises a supporting claw and a fixing bolt, the supporting claw is disposed on the fixing rod, the fixing bolt is screwed on the fixing rod, the composite substrate is supported on the supporting claw in a clamping state, one surface of the composite substrate is abutted against the supporting claw, and the other surface of the composite substrate is abutted against the end of the fixing bolt.
8. An apparatus for producing artificial diamond according to claim 3, wherein the elastic member includes a spring and a sliding block; a movable cavity is formed in the sleeve, and the sliding block is fixed on the floating rod and vertically moves in the movable cavity; spring one end is contradicted with the sliding block, and the other end is contradicted with the upper wall in activity chamber mutually.
9. An apparatus as claimed in claim 8, wherein the sliding block is polygonal and the cavity has a cross-section adapted to the shape of the sliding block.
10. The apparatus for preparing artificial diamond according to claim 3, wherein the driving assembly includes a rotary shaft rotatably connected in the heating furnace and disposed coaxially with the circular orbit surface, and a motor for driving the rotary shaft to rotate, and the sleeve is fixed to the rotary shaft.
CN202210207787.3A 2022-03-04 2022-03-04 Process and equipment for preparing artificial diamond Active CN114540791B (en)

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