CN114406454B - Air supporting cutting platform - Google Patents
Air supporting cutting platform Download PDFInfo
- Publication number
- CN114406454B CN114406454B CN202210105481.7A CN202210105481A CN114406454B CN 114406454 B CN114406454 B CN 114406454B CN 202210105481 A CN202210105481 A CN 202210105481A CN 114406454 B CN114406454 B CN 114406454B
- Authority
- CN
- China
- Prior art keywords
- air
- air floatation
- plate
- side plate
- marble base
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
- 238000005520 cutting process Methods 0.000 title claims abstract description 18
- 239000004579 marble Substances 0.000 claims abstract description 46
- 230000005291 magnetic effect Effects 0.000 claims abstract description 10
- 230000005484 gravity Effects 0.000 claims abstract description 6
- 239000000696 magnetic material Substances 0.000 claims description 14
- 238000001179 sorption measurement Methods 0.000 claims description 10
- 230000001105 regulatory effect Effects 0.000 claims description 9
- 239000010979 ruby Substances 0.000 claims description 8
- 229910001750 ruby Inorganic materials 0.000 claims description 8
- 239000003302 ferromagnetic material Substances 0.000 claims description 3
- 238000000034 method Methods 0.000 abstract description 10
- 238000009434 installation Methods 0.000 abstract description 6
- 238000004891 communication Methods 0.000 abstract description 4
- 238000012545 processing Methods 0.000 abstract description 3
- BGPVFRJUHWVFKM-UHFFFAOYSA-N N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] Chemical compound N1=C2C=CC=CC2=[N+]([O-])C1(CC1)CCC21N=C1C=CC=CC1=[N+]2[O-] BGPVFRJUHWVFKM-UHFFFAOYSA-N 0.000 description 4
- 239000000872 buffer Substances 0.000 description 4
- 238000003825 pressing Methods 0.000 description 3
- 235000012431 wafers Nutrition 0.000 description 3
- 230000020169 heat generation Effects 0.000 description 2
- 230000007774 longterm Effects 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 230000006978 adaptation Effects 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 238000003754 machining Methods 0.000 description 1
- 238000012423 maintenance Methods 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 210000000056 organ Anatomy 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/08—Devices involving relative movement between laser beam and workpiece
- B23K26/083—Devices involving movement of the workpiece in at least one axial direction
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
- B23K26/38—Removing material by boring or cutting
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/70—Auxiliary operations or equipment
- B23K26/702—Auxiliary equipment
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Plasma & Fusion (AREA)
- Mechanical Engineering (AREA)
- Magnetic Bearings And Hydrostatic Bearings (AREA)
Abstract
The invention discloses an air-float cutting platform, comprising: the marble base, marble base is stretched out to marble base's upper surface, and marble base both sides are provided with crossbeam mount pad and air supporting curb plate, and the crossbeam mount pad constitutes the right angle with the perpendicular installation of air supporting curb plate to cooperate with the marble base. The air floatation side plate is balanced under the action of air floatation force and magnetic force, the beam mounting seat is kept flat and horizontal under the action of gravity force and air floatation force, and the beam mounting seat moves along the marble base under the drive of the Y-axis linear motor, so that the beam mounting seat can stably operate under the combined action of strength and magnetic force, and a processing platform is stable in the hidden cutting process. Through the exhaust air current in the malleation communication pipeline for form the air film between bottom plate and the marble base, hold up the air supporting platform, in the operation process, through cooperation between malleation and the negative pressure, can steady operation.
Description
Technical Field
The invention relates to the technical field of wafer hidden cutting, in particular to an air-float cutting platform.
Background
In the high-precision machining processes such as laser hidden cutting of wafers and laser grooving of low-k films of wafers, the whole motion system is required to have high operation stability, a common guide rail is easy to creep in low-custom operation, heat generation is serious in the high-speed operation process, periodic maintenance is required in long-term operation, friction resistance is high in the operation process, and equipment precision is influenced by multiple factors such as an installation base, a guide rail, a sliding block and a sliding block installation seat. The common guide rail is easy to creep in low-custom operation, serious in heat generation in a high-speed operation process, required to be maintained regularly in long-term operation, high in friction resistance in the operation process, and affected by multiple factors such as an installation base, a guide rail, a sliding block installation seat and the like in equipment precision.
The conventional air bearing adopts a positive pressure and negative pressure mode, a large amount of compressed air is discharged and supported by the positive pressure inlet, the negative pressure attracts the air bearing and the contact surface through the vacuum air cavity, the air bearing stably operates through the interaction of the positive pressure and the negative pressure, excessive resources are wasted due to the adoption of the negative pressure, and fluctuation of the operation of the air bearing is caused due to the unstable pressure of the negative pressure.
Disclosure of Invention
In order to solve the technical problems, the invention provides the air floatation cutting platform which can be stable in the running process and can reduce friction in the hidden cutting process.
The specific scheme is as follows:
an air-float cutting platform comprising: the marble comprises a marble substrate, wherein the upper surface of the marble substrate extends out of a marble base, two sides of the marble base are provided with a beam mounting seat and an air floatation side plate, the beam mounting seat and the air floatation side plate are vertically arranged to form a right angle and are matched with marble Dan Ji, and two sides of the marble base are provided with magnetic materials; the air floatation side plate is provided with a first magnet with the height corresponding to that of the magnetic material, a side plate air floatation flat plate bearing is arranged below the magnet, the upper surface of the beam mounting seat is provided with a beam mounting groove, the bottom of the beam mounting seat is provided with a mounting plate air floatation flat plate bearing, the air floatation side plate is balanced under the action of air floatation force and magnetic force, and the beam mounting seat is balanced between the gravity force and the air floatation force; the beam mounting groove is internally fixed with a beam, and an air floatation carrier is movably mounted on the beam.
The magnetic material is a second magnet having a polarity opposite to that of the magnet.
The magnetic material is a ferromagnetic material.
The side plate air floatation adjusting block is arranged on the air floatation side plate, the distance between the installation side plate and the marble base is changed by rotating a side plate air floatation adjusting block screw arranged on the side plate air floatation adjusting block, the mounting plate air floatation adjusting block is arranged on the beam mounting plate, and the distance between the beam mounting plate and the marble base is changed by rotating a mounting plate air floatation adjusting block screw.
The air floatation carrier comprises: the utility model provides a motor vehicle floor, including the bottom plate, the upper surface both sides of bottom plate all are provided with the curb plate, and the curb plate top of both sides is fixed with DD motor mounting panel, crossbeam sliding connection at the upper surface on floor, all installs the dull and stereotyped bearing of carrier air supporting on the curb plate, and the curb plate outside is provided with the dull and stereotyped bearing of carrier air supporting, and the dull and stereotyped bearing screw in carrier pneumatic through joint of carrier air supporting is provided with the pneumatic tee bend of carrier on the curb plate inner wall, and the curb plate outside sets up the pneumatic L type of carrier and connects, be provided with positive pressure entry and negative pressure entry on the bottom plate.
The bottom of the air floatation carrier is divided into four parts, four corners of each part are provided with compressed air diversion grooves, the compressed air diversion grooves are cross-shaped, the middle part of the cross-shaped part is provided with a ruby nozzle, the rest part of each part is a negative pressure adsorption cavity, and the middle part of the negative pressure adsorption cavity is a negative pressure port.
The side of the bottom plate is provided with a positive pressure communicating pipe orifice and a negative pressure passage orifice which are respectively connected with the ruby nozzle and the negative pressure orifice.
The side plate is provided with a grating window.
The air floatation side plate is balanced under the action of air floatation force and magnetic force, the beam mounting seat is kept flat and horizontal under the action of gravity force and air floatation force, and the beam mounting seat moves along the marble base under the drive of the Y-axis linear motor, so that the beam mounting seat can stably operate under the combined action of strength and magnetic force, and a processing platform is stable in the hidden cutting process. Be provided with a plurality of Y axle buffers on the marble base for the operation of crossbeam mount pad can avoid exceeding the stroke. The air flow exhausted from the positive pressure communication pipeline forms an air film between the bottom plate and the marble base, the air floating carrier is supported, and part of overflowed air enters the vacuum adsorption cavity and is discharged from the negative pressure port. An air film is formed between the air flow exhausted by the air-floating flat plate bearing of the carrier and the cross beam, the air-floating carrier is driven by the X-axis linear motor, and in the operation process, the air-floating carrier can stably operate by matching between positive pressure and negative pressure.
Drawings
FIG. 1 is an air bearing cutting deck;
FIG. 2 is a diagram of the connection between a beam mount and an air bearing side plate;
FIG. 3 is a side view of FIG. 2;
FIG. 4 is a schematic view of the structure of an air bearing table;
FIG. 5 is a part view of the base;
FIG. 6 is a top view of FIG. 5;
fig. 7 is a partial enlarged view of fig. 6 a.
1. The device comprises a marble Dan Ji, a beam mounting seat, a 3, an air floatation side plate, a 4, a magnetic material, a 5, a first magnet, a 6, a carrier air floatation flat plate bearing, a 7, a beam, an 8, a bottom plate, a 9, side plates, a 10, a DD motor mounting plate, a 11, a side plate air floatation regulating block, a 12, a mounting plate air floatation regulating block, a 13, a compressed air diversion groove, a 14, a ruby nozzle, a 15, a negative pressure adsorption cavity, a 16, a negative pressure port, a 17, a mounting plate air floatation flat plate bearing, a 18, a side plate air floatation flat plate bearing, a 19, a positive pressure inlet, a 20 and a negative pressure inlet.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the present invention. It will be apparent to those skilled in the art that the described embodiments are only a part, but not all, of the implementations of the invention, and that all other embodiments, based on which those skilled in the art will come to lie within the scope of the invention without making any inventive effort.
As shown in fig. 1-7. An air-float cutting platform comprising: the marble base body, the upper surface of the marble base body stretches out of the marble base 1, the two sides of the marble base 1 are provided with a beam mounting seat 2 and an air floatation side plate 3, the beam mounting seat 2 and the air floatation side plate 3 are vertically arranged to form a right angle and are matched with the marble base 1, and the two sides of the marble base 1 are provided with magnetic materials 4; the air floatation side plate 3 is provided with a first magnet 5 with the height corresponding to that of the magnetic material 4, a side plate air floatation flat plate bearing 18 is arranged below the first magnet 5, the upper surface of the beam mounting seat 2 is provided with a beam mounting groove, the bottom of the beam mounting seat 2 is provided with a mounting plate air floatation flat plate bearing 17, the air floatation side plate 3 is balanced under the action of air floatation force and magnetic force, and the beam mounting seat 2 is balanced between the gravity force and the air floatation force; the beam 7 is fixed in the beam mounting groove, and an air floatation carrier is movably mounted on the beam 7. The magnetic material 4 comprises a magnet and a ferromagnetic material, attractive force is generated between the magnetic material 4 and the first magnet 5, positive pressure air discharged from the side plate air floatation flat plate bearing 18 is sprayed on the marble base 1, and an air film is generated on the marble base 1, so that the air floatation side plate 3 receives repulsive force far away from the marble base 1 and is balanced with attractive force between the magnetic material 4 and the first magnet 5. The beam mounting seat 2 is driven by a Y-axis linear motor to move along the marble base 1, and the beam mounting seat 2 can stably run under the combined action of strength and magnetic force. The marble base 1 is provided with a plurality of Y-axis buffers so that the operation of the beam mount 2 can be prevented from exceeding the stroke.
The side plate air floatation adjusting block 11 is arranged on the air floatation side plate 3, the distance between the air floatation side plate 3 and the marble base 1 is changed by rotating a side plate air floatation adjusting block screw arranged on the side plate air floatation adjusting block 11, the mounting plate air floatation adjusting block 12 is arranged on the beam mounting seat 2, and the distance between the beam mounting seat 2 and the marble base 1 is changed by rotating a side plate air floatation adjusting block 12 screw arranged on the mounting plate air floatation adjusting block 12. The air floatation carrier comprises: the bottom plate 8, the upper surface both sides of bottom plate 8 all are provided with curb plate 9, and curb plate 9 top of both sides is fixed with DD motor mounting panel 10, and crossbeam 7 sliding connection is at the upper surface of bottom plate 8, all installs carrier air supporting flat-plate bearing 6 on the curb plate 9, and curb plate 9 outside is provided with carrier air supporting flat-plate bearing 6, and carrier air supporting flat-plate bearing 6 screw in carrier pneumatic through connects, is provided with carrier pneumatic three way connection on the curb plate 9 inner wall, and the curb plate 9 outside sets up carrier pneumatic L type and connects, be provided with malleation entry 19 and negative pressure entry 20 on the bottom plate 8. The DD motor mounting plate 10 is provided with a wire pressing groove, and a wire pressing block is arranged on the wire pressing groove.
The bottom of the air floatation carrier is divided into four parts, four corners of each part are provided with compressed air diversion grooves 13, the compressed air diversion grooves 13 are cross-shaped, the middle part of the cross-shaped part is provided with a ruby nozzle 14, the rest part of each part is a negative pressure adsorption cavity 15, and the middle part of the negative pressure adsorption cavity 15 is a negative pressure port 16. The side of the bottom plate 8 is provided with a positive pressure communicating pipe port and a negative pressure passage port which are respectively connected with the ruby nozzle 14 and the negative pressure port 16.
Air enters from the positive pressure inlet 19, is sprayed out from the compressed air diversion trench 1313 through the positive pressure communication pipeline, and is changed into laminar flow from turbulent flow after passing through the ruby nozzle 14, and forms an air film with the marble base 1, so that the air floating carrier is lifted, and part of overflowed air enters the vacuum adsorption cavity and is discharged from the negative pressure port. The air floatation carrier is driven by the X-axis linear motor, and can stably run through cooperation between positive pressure and negative pressure in the running process.
The side plate 9 is provided with a grating window. Be provided with the grating chi on the crossbeam 7, the grating chi can feed back the motion position of air supporting platform, is provided with X axle buffer at the both ends of crossbeam 7, places the air supporting platform in the motion process, prevents to surpass the stroke. Fixed organ covers are arranged at two ends of the cross beam 7, so that the inside is protected and dust can be prevented.
The air floatation side plate 3 is kept balanced under the action of air floatation force and magnetic force, the beam mounting seat 2 is kept flat and horizontal under the action of gravity and air floatation force, the beam mounting seat 2 moves along the marble base 1 under the drive of the Y-axis linear motor, and the beam mounting seat 2 can stably run under the combined action of strength and magnetic force, so that a processing platform is stable in the hidden cutting process. The marble base 1 is provided with a plurality of Y-axis buffers so that the operation of the beam mount 2 can be prevented from exceeding the stroke. The air flow discharged from the positive pressure communication pipeline forms an air film between the bottom plate 8 and the marble base 1, the air floating carrier is supported, and part of overflowed air enters the vacuum adsorption cavity and is discharged from the negative pressure port. An air film is formed between the air flow exhausted by the carrier air-float flat plate bearing 6 and the cross beam, the air-float carrier is driven by the X-axis linear motor, and in the operation process, the air-float carrier can stably operate by matching between positive pressure and negative pressure.
The technical means disclosed by the scheme of the invention is not limited to the technical means disclosed by the embodiment, and also comprises the technical scheme formed by any combination of the technical features. It should be noted that modifications and adaptations to the invention may occur to one skilled in the art without departing from the principles of the present invention and are intended to be within the scope of the present invention.
Claims (4)
1. An air-float cutting platform comprising: the marble base is characterized in that the upper surface of the marble base extends out of a marble base, a beam mounting seat and an air floatation side plate are arranged on two sides of the marble base, the beam mounting seat and the air floatation side plate are vertically arranged to form a right angle and are matched with marble Dan Ji, and magnetic materials are arranged on two sides of the marble base; the air floatation side plate is provided with a first magnet with the height corresponding to that of the magnetic material, a side plate air floatation flat plate bearing is arranged below the first magnet, the upper surface of the beam mounting seat is provided with a beam mounting groove, the bottom of the beam mounting seat is provided with a mounting plate air floatation flat plate bearing, the air floatation side plate is balanced under the action of air floatation force and magnetic force, and the beam mounting seat is balanced under the action of gravity and air floatation force; a beam is fixed in the beam mounting groove, and an air floatation carrier is movably mounted on the beam; the device comprises a beam mounting plate, a beam mounting plate and a marble base, wherein a side plate air floatation regulating block is arranged on the air floatation side plate, the side plate air floatation regulating block changes the distance between the mounting plate and the marble base by rotating a side plate air floatation regulating block screw positioned on the side plate air floatation regulating block, and the beam mounting plate is provided with a mounting plate air floatation regulating block which changes the distance between the beam mounting plate and the marble base by rotating a side plate air floatation regulating block screw positioned on the mounting plate air floatation regulating block; the air floatation carrier comprises: the device comprises a bottom plate, wherein two sides of the upper surface of the bottom plate are respectively provided with a side plate, DD motor mounting plates are fixed at the tops of the side plates at two sides, a cross beam is slidably connected to the upper surface of the bottom plate, a carrier air-float flat plate bearing is arranged on each side plate, a carrier air-float flat plate bearing is arranged outside each side plate, a carrier air-float flat plate bearing is screwed into a carrier pneumatic straight-through joint, a carrier pneumatic three-way joint is arranged on the inner wall of each side plate, a carrier pneumatic L-shaped joint is arranged outside each side plate, and a positive pressure inlet and a negative pressure inlet are arranged on the bottom plate; the bottom of the air floatation carrier is divided into four parts, four corners of each part are provided with compressed air diversion grooves, the compressed air diversion grooves are cross-shaped, the middle part of the cross-shaped part is provided with a ruby nozzle, the rest part of each part is a negative pressure adsorption cavity, and the middle part of the negative pressure adsorption cavity is a negative pressure port; the side of the bottom plate is provided with a positive pressure communicating pipe orifice and a negative pressure passage orifice which are respectively connected with the ruby nozzle and the negative pressure orifice.
2. An air bearing cutting platform according to claim 1 wherein the magnetic material is a second magnet of opposite polarity to the magnet.
3. The air bearing cutting deck of claim 1, wherein said magnetic material is a ferromagnetic material.
4. An air-floating cutting platform as claimed in claim 1, wherein the side plates are provided with grating windows.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210105481.7A CN114406454B (en) | 2022-01-28 | 2022-01-28 | Air supporting cutting platform |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202210105481.7A CN114406454B (en) | 2022-01-28 | 2022-01-28 | Air supporting cutting platform |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN114406454A CN114406454A (en) | 2022-04-29 |
| CN114406454B true CN114406454B (en) | 2024-02-13 |
Family
ID=81279635
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202210105481.7A Active CN114406454B (en) | 2022-01-28 | 2022-01-28 | Air supporting cutting platform |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN114406454B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117074739B (en) * | 2023-10-18 | 2024-01-30 | 盛吉盛(宁波)半导体科技有限公司 | Air floatation movement device for wafer detection |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102528472A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Vertical axis macro and micro motion composite liner motion platform device |
| CN205438489U (en) * | 2015-11-30 | 2016-08-10 | 中国计量科学研究院 | Accurate air supporting displacement platform |
| CN110729230A (en) * | 2019-10-28 | 2020-01-24 | 无锡地心科技有限公司 | Ultra-high precision planar air-floatation workpiece table |
| CN111900896A (en) * | 2020-09-11 | 2020-11-06 | 复旦大学 | Air-float motion platform |
| CN214591001U (en) * | 2021-08-11 | 2021-11-02 | 北京瑞邦精控科技有限公司 | Large-load precise air-floatation linear platform |
-
2022
- 2022-01-28 CN CN202210105481.7A patent/CN114406454B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102528472A (en) * | 2012-03-05 | 2012-07-04 | 广东工业大学 | Vertical axis macro and micro motion composite liner motion platform device |
| CN205438489U (en) * | 2015-11-30 | 2016-08-10 | 中国计量科学研究院 | Accurate air supporting displacement platform |
| CN110729230A (en) * | 2019-10-28 | 2020-01-24 | 无锡地心科技有限公司 | Ultra-high precision planar air-floatation workpiece table |
| CN111900896A (en) * | 2020-09-11 | 2020-11-06 | 复旦大学 | Air-float motion platform |
| CN214591001U (en) * | 2021-08-11 | 2021-11-02 | 北京瑞邦精控科技有限公司 | Large-load precise air-floatation linear platform |
Also Published As
| Publication number | Publication date |
|---|---|
| CN114406454A (en) | 2022-04-29 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103592824B (en) | Two-degree-of-freedom high-precision large-stroke air-flotation workpiece table | |
| CN114512430A (en) | Air floatation carrying platform | |
| CN114406454B (en) | Air supporting cutting platform | |
| CN101118377B (en) | Air pressure semi-suspending two freedom degree common basal surface movement workstation | |
| CN107633868B (en) | A kind of two degrees of freedom air bearing motion platform | |
| CN101533226B (en) | Leveling and focusing mechanism and microstage and workpiece stage using same | |
| CN104362228B (en) | The high-accuracy motion platform of marble | |
| CN112355990B (en) | XY motion platform and telecontrol equipment | |
| CN102501224B (en) | A kind of planar maglev linear-motion platform | |
| CN113305453A (en) | High-precision semiconductor frame cutting device and method thereof | |
| CN114709998A (en) | Linear motion platform | |
| CN216199849U (en) | Double-layer air floatation movement device | |
| CN110729230B (en) | Ultra-high precision planar air-floatation workpiece table | |
| CN218440247U (en) | Air-float track device | |
| CN111230689A (en) | Double-gantry dicing saw with symmetrical YZ plane | |
| CN112830256B (en) | Elastic pressure stabilizing device of sheet air bearing system | |
| CN114412921A (en) | Air-float track device | |
| CN215509510U (en) | Small-size solar cell substrate laser cutting machine | |
| CN211540826U (en) | Multi-direction floating combined structure main shaft | |
| CN210451783U (en) | Air supporting guide rail of rhombus configuration | |
| KR200425185Y1 (en) | The linear stage using of a porous air bearing | |
| CN220993180U (en) | Working platform | |
| CN211495039U (en) | A carrier for fixing panel | |
| CN216502945U (en) | Integrated laser micromachining platform based on scanning rotating mirror | |
| CN117325333B (en) | Dicing equipment for semiconductor wafer |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CP03 | Change of name, title or address |
Address after: 214400, 1st to 2nd floors, Building 3, Xiakewan Chuangzhi Park, No. 215 Qingtong Road, Qingyang Town, Jiangyin City, Wuxi City, Jiangsu Province Patentee after: Jiangsu General Semiconductor Co.,Ltd. Country or region after: China Address before: No.a130-10, 1st floor, No.2 entrepreneurship center, No.96 Ruida Road, high tech Industrial Development Zone, Zhengzhou City, Henan Province, 450001 Patentee before: Henan general intelligent equipment Co.,Ltd. Country or region before: China |
|
| CP03 | Change of name, title or address |